JP5885904B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5885904B2 JP5885904B2 JP2009184237A JP2009184237A JP5885904B2 JP 5885904 B2 JP5885904 B2 JP 5885904B2 JP 2009184237 A JP2009184237 A JP 2009184237A JP 2009184237 A JP2009184237 A JP 2009184237A JP 5885904 B2 JP5885904 B2 JP 5885904B2
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- 239000004065 semiconductor Substances 0.000 title claims description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000007789 gas Substances 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 54
- 238000012545 processing Methods 0.000 claims description 51
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 50
- 229910052710 silicon Inorganic materials 0.000 claims description 50
- 239000010703 silicon Substances 0.000 claims description 50
- 239000004020 conductor Substances 0.000 claims description 21
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 18
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 18
- 238000001039 wet etching Methods 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 15
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 14
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000005121 nitriding Methods 0.000 claims description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 4
- 229910017604 nitric acid Inorganic materials 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 238000007790 scraping Methods 0.000 claims 1
- 230000008569 process Effects 0.000 description 38
- 229910004298 SiO 2 Inorganic materials 0.000 description 15
- 239000000243 solution Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000006722 reduction reaction Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 229910008051 Si-OH Inorganic materials 0.000 description 3
- 229910006358 Si—OH Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 230000006355 external stress Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 241000724291 Tobacco streak virus Species 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004060 metabolic process Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Chemical Vapour Deposition (AREA)
Description
圧力=350mTorr
処理ガス:TEOS/O2/Ar=5:20:75(流量比)
マイクロ波パワー=3.5kW
処理時間=60sec
Claims (3)
- 半導体基板にそのデバイス形成面側から所望の深さで穴を開ける第1の工程と、
前記穴の内壁に、TEOSを含む処理ガスを用い、プラズマの生成にラジアルラインスロットアンテナを用いてマイクロ波放電を利用するマイクロ波励起プラズマCVD法によりシリコン酸化膜を形成する第2の工程と、
前記穴の内壁に形成されたシリコン酸化膜を、処理ガスとして不活性ガスとNH3ガスもしくはN2ガスとを含む混合ガスを用い、マイクロ波放電にラジアルラインスロットアンテナを用いるマイクロ波励起プラズマ窒化法により窒化してシリコン窒化酸化膜とする第3の工程と、
前記穴に導体を埋め込む第4の工程と、
20〜30重量%のフッ酸と40〜20重量%の硝酸と5〜15重量%の酢酸とを含有するエッチング液を用いてエッチング速度を30μm/min以上とするウエットエッチングにより、前記半導体基板の裏面を前記導体が露出するまで削る第5の工程と
を有する半導体装置の製造方法。 - 前記シリコン酸化膜の成膜温度を350℃以下とする、請求項1に記載の半導体装置の製造方法。
- 前記第3の工程と前記第4の工程との間で、前記シリコン窒化酸化膜の上に拡散防止膜を形成する第6の工程を有する、請求項1または請求項2記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009184237A JP5885904B2 (ja) | 2009-08-07 | 2009-08-07 | 半導体装置の製造方法 |
PCT/JP2010/004937 WO2011016242A1 (ja) | 2009-08-07 | 2010-08-05 | 半導体装置及びその製造方法 |
TW099126181A TWI512890B (zh) | 2009-08-07 | 2010-08-06 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009184237A JP5885904B2 (ja) | 2009-08-07 | 2009-08-07 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011040457A JP2011040457A (ja) | 2011-02-24 |
JP5885904B2 true JP5885904B2 (ja) | 2016-03-16 |
Family
ID=43544151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009184237A Expired - Fee Related JP5885904B2 (ja) | 2009-08-07 | 2009-08-07 | 半導体装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5885904B2 (ja) |
TW (1) | TWI512890B (ja) |
WO (1) | WO2011016242A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI449152B (zh) | 2011-12-21 | 2014-08-11 | Ind Tech Res Inst | 半導體元件堆疊結構 |
JP2013171862A (ja) * | 2012-02-17 | 2013-09-02 | Tokyo Electron Ltd | 金属ペースト充填方法及び金属ペースト充填装置及びビアプラグ作製方法 |
CN103624978A (zh) | 2012-08-24 | 2014-03-12 | 澳加光学有限公司 | 用于眼镜的复合热塑性塑料板材、装饰部件及其制备方法 |
KR102110247B1 (ko) | 2013-11-29 | 2020-05-13 | 삼성전자주식회사 | 관통전극을 갖는 반도체 소자 및 그 제조방법 |
TWI611507B (zh) * | 2014-10-23 | 2018-01-11 | Acm Res Shanghai Inc | 矽通孔背面露頭的方法和裝置 |
US10354910B2 (en) * | 2016-05-27 | 2019-07-16 | Raytheon Company | Foundry-agnostic post-processing method for a wafer |
JP6808460B2 (ja) | 2016-11-29 | 2021-01-06 | キヤノン株式会社 | 半導体装置及びその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS607148A (ja) * | 1983-06-24 | 1985-01-14 | Nec Corp | 半導体装置の製造方法 |
JPH11145138A (ja) * | 1997-11-10 | 1999-05-28 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP3567377B2 (ja) * | 2002-01-09 | 2004-09-22 | 独立行政法人 科学技術振興機構 | 半導体集積回路装置の製造方法 |
TWI239629B (en) * | 2003-03-17 | 2005-09-11 | Seiko Epson Corp | Method of manufacturing semiconductor device, semiconductor device, circuit substrate and electronic apparatus |
JP3646720B2 (ja) * | 2003-06-19 | 2005-05-11 | セイコーエプソン株式会社 | 半導体装置及びその製造方法、回路基板並びに電子機器 |
JPWO2006080337A1 (ja) * | 2005-01-31 | 2008-06-19 | 日本電気株式会社 | 半導体装置およびその製造方法と、積層型半導体集積回路 |
JP4737386B2 (ja) * | 2005-03-31 | 2011-07-27 | 日本ゼオン株式会社 | 電子機器用回路基板の製造方法、電子機器用回路基板、および表示装置 |
JP2008124424A (ja) * | 2006-10-16 | 2008-05-29 | Tokyo Electron Ltd | プラズマ成膜装置及びプラズマ成膜方法 |
KR101117150B1 (ko) * | 2007-06-11 | 2012-03-13 | 고쿠리츠다이가쿠호진 도호쿠다이가쿠 | 플라즈마 처리 장치 및 처리 방법 |
-
2009
- 2009-08-07 JP JP2009184237A patent/JP5885904B2/ja not_active Expired - Fee Related
-
2010
- 2010-08-05 WO PCT/JP2010/004937 patent/WO2011016242A1/ja active Application Filing
- 2010-08-06 TW TW099126181A patent/TWI512890B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2011016242A1 (ja) | 2011-02-10 |
JP2011040457A (ja) | 2011-02-24 |
TWI512890B (zh) | 2015-12-11 |
TW201120995A (en) | 2011-06-16 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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