JP5882573B2 - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
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- JP5882573B2 JP5882573B2 JP2010259239A JP2010259239A JP5882573B2 JP 5882573 B2 JP5882573 B2 JP 5882573B2 JP 2010259239 A JP2010259239 A JP 2010259239A JP 2010259239 A JP2010259239 A JP 2010259239A JP 5882573 B2 JP5882573 B2 JP 5882573B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000000758 substrate Substances 0.000 claims description 103
- 238000000034 method Methods 0.000 claims description 43
- 239000012535 impurity Substances 0.000 claims description 39
- 238000001020 plasma etching Methods 0.000 claims description 15
- 238000005530 etching Methods 0.000 description 28
- 238000001312 dry etching Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 7
- 229910052698 phosphorus Inorganic materials 0.000 description 7
- 239000011574 phosphorus Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000001039 wet etching Methods 0.000 description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002003 electrode paste Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910006367 Si—P Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Photovoltaic Devices (AREA)
Description
Claims (5)
- 第1導電型の基板の面に複数の突出部を有するテクスチャリング表面を反応性イオン蝕刻法(RIE)を用いて形成する段階と、
前記基板に不純物をドーピングして前記第1導電型と反対である第2導電型のエミッター層を形成する段階と、
前記エミッター層の形成段階において前記エミッター層の一部に形成されたデッドレーヤー(dead layer)を反応性イオン蝕刻法を利用し除去してエミッター部を形成する段階と、
前記エミッター部上に反射防止膜を形成する段階と、
前記エミッター部と接続される第1電極と前記基板と接続される第2電極を形成する段階と、
を含み、
前記テクスチャリング表面を形成する段階と前記デッドレーヤーを除去するエミッター部の形成段階で用いられる工程ガスはSF6とCl2の混合ガスで互いに同様であり、
前記デッドレーヤーを除去するエミッター部の形成段階で前記反応性イオン蝕刻法を用いる時印加する電力の大きさは前記テクスチャリング表面を形成する段階において前記反応性イオン蝕刻法を用いる時印加する電力の大きさより小さく300W/m 2 〜600W/m 2 である、太陽電池の製造方法。 - 前記複数の突出部それぞれの縦横比は1.0乃至1.5である、請求項1記載の太陽電池の製造方法。
- 前記エミッター層は50乃至100Ω/sqの面抵抗を有する、請求項1記載の太陽電池の製造方法。
- 前記エミッター部は約70乃至120Ω/sqの面抵抗を有する、請求項1記載の太陽電池の製造方法。
- 前記エミッター層の一部除去段階は前記複数の突出部それぞれの表面から同一である厚さをとり除いて、前記複数の突出部それぞれの表面は前記複数の突出部それぞれの頂部分と谷部分の間に位置する、請求項1記載の太陽電池の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100034323A KR100990108B1 (ko) | 2010-04-14 | 2010-04-14 | 태양 전지 및 그 제조 방법 |
KR10-2010-0034323 | 2010-04-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011222951A JP2011222951A (ja) | 2011-11-04 |
JP5882573B2 true JP5882573B2 (ja) | 2016-03-09 |
Family
ID=43135869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010259239A Expired - Fee Related JP5882573B2 (ja) | 2010-04-14 | 2010-11-19 | 太陽電池及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110253210A1 (ja) |
JP (1) | JP5882573B2 (ja) |
KR (1) | KR100990108B1 (ja) |
WO (1) | WO2011129503A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101668402B1 (ko) * | 2011-03-30 | 2016-10-28 | 한화케미칼 주식회사 | 태양 전지 제조 방법 |
CN102760788A (zh) * | 2011-04-26 | 2012-10-31 | 茂迪股份有限公司 | 太阳能电池的制造方法 |
CN102956742B (zh) * | 2011-08-24 | 2015-04-22 | 茂迪股份有限公司 | 太阳能电池的制造方法 |
KR101860919B1 (ko) | 2011-12-16 | 2018-06-29 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
US9202965B2 (en) | 2011-12-16 | 2015-12-01 | Jusung Engineering Co., Ltd. | Method for manufacturing solar cell |
KR20130096822A (ko) * | 2012-02-23 | 2013-09-02 | 엘지전자 주식회사 | 태양 전지 및 그 제조 방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11307792A (ja) * | 1998-04-27 | 1999-11-05 | Kyocera Corp | 太陽電池素子 |
JP2003158275A (ja) * | 2001-11-21 | 2003-05-30 | Sharp Corp | 光電変換素子およびその製造方法 |
KR20030081662A (ko) * | 2002-04-12 | 2003-10-22 | 삼성에스디아이 주식회사 | 이중층 반사방지막이 형성된 태양전지 |
US8257998B2 (en) * | 2007-02-15 | 2012-09-04 | Massachusetts Institute Of Technology | Solar cells with textured surfaces |
JP4974756B2 (ja) * | 2007-05-09 | 2012-07-11 | 三菱電機株式会社 | 太陽電池素子の製造方法 |
KR20090123275A (ko) * | 2008-05-27 | 2009-12-02 | 주식회사 효성 | 태양전지 및 그의 제조방법 |
KR20100004193A (ko) * | 2008-07-03 | 2010-01-13 | 주성엔지니어링(주) | 기판형 태양전지의 제조방법 |
WO2010027232A2 (ko) * | 2008-09-05 | 2010-03-11 | 주식회사 엘지화학 | 페이스트 및 이를 이용한 태양전지의 제조방법 |
-
2010
- 2010-04-14 KR KR1020100034323A patent/KR100990108B1/ko active IP Right Grant
- 2010-10-06 US US12/899,274 patent/US20110253210A1/en not_active Abandoned
- 2010-10-14 WO PCT/KR2010/007048 patent/WO2011129503A1/en active Application Filing
- 2010-11-19 JP JP2010259239A patent/JP5882573B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20110253210A1 (en) | 2011-10-20 |
JP2011222951A (ja) | 2011-11-04 |
KR100990108B1 (ko) | 2010-10-29 |
WO2011129503A1 (en) | 2011-10-20 |
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