JP5866940B2 - Magnetic sensor device and magnetic measuring device - Google Patents

Magnetic sensor device and magnetic measuring device Download PDF

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JP5866940B2
JP5866940B2 JP2011220726A JP2011220726A JP5866940B2 JP 5866940 B2 JP5866940 B2 JP 5866940B2 JP 2011220726 A JP2011220726 A JP 2011220726A JP 2011220726 A JP2011220726 A JP 2011220726A JP 5866940 B2 JP5866940 B2 JP 5866940B2
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高橋　智
智 高橋
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Seiko Epson Corp
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本発明は、磁気センサー装置及び磁気計測装置に関する。   The present invention relates to a magnetic sensor device and a magnetic measurement device.

生体の心臓等から発せられる磁場を検出する磁気計測装置等において、光ポンピングを利用した磁気センサーが利用されている。このような磁気センサーにおいては、所定の原子が封入された各セルに対して円偏光成分を有するポンプ光と直線偏光成分を有するプローブ光とを直交するように照射し、各セルにおける生体から発する磁場をプローブ光によって検出する。下記特許文献１には、そのような光ポンピング原子磁力計が開示されている。また、他の検出方法として、ポンプ光を兼ねた直線偏光成分を有するプローブ光をセルに照射し、アライメントされて歳差運動を行っている原子を透過したプローブ光の偏光面の角度を検出することでセルにおける磁場の検出を行う非線形磁気光学効果による方法がある。   A magnetic sensor using optical pumping is used in a magnetic measurement device that detects a magnetic field emitted from a living heart or the like. In such a magnetic sensor, each cell in which predetermined atoms are enclosed is irradiated with pump light having a circularly polarized component and probe light having a linearly polarized component so as to be orthogonal to each other, and emitted from a living body in each cell. The magnetic field is detected by probe light. Patent Document 1 below discloses such an optical pumping atomic magnetometer. As another detection method, probe light having a linearly polarized light component that also serves as pump light is irradiated to the cell, and the angle of the polarization plane of the probe light that has passed through the aligned and precessing atoms is detected. Thus, there is a method based on a non-linear magneto-optical effect for detecting a magnetic field in a cell.

特開２００９−２３６５９９号公報JP 2009-236599 A

ところで、上記光ポンピング方式と非線形磁気光学効果による方式のいずれの方法を用いても、セルの数だけプローブ光を入射させて検出する構成が必要となるため、例えば、図８に示すように、プローブ光の入射と検出の構成とを磁場の発生源５０から離れた一箇所に集中させる構成が考えられる。図８に示す構成では、光源６０から円偏光のポンプ光（破線）をセル７２に照射すると共に、光源７０からビームスプリッター７１を介して直線偏光のプローブ光（二点鎖線）をセル７２に照射する。セル７２に照射されたプローブ光は、セル７２の底面側に設置された反射板７３によって反射されてセル７２の内部に再び入射し、セル７２を透過した後、ビームスプリッター７１によって偏光ビームスプリッター７４に導かれ、偏光ビームスプリッター７４でＰ波成分とＳ波成分とに分離されて受光部７５、７６に受光される。このように構成した場合でも、磁場を広範囲に測定するために多数のセルを配置すると図８に示した構成がセルの数だけ必要となり、装置規模が大きくなると共に消費電力が増大する。また、１つの光源から各セル７２に対してプローブ光を照射する構成として、例えば、光ファイバーや石英などの導波路を用いてセルの数だけプローブ光を分岐させる方法がある。しかし、光ファイバーや導波路を用いてプローブ光を単に分岐させるだけの構成では反射光の光路において偏光状態が保持されないため、反射光の光路の構成を別途構築しなければならない。
本発明は、複数のセルを配列して検体からの磁場を計測する際の装置構成を小型化しつつ、磁場の測定精度を向上させる技術を提供する。 By the way, since any configuration of the above-described optical pumping method and the method based on the nonlinear magneto-optic effect is used, a configuration in which probe light is incident and detected by the number of cells is required. For example, as shown in FIG. A configuration is conceivable in which the probe light incidence and detection configuration are concentrated at one location away from the magnetic field generation source 50. In the configuration shown in FIG. 8, circularly polarized pump light (broken line) is irradiated from the light source 60 to the cell 72, and linearly polarized probe light (two-dot chain line) is irradiated from the light source 70 through the beam splitter 71. To do. The probe light applied to the cell 72 is reflected by the reflecting plate 73 installed on the bottom surface side of the cell 72, enters the cell 72 again, passes through the cell 72, and then passes through the cell 72, and then is polarized by the beam splitter 71. Is separated into a P-wave component and an S-wave component by the polarization beam splitter 74 and received by the light receiving portions 75 and 76. Even in such a configuration, if a large number of cells are arranged in order to measure a magnetic field over a wide range, the configuration shown in FIG. 8 is required by the number of cells, which increases the device scale and power consumption. Further, as a configuration in which probe light is irradiated to each cell 72 from one light source, for example, there is a method of branching probe light by the number of cells using a waveguide such as an optical fiber or quartz. However, in the configuration in which the probe light is simply branched using an optical fiber or a waveguide, the polarization state is not maintained in the optical path of the reflected light. Therefore, the configuration of the optical path of the reflected light must be separately constructed.
The present invention provides a technique for improving the measurement accuracy of a magnetic field while downsizing the apparatus configuration when measuring a magnetic field from a specimen by arranging a plurality of cells.

本発明に係る磁気センサー装置は、アルカリ金属原子を収容した複数のセルと、直線偏光成分を有する光を入射光として出射する出射部と、前記出射部から出射された入射光の偏光面の角度を保持した状態で、前記複数のセルが配置された範囲の大きさに相当する光束径の前記入射光を出射させる第１光学系を有する第１光学機構と、前記複数のセルに各々対応して設けられ、前記第１光学機構から入射した前記入射光の偏光面の角度を保持した状態で、入射時の光束径より小さい光束径の前記入射光を対応する前記セルに出射させる第２光学系を有する第２光学機構と、前記第２光学機構から前記セルの各々に対して入射し、当該セルを透過した前記入射光を当該セルに向けて反射させる反射部と、前記反射部によって反射されて前記各セルを透過し、前記入射光の入射方向とは反対方向から前記第２光学機構と前記第１光学機構とを通過した当該入射光の反射光の第１偏光成分と第２偏光成分とに分離し、各成分の受光量を示す受光情報を出力する受光部とを備えることを特徴とする。この構成によれば、複数のセルを配列して検体からの磁場を計測する際の装置構成を小型化しつつ、磁場の測定精度を向上させることができる。   A magnetic sensor device according to the present invention includes a plurality of cells containing alkali metal atoms, an emission unit that emits light having a linearly polarized light component as incident light, and an angle of a polarization plane of incident light emitted from the emission unit A first optical mechanism having a first optical system for emitting the incident light having a light beam diameter corresponding to the size of the range in which the plurality of cells are disposed, and corresponding to each of the plurality of cells. A second optical system configured to emit the incident light having a light beam diameter smaller than the light beam diameter at the time of incidence to the corresponding cell while maintaining an angle of a polarization plane of the incident light incident from the first optical mechanism. A second optical mechanism having a system, a reflecting portion that is incident on each of the cells from the second optical mechanism and reflects the incident light transmitted through the cell toward the cell, and is reflected by the reflecting portion Each Is separated into a first polarization component and a second polarization component of the reflected light of the incident light that has passed through the second optical mechanism and the first optical mechanism from a direction opposite to the incident direction of the incident light. And a light receiving unit that outputs light reception information indicating the amount of light received by each component. According to this configuration, it is possible to improve the measurement accuracy of the magnetic field while downsizing the apparatus configuration when measuring the magnetic field from the specimen by arranging a plurality of cells.

また、本発明に係る磁気センサー装置は、上記磁気計測装置において、前記第２光学機構を収容する筐体の上面及び底面は、光を透過させる透過領域と光を透過させない非透過領域とを有し、前記透過領域は、前記第２光学系が配置された部分に対応し、前記非透過領域は、前記第２光学系が配置されていない部分に対応することとしてもよい。この構成によれば、第２光学系以外の部分で乱反射した光が受光されないようにすることができる。   In the magnetic sensor device according to the present invention, the top surface and the bottom surface of the housing that houses the second optical mechanism in the magnetic measurement device have a transmission region that transmits light and a non-transmission region that does not transmit light. The transmissive region may correspond to a portion where the second optical system is disposed, and the non-transmissive region may correspond to a portion where the second optical system is not disposed. According to this configuration, it is possible to prevent the light irregularly reflected by portions other than the second optical system from being received.

また、本発明に係る磁気センサー装置は、上記磁気計測装置において、前記第２光学系を出射した前記入射光を偏光面の角度を保持した状態で伝送する伝送媒体によって前記複数のセルと前記第２光学系とが接続され、前記伝送媒体から出射された前記入射光の平行光を対応する前記セルに出射させる第３光学系を有することとしてもよい。この構成によれば、複数のセルを配置する際の自由度を向上させることができる。   In the magnetic sensor device according to the present invention, in the magnetic measurement device, the plurality of cells and the first cell are transmitted by a transmission medium that transmits the incident light emitted from the second optical system while maintaining an angle of a polarization plane. Two optical systems may be connected, and a third optical system that emits parallel light of the incident light emitted from the transmission medium to the corresponding cell may be provided. According to this configuration, the degree of freedom when arranging a plurality of cells can be improved.

また、本発明に係る磁気センサー装置は、上記磁気計測装置において、前記第３光学系は、入射時の光束径より小さい光束径の前記入射光を出射させることとしてもよい。この構成によれば、より高い強度の光をセルに照射することができる。   In the magnetic sensor device according to the present invention, in the magnetic measurement device, the third optical system may emit the incident light having a light beam diameter smaller than a light beam diameter at the time of incidence. According to this configuration, the cell can be irradiated with higher intensity light.

また、本発明に係る磁気計測装置は、上記いずれかに記載の磁気センサー装置と、前記磁気センサー装置から出力された受光情報に基づいて、前記複数のセルの位置における磁気を検出する検出部とを備えることを特徴とする。この構成によれば、複数のセルを配列して検体からの磁場を計測する際の装置構成を小型化しつつ、磁場の測定精度を向上させることができる。   A magnetic measurement device according to the present invention includes any one of the magnetic sensor devices described above, and a detection unit that detects magnetism at the positions of the plurality of cells based on light reception information output from the magnetic sensor device. It is characterized by providing. According to this configuration, it is possible to improve the measurement accuracy of the magnetic field while downsizing the apparatus configuration when measuring the magnetic field from the specimen by arranging a plurality of cells.

実施形態に係る磁気計測装置の構成を表す図である。It is a figure showing the structure of the magnetic measuring device which concerns on embodiment. （ａ）は、実施形態に係る第１光学機構と第２光学機構とを表す図である。（ｂ）及び（ｃ）は、第２光学機構の上面と底面とを表す図である。(A) is a figure showing the 1st optical mechanism and 2nd optical mechanism which concern on embodiment. (B) And (c) is a figure showing the upper surface and bottom face of a 2nd optical mechanism. 実施形態に係る第２光学部材を表す図である。It is a figure showing the 2nd optical member concerning an embodiment. 実施形態に係る第２光学系とセルとの位置関係を表す図である。It is a figure showing the positional relationship of the 2nd optical system which concerns on embodiment, and a cell. （ａ）は、実施形態に係るセンサー機構の断面図である。（ｂ）は、実施形態に係るセルを表す図である。(A) is sectional drawing of the sensor mechanism which concerns on embodiment. (B) is a figure showing the cell which concerns on embodiment. 変形例（１）に係る磁気計測装置の構成例を表す図である。It is a figure showing the structural example of the magnetic measuring device which concerns on a modification (1). （ａ）は、変形例（２）に係る磁気計測装置の構成を表す図である。（ｂ）は、変形例（２）におけるポンプ光照射部とセルとの位置関係を示す図である。(A) is a figure showing the structure of the magnetic measuring device which concerns on a modification (2). (B) is a figure which shows the positional relationship of the pump light irradiation part and cell in a modification (2). 従来における磁気検出装置の構成例を示す図である。It is a figure which shows the structural example of the conventional magnetic detection apparatus.

（構成）
図１は、本発明に係る実施形態の磁気計測装置の構成例を表す模式図である。磁気計測装置１は、磁気センサー装置としての、レーザー発振装置１０、伝送媒体Ｆ１、ビームエクスパンダー１１、偏光子１２、ビームスプリッター１３、第１光学機構１４、第２光学機構１５、センサー機構１６、偏光ビームスプリッター１８、Ｓ波検出用フォトディテクター１９、及びＰ波検出用フォトディテクター２０と、検出部としての信号処理装置２１とを有する。 (Constitution)
FIG. 1 is a schematic diagram illustrating a configuration example of a magnetic measurement device according to an embodiment of the present invention. The magnetic measuring device 1 includes a laser oscillation device 10, a transmission medium F1, a beam expander 11, a polarizer 12, a beam splitter 13, a first optical mechanism 14, a second optical mechanism 15, a sensor mechanism 16, as a magnetic sensor device. It has a polarization beam splitter 18, an S-wave detection photo detector 19, a P-wave detection photo detector 20, and a signal processing device 21 as a detection unit.

レーザー発振装置１０は、無偏光成分を有するレーザー光を伝送媒体Ｆ１に出射する。伝送媒体Ｆ１は、光ファイバーで構成され、入射したレーザー光をビームエクスパンダー１１に伝送する。ビームエクスパンダー１１は、出力端においてレーザー光の光束を拡げ、平行光にしてレーザー光を出射させる。偏光子１２は、半波長板を有し、ビームエクスパンダー１１から出射されたレーザー光（二点鎖線）を直線偏光に変換する。ビームスプリッター１３は、偏光子１２から出射された直線偏光成分を有するレーザー光の一部を反射させて図中Ｙ軸方向に出射させる。レーザー発振装置１０及び偏光子１２は、本発明の出射部として機能する。   The laser oscillation device 10 emits laser light having a non-polarized component to the transmission medium F1. The transmission medium F1 is composed of an optical fiber, and transmits incident laser light to the beam expander 11. The beam expander 11 expands the luminous flux of the laser light at the output end, and emits the laser light as parallel light. The polarizer 12 has a half-wave plate and converts the laser light (two-dot chain line) emitted from the beam expander 11 into linearly polarized light. The beam splitter 13 reflects a part of the laser light having a linearly polarized component emitted from the polarizer 12 and emits it in the Y-axis direction in the figure. The laser oscillation device 10 and the polarizer 12 function as an emission unit of the present invention.

次に、第１光学機構１４及び第２光学機構１５について説明する。図２（ａ）は、第１光学機構１４と第２光学機構１５とを表す図である。図２（ｂ）は、第２光学機構１５を上面側から見た図であり、図２（ｃ）は第２光学機構１５を底面側から見た図である。図２（ａ）において、第１光学機構１４は、筐体１４０内に第１光学系１４１を有する。筐体１４０の側面の内側には、例えば光を乱反射させない黒色などの樹脂が接着され、筐体１４０の底面部１４０Ａと上面部１４０Ｂは光を透過させるガラスなどの素材で構成されている。底面部１４０Ａと上面部１４０Ｂは円形状であり、底面部１４０Ａは上面部１４０Ｂより大きく構成されている。第１光学系１４１は、例えば平凹レンズと平凸レンズとを組み合わせて構成され、ビームスプリッター１３から出射された直線偏光成分を有するレーザー光（二点鎖線）の光束径を拡げた平行光を底面部１４０Ａから出射させる。第１光学系１４１は、出射する平行光のレーザー光が、後述するセンサー機構１６に設けられている各セル１６１が含まれる大きさの光束径ｘとなるように設計されている。   Next, the first optical mechanism 14 and the second optical mechanism 15 will be described. FIG. 2A is a diagram showing the first optical mechanism 14 and the second optical mechanism 15. FIG. 2B is a view of the second optical mechanism 15 viewed from the top surface side, and FIG. 2C is a view of the second optical mechanism 15 viewed from the bottom surface side. In FIG. 2A, the first optical mechanism 14 has a first optical system 141 in a housing 140. For example, a resin such as black that does not diffusely reflect light is bonded to the inside of the side surface of the housing 140, and the bottom surface portion 140A and the top surface portion 140B of the housing 140 are made of a material such as glass that transmits light. The bottom surface portion 140A and the top surface portion 140B are circular, and the bottom surface portion 140A is configured to be larger than the top surface portion 140B. The first optical system 141 is configured by combining, for example, a plano-concave lens and a plano-convex lens. The light is emitted from 140A. The first optical system 141 is designed so that the emitted parallel laser light has a light beam diameter x that includes each cell 161 provided in the sensor mechanism 16 described later.

第２光学機構１５は、円筒形状の筐体１５０内に、複数の円筒形状の第２光学部材１５１を有する。筐体１５０は、光を透過させるガラスなどの素材で構成され、筐体１５０の上面及び底面は、図２（ｂ）（ｃ）に示すように、第２光学部材１５１が配置された部分以外の斜線部（非透過領域）は例えば黒色の樹脂が接着されている。つまり、第２光学部材１５１が配置された部分（透過領域）に光を透過させ、第２光学部材１５１が設けられていない斜線部ではレーザー光が透過及び乱反射しないように構成されている。   The second optical mechanism 15 has a plurality of cylindrical second optical members 151 in a cylindrical casing 150. The housing 150 is made of a material such as glass that transmits light, and the top and bottom surfaces of the housing 150 are other than the portion where the second optical member 151 is disposed, as shown in FIGS. For example, a black resin is adhered to the shaded portion (non-transparent region). That is, the light is transmitted through a portion (transmission region) where the second optical member 151 is disposed, and the laser light is configured not to be transmitted and irregularly reflected in a hatched portion where the second optical member 151 is not provided.

図３は、第２光学部材１５１を表す図である。また、図４は、第２光学部材１５１とセンサー機構１６における各セル１６１との位置関係を表した図である。図３において、第２光学部材１５１は、光を透過させるガラスなどで構成された円筒形状の筐体１５１ａ内に、例えば平凸レンズと平凹レンズとを含む第２光学系１５２を有する。第２光学部材１５１は、筐体１５１ａの上面部１５１Ｂから入射した第１光学系１４１からの直線偏光成分を有するレーザー光（二点鎖線）の光束径ｘ１より小さい光束径ｘ２の平行光を底面部１５１Ａから出射させる。図４に示すように、各第２光学部材１５１は、第２光学系１５２の光軸がセンサー機構１６における対応するセル１６１の中心部を通るように各々配置されており、各第２光学部材１５１の底面部１５１Ａから出射されたレーザー光は対応する各セル１６１に照射される。   FIG. 3 is a diagram illustrating the second optical member 151. FIG. 4 is a view showing the positional relationship between the second optical member 151 and each cell 161 in the sensor mechanism 16. In FIG. 3, the second optical member 151 has a second optical system 152 including, for example, a plano-convex lens and a plano-concave lens in a cylindrical casing 151a made of glass that transmits light. The second optical member 151 has a bottom surface that emits parallel light having a light beam diameter x2 smaller than the light beam diameter x1 of laser light (two-dot chain line) having a linearly polarized component from the first optical system 141 incident from the upper surface portion 151B of the casing 151a. The light is emitted from the portion 151A. As shown in FIG. 4, each second optical member 151 is disposed such that the optical axis of the second optical system 152 passes through the center of the corresponding cell 161 in the sensor mechanism 16. Each of the cells 161 is irradiated with the laser light emitted from the bottom surface portion 151A of 151.

図５（ａ）は、センサー機構１６の断面を表す図であり、図５（ｂ）は、センサー機構１６におけるセル１６１を表す図である。センサー機構１６は、光を透過させる例えばガラスなどで構成された円筒形状の筐体１６０内に、複数のセル１６１を有して構成されている。本実施形態では、図４に示したように、５つのセル１６１が筐体１６０内に配置されている。セル１６１は、図５（ｂ）に示すように、４面体で構成され、光を透過させるガラス等の素材で形成されており、内部に所定の原子からなる原子群が含まれている。   FIG. 5A is a diagram illustrating a cross section of the sensor mechanism 16, and FIG. 5B is a diagram illustrating a cell 161 in the sensor mechanism 16. The sensor mechanism 16 includes a plurality of cells 161 in a cylindrical casing 160 made of, for example, glass that transmits light. In the present embodiment, as shown in FIG. 4, five cells 161 are arranged in the housing 160. As shown in FIG. 5B, the cell 161 is formed of a tetrahedron, is formed of a material such as glass that transmits light, and includes an atomic group including predetermined atoms.

所定の原子は、例えば、リチウム（Ｌｉ）、ナトリウム（Ｎａ）、カリウム（Ｋ）、ルビジウム（Ｒｂ）、セシウム（Ｃｓ）及びフランシウム（Ｆｒ）等のアルカリ金属原子である。なお、セル１６１の少なくとも上面１６１Ｂ及び底面１６１Ａは光を透過するように構成されていればよく、各セル１６１の底面１６１Ａ又は上面１６１Ｂが同じ向きとなるように配置されていればよい。また、セル１６１内には、アルカリ金属原子の他に、ヘリウム（Ｈｅ）、窒素（Ｎ）などのバッファーガスが含まれていてもよい。アルカリ金属原子は、磁気を検出する際に気体の状態であればよく、常時気体の状態でなくてもよい。   The predetermined atom is an alkali metal atom such as lithium (Li), sodium (Na), potassium (K), rubidium (Rb), cesium (Cs), and francium (Fr). Note that at least the top surface 161B and the bottom surface 161A of the cell 161 may be configured to transmit light, and the bottom surface 161A or the top surface 161B of each cell 161 may be disposed in the same direction. The cell 161 may contain a buffer gas such as helium (He) or nitrogen (N) in addition to the alkali metal atom. The alkali metal atom may be in a gaseous state when detecting magnetism, and may not always be in a gaseous state.

また、図５（ａ）に示すように、各セル１６１の底面１６１Ａ側、つまり、筐体１６０内の底面部には、筐体１６０内の底面部と同一の径を有する反射板１６２が設けられている。反射板１６２は、金属膜または誘電体多層膜を用いた反射面を有する。反射板１６２は、各セル１６１の底面１６１Ａを透過したレーザー光を反射させ、各セル１６１の底面１６１Ａ側から内部に向けてレーザー光を再び入射させる。   Further, as shown in FIG. 5A, a reflecting plate 162 having the same diameter as the bottom surface in the housing 160 is provided on the bottom surface 161 </ b> A side of each cell 161, that is, on the bottom surface in the housing 160. It has been. The reflective plate 162 has a reflective surface using a metal film or a dielectric multilayer film. The reflector 162 reflects the laser light transmitted through the bottom surface 161A of each cell 161, and makes the laser light incident again from the bottom surface 161A side of each cell 161 toward the inside.

図１に戻り、偏光ビームスプリッター１８は、反射板１６２で反射されて各セル１６１を透過し、第２光学機構１５及び第１光学機構１４とビームスプリッター１３を透過した反射光のＳ波成分（第１偏光成分）とＰ波成分（第２偏光成分）とを分離し、Ｓ波成分をＳ波検出用フォトディテクター１９に入射させ、Ｐ波成分をＰ波検出用フォトディテクター２０に入射させる。Ｓ波検出用フォトディテクター１９は、入射したＳ波成分の光量に応じた信号（受光情報）を信号処理部２１へ出力する。Ｐ波検出用フォトディテクター２０は、入射したＰ波成分の光量に応じた信号（受光情報）を信号処理部２１へ出力する。信号処理部２１は、Ｓ波検出用フォトディテクター１９とＰ波検出用フォトディテクター２０とから出力されたＳ波成分とＰ波成分の光量を示す電気信号を解析して反射光の偏光面の回転角度を求め、回転角度に応じた磁場の強度を算出する。なお、本実施形態において、偏光ビームスプリッター１８とＰ波検出用フォトディテクター２０とＳ波検出用フォトディテクター１９は本発明の受光部として機能し、信号処理部２１は本発明の検出部として機能する。   Returning to FIG. 1, the polarization beam splitter 18 is reflected by the reflecting plate 162 and transmitted through each cell 161, and the S-wave component of the reflected light transmitted through the second optical mechanism 15, the first optical mechanism 14, and the beam splitter 13 ( The first polarization component) and the P wave component (second polarization component) are separated, the S wave component is incident on the S wave detection photo detector 19, and the P wave component is incident on the P wave detection photo detector 20. The S-wave detection photodetector 19 outputs a signal (light reception information) corresponding to the amount of incident S-wave component to the signal processing unit 21. The P-wave detection photodetector 20 outputs a signal (light reception information) corresponding to the amount of incident P-wave component to the signal processing unit 21. The signal processing unit 21 analyzes the electrical signal indicating the light quantity of the S wave component and the P wave component output from the S wave detection photo detector 19 and the P wave detection photo detector 20 and rotates the polarization plane of the reflected light. The angle is obtained, and the strength of the magnetic field corresponding to the rotation angle is calculated. In this embodiment, the polarization beam splitter 18, the P-wave detection photo detector 20, and the S-wave detection photo detector 19 function as a light receiving unit of the present invention, and the signal processing unit 21 functions as a detection unit of the present invention. .

（動作）
次に、磁気計測装置１の動作について図１を参照しつつ説明する。検体からの磁気を測定する際には、磁気計測装置１におけるセンサー機構１６の下方の位置に測定対象となる検体が位置するように磁気計測装置１が設定される。利用者は、磁気の計測を開始する際、磁気計測装置１において、レーザー発振装置１０からプローブ光であるレーザー光を出力させる。レーザー発振装置１０から出力された無偏光のレーザー光は、伝送媒体Ｆ１を介してビームエクスパンダー１１に入射する。レーザー光はビームエクスパンダー１１によって平行光にされて偏光子１２に入射し、偏光子１２によって直線偏光に変換されてビームスプリッター１３に向かう。ビームスプリッター１３に入射した直線偏光のレーザー光は、光路Ｒ１を通ってセル１６１に照射される。以下、光路Ｒ１を通るレーザー光を入射光と称する。 (Operation)
Next, the operation of the magnetic measurement apparatus 1 will be described with reference to FIG. When measuring magnetism from the specimen, the magnetic measurement apparatus 1 is set so that the specimen to be measured is located at a position below the sensor mechanism 16 in the magnetic measurement apparatus 1. When starting measurement of magnetism, the user causes the laser measuring device 1 to output laser light, which is probe light, from the laser oscillation device 10. The non-polarized laser beam output from the laser oscillation device 10 enters the beam expander 11 via the transmission medium F1. The laser light is converted into parallel light by the beam expander 11 and is incident on the polarizer 12, converted into linearly polarized light by the polarizer 12, and travels to the beam splitter 13. The linearly polarized laser light incident on the beam splitter 13 is irradiated to the cell 161 through the optical path R1. Hereinafter, the laser light passing through the optical path R1 is referred to as incident light.

つまり、直線偏光の入射光は、ビームスプリッター１３で反射されて第１光学機構１４の第１光学系１４１に入射し、第１光学系１４１において、偏光面の角度が保持された状態で光束径が拡げられ、第１光学機構１４から平行光の状態で出射される。第１光学機構１４を出射した入射光は、第２光学機構１５の各第２光学部材１５１に入射する。レーザー光は、第２光学部材１５１の第２光学系１５２によって偏光面の角度が保持された状態で光束径が絞られ、センサー機構１６の側へ平行光の状態で出射される。第２光学機構１５の各第２光学系１５２から出射された直線偏光の入射光は、対応する各セル１６１に向けて入射する。   That is, the linearly polarized incident light is reflected by the beam splitter 13 and is incident on the first optical system 141 of the first optical mechanism 14. In the first optical system 141, the beam diameter is maintained while maintaining the angle of the polarization plane. Is expanded and emitted from the first optical mechanism 14 in a parallel light state. Incident light emitted from the first optical mechanism 14 is incident on each second optical member 151 of the second optical mechanism 15. The diameter of the light beam is reduced in a state where the angle of the polarization plane is maintained by the second optical system 152 of the second optical member 151, and the laser light is emitted in the state of parallel light to the sensor mechanism 16 side. The linearly polarized incident light emitted from each second optical system 152 of the second optical mechanism 15 enters the corresponding cell 161.

各セル１６１に直線偏光の入射光が入射すると、各セル１６１内のアルカリ金属原子群はアライメントされ、線形二色性が生じる。アルカリ金属原子群は、各セル１６１が配置された位置における検体からの磁場に応じて歳差運動を行う。入射光は、各セル１６１内のアルカリ金属原子群を通過すると、ファラデー回転効果により偏光面が回転されて各セル１６１を透過する。   When linearly polarized incident light enters each cell 161, the alkali metal atoms in each cell 161 are aligned, and linear dichroism occurs. The alkali metal atom group performs precession according to the magnetic field from the specimen at the position where each cell 161 is arranged. When incident light passes through the alkali metal atom group in each cell 161, the plane of polarization is rotated by the Faraday rotation effect and passes through each cell 161.

偏光面が回転された入射光は反射板１６２によって反射される。そして、その反射光は、各セル１６１の底面１６１Ａからセル１６１内に再び入射し、アルカリ金属原子群を通過する。反射光の偏光面は、ファラデー回転の非相反性によって光路Ｒ１における偏光面の回転方向と同じ方向に回転される。各セル１６１において偏光面が回転されて各セル１６１を透過した反射光は、光路Ｒ２を通って第２光学機構１５に向かう。第２光学機構１５の底面側から入射した各セル１６１からの反射光は、各セル１６１に対応する各第２光学系１５２に各々入射する。反射光は、偏光面の角度が保持された状態で、第２光学部材１５１の上面部１５１Ｂにおいて光束径が拡げられ、第１光学機構１４の側へ平行光の状態で出射される。第１光学機構１４に入射した反射光は、偏光面の角度が保持された状態で第１光学系１４１の上面部１４０Ｂにおいて光束径が絞られ、第１光学機構１４から出射してビームスプリッター１３に向かう。   Incident light whose polarization plane is rotated is reflected by the reflector 162. The reflected light then enters the cell 161 again from the bottom surface 161A of each cell 161 and passes through the alkali metal atom group. The polarization plane of the reflected light is rotated in the same direction as the rotation direction of the polarization plane in the optical path R1 due to the nonreciprocity of the Faraday rotation. The reflected light whose polarization plane is rotated in each cell 161 and transmitted through each cell 161 travels to the second optical mechanism 15 through the optical path R2. Reflected light from each cell 161 incident from the bottom surface side of the second optical mechanism 15 is incident on each second optical system 152 corresponding to each cell 161. With the angle of the polarization plane maintained, the reflected light has its light beam diameter expanded at the upper surface portion 151B of the second optical member 151, and is emitted in the state of parallel light to the first optical mechanism 14 side. The reflected light incident on the first optical mechanism 14 has its light beam diameter reduced at the upper surface portion 140B of the first optical system 141 while maintaining the angle of the polarization plane, and is emitted from the first optical mechanism 14 and emitted from the beam splitter 13. Head for.

ビームスプリッター１３に入射した反射光の一部が偏光ビームスプリッター１８に導かれる。偏光ビームスプリッター１８において、反射光はＰ波成分とＳ波成分とに分離され、Ｐ波成分はＰ波検出用フォトディテクター２０で受光され、Ｓ波成分はＳ波検出用フォトディテクター１９で受光される。Ｐ波検出用フォトディテクター２０とＳ波検出用フォトディテクター１９は、Ｐ波成分とＳ波成分の各光量に応じた電気信号を信号処理部２１に各々出力する。信号処理部２１は、Ｐ波成分とＳ波成分の各光量に応じた電気信号に基づいて、反射光の偏光面の回転角度から検体における磁場の強度を算出する。   Part of the reflected light incident on the beam splitter 13 is guided to the polarization beam splitter 18. In the polarization beam splitter 18, the reflected light is separated into a P wave component and an S wave component, the P wave component is received by the P wave detection photo detector 20, and the S wave component is received by the S wave detection photo detector 19. The The P-wave detection photo detector 20 and the S-wave detection photo detector 19 each output an electrical signal corresponding to each light quantity of the P wave component and the S wave component to the signal processing unit 21. The signal processing unit 21 calculates the intensity of the magnetic field in the specimen from the rotation angle of the polarization plane of the reflected light, based on the electrical signal corresponding to each light quantity of the P wave component and the S wave component.

上記実施形態では、複数のセル１６１に共通の光源からプローブ光を分配して照射する構成となっており、各セル１６１に対して照射されたプローブ光の反射光を光源の側において受光する構成となっているため、セル１６１ごとにプローブ光を照射して受光する構成と比べて装置を小型化することができる。また、各セル１６１に照射されるプローブ光は、第１光学系１４１によって、各セル１６１が配置される範囲を含むようにプローブ光の光束径が拡げられ、第２光学系１５２においてセル１６１ごとにプローブ光の光束径が絞られるため、より高い光強度のプローブ光を各セル１６１に入射させることができる。また、各セル１６１を透過して反射されたプローブ光は、光路Ｒ２において、第２光学機構１５と第１光学機構１４において偏光面の角度が保持された状態で受光されるため、信号処理部２１における磁場の検出精度を低下させないようにすることができる。   In the above-described embodiment, the configuration is such that the probe light is distributed and applied to the plurality of cells 161 from the common light source, and the reflected light of the probe light applied to each cell 161 is received on the light source side. Therefore, the apparatus can be reduced in size as compared with the configuration in which each cell 161 is irradiated with probe light and received. Further, the probe light irradiated to each cell 161 is expanded in diameter by the first optical system 141 so as to include the range in which each cell 161 is arranged. In addition, since the beam diameter of the probe light is reduced, the probe light having a higher light intensity can be incident on each cell 161. Further, since the probe light that has been transmitted and reflected through each cell 161 is received in the optical path R2 with the angle of the polarization plane maintained in the second optical mechanism 15 and the first optical mechanism 14, the signal processing unit It is possible to prevent the detection accuracy of the magnetic field at 21 from being lowered.

＜変形例＞
本発明は、上述した実施形態に限定されるものではなく、以下のように変形させて実施してもよい。また、以下の変形例を組み合わせてもよい。 <Modification>
The present invention is not limited to the above-described embodiment, and may be carried out by being modified as follows. Further, the following modifications may be combined.

（１）上述した実施形態において、センサー機構１６の部分が第２光学機構１５と分離された構成であってもよい。このような構成例を図６に示す。図６において、実施形態と同様の構成は実施形態で用いた符号を付している。本変形例に係る磁気計測装置１Ａは、図６に示すように、第２光学機構１５とセンサー機構１６Ａとを伝送媒体Ｆ２によって接続して構成されている。第２光学機構１５には、実施形態と同様に、第２光学部材１５１が各セル１６１に対応して設けられており、センサー機構１６Ａの筐体１６０内の上面には、第２光学機構１５における第２光学系１５２と同じ構成の第３光学系１６３が各セル１６１と対応する位置に設けられている。第２光学部材１５１と第３光学系１６３の組の数だけ伝送媒体Ｆ２が設けられている。伝送媒体Ｆ２は、偏波保持光ファイバーなどで構成され、偏光面の角度を保持した状態で光を伝送する。 (1) In the above-described embodiment, the sensor mechanism 16 may be separated from the second optical mechanism 15. An example of such a configuration is shown in FIG. In FIG. 6, the same configurations as those in the embodiment are denoted by the reference numerals used in the embodiment. As shown in FIG. 6, the magnetic measuring device 1A according to this modification is configured by connecting a second optical mechanism 15 and a sensor mechanism 16A by a transmission medium F2. Similar to the embodiment, the second optical mechanism 15 is provided with a second optical member 151 corresponding to each cell 161, and the second optical mechanism 15 is provided on the upper surface of the housing 160 of the sensor mechanism 16A. The third optical system 163 having the same configuration as the second optical system 152 is provided at a position corresponding to each cell 161. The transmission medium F2 is provided by the number of sets of the second optical member 151 and the third optical system 163. The transmission medium F2 is composed of a polarization maintaining optical fiber or the like, and transmits light while maintaining the angle of the polarization plane.

ビームスプリッター１３から直線偏光の入射光が第１光学機構１４に入射すると、入射光は、偏光面の角度が保持された状態で光束径が拡げられて平行光として第２光学機構１５に入射する。入射光は、第２光学機構１５に入射すると、各第２光学部材１５１で偏光面の角度が保持された状態で光束径が絞られて伝送媒体Ｆ２に入射する。伝送媒体Ｆ２内を通過して出射した入射光は、センサー機構１６Ａにおける各第３光学系１６３に入射する。入射光は、各第３光学系１６３に入射すると、偏光面の角度が保持された状態で光束径が絞られて平行光として第３光学系１６３から出射し、各セル１６１に入射する。各セル１６１に入射した入射光は、実施形態と同様に反射板１６２で反射され、その反射光が各セル１６１の内部に向けて入射する。反射光は、各セル１６１を透過して第３光学系１６３に入射し、第３光学系１６３において光束径が拡げられて伝送媒体Ｆ２に入射する。各伝送媒体Ｆ２を通過した反射光は、第２光学機構１５の各第２光学部材１５１に入射し、第２光学系１５２において偏光面が保持された状態で光束径が拡げられて第１光学機構１４に入射する。第１光学機構１４に入射した反射光は、偏光面が保持された状態で第１光学系１４１によって光束径が絞られてビームスプリッター１３に入射する。なお、ビームスプリッター１３を透過した反射光は実施形態と同様にしてＰ波成分とＳ波成分に分離されて受光される。このように、センサー機構１６の部分を伝送媒体Ｆ２によって接続することにより、センサー機構１６の配置の自由度を向上させることができる。   When linearly polarized incident light is incident on the first optical mechanism 14 from the beam splitter 13, the incident light is incident on the second optical mechanism 15 as a parallel beam with the diameter of the light beam expanded while maintaining the angle of the polarization plane. . When incident light enters the second optical mechanism 15, the light beam diameter is reduced and the light enters the transmission medium F <b> 2 while the angle of the polarization plane is maintained by each second optical member 151. Incident light that has exited through the transmission medium F2 enters each third optical system 163 in the sensor mechanism 16A. When incident light enters each third optical system 163, the diameter of the light beam is reduced while the angle of the polarization plane is maintained, and the light is emitted from the third optical system 163 as parallel light and enters each cell 161. The incident light incident on each cell 161 is reflected by the reflecting plate 162 as in the embodiment, and the reflected light enters the inside of each cell 161. The reflected light passes through each cell 161 and enters the third optical system 163, where the diameter of the light beam is expanded in the third optical system 163 and enters the transmission medium F2. The reflected light that has passed through each transmission medium F2 is incident on each second optical member 151 of the second optical mechanism 15, and the light beam diameter is expanded in a state in which the polarization plane is held in the second optical system 152, so that the first optical member It enters the mechanism 14. The reflected light incident on the first optical mechanism 14 is incident on the beam splitter 13 with the diameter of the light beam being reduced by the first optical system 141 while the polarization plane is maintained. The reflected light that has passed through the beam splitter 13 is separated into a P wave component and an S wave component and received in the same manner as in the embodiment. Thus, the degree of freedom of arrangement of sensor mechanism 16 can be improved by connecting portions of sensor mechanism 16 with transmission medium F2.

（２）上述した実施形態では、各セル１６１にポンプ光を照射しない例であったが、各セル１６１にポンプ光を照射するように構成してもよい。この場合の例を図７（ａ）に示す。図７（ａ）において、実施形態と同様の構成は実施形態で用いた符号を付している。磁気計測装置１Ｂは、センサー機構１６に対してＸ軸方向にポンプ光を照射するポンプ光照射ユニット４０を有する。図７（ｂ）は、センサー機構１６の上面側から見た各セル１６１とポンプ光照射ユニット４０の位置関係を表す図である。この図に示すように、ポンプ光照射ユニット４０は、Ｘ軸方向におけるセル１６１の列と対応するように３つのポンプ光照射部４０１を有する。ポンプ光照射部４０１は、無偏光成分を有するレーザー光を出射する光源、コリメートレンズ、偏光板、四分の一波長板等の光学部材（図示略）を出力端に有し、光源からのレーザー光を円偏光成分を有するポンプ光に変換して出力する。この構成の場合、Ｚ軸方向の磁場が検出される。 (2) In the above-described embodiment, each cell 161 is not irradiated with pump light. However, each cell 161 may be irradiated with pump light. An example of this case is shown in FIG. In FIG. 7A, the same configuration as that of the embodiment is denoted by the reference numeral used in the embodiment. The magnetic measurement device 1B includes a pump light irradiation unit 40 that irradiates the sensor mechanism 16 with pump light in the X-axis direction. FIG. 7B is a diagram illustrating the positional relationship between each cell 161 and the pump light irradiation unit 40 as viewed from the upper surface side of the sensor mechanism 16. As shown in this figure, the pump light irradiation unit 40 includes three pump light irradiation units 401 so as to correspond to the rows of cells 161 in the X-axis direction. The pump light irradiation unit 401 has an optical member (not shown) such as a light source that emits laser light having a non-polarized component, a collimating lens, a polarizing plate, and a quarter-wave plate at an output end, and a laser from the light source. The light is converted into pump light having a circularly polarized component and output. In the case of this configuration, a magnetic field in the Z-axis direction is detected.

（３）上述した実施形態では、信号処理部２１において各セル１６１における磁場の強度を算出する例を説明したが、Ｓ波検出用フォトディテクター１９とＰ波検出用フォトディテクター２０で受光されたＳ波成分とＰ波成分の光量に応じた電気信号を磁気計測装置１の外部の演算装置に出力し、当該演算装置においてプローブ光の回転角を算出し、回転角に応じた磁場の大きさを求めるようにしてもよい。 (3) In the above-described embodiment, the example in which the signal processing unit 21 calculates the strength of the magnetic field in each cell 161 has been described. However, the S light received by the S wave detection photo detector 19 and the P wave detection photo detector 20 is received. An electric signal corresponding to the light amount of the wave component and the P wave component is output to an arithmetic device outside the magnetic measurement device 1, and the arithmetic device calculates the rotation angle of the probe light, and sets the magnitude of the magnetic field according to the rotation angle. You may make it ask.

（４）上述した実施形態では、第２光学機構１５の筐体１５０の上面と底面の一部に黒色の樹脂を接着する例を説明したが、筐体１５０の内面にも同様に黒色の樹脂を接着し、筐体１５０内において光が乱反射しないように構成してもよい。 (4) In the above-described embodiment, the example in which the black resin is bonded to part of the upper surface and the bottom surface of the casing 150 of the second optical mechanism 15 has been described. May be adhered so that light is not irregularly reflected in the housing 150.

（５）上述した実施形態では、第２光学系１５２は平凸レンズと平凹レンズとを組み合わせて構成されている例を説明したが、例えば、フライアレイレンズを複数段組み合わせて構成するなど、第２光学系１５２を透過する光の偏光状態を保持し、光路Ｒ１における第２光学系１５２の入射側より出射側の光束径が絞られる光学系であればこれに限らない。 (5) In the above-described embodiment, the example in which the second optical system 152 is configured by combining a plano-convex lens and a plano-concave lens has been described. However, for example, the second optical system 152 may be configured by combining a plurality of fly array lenses. The present invention is not limited to this as long as the polarization state of the light transmitted through the optical system 152 is maintained and the diameter of the light beam on the exit side of the second optical system 152 in the optical path R1 is reduced.

１，１Ａ，１Ｂ・・・磁気計測装置、１０・・・レーザー発振装置、１１・・・ビームエクスパンダー、１２・・・偏光子、１３・・・ビームスプリッター、１４・・・第１光学機構、１５・・・第２光学機構、１６・・・センサー機構、１８・・・偏光ビームスプリッター、１９・・・Ｓ波検出用フォトディテクター、２０・・・Ｐ波検出用フォトディテクター、２１・・・信号処理部、４０・・・ポンプ光照射ユニット、１４０，１５０，１６０・・・筐体、１４１・・・第１光学系、１５１・・・第２光学部材、１５２・・・第２光学系、１６１・・・セル、１６２・・・反射板、４０１・・・ポンプ光照射部、Ｆ１，Ｆ２・・・伝送媒体   DESCRIPTION OF SYMBOLS 1,1A, 1B ... Magnetic measuring device, 10 ... Laser oscillator, 11 ... Beam expander, 12 ... Polarizer, 13 ... Beam splitter, 14 ... 1st optical mechanism 15 ... second optical mechanism, 16 ... sensor mechanism, 18 ... polarizing beam splitter, 19 ... photo detector for S wave detection, 20 ... photo detector for P wave detection, 21 ... Signal processing unit, 40: pump light irradiation unit, 140, 150, 160 ... casing, 141 ... first optical system, 151 ... second optical member, 152 ... second optical System, 161 ... cell, 162 ... reflector, 401 ... pump light irradiation unit, F1, F2 ... transmission medium

Claims (5)

アルカリ金属原子を収容した複数のセルと、
直線偏光成分を有する光を入射光として出射する出射部と、
前記出射部から出射された入射光の偏光面の角度を保持した状態で、前記複数のセルが配置された範囲の大きさに相当する光束径の前記入射光を出射させる第１光学系を有する第１光学機構と、
前記複数のセルに各々対応して設けられ、前記第１光学機構から入射した前記入射光の偏光面の角度を保持した状態で、入射時の光束径より小さい光束径の前記入射光を対応する前記セルに出射させる第２光学系を有する第２光学機構と、
前記第２光学機構から前記セルの各々に対して入射し、当該セルを透過した前記入射光を当該セルに向けて反射させる反射部と、
前記反射部によって反射されて前記各セルを透過し、前記入射光の入射方向とは反対方向から前記第２光学機構と前記第１光学機構とを通過した当該入射光の反射光を第１偏光成分と第２偏光成分とに分離し、前記各セルを透過した当該反射光のそれぞれの前記第１偏光成分と前記第２偏光成分の受光量を示す受光情報を出力する受光部と
を備えることを特徴とする磁気センサー装置。 A plurality of cells containing alkali metal atoms;
An emission part that emits light having a linearly polarized light component as incident light;
A first optical system configured to emit the incident light having a light beam diameter corresponding to a size of a range in which the plurality of cells are arranged in a state in which an angle of a polarization plane of the incident light emitted from the emitting unit is maintained; A first optical mechanism;
The incident light is provided corresponding to each of the plurality of cells, and corresponds to the incident light having a light beam diameter smaller than the light beam diameter at the time of incidence while maintaining the angle of the polarization plane of the incident light incident from the first optical mechanism. A second optical mechanism having a second optical system that emits light to the cell;
A reflecting portion that is incident on each of the cells from the second optical mechanism and reflects the incident light transmitted through the cells toward the cells;
The reflected light of the incident light that has been reflected by the reflecting portion and transmitted through the cells and passed through the second optical mechanism and the first optical mechanism from a direction opposite to the incident direction of the incident light is first polarized light. A light receiving unit that outputs light reception information indicating the amount of light received by each of the first polarization component and the second polarization component of the reflected light that is separated into a component and a second polarization component and transmitted through each cell. Magnetic sensor device characterized by. 前記第２光学機構を収容する筐体の上面及び底面は、光を透過させる透過領域と光を透過させない非透過領域とを有し、前記透過領域は、前記第２光学系が配置された部分に対応し、前記非透過領域は、前記第２光学系が配置されていない部分に対応することを特徴とする請求項１に記載の磁気センサー装置。   The upper surface and the bottom surface of the housing that houses the second optical mechanism have a transmission region that transmits light and a non-transmission region that does not transmit light, and the transmission region is a portion where the second optical system is disposed. The magnetic sensor device according to claim 1, wherein the non-transmissive region corresponds to a portion where the second optical system is not disposed. 前記第２光学系を出射した前記入射光を偏光面の角度を保持した状態で伝送する伝送媒体によって前記複数のセルと前記第２光学系とが接続され、
前記伝送媒体から出射された前記入射光の平行光を対応する前記セルに出射させる第３光学系を有することを特徴とする請求項１又は２に記載の磁気センサー装置。 The plurality of cells and the second optical system are connected by a transmission medium that transmits the incident light emitted from the second optical system while maintaining an angle of a polarization plane,
The magnetic sensor device according to claim 1, further comprising a third optical system that emits parallel light of the incident light emitted from the transmission medium to the corresponding cell. 前記第３光学系は、入射時の光束径より小さい光束径の前記入射光を出射させることを特徴とする請求項３に記載の磁気センサー装置。   The magnetic sensor device according to claim 3, wherein the third optical system emits the incident light having a light beam diameter smaller than a light beam diameter at the time of incidence. 請求項１から請求項４のいずれか一項に記載の磁気センサー装置と、
前記磁気センサー装置から出力された受光情報に基づいて、前記複数のセルの位置におけるそれぞれの磁気を検出する検出部と
を備えることを特徴とする磁気計測装置。 The magnetic sensor device according to any one of claims 1 to 4,
A magnetic measurement device comprising: a detection unit that detects respective magnetisms at the positions of the plurality of cells based on light reception information output from the magnetic sensor device.
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