JP5852131B2 - サスペンションプラズマ溶射用の圧力式液体供給システム - Google Patents
サスペンションプラズマ溶射用の圧力式液体供給システム Download PDFInfo
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- JP5852131B2 JP5852131B2 JP2013544743A JP2013544743A JP5852131B2 JP 5852131 B2 JP5852131 B2 JP 5852131B2 JP 2013544743 A JP2013544743 A JP 2013544743A JP 2013544743 A JP2013544743 A JP 2013544743A JP 5852131 B2 JP5852131 B2 JP 5852131B2
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- 239000007788 liquid Substances 0.000 title claims description 117
- 239000000725 suspension Substances 0.000 title claims description 44
- 238000007750 plasma spraying Methods 0.000 title description 22
- 239000007921 spray Substances 0.000 claims description 73
- 238000004140 cleaning Methods 0.000 claims description 63
- 239000002994 raw material Substances 0.000 claims description 56
- 239000007789 gas Substances 0.000 claims description 49
- 238000010926 purge Methods 0.000 claims description 46
- 239000003595 mist Substances 0.000 claims description 28
- 239000012530 fluid Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 18
- 238000011144 upstream manufacturing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000000356 contaminant Substances 0.000 claims description 2
- 239000002243 precursor Substances 0.000 claims description 2
- 238000009825 accumulation Methods 0.000 claims 1
- 239000003599 detergent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 34
- 238000005516 engineering process Methods 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 239000002131 composite material Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000007751 thermal spraying Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000005524 ceramic coating Methods 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 239000012705 liquid precursor Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000011882 ultra-fine particle Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 241000520330 Otomys irroratus Species 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011344 liquid material Substances 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- YZBNXQLCEJJXSC-UHFFFAOYSA-N miliacin Chemical compound C12CCC3C4=CC(C)(C)CCC4(C)CCC3(C)C1(C)CCC1C2(C)CCC(OC)C1(C)C YZBNXQLCEJJXSC-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000001699 photocatalysis Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229940040850 prosol Drugs 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910016341 Al2O3 ZrO2 Inorganic materials 0.000 description 1
- 238000001530 Raman microscopy Methods 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000007749 high velocity oxygen fuel spraying Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000011165 process development Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- -1 sols Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000011232 storage material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder, liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
- B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
- B05B15/557—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids the cleaning fluid being a mixture of gas and liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
- B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
- B05B7/0815—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with at least one gas jet intersecting a jet constituted by a liquid or a mixture containing a liquid for controlling the shape of the latter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/20—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion
- B05B7/201—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle
- B05B7/203—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle the material to be sprayed having originally the shape of a wire, rod or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/20—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion
- B05B7/201—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle
- B05B7/205—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle the material to be sprayed being originally a particulate material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
- B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
- B05B7/226—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc the material being originally a particulate material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/20—Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising
- B05B15/25—Arrangements for agitating the material to be sprayed, e.g. for stirring, mixing or homogenising using moving elements, e.g. rotating blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Nozzles (AREA)
- Coating By Spraying Or Casting (AREA)
Description
図1及び図2の液体供給システムの実験的プロトタイプは、すべての試験された懸濁液についてかなりのロバスト性を示した。新たなパージ・システムは、注入器を清浄に保ち、原料管路を完全に充填されたままにし、短い作業中断の間に注入器を取り外すことなく1〜1.5時間待つことができた。休止時間が一晩におよぶ場合には、注入器装着部全体を銃から外し、水を満たした容器に入れた。翌日、プラズマ銃ノズルに装着し直すと、直ちに動作可能な状態になった。より長期間の貯蔵又は原料の交換では、原料貯蔵槽、管路、及び注入器装着具の完全な清浄化が必要であった。
図1の非限定的なシステムとともに使用できる非限定的な注入器原料洗浄用装置を、図5〜図9に示す。装置1は、プラズマ溶射銃100の領域に液体を注入するために使用される(図1を参照)。図5に示されるように、装置1は、3つの主要要素を有する。第1の要素は、少なくとも1つの原料供給管路18のコネクタ19に接続可能な入口(図9を参照)、少なくとも1つのガス供給管路16のコネクタ17に接続可能な入口、及び少なくとも1つの液体媒質供給管路20のコネクタ21に接続可能な入口を備える注入器洗浄デバイス10である。また、管路16及び20が接続されるミスト・チャンバー部12及び管路18が接続されるパージ・ブロック部11も含まれる。内部通路22(図9を参照)が、管路16及び20に結合された内部空間と注入器30に至るパージ・ブロック部11のアウトプット通路との間に流体接続経路を形成する。管路16及び20は、ガス及び液体を噴霧(アトマイジング)チャンバー23に供給する。管路20からの液体が管路16からのガスに分散されると、これは逆止弁24を通り、次いで通路22を通過することができる。逆止弁24は、原料が注入器30から送出される際に逆流を防ぎ、特に、原料がチャンバー23に入ることを防ぐ一方向弁である。管路18は、原料を別の逆止弁25を含むチャンバーに供給し、次いで、フィルター26、例えば、注入器30を詰まらせる可能性のある粒子又は汚染物質を捕捉できる最終スクリーン・フィルターを含む通路を通って移動させる。逆止弁25は、分散された洗浄用流体が注入器30から送出される際の逆流を防ぎ、特に、通路22を通過する流体が原料管路18内に入ることを防ぐ一方向弁である。
Claims (27)
- 溶射銃の領域内に液体を注入する装置であって、該装置が、注入器洗浄デバイスと、前記注入器洗浄デバイスと流体連通する注入器オリフィスとを有し、
前記注入器洗浄デバイスが、
少なくとも1つの原料供給管路に接続可能な入口、
少なくとも1つのガス供給管路に接続可能な入口、
少なくとも1つの液体媒質供給管路に接続可能な入口、及び
前記少なくとも1つのガス供給管路を通じてガスを受容し、前記少なくとも1つの液体媒質供給管路を通じて洗浄液を受容して、原料供給通路に供給するパージ・ミストを生成する噴霧チャンバー
を備え、
前記注入器オリフィスが、前記注入器洗浄デバイスの前記噴霧チャンバーに流体連通して、
前記溶射銃の前記領域内に液体ジェットを注入すること、並びに
前記入口に入る原料、ガス及び液体を受け入れること
のうちの少なくとも一つに適合されている、装置。 - 前記噴霧チャンバーが、前記注入器オリフィスの上流に配置された前記原料供給通路に管路を通じて結合されている、請求項1に記載された装置。
- 前記少なくとも1つの原料供給管路、前記少なくとも1つのガス供給管路、及び前記少なくとも1つの液体媒質供給管路が、前記注入器オリフィスの上流に配置されている、請求項1に記載された装置。
- 前記注入器洗浄デバイスを前記溶射銃の一部に結合するように適合された装着部をさらに備える、請求項1に記載された装置。
- 前記注入器洗浄デバイスが、
パージ・ブロック部及び/又はミスト・チャンバー部を備え、
前記ミスト・チャンバー部が、逆止弁の上流に配置された前記噴霧チャンバーを備え、
前記パージ・ブロック部が、
液体又はガスに伴う汚染物質が前記注入器オリフィスから排出されることを防ぐための逆止弁及びフィルターを備えるか、あるいは
前記液体媒質及びガス供給管路の前記入口の下流に配置された逆止弁と流体連通し、前記原料供給管路の下流に配置された別の通路と流体連通する通路を備える、請求項1に記載された装置。 - 前記注入器洗浄デバイスが、ミスト・チャンバー部を備え、前記少なくとも1つのガス供給管路に接続可能な入口及び前記少なくとも1つの液体媒質供給管路に接続可能な入口が、
前記ミスト・チャンバー部に配置されること、及び
前記ミスト・チャンバー部に結合されること
のうちの少なくとも一つを施される、請求項1に記載された装置。 - 前記注入器洗浄デバイスが、パージ・ブロック部を備え、前記少なくとも1つの原料供給管路に接続可能な入口が、
前記パージ・ブロック部に配置されること、及び
前記パージ・ブロック部に結合されること
のうちの少なくとも一つを施される、請求項1に記載された装置。 - 前記注入器洗浄デバイスを前記溶射銃の放出端部に結合するように適合された装着部をさらに備える、請求項1に記載された装置。
- 前記装着部が、前記溶射銃に固定可能な銃架を備える、請求項8に記載された装置。
- 前記装着部が、前記溶射銃に取外し可能に固定可能な銃架を備える、請求項8に記載された装置。
- 前記装着部が、
前記溶射銃に固定可能な銃架、
装着ブロック、及び
前記装着ブロックを前記注入器洗浄デバイスに接続するように適合された支持板
のうちの少なくとも1つを備える、請求項8に記載された装置。 - 溶射銃のための注入器洗浄装置であって、
原料供給通路に連結された少なくとも1つの原料供給管路と、
前記原料供給通路の下流に配置され、前記原料供給通路に流体連通する注入器オリフィスと、
少なくとも1つのガス供給管路と、
洗浄液を供給するように構成された少なくとも1つの液体媒質供給管路と
前記ガス供給管路および前記液体媒質供給管路を通じて、それぞれガスおよび洗浄液を受容する噴霧チャンバーと
を備え、
前記噴霧チャンバーは、パージ・ミストを、前記原料供給管路と前記注入器オリフィスとの間に位置する前記原料供給通路に供給するように構成され、
前記少なくとも1つの原料供給管路、前記少なくとも1つのガス供給管路、及び前記少なくとも1つの液体媒質供給管路が、前記溶射銃の領域に配置された前記注入器オリフィスの上流に配置される、
装置。 - 前記原料供給管路、前記ガス供給管路、及び前記液体媒質供給管路のうちの少なくとも1つが、注入器組立体に取外し可能に接続される、請求項12に記載された装置。
- 前記少なくとも1つの液体媒質供給管路が、洗浄液を含む液体媒質供給部に接続される、請求項12に記載された装置。
- 前記洗浄液が水洗剤である、請求項14記載された装置。
- 前記洗浄液が、原料を注入するための注入器を洗浄するように構造化され構成された液体である、請求項14に記載された装置。
- 前記原料供給管路が、原料を収容するホッパーに接続される、請求項12に記載された装置。
- 前記原料が、懸濁液、前駆体、及び溶液のうちの少なくとも1つである、請求項17に記載された装置。
- 2つの切替え可能なモードを有するパージ部をさらに備え、
第1のモードでは液体供給物が前記注入器オリフィスに供給され、
第2のモードでは液体媒質が前記注入器オリフィスに供給される、
請求項12から請求項18までのいずれか一項に記載された装置。 - 原料、
ガス、
液体媒質、及び
パージ流体
のうちの少なくとも1つの流れを制御するように適合されたコントローラをさらに備える、請求項12から請求項19までのいずれか一項に記載された装置。 - 溶射銃の高温流又はプラズマ中に液体ジェットを注入するシステムであって、該システムが、
溶射銃と、
請求項12に記載された注入器洗浄装置と
を備える、システム。 - 溶射銃の高温流又はプラズマ中に液体ジェットを注入するシステムであって、
溶射銃と、
請求項1に記載された装置と
を備える、システム。 - 溶射銃の高温流又はプラズマに液体ジェットを注入する方法であって、該方法が、
溶射銃に請求項12に記載された注入器洗浄装置を配置すること、及び
注入器オリフィスを介して液体を放出することと、
2つの異なる時点において注入器オリフィスを介して原料及び洗浄用液体のそれぞれを放出することと、
原料供給サイクルにおいて注入器オリフィスを介して原料を放出し、洗浄用流体洗浄サイクルにおいて注入器オリフィスを介して洗浄用流体を放出することと
のうちの少なくとも1つ
を含む、方法。 - 溶射銃の高温流又はプラズマに液体ジェットを注入する方法であって、
溶射銃に請求項1に記載された装置を配置すること、及び
注入器オリフィスを介して、液体ジェットを前記溶射銃の領域内に生成された高温流又はプラズマに注入すること
を含む、方法。 - 請求項1から請求項22までのいずれか一項に記載の装置又はシステムを使用する方法であって、
液体原料の流れを停止した後に、噴霧された液体洗浄流体の流れを発生させることを含み、
前記発生により、実質的に、注入器オリフィスの上流に配置された少なくとも1つの流れの表面での閉塞物質の蓄積又は析出が防がれる、方法。 - 溶射銃の領域内に液体を注入する装置であって、該装置が、注入器オリフィスと、注入器洗浄デバイスと、逆止弁とを有し、
前記注入器オリフィスが、
原料供給管路に受容された原料、および
パージ・ミスト
のうちのいずれかを放出するように構成され、
前記注入器洗浄デバイスが、
少なくとも1つのガス供給管路に接続可能な入口、
少なくとも1つの液体媒質供給管路に接続可能な入口、及び
前記少なくとも1つのガス供給管路を通じてガスを受容し、前記少なくとも1つの液体媒質供給管路を通じて洗浄液を受容して、パージ・ミストを生成する噴霧チャンバー
を備え、
前記逆止弁が、原料供給管路と前記注入器オリフィスとの間の原料供給通路に配置され、
前記パージ・ミストが、前記逆止弁の下流かつ前記注入器オリフィスの上流に位置する前記原料供給通路に供給されるようになっている、装置。 - 前記噴霧チャンバーが、前記原料供給通路に通路を介して結合しており、
他の逆止弁が、該通路と前記噴霧チャンバーとの間に配置されている、請求項26に記載された装置。
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