JP5808441B2 - ビットパターン媒体における隣接トラックエラーの低減 - Google Patents
ビットパターン媒体における隣接トラックエラーの低減 Download PDFInfo
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/743—Patterned record carriers, wherein the magnetic recording layer is patterned into magnetic isolated data islands, e.g. discrete tracks
- G11B5/746—Bit Patterned record carriers, wherein each magnetic isolated data island corresponds to a bit
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/855—Coating only part of a support with a magnetic layer
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
102 磁気媒体
104 読み取り/書き込みヘッド
202 基板
204 ビットパターン磁性層
210 第1磁性材料
211 頂面
212 周囲面
213 底面
214 第2磁性材料
250 磁界
302 ステップ
304 ステップ
306 ステップ
308 ステップ
310 ステップ
402 基板
404 磁性層
405 磁性層
406 マスク層
408 アイランド区域
410 トレンチ区域
412 露出部分
413 衝突処理粒子
414 核形成領域
415 マスク材料
502 ステップ
504 ステップ
506 ステップ
602 基板
604 磁性層
606 マスク層
608 頂面
610 周囲面
611 角度
612 イオン粒子
614 外殻体
616 プラズマ
618 外殻体
620 除去成分
630 トレンチの基面
Claims (17)
- 基板と、
前記基板に装着されるビットパターン磁性層と、
を含む磁気記録媒体であって、前記ビットパターン磁性層は複数のアイランドを含み、
各前記アイランドは、
第1磁気異方性を有する第1磁性材料であり、頂面と底面と周囲面とを含む第1磁性材料と、
前記第1磁性材料の周囲面をカバーする第2磁性材料であり、前記第1磁気異方性より高い第2磁気異方性を有する第2磁性材料と、
を含み、
前記第2磁性材料が前記第1磁性材料の底面をもカバーする、
磁気記録媒体。 - 前記第1磁性材料の頂面が非磁性材料でカバーされる、または、カバーなしとされる、請求項1に記載の磁気記録媒体。
- 各前記アイランドにおける前記第1磁性材料と前記第2磁性材料との体積比が約1/100〜1/2の範囲内である、請求項1に記載の磁気記録媒体。
- 各前記アイランドにおける前記第1磁性材料と前記第2磁性材料との体積比が約1/50〜1/4の範囲内である、請求項1に記載の磁気記録媒体。
- 磁気記録媒体の製造方法であって、
磁性層に装着されるマスク層を含む媒体を設けるステップであり、前記磁性層は、基板に装着されると共にアイランド区域およびトレンチ区域を含む、ステップと、
前記磁性層のアイランド区域の一部分のみを露出するために、前記マスク層をパターン化するステップと、
前記磁性層のアイランド区域の前記露出された一部分内に核形成領域を形成するステップであり、前記核形成領域は前記磁性層より低い磁気異方性を有する、ステップと、
前記マスク層のトーンを反転させるステップと、
アイランドおよびトレンチを形成するために前記トレンチ区域において前記磁性層をエッチング処理するステップと、
を含み、
前記マスク層のトーンを反転させるステップにおいては、新たなマスク材料を堆積させ、再エッチングし、前記マスク層を除去することにより、前記マスク層のトーンを反転させ、
前記核形成領域を形成するステップにおいては、前記磁性層が前記各磁性領域の底面をカバーするように前記核形成領域を形成する、
方法。 - 前記核形成領域を形成するステップが、前記磁性層のアイランド区域の前記露出された一部分をイオン衝突処理するステップを含む、請求項5に記載の方法。
- 前記イオン衝突処理が、前記磁性層のある深さまでの磁気異方性のみに影響を及ぼす、請求項6に記載の方法。
- 前記イオン衝突処理のイオンが、炭素、リン、ヒ素、アンチモン、セレン、硫黄、クロム、ケイ素、ゲルマニウム、窒素、水素、およびメタロイドタイプの元素からなる群から選択される、請求項6に記載の方法。
- 各前記アイランドにおける前記核形成領域と前記磁性層との体積比が約1/100〜1/2の範囲内である、請求項5に記載の方法。
- 各前記アイランドにおける前記核形成領域と前記磁性層との体積比が約1/50〜1/4の範囲内である、請求項5に記載の方法。
- 前記露出された一部分が、前記アイランド区域の表面上の中央に配置される、請求項5に記載の方法。
- 磁気媒体の製造方法であって、
基板の上面に装着されるビットパターン磁性層を設けるステップであり、前記ビットパターン磁性層はアイランドを含み、各前記アイランドは頂面および周囲面を含む、ステップと、
前記アイランドの頂面の上にマスク層を装着するステップと、
前記アイランドの周囲面上に外殻体を形成するステップであり、前記外殻体は、前記ビットパターン磁性層の磁気異方性より高い磁気異方性を有する、ステップと、
を含み、
前記アイランドの周囲面上に前記外殻体を形成するステップが、第2磁性材料のイオン注入を含む、
方法。 - 前記イオン注入が前記基板に対してある角度で実施される、請求項12に記載の方法。
- 前記ある角度が約5〜45°の範囲内である、請求項13に記載の方法。
- 各前記アイランドにおける前記ビットパターン磁性層と前記外殻体との体積比が約1/100〜1/2の範囲内である、請求項12に記載の方法。
- 各前記アイランドにおける前記ビットパターン磁性層と前記外殻体との体積比が約1/50〜1/4の範囲内である、請求項12に記載の方法。
- 前記アイランドの周囲面上に磁性材料の外殻体を形成するステップが、前記アイランドの周囲面から構成成分を選択的に除去するステップを含む、請求項12に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/760,886 US9190093B2 (en) | 2013-02-06 | 2013-02-06 | Reduced adjacent track errors in bit-patterned media |
US13/760,886 | 2013-02-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014154204A JP2014154204A (ja) | 2014-08-25 |
JP5808441B2 true JP5808441B2 (ja) | 2015-11-10 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014020879A Expired - Fee Related JP5808441B2 (ja) | 2013-02-06 | 2014-02-06 | ビットパターン媒体における隣接トラックエラーの低減 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9190093B2 (ja) |
JP (1) | JP5808441B2 (ja) |
DE (1) | DE102014001564A1 (ja) |
GB (1) | GB2511926A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9299609B2 (en) * | 2014-07-23 | 2016-03-29 | Seagate Technology Llc | Hard-mask defined bit pattern substrate |
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US6495240B1 (en) | 1999-02-10 | 2002-12-17 | Tdk Corporation | Patterned magnetic recording medium possessing recording portions with a lower height than the surrounding non-magnetic matrix |
US6383597B1 (en) * | 2000-06-21 | 2002-05-07 | International Business Machines Corporation | Magnetic recording media with magnetic bit regions patterned by ion irradiation |
JP2003318464A (ja) * | 2002-04-23 | 2003-11-07 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
US7241516B1 (en) | 2003-03-03 | 2007-07-10 | Maxtor Corporation | Soft magnetic underlayer with exchange coupling induced anisotropy for perpendicular magnetic recording media |
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-
2013
- 2013-02-06 US US13/760,886 patent/US9190093B2/en not_active Expired - Fee Related
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2014
- 2014-02-05 GB GB1401961.6A patent/GB2511926A/en not_active Withdrawn
- 2014-02-05 DE DE102014001564.5A patent/DE102014001564A1/de not_active Withdrawn
- 2014-02-06 JP JP2014020879A patent/JP5808441B2/ja not_active Expired - Fee Related
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JP2014154204A (ja) | 2014-08-25 |
GB201401961D0 (en) | 2014-03-19 |
DE102014001564A1 (de) | 2014-08-28 |
US9190093B2 (en) | 2015-11-17 |
US20140218824A1 (en) | 2014-08-07 |
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