JP5796883B2 - Thermally assisted magnetic recording medium and magnetic recording / reproducing apparatus - Google Patents
Thermally assisted magnetic recording medium and magnetic recording / reproducing apparatus Download PDFInfo
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- Recording Or Reproducing By Magnetic Means (AREA)
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Description
本発明は、ハードディスク装置（ＨＤＤ）等に用いられる熱アシスト磁気記録媒体及び磁気記録再生装置に関する。 The present invention relates to a heat-assisted magnetic recording medium and a magnetic recording / reproducing apparatus used for a hard disk device (HDD) or the like.
近年の情報のデジタル化の発展により、大容量の情報を記録できるハードディスク装置には更なる大容量化が求められている。このハードディスクの大容量化を実現するには、磁気記録媒体のノイズを低減する必要がある。このノイズ低減には、磁化遷移幅を狭くすることが求められ、それには媒体中の磁性層の磁性結晶粒子サイズを小さくすることが必要である。しかし、ノイズ低減のために磁性粒子サイズを小さくすると、磁性層の磁化を容易軸方向へ向けようとするエネルギーである磁気異方性エネルギーＫｕＶが減少するため、ＫｕＶ／ｋＴ（Ｋｕ：磁気異方性定数、Ｖ：粒子体積、ｋ：ボルツマン定数、Ｔ：温度）で表される熱ゆらぎが悪化する。 With the recent development of digitalization of information, a further increase in capacity is required for a hard disk device capable of recording a large amount of information. In order to realize the large capacity of the hard disk, it is necessary to reduce the noise of the magnetic recording medium. In order to reduce this noise, it is required to narrow the magnetization transition width, and it is necessary to reduce the magnetic crystal grain size of the magnetic layer in the medium. However, if the magnetic particle size is reduced to reduce noise, the magnetic anisotropy energy KuV, which is the energy for directing the magnetization of the magnetic layer in the direction of the easy axis, decreases, so KuV / kT (Ku: magnetic anisotropy) The thermal fluctuation expressed by the sex constant, V: particle volume, k: Boltzmann constant, T: temperature) deteriorates.
一方、熱ゆらぎを向上させるには、Ｋｕの高い材料の選択が考えられるが、Ｋｕの高い材料は一般的にＨｃも高くなるため、飽和記録が困難となる。つまり、ノイズ低減と熱ゆらぎ、飽和記録の３つを同時に改善することができない。 On the other hand, in order to improve the thermal fluctuation, it is conceivable to select a material having a high Ku. However, since a material having a high Ku generally has a high Hc, saturation recording becomes difficult. That is, noise reduction, thermal fluctuation, and saturation recording cannot be improved at the same time.
この問題に対して、熱アシスト磁気記録が着目、研究されている。熱アシスト磁気記録は、記録時に一時的に記録領域を局所加熱し、その領域の磁気異方性エネルギー定数Ｋｕを下げて、書き込みしやすい状態を作り出し記録する方式である。この場合、室温ではＫｕが十分に高いため、熱ゆらぎの問題がない。 In view of this problem, heat-assisted magnetic recording has been paid attention to and researched. Thermally assisted magnetic recording is a system in which a recording area is locally heated temporarily at the time of recording, and the magnetic anisotropy energy constant Ku of the area is lowered to create and record an easily writable state. In this case, since Ku is sufficiently high at room temperature, there is no problem of thermal fluctuation.
しかし、熱アシスト磁気記録では媒体表面の加熱時、記録領域だけでなくその隣接領域も同時に加熱されてしまうため、それらの領域のＫｕが低下し、熱ゆらぎが起こりやすくなる。また、記録後、記録領域が熱を保持したままであると熱ゆらぎが発生する可能性がある。そのため、この記録方式では記録後、磁気記録媒体の磁性層に溜まった熱を速やかに散逸させる必要がある。熱散逸性を高めるためには、記録媒体中にヒートシンク層を導入することが有効である。ヒートシンク層は熱伝導率の高い材料で構成されており、磁気ヘッドでの記録後、磁性層の熱をすばやく吸収し冷却することができる。 However, in the heat-assisted magnetic recording, when the medium surface is heated, not only the recording area but also its adjacent area is heated at the same time, so the Ku of these areas is lowered and thermal fluctuation is likely to occur. Further, if the recording area keeps heat after recording, thermal fluctuation may occur. Therefore, in this recording method, it is necessary to quickly dissipate the heat accumulated in the magnetic layer of the magnetic recording medium after recording. In order to improve heat dissipation, it is effective to introduce a heat sink layer in the recording medium. The heat sink layer is made of a material having high thermal conductivity, and can quickly absorb and cool the heat of the magnetic layer after recording by the magnetic head.
また、このヒートシンク層の位置であるが、熱を速やかに散逸させるという点を考慮すると磁性層直下或いは近傍が望ましい。しかし、この場合にはヒートシンク層の結晶配向や表面形状が、磁性層の結晶配向や結晶粒径、更にはヘッド飛行安定性に大きく影響するため、ヒートシンク層材料の選定や成膜条件の最適化などが重要である。 Further, regarding the position of the heat sink layer, it is desirable to be directly under or near the magnetic layer in consideration of the fact that heat is quickly dissipated. However, in this case, the crystal orientation and surface shape of the heat sink layer greatly affect the crystal orientation and crystal grain size of the magnetic layer, as well as the head flight stability. Etc. are important.
ヒートシンク層の組成について、例えば、特許文献１には、磁気記録媒体にＣｕＺｒとＡｇＰｄから成るヒートシンク層を用いることで高い熱伝導率と良好な機械特性を両立できるとしている。また、特許文献２には、磁気記録媒体にＣｕ、Ａｕ、Ａｇ、Ｐｔ、ＡｕＣｕ、ＰｔＡｕ、ＡｕＡｇ、Ａｕ３Ｃｕなどを適用することができると記載されている。そして、特許文献３には磁気記録ヘッドに形成するヒートシンク層として、Ａｇ、Ａｕ、Ｃｕ、Ａｌ、ＣｕＡｌ、ＡｇＰｄＣｕ、ＡｌＴｉ、ＡｌＭｏなどが列挙されている。 Regarding the composition of the heat sink layer, for example, Patent Document 1 states that both high thermal conductivity and good mechanical properties can be achieved by using a heat sink layer made of CuZr and AgPd for a magnetic recording medium. Patent Document 2 describes that Cu, Au, Ag, Pt, AuCu, PtAu, AuAg, Au3Cu, and the like can be applied to the magnetic recording medium. Patent Document 3 lists Ag, Au, Cu, Al, CuAl, AgPdCu, AlTi, AlMo, and the like as heat sink layers formed on the magnetic recording head.
このようにヒートシンク層の材料選択が磁気記録媒体の特性に大きな影響力を持つが、一般に、ヒートシンク層には高い熱散逸性が求められるため、Ａｕ、Ａｇ、Ｃｕのような熱伝導率の高い材料が主に使用されている。しかし、これらの金属は薄膜において、加熱などにより凝集しやすく、磁気記録媒体の表面形状やその磁性層の結晶配向、腐食耐性を悪化させる。 As described above, the material selection of the heat sink layer has a great influence on the characteristics of the magnetic recording medium, but generally, since the heat sink layer is required to have high heat dissipation, it has a high thermal conductivity such as Au, Ag, and Cu. The material is mainly used. However, these metals tend to aggregate in the thin film due to heating or the like, and deteriorate the surface shape of the magnetic recording medium, the crystal orientation of the magnetic layer, and the corrosion resistance.
一方、特許文献１に記載されているＡｇＰｄのような合金からなるヒートシンク層は、ある程度Ａｇの凝集を抑えることが可能だが、１Ｔｂｉｔ／ｉｎｃｈ２クラスの面記録密度を有する媒体を達成するには、ヘッドの浮上特性や表面平坦性、磁性層の結晶配向の改善が不十分である。 On the other hand, the heat sink layer made of an alloy such as AgPd described in Patent Document 1 can suppress aggregation of Ag to some extent, but in order to achieve a medium having a surface recording density of 1 Tbit / inch 2 class, The floating characteristics, surface flatness, and crystal orientation of the magnetic layer are insufficiently improved.
本発明は、このような従来の事情に鑑みて提案されたものであり、表面平坦性が高く、磁性層の配向が良く、かつヘッド浮上性が良好な熱アシスト記録媒体、並びに、そのような熱アシスト磁気記録媒体を備えた大容量の磁気記録再生装置を提供することを目的とする。 The present invention has been proposed in view of such conventional circumstances, a heat-assisted recording medium having high surface flatness, good orientation of the magnetic layer, and good head flying characteristics, and such An object of the present invention is to provide a large-capacity magnetic recording / reproducing apparatus including a heat-assisted magnetic recording medium.
上記目的を達成するために、本発明は、以下の特徴を有する磁気記録媒体を提供する。 In order to achieve the above object, the present invention provides a magnetic recording medium having the following characteristics.
（１） 基板と、前記基板上に形成された複数の下地層と、前記下地層上に形成された磁性層と、基板と磁性層の間の任意の位置に形成されたヒートシンク層を少なくとも有する磁気記録媒体であって、前記ヒートシンク層はＡｇを主成分として含み、かつ、Ｂｉ、Ｎｄ、Ｃｕ、Ｃｒから成る第一添加元素群から選択された元素を１つ以上含み、さらにＺｎ、Ｌａ、Ｇａ、Ｇｅ、Ｓｍ、Ｇｄ、Ｓｎ、Ｉｎから成る第二添加元素群から選択された元素を少なくとも１つ以上含むことを特徴とする磁気記録媒体。
（２） 第一添加元素としてＢｉとＮｄを含み、第二添加元素としてＧｅを含むことを特徴とする前項（１）の磁気記録媒体。
（３） 第一添加元素としてＢｉとＮｄを含み、第二添加元素としてＬａを含むことを特徴とする前項（１）の磁気記録媒体。
（４） 第一添加元素群の元素を０．１〜２０ａｔ％含むことを特徴とする前項（１）の磁気記録媒体。
（５） 第二添加元素群の元素を０．１〜１５ａｔ％含むことを特徴とする前項（１）の磁気記録媒体。
（６） 第一添加元素群と第二添加元素群から選ばれた元素の総和が０．２〜２５ａｔ％となることを特徴とする前項（１）の磁気記録媒体。
（７） 複数の下地層のうち、少なくとも１層がＣｒ、Ｐｔ、ＭｇＯ、ＭｎＯ、ＴｉＣ、ＴｉＮからなる群から選択された物質であることを特徴とする前項（１）〜（６）の何れか１項に記載の磁気記録媒体。
（８） 磁性層が、Ｌ１０構造を有する合金を主成分として含むことを特徴とする前項（１）〜（７）の何れか１項に記載の磁気記録媒体。
（９） 磁気記録媒体と、前記磁気記録媒体を記録方向に駆動する媒体駆動部と、前記磁気記録媒体を加熱するレーザー発生部と、前記レーザー発生部から発生したレーザー光を先端部へと導く導波路とを有して、前記磁気記録媒体に対する記録動作と再生動作とを行う磁気ヘッドと、前記磁気ヘッドを前記磁気記録媒体に対して相対移動させるヘッド移動部と、前記磁気ヘッドへの信号入力と前記磁気ヘッドから出力信号の再生とを行うための記録再生信号処理系とを備える磁気記録再生装置において、前記磁気記録媒体が前項（１）〜（８）の何れか１項に記載の磁気記録媒体であることを特徴とする磁気記録再生装置。
(1) At least a substrate, a plurality of underlayers formed on the substrate, a magnetic layer formed on the underlayer, and a heat sink layer formed at an arbitrary position between the substrate and the magnetic layer In the magnetic recording medium, the heat sink layer contains Ag as a main component, and contains one or more elements selected from the first additive element group consisting of Bi, Nd, Cu, Cr, and further Zn, La, A magnetic recording medium comprising at least one element selected from a second additive element group consisting of Ga, Ge, Sm, Gd, Sn, and In.
(2) The magnetic recording medium according to item (1), wherein Bi and Nd are included as the first additive element and Ge is included as the second additive element.
(3) The magnetic recording medium according to (1), wherein Bi and Nd are included as the first additive element, and La is included as the second additive element.
(4) The magnetic recording medium according to item (1) above, containing 0.1 to 20 at% of an element of the first additive element group.
(5) The magnetic recording medium according to item (1) above, containing 0.1 to 15 at% of an element of the second additive element group.
(6) The magnetic recording medium according to item (1), wherein the sum of elements selected from the first additive element group and the second additive element group is 0.2 to 25 at%.
(7) Any one of (1) to (6) above, wherein at least one of the plurality of underlayers is a material selected from the group consisting of Cr, Pt, MgO, MnO, TiC, and TiN. 2. A magnetic recording medium according to claim 1.
(8) The magnetic recording medium as described in any one of (1) to (7) above, wherein the magnetic layer contains an alloy having an L10 structure as a main component.
(9) A magnetic recording medium, a medium driving unit that drives the magnetic recording medium in a recording direction, a laser generating unit that heats the magnetic recording medium, and a laser beam generated from the laser generating unit is guided to the tip. A magnetic head having a waveguide for performing a recording operation and a reproducing operation on the magnetic recording medium, a head moving unit for moving the magnetic head relative to the magnetic recording medium, and a signal to the magnetic head 9. A magnetic recording / reproducing apparatus including an input and a recording / reproducing signal processing system for reproducing an output signal from the magnetic head, wherein the magnetic recording medium is any one of items (1) to (8). A magnetic recording / reproducing apparatus which is a magnetic recording medium.
以上の説明のように、本発明により、表面平坦性が高く、磁性層の配向が良く、かつヘッド浮上性が良好な熱アシスト記録媒体を提供することが可能となる。 As described above, according to the present invention, it is possible to provide a heat-assisted recording medium having high surface flatness, good orientation of the magnetic layer, and good head flying characteristics.
以下に本発明を、図面を参照しながら詳細に説明する。しかしながら本発明はこれらの例のみに限定されるものではない。特に制限の無い限り、数量、構成、位置、材料などを必要に応じて変更してもよい。 Hereinafter, the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to only these examples. As long as there is no restriction | limiting in particular, you may change a quantity, a structure, a position, material, etc. as needed.
熱アシスト磁気記録媒体の基板は、円形非磁性基板を用いることができる。材料は、ガラス、アルミ、セラミックスなどを用いることができる。ガラス基板は結晶化ガラスや非晶質ガラスなどがあるが、どちらも使用できる。その際、その表面粗さや熱容量、結晶化状態などを考慮して選択することが必要である。
媒体の加熱温度を調整することで、下地層やヒートシンク層、さらには磁性層の配向を制御することができる。
A circular non-magnetic substrate can be used as the substrate of the heat-assisted magnetic recording medium. As the material, glass, aluminum, ceramics, or the like can be used. Glass substrates include crystallized glass and amorphous glass, but both can be used. At that time, it is necessary to select in consideration of the surface roughness, heat capacity, crystallization state, and the like.
By adjusting the heating temperature of the medium, the orientation of the underlayer, the heat sink layer, and further the magnetic layer can be controlled.
下地層は、Ｃｒ、Ｐｔ、ＭｇＯ、ＭｎＯ、ＴｉＣ、ＴｉＮなどを用いることができる。例えば、下地層に（１００）配向面を作れば、その上部がＬ１０−ＦｅＰｔやＬ１０−ＣｏＰｔのような磁性層である場合、エピタキシャル成長により、磁性層に（００１）配向をとらせることができる。 For the underlayer, Cr, Pt, MgO, MnO, TiC, TiN, or the like can be used. For example, if a (100) orientation plane is formed in the underlayer, and the upper portion is a magnetic layer such as L10-FePt or L10-CoPt, the magnetic layer can be (001) oriented by epitaxial growth.
本発明を適用した磁気記録媒体のヒートシンク層は、Ａｇを主成分として含み、かつ、Ｂｉ、Ｎｄ、Ｃｕ、Ｃｒから成る第一添加元素群から選択された元素を1つ以上含み、さらにＺｎ、Ｌａ、Ｇａ、Ｇｅ、Ｓｍ、Ｇｄ、Ｓｎ、Ｉｎから成る第二添加元素群から選択された元素を少なくとも1つ以上含むことを特徴とする。 The heat sink layer of the magnetic recording medium to which the present invention is applied contains Ag as a main component, and contains one or more elements selected from the first additive element group consisting of Bi, Nd, Cu, and Cr, and Zn, It contains at least one element selected from the second additive element group consisting of La, Ga, Ge, Sm, Gd, Sn, and In.
Ａｇに第一添加元素群と第二添加元素群から選択される元素を添加したヒートシンク層を形成することで、Ａｇの凝集を抑制することができ、その結果、磁気記録媒体の表面平坦性やヘッドの浮上特性を高めることが可能で、また磁性層の結晶配向を制御しやすくできる。 By forming a heat sink layer in which an element selected from the first additive element group and the second additive element group is added to Ag, aggregation of Ag can be suppressed. As a result, surface flatness of the magnetic recording medium and The flying characteristics of the head can be improved, and the crystal orientation of the magnetic layer can be easily controlled.
Ａｇを主成分とする上記のヒートシンク層は、その熱伝導率を大幅に減少させない範囲であれば、他の添加元素を含有しても良い。例えば、ＡｇＢｉＺｎ−Ｔａ、ＡｇＢｉＺｎ−Ｃｏ、ＡｇＢｉＧａ−Ｔａ、ＡｇＢｉＬａ−Ｍｎ、ＡｇＢｉＳｍ−Ｎｉ、ＡｇＮｄＺｎ−Ｚｒ、ＡｇＮｄＺｎ−Ｍｎ、ＡｇＮｄＧｅ−Ｗ、ＡｇＮｄＳｍ−Ｒｕ、ＡｇＮｄＧｄ−Ｖ、ＡｇＣｕＧａ−Ｚｒ、ＡｇＣｕＧａ−Ｔａ、ＡｇＣｕＳｎ−Ｔａ、ＡｇＣｕＧｄ−Ｗ、ＡｇＣｒＬａ−Ｔａ、ＡｇＣｒＧｅ−Ｖ、ＡｇＣｒＩｎ−Ｃｏなどを用いることができる。 The heat sink layer containing Ag as a main component may contain other additive elements as long as the thermal conductivity is not significantly reduced. For example, AgBiZn-Ta, AgBiZn-Co, AgBiGa-Ta, AgBiLa-Mn, AgBiSm-Ni, AgNdZn-Zr, AgNdZn-Mn, AgNdGe-W, AgNdSm-Ru, AgNdGd-V, AgCuGa-Zr, Ag AgCuSn-Ta, AgCuGd-W, AgCrLa-Ta, AgCrGe-V, AgCrIn-Co, or the like can be used.
Ａｇヒートシンク層に添加される第一添加元素群から選ばれた元素の含有量は、０．１〜２０ａｔ％であることが望ましい。また、第二添加元素群から選ばれた元素の含有量は、０．１〜１５ａｔ％が望ましい。さらに、第一添加元素群と第二添加元素群から選ばれた元素の総和は、０．２〜２５ａｔ％となることが望ましい。Ａｇヒートシンク層への添加元素数や量が少なすぎるとＡｇの凝集抑制効果が不十分となる。一方、添加元素数や量が多すぎるとＡｇの凝集を抑制することはできるが、ヒートシンク層の熱伝導率を著しく損なう可能性がある。このことから、第一添加元素群と第二添加元素群から選ばれた元素の原子数の総和は、上記の範囲の中でも特に０．２〜８ａｔ％が好ましい。 The content of the element selected from the first additive element group added to the Ag heat sink layer is preferably 0.1 to 20 at%. Further, the content of an element selected from the second additive element group is preferably 0.1 to 15 at%. Furthermore, the total sum of elements selected from the first additive element group and the second additive element group is preferably 0.2 to 25 at%. If the number and amount of elements added to the Ag heat sink layer are too small, the Ag aggregation suppressing effect is insufficient. On the other hand, if the number and amount of added elements are too large, Ag aggregation can be suppressed, but the thermal conductivity of the heat sink layer may be significantly impaired. Therefore, the total number of atoms of the elements selected from the first additive element group and the second additive element group is particularly preferably 0.2 to 8 at% in the above range.
Ａｇヒートシンク層の導入位置は、設計に応じて選択できる。Ａｇヒートシンク層を下地の下に配置した場合は、磁性層との距離が離れるため熱散逸性は不利となるが、下地層或いは中間層が磁性層の直下に置かれるため磁性層の配向を制御しやすくなる。また、Ａｇヒートシンク層を磁性層直下に配置すれば、記録時に加熱された媒体表面を効果的に冷却できる。 The introduction position of the Ag heat sink layer can be selected according to the design. When the Ag heat sink layer is placed under the base, the heat dissipation is disadvantageous because the distance from the magnetic layer is large, but the orientation of the magnetic layer is controlled because the base layer or intermediate layer is placed directly under the magnetic layer. It becomes easy to do. Further, if the Ag heat sink layer is disposed immediately below the magnetic layer, the surface of the medium heated during recording can be effectively cooled.
磁性層の配向制御及び粒径制御のため、必要に応じて下地層と磁性層の間に中間層を導入してもよい。また、本発明を適用した磁気記録媒体にはＳＵＬ（軟磁性下地層）を追加してもよい。ＳＵＬをヒートシンク層と磁性層の間に形成すれば、磁性層に印加される磁界の勾配を高めることができ、ヘッドからの磁界を効率よく磁性層に印加することができる。この場合、ＳＵＬと磁性層に磁気的結合が生じるので、その調節のために中間層を置いてもよい。さらに、ＳＵＬはヒートシンク層の下側に配置してもよい。ＳＵＬの具体例としては、ＣｏＦｅＴａ、ＣｏＦｅＴａＢ、ＣｏＦｅＮｉ、ＣｏＴａＺｒ、ＣｏＮｂＺｒ、ＣｏＮｉＺｒなどが挙げられる。 An intermediate layer may be introduced between the underlayer and the magnetic layer as necessary for controlling the orientation and the particle size of the magnetic layer. Further, a SUL (soft magnetic underlayer) may be added to the magnetic recording medium to which the present invention is applied. If the SUL is formed between the heat sink layer and the magnetic layer, the gradient of the magnetic field applied to the magnetic layer can be increased, and the magnetic field from the head can be efficiently applied to the magnetic layer. In this case, since magnetic coupling occurs between the SUL and the magnetic layer, an intermediate layer may be provided for the adjustment. Further, the SUL may be disposed below the heat sink layer. Specific examples of SUL include CoFeTa, CoFeTaB, CoFeNi, CoTaZr, CoNbZr, and CoNiZr.
磁性層には、ＦｅＰｔ、ＦｅＰｔＮｉのようなＬ１０構造を有する合金を用いることができる。また、このＬ１０構造の合金に酸化物、窒化物、炭化物やＡｇ、Ａｕなどを添加することができる。例えば、ＦｅＰｔ−ＳｉＯ２を用いた場合、この合金は（００１）配向をとることが望ましい。そのために下地として、（１００）配向をとるＭｇＯ層を置くことができる。（１００）配向したＭｇＯ層上に磁性層ＦｅＰｔ−ＳｉＯ２を成膜すればエピタキシャル成長により、この磁性層は（００１）配向をとる。 For the magnetic layer, an alloy having an L10 structure such as FePt or FePtNi can be used. Further, oxides, nitrides, carbides, Ag, Au, and the like can be added to the L10 structure alloy. For example, when FePt—SiO 2 is used, it is desirable that this alloy has a (001) orientation. Therefore, an MgO layer having a (100) orientation can be placed as a base. If the magnetic layer FePt—SiO 2 is formed on the (100) oriented MgO layer, this magnetic layer assumes the (001) orientation by epitaxial growth.
さらに、このＭｇＯ下地層と磁性層の間にＡｇヒートシンク層を導入することも可能で、Ａｇヒートシンク層にＭｇＯ層と同じ（１００）配向をとらせて、磁性層を（００１）配向に導くことができる。 Furthermore, an Ag heat sink layer can be introduced between the MgO underlayer and the magnetic layer, and the same (100) orientation as that of the MgO layer is taken for the Ag heat sink layer to lead the magnetic layer to the (001) orientation. Can do.
以上のように本発明によれば、表面平坦性が高く、磁性層の配向が良く、かつヘッド浮上性が良好な熱アシスト記録媒体を実現し、そのような熱アシスト磁気記録媒体を備えた大容量の磁気記録再生装置を提供することが可能である。 As described above, according to the present invention, a heat-assisted recording medium having high surface flatness, good orientation of the magnetic layer, and good head flying property is realized, and a large-scale equipped with such a heat-assisted magnetic recording medium is provided. It is possible to provide a magnetic recording / reproducing apparatus having a capacity.
以下、実施例により本発明の効果をより明らかなものとする。なお、本発明は、以下の実施例に限定されるものではなく、その要旨を変更しない範囲で適宜変更して実施することができる。 Hereinafter, the effects of the present invention will be made clearer by examples. In addition, this invention is not limited to a following example, In the range which does not change the summary, it can change suitably and can implement.
（実施例１）
実施例１において作製した熱アシスト磁気記録媒体の層構成を図１に示す。この熱アシスト磁気記録媒体は、２．５インチガラス基板１０１にＣｒ−５０ａｔ％Ｔｉから成る下地層１０２を成膜して、５００度までランプヒーターにより加熱した後、０．５ＰａのＡｒガス雰囲気下でＤＣマグネトロンスパッタリング法により層厚３０ｎｍのＣｒからなる下地層１０３を成膜した。下地層１０３に連続して、層厚１００ｎｍのＡｇ合金からなるヒートシンク層１０４と、層厚１０ｎｍの９０ｍｏｌ％（Ｆｅ−５０ａｔ％Ｐｔ−１０ａｔ％Ｃｕ）−１０ｍｏｌ％ＳｉＯ２合金からなる磁性層１０５を順次積層したものであり、磁性層１０５の上には、更に、層厚３ｎｍのカーボンからなる保護膜１０６と、フッ素系のパーフルオロポリエーテル（ＰＦＰＥ）からなる潤滑膜１０７とが順に形成されている。
Example 1
The layer structure of the heat-assisted magnetic recording medium manufactured in Example 1 is shown in FIG. In this heat-assisted magnetic recording medium, a base layer 102 made of Cr-50 at% Ti is formed on a 2.5 inch glass substrate 101, heated to 500 degrees by a lamp heater, and then placed in an Ar gas atmosphere of 0.5 Pa. Then, an underlayer 103 made of Cr having a layer thickness of 30 nm was formed by DC magnetron sputtering. In succession to the underlayer 103, a heat sink layer 104 made of an Ag alloy with a layer thickness of 100 nm and a magnetic layer 105 made of 90 mol% (Fe-50 at% Pt-10 at% Cu) -10 mol% SiO 2 alloy with a layer thickness of 10 nm are sequentially formed. On the magnetic layer 105, a protective film 106 made of carbon having a layer thickness of 3 nm and a lubricating film 107 made of fluorine-based perfluoropolyether (PFPE) are sequentially formed on the magnetic layer 105. .
ヒートシンク層１０４としては、Ａｇ−０．４ａｔ％Ｂｉ−１．５ａｔ％Ｚｎ、Ａｇ−０．４ａｔ％Ｂｉ−２．５ａｔ％Ｇｅ、Ａｇ−０．２ａｔ％Ｎｄ−１．５ａｔ％Ｚｎ、Ａｇ−０．２ａｔ％Ｎｄ−１．８ａｔ％Ｌａ、Ａｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−２．５ａｔ％Ｇｅ、Ａｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−１．８ａｔ％Ｌａを用いた。 As the heat sink layer 104, Ag-0.4at% Bi-1.5at% Zn, Ag-0.4at% Bi-2.5at% Ge, Ag-0.2at% Nd-1.5at% Zn, Ag- 0.2 at% Nd-1.8 at% La, Ag-0.4 at% Bi-0.2 at% Nd-2.5 at% Ge, Ag-0.4 at% Bi-0.2 at% Nd-1.8 at% La was used.
実施例１の熱アシスト磁気記録媒体について、Ｘ線回折で測定を行ったところ、加熱された基板上に形成されたＣｒ下地層１０３は、（１００）配向をとっており、その上に形成されたヒートシンク層１０４も、エピタキシャル成長により（１００）配向をとっていることがわかった。 When the heat-assisted magnetic recording medium of Example 1 was measured by X-ray diffraction, the Cr underlayer 103 formed on the heated substrate had a (100) orientation and was formed thereon. It was also found that the heat sink layer 104 had the (100) orientation by epitaxial growth.
そして、この実施例１の熱アシスト磁気記録媒体のＴＥＭ観察を行ったところ、金属結晶相が非晶質相によって囲まれたグラニュラー構造をとっていることがわかった。また、結晶相の平均粒径は、６．０ｎｍであった。 Then, when the TEM observation of the thermally assisted magnetic recording medium of Example 1 was performed, it was found that the metal crystal phase had a granular structure surrounded by an amorphous phase. The average grain size of the crystal phase was 6.0 nm.
表１に、上記熱アシスト磁気記録媒体の表面粗さＲａと、Ｘ線回折から求めた磁性層ＦｅＰｔ（００１）ピーク強度の相対値、及びグライド試験の結果を示す。表面粗さＲａは、Ｖｅｅｃｏ社製ＡＦＭタッピングモードを用いて測定した。また、これらの熱アシスト磁気記録媒体の磁性層ＦｅＰｔ（００１）ピーク強度は、Ａｇ−０．４ａｔ％Ｂｉヒートシンク層を有する実施例１の媒体のＦｅＰｔ（００１）ピーク強度の値を１．００としたときの相対値として示した。さらに、グライド試験では、フェムトスライダ上にピエゾ素子を有するヘッドで、グライドハイトを０．３μｉｎｃｈ（約７．６ｎｍ）として該熱アシスト磁気記録媒体を数十枚検査した。このとき、ピエゾ素子からの出力電圧が高くなる、つまりヘッドが飛行不安定になった回数（ヒット数）、この総和を評価した媒体面数で割って、媒体１面当たりのヒット回数として算出した。 Table 1 shows the surface roughness Ra of the heat-assisted magnetic recording medium, the relative value of the magnetic layer FePt (001) peak intensity obtained from X-ray diffraction, and the results of the glide test. The surface roughness Ra was measured using an AFM tapping mode manufactured by Veeco. The magnetic layer FePt (001) peak intensity of these heat-assisted magnetic recording media is 1.00, which is the value of the FePt (001) peak intensity of the medium of Example 1 having the Ag-0.4 at% Bi heat sink layer. It was shown as a relative value. Further, in the glide test, several tens of the thermally assisted magnetic recording media were inspected with a head having a piezo element on a femto slider and a glide height of 0.3 μinch (about 7.6 nm). At this time, the output voltage from the piezo element increased, that is, the number of times the head became unstable in flight (number of hits), and this sum was divided by the number of media surfaces evaluated to calculate the number of hits per media surface. .
Ａｇに２元素を添加したヒートシンク層を有する実施例１−１〜１−４の熱アシスト磁気記録媒体では、表面粗さＲａが６．８〜７．１Åであることがわかった。また、それらの媒体のＸ線回折から求めたＦｅＰｔ（００１）の相対ピーク強度は、１．０３〜１．１３であった。対して、実施例１−５のＡｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−２．５ａｔ％Ｇｅと、実施例１−６のＡｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−１．８ａｔ％Ｌａから成るヒートシンク層を有する磁気記録媒体では、実施例１−１〜１−４の２元素添加のヒートシンク層を有する媒体よりも表面粗さＲａが小さく、ＦｅＰｔ（００１）の相対ピーク強度が大きいことがわかった。 It was found that in the heat-assisted magnetic recording media of Examples 1-1 to 1-4 having the heat sink layer in which two elements were added to Ag, the surface roughness Ra was 6.8 to 7.1 mm. Further, the relative peak intensity of FePt (001) determined from the X-ray diffraction of these media was 1.03 to 1.13. On the other hand, Ag-0.4 at% Bi-0.2 at% Nd-2.5 at% Ge in Example 1-5 and Ag-0.4 at% Bi-0.2 at% Nd- in Example 1-6 In the magnetic recording medium having the heat sink layer composed of 1.8 at% La, the surface roughness Ra is smaller than that of the medium having the two-element-added heat sink layer of Examples 1-1 to 1-4, and FePt (001) relative It was found that the peak intensity was large.
Ａｇに２元素を添加したヒートシンク層を有する実施例１−１〜１−４の磁気記録媒体では、グライド試験での媒体１面当たりのヒット数が０．１９〜０．３０回であった。一方、実施例１−５のＡｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−２．５ａｔ％Ｇｅと、実施例１−６のＡｇ−０．４ａｔ％Ｂｉ−０．２ａｔ％Ｎｄ−１．８ａｔ％Ｌａから成るヒートシンク層を有する磁気記録媒体では、ヒット数が０．０６回、０．０３回であり、前記２元素添加のヒートシンクから成る媒体よりも少ないヒット数を示したことから、ヘッド浮上性が良好なことが明らかとなった。 In the magnetic recording media of Examples 1-1 to 1-4 having the heat sink layer in which two elements were added to Ag, the number of hits per medium surface in the glide test was 0.19 to 0.30. On the other hand, Ag-0.4 at% Bi-0.2 at% Nd-2.5 at% Ge of Example 1-5 and Ag-0.4 at% Bi-0.2 at% Nd-1 of Example 1-6 In the magnetic recording medium having a heat sink layer composed of .8 at% La, the number of hits was 0.06 times and 0.03 times, indicating that the number of hits was smaller than that of the medium composed of the two-element-added heat sink. It was revealed that the head flying property was good.
（比較例１）
実施例１と同様の方法で比較例１に係る熱アシスト磁気記録媒体を作製した。ただし、ヒートシンク層１０４としてＡｇ、Ａｇ−１２ａｔ％Ｐｄ、Ａｇ−０．４ａｔ％Ｂｉ、及びＡｇ−０．２ａｔ％Ｎｄを用いた。表２にこれらのＡｇヒートシンク層を用いたときの表面粗さＲａ、Ｘ線回折から求めたＦｅＰｔ（００１）の相対ピーク強度と、グライド試験における媒体１面当たりのヒット数を示す。
(Comparative Example 1)
A heat-assisted magnetic recording medium according to Comparative Example 1 was produced in the same manner as in Example 1. However, Ag, Ag-12 at% Pd, Ag-0.4 at% Bi, and Ag-0.2 at% Nd were used as the heat sink layer 104. Table 2 shows the surface roughness Ra when using these Ag heat sink layers, the relative peak intensity of FePt (001) determined from X-ray diffraction, and the number of hits per medium surface in the glide test.
比較例１のヒートシンク層を含む媒体の表面粗さＲａは８．２Å〜９．０Åで、実施例１のヒートシンク層を有する媒体の表面粗さＲａ＝６．４〜７．１Åよりも粗く、表面平坦性が悪い。さらに、比較例１の磁気記録媒体のＦｅＰｔ（００１）の相対ピーク強度は１．００以下で、実施例１の媒体に比較して強度が小さい。一方、ＡｇとＡｇ−１２ａｔ％Ｐｄから成るヒートシンク層の媒体のグライド試験における1面当たりのヒット数は６．４回、２．４回であり、ＡｇにＢｉやＮｄを添加したヒートシンク層を適用した媒体でも１．１回、１．４回であり、実施例１の媒体に比べてヒット数が多いことがわかる。以上のことから、本発明を適用して作製された実施例１の磁気記録媒体は、表面平坦性が高く、磁性層ＦｅＰｔ（００１）配向が良く、さらにヘッド浮上性が良好であることが確認された。 The surface roughness Ra of the medium including the heat sink layer of Comparative Example 1 is 8.2 to 9.0 mm, which is rougher than the surface roughness Ra of the medium having the heat sink layer of Example 1 = 6.4 to 7.1 mm. The surface flatness is poor. Further, the relative peak intensity of FePt (001) of the magnetic recording medium of Comparative Example 1 is 1.00 or less, which is lower than that of the medium of Example 1. On the other hand, the number of hits per surface in the glide test of the medium of the heat sink layer composed of Ag and Ag-12 at% Pd is 6.4 times and 2.4 times, and a heat sink layer in which Bi or Nd is added to Ag is applied. The number of hits is 1.1 times and 1.4 times, and it is clear that the hit number is larger than that of the medium of Example 1. From the above, it was confirmed that the magnetic recording medium of Example 1 manufactured by applying the present invention had high surface flatness, good magnetic layer FePt (001) orientation, and good head flying characteristics. It was done.
（実施例２）
実施例２において作製した熱アシスト磁気記録媒体の構成を図２に示す。この媒体は、２．５インチガラス基板２０１上に、層厚１００ｎｍのＡｇ合金からなるヒートシンク層２０２を成膜し、ランプヒーターを用いて５００度まで加熱した後、層厚２５ｎｍのＣｒから成る下地層２０３と層厚２０ｎｍＭｇＯ層２０４を成膜し、さらに層厚１０ｎｍの８８ｍｏｌ％（Ｆｅ−４５ａｔ％Ｐｔ−１０ａｔ％Ｎｉ）−１０ｍｏｌ％ＳｉＯ２−２ｍｏｌ％ＴｉＯ２合金からなる磁性層２０５を順次積層したものであり、カーボンから成る保護膜２０６を３ｎｍ、続けてフッ素系のパーフルオロポリエーテル（ＰＦＰＥ）からなる潤滑膜２０７を塗布して作製した。
(Example 2)
The configuration of the heat-assisted magnetic recording medium manufactured in Example 2 is shown in FIG. In this medium, a heat sink layer 202 made of an Ag alloy having a layer thickness of 100 nm is formed on a 2.5-inch glass substrate 201, heated to 500 degrees using a lamp heater, and then made of Cr having a layer thickness of 25 nm. A base layer 203 and a MgO layer 204 having a thickness of 20 nm are formed, and a magnetic layer 205 made of 88 mol% (Fe-45 at% Pt-10 at% Ni) -10 mol% SiO2-2 mol% TiO2 alloy having a thickness of 10 nm is sequentially laminated. The protective film 206 made of carbon was formed to 3 nm, and then the
（比較例２）
実施例２と同様の方法で比較例２に係る熱アシスト磁気記録媒体を作製した。
(Comparative Example 2)
A heat-assisted magnetic recording medium according to Comparative Example 2 was produced in the same manner as in Example 2.
表３に実施例２及び比較例２で作製したＡｇヒートシンク層を有する媒体の表面粗さＲａ、磁性層ＦｅＰｔ（００１）の相対ピーク強度、グライド試験の結果を示す。ここで、ＦｅＰｔ（００１）の相対ピーク強度は、Ａｇ−０．４ａｔ％Ｂｉのヒートシンク層を用いて実施例２の方法で作製した媒体のＦｅＰｔ（００１）ピーク強度の値を１．００としたときの相対値として示した。比較例２−２、２−３に示すＡｇ−Ｍｎ−Ｇｅ、Ａｇ−Ｍｎ−Ｔｉから成るヒートシンク層を持つ磁気記録媒体に比較して、比較例２−１のＡｇ−Ｂｉ−Ｔｉから成るヒートシンク層の媒体はＲａが低くなり、グライド試験における媒体１面当たりのヒット数も少なくなる。しかし、比較例２−２のヒートシンク層のＴｉをＧｅに置換した実施例２−１のヒートシンク層を有する媒体では、Ｒａはさらに低くなり、ＦｅＰｔ（００１）相対強度が大きくなり、グライド試験におけるヒット数が大きく減少した。 Table 3 shows the surface roughness Ra of the medium having the Ag heat sink layer produced in Example 2 and Comparative Example 2, the relative peak intensity of the magnetic layer FePt (001), and the results of the glide test. Here, the relative peak intensity of FePt (001) was set to 1.00 with the value of FePt (001) peak intensity of the medium produced by the method of Example 2 using a heat sink layer of Ag-0.4 at% Bi. When shown as a relative value. Compared to the magnetic recording medium having the heat sink layer made of Ag-Mn-Ge and Ag-Mn-Ti shown in Comparative Examples 2-2 and 2-3, the heat sink made of Ag-Bi-Ti in Comparative Example 2-1 The medium of the layer has a low Ra, and the number of hits per side of the medium in the glide test also decreases. However, in the medium having the heat sink layer of Example 2-1 in which Ti of the heat sink layer of Comparative Example 2-2 is replaced with Ge, Ra is further reduced, the FePt (001) relative strength is increased, and hit in the glide test. The number has greatly decreased.
（実施例３）
実施例３において作製した熱アシスト磁気記録媒体の層構成を図３に示す。この熱アシスト磁気記録媒体は、以下の方法により作製した。まず、２．５インチガラス基板３０１に層厚１００ｎｍのＡｇ合金から成るヒートシンク層３０２を成膜し、続けて９２．５ａｔ％（Ｃｏ−５０ａｔ％Ｆｅ）−４．５ａｔ％Ｚｒ−３ａｔ％Ｂ合金から成る層厚３０ｎｍの軟磁性層３０３を成膜した。この媒体をランプヒーターにより５００度まで加熱した後、層厚２０ｎｍのＭｇＯ層３０４と層厚１０ｎｍの９０ｍｏｌ％（Ｆｅ−５０ａｔ％Ｐｔ）−１０ｍｏｌ％ＴｉＯ２合金からなる磁性層３０５を成膜した。次に、層厚３ｎｍのカーボンからなる保護膜３０６と、フッ素系のパーフルオロポリエーテル（ＰＦＰＥ）からなる潤滑膜３０７を順次形成した。
(Example 3)
The layer structure of the heat-assisted magnetic recording medium produced in Example 3 is shown in FIG. This heat-assisted magnetic recording medium was produced by the following method. First, a heat sink layer 302 made of an Ag alloy having a layer thickness of 100 nm is formed on a 2.5 inch glass substrate 301, and then 92.5 at% (Co-50 at% Fe) -4.5 at% Zr-3 at% B alloy. A soft magnetic layer 303 having a layer thickness of 30 nm was formed. This medium was heated to 500 degrees with a lamp heater, and then a magnetic layer 305 made of a 20 nm thick MgO layer 304 and a 10 nm thick 90 mol% (Fe-50 at% Pt) -10 mol% TiO2 alloy was formed. Next, a protective film 306 made of carbon having a layer thickness of 3 nm and a lubricating film 307 made of fluorine-based perfluoropolyether (PFPE) were sequentially formed.
表４に実施例３で作製した熱アシスト媒体のグライド結果を示す。実施例３のヒートシンク層を有する磁気記録媒体は、どれもグライド試験における媒体１面当たりのヒット数が０．４回以下と少なく、本発明を適用することでヘッドの浮上特性を改善できることがわかった。この中でも実施例３−９と３−１０で示すＡｇ−Ｃｕ−Ｚｎのヒートシンク層にさらにＢｉまたはＮｄを添加した４元素から成る磁気記録媒体は、特にヒット数が少ないことが見出せた。 Table 4 shows the glide results of the heat-assisted medium produced in Example 3. All of the magnetic recording media having the heat sink layer of Example 3 had a hit count of 0.4 or less per surface in the glide test, and it was found that the flying characteristics of the head can be improved by applying the present invention. It was. Among these, it was found that the magnetic recording medium composed of four elements in which Bi or Nd was further added to the Ag—Cu—Zn heat sink layer shown in Examples 3-9 and 3-10 had a particularly small number of hits.
（実施例４）
実施例４において作製した熱アシスト磁気記録媒体の層構成を図４に示す。ガラス基板４０１にＣｒ−５０ａｔ％Ｔａから成る下地層４０２を２５ｎｍ、続けてＡｇ合金から成るヒートシンク層４０３を１００ｎｍ成膜し、ランプヒーターで２５０度まで加熱した。この基板上に層厚１０ｎｍのＣｒ−１０ａｔ％Ｒｕ下地層４０４、層厚２０ｎｍのＭｇＯ層４０５を積層した後、ランプヒーターで基板を５００度まで加熱した。次いで、８６ｍｏｌ％（Ｆｅ−５５ａｔ％Ｐｔ）−１４ｍｏｌ％ＳｉＯ２合金からなる磁性層４０６を１０ｎｍ成膜した。最後に層厚３ｎｍのカーボンからなる保護膜４０７と、フッ素系のパーフルオロポリエーテル（ＰＦＰＥ）からなる潤滑膜４０８を順次形成して、実施例４−１〜４−２３のヒートシンク層を持つ媒体を作製した。
Example 4
The layer structure of the heat-assisted magnetic recording medium produced in Example 4 is shown in FIG. An underlayer 402 made of Cr-50 at% Ta was formed on a
表５に実施例４で準備した熱アシスト磁気記録媒体の表面粗さＲａ、磁性層のＦｅＰｔ（００１）相対ピーク強度、グライド試験から算出した媒体１面当たりのヒット数を示す。ここで、ＦｅＰｔ（００１）の相対ピーク強度は、Ａｇ−０．４ａｔ％Ｂｉのヒートシンク層を用いて実施例４の方法で作製した媒体のＦｅＰｔ（００１）ピーク強度の値を１．００としたときの相対値として示した。 Table 5 shows the surface roughness Ra of the heat-assisted magnetic recording medium prepared in Example 4, the FePt (001) relative peak intensity of the magnetic layer, and the number of hits per medium surface calculated from the glide test. Here, the relative peak intensity of FePt (001) was set to 1.00 as the value of FePt (001) peak intensity of the medium produced by the method of Example 4 using an Ag-0.4 at% Bi heat sink layer. When shown as a relative value.
実施例４−１〜４−７では、Ａｇヒートシンク層の第一添加元素量を変化させ、実施例４−８〜４−１４は、Ａｇヒートシンク層の第二添加元素量を変化させてその磁気記録媒体の各種特性を評価した。さらに、実施例４−１５〜４−２３では、第一添加元素と第二添加元素の総和を変化させた。実施例４のどのＡｇヒートシンク層もＡｇに第一添加元素と第二添加元素を含んでおり、表面粗さＲａは低く、グライド試験のヒット数は少ないことがわかる。一方、本実施例では、ヒートシンク層と磁性層の間に複数の下地層を挟んでいるので、ヒートシンク層がＦｅＰｔ磁性層の配向に与える影響は大きくなく、ＦｅＰｔ（００１）の相対ピーク強度がほとんど変わらないものと考えられる。 In Examples 4-1 to 4-7, the amount of the first additive element of the Ag heat sink layer was changed, and in Examples 4-8 to 4-14, the amount of the second additive element of the Ag heat sink layer was changed to change its magnetic properties. Various characteristics of the recording medium were evaluated. Furthermore, in Examples 4-15 to 4-23, the sum of the first additive element and the second additive element was changed. It can be seen that any Ag heat sink layer of Example 4 contains the first additive element and the second additive element in Ag, the surface roughness Ra is low, and the number of hits in the glide test is small. On the other hand, in this example, since a plurality of underlayers are sandwiched between the heat sink layer and the magnetic layer, the heat sink layer does not significantly affect the orientation of the FePt magnetic layer, and the relative peak intensity of FePt (001) is almost not. It is thought that it does not change.
実施例４−１〜４−７の結果より、Ａｇヒートシンク層への第一添加元素が０．１〜２０ａｔ％の範囲で特に表面粗さＲａが低く、グライド試験の媒体１面当たりのヒット数が少ないため望ましい。また、実施例４−８〜４−１４の結果から、第二添加元素が０．１〜１５ａｔ％の場合に表面粗さＲａとグライド試験の特性が特に良くなるため望ましい。実施例４−１５〜４−２３における結果より、第一添加元素と第二添加元素の総和は、０．２〜２５ａｔ％で表面粗さＲａとグライド試験による媒体１面当たりのヒット数がさらに改善されるため、この範囲が好ましい。 From the results of Examples 4-1 to 4-7, the surface roughness Ra is particularly low when the first additive element to the Ag heat sink layer is in the range of 0.1 to 20 at%, and the number of hits per medium surface in the glide test. This is desirable because there are few. From the results of Examples 4-8 to 4-14, it is desirable that the surface roughness Ra and the characteristics of the glide test are particularly improved when the second additive element is 0.1 to 15 at%. From the results in Examples 4-15 to 4-23, the sum of the first additive element and the second additive element is 0.2 to 25 at%, and the surface roughness Ra and the number of hits per one surface by the glide test are further increased. This range is preferred because it improves.
１０１…ガラス基板
１０２…下地層
１０３…下地層
１０４…ヒートシンク層
１０５…磁性層
１０６…保護膜
１０７…潤滑膜
２０１…ガラス基板
２０２…ヒートシンク層
２０３…下地層
２０４…ＭｇＯ層
２０５…磁性層
２０６…保護膜
２０７…潤滑膜
３０１…ガラス基板
３０２…ヒートシンク層
３０３…軟磁性層
３０４…ＭｇＯ層
３０５…磁性層
３０６…保護膜
３０７…潤滑膜
４０１…ガラス基板
４０２…下地層
４０３…ヒートシンク層
４０４…下地層
４０５…ＭｇＯ層
４０６…磁性層
４０７…保護膜
４０８…潤滑膜
DESCRIPTION OF SYMBOLS 101 ... Glass substrate 102 ... Underlayer 103 ... Underlayer 104 ... Heat sink layer 105 ... Magnetic layer 106 ... Protective film 107 ... Lubricating film 201 ... Glass substrate 202 ... Heat sink layer 203 ... Underlayer 204 ... MgO layer 205 ... Magnetic layer 206 ...
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