JP5768037B2 - インクジェットヘッド - Google Patents
インクジェットヘッド Download PDFInfo
- Publication number
- JP5768037B2 JP5768037B2 JP2012271489A JP2012271489A JP5768037B2 JP 5768037 B2 JP5768037 B2 JP 5768037B2 JP 2012271489 A JP2012271489 A JP 2012271489A JP 2012271489 A JP2012271489 A JP 2012271489A JP 5768037 B2 JP5768037 B2 JP 5768037B2
- Authority
- JP
- Japan
- Prior art keywords
- mounting surface
- insulating film
- wiring
- drive element
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001681 protective effect Effects 0.000 claims description 9
- 239000010408 film Substances 0.000 description 80
- 239000000758 substrate Substances 0.000 description 40
- 210000002381 plasma Anatomy 0.000 description 24
- 230000002093 peripheral effect Effects 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000009832 plasma treatment Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000014509 gene expression Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920000052 poly(p-xylylene) Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
Claims (2)
- 取付面を有した基部と、
前記基部に取り付けられた駆動素子と、
前記取付面に形成されるとともに前記駆動素子に接続された配線と、
前記駆動素子および前記配線の一部を覆って前記取付面に形成され、絶縁性を有する保護部と、
露出された前記配線に接する前記保護部の端部に設けられ、前記保護部よりも薄く、絶縁性を有し、露出された前記配線に向かうに従って厚さが減少する境界部と、
前記取付面と交差する前記基部の側面の少なくとも一部を覆い、絶縁性を有する側面保護部と、
前記取付面に向く前記側面保護部の端部に設けられ、前記側面保護部よりも薄く、絶縁性を有する側面境界部と、
を具備し、
露出された前記配線は、前記側面に沿う前記取付面の端部に設けられることを特徴とするインクジェットヘッド。 - 露出された前記配線に、前記配線を介して前記駆動素子に電圧を印加する駆動回路が接続されることを特徴とする請求項1に記載のインクジェットヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012271489A JP5768037B2 (ja) | 2012-12-12 | 2012-12-12 | インクジェットヘッド |
US14/100,233 US8931886B2 (en) | 2012-12-12 | 2013-12-09 | Inkjet head and method for manufacturing inkjet head |
CN201310670953.4A CN103862872B (zh) | 2012-12-12 | 2013-12-10 | 喷墨头及喷墨头的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012271489A JP5768037B2 (ja) | 2012-12-12 | 2012-12-12 | インクジェットヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014113807A JP2014113807A (ja) | 2014-06-26 |
JP5768037B2 true JP5768037B2 (ja) | 2015-08-26 |
Family
ID=50880510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012271489A Expired - Fee Related JP5768037B2 (ja) | 2012-12-12 | 2012-12-12 | インクジェットヘッド |
Country Status (3)
Country | Link |
---|---|
US (1) | US8931886B2 (ja) |
JP (1) | JP5768037B2 (ja) |
CN (1) | CN103862872B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6415859B2 (ja) * | 2014-06-04 | 2018-10-31 | エスアイアイ・プリンテック株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP6547249B2 (ja) * | 2014-07-31 | 2019-07-24 | ブラザー工業株式会社 | 液体吐出装置の製造方法、及び、液体吐出装置 |
JP6290814B2 (ja) * | 2015-03-30 | 2018-03-07 | 株式会社東芝 | インクジェットヘッド、インクジェットヘッドの製造方法、及び、インクジェット記録装置 |
JP2024008580A (ja) * | 2022-07-08 | 2024-01-19 | 東芝テック株式会社 | 液体吐出ヘッド |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0634349B2 (ja) * | 1983-11-30 | 1994-05-02 | 株式会社日立製作所 | 磁気バブルメモリ素子の製造方法 |
WO2001042017A1 (fr) * | 1999-12-10 | 2001-06-14 | Fujitsu Limited | Tete a jet d'encre et imprimante |
US6715860B2 (en) | 2001-04-27 | 2004-04-06 | Konica Corporation | Ink-jet head and the preparation method thereof, and a coating layer and the preparation method thereof |
JP5145636B2 (ja) * | 2005-12-27 | 2013-02-20 | 富士ゼロックス株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
JP2009202473A (ja) | 2008-02-28 | 2009-09-10 | Toshiba Tec Corp | インクジェットヘッドの製造方法およびインクジェットヘッド |
JP5196184B2 (ja) * | 2009-03-11 | 2013-05-15 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター |
JP5768393B2 (ja) * | 2011-02-10 | 2015-08-26 | 株式会社リコー | インクジェットヘッド及び画像形成装置 |
JP2012187716A (ja) * | 2011-03-08 | 2012-10-04 | Toshiba Tec Corp | インクジェットヘッドおよびインクジェットヘッドの製造方法 |
JP5358601B2 (ja) * | 2011-03-11 | 2013-12-04 | 東芝テック株式会社 | インクジェットヘッド |
JP5372054B2 (ja) * | 2011-03-11 | 2013-12-18 | 東芝テック株式会社 | インクジェットヘッド |
JP5504296B2 (ja) | 2012-02-14 | 2014-05-28 | 東芝テック株式会社 | インクジェットヘッド及びインクジェットヘッドの製造方法 |
JP2013188954A (ja) * | 2012-03-14 | 2013-09-26 | Toshiba Tec Corp | インクジェットヘッド及びインクジェットヘッドの製造方法 |
-
2012
- 2012-12-12 JP JP2012271489A patent/JP5768037B2/ja not_active Expired - Fee Related
-
2013
- 2013-12-09 US US14/100,233 patent/US8931886B2/en not_active Expired - Fee Related
- 2013-12-10 CN CN201310670953.4A patent/CN103862872B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8931886B2 (en) | 2015-01-13 |
JP2014113807A (ja) | 2014-06-26 |
CN103862872A (zh) | 2014-06-18 |
US20140160208A1 (en) | 2014-06-12 |
CN103862872B (zh) | 2016-01-20 |
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