JP5731811B2 - Method for manufacturing blazed diffraction grating and method for manufacturing mold for the same - Google Patents

Method for manufacturing blazed diffraction grating and method for manufacturing mold for the same Download PDF

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JP5731811B2
JP5731811B2 JP2010279865A JP2010279865A JP5731811B2 JP 5731811 B2 JP5731811 B2 JP 5731811B2 JP 2010279865 A JP2010279865 A JP 2010279865A JP 2010279865 A JP2010279865 A JP 2010279865A JP 5731811 B2 JP5731811 B2 JP 5731811B2
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cutting
workpiece
groove
forming
diffraction grating
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JP2012125885A5 (en
JP2012125885A (en
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隆 助川
隆 助川
幸伸 大倉
幸伸 大倉
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Canon Inc
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Canon Inc
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Priority to JP2010279865A priority Critical patent/JP5731811B2/en
Priority to EP11189105.7A priority patent/EP2466347B1/en
Priority to US13/316,613 priority patent/US9201179B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/02—Other than completely through work thickness
    • Y10T83/0304—Grooving

Description

本発明は、ブレーズ型回折格子の製造方法及びそのための型の製造方法に関する。   The present invention relates to a blazed diffraction grating manufacturing method and a mold manufacturing method therefor.

図１に示すように、ブレーズ型回折格子１は、非対称な三角形の溝形状を有し、光７が入射するブレーズ面２’とそれに隣接するカウンタ面３とを含んでおり、ブレーズ面２’とカウンタ面３とは格子平面４に対し所定の角度で傾斜している。上記のようなブレーズ型回折格子においては特定の次数に集中した回折効率が求められる。高回折効率を実現するためにはブレーズ面２’の形状が平坦であり、凹凸や粗さ等が小さいことが求められる。ブレーズ面２’の平坦度は切削体積に大きく影響を受ける。１回の切削加工における切削体積が大きいと、図２に示されるように、ブレーズ面２’にかえり（ばり）、面粗さが発生する。   As shown in FIG. 1, the blazed diffraction grating 1 has an asymmetric triangular groove shape and includes a blazed surface 2 ′ on which light 7 is incident and a counter surface 3 adjacent thereto, and the blazed surface 2 ′. The counter surface 3 is inclined at a predetermined angle with respect to the lattice plane 4. In the blazed diffraction grating as described above, diffraction efficiency concentrated on a specific order is required. In order to achieve high diffraction efficiency, the shape of the blazed surface 2 'is required to be flat, and to have small unevenness and roughness. The flatness of the blazed surface 2 'is greatly affected by the cutting volume. When the cutting volume in one cutting process is large, as shown in FIG. 2, the blaze surface 2 'is burred and surface roughness occurs.

そのため、一つの溝を形成する際に、被加工物に与えるストレスを小さくするために、浅い切削加工を何回も繰り返す溝加工方法が採られている。特許文献１には、被加工物に二等辺三角形状の溝を６回の切削加工によって溝の縁部にかえりが発生することを抑制した溝加工方法が開示されている。当該方法では、溝の形成位置から一側に偏った位置での切削加工と溝の形成位置から他側に偏った位置での切削加工とを２回ずつ、最後に、溝の形成位置で仕上げ加工を行っている。   Therefore, in order to reduce the stress applied to the workpiece when forming one groove, a groove machining method is employed in which shallow cutting is repeated many times. Patent Document 1 discloses a groove processing method in which an isosceles triangular groove on a workpiece is prevented from being burred at the edge of the groove by cutting six times. In this method, cutting at a position deviated from the groove forming position to one side and cutting at a position deviated from the groove forming position to the other side are performed twice, and finally, finishing at the groove forming position. Processing is in progress.

特開２００２−２３３９１２号公報JP 2002-233912 A

ブレーズ型回折格子を１つ製造するためには、例えば、数万個の溝を形成することを必要とすることがある。したがって、１つの溝を形成するために浅い切削加工を何度も繰り返す従来技術では、溝加工に要する時間が長すぎるため製造効率が悪い。   In order to manufacture one blazed diffraction grating, for example, it may be necessary to form tens of thousands of grooves. Therefore, in the conventional technique in which shallow cutting is repeated many times to form one groove, the time required for the groove processing is too long, and thus the manufacturing efficiency is poor.

本発明は、製造効率の点で有利なブレーズ型回折格子の製造方法を提供することを例示的目的とする。   An object of the present invention is to provide a method for manufacturing a blazed diffraction grating that is advantageous in terms of manufacturing efficiency.

本発明の１つの側面は、第１方向に沿ってそれぞれ延びる複数の溝が前記第１方向に直交する第２方向に沿って配列されたブレーズ型回折格子を製造する方法であって、前記第２方向における第１の位置で第１切刃および第２切刃を有するバイトと被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、前記第１切刃および前記第２切刃によってそれぞれ形成された第１面および第２面を有する第１の溝を形成する第１工程と、前記第１工程の後に、前記第１の位置から前記第２方向に沿って格子ピッチだけ離れた第２の位置で前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、第２の溝を形成する第２工程と、前記第２工程の後に、前記第１の位置と前記第２の位置との間の第３の位置で、前記第２切刃を前記第１の溝の前記第２面と接触させずに前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記第１面を切削して、前記第１切刃によってブレーズ面を形成する第３工程と、を含むことを特徴とする。 One aspect of the present invention is a method of manufacturing a blazed diffraction grating in which a plurality of grooves each extending along a first direction are arranged along a second direction orthogonal to the first direction, by cutting the workpiece by moving bytes having a first cutting edge and second cutting edge at a first position in two directions and the workpiece relative the first direction, the first A first step of forming a first groove having a first surface and a second surface formed by the cutting blade and the second cutting blade, respectively, and the second step from the first position after the first step. by cutting the workpiece by moving said workpiece and said byte relatively the first direction at a second position apart grating pitch along a direction, forming a second groove And after the second step, the first position and the second step Third in position, the second said and said byte cutting edge without contact with the second surface of the first groove workpiece and relatively said first direction between the second position by cutting the first side by moving to, characterized in that it comprises a third step of forming a blazed surface by said first cutting edge.

本発明によれば、例えば、製造効率の点で有利なブレーズ型回折格子の製造方法を提供することができる。   According to the present invention, for example, a method for manufacturing a blazed diffraction grating that is advantageous in terms of manufacturing efficiency can be provided.

ブレーズ型回折格子の断面図。Sectional drawing of a blaze | braze type | mold diffraction grating. 従来の溝加工方法を示す図。The figure which shows the conventional groove processing method. 本発明で用いられる切削加工機の概略図。The schematic diagram of the cutting machine used by the present invention. 本発明の溝加工方法における被加工物及び切削バイトの断面図。Sectional drawing of the to-be-processed object and the cutting tool in the groove processing method of this invention. 本発明の溝加工方法における溝加工動作を示す図。The figure which shows the groove processing operation | movement in the groove processing method of this invention. 本発明の溝加工方法を説明する図。The figure explaining the groove processing method of this invention. 本発明の溝加工方法におけるバイトの移動順序を示す図。The figure which shows the movement order of the byte | cutting-tool in the groove processing method of this invention. 本発明の溝加工方法におけるバイトの相対位置関係を示す図。The figure which shows the relative positional relationship of the byte | cutting-tool in the groove processing method of this invention. 本発明の溝加工方法で形成された溝加工品を型として使用する図。The figure which uses the grooved product formed with the groove processing method of this invention as a type | mold.

本発明を説明するために、溝加工によってブレーズ型回折格子を製造する実施形態を示す。ブレーズ型回折格子を製造するために使用される切削加工機は数十ｎｍオーダーで切込みを指令できるような位置制御可能な高精度加工機であり、工具は先端がシャープで高精度な加工転写性が得られるダイヤモンドバイト（バイト）を用いる。また被加工物の材質はダイヤモンドバイトでの切削性が良いとされる銅系、アルミ系や無電解ニッケル系に類するものを選択する。   In order to explain the present invention, an embodiment in which a blazed diffraction grating is manufactured by grooving will be described. The cutting machine used to manufacture blaze-type diffraction gratings is a high-precision machine that can control the position so that cutting can be commanded in the order of several tens of nanometers, and the tool has a sharp tip and high-precision machining transferability. Use a diamond bite that gives The material of the workpiece is selected from copper, aluminum, and electroless nickel, which are considered to have good machinability with a diamond tool.

図３に、本実施形態で使用する切削加工機１１とバイト１２と被加工物１３の配置の概略を示す。切削加工機１１は、門型をした高剛性構造を有し、外部の振動等に強く、非常に高精度な分解能で位置制御可能な超精密の切削に適した仕様となっている。この切削加工機１１では、Ｚ方向（上下方向）にスライドできる構造体にバイト１２を取付け、Ｘ方向（左右方向）とＹ方向（前後方向）とにスライドできるテーブル上に被加工物１３を取付ける。   In FIG. 3, the outline of arrangement | positioning of the cutting machine 11, the cutting tool 12, and the workpiece 13 used by this embodiment is shown. The cutting machine 11 has a portal-shaped high-rigidity structure, is resistant to external vibrations, etc., and has specifications suitable for ultra-precise cutting capable of position control with very high resolution. In this cutting machine 11, a cutting tool 12 is attached to a structure that can slide in the Z direction (up and down direction), and a workpiece 13 is mounted on a table that can slide in the X direction (left and right direction) and the Y direction (front and back direction). .

バイト１２は、図４に示すとおり、多角形の溝断面形状を転写する第１切刃１４ａおよび第２切刃１４ｂを有する。第１切刃１４ａと第２切刃１４ｂの先端がなす角度１５は形成すべき溝の開き角８（例えば８５°）とほぼ等しく、第１および第２切刃１４ａ，１４ｂの先端がなす形状は拡大したレンジで見た際に丸みは極力少ない方がよい。溝の開き角は、９０度未満とすることが望ましい。第１および第２切刃１４ａ，１４ｂの稜線の直線精度は双方とも先端部で非常に高い精度となっている。反射型の回折格子を溝加工で形成する場合、溝の壁面の仕上がりが非常に重要である。   As shown in FIG. 4, the cutting tool 12 has a first cutting edge 14 a and a second cutting edge 14 b that transfer a polygonal groove cross-sectional shape. The angle 15 formed by the tips of the first cutting blade 14a and the second cutting blade 14b is substantially equal to the opening angle 8 (for example, 85 °) of the groove to be formed, and the shape formed by the tips of the first and second cutting blades 14a, 14b. It is better to have as little roundness as possible when viewed in an expanded range. The opening angle of the groove is preferably less than 90 degrees. The straight line accuracy of the ridge lines of the first and second cutting edges 14a and 14b is very high at both ends. When forming a reflective diffraction grating by grooving, the finish of the groove wall surface is very important.

図５に示すように、バイト１２と被加工物１３とが対抗する位置でＺ方向(深さ方向)への切込み量を例えば３μｍとなるようにバイト１２を被加工物側に下ろす。そして、その状態で切削加工機１１の直進制御機構を用いて、バイト１２と被加工物と１３とを例えばＹ方向に相対移動させることによりバイト１２の切刃の形状を被加工物１３へと切削転写する加工を行う。このとき実際に移動するのはバイト側であっても良いし被加工物側であっても良い。切削加工の際にはオイルミストをバイト１２のすくい面の裏側から噴射させ加工熱を除去しながら切り屑を潤滑に流し切削におけるバイト転写状態を良好に保つようにしている。   As shown in FIG. 5, the cutting tool 12 is lowered to the workpiece side so that the cutting amount in the Z direction (depth direction) becomes, for example, 3 μm at the position where the cutting tool 12 and the workpiece 13 face each other. Then, in this state, the shape of the cutting edge of the cutting tool 12 is changed to the work piece 13 by relatively moving the cutting tool 12 and the work piece 13 in, for example, the Y direction by using the linear advance control mechanism of the cutting machine 11. Performs cutting and transfer processing. At this time, the actual movement may be on the cutting tool side or the workpiece side. In the cutting process, oil mist is sprayed from the back side of the rake face of the cutting tool 12 to remove cutting heat and flow the chips to lubrication so that the cutting tool transfer state in cutting is kept good.

バイト１２を用いて被加工物１３を切削して１つの溝を形成する方法を、図６を用いて説明する。本実施形態においては被加工物１３の切削時にバイト１２を−Ｘ方向に移動させて第１の位置に位置決めする。その後、第１の位置でバイト１２を＋Ｙ方向に所定の長さ、例えば５５ｍｍだけ直線的に移動することで第１面２ｂおよび第２面３ｂを有する５５ｍｍの長さの１つの溝（第１の溝）を形成する。第２面３ｂは溝のカウンタ面を構成するが、後述するように、第１面２ｂはブレーズ面を構成しない。図６（ａ）は、第１の溝を形成する前の被加工物１３を示しており、第１の溝の形成位置より＋Ｘ方向にはそれまでの切削加工により形成されたブレーズ面２’ａ及び第２面（カウンタ面）３ａを有する溝が連続して配列されている。本実施形態では、Ｙ方向が、溝が延びる第１方向であり、Ｘ方向が、複数の溝が配列される第１方向に直交する第２方向である。
A method of forming a single groove by cutting the workpiece 13 using the cutting tool 12 will be described with reference to FIG. In the present embodiment, the cutting tool 12 is moved in the −X direction and positioned at the first position when the workpiece 13 is cut. After that, by moving the cutting tool 12 linearly by a predetermined length, for example, 55 mm, in the + Y direction at the first position, one groove having the first surface 2 b and the second surface 3 b and having a length of 55 mm (first Groove). The second surface 3b constitutes a counter surface of the groove, but the first surface 2b does not constitute a blaze surface as will be described later. FIG. 6A shows the workpiece 13 before forming the first groove, and the blaze surface 2 ′ formed by the cutting process so far in the + X direction from the formation position of the first groove. A groove having a and a second surface (counter surface) 3a is continuously arranged. In the present embodiment, the Y direction is the first direction in which the grooves extend, and the X direction is the second direction orthogonal to the first direction in which the plurality of grooves are arranged.

図６（ｂ）を用いて、溝を形成する際の第１段階の切削加工（第１工程）について説明する。この第１段階の切削加工は、その前々回の切削加工（隣接格子に対する第１段階の切削加工）に対して−Ｘ方向に格子ピッチ例えば１０μｍだけ離れた第１の位置にバイト１２を移動させて行われる。その際に、第１切刃１４ａが格子平面４に対して所定の角度例えば８０°傾斜するようにＸ−Ｚ平面上でのバイト１２の回転角が設定される。このバイト角度を保持し、第２切刃１４ｂが断面図上で溝の幅に対して所望の幅を得られるようにＺ方向のバイト切り込み深さを決定する。第２切刃１４ｂで切り出された面はカウンタ面３ｂとなる。
With reference to FIG. 6B, the first stage cutting process (first step) when forming the groove will be described. In this first-stage cutting, the cutting tool 12 is moved to a first position separated by a grid pitch, for example, 10 μm in the −X direction with respect to the previous cutting (the first-stage cutting for the adjacent grid). Done. At that time, the rotation angle of the cutting tool 12 on the XZ plane is set so that the first cutting edge 14a is inclined at a predetermined angle, for example, 80 ° with respect to the lattice plane 4. While maintaining this cutting tool angle, the cutting depth of the cutting tool in the Z direction is determined so that the second cutting edge 14b can obtain a desired width with respect to the width of the groove on the sectional view. Face cut out in the second cutting edge 14b is a counter surface 3 b.

図６（ｃ）を用いて、第１の溝を形成するための第２段階の切削加工（第３工程）について説明する。この第２段階の切削加工では、第１の位置に対してバイト１２を−Ｘ方向に１．１７μｍ離れた第３の位置で被加工物１３に対して＋Ｙ方向に沿って切削加工を行う。また、第３の位置でＸ−Ｚ平面上でのバイト回転角は第１段階の切削加工と同様に、第１切刃１４ａが格子平面４に対して８０°傾斜するように行う。第１切刃１４ａで切り出された面はブレーズ面２’ｂとなる。この第２段階の切削加工において、第２切刃１４ｂは第１段階の切削加工で形成された第１の溝の第２面（カウンタ面）３ｂと接触させない。したがって、第１の溝に対する第２段階の切削加工において、先に形成された隣の溝のブレーズ面２’ａはストレスを受けないのでブレーズ面２’ａにかえり（ばり）や面粗さが発生することを回避できる。当然のことながら上述した格子ピッチ、バイト１２の回転角は実施形態の一例であり、変更が可能である。
With reference to FIG. 6C, the second-stage cutting (third process) for forming the first groove will be described. In this second stage of cutting, the workpiece 12 is cut along the + Y direction on the workpiece 13 at a third position that is 1.17 μm away from the first position in the −X direction. Further, the bite rotation angle on the XZ plane at the third position is set so that the first cutting edge 14a is inclined by 80 ° with respect to the lattice plane 4 in the same manner as in the first stage cutting. The surface cut out by the first cutting edge 14a becomes a blaze surface 2'b. In the second stage cutting, the second cutting edge 14b is not brought into contact with the second surface (counter surface) 3b of the first groove formed by the first stage cutting. Therefore, in the second stage cutting for the first groove, the blaze surface 2'a of the adjacent groove formed previously is not subjected to stress, so that the blaze surface 2'a has a burr or surface roughness. It can be avoided. Naturally, the lattice pitch and the rotation angle of the cutting tool 12 described above are examples of the embodiment, and can be changed.

先に形成されたブレーズ面２’ａに対してストレスを与えないように、第２切刃１４ｂが第１段階の切削加工で形成された第２面３ｂと接触させずに第２段階の切削加工を行うことでブレーズ面をかえりのない平坦なものとしている。したがって、先に形成した溝と第２段階の切削加工時のバイトとの位置関係が非常に重要である。このバイトの位置決め精度は加工機の精度に依存するが、溝加工の本数が多数になる場合は全体の加工時間が１週間を超える場合もあり、温度などの環境変動による誤差が無視できない。第１の位置で第１の溝を形成するための第１段階の切削加工（第１工程）を行い、次いで、第１の位置から格子ピッチだけ離れた第２の位置で第２の溝を形成するための第１段階の切削加工（第２工程）を行う。この第２の溝を形成するための第１段階の切削加工を行った直後に、第１の位置と第２の位置との間の第３の位置で第１の溝を形成するための第２段階の切削加工（第３工程）を行うことが平坦なブレーズ面を得ることに有効なことを見出した。第１段階及び第２段階の切削加工プロセスを−Ｘ方向に所定の回数、例えば３３５００回繰り返すことによりブレーズ型回折格子あるいは回折格子製造用の型が製造され、そのブレーズ面におけるかえり（ばり）や面粗さの量は従来の方法で作製されたものより小さい。１つの溝を形成するのに切削加工を２回しか要していないので、特許文献１に記載の従来技術に比して、平坦なブレーズ面を有するブレーズ型回折格子あるいはそのための型を効率よく製造することができる。   The second cutting edge 14b is not brought into contact with the second surface 3b formed by the first stage cutting so as not to give stress to the previously formed blaze surface 2'a. By processing, the blazed surface is made flat without burr. Therefore, the positional relationship between the previously formed groove and the cutting tool at the second stage is very important. The positioning accuracy of this tool depends on the accuracy of the processing machine, but when the number of grooving is large, the entire processing time may exceed one week, and errors due to environmental fluctuations such as temperature cannot be ignored. A first-stage cutting process (first step) for forming the first groove at the first position is performed, and then the second groove is formed at the second position separated from the first position by the lattice pitch. A first stage cutting process (second process) is performed. Immediately after performing the first-stage cutting for forming the second groove, the first groove for forming the first groove at the third position between the first position and the second position. It has been found that performing two-stage cutting (third step) is effective for obtaining a flat blazed surface. By repeating the cutting process of the first stage and the second stage a predetermined number of times in the -X direction, for example, 33500 times, a blaze type diffraction grating or a mold for manufacturing a diffraction grating is manufactured, and burr on the blaze surface The amount of surface roughness is smaller than that produced by conventional methods. Since only one cutting process is required to form one groove, a blazed diffraction grating having a flat blazed surface or a mold therefor can be efficiently used as compared with the prior art described in Patent Document 1. Can be manufactured.

図７に、切削加工を単一のバイトで繰り返す場合のバイト１２の位置の動きを示す。この図において溝形成の進行方向は右から左で、まずＳ１で、第１の位置で第１段階の切削加工を行って第１の溝のカウンタ面を形成する。続いてＳ２で、格子ピッチだけ進行方向（−Ｙ方向）にバイト１２をずらし第２の位置で第１段階の切削加工を行って第２の溝のカウンタ面を形成する。その後、Ｓ３で、格子ピッチより少ない量だけバイト１２をＸ方向に戻した位置（第３の位置）で第２段階の切削加工を行って第１の溝のブレーズ面を形成する。そして第２の溝のブレーズ面を形成する前に、Ｓ４で、第２の位置より格子ピッチ１つ分進んだ位置で第１段階の切削加工を行って第３の溝のカウンタ面を形成する。Ｓ５で、第２の溝に対するブレーズ面を形成するための第２段階の切削加工、Ｓ６で、第４の溝のカウンタ面を形成するための第１段階の切削加工、Ｓ７で第３の溝のブレーズ面を形成するための第２段階の切削加工を行う。以後、順次このようなステップを繰り返して多数の溝を形成する。   FIG. 7 shows the movement of the position of the cutting tool 12 when the cutting process is repeated with a single cutting tool. In this figure, the direction of groove formation is from right to left. First, in S1, the first stage of cutting is performed at the first position to form the counter surface of the first groove. Subsequently, in S2, the cutting tool 12 is shifted in the advancing direction (−Y direction) by the lattice pitch, and the first stage cutting is performed at the second position to form the counter surface of the second groove. After that, in S3, a second stage of cutting is performed at a position (third position) where the cutting tool 12 is returned in the X direction by an amount smaller than the lattice pitch to form a blazed surface of the first groove. Before the blazed surface of the second groove is formed, the counter surface of the third groove is formed by performing the first stage cutting at a position advanced by one lattice pitch from the second position in S4. . In S5, the second stage cutting for forming the blaze surface for the second groove, in S6, the first stage cutting for forming the counter surface of the fourth groove, and in S7 the third groove A second stage of cutting is performed to form the blaze surface. Thereafter, a number of grooves are formed by sequentially repeating such steps.

図８は、格子ピッチに準じた第１段階の切削加工の位置と第２段階の切削加工の位置との相対的な関係を説明した図である。Ｓ１の（ｎ−１）番目の溝のカウンタ面を形成するための第１段階の切削加工の位置Ｐｎ−１（第１の位置）と、Ｓ２のｎ番目の溝のカウンタ面を形成するための第１１段階の切削加工の位置Ｐｎ（第２の位置）との間隔が格子ピッチｄである。（ｎ−１）番目の溝のブレーズ面を形成するための第２段階の切削加工の位置Ｓｎ（第３の位置）は、位置Ｐｎ−１（第１の位置）と位置Ｐｎ（第２の位置）との間に位置する。 FIG. 8 is a diagram for explaining the relative relationship between the position of the first-stage cutting and the position of the second-stage cutting according to the lattice pitch. A first-stage cutting position P n-1 (first position) for forming a counter surface of the (n-1) -th groove of S1 and a counter surface of the n-th groove of S2 are formed. The distance from the cutting position P n (second position) for the eleventh stage is the lattice pitch d. The position S n (third position) of the second stage cutting for forming the blazed surface of the (n−1) -th groove is the position P n−1 (first position) and the position P n ( 2nd position).

このような方法により製造される高精度なブレーズ面を有する溝で構成されるブレーズ型回折格子は、紫外帯域の光源であるエキシマレーザの波長選択素子として用いられる。   A blazed diffraction grating composed of a groove having a highly accurate blazed surface manufactured by such a method is used as a wavelength selection element of an excimer laser which is a light source in the ultraviolet band.

本実施形態に記載された切削加工により形成された回折格子は、ブレーズ型回折格子を製造するための型として使用しうる。図９に示すように、切削加工により形成された型８１にエポキシ樹脂を充填し、樹脂を支える基材８３を重ねた後にエポキシ樹脂を硬化させることで硬化したエポキシ樹脂層８２は基材８３に密着する。この後、図９のように、基材８３を型８１から引き離すことで、型８１の格子形状は樹脂層８２に転写され、エポキシ樹脂からなるブレーズ型回折格子８２が得られる。型８１のブレーズ面に対応する面は、かえり（ばり）がなく平坦であるから、型８１を用いて製造されたブレーズ型回折格子８２のブレーズ面は平坦である。このような回折格子のレプリカを製造するための詳細は、特開平１０−２０９５３３号公報に記載されている。   The diffraction grating formed by the cutting process described in the present embodiment can be used as a mold for manufacturing a blazed diffraction grating. As shown in FIG. 9, the epoxy resin layer 82 cured by filling the mold 81 formed by cutting with an epoxy resin and stacking the base material 83 supporting the resin and then curing the epoxy resin is formed on the base material 83. In close contact. Thereafter, as shown in FIG. 9, by separating the substrate 83 from the mold 81, the grating shape of the mold 81 is transferred to the resin layer 82, and a blazed diffraction grating 82 made of epoxy resin is obtained. Since the surface corresponding to the blazed surface of the mold 81 is flat without burrs, the blazed surface of the blazed diffraction grating 82 manufactured using the mold 81 is flat. Details for manufacturing such a replica of a diffraction grating are described in JP-A-10-209533.

以上、本発明の実施の形態を説明してきたが、本発明はこれらの実施の形態に限定されず、その要旨の範囲内において様々な変形及び変更が可能である。   As mentioned above, although embodiment of this invention was described, this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

Claims (6)

第１方向に沿ってそれぞれ延びる複数の溝が前記第１方向に直交する第２方向に沿って配列されたブレーズ型回折格子を製造する方法であって、
前記第２方向における第１の位置で第１切刃および第２切刃を有するバイトと被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、前記第１切刃および前記第２切刃によってそれぞれ形成された第１面および第２面を有する第１の溝を形成する第１工程と、
前記第１工程の後に、前記第１の位置から前記第２方向に沿って格子ピッチだけ離れた第２の位置で前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、第２の溝を形成する第２工程と、
前記第２工程の後に、前記第１の位置と前記第２の位置との間の第３の位置で、前記第２切刃を前記第１の溝の前記第２面と接触させずに前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記第１面を切削して、前記第１切刃によってブレーズ面を形成する第３工程と、
を含む、ことを特徴とする方法。 A method of manufacturing a blazed diffraction grating in which a plurality of grooves extending along a first direction are arranged along a second direction orthogonal to the first direction,
Cutting the workpiece by relatively moving the cutting tool and the workpiece having the first cutting edge and the second cutting edge at the first position in the second direction in the first direction; A first step of forming a first groove having a first surface and a second surface respectively formed by a first cutting blade and the second cutting blade;
After the first step, the cutting tool and the workpiece are relatively moved in the first direction at a second position separated from the first position by a lattice pitch along the second direction. Cutting the workpiece by the second step of forming a second groove,
After the second step, in a third position between the first position and the second position, the second cutting edge is not brought into contact with the second surface of the first groove. A third step of cutting the first surface by relatively moving the cutting tool and the workpiece in the first direction, and forming a blazed surface by the first cutting edge;
A method characterized by comprising: 前記ブレーズ面および前記第２面で形成される溝の開き角は、９０度未満である、ことを特徴とする請求項１に記載の方法。   The method according to claim 1, wherein an opening angle of a groove formed by the blazed surface and the second surface is less than 90 degrees. 第１方向に沿ってそれぞれ延びる複数の溝が前記第１方向に直交する第２方向に沿って配列された、ブレーズ型回折格子を製造するための型を製造する方法であって、
前記第２方向における第１の位置で第１切刃および第２切刃を有するバイトと被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、前記第１切刃および前記第２切刃によってそれぞれ形成された第１面および第２面を有する第１の溝を形成する第１工程と、
前記第１工程の後に、前記第１の位置から前記第２方向に沿って格子ピッチだけ離れた第２の位置で前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記被加工物を切削して、第２の溝を形成する第２工程と、
前記第２工程の後に、前記第１の位置と前記第２の位置との間の第３の位置で、前記第２切刃を前記第１の溝の前記第２面と接触させずに前記バイトと前記被加工物とを相対的に前記第１方向に移動させることにより前記第１面を切削して、前記第１切刃によって前記ブレーズ型回折格子のブレーズ面に対応する面を形成する第３工程と、
を含む、ことを特徴とする方法。 A method of manufacturing a mold for manufacturing a blazed diffraction grating, wherein a plurality of grooves each extending along a first direction are arranged along a second direction orthogonal to the first direction,
Cutting the workpiece by relatively moving the cutting tool and the workpiece having the first cutting edge and the second cutting edge at the first position in the second direction in the first direction; A first step of forming a first groove having a first surface and a second surface respectively formed by a first cutting blade and the second cutting blade;
After the first step, the cutting tool and the workpiece are relatively moved in the first direction at a second position separated from the first position by a lattice pitch along the second direction. Cutting the workpiece by the second step of forming a second groove,
After the second step, in a third position between the first position and the second position, the second cutting edge is not brought into contact with the second surface of the first groove. The first surface is cut by relatively moving the cutting tool and the workpiece in the first direction, and a surface corresponding to the blazed surface of the blazed diffraction grating is formed by the first cutting edge. A third step;
A method characterized by comprising: 被加工物に、互いに平行な複数のブレーズ面および互いに平行な複数のカウンタ面を形成して、回折格子を製造する方法であって、
前記被加工物における第１位置に、第１ブレーズ面を形成する第１の工程と、
切削加工を行い、前記被加工物における第２位置に、前記第１ブレーズ面に平行な第２ブレーズ面を形成する第２の工程と、
前記第１位置と前記第２位置との間に、前記第１ブレーズ面に平行な面およびカウンタ面を形成する第３の工程と、
を含み、
前記第２の工程は、前記第１の工程の後かつ前記第３の工程の後に行われ、前記第３の工程で形成された前記第１ブレーズ面に平行な前記面の一部分を切削する、ことを特徴とする方法。 A method of manufacturing a diffraction grating by forming a plurality of parallel blazed surfaces and a plurality of parallel counter surfaces on a workpiece,
A first position in said workpiece, a first step of forming a first blaze plane,
Perform cutting, a second position in said workpiece, a second step of forming a second blaze plane parallel to the first blaze plane,
Between the first position and the second position, a third step of forming a surface parallel and counter surfaces on the first blaze plane,
Including
The second step, after the first step and is performed after the third step, cutting a portion of said parallel surface to said first blaze surface formed in the third step, A method characterized by that. 前記第１の工程では、切削加工を行うことによって、前記第１ブレーズ面を形成し、
前記第３の工程では、切削加工を行うことによって、前記カウンタ面を形成し、
前記第１の工程は、前記第３の工程の後に行われ、前記第３の工程で形成された前記カウンタ面の一部分を切削する、ことを特徴とする請求項４に記載の方法。 In the first step, by performing cutting, to form the first blaze plane,
Wherein in the third step, by performing cutting, forming the counter surface,
The first step is the performed after the third step, the third cutting portion of the counter surface formed in step A method according to claim 4, characterized in that. 被加工物に、互いに平行な複数のブレーズ面に対応する面および互いに平行な複数のカウンタ面に対応する面を形成して、回折格子を製造するための型を製造する方法であって、
前記被加工物における第１位置に、前記回折格子の第１ブレーズ面に対応する面を形成する第１の工程と、
切削加工を行い、前記被加工物における第２位置に、前記回折格子の前記第１ブレーズ面に対応する面に平行な前記回折格子の第２ブレーズ面に対応する面を形成する第２の工程と、
前記第１位置と前記第２位置との間に、前記回折格子の前記第１ブレーズ面に対応する面に平行な面および前記回折格子のカウンタ面に対応する面を形成する第３の工程と、
を含み、
前記第２の工程は、前記第１の工程の後かつ前記第３の工程の後に行われ、前記第３の工程で形成された前記回折格子の前記第１ブレーズ面に対応する面に平行な前記面の一部分を切削する、ことを特徴とする方法。 A method of manufacturing a mold for manufacturing a diffraction grating by forming a surface corresponding to a plurality of blazed surfaces parallel to each other and a surface corresponding to a plurality of counter surfaces parallel to each other on a workpiece,
A first position in said workpiece, a first step of forming a surface corresponding to the first blaze surface of the diffraction grating,
Perform cutting, the second position in the workpiece, the second step of forming the corresponding face on the second blaze surface of the diffraction grating is parallel to the plane corresponding to the first blaze surface of the diffraction grating When,
Between the first position and the second position, a third step of forming said surface corresponding to the counter surface of the parallel plane and the diffraction grating to the corresponding surface on the first blaze surface of said diffraction grating ,
Including
The second step, the and the after the first step is performed after the third step, parallel to the corresponding face on the first blaze surface of the third of the diffraction grating formed in step cutting a portion of the surface, wherein the.
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