JP5709254B2 - Sensor - Google Patents

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JP5709254B2
JP5709254B2 JP2011032460A JP2011032460A JP5709254B2 JP 5709254 B2 JP5709254 B2 JP 5709254B2 JP 2011032460 A JP2011032460 A JP 2011032460A JP 2011032460 A JP2011032460 A JP 2011032460A JP 5709254 B2 JP5709254 B2 JP 5709254B2
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acoustic wave
surface acoustic
propagation characteristic
substrate
detection unit
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JP2012173012A (en
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新荻　正隆
正隆 新荻
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Seiko Instruments Inc
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Description

この発明は、センサに関する。   The present invention relates to a sensor.

従来、例えば圧電基板上に対向配置された櫛形電極と反射器との間で弾性表面波を往復伝搬させ、雰囲気の湿度や温度に応じた弾性表面波の伝搬特性の変化に基づき、雰囲気の湿度や温度を検出するセンサが知られている。（例えば、特許文献１および特許文献２参照）。   Conventionally, for example, a surface acoustic wave is reciprocally propagated between a comb electrode and a reflector disposed on a piezoelectric substrate, and the humidity of the atmosphere is determined based on changes in the propagation characteristics of the surface acoustic wave according to the humidity and temperature of the atmosphere. Sensors for detecting temperature and temperature are known. (For example, refer to Patent Document 1 and Patent Document 2).

特開２０１０−９６５５８号公報JP 2010-96558 A 特開２００５−１２１４９８号公報JP 2005-121498 A

ところで、上記従来技術に係るセンサにおいては、雰囲気の湿度や温度に対する感度および検出精度を向上させるとともに、小型化することが望まれている。   By the way, in the sensor according to the above prior art, it is desired to improve the sensitivity and detection accuracy with respect to the humidity and temperature of the atmosphere and to reduce the size.

本発明は上記事情に鑑みてなされたもので、感度および検出精度を向上させるとともに、小型化することが可能なセンサを提供することを目的としている。   The present invention has been made in view of the above circumstances, and an object thereof is to provide a sensor that can improve sensitivity and detection accuracy and can be miniaturized.

上記課題を解決して係る目的を達成するために、本発明の第１態様に係るセンサは、板状の基体（例えば、実施の形態での基体２１）と、片持ち梁状に前記基体の端部を支持する支持部（例えば、実施の形態での支持部２２）と、該基体の表面を伝搬する弾性表面波を励起するとともに、前記表面を伝搬した前記弾性表面波を受信して、受信結果の信号を出力する弾性表面波励起受信部（例えば、実施の形態での櫛形電極２３）とを備える弾性表面波素子（例えば、実施の形態での弾性表面波素子１１）と、前記弾性表面波励起受信部から出力された信号に基づいて前記弾性表面波の伝搬特性を検出する伝搬特性検出部（例えば、実施の形態での伝搬特性検出部１５）と、前記伝搬特性検出部により検出された前記伝搬特性に応じて温度を検出する状態量検出部（例えば、実施の形態での状態量検出部１６）とを備え、前記基体の裏面は、前記基体とは異なる熱膨張係数の被覆層（例えば、実施の形態での被覆層２５）により被覆されている。 In order to solve the above problems and achieve the object, a sensor according to a first aspect of the present invention includes a plate-like base (for example, the base 21 in the embodiment) and a cantilever-like form of the base. Exciting the surface acoustic wave propagating through the surface while exciting the surface acoustic wave propagating through the surface of the base and the supporting portion (for example, the supporting portion 22 in the embodiment) supporting the end, A surface acoustic wave element (for example, the surface acoustic wave element 11 in the embodiment) including a surface acoustic wave excitation receiving unit (for example, the comb-shaped electrode 23 in the embodiment) that outputs a signal of the reception result, and the elasticity Propagation characteristic detection unit (for example, propagation characteristic detection unit 15 in the embodiment) that detects the propagation characteristic of the surface acoustic wave based on the signal output from the surface wave excitation receiver, and detected by the propagation characteristic detection unit The temperature is detected according to the propagation characteristics measured. State quantity detection unit (for example, the state amount detecting section 16 in the embodiment) and a rear surface of the substrate, the coating layer of the different thermal expansion coefficients from that of the substrate (e.g., the coating layer in the embodiment 25).

また、本発明の第２態様に係るセンサは、板状の基体（例えば、実施の形態での基体２１）と、片持ち梁状に前記基体の端部を支持する支持部（例えば、実施の形態での支持部２２）と、該基体の表面を伝搬する弾性表面波を励起するとともに、前記表面を伝搬した前記弾性表面波を受信して、受信結果の信号を出力する弾性表面波励起受信部（例えば、実施の形態での櫛形電極２３）とを備える弾性表面波素子（例えば、実施の形態での弾性表面波素子１１）と、前記弾性表面波励起受信部から出力された信号に基づいて前記弾性表面波の伝搬特性を検出する伝搬特性検出部（例えば、実施の形態での伝搬特性検出部１５）と、前記伝搬特性検出部により検出された前記伝搬特性に応じて湿度または温度を検出する状態量検出部（例えば、実施の形態での状態量検出部１６）とを備え、前記基体の裏面は、外部に開口した気孔（例えば、実施の形態での気孔３１ａ）が分散配置されている多孔質材（例えば、実施の形態での多孔質材３１）により被覆されている。 Further, the sensor according to the second aspect of the present invention includes a plate-like base (for example, the base 21 in the embodiment) and a support portion (for example, an implementation) that supports the end of the base in a cantilever shape. The surface acoustic wave excitation reception which excites the surface acoustic wave propagating on the surface of the support 22) and the base body and receives the surface acoustic wave propagated on the surface and outputs a signal of the reception result. A surface acoustic wave device (for example, the surface acoustic wave device 11 in the embodiment) including a portion (for example, the comb-shaped electrode 23 in the embodiment), and a signal output from the surface acoustic wave excitation receiver A propagation characteristic detection unit (for example, a propagation characteristic detection unit 15 in the embodiment) for detecting the propagation characteristic of the surface acoustic wave, and a humidity or temperature according to the propagation characteristic detected by the propagation characteristic detection unit. State quantity detection unit to detect (for example, A state quantity detecting unit 16) in the facilities of the form, the back surface of the substrate is porous material pores open to the outside (e.g., pores 31a in the embodiment) are distributed (e.g., implemented It is covered with a porous material 31) in the form of

さらに、本発明の第３態様に係るセンサでは、前記状態量検出部は、前記弾性表面波の伝搬特性と前記弾性表面波素子の前記表面周辺の雰囲気の状態との対応関係を示すデータを記憶しており、前記伝搬特性検出部により検出された前記伝搬特性に対応する前記雰囲気の状態を前記データから取得する。   Furthermore, in the sensor according to the third aspect of the present invention, the state quantity detection unit stores data indicating a correspondence relationship between the propagation characteristics of the surface acoustic wave and the state of the atmosphere around the surface of the surface acoustic wave element. The atmosphere state corresponding to the propagation characteristic detected by the propagation characteristic detection unit is acquired from the data.

さらに、本発明の第４態様に係るセンサでは、前記弾性表面波励起受信部および前記伝搬特性検出部は互いに無線通信可能である。   Furthermore, in the sensor according to the fourth aspect of the present invention, the surface acoustic wave excitation receiver and the propagation characteristic detector can communicate with each other wirelessly.

本発明の第１態様に係るセンサによれば、弾性表面波が励起される基体の裏面は、基体とは異なる熱膨張係数の被覆層を有することから、例えば被覆層を備えていない場合に比べて、温度変化に応じた基体の表面形状の変化が大きくなり、温度に対する感度および検出精度を向上させることができる。
これにより、温度に対する所望の感度および検出精度を確保しつつ、小型化することができる。 According to the sensor of the first aspect of the present invention, the back surface of the base body on which the surface acoustic wave is excited has a coating layer having a thermal expansion coefficient different from that of the base body. Thus, the change in the surface shape of the substrate in accordance with the temperature change becomes large, and the sensitivity to temperature and the detection accuracy can be improved.
Thereby, it is possible to reduce the size while ensuring desired sensitivity and detection accuracy with respect to temperature.

また、本発明の第２態様に係るセンサによれば、弾性表面波が励起される基体の裏面は、多孔質材の被覆層を有することから、例えば被覆層を備えていない場合に比べて、温度変化または湿度変化に応じた基体の表面形状の変化が大きくなり、温度または湿度に対する感度および検出精度を向上させることができる。
これにより、温度または湿度に対する所望の感度および検出精度を確保しつつ、小型化することができる。 Further, according to the sensor according to the second aspect of the present invention, the back surface of the base body on which the surface acoustic wave is excited has a porous material coating layer, and therefore, for example, compared with a case where no coating layer is provided, The change in the surface shape of the substrate in response to the temperature change or humidity change becomes large, and the sensitivity and detection accuracy with respect to temperature or humidity can be improved.
Thereby, it is possible to reduce the size while ensuring desired sensitivity and detection accuracy with respect to temperature or humidity.

さらに、本発明の第３態様に係るセンサによれば、予め作成されたデータを参照して、伝搬特性検出部により検出された伝搬特性に対応した雰囲気の状態（例えば、温度や湿度）を容易に取得することができる。   Furthermore, according to the sensor according to the third aspect of the present invention, it is easy to refer to pre-created data to determine the atmospheric state (for example, temperature and humidity) corresponding to the propagation characteristic detected by the propagation characteristic detection unit. Can be obtained.

さらに、本発明の第４態様に係るセンサによれば、利便性を向上させることができる。   Furthermore, according to the sensor of the fourth aspect of the present invention, convenience can be improved.

本発明の実施の形態に係るセンサの構成図である。It is a block diagram of the sensor which concerns on embodiment of this invention. 本発明の実施の形態に係るセンサの弾性表面波素子の構成図である。It is a block diagram of the surface acoustic wave element of the sensor which concerns on embodiment of this invention. 本発明の実施の形態の変形例に係るセンサの弾性表面波素子の構成図である。It is a block diagram of the surface acoustic wave element of the sensor which concerns on the modification of embodiment of this invention.

以下、本発明の一実施形態に係るセンサについて添付図面を参照しながら説明する。
本実施の形態によるセンサ１０は、例えば図１に示すように、弾性表面波素子１１と、送受信部１２と、サーキュレータ１３と、発振器１４と、伝搬特性検出部１５と、状態量検出部１６とを備えて構成されている。 Hereinafter, a sensor according to an embodiment of the present invention will be described with reference to the accompanying drawings.
For example, as shown in FIG. 1, the sensor 10 according to the present embodiment includes a surface acoustic wave element 11, a transmission / reception unit 12, a circulator 13, an oscillator 14, a propagation characteristic detection unit 15, and a state quantity detection unit 16. It is configured with.

弾性表面波素子１１は、例えば、板状の基体２１と、片持ち梁状に基体２１の端部を支持する支持部２２と、櫛形電極２３と、反射器２４と、被覆層２５とを備えて構成されている。   The surface acoustic wave element 11 includes, for example, a plate-like base 21, a support 22 that supports the end of the base 21 in a cantilever shape, a comb-shaped electrode 23, a reflector 24, and a coating layer 25. Configured.

板状の基体２１は、例えばニオブ酸リチウム（ＬｉＮｂＯ３）やタンタル酸リチウム（ＬｉＴａＯ３）や水晶などの圧電性材料の単結晶からなり、表面に励起される弾性表面波が櫛形電極２３と反射器２４との間で伝搬する伝搬経路２１ａを有している。   The plate-like substrate 21 is made of a single crystal of a piezoelectric material such as lithium niobate (LiNbO 3), lithium tantalate (LiTaO 3), or quartz, and surface acoustic waves excited on the surface are comb-shaped electrodes 23 and reflectors 24. And a propagation path 21a that propagates between the two.

櫛形電極２３は、基体２１の表面２１Ａ上に形成されたＡｕ、Ａｌ、Ｃｕ、Ｃｒなどの金属層から成り、例えば櫛歯が向き合い、かつ、互い違いになるように形成された一対の電極である。
櫛形電極２３は、例えば真空蒸着やスパッタリングなどによって基体２１上に金属層が形成された後に、フォトリソグラフィーによるパターニングによって形成される。 The comb-shaped electrode 23 is a pair of electrodes made of a metal layer such as Au, Al, Cu, and Cr formed on the surface 21A of the base 21 and formed so that, for example, the comb teeth face each other and are staggered. .
The comb electrode 23 is formed by patterning by photolithography after a metal layer is formed on the base 21 by, for example, vacuum deposition or sputtering.

櫛形電極２３は、発振器１４から高周波の電気信号（高周波信号）が入力されると弾性表面波を励起する。
また、櫛形電極２３は、反射器２４によって反射されつつ基体２１の表面２１Ａ上を伝搬した弾性表面波を受信し、受信結果の信号をアンテナ２３ａを介して出力する。 The comb electrode 23 excites a surface acoustic wave when a high-frequency electric signal (high-frequency signal) is input from the oscillator 14.
The comb electrode 23 receives the surface acoustic wave that has been reflected on the surface 21A of the base 21 while being reflected by the reflector 24, and outputs a signal as a reception result via the antenna 23a.

反射器２４は、例えば基体２１の表面２１Ａ上において櫛形電極２３から出力される弾性表面波の伝搬方向に櫛形電極２３から所定距離だけ離間した位置で伝搬方向に対して垂直な方向に延在するように設けられ、例えば金属膜の蒸着により形成されている。   The reflector 24 extends, for example, on the surface 21A of the base 21 in a direction perpendicular to the propagation direction at a position separated from the comb electrode 23 by a predetermined distance in the propagation direction of the surface acoustic wave output from the comb electrode 23. For example, it is formed by vapor deposition of a metal film.

被覆層２５は、基体２１とは異なる熱膨張係数を有する材料（例えば、基体２１よりも熱膨張係数が大きいＡｌなどの金属など）から成り、例えば基体２１の裏面２１Ｂを被覆している。
この被覆層２５は、例えば基体２１の裏面２１Ｂの全面に無電解めっきが行なわれて形成されている。 The covering layer 25 is made of a material having a thermal expansion coefficient different from that of the base body 21 (for example, a metal such as Al having a larger thermal expansion coefficient than the base body 21), and covers the back surface 21B of the base body 21, for example.
The coating layer 25 is formed, for example, by electroless plating on the entire back surface 21B of the base 21.

送受信部１２はアンテナ１２ａを備え、弾性表面波素子１１の櫛形電極２３と無線通信可能とされている。   The transmission / reception unit 12 includes an antenna 12 a and is capable of wireless communication with the comb-shaped electrode 23 of the surface acoustic wave element 11.

サーキュレータ１３は、送受信部１２と発振器１４と伝搬特性検出部１５とに接続され、発振器１４から出力される高周波信号を送受信部１２に入力し、送受信部１２から出力される信号を伝搬特性検出部１５に入力する。   The circulator 13 is connected to the transmission / reception unit 12, the oscillator 14, and the propagation characteristic detection unit 15. The circulator 13 inputs a high-frequency signal output from the oscillator 14 to the transmission / reception unit 12, and the signal output from the transmission / reception unit 12 to the propagation characteristic detection unit. 15

発振器１４は、高周波信号を出力する。
伝搬特性検出部１５は、例えば櫛形電極２３から出力されて送受信部１２により受信された信号に対するフーリエ変換などを行ない、弾性表面波素子１１の表面（つまり、基体２１の表面２１Ａ）を伝搬する弾性表面波の伝搬速度や位相や強度などの伝搬特性を検出する。 The oscillator 14 outputs a high frequency signal.
The propagation characteristic detection unit 15 performs, for example, Fourier transform on a signal output from the comb-shaped electrode 23 and received by the transmission / reception unit 12 and the like, and propagates on the surface of the surface acoustic wave element 11 (that is, the surface 21A of the base 21). Propagation characteristics such as propagation speed, phase and intensity of surface waves are detected.

状態量検出部１６は、伝搬特性検出部１５により検出された伝搬特性の検出結果に基づき、弾性表面波素子１１の表面周辺の雰囲気の状態量、例えば温度を検出する。   The state quantity detection unit 16 detects the state quantity of the atmosphere around the surface of the surface acoustic wave element 11, for example, the temperature, based on the detection result of the propagation characteristic detected by the propagation characteristic detection unit 15.

すなわち、例えば図２（Ａ），（Ｂ）に示すように、弾性表面波素子１１の表面周辺の雰囲気の温度に応じて弾性表面波素子１１の形状変化、例えば被覆層２５の膨張または収縮に起因する基体２１の裏面２１Ｂの膨張または収縮により伝搬経路２１ａの経路長や形状などの変化が生じると、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性が変化する。   That is, for example, as shown in FIGS. 2A and 2B, the shape of the surface acoustic wave element 11 changes according to the temperature of the atmosphere around the surface of the surface acoustic wave element 11, for example, the expansion or contraction of the coating layer 25. When a change in the path length or shape of the propagation path 21a occurs due to expansion or contraction of the back surface 21B of the base body 21 due to this, the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a change.

状態量検出部１６は、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性の変化の検出結果に基づいて、例えば予め記憶している所定マップなどを参照して、弾性表面波素子１１の表面周辺の雰囲気の温度を検出する。
なお、所定マップは、例えば、弾性表面波素子１１の表面周辺の雰囲気の状態（例えば、温度）と、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性との対応関係を示すデータである。 The state quantity detection unit 16 refers to, for example, a predetermined map stored in advance based on the detection result of the change in the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a. Detect the atmosphere temperature.
The predetermined map is, for example, data indicating a correspondence relationship between the state of the atmosphere around the surface of the surface acoustic wave element 11 (for example, temperature) and the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a.

上述したように、本実施の形態によるセンサ１０によれば、弾性表面波が励起される基体２１の裏面２１Ｂは基体２１とは異なる熱膨張係数の被覆層２５を有することから、例えば被覆層２５を備えていない場合に比べて、温度変化に応じた基体２１の表面形状の変化が大きくなり、温度に対する感度および検出精度を向上させることができる。
しかも、板状の基体２１に被覆層２５を容易かつ安定に形成することができ、形成に煩雑な手間がかかることを防止することができる。 As described above, according to the sensor 10 according to the present embodiment, the back surface 21B of the base body 21 to which the surface acoustic wave is excited has the coating layer 25 having a thermal expansion coefficient different from that of the base body 21, and thus, for example, the coating layer 25 As compared with the case where the temperature sensor is not provided, the change in the surface shape of the substrate 21 in accordance with the temperature change is increased, and the sensitivity to temperature and the detection accuracy can be improved.
In addition, the coating layer 25 can be easily and stably formed on the plate-like substrate 21, and it can be prevented that complicated formation is required.

しかも、予め作成されたデータを参照して、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性の変化の検出結果に対応した雰囲気の状態（例えば、温度）を容易に取得することができる。   In addition, referring to previously created data, it is possible to easily obtain the atmosphere state (for example, temperature) corresponding to the detection result of the change in the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a.

なお、上述した実施の形態において、被覆層２５は、基体２１の裏面２１Ｂの全面に限定されず、基体２１の裏面２１Ｂの少なくとも一部を被覆していてもよい。
また、被覆層２５は、基体２１の側面の少なくとも一部を被覆してもよい。 In the above-described embodiment, the covering layer 25 is not limited to the entire back surface 21B of the base body 21 and may cover at least a part of the back surface 21B of the base body 21.
The covering layer 25 may cover at least a part of the side surface of the substrate 21.

なお、上述した実施の形態においては、例えば図３に示す上述した実施の形態の変形例に係るセンサ１０のように、基体２１の裏面２１Ｂを被覆する被覆層２５の代わりに、外部に開口した気孔３１ａが分散配置されている多孔質材３１が基体２１の裏面２１Ｂを被覆していてもよい。   In the above-described embodiment, for example, the sensor 10 according to the modification of the above-described embodiment illustrated in FIG. 3 is opened to the outside instead of the covering layer 25 that covers the back surface 21B of the base body 21. The porous material 31 in which the pores 31 a are dispersedly arranged may cover the back surface 21 </ b> B of the base 21.

この多孔質材３１は、無機または有機の多孔質材料から成り、例えば多孔質ガラスから成る多孔質材３１は、複数のガラス材料を混合して熱処理することで得られる分相ガラスを、酸溶液に浸漬して特定相のみを溶出して形成される。   The porous material 31 is made of an inorganic or organic porous material. For example, the porous material 31 made of porous glass is obtained by mixing a plurality of glass materials and heat-treating a phase separation glass obtained by heat treatment. It is formed by leaching only a specific phase.

この変形例において、状態量検出部１６は、伝搬特性検出部１５により検出された伝搬特性の検出結果に基づき、弾性表面波素子１１の表面周辺の雰囲気の状態量、例えば湿度および温度を検出する。   In this modification, the state quantity detection unit 16 detects the state quantity of the atmosphere around the surface of the surface acoustic wave element 11, for example, humidity and temperature, based on the detection result of the propagation characteristic detected by the propagation characteristic detection unit 15. .

すなわち、弾性表面波素子１１の表面周辺の雰囲気の湿度または温度に応じて弾性表面波素子１１の形状変化、例えば多孔質材３１の水分吸着による膨潤または水分離脱による収縮に起因する基体２１の裏面２１Ｂの膨張または収縮により伝搬経路２１ａの経路長や形状などの変化が生じると、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性が変化する。   That is, the back surface of the base 21 caused by the shape change of the surface acoustic wave element 11 according to the humidity or temperature of the atmosphere around the surface of the surface acoustic wave element 11, for example, swelling due to moisture adsorption or shrinkage due to moisture detachment of the porous material 31. When the path length or shape of the propagation path 21a changes due to the expansion or contraction of 21B, the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a change.

状態量検出部１６は、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性の変化の検出結果に基づいて、例えば予め記憶している所定マップなどを参照して、弾性表面波素子１１の表面周辺の雰囲気の湿度または温度を検出する。
なお、所定マップは、例えば、弾性表面波素子１１の表面周辺の雰囲気の状態（例えば、湿度または温度）と、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性との対応関係を示すデータである。 The state quantity detection unit 16 refers to, for example, a predetermined map stored in advance based on the detection result of the change in the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a. Detect the humidity or temperature of the atmosphere.
The predetermined map is, for example, data indicating the correspondence between the state of the atmosphere around the surface of the surface acoustic wave element 11 (for example, humidity or temperature) and the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a. .

この変形例によれば、弾性表面波が励起される基体２１の裏面２１Ｂは多孔質材３１により被覆されていることから、例えば多孔質材３１を備えていない場合に比べて、湿度変化あるいは温度変化に応じた基体２１の表面形状の変化が大きくなり、湿度あるいは温度に対する感度および検出精度を向上させることができる。
しかも、多孔質材３１を容易かつ安定に形成することができ、形成に煩雑な手間がかかることを防止することができる。 According to this modification, the back surface 21B of the base body 21 to which the surface acoustic wave is excited is covered with the porous material 31, so that the humidity change or the temperature is compared with the case where the porous material 31 is not provided, for example. A change in the surface shape of the substrate 21 corresponding to the change becomes large, and the sensitivity and detection accuracy with respect to humidity or temperature can be improved.
In addition, the porous material 31 can be formed easily and stably, and it is possible to prevent the formation of a complicated work.

しかも、予め作成されたデータを参照して、伝搬経路２１ａを伝搬する弾性表面波の伝搬特性の変化の検出結果に対応した雰囲気の状態（例えば、湿度または温度）を容易に取得することができる。   In addition, referring to previously created data, it is possible to easily acquire the atmosphere state (for example, humidity or temperature) corresponding to the detection result of the change in the propagation characteristics of the surface acoustic wave propagating through the propagation path 21a. .

なお、この変形例において、多孔質材３１は、基体２１の裏面２１Ｂの全面に限定されず、基体２１の裏面２１Ｂの少なくとも一部を被覆していてもよい。
また、この変形例において、多孔質材３１は、基体２１の側面の少なくとも一部を被覆してもよい。 In this modification, the porous material 31 is not limited to the entire back surface 21B of the base body 21 and may cover at least a part of the back surface 21B of the base body 21.
In this modification, the porous material 31 may cover at least a part of the side surface of the base 21.

なお、上述した実施の形態および変形例において、センサ１０は、複数の異なる弾性表面波素子１１，…，１１を備えて構成されてもよい。   In the above-described embodiment and modification, the sensor 10 may be configured to include a plurality of different surface acoustic wave elements 11,.

複数の異なる弾性表面波素子１１，…，１１は、例えば被覆層２５または多孔質材３１の厚さ（積層方向の厚さ）を同一として、弾性表面波の伝搬方向における基体２１の長さ（つまり、櫛形電極２３と反射器２４との間の長さ）が異なるように形成されてもよい。
また、複数の異なる弾性表面波素子１１，…，１１は、例えば弾性表面波の伝搬方向における基体２１の長さ（つまり、櫛形電極２３と反射器２４との間の長さ）を同一として、被覆層２５または多孔質材３１の厚さ（積層方向の厚さ）が異なるように形成されてもよい。 In the plurality of different surface acoustic wave elements 11,..., 11, for example, the thickness of the covering layer 25 or the porous material 31 (thickness in the stacking direction) is the same, and the length of the substrate 21 in the surface acoustic wave propagation direction ( In other words, the length between the comb electrode 23 and the reflector 24) may be different.
The plurality of different surface acoustic wave elements 11,..., 11 have the same length of the base 21 in the propagation direction of the surface acoustic wave (that is, the length between the comb electrode 23 and the reflector 24), for example. The covering layer 25 or the porous material 31 may be formed to have different thicknesses (thicknesses in the stacking direction).

なお、上述した実施の形態および変形例においては、例えば各アンテナ１２ａ，２３ａおよび送受信部１２は省略されて、櫛形電極２３とサーキュレータ１３とは直接に接続されていてもよい。   In the embodiment and the modification described above, for example, the antennas 12a and 23a and the transmission / reception unit 12 may be omitted, and the comb electrode 23 and the circulator 13 may be directly connected.

１０ センサ
１１ 弾性表面波素子
１５ 伝搬特性検出部
１６ 状態量検出部
２１ 基体
２１ａ 伝搬経路
２２ 支持部
２３ 櫛形電極（弾性表面波励起受信部）
２５ 被覆層
３１ 多孔質材
３１ａ 気孔 DESCRIPTION OF SYMBOLS 10 Sensor 11 Surface acoustic wave element 15 Propagation characteristic detection part 16 State quantity detection part 21 Base | substrate 21a Propagation path 22 Support part 23 Comb-shaped electrode (surface acoustic wave excitation receiving part)
25 coating layer 31 porous material 31a pores

Claims (4)

板状の基体と、片持ち梁状に前記基体の端部を支持する支持部と、該基体の表面を伝搬する弾性表面波を励起するとともに、前記表面を伝搬した前記弾性表面波を受信して、受信結果の信号を出力する弾性表面波励起受信部とを備える弾性表面波素子と、
前記弾性表面波励起受信部から出力された信号に基づいて前記弾性表面波の伝搬特性を検出する伝搬特性検出部と、
前記伝搬特性検出部により検出された前記伝搬特性に応じて温度を検出する状態量検出部とを備え、
前記基体の裏面は、前記基体とは異なる熱膨張係数の被覆層により被覆されていることを特徴とするセンサ。 A plate-shaped substrate, a support that supports the end of the substrate in a cantilever shape, and a surface acoustic wave that propagates through the surface of the substrate is excited, and the surface acoustic wave that propagates through the surface is received. A surface acoustic wave element including a surface acoustic wave excitation receiving unit that outputs a reception result signal;
A propagation characteristic detector for detecting the propagation characteristic of the surface acoustic wave based on the signal output from the surface acoustic wave excitation receiver;
A state quantity detection unit that detects a temperature according to the propagation characteristic detected by the propagation characteristic detection unit;
The back surface of the said base | substrate is coat | covered with the coating layer of the thermal expansion coefficient different from the said base | substrate. 板状の基体と、片持ち梁状に前記基体の端部を支持する支持部と、該基体の表面を伝搬する弾性表面波を励起するとともに、前記表面を伝搬した前記弾性表面波を受信して、受信結果の信号を出力する弾性表面波励起受信部とを備える弾性表面波素子と、
前記弾性表面波励起受信部から出力された信号に基づいて前記弾性表面波の伝搬特性を検出する伝搬特性検出部と、
前記伝搬特性検出部により検出された前記伝搬特性に応じて湿度または温度を検出する状態量検出部とを備え、
前記基体の裏面は、外部に開口した気孔が分散配置されている多孔質材により被覆されていることを特徴とするセンサ。 A plate-shaped substrate, a support that supports the end of the substrate in a cantilever shape, and a surface acoustic wave that propagates through the surface of the substrate is excited, and the surface acoustic wave that propagates through the surface is received. A surface acoustic wave element including a surface acoustic wave excitation receiving unit that outputs a reception result signal;
A propagation characteristic detector for detecting the propagation characteristic of the surface acoustic wave based on the signal output from the surface acoustic wave excitation receiver;
A state quantity detection unit that detects humidity or temperature according to the propagation characteristic detected by the propagation characteristic detection unit;
The sensor is characterized in that the back surface of the base is covered with a porous material in which pores opened to the outside are dispersedly arranged. 前記状態量検出部は、前記弾性表面波の伝搬特性と前記弾性表面波素子の前記表面周辺の雰囲気の状態との対応関係を示すデータを記憶しており、
前記伝搬特性検出部により検出された前記伝搬特性に対応する前記雰囲気の状態を前記データから取得することを特徴とする請求項１または請求項２に記載のセンサ。 The state quantity detection unit stores data indicating a correspondence relationship between the propagation characteristics of the surface acoustic wave and the state of the atmosphere around the surface of the surface acoustic wave element,
The sensor according to claim 1 or 2, wherein the state of the atmosphere corresponding to the propagation characteristic detected by the propagation characteristic detection unit is acquired from the data. 前記弾性表面波励起受信部および前記伝搬特性検出部は互いに無線通信可能であることを特徴とする請求項１から請求項３の何れか１つに記載のセンサ。   The sensor according to any one of claims 1 to 3, wherein the surface acoustic wave excitation receiver and the propagation characteristic detector are capable of wireless communication with each other.
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