JP5688730B2 - 露光装置 - Google Patents
露光装置 Download PDFInfo
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- JP5688730B2 JP5688730B2 JP2010208773A JP2010208773A JP5688730B2 JP 5688730 B2 JP5688730 B2 JP 5688730B2 JP 2010208773 A JP2010208773 A JP 2010208773A JP 2010208773 A JP2010208773 A JP 2010208773A JP 5688730 B2 JP5688730 B2 JP 5688730B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
- G02B30/20—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
- G02F1/133723—Polyimide, polyamide-imide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133753—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle
- G02F1/133757—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle with different alignment orientations
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Mechanical Engineering (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
Description
Claims (4)
- 液晶表示装置の配向材料膜に対し各絵素をその幅方向に2分割して異なる方向から露光することにより、前記配向材料膜を光配向させる露光装置において、露光光を出射する第1及び第2の光源と、前記第1及び第2の光源からの露光光を透過させる複数個の光透過領域が夫々1列に配列した第1の光透過領域群及び第2の光透過領域群が形成されたマスクと、前記第1の光源側に配置され前記マスクを支持するマスク支持部と、前記配向材料膜と前記マスクとを相対的に移動させて前記配向材料膜を前記露光光でスキャンする移動手段と、を有し、前記第1及び第2の光透過領域群は前記配向材料膜の前記マスクに対する相対的スキャン方向に離隔して配置され、夫々複数個の光透過領域が1絵素の幅方向に分割された半分の領域に対応していて、前記第1の光透過領域群の光透過領域と前記第2の光透過領域群の光透過領域とは、前記スキャン方向に重ならないように相互間に間隔をおいて前記スキャン方向に垂直の方向に配列されており、前記第1の光源及び前記第2の光源からの露光光を前記第1及び第2の光源と前記マスクとの間の光路上で互いに交差するように傾斜させて、夫々前記マスクの前記第1の光透過領域群及び前記第2の光透過領域群を透過させ、前記配向材料膜における各絵素の各分割領域に対応する領域に照射することを特徴とする露光装置。
- 液晶表示装置の配向材料膜に対し各絵素をその幅方向に2分割して異なる方向から露光することにより、前記配向材料膜を光配向させる露光装置において、露光光を出射する第1及び第2の光源と、前記第1の光源からの露光光を透過させる複数個の光透過領域が1列に配置された第1の光透過領域群が形成された第1のマスクと、前記第2の光源側に配置され前記第1のマスクを支持する第1のマスク支持部と、前記第2の光源からの露光光を透過させる複数個の光透過領域が1列に配置された第2の光透過領域群が形成された第2のマスクと、前記第1の光源側に配置され前記第2のマスクを支持する第2のマスク支持部と、前記配向材料膜と前記第1のマスク及び前記第2のマスクとを相対的に移動させて前記配向材料膜を前記露光光でスキャンする移動手段と、を有し、前記第1及び第2の光透過領域群は、夫々複数個の光透過領域が1絵素の幅方向に分割された半分の領域に対応していて、前記第1の光透過領域群の光透過領域と前記第2の光透過領域群の光透過領域とは、前記スキャン方向に重ならないように相互間に間隔をおいて前記スキャン方向に垂直の方向に配列されており、前記第1の光源及び前記第2の光源からの露光光を前記第1及び第2の光源と前記マスクとの間の光路上で互いに交差するように傾斜させて、夫々前記第1のマスクの前記第1の光透過領域群及び前記第2のマスクの前記第2の光透過領域群を透過させ、前記配向材料膜における各絵素の各分割領域に対応する領域に照射することを特徴とする露光装置。
- 液晶表示装置の配向材料膜に対し複数個の絵素により構成された各画素をその幅方向に隣接する画素ごとに異なる方向から露光することにより、前記配向材料膜を光配向させる露光装置において、露光光を出射する第1及び第2の光源と、前記第1及び第2の光源からの露光光を透過させる複数個の光透過領域が夫々1列に配列した第1の光透過領域群及び第2の光透過領域群が形成されたマスクと、前記第1の光源側に配置され前記マスクを支持するマスク支持部と、前記配向材料膜と前記マスクとを相対的に移動させて前記配向材料膜を前記露光光でスキャンする移動手段と、を有し、前記第1及び第2の光透過領域群は前記配向材料膜の前記マスクに対する相対的スキャン方向に離隔して配置され、夫々複数個の光透過領域が前記スキャン方向に並ぶ複数個の画素を含む領域に対応していて、前記第1の光透過領域群の光透過領域と前記第2の光透過領域群の光透過領域とは、前記スキャン方向に重ならないように相互間に間隔をおいて前記スキャン方向に垂直の方向に配列されており、前記第1の光源及び前記第2の光源からの露光光を前記第1及び第2の光源と前記マスクとの間の光路上で互いに交差するように傾斜させて、夫々前記マスクの前記第1の光透過領域群及び前記第2の光透過領域群を透過させ、前記配向材料膜における前記スキャン方向に並ぶ複数個の画素を含む領域に対応する領域に照射することを特徴とする露光装置。
- 液晶表示装置の配向材料膜に対し複数個の絵素により構成された各画素をその幅方向に隣接する画素ごとに異なる方向から露光することにより、前記配向材料膜を光配向させる露光装置において、露光光を出射する第1及び第2の光源と、前記第1の光源からの露光光を透過させる複数個の光透過領域が1列に配置された第1の光透過領域群が形成された第1のマスクと、前記第2の光源側に配置され前記第1のマスクを支持する第1のマスク支持部と、前記第2の光源からの露光光を透過させる複数個の光透過領域が1列に配置された第2の光透過領域群が形成された第2のマスクと、前記第1の光源側に配置され前記第2のマスクを支持する第2のマスク支持部と、前記配向材料膜と前記第1のマスク及び前記第2のマスクとを相対的に移動させて前記配向材料膜を前記露光光でスキャンする移動手段と、を有し、前記第1及び第2の光透過領域群は、夫々複数個の光透過領域が前記スキャン方向に並ぶ複数個の画素を含む領域に対応していて、前記第1の光透過領域群の光透過領域と前記第2の光透過領域群の光透過領域とは、前記スキャン方向に重ならないように相互間に間隔をおいて前記スキャン方向に垂直の方向に配列されており、前記第1の光源及び前記第2の光源からの露光光を前記第1及び第2の光源と前記マスクとの間の光路上で互いに交差するように傾斜させて、夫々前記第1のマスクの前記第1の光透過領域群及び前記第2のマスクの前記第2の光透過領域群を透過させ、前記配向材料膜における前記スキャン方向に並ぶ複数個の画素を含む領域に対応する領域に照射することを特徴とする露光装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010208773A JP5688730B2 (ja) | 2010-09-17 | 2010-09-17 | 露光装置 |
KR1020137009619A KR101790824B1 (ko) | 2010-09-17 | 2011-08-16 | 노광 장치 |
CN201180044697.7A CN103210344B (zh) | 2010-09-17 | 2011-08-16 | 曝光装置 |
PCT/JP2011/068576 WO2012035920A1 (ja) | 2010-09-17 | 2011-08-16 | 露光装置 |
US13/824,263 US9063376B2 (en) | 2010-09-17 | 2011-08-16 | Exposure device of an alignment material film |
TW100131766A TWI536116B (zh) | 2010-09-17 | 2011-09-02 | 曝光裝置 |
US14/640,697 US9427915B2 (en) | 2010-09-17 | 2015-03-06 | Exposure device |
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JP2010208773A JP5688730B2 (ja) | 2010-09-17 | 2010-09-17 | 露光装置 |
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JP2012063652A JP2012063652A (ja) | 2012-03-29 |
JP5688730B2 true JP5688730B2 (ja) | 2015-03-25 |
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JP2010208773A Expired - Fee Related JP5688730B2 (ja) | 2010-09-17 | 2010-09-17 | 露光装置 |
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US (2) | US9063376B2 (ja) |
JP (1) | JP5688730B2 (ja) |
KR (1) | KR101790824B1 (ja) |
CN (1) | CN103210344B (ja) |
TW (1) | TWI536116B (ja) |
WO (1) | WO2012035920A1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5629941B2 (ja) * | 2011-02-23 | 2014-11-26 | 株式会社ブイ・テクノロジー | スキャン露光装置 |
KR101829778B1 (ko) * | 2011-06-29 | 2018-02-20 | 삼성디스플레이 주식회사 | 노광 장치 및 액정 표시 장치의 제조 방법 |
TW201314374A (zh) * | 2011-09-30 | 2013-04-01 | Chimei Innolux Corp | 配向膜之光配向裝置及配向膜製造方法及液晶顯示裝置製造方法 |
JP6078843B2 (ja) * | 2012-07-05 | 2017-02-15 | 株式会社ブイ・テクノロジー | 光配向露光方法及び光配向露光装置 |
JP5953512B2 (ja) | 2012-07-05 | 2016-07-20 | 株式会社ブイ・テクノロジー | 光配向露光装置及び光配向露光方法 |
CN104965388B (zh) * | 2015-07-06 | 2019-05-31 | 深圳市华星光电技术有限公司 | 用于光配向的光罩及光配向方法 |
JP6660144B2 (ja) * | 2015-10-23 | 2020-03-04 | 株式会社ブイ・テクノロジー | 光照射装置 |
WO2017145975A1 (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | 偏光光照射装置 |
JP2017151405A (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | 偏光光照射装置 |
US10821717B2 (en) | 2016-07-22 | 2020-11-03 | General Electric Company | Layer orientation control for pixel-based additive manufacturing |
CN108345180B (zh) * | 2017-01-25 | 2020-04-10 | 上海微电子装备(集团)股份有限公司 | 一种曝光和光配向一体的装置及其使用方法 |
JP6755472B2 (ja) * | 2017-04-17 | 2020-09-16 | 株式会社ブイ・テクノロジー | 光照射装置 |
CN109212837B (zh) * | 2017-06-30 | 2021-04-09 | 上海微电子装备(集团)股份有限公司 | 一种光配向装置及方法 |
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US11813799B2 (en) | 2021-09-01 | 2023-11-14 | General Electric Company | Control systems and methods for additive manufacturing |
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KR100379873B1 (ko) * | 1995-07-11 | 2003-08-21 | 우시오덴키 가부시키가이샤 | 막질개량방법 |
JP3597446B2 (ja) | 1999-05-24 | 2004-12-08 | シャープ株式会社 | 液晶表示装置 |
JP2002031804A (ja) | 2000-07-18 | 2002-01-31 | Nec Corp | 液晶表示装置 |
JP4334166B2 (ja) * | 2001-08-01 | 2009-09-30 | シャープ株式会社 | 液晶表示装置及び配向膜の露光装置及び配向膜の処理方法 |
KR100849093B1 (ko) * | 2001-11-15 | 2008-07-30 | 엘지디스플레이 주식회사 | 노광기 |
JP4826897B2 (ja) * | 2005-03-31 | 2011-11-30 | Dic株式会社 | 液晶配向膜の製造方法、及び液晶配向膜のチルト角を減じる方法 |
JP2007041175A (ja) * | 2005-08-02 | 2007-02-15 | Sharp Corp | 表示パネル用の基板およびこの基板に対する露光方法 |
US7872718B2 (en) | 2006-01-26 | 2011-01-18 | Sharp Kabushiki Kaisha | Production method of a liquid crystal display device including dividing an exposure step into two exposure regions that partly overlap each other and a photomask with a halftone part |
JP4764197B2 (ja) * | 2006-02-17 | 2011-08-31 | 株式会社ブイ・テクノロジー | 液晶表示用基板の製造方法 |
CN101622572B (zh) * | 2007-03-05 | 2012-01-11 | 夏普株式会社 | 液晶显示装置及其制造方法 |
CN101765806B (zh) * | 2007-09-21 | 2011-08-17 | 夏普株式会社 | 液晶显示装置及其制造方法 |
JP5097623B2 (ja) | 2008-06-09 | 2012-12-12 | 富士フイルム株式会社 | ラビング処理方法および光学フィルムの製造方法 |
KR100911459B1 (ko) | 2008-08-06 | 2009-08-11 | 삼성전자주식회사 | 배향막 형성방법, 이를 이용한 액정 표시 장치의 제조방법및 배향막 형성 장치 |
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Publication number | Publication date |
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CN103210344A (zh) | 2013-07-17 |
TW201222164A (en) | 2012-06-01 |
JP2012063652A (ja) | 2012-03-29 |
KR101790824B1 (ko) | 2017-10-26 |
US9063376B2 (en) | 2015-06-23 |
CN103210344B (zh) | 2015-11-25 |
TWI536116B (zh) | 2016-06-01 |
WO2012035920A1 (ja) | 2012-03-22 |
US20130169917A1 (en) | 2013-07-04 |
KR20130106841A (ko) | 2013-09-30 |
US20150174820A1 (en) | 2015-06-25 |
US9427915B2 (en) | 2016-08-30 |
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