JP5667431B2 - 3D coordinate measuring machine simple inspection gauge - Google Patents
3D coordinate measuring machine simple inspection gauge Download PDFInfo
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- JP5667431B2 JP5667431B2 JP2010287832A JP2010287832A JP5667431B2 JP 5667431 B2 JP5667431 B2 JP 5667431B2 JP 2010287832 A JP2010287832 A JP 2010287832A JP 2010287832 A JP2010287832 A JP 2010287832A JP 5667431 B2 JP5667431 B2 JP 5667431B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B3/00—Measuring instruments characterised by the use of mechanical techniques
- G01B3/30—Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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Description
本発明は、三次元座標測定機検査用ゲージに関し、詳しくは、三次元座標測定機の寸法検査を短時間に簡便に行うことができ、マルチスタイラスの検査も実施可能な三次元座標測定機簡易検査用ゲージに関するものである。 The present invention relates to a gauge for inspection of a three-dimensional coordinate measuring machine, and more specifically, a simple three-dimensional coordinate measuring machine capable of performing a dimensional inspection of a three-dimensional coordinate measuring machine in a short time and capable of performing a multi-stylus inspection. It relates to inspection gauges.
三次元座標測定機は、機械部品等の三次元形状、寸法や幾何偏差などを測定するために広い分野で利用され、ものづくりにおいて品質評価を行う際に重要な役割を担う測定機である。三次元座標測定機の検査は、ＪＩＳＢ ７４４０−２に準拠した方法で実施されている。この方法はブロックゲージ等を多数並べて測定するため、各ゲージの厳密な位置決め等が必要であるなど高度な技術が必要であり、また検査に数日を費やすという問題があった。さらに、このような検査は、たとえば年に１回程度専門の業者によって行われることが多く、知らず知らずのうちに測定誤差が発生していることがあった。そのため、三次元座標測定機の性能をユーザ自身が常に適性に維持管理できるように中間検査や使用前点検の意味合いで、短時間に簡便な操作で三次元座標測定機の寸法等の検査を行えることが望まれていた。そこで下記のような提案が従来よりなされている。 A three-dimensional coordinate measuring machine is used in a wide range of fields for measuring three-dimensional shapes, dimensions, geometrical deviations and the like of machine parts and the like, and plays an important role in quality evaluation in manufacturing. The inspection of the three-dimensional coordinate measuring machine is performed by a method based on JISB 7440-2. Since this method measures a large number of block gauges and the like, it requires advanced techniques such as strict positioning of each gauge, and has a problem of spending several days for inspection. Further, such an inspection is often performed, for example, once a year by a specialized trader, and a measurement error may occur without knowing it. Therefore, it is possible to inspect the dimensions of the coordinate measuring machine in a short time with a simple operation in the sense of intermediate inspection and pre-use inspection so that the user can always maintain and manage the performance of the coordinate measuring machine appropriately. It was hoped that. Therefore, the following proposals have been made conventionally.
特許文献１には、寸法安定性を確保したＬ字型のブロックの長辺列に複数個の球体と下辺の先端に独立球を設けた多次元座標測定機校正用ゲージとそれを用いた測定方法（評価方法）が提案されている。この技術によれば、三次元座標測定機の寸法精度評価の他に真直度及び直角度を容易に評価することが可能となる。 Patent Document 1 discloses a multi-dimensional coordinate measuring machine calibration gauge in which a plurality of spheres and independent spheres are provided at the tip of the lower side in a long side row of an L-shaped block ensuring dimensional stability, and measurement using the same. A method (evaluation method) has been proposed. According to this technique, it is possible to easily evaluate the straightness and the squareness in addition to the dimensional accuracy evaluation of the three-dimensional coordinate measuring machine.
また、特許文献２には、ブロックゲージに球体を固定し、ブロックゲージ及び球体（中心座標値及び直径）を測定し、絶対値が保証されているブロックゲージの両端面（寸法）からの数値と球体の測定値を比較し、補正することで正確に三次元座標測定機を校正する技術が提案されている。 In Patent Document 2, a sphere is fixed to a block gauge, the block gauge and the sphere (center coordinate value and diameter) are measured, and numerical values from both end faces (dimensions) of the block gauge, for which absolute values are guaranteed, Techniques have been proposed for accurately calibrating a three-dimensional coordinate measuring machine by comparing and correcting measured values of a sphere.
また、特許文献３には、円筒面又は円錐面に複数の球体を配列させると共に本体にリングゲージを形成させ、各球体の中心間距離、複数の球体中心で形成される軸線、平面を利用した計測を行うことにより、一度に三次元座標測定機の目盛の校正、真直度、直角度の３項目の評価を同時に行う技術が提案されている。 In Patent Document 3, a plurality of spheres are arranged on a cylindrical surface or a conical surface, and a ring gauge is formed on the main body, and the distance between the centers of each sphere, the axis formed by the centers of the plurality of spheres, and the plane are used. A technique has been proposed in which three-dimensional coordinate measuring machine calibration, straightness, and squareness are simultaneously evaluated by performing measurement at the same time.
また、特許文献４には、長方形（横断面Ｈ型）の金属製本体の長手方向に複数の球体を配列し、経年変化の原因となる残留応力の影響がほとんど作用しないように保持できるゲージが提案されている。このゲージでは、接触型三次元座標測定機の他に非接触型三次元座標測定機も校正ができるように球の表面性状等が考慮され、目盛の校正、直角度の評価を同時に行うことができるようになっている。 Further, Patent Document 4 discloses a gauge that can be held by arranging a plurality of spheres in the longitudinal direction of a rectangular (cross section H type) metal main body so that the influence of residual stress that causes secular change hardly acts. Proposed. In this gauge, the surface properties of the sphere are taken into account so that not only the contact type coordinate measuring machine but also the non-contact type coordinate measuring machine can be calibrated. It can be done.
また、特許文献５には、円筒のブロック本体の上面に棒状ゲージを取り付け、棒状ゲージを傾斜させることで、三次元座標測定機の測定範囲の最も長い対角線長に近い測定長の指示誤差を高精度で測定することが可能な寸法標準器が提案されている。 In Patent Document 5, a rod-shaped gauge is attached to the upper surface of a cylindrical block body, and the rod-shaped gauge is inclined, thereby increasing the measurement error of the measurement length near the longest diagonal length of the measurement range of the three-dimensional coordinate measuring machine. A dimensional standard that can be measured with high accuracy has been proposed.
さらに、特許文献６には、温度変化による本体の形状変化を考慮した材質において、立方体や円筒形状の本体の上面及び側面に基準測定面となるリングゲージ等を取り付け、その中心間距離を算出し、基準値と比較することで三次元座標測定機の校正を行う技術が提案されている。 Further, in Patent Document 6, a ring gauge or the like serving as a reference measurement surface is attached to the upper and side surfaces of a cubic or cylindrical body made of a material that takes into account the shape change of the body due to temperature change, and the distance between the centers is calculated. A technique for calibrating a three-dimensional coordinate measuring machine by comparing with a reference value has been proposed.
しかしながら、上記に挙げた先行技術文献は、ＪＩＳ Ｂ ７４４０−２に置き換わる又はＪＩＳ Ｂ ７４４０−２の検査では評価できない項目の検査も同時に評価できるゲージないしそれを用いた検査方法であり、短時間に簡便な方法で寸法検査等を行うことができるものの、ＪＩＳＢ ７４４０−５のマルチスタイラス検査に関しては評価するまでには至っていないのが実情であった。三次元座標測定機における測定では、測定対象物に合わせて固定式マルチスタイラスプロービングシステムの場合は数本のスタイラスを組み合わせて、回転式プロービングシステムの場合は１本のスタイラスで複数姿勢による測定を行う場面も多い。マルチスタイラス測定では三次元座標測定機の寸法検査（目盛校正）の他に、それぞれのスタイラスまたは方向性の相関を確認することでマルチスタイラス測定における測定結果の信頼性が確保される。そこで、ＪＩＳ Ｂ ７４４０−２に関する三次元座標測定機の寸法検査（目盛校正）の簡易検査と同時にＪＩＳ Ｂ ７４４０−５に関するマルチスタイラス簡易検査をも行うことができる技術が望まれていた。 However, the prior art documents listed above are gauges that can replace JIS B 7440-2 or that can be simultaneously evaluated for items that cannot be evaluated by the inspection of JIS B 7440-2, or inspection methods using the same. Although dimensional inspection and the like can be performed by a simple method, the actual situation is that the multi-stylus inspection of JISB 7440-5 has not yet been evaluated. When measuring with a three-dimensional coordinate measuring machine, several styluses are combined in the case of a fixed multi-stylus probing system according to the object to be measured, and in the case of a rotary probing system, a single stylus is used to measure in multiple positions. There are many scenes. In the multi-stylus measurement, in addition to the dimensional inspection (scale calibration) of the three-dimensional coordinate measuring machine, the reliability of the measurement result in the multi-stylus measurement is ensured by confirming the correlation of each stylus or directionality. Therefore, a technique capable of performing a simple multi-stylus inspection relating to JIS B 7440-5 simultaneously with a simple inspection for dimensional inspection (scale calibration) of a three-dimensional coordinate measuring machine relating to JIS B 7440-2 has been desired.
本発明は、このような従来技術の実情に鑑みてなされたものであり、ＪＩＳＢ ７４４０−２に関する三次元座標測定機の寸法検査（目盛校正）の簡易検査と同時にＪＩＳＢ ７４４０−５に関するマルチスタイラスの簡易検査およびそれぞれのスタイラスまたは方向性の相関の評価も行える三次元座標測定機簡易検査用ゲージを提供することを課題とする。 The present invention has been made in view of such a state of the art, and at the same time as a simple inspection of a dimensional inspection (scale calibration) of a three-dimensional coordinate measuring machine related to JISB 7440-2, a multi-stylus related to JISB 7440-5. It is an object of the present invention to provide a three-dimensional coordinate measuring machine simple inspection gauge capable of performing simple inspection and evaluating the correlation of each stylus or directionality.
上記課題を解決するため、本発明によれば、第１に、基台と、前記基台上に設けられる半球状の本体と、それぞれ一方の端部に保持具を介して球体が取り付けられ、もう一方の端部が前記半球状の本体に固定される複数本のシャフトからなり、該複数本のシャフトのうち、１本のシャフトは前記半球状の本体の最も高い位置から鉛直方向に延びるように取り付けられ、残りのシャフトは平面視したときに隣のシャフトと一定の角度をなすように且つ斜め上方向に延びるように取り付けられ、前記残りのシャフトは、隣り合ったシャフトがそれぞれ水平面に対して異なった傾斜角度をもって前記半球状の本体の中心を基準に放射状に斜め上方向に延びていることを特徴とする三次元座標測定機簡易検査用ゲージが提供される。 In order to solve the above problems, according to the present invention, first, a base, a hemispherical main body provided on the base, and a sphere is attached to one end portion via a holder, The other end includes a plurality of shafts fixed to the hemispherical body, and one of the plurality of shafts extends in the vertical direction from the highest position of the hemispherical body. attached to the rest of the shaft mounting et is to extend and obliquely upward so as to form the shaft and fixed angle of adjacent when viewed in plan, the remaining shaft, the horizontal shaft adjacent each On the other hand , a three-dimensional coordinate measuring machine simple inspection gauge is provided that extends radially and obliquely upward with a different inclination angle with respect to the center of the hemispherical body .
また、第２に、上記第１の発明において、前記本体が前記基台上に回転可能に設けられることを特徴とする三次元座標測定機簡易検査用ゲージが提供される。 2ndly, in the said 1st invention, the said main body is rotatably provided on the said base, The three-dimensional coordinate measuring machine simple test | inspection gauge characterized by the above-mentioned is provided.
さらに、第３に、上記第１または第２の発明において、前記複数本のシャフトに取り付けられた各球体は、各球体の鉛直方向の最も高い位置を極としたとき、その極と、その極と球体の中心を結ぶ線に対して垂直な平面と球体の球面が交わる大円である赤道の上の点とが、三次元座標測定機が有する固定式マルチスタイラスシステムの各スタイラスの先端または複数の姿勢をとり得るスタイラスを備えた回転式プロービングシステムの前記スタイラスの先端と接触可能となっていることを特徴とする三次元座標測定機簡易検査用ゲージが提供される。 Third, in each of the first and second inventions, each sphere attached to the plurality of shafts has the pole, and the pole when the highest position in the vertical direction of each sphere is the pole. A point perpendicular to the line connecting the center of the sphere and the point on the equator, which is a great circle where the spherical surface of the sphere intersects, is the tip of the fixed stylus system of the 3D coordinate measuring machine or a plurality of stylus tips There is provided a gauge for simple inspection of a three-dimensional coordinate measuring machine, characterized in that it can come into contact with the tip of the stylus of a rotary probing system having a stylus capable of taking the following postures.
本発明によれば、短時間に簡便な操作で寸法検査の他にマルチスタイラスの検査も同時に日常的な検査として実施することができ、三次元座標測定機およびスタイラスを備えたプローブの総合的な簡易検査が可能となることで、より信頼性の高い品質管理、維持管理が可能となる。 According to the present invention, multi-stylus inspection as well as dimensional inspection can be carried out at the same time as daily inspection with a simple operation in a short time, and a comprehensive measurement of a probe equipped with a three-dimensional coordinate measuring machine and a stylus is possible. By enabling simple inspection, more reliable quality control and maintenance can be performed.
また、本発明では半球状の本体を基台に対して容易に回転させることができるようにすることにより、上記の効果に加え、測定対象物を回転させながら数回の測定を行い、全データを平均化すると測定機の誤差成分がある程度相殺されて、測定機の性能以上に精度のよい測定ができるようになるという利点がある。 Further, in the present invention, by allowing the hemispherical body to be easily rotated with respect to the base, in addition to the above effects, measurement is performed several times while rotating the measurement object, and all data When the values are averaged, the error component of the measuring instrument is canceled to some extent, and there is an advantage that the measurement can be performed with higher accuracy than the performance of the measuring instrument.
以下、本発明の三次元座標測定機簡易検査用ゲージについて詳細に説明する。 Hereinafter, the three-dimensional coordinate measuring machine simple inspection gauge of the present invention will be described in detail.
図１（ａ）および（ｂ）は、本発明の一実施形態に係る三次元座標測定機簡易検査用ゲージの構成を示す斜視図および平面図である。 FIGS. 1A and 1B are a perspective view and a plan view showing a configuration of a three-dimensional coordinate measuring machine simple inspection gauge according to an embodiment of the present invention.
本実施形態の三次元座標測定機簡易検査用ゲージ（以下、ゲージとも称する）１は、プレート２上に設けられた基台３と、基台３上に回転可能に設けられた半球状の本体４と、複数本のシャフト５（５−１〜５−９）からなる。複数本のシャフト５の一方の端部には該シャフト５より細径の保持具６を介して球体７が取り付けられ、もう一方の端部は本体４に固定されている。半球状の本体４が基台３に対して回転可能に設けられることにより、測定対象物を回転させながら数回の測定を行い、全データを平均化すると測定機の誤差成分がある程度相殺されて、測定機の性能以上に精度のよい測定ができるようになるという利点がある。９番目のシャフト５−９は本体４の極、すなわち本体４の最も高い位置から鉛直方向に延びるように取り付けられている。残りの１番目から８番目のシャフト５−１〜５−８は、本例では、図１（ｂ）に示すように、平面視で４５度おきに配置され、シャフト５−１、５−２、５−３、５−４は水平面に対し３５度の角度をもって半球状の本体４の中心を基準に放射状に斜め上方に延びており、シャフト５−５、５−６、５−７、５−８は水平面に対し５５度の角度をもって半球状の本体４の中心を基準に放射状に斜め上方に延びている。このような配置は、シャフト間にマルチスタイラスを移動させるための適切なスペースが確保できることから、マルチスタイラス検査を行うために望ましい配置であるといえる。なお、本例では本体４の極以外に設けられたシャフトとして８つのシャフトを用いたが、４つ、６つ等適宜の数のシャフトを用いることができる。 A three-dimensional coordinate measuring machine simple inspection gauge (hereinafter also referred to as a gauge) 1 according to the present embodiment includes a base 3 provided on a plate 2 and a hemispherical main body provided rotatably on the base 3. 4 and a plurality of shafts 5 (5-1 to 5-9). A sphere 7 is attached to one end of the plurality of shafts 5 via a holder 6 having a diameter smaller than that of the shaft 5, and the other end is fixed to the main body 4. By providing the hemispherical main body 4 so as to be rotatable with respect to the base 3, the measurement object is measured several times while rotating the measurement object, and when all the data are averaged, the error component of the measuring instrument is offset to some extent. There is an advantage that the measurement can be performed with higher accuracy than the performance of the measuring machine. The ninth shaft 5-9 is attached so as to extend in the vertical direction from the pole of the main body 4, that is, the highest position of the main body 4. Shaft 5-1 to 5-8 of the eighth from the rest of the first, in the present embodiment, as shown in FIG. 1 (b), are arranged in 45 degree intervals in a plan view, the shaft 5-1,5- 2, 5-3, and 5-4 extend at an angle of 35 degrees with respect to the horizontal plane and obliquely upward radially with respect to the center of the hemispherical body 4. Reference numeral 5-8 extends obliquely upward radially with respect to the center of the hemispherical body 4 at an angle of 55 degrees with respect to the horizontal plane. Since such an arrangement can secure an appropriate space for moving the multi-stylus between the shafts, it can be said that this arrangement is desirable for performing the multi-stylus inspection. In this example, eight shafts are used as the shafts provided other than the poles of the main body 4, but an appropriate number of shafts such as four or six can be used.
半球状の本体４は、熱膨張が極めて小さい材料、たとえばファインセラミックスで形成することが好ましい。シャフト５も熱膨張が極めて小さい材料を用いて形成することが好ましい。このような材料を用いると、測定環境による結果の補正の必要がなく、２０℃以外の環境下に設置されている三次元座標測定機（ＣＭＭ：Coordinate Measuring Machine）の検査にも対応が可能となる。球体７にはたとえば窒化ケイ素等を用いることができ、その直径は後述の実施例では中央のものでは２５．４０ｍｍ、それ以外のものでは１９．０５ｍｍとしたが、もちろんこれに限定されず適宜の寸法とすることできる。この球体７にスタイラス（図示せず）の先端が接触するとそれを電気的トリガーとしてＸ軸、Ｙ軸、Ｚ軸方向の座標値が読み取られるようになっている。 The hemispherical body 4 is preferably formed of a material having extremely small thermal expansion, for example, fine ceramics. The shaft 5 is also preferably formed using a material having extremely small thermal expansion. When such materials are used, there is no need to correct the results depending on the measurement environment, and it is possible to support inspection of a coordinate measuring machine (CMM) installed in an environment other than 20 ° C. Become. For example, silicon nitride or the like can be used for the sphere 7. The diameter of the sphere 7 is 25.40 mm in the center in the examples described later, and 19.05 mm in the other ones. It can be a dimension. When the tip of a stylus (not shown) comes into contact with the sphere 7, the coordinate values in the X-axis, Y-axis, and Z-axis directions are read using this as an electrical trigger.
本実施形態のゲージ１では、複数本のシャフト５に取り付けられた各球体７は、スタイラスの方向の極とその赤道が、三次元座標測定機が有する固定式マルチスタイラスプロービングシステムの各スタイラス先端に取り付けられた小球状部または複数の姿勢をとり得るスタイラスを備えた回転式プロービングシステムの前記スタイラスの先端に取り付けられた小球状部と接触可能となっている。 In gauge 1 of the present embodiment, the spherical bodies 7 attached to the plurality of shafts 5, the stylus in the direction of pole and its equator, each stylus tip fixed multistylus probing system with three-dimensional coordinate measuring machine It is possible to contact the small spherical portion attached to the tip of the stylus of the rotary probing system provided with the attached small spherical portion or the stylus capable of taking a plurality of postures.
図２に固定式マルチスタイラスプロービングシステムのマルチスタイラス８を示す。このマルチスタイラス８は、Ｚ方向にスタイラス８−１、Ｘ方向にスタイラス８−２、８−４、Ｙ方向にスタイラス８−３、８−５を備える。このマルチスタイラス８はＸ方向、Ｙ方向、Ｚ方向の３次元方向に移動可能になっている。また、図３に回転式プロービングシステムのスタイラス９を示す。このスタイラス９は、複数姿勢をとることができるようになっている。 FIG. 2 shows a multi-stylus 8 of a fixed multi-stylus sprobing system. The multi-stylus 8 includes a stylus 8-1 in the Z direction, styluses 8-2 and 8-4 in the X direction, and styli 8-3 and 8-5 in the Y direction. The multi-stylus 8 is movable in the three-dimensional direction of the X direction, the Y direction, and the Z direction. FIG. 3 shows a stylus 9 of the rotary probing system. The stylus 9 can take a plurality of postures.
図４の（ａ）、（ｂ）に固定式マルチスタイラスプロービングシステムのマルチスタイラス８を用いて測定を行う様子をそれぞれ平面図と側面図で示す。 FIGS. 4A and 4B are a plan view and a side view, respectively, showing a state in which measurement is performed using the multi-stylus 8 of the fixed multi-stylus sprobing system.
ここで、本発明による三次元座標測定器簡易検査用ゲージの作製例を示す。全体構造は図１に示したものと同様である。もちろん、本発明はこの作製例に限定されるものではない。 Here, a production example of a three-dimensional coordinate measuring instrument simple inspection gauge according to the present invention will be described. The overall structure is the same as that shown in FIG. Of course, the present invention is not limited to this manufacturing example.
サイズ（Ｗ×Ｄ×Ｈ）：２５０ｍｍ×２５０ｍｍ×２８０ｍｍ
本体材質：ネクセラ（新日鐵製；超低熱膨張ファインセラミックス）
本体熱膨張係数：０±０．０２×１０−６／Ｋ
シャフト長さ：１３０ｍｍ
シャフト材質：炭素繊維強化プラスチック（高剛性繊維＜１方向＞ ピッチ系繊維）
総重量：約６ｋｇ
球材質：窒化ケイ素
球直径：２５．４０ｍｍ（中央）
１９．０５（中央以外）
中央以外の４本のシャフトの水平面からの傾斜角度は３５度、残りの４本のシャフトの水平面からの傾斜角度は５５度
この三次元座標測定機簡易検査ゲージで、複数本のスタイラスを取り付けた図２に示す固定式マルチスタイラスブロービングシステムをもつ三次元座標測定機を検査した結果を図５に示す。この三次元座標測定機簡易検査用ゲージの値付けがされれば、Ｎｏ．１スタイラスの結果がＪＩＳＢ ７４４０−２に関する三次元座標測定機の寸法検査（目盛校正）の簡易検査になる。また、一つの球体を複数のスタイラスが重複して測定することで、それぞれの球体の結果（中心座標値）からそれぞれのスタイラスの相関が評価できる。マルチスタイラス８の５本のスタイラスで９個の球体７全てを測定しても約３０分で検査を行うことができた。
Size (WxDxH): 250mmx250mmx280mm
Body material: Nexera (manufactured by Nippon Steel; ultra-low thermal expansion fine ceramics)
Main unit thermal expansion coefficient: 0 ± 0.02 × 10 −6 / K
Shaft length: 130mm
Shaft material: Carbon fiber reinforced plastic (high rigidity fiber <one direction> pitch fiber)
Total weight: about 6kg
Ball material: Silicon nitride Ball diameter: 25.40 mm (center)
19.05 (other than center)
The inclination angle from the horizontal plane of the four shafts other than the center is 35 degrees, and the inclination angle from the horizontal plane of the remaining four shafts is 55 degrees. With this three-dimensional coordinate measuring machine simple inspection gauge, a plurality of styluses were attached. FIG. 5 shows the result of inspection of the three-dimensional coordinate measuring machine having the fixed multi-stylus blowing system shown in FIG. If this three-dimensional coordinate measuring machine simple inspection gauge is priced, No. The result of one stylus becomes a simple inspection of the dimensional inspection (scale calibration) of the three-dimensional coordinate measuring machine related to JISB 7440-2. Further, by measuring a single sphere with a plurality of styluses being overlapped, the correlation between the styluss can be evaluated from the result (center coordinate value) of each sphere. Even when all nine spheres 7 were measured with the five styluses of the multistylus 8, the test could be performed in about 30 minutes.
また、この三次元座標測定機簡易検査用ゲージで、図３に示す回転式プロービングシステムをもつ三次元座標測定機を検査した結果を図６に示す。前記と同様、この三次元座標測定機簡易検査ゲージの値付けがされれば、Ｎｏ．１スタイラス方向（下向き）の結果がＪＩＳＢ ７４４０−２に関する三次元座標測定機の寸法検査（目盛校正）の簡易検査になる。また、一つの球体を複数の方向のスタイラスが重複して測定することで、それぞれの球体の結果（中心座標値）からそれぞれのスタイラス方向の相関が評価できる。 FIG. 6 shows the result of inspecting the three-dimensional coordinate measuring machine having the rotary probing system shown in FIG. 3 with this three-dimensional coordinate measuring machine simple inspection gauge. Similarly to the above, if the price of this three-dimensional coordinate measuring machine simple inspection gauge is given, No. The result of one stylus direction (downward) is a simple inspection of the dimensional inspection (scale calibration) of the three-dimensional coordinate measuring machine related to JISB 7440-2. Further, by measuring one sphere with overlapping styluses in a plurality of directions, the correlation of each stylus direction can be evaluated from the result (center coordinate value) of each sphere.
１ 三次元座標測定機簡易検査用ゲージ
３ 基台
４ 半球状の本体
５（５−１〜５−９） シャフト
６ 保持具
７ 球体
８（８−１〜８−５） マルチスタイラス
９ スタイラス
DESCRIPTION OF SYMBOLS 1 3D coordinate measuring machine simple inspection gauge 3 Base 4 Hemispherical main body 5 (5-1 to 5-9) Shaft 6 Holder 7 Sphere 8 (8-1 to 8-5) Multi-stylus 9 Stylus
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| JP6280544B2 (en) | 2013-05-29 | 2018-02-14 | 地方独立行政法人東京都立産業技術研究センター | Image reconstruction apparatus and method according to X-ray energy, and X-ray three-dimensional measurement apparatus and method |
| JP2018194430A (en) * | 2017-05-17 | 2018-12-06 | 株式会社ミツトヨ | Step gage |
| JP7092348B2 (en) * | 2018-08-17 | 2022-06-28 | 地方独立行政法人東京都立産業技術研究センター | Calibration gauge for comparative measuring machine and calibration method for comparative measuring machine |
| JP1691006S (en) * | 2020-11-16 | 2021-07-26 | ||
| DE102020134786A1 (en) | 2020-12-23 | 2022-06-23 | Carl Zeiss Industrielle Messtechnik Gmbh | Method and test specimen for the purely optical verification of the perpendicularity of the alignment of the guide axes in a coordinate measuring machine |
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| EP0362626B1 (en) * | 1988-10-03 | 1993-02-10 | Firma Carl Zeiss | Test body for co-ordinate measuring apparatus |
| DE3930223A1 (en) * | 1989-09-11 | 1991-03-14 | Wild Leitz Messtechnik | TEST BODY FOR COORDINATE MEASURING DEVICES FROM STICK SEGMENTS |
| DE19644712A1 (en) * | 1996-10-28 | 1998-05-07 | Eugen Dr Trapet | Ball cube for periodic checks in metrology |
| JP2001330428A (en) * | 2000-05-23 | 2001-11-30 | Natl Inst Of Advanced Industrial Science & Technology Meti | Evaluation method for measuring error of three- dimensional measuring machine and gage for three- dimensional measuring machine |
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