JP5653690B2 - Pellicle frame and pellicle - Google Patents

Pellicle frame and pellicle Download PDF

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JP5653690B2
JP5653690B2 JP2010196223A JP2010196223A JP5653690B2 JP 5653690 B2 JP5653690 B2 JP 5653690B2 JP 2010196223 A JP2010196223 A JP 2010196223A JP 2010196223 A JP2010196223 A JP 2010196223A JP 5653690 B2 JP5653690 B2 JP 5653690B2
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pellicle
frame
convex portion
length
frame body
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JP2012053302A (en
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慎太郎 北島
慎太郎 北島
典子 谷
典子 谷
宏治 松栄
宏治 松栄
幸也 山中
幸也 山中
誠二 岩倉
誠二 岩倉
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Asahi Kasei E Materials Corp
Muramoto Industry Co Ltd
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Asahi Kasei E Materials Corp
Muramoto Industry Co Ltd
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Priority to JP2010196223A priority Critical patent/JP5653690B2/en
Priority to CN201810245056.1A priority patent/CN108490734A/en
Priority to CN2011800118243A priority patent/CN102782576A/en
Priority to TW100108220A priority patent/TWI456341B/en
Priority to PCT/JP2011/055712 priority patent/WO2011111801A1/en
Priority to KR1020127022826A priority patent/KR101392645B1/en
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Description

本発明は、例えばＩＣ（Integrated Circuit：集積回路）、ＬＳＩ（Large Scale Integration：大規模集積回路）、ＴＦＴ型ＬＣＤ（Thin Film Transistor，Liquid Crystal Display：薄膜トランジスタ液晶ディスプレイ）等の半導体装置を製造する際のリソグラフィ工程で使用されるフォトマクスやレティクルに異物が付着することを防止するために用いる大型ペリクル用枠体に関する。   The present invention is used when manufacturing semiconductor devices such as IC (Integrated Circuit), LSI (Large Scale Integration), TFT LCD (Thin Film Transistor, Liquid Crystal Display), etc. The present invention relates to a large pellicle frame used to prevent foreign matter from adhering to a photomax and a reticle used in the lithography process.

従来、半導体回路パターン等の製造においては、フォトマスクやレティクルの両面側にペリクルと称する防塵手段を配置して、フォトマスクやレティクルへの異物の付着を防止することが行われている。   2. Description of the Related Art Conventionally, in manufacturing semiconductor circuit patterns and the like, dust prevention means called a pellicle is disposed on both sides of a photomask or reticle to prevent foreign matter from adhering to the photomask or reticle.

ペリクルの一般的な構造としては、金属、セラミックス、またはポリマー製の枠体の一方の縁面に、ポリマーまたはガラス等の透明な薄膜を貼り付け、他方の縁面に、マスクに貼り付けるための貼着剤層（粘着材）を設けたものが挙げられる。例えば、ペリクルは、フォトマスクやレティクルの形状に合わせた形状を有する厚さ数ミリ程度の枠体の一方の縁面に、厚さ１０μｍ以下のニトロセルロースまたはセルロース誘導体等の透明な高分子膜から成るペリクル膜を展張して接着し、且つ枠体の他方の縁面に粘着材を介してフォトマスクやレティクルの表面に貼着している。   As a general structure of a pellicle, a transparent thin film such as a polymer or glass is attached to one edge surface of a metal, ceramic, or polymer frame, and the other edge surface is attached to a mask. What provided the adhesive layer (adhesive material) is mentioned. For example, a pellicle is formed from a transparent polymer film such as nitrocellulose or a cellulose derivative having a thickness of 10 μm or less on one edge surface of a frame of about several millimeters thick having a shape matched to the shape of a photomask or a reticle. A pellicle film is spread and bonded, and is attached to the other edge surface of the frame body on the surface of a photomask or reticle via an adhesive material.

フォトマスクやレティクルの表面に異物が付着した場合、その異物が半導体ウエハ上に形成されたフォトレジスト上に結像して回路パターン欠陥の原因となるが、フォトマスクやレティクルの少なくともパターン面にペリクルを配置した場合、ペリクルの表面に付着した異物はフォーカス位置がずれるため、半導体ウエハ上に形成されたフォトレジスト上に結像することがなく、回路パターンに欠陥を生じさせることがない。   When foreign matter adheres to the surface of a photomask or reticle, the foreign matter forms an image on the photoresist formed on the semiconductor wafer and causes a circuit pattern defect. However, the pellicle must be formed on at least the pattern surface of the photomask or reticle. When the is placed, the foreign substance adhering to the surface of the pellicle is out of focus, so that it does not form an image on the photoresist formed on the semiconductor wafer and the circuit pattern will not be defective.

また、近年では、各種のマルチメディアの普及により、高画質、高精細表示が可能な大型のカラーＴＦＴ型ＬＣＤのフォトリソグラフィ工程で使用される大型のフォトマスクに適用できる大型ペリクルが要望されている。   In recent years, with the widespread use of various types of multimedia, there is a demand for a large pellicle applicable to a large photomask used in the photolithography process of a large color TFT LCD capable of high-quality and high-definition display. .

例えば、特許文献１には、大型のフォトマスクに適用できる大型ペリクルが提案されている。また、特許文献２には、大型ペリクル用枠体の撓みや歪みに対応するために、枠体と枠体より弾性係数の大きい補強材を利用した枠体も提案されている。さらに、特許文献３には、高解像度を必要とする露光において使用される２００ｎｍ以下の紫外光露光に利用されるペリクル枠体であって、マスクの平坦性の精度に影響しないペリクル枠体として、弾性率が異なる２種類以上の材料を枠体の厚さ方向に接合した枠体を利用することも提案されている。   For example, Patent Document 1 proposes a large pellicle applicable to a large photomask. Patent Document 2 also proposes a frame body using a frame and a reinforcing material having a larger elastic coefficient than the frame body in order to cope with bending and distortion of the large pellicle frame body. Further, Patent Document 3 discloses a pellicle frame used for ultraviolet light exposure of 200 nm or less used in exposure that requires high resolution, and does not affect the accuracy of mask flatness, It has also been proposed to use a frame obtained by joining two or more types of materials having different elastic moduli in the thickness direction of the frame.

特開２００１−１０９１３５号公報JP 2001-109135 A 特開２００６−２８４９２７号公報JP 2006-284927 A 特開２００９−０６３７４０号公報JP 2009-063740 A

ところでペリクル枠体は、１枚のシート状母材からの打ち抜きにより、枠体１本を切り出すことが多い。これは、ペリクルの平坦性を確保する観点等に基づくものである。そのため、平坦性を有する母材は多く存在するものの、ペリクル枠体が大型化すればするほど、枠体の平坦性の精度を出すことは容易ではなく、製造工程にも手間がかかるため、歩留まり低下や、枠体のコスト高の原因になっている。   By the way, the pellicle frame is often cut out by one punching from one sheet-like base material. This is based on the viewpoint of ensuring the flatness of the pellicle. Therefore, although there are many base materials having flatness, the larger the size of the pellicle frame, the more difficult it is to obtain the accuracy of flatness of the frame, and it also takes time and effort in the manufacturing process. This is a cause of reduction and high cost of the frame.

また、大型化すれば、枠体自体の自重、ペリクル膜の張力、温度変化に起因する応力といった各種要因により、枠体に撓みや歪みが発生する可能性があるため、剛性の高い１枚のシート状母材からの打ち抜きにより作製された枠体を一般的に使用している。このような撓みや歪みは、ペリクル膜を張り付けた後のフレームに、膜の張力により内側に向かって生じるが、フォトマスクメーカーの露光面積を確保したいという要求のため、撓みや歪みを出来るだけ小さくする必要がある。そこで、枠体の断面積を大きくしてペリクル枠体の剛性を向上させる方法があるが、有効露光面積等を考慮すると好ましくない。   Also, if the size is increased, the frame itself may be bent or distorted due to various factors such as the weight of the frame itself, the tension of the pellicle film, and the stress caused by the temperature change. A frame body produced by punching from a sheet-like base material is generally used. Such bending or distortion occurs inwardly due to the tension of the film on the frame after the pellicle film is attached, but the bending and distortion are made as small as possible due to the demand of the photomask manufacturer to secure an exposure area. There is a need to. Therefore, there is a method of increasing the rigidity of the pellicle frame by increasing the cross-sectional area of the frame, but this is not preferable in view of the effective exposure area and the like.

上記のような理由より、コストの面から大型ペリクルで分割した枠体（以下、分割枠体という）を利用したい反面、分割した枠体では枠体に撓みや歪みが発生する可能性があり、また、剛性が実用のための特性を充たさず、商品として実用化されていないのが現状である。   For the reasons described above, from the viewpoint of cost, I would like to use a frame divided by a large pellicle (hereinafter referred to as a divided frame), but in the divided frame, there is a possibility that the frame will be bent or distorted, In addition, the present situation is that the rigidity does not satisfy practical characteristics and is not put into practical use as a product.

分割枠体を利用した文献としては、特許文献２等が紹介されており、文献によると、剛性を確保するために接合部に枠体より剛性の高い部材を用いて接着剤等を使用したり、摩擦攪拌溶接等の特殊な方法を使用したりする記載がある。しかし、接着剤を利用する場合は、接着剤溜りのような接合部に特殊な加工が必要であったり、露光中に接着剤からのアウトガス発生が懸念されたりする。また、摩擦攪拌溶接等には特殊な溶接技術が必要になる。   Patent literature 2 etc. are introduced as literature using a divided frame, and according to the literature, in order to ensure rigidity, an adhesive etc. is used using a member higher in rigidity than a frame in a joint part. There is a description of using a special method such as friction stir welding. However, when an adhesive is used, special processing is required for the joint portion such as an adhesive reservoir, or outgassing from the adhesive may occur during exposure. In addition, special welding techniques are required for friction stir welding and the like.

本発明は、かかる事情に鑑みてなされたものであり、部材（接合部を有する枠体）を用いて大型のペリクル用枠体を構成するにあたり、接合部に枠体よりも剛性の高い部材や接着剤等を用いることなくペリクル用枠体として実用上問題のない剛性および寸法安定性を維持し、また、歩留まりを向上させることを目的とする。     The present invention has been made in view of such circumstances, and in configuring a large pellicle frame body using a member (frame body having a joint portion), a member having higher rigidity than the frame body at the joint portion, An object of the present invention is to maintain rigidity and dimensional stability with no practical problems as a pellicle frame without using an adhesive or the like, and to improve the yield.

本発明者らは、上述の目的を達成するために鋭意研究を重ねた結果、接合部に特定の構造を有するペリクル用枠体が上記課題を解決し得ることを見出し、本発明を完成するに至った。   As a result of intensive studies to achieve the above-mentioned object, the present inventors have found that a pellicle frame having a specific structure at the joint can solve the above-mentioned problems, and complete the present invention. It came.

すなわち、本発明に係るペリクル用枠体は、平面視矩形状の開口部を備えるペリクル用枠体であって、端部同士が接合されることにより開口部の周縁を形成する部材を有し、接合される一方の部材の端部には、接合される他方の部材に向けて突出する少なくとも一つの凸部が設けられ、他方の部材の端部には、凸部を嵌合させる凹部が設けられ、凸部を凹部に嵌合させることにより一方の部材の端部が他方の部材の端部に接合されるものである。なお、本発明において「嵌合」とは、凸部が凹部よりも若干大きく形成されるか、凹部が凸部よりも若干小さく形成されるか、又は凸部と凹部とが同じ大きさで形成されており、凸部を凹部の内部に挿入して接合する際に凸部が凹部の内周面によって内方に圧縮変形させられるか又は圧縮変形がなくても凸部が凹部に隙間なく噛み合わせられるような状態を意味する。   That is, the pellicle frame body according to the present invention is a pellicle frame body having a rectangular opening in a plan view, and has a member that forms the periphery of the opening by joining the ends together. At least one convex portion that protrudes toward the other member to be joined is provided at the end portion of the one member to be joined, and a concave portion for fitting the convex portion is provided at the end portion of the other member. Then, the end of one member is joined to the end of the other member by fitting the convex portion into the concave portion. In the present invention, “fitting” means that the convex portion is formed slightly larger than the concave portion, the concave portion is formed slightly smaller than the convex portion, or the convex portion and the concave portion are formed in the same size. When the convex portion is inserted into the concave portion and joined, the convex portion is compressed and deformed inward by the inner peripheral surface of the concave portion, or even if there is no compression deformation, the convex portion bites into the concave portion without a gap. It means a state that can be matched.

かかる構成を採用すると、枠体よりも剛性の高い補強材や接着剤、特殊な溶接技術等を使用することなく曲げ剛性やせん断剛性を実用上問題の無いレベルにすることが可能になる。また、このような枠体に膜を張り付けた後の膜張力による内側への撓み等により、接合部での応力集中が緩和されるため、接合部に隙間やガタ等が発生しにくく、寸法・形状が安定し、またガタ等による発塵の発生が少ないため好ましい。そのため、ハンドリング治具に大型ペリクルを固定して検品する際に様々な方向へ位置を変化させた場合においても、ペリクルがハンドリング治具から落ち難くなる。   By adopting such a configuration, it becomes possible to make the bending rigidity and shear rigidity at a level having no practical problem without using a reinforcing material, an adhesive, a special welding technique, or the like that is higher in rigidity than the frame. In addition, the stress concentration at the joint is alleviated due to inward bending due to the film tension after the film is attached to such a frame, so that gaps and backlash are less likely to occur at the joint. This is preferable because the shape is stable and the generation of dust due to looseness is small. For this reason, even when the inspection is performed with the large pellicle fixed to the handling jig, the pellicle hardly falls from the handling jig even when the position is changed in various directions.

また、一枚物の母材からの切り出しよりも部材（接合部を有する枠体）を使用することにより、切削加工工数が少なくなり加工時にかかる枠体への残留応力が小さくなる。また、素材の異方性を考えると、分割枠体の方が同じ方向性の部材を使用可能とするため、枠体全体としての異方性が小さくなる。このように残留応力や異方性が小さくなるため、ペリクル製造工程内での加熱工程中での応力歪み等による開放が小さくなりペリクルとして寸法が安定するため好ましい。このため残留応力を開放するために事前に加熱処理等を行う必要がなくなり、工程数が減るといった製造上のメリットもでてくる。また、応力歪みは経時的に開放方向に向かうため、残留応力の小さい分割枠体の方が長期的に保管しても寸法が安定しているため好ましいことになる。   Further, by using a member (a frame body having a joint portion) rather than cutting out from a single base material, the number of cutting processes is reduced, and the residual stress applied to the frame body during processing is reduced. In addition, considering the anisotropy of the material, the divided frame body can use members having the same directionality, so that the anisotropy of the entire frame body is reduced. Since the residual stress and anisotropy are thus reduced, the release due to stress strain or the like during the heating process in the pellicle manufacturing process is reduced, and the dimension of the pellicle is stabilized, which is preferable. For this reason, it is not necessary to perform heat treatment or the like in advance in order to release the residual stress, and there is a manufacturing merit that the number of processes is reduced. Further, since the stress strain tends to open in the course of time, the divided frame body having a small residual stress is preferable because the dimensions are stable even when stored for a long period of time.

さらに、複数の部材で枠体を形成することで、母材の平坦性の良い箇所の切り出しが可能になり、接合後の枠体の平坦性も向上することになる。小さな母材から大きな枠体を作製することも可能であり、コストダウンのメリットもある。   Furthermore, by forming the frame body with a plurality of members, it becomes possible to cut out portions with good flatness of the base material, and the flatness of the frame body after joining is also improved. It is also possible to produce a large frame from a small base material, which has the advantage of cost reduction.

これまで述べてきたように、ペリクルの平坦性を確保する観点等に基づき、ペリクル用枠体は１枚のシート状母材から打ち抜きにより切り出すことが多かった。本願発明はそのような技術常識に反してなされたものであるとともに、上述のような優れた効果を有するものである。   As described above, based on the viewpoint of ensuring the flatness of the pellicle, the pellicle frame body is often cut out from a single sheet-like base material by punching. The present invention has been made against such technical common sense and has the excellent effects as described above.

前記ペリクル用枠体において、凸部の根元側の最大横寸法（ｔ）を先端側の最大横寸法（ｖ）よりも短くなるように形成することが寸法安定性の面から好ましい。さらに、凸部の根元側の最大横寸法（ｔ）を、凸部が設けられる部材の幅に対して５％〜８０％の長さに設定し、凸部の先端側の最大横寸法（ｖ）を、凸部が設けられる部材の幅に対して１０％〜９０％の長さに設定することが好ましい。ここで、部材の幅方向の位置取りによって数値が変わる場合も想定されるが、幅方向の測定位置に特に制限はなく、幅方向のいずれかの測定位置によって上記条件を満たしていればよい。なお、幅に対する場合は、ペリクル膜面側の幅及びマスク粘着剤側の幅の何れか一方において上記数値範囲に入ればよい。   In the pellicle frame, it is preferable from the viewpoint of dimensional stability that the maximum lateral dimension (t) on the base side of the convex portion is shorter than the maximum lateral dimension (v) on the tip side. Further, the maximum lateral dimension (t) on the base side of the convex part is set to a length of 5% to 80% with respect to the width of the member on which the convex part is provided, and the maximum lateral dimension (v on the tip side of the convex part) ) Is preferably set to a length of 10% to 90% with respect to the width of the member provided with the convex portion. Here, although the numerical value may be changed depending on the positioning of the member in the width direction, the measurement position in the width direction is not particularly limited, and it is sufficient that the above condition is satisfied by any measurement position in the width direction. In the case of the width, the above numerical value range may be entered in either the width on the pellicle film surface side or the width on the mask adhesive side.

また、前記ペリクル用枠体において、凸部の根元側の最大横寸法（ｔ）を、凸部が設けられる部材の厚さに対して５％〜８０％の長さに設定し、凸部の先端側の最大横寸法（ｖ）を、凸部が設けられる部材の厚さに対して１０％〜９０％の長さに設定することが好ましい。ここで、部材の厚さ方向の位置取りによって数値が変わる場合も想定されるが、厚さ方向の測定位置に特に制限はなく、厚さ方向のいずれかの測定位置によって上記条件を満たしていればよい。   In the pellicle frame, the maximum lateral dimension (t) on the base side of the convex portion is set to a length of 5% to 80% with respect to the thickness of the member on which the convex portion is provided. It is preferable to set the maximum lateral dimension (v) on the distal end side to a length of 10% to 90% with respect to the thickness of the member provided with the convex portion. Here, it is assumed that the numerical value may change depending on the positioning of the member in the thickness direction, but there is no particular limitation on the measurement position in the thickness direction, and the above condition may be satisfied by any measurement position in the thickness direction. That's fine.

なお、凸部の根元側の最大横寸法（ｔ）とは、部材の接合端面に凸部が接続されている根元部分の最大寸法（例えば平面視において図６（ａ）に示すような２点間の距離ｔ）を意味しており、凸部の先端側の最大横寸法（ｖ）とは、部材の長手方向に対して略直角な方向における凸部の先端側部分（根元部分を除く部分）の最大寸法を意味している。   The maximum lateral dimension (t) on the base side of the convex part is the maximum dimension of the base part where the convex part is connected to the joint end surface of the member (for example, two points as shown in FIG. 6A in plan view). The maximum lateral dimension (v) on the tip side of the convex part means the tip side part of the convex part in the direction substantially perpendicular to the longitudinal direction of the member (the part excluding the root part) ) Means the maximum dimension.

また、前記ペリクル用枠体において、接合部（嵌合部）は１箇所以上となるが、接合部が１箇所の場合、１枚の母材からの切削時に、１枚物ほどの平坦性や寸法精度を求めなくても接合部で調整可能になり、また、１本の部材を塑性変形させて枠体にすることも可能になるため母材の節約になる。さらに、接合部を２箇所以上とすることで、平坦性の調整が容易となるため好ましい。このように２箇所以上とすることで、ペリクル用枠体を構成する各々のパーツの加工精度を高めることで、１枚の母材からよりも容易に平坦性の精度を出すことが可能となり寸法精度が高まることになる。   Further, in the pellicle frame body, there are one or more joint portions (fitting portions). However, when there is one joint portion, when cutting from a single base material, Even if it does not require dimensional accuracy, it can be adjusted at the joint, and a single member can be plastically deformed to form a frame, which saves the base material. Furthermore, it is preferable to have two or more joints because the flatness can be easily adjusted. By having two or more places in this way, it is possible to increase the accuracy of processing of each part constituting the pellicle frame body, thereby making it possible to obtain flatness accuracy more easily than a single base material. Accuracy will increase.

また、前記ペリクル用枠体において、凸部は、凹部との嵌合時に凹部の内周面によって内方に圧縮変形させられる余剰外周部分を有するか、又は、凹部が、凸部との嵌合時に凸部の外周面によって内方に圧縮変形させられる余剰外周部分を有することとする。かかる構成を採用すると、部材の端部同士を上下方向から嵌合させることで、余剰外周部分が押しつぶされて外方向へ膨出することにより、各接合部分が隙間なく密にしかも強固に接合されるため、曲げ剛性やせん断剛性等が枠体より剛性の高い補強材等を使用しなくても高くなる。また余剰外周部分があることで、接着剤が不要になり、露光中へのアウトガスの心配もない。余剰外周部分の寸法は、少なくとも０．００１ｍｍ以上（例えば０．００５ｍｍ以上０．１ｍｍ以下）であることが好ましい。なお、余剰外周部分がほぼ０ｍｍである場合は、接着剤等を使用することもできる。   Further, in the pellicle frame, the convex portion has an excessive outer peripheral portion that is compressed and deformed inward by the inner peripheral surface of the concave portion when fitted with the concave portion, or the concave portion is fitted with the convex portion. It sometimes has an excess outer peripheral portion that is compressed and deformed inward by the outer peripheral surface of the convex portion. By adopting such a configuration, by fitting the end portions of the members from above and below, the excess outer peripheral portion is crushed and bulged outward, so that each joining portion is tightly and firmly joined without a gap. Therefore, bending rigidity, shear rigidity, and the like are increased without using a reinforcing material having higher rigidity than the frame. Further, since there is an extra outer peripheral portion, no adhesive is required, and there is no worry of outgassing during exposure. It is preferable that the dimension of the excess outer peripheral part is at least 0.001 mm or more (for example, 0.005 mm or more and 0.1 mm or less). In addition, an adhesive etc. can also be used when a surplus outer peripheral part is about 0 mm.

また、本発明に係るペリクルは、前記ペリクル用枠体と、前記ペリクル用枠体の開口部を覆うように展張支持されたペリクル膜と、を備えるものである。   The pellicle according to the present invention includes the pellicle frame and a pellicle film that is stretched and supported so as to cover the opening of the pellicle frame.

本発明によれば、枠体より剛性の高い部材や接着剤等を用いることもなくペリクル用枠体としての実用上問題のない剛性を維持し、寸法安定性に優れるペリクル用枠体を提供することができる。   According to the present invention, there is provided a pellicle frame body which maintains rigidity without any practical problem as a pellicle frame body without using a member or adhesive having higher rigidity than the frame body and has excellent dimensional stability. be able to.

本発明の実施形態に係るペリクルの斜視図である。1 is a perspective view of a pellicle according to an embodiment of the present invention. 本発明の実施形態に係るペリクル用枠体の平面図である。It is a top view of the frame for pellicles concerning the embodiment of the present invention. 本発明の実施形態に係るペリクル用枠体の角部の拡大斜視図である。It is an expansion perspective view of the corner | angular part of the frame for pellicles concerning embodiment of this invention. 本発明の他の実施形態に係るペリクル用枠体の平面図である。It is a top view of the frame for pellicles concerning other embodiments of the present invention. 本発明の他の実施形態に係るペリクル用枠体の平面図である。It is a top view of the frame for pellicles concerning other embodiments of the present invention. 図３又は図４に示すペリクル用枠体の接合部の構成を説明するための説明図である。FIG. 5 is an explanatory diagram for explaining a configuration of a joint portion of the pellicle frame shown in FIG. 3 or FIG. 4. （ａ）は図５に示すペリクル用枠体の接合部の拡大図であり、（ｂ）はその変形例を示す拡大図である。(A) is an enlarged view of the junction part of the frame for pellicles shown in FIG. 5, (b) is an enlarged view which shows the modification. （ａ）、（ｂ）、（ｃ）いずれも、本発明の各実施形態に係るペリクル用枠体の接合部の変形例の拡大図である。(A), (b), (c) is an enlarged view of a modification of the joint part of the pellicle frame according to each embodiment of the present invention. 比較例における接合部の拡大図である。It is an enlarged view of the junction part in a comparative example. 参考例における接合部の拡大図である。It is an enlarged view of the junction part in a reference example. 参考例における接合部の拡大図である。It is an enlarged view of the junction part in a reference example.

以下、本発明を実施するための形態（実施形態）について詳細に説明する。なお、本発明は、下記実施形態に限定されるものではなく、その要旨の範囲内で種々変形して実施することができる。   DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments (embodiments) for carrying out the present invention will be described in detail. In addition, this invention is not limited to the following embodiment, It can implement by changing variously within the range of the summary.

最初に、本発明の実施形態に係るペリクルについて説明する。図１は、本発明の実施形態に係る大型ペリクル１を示す斜視図である。大型ペリクル１は、大型ペリクル用枠体２と、大型ペリクル用枠体２の上縁面２ｅに接着された大型ペリクル膜３と、を備えている。なお、図示しないが、大型ペリクル１は、大型ペリクル用枠体２の下縁面に塗布された貼着剤層と、貼着剤層に粘着されこの貼着剤層を保護する保護フィルムと、をさらに備えている。   First, a pellicle according to an embodiment of the present invention will be described. FIG. 1 is a perspective view showing a large pellicle 1 according to an embodiment of the present invention. The large pellicle 1 includes a large pellicle frame 2 and a large pellicle film 3 bonded to the upper edge surface 2 e of the large pellicle frame 2. Although not shown, the large pellicle 1 includes an adhesive layer applied to the lower edge surface of the large pellicle frame 2, a protective film that adheres to the adhesive layer and protects the adhesive layer, Is further provided.

大型ペリクル用枠体２は、例えばアルミニウム、アルミニウム合金（５０００系、６０００系、７０００系等）、鉄及び鉄系合金、セラミックス（ＳｉＣ、ＡｌＮ、Ａｌ２Ｏ３等）、セラミックスと金属との複合材料（Ａｌ−ＳｉＣ、Ａｌ−ＡｌＮ、Ａｌ−Ａｌ2Ｏ3等）、炭素鋼、工具鋼、ステンレスシリーズ、ポリマー等からなり、平面視略矩形状を呈している。 The large pellicle frame 2 is made of, for example, aluminum, aluminum alloys (5000 series, 6000 series, 7000 series, etc.), iron and iron alloys, ceramics (SiC, AlN, Al2O3, etc.), composite materials of ceramics and metals (Al -SiC, Al-AlN, Al- Al 2 O 3 , etc.), carbon steel, tool steel, stainless steel series, made of a polymer or the like, and has a substantially rectangular shape in plan view.

枠体の表面処理としては、アルマイト処理、塗装、塗料コーティング、めっき処理、低融点ガラスフリット処理、ＣＶＤ処理、スパッタ法などによるＰＶＤ処理などを採用することができる。大型ペリクル用枠体２は、一対の長辺２ａ，２ｂと、この長辺２ａ，２ｂよりも短い一対の短辺２ｃ，２ｄと、から構成されており、矩形状の開口部４を有している。開口部４の開口面積は、１０００ｃｍ2以上とされるのが好ましく、３０００ｃｍ2以上とされるのがより好ましく、５０００ｃｍ2以上とされるのがさらに好ましい。なお、開口部４の開口面積は、３５０００ｃｍ2以下とされるのが好ましい。 As the surface treatment of the frame, alumite treatment, painting, paint coating, plating treatment, low melting point glass frit treatment, CVD treatment, PVD treatment by sputtering, etc. can be employed. The large pellicle frame 2 is composed of a pair of long sides 2a and 2b and a pair of short sides 2c and 2d shorter than the long sides 2a and 2b, and has a rectangular opening 4. ing. Area of the opening 4 is preferably is a 1000 cm 2 or more, more preferably is a 3000 cm 2 or more, more preferably it is between 5000 cm 2 or more. The opening area of the opening 4 is preferably 35000 cm 2 or less.

一対の長辺２ａ，２ｂは、例えば幅が９．０ｍｍの柱状部材からなり、その長さは、例えば８００ｍｍである。一対の短辺２ｃ，２ｄは、幅が例えば７．０ｍｍの柱状部材からなり、その長さは、例えば４８０ｍｍである。つまり、短辺２ｃ，２ｄの平面視（上面視）における幅は、長辺２ａ，２ｂの幅よりも狭い。大型ペリクル用枠体２の角部５の曲率は、例えば、Ｒ＝２ｍｍである。また、大型ペリクル用枠体２の短辺２ｃ、２ｄの側面６には、溝部７が長手方向（辺方向）に沿って設けられている。   The pair of long sides 2a and 2b is made of a columnar member having a width of 9.0 mm, for example, and the length thereof is, for example, 800 mm. The pair of short sides 2c, 2d is a columnar member having a width of, for example, 7.0 mm, and the length thereof is, for example, 480 mm. That is, the width of the short sides 2c and 2d in plan view (top view) is narrower than the width of the long sides 2a and 2b. The curvature of the corner 5 of the large pellicle frame 2 is, for example, R = 2 mm. Further, a groove portion 7 is provided along the longitudinal direction (side direction) on the side surfaces 6 of the short sides 2c and 2d of the large pellicle frame 2.

大型ペリクル膜３は、例えばニトロセルロースやセルロース誘導体、フッ素系ポリマー、またはシクロオレフィン系ポリマー等の透明な高分子膜からなり、その厚さは、例えば０．１μｍ以上１０μｍ以下が好ましい。この大型ペリクル膜３は、大型ペリクル用枠体２の開口部４を覆うように上縁面２ｅに展張され、ペリクル枠体２に貼着支持されている。   The large pellicle film 3 is made of a transparent polymer film such as nitrocellulose, a cellulose derivative, a fluorine polymer, or a cycloolefin polymer, and the thickness thereof is preferably, for example, 0.1 μm or more and 10 μm or less. The large pellicle film 3 is spread on the upper edge surface 2 e so as to cover the opening 4 of the large pellicle frame 2, and is attached to and supported by the pellicle frame 2.

大型ペリクル膜３を大型ペリクル用枠体２の上縁面２ｅに接着する接着剤としては、例えば、アクリル樹脂接着剤、エポキシ樹脂接着剤、シリコーン樹脂接着剤、または含フッ素シリコーン接着剤等のフッ素系ポリマーを用いることができる。また、貼着支持する粘着材としては、スチレンエチレンブチレンスチレン、スチレンエチレンプロピレンスチレン、もしくはオレフィン系等のホットメルト粘着材、シリコーン系粘着材、アクリル系粘着材、または発泡体を基材とした粘着テープを用いることができる。粘着材層の厚さは、大型ペリクル用枠体２の厚さと粘着材厚さの合計が、規定された大型ペリクル膜３とフォトマスクの距離を越えない範囲で設定されるのが好ましく、例えば、０．０１ｍｍ以上１０ｍｍ以下とされるのが好ましい。   Examples of the adhesive that bonds the large pellicle film 3 to the upper edge surface 2e of the large pellicle frame 2 include fluorine such as an acrylic resin adhesive, an epoxy resin adhesive, a silicone resin adhesive, or a fluorine-containing silicone adhesive. System polymers can be used. In addition, as an adhesive material to support adhesion, styrene ethylene butylene styrene, styrene ethylene propylene styrene, or olefin-based hot-melt adhesive material, silicone adhesive material, acrylic adhesive material, or foam-based adhesive material Tape can be used. The thickness of the adhesive material layer is preferably set so that the total thickness of the large pellicle frame 2 and the adhesive material thickness does not exceed the prescribed distance between the large pellicle film 3 and the photomask. , 0.01 mm or more and 10 mm or less is preferable.

また、大型ペリクル膜３をフォトマスクに貼り付けた際に貼着剤層の内側に空間が存在すると、該空間に異物が滞留する可能性がある。そのため、大型ペリクル用枠体２の下縁面に粘着剤を塗布する際には、大型ペリクル１をフォトマスクに貼り付ける際の加圧で粘着剤層が潰れて広がることを考慮した上で、加圧時に開口部４に粘着剤がはみ出さない程度に大型ペリクル用枠体２の開口部４内側寄りに塗布することが好ましい。具体的には、貼着剤層内側の空間の幅が粘着剤層の塗布幅の０．３５倍以内となるように塗布することが好ましい。粘着剤層の塗布幅は大型ペリクル用枠体２の各辺２ａ〜２ｄの幅に対し０．３〜０．６倍であることが好ましく、大型ペリクル用枠体２の各辺２ａ〜２ｄに沿って塗布することが好ましい。粘着材を保護する保護フィルムとしては、ポリエチレンテレフタレート樹脂、またはポリエチレン樹脂からなるフィルムを用いることができる。また、粘着材の粘着力に応じて、離型剤、例えばシリコーン系離型剤、またはフッ素系離型剤を、保護フィルムの表面に塗布しても良い。保護フィルムの厚さは、例えば、０．０１ｍｍ以上１ｍｍ以下が好ましい。   In addition, if a space exists inside the adhesive layer when the large pellicle film 3 is attached to the photomask, there is a possibility that foreign matter may stay in the space. Therefore, when applying an adhesive to the lower edge surface of the large pellicle frame 2, considering that the pressure-sensitive adhesive layer is crushed and spread by the pressure applied when the large pellicle 1 is attached to the photomask, It is preferable to apply to the inside of the opening 4 of the large pellicle frame 2 so that the adhesive does not protrude into the opening 4 during pressurization. Specifically, it is preferable to apply so that the width of the space inside the adhesive layer is within 0.35 times the application width of the adhesive layer. The application width of the pressure-sensitive adhesive layer is preferably 0.3 to 0.6 times the width of each side 2a to 2d of the large pellicle frame 2, and is applied to each side 2a to 2d of the large pellicle frame 2. It is preferable to apply along. As a protective film for protecting the adhesive material, a film made of polyethylene terephthalate resin or polyethylene resin can be used. Further, a release agent such as a silicone release agent or a fluorine release agent may be applied to the surface of the protective film according to the adhesive strength of the adhesive material. As for the thickness of a protective film, 0.01 mm or more and 1 mm or less are preferable, for example.

次いで、本発明の実施形態に係るペリクル用枠体について説明する。   Next, a pellicle frame body according to an embodiment of the present invention will be described.

まず、本発明の一実施形態に係る大型ペリクル用枠体２について、図２及び図３を参照しながら説明する。図２（８分割構造）は、図１に示すような大型ペリクルに用いられる大型ペリクル用枠体２を上から見た図（平面図）であり、図３は、図２の角部付近を示す拡大斜視図である。なお、図１では接合部の記載を省略している。   First, a large pellicle frame 2 according to an embodiment of the present invention will be described with reference to FIGS. 2 (8-divided structure) is a view (plan view) of a large pellicle frame 2 used in a large pellicle as shown in FIG. 1 as viewed from above, and FIG. 3 shows the vicinity of the corner of FIG. It is an enlarged perspective view shown. In FIG. 1, the description of the joint portion is omitted.

大型ペリクル用枠体２において、開口部４の周縁部を構成する枠部は、一対の長辺２ａ、２ｂを各々構成する長辺用部材である分割枠体２１ａ、２１ｂと、分割枠体２１ａ、２１ｂの軸方向両端部に接合部を介して連設され、大型ペリクル用枠体２の有する４箇所の角部５を各々形成する角部用部材である分割枠体２１ｅ、２１ｈ、２１ｆ、２１ｇと、分割枠体２１ｅ、２１ｈ、２１ｆ、２１ｇの開放端同士を、接合部を介して架橋して一対の短辺２ｃ、２ｄを各々構成する短辺用部材である分割枠体２１ｃ、２１ｄと、から形成されている。すなわち、大型ペリクル用枠体２は、開口部４の周縁部を構成する枠部の軸方向に沿って、８箇所の接合部を有している。このように角部付近に接合部を設ける場合は、軸方向以外にも軸方向に垂直や斜めに対して設けてもよい。   In the large pellicle frame 2, the frame portion constituting the peripheral portion of the opening 4 includes divided frame members 21a and 21b, which are long-side members constituting the pair of long sides 2a and 2b, respectively, and the divided frame member 21a. , 21 b, 21 b, 21 f, 21 f, 21 b, 21 b, 21 b, 21 b, 21 b, 21 b, 21 b, 21 b, 21 b 21g and the divided frame bodies 21c, 21d, which are short-side members that respectively constitute a pair of short sides 2c, 2d by bridging the open ends of the divided frame bodies 21e, 21h, 21f, 21g through a joint portion. And is formed from. That is, the large pellicle frame body 2 has eight joint portions along the axial direction of the frame portion constituting the peripheral portion of the opening 4. Thus, when providing a junction part near a corner | angular part, you may provide perpendicularly or diagonally with respect to an axial direction besides an axial direction.

また、図２において大型ペリクル用枠体２は分割枠体２１ａを基点とし、開口部４の開口軸を基準とした時計回り方向に、分割枠体２１ｅ、分割枠体２１ｄ、分割枠体２１ｆ、分割枠体２１ｂ、分割枠体２１ｇ、分割枠体２１ｃ、分割枠体２１ｈ、分割枠体２１ａの順に接続されて形成されている。ここで、接合箇所の数としては、１箇所以上あればよいが、好ましくは、２〜３０箇所、より好ましくは、２〜２０箇所、さらに好ましくは、３〜１５箇所である。   In FIG. 2, the large pellicle frame body 2 has a divided frame body 21a, a divided frame body 21d, a divided frame body 21f in a clockwise direction with the divided frame body 21a as a base point and the opening axis of the opening 4 as a reference. The divided frame body 21b, the divided frame body 21g, the divided frame body 21c, the divided frame body 21h, and the divided frame body 21a are connected in this order. Here, the number of joint locations may be one or more, but is preferably 2 to 30 locations, more preferably 2 to 20 locations, and even more preferably 3 to 15 locations.

大型ペリクル用枠体２において、長辺２ａと長辺２ｂの長さは等しく形成されており、短辺２ｃと短辺２ｄの長さは等しく形成されている。また、分割枠体２１ａと分割枠体２１ｂの形状は実質的に同一であり、分割枠体２１ｃと分割枠体２１ｄの形状は実質的に同一であり、さらに、角部５を各々形成する分割枠体２１ｅ、２１ｈ、２１ｆ、２１ｇの形状も実質的に同一である。具体的には、図２において、分割枠体２１ａ，２１ｂの長さは、例えば７００ｍｍであり、分割枠体２１ｃ、２１ｄの長さは、例えば３８０ｍｍである。   In the large pellicle frame 2, the long side 2a and the long side 2b are formed to have the same length, and the short side 2c and the short side 2d are formed to have the same length. Moreover, the shape of the division | segmentation frame 21a and the division | segmentation frame 21b is substantially the same, the shape of the division | segmentation frame 21c and the division | segmentation frame 21d is substantially the same, and also the division | segmentation which forms the corner | angular part 5 respectively. The shapes of the frames 21e, 21h, 21f, and 21g are also substantially the same. Specifically, in FIG. 2, the length of the divided frame bodies 21a and 21b is, for example, 700 mm, and the length of the divided frame bodies 21c and 21d is, for example, 380 mm.

ペリクル用枠体２の各辺２ａ〜２ｄの幅は、露光面積を確保する観点からは細ければ細いほど好ましいが、細すぎるとペリクル膜３の展張時にペリクル膜３の張力でペリクル用枠体２が撓んでしまうという問題が生じるおそれがある。各辺の長さに対して剛性を考慮した幅の太さになるため、３ｍｍ〜２５ｍｍ程度とすることができる。また、ペリクル用枠体２の厚さに関しても薄ければ薄いほど軽くて扱いやすい大型ペリクル１となるが、薄すぎるとペリクル膜３の展張時にペリクル膜３の張力でペリクル用枠体２が撓んでしまうという問題が生じるおそれがある。各辺２ａ〜２ｄの長さに応じて両者のバランスから、ペリクル用枠体２の厚さは好ましくは３．５ｍｍ〜１２ｍｍ程度とすることができる。   The width of each side 2a to 2d of the pellicle frame 2 is preferably as thin as possible from the viewpoint of securing the exposure area. However, if the width is too small, the pellicle frame body is stretched by the tension of the pellicle film 3 when the pellicle film 3 is stretched. There is a possibility that a problem that 2 is bent occurs. Since it becomes the thickness of the width which considered rigidity with respect to the length of each side, it can be set as about 3 mm-25 mm. In addition, the thinner the pellicle frame 2 is, the lighter and easier to handle the large pellicle 1 becomes. However, if the pellicle frame 2 is too thin, the pellicle frame 2 is bent by the tension of the pellicle film 3 when the pellicle film 3 is stretched. There is a risk that the problem will occur. The thickness of the pellicle frame body 2 is preferably about 3.5 mm to 12 mm from the balance between the two sides 2a to 2d.

図４は、図２と異なる分割枠体を使用して構成したペリクル用枠体の一例（他の実施形態）を示すものである。図４は４分割枠体の例であって、大型ペリクル用枠体２において、開口部４の周縁部を構成する枠部は、一対の長辺４ａ、４ｂを各々構成する部材である分割枠体４１ａ、４１ｂと、一対の短辺４ｃ、４ｄを各々構成する部材である分割枠体４１ｃ、４１ｄと、から形成されている。すなわち、大型ペリクル用枠体２は、開口部４の周縁部を構成する枠部の軸方向に沿って、４箇所の接合部を有している。大型ペリクル用枠体２において、長辺４ａと長辺４ｂの長さは等しく形成されており、短辺４ｃと短辺４ｄの長さは等しく形成されている。   FIG. 4 shows an example (another embodiment) of a pellicle frame configured by using a divided frame different from that in FIG. FIG. 4 shows an example of a four-divided frame body. In the large pellicle frame body 2, the frame portion constituting the peripheral portion of the opening 4 is a divided frame that is a member constituting each of the pair of long sides 4a and 4b. The body 41a and 41b and the division | segmentation frame bodies 41c and 41d which are the members which respectively comprise a pair of short sides 4c and 4d are formed. That is, the large pellicle frame body 2 has four joint portions along the axial direction of the frame portion constituting the peripheral edge portion of the opening 4. In the large pellicle frame 2, the long sides 4 a and the long sides 4 b are formed to have the same length, and the short sides 4 c and the short sides 4 d are formed to have the same length.

図５もまた、図２と異なる分割枠体を使用して構成したペリクル用枠体の一例（他の実施形態）を示すものである。図５は８分割枠体の例であって、大型ペリクル用枠体２において、開口部４の周縁部を構成する枠部は、一対の長辺５ａ、５ｂを各々構成する部材である分割枠体５１ａ、５１ａ´、５１ｂ、５１ｂ´と、一対の短辺５ｃ、５ｄを各々構成する部材である分割枠体５１ｃ、５１ｃ´、５１ｄ、５１ｄ´と、から形成されている。即ち、大型ペリクル用枠体２は、開口部４の周辺部を構成する枠部の軸方向に沿って、８箇所の接合部を有している。大型ペリクル用枠体２において、長辺５ａと長辺５ｂの長さは等しく形成されており、短辺５ｃと短辺５ｄの長さは等しく形成されている。   FIG. 5 also shows an example (another embodiment) of a pellicle frame configured by using a different divided frame from FIG. FIG. 5 shows an example of an eight-divided frame body. In the large pellicle frame body 2, the frame portion that forms the peripheral portion of the opening 4 is a divided frame that is a member that forms a pair of long sides 5a and 5b. The body 51a, 51a ', 51b, 51b' and divided frame bodies 51c, 51c ', 51d, 51d' which are members constituting the pair of short sides 5c, 5d, respectively. That is, the large pellicle frame body 2 has eight joint portions along the axial direction of the frame portion constituting the peripheral portion of the opening 4. In the large pellicle frame 2, the long side 5a and the long side 5b are formed to have the same length, and the short side 5c and the short side 5d are formed to have the same length.

図２〜図４に示す実施形態に係るペリクル用枠体においては、接合部を角部付近に設けた形状を例として図示したが、図５に示すように、各辺の各々必要箇所に設けてもよい。各辺の各々必要箇所に設ける場合は、ペリクル作製工程内の加熱等による熱膨張を接合部で緩和できるため好ましいが、角部付近に接合部を設ける方がより好ましい。   In the pellicle frame according to the embodiment shown in FIGS. 2 to 4, the shape in which the joint is provided in the vicinity of the corner is illustrated as an example. However, as illustrated in FIG. 5, the pellicle frame is provided at each necessary position on each side. May be. Although it is preferable to provide it at each necessary location on each side because thermal expansion due to heating or the like in the pellicle manufacturing process can be mitigated at the joint, it is more preferable to provide the joint near the corner.

図２に示す実施形態に係るペリクル用枠体においては、対向する一対の長辺を構成する２本の長辺用部材と、対向する一対の短辺を構成する２本の短辺用部材と、４つの角部を構成する角部用部材と、を採用し、長辺用部材及び短辺用部材の端部を各々角部用部材に接合し、角部用部材を介して長辺用部材及び短辺用部材を連結することにより平面視長方形状の枠体としてもよい。また、図３または図４に示す実施形態に係るペリクル用枠体においては、対向する一対の長辺を構成する２本の長辺用部材と、対向する一対の短辺を構成する２本の短辺用部材と、を採用し、長辺用部材及び短辺用部材の端部同士を接合して平面視長方形状の枠体としてもよい。このようにすると、平面視長方形状の枠体の角部付近に接合部を配置することができ、接合部を角部付近に設ける場合は、一本の辺を切り出すため、生産性が高くなるとともに、剛性の高い角部付近を接合することで一枚の母材からの切り出し物と同等の剛性を保つことができ、さらには、角部が直角性を保つため露光中の有効露光面積を保つことができるため好ましい。   In the pellicle frame according to the embodiment shown in FIG. 2, two long-side members constituting a pair of opposed long sides, and two short-side members constituting a pair of opposed short sides, The corner member constituting the four corners is employed, and the ends of the long side member and the short side member are respectively joined to the corner member, and for the long side via the corner member. It is good also as a frame body of the planar view rectangle shape by connecting a member and the member for short sides. Further, in the pellicle frame body according to the embodiment shown in FIG. 3 or FIG. 4, two long side members constituting a pair of opposed long sides and two pieces constituting a pair of opposed short sides. The short side member may be employed, and the end portions of the long side member and the short side member may be joined to each other to form a rectangular frame in plan view. If it does in this way, a joined part can be arranged near the corner of a rectangular frame in plan view, and when the joined part is provided in the vicinity of the corner, one side is cut out, so the productivity increases. At the same time, it is possible to maintain the same rigidity as a cut piece from a single base material by joining the vicinity of the corner with high rigidity. It is preferable because it can be maintained.

図６は、図３及び図４に示す実施形態に係るペリクル用枠体の接合部の拡大図である。また、図７（ａ）は、図５に示す実施形態に係るペリクル用枠体の接合部の拡大図であり、図７（ｂ）はその変形例である。図８は、各実施形態に係るペリクル用枠体の接合部の変形例の拡大図である。図８においては、（ａ）、（ｂ）、（ｃ）いずれかの形状を取ることができる。また、これらはあくまで例示であって、接合部の形状を制限するものではない。   FIG. 6 is an enlarged view of the joint portion of the pellicle frame according to the embodiment shown in FIGS. 3 and 4. Moreover, Fig.7 (a) is an enlarged view of the junction part of the frame body for pellicles concerning embodiment shown in FIG. 5, FIG.7 (b) is the modification. FIG. 8 is an enlarged view of a modified example of the joint portion of the pellicle frame according to each embodiment. In FIG. 8, any of (a), (b), and (c) can be taken. Further, these are merely examples, and do not limit the shape of the joint.

図６（ａ）に示すように、本発明の各実施形態に係るペリクル用枠体においては、接合される一方の部材（分割枠体）の端部に、接合される他方の部材（分割枠体）に向けて突出する少なくとも一つの凸部Pが設けられており、他方の部材（分割枠体）の端部には、この凸部Pを嵌合させる凹部Cが設けられている。そして、凸部Pを凹部Cに嵌合させることにより一方の部材（分割枠体）の端部が他方の部材（分割枠体）の端部に接合されるようになっている。   As shown in FIG. 6 (a), in the pellicle frame according to each embodiment of the present invention, the other member (divided frame) joined to the end of one member (divided frame) to be joined. At least one convex portion P projecting toward the body is provided, and a concave portion C into which the convex portion P is fitted is provided at an end portion of the other member (divided frame body). Then, by fitting the convex portion P into the concave portion C, the end portion of one member (divided frame body) is joined to the end portion of the other member (divided frame body).

本発明は接合部が嵌合部とされてなることを特徴とする大型ペリクル用枠体であるが、このような形状にすることで、接合部の曲げ剛性やせん断剛性が実用上問題のないレベルになり、ペリクル膜を張り付けた際に枠体が内側へ撓むが、その場合も応力集中が緩和されるため、接合部での隙間やガタ等が発生しにくくなり、分割枠体を利用しても寸法が安定するため好ましい。   The present invention is a frame for a large pellicle characterized in that the joint portion is a fitting portion. By adopting such a shape, there is no practical problem in bending rigidity or shear rigidity of the joint portion. When the pellicle film is attached, the frame will bend inward, but the stress concentration will be relaxed in this case as well, so it will be difficult for gaps and backlash at the joints to occur, and use a divided frame Even so, it is preferable because the dimensions are stable.

本実施形態に係るペリクル用枠体においては、図６に示すように、一方の部材の端部（接合部端面ｓ）に設けられた凸部Pの根元側部分の最大横寸法ｔが、この凸部Pの先端側部分（他方の部材の接合部内部ｕに形成された凹部Cに嵌まる部分）の最大横寸法ｖよりも短くなるように設定することが好ましい。このような構造は、部材（分割枠体）の幅方向にあってもよく、厚さ方向にあってもよい。幅方向にあった場合は、膜を展張した後の枠体の内側への撓みを防止するためにより好ましく、厚さ方向にあった場合は、もし内壁や外壁に盛り上がりがあっても、マスク粘着材や膜接着剤が塗布される幅方向は平坦になるため好ましい。   In the pellicle frame according to the present embodiment, as shown in FIG. 6, the maximum lateral dimension t of the base side portion of the convex portion P provided on the end portion (joint end surface s) of one member is expressed as follows. It is preferably set to be shorter than the maximum lateral dimension v of the front end side portion of the convex portion P (the portion that fits into the concave portion C formed in the joint portion u of the other member). Such a structure may be in the width direction of the member (divided frame) or in the thickness direction. If it is in the width direction, it is more preferable to prevent the frame from being bent to the inner side after the film is stretched. If it is in the thickness direction, even if the inner wall or the outer wall is raised, the mask adhesion The width direction in which the material or the film adhesive is applied is preferable because it becomes flat.

凸部Pの根元側の最大横寸法ｔは、凸部Pが設けられる部材の幅に対して５％〜８０％の長さに設定されることが好ましい。また、凸部Pの先端側の最大横寸法ｖは、凸部Pが設けられる部材の幅に対して１０％〜９０％の長さに設定されるのが好ましい。さらに、凸部Pの根元側の最大横寸法ｔは部材の幅に対して７％〜６０％の長さに設定されるのがより好ましく、１０％〜４０％の長さに設定されるのがさらに好ましい。また、凸部Pの先端側の最大横寸法ｖは部材の幅に対して１５％〜７５％の長さに設定されるのがより好ましく、２０％〜５０％の長さに設定されるのがさらに好ましい。なお、上記のそれぞれの最大横寸法は、接合部の幅に対して複数個あった場合は、各々の最大接合距離の総和を示している。   The maximum lateral dimension t on the base side of the convex portion P is preferably set to a length of 5% to 80% with respect to the width of the member on which the convex portion P is provided. Moreover, it is preferable that the maximum lateral dimension v on the tip side of the convex portion P is set to a length of 10% to 90% with respect to the width of the member on which the convex portion P is provided. Furthermore, the maximum lateral dimension t on the base side of the convex portion P is more preferably set to a length of 7% to 60% with respect to the width of the member, and is set to a length of 10% to 40%. Is more preferable. The maximum lateral dimension v on the tip side of the convex portion P is more preferably set to a length of 15% to 75% with respect to the width of the member, and is set to a length of 20% to 50%. Is more preferable. In addition, each said maximum horizontal dimension has shown the sum total of each maximum joining distance, when there exist with respect to the width | variety of a junction part.

凸部Pの根元側の最大横寸法ｔが部材の幅に対して５％より小さい場合は、接合部（嵌合部）での引っ掛かりが弱く、左右の引っ張り強度が低くなる可能があったり、ペリクル膜を張り付けた時の枠体の内側への撓みの際に、接合端面接合部に集中応力が大きくかかり、隙間やガタが接合端面部に起こる可能性があったりするので好ましくない。また、凸部Pの根元側の最大横寸法ｔが部材の幅に対して８０％より大きい場合は、上下からの嵌合時に、凸部Pが押しつぶされて外方向に膨出するため、枠体の内外側面が盛り上がる可能性があり好ましくない。さらに、凸部Pの先端側の最大横寸法ｖが部材の幅に対して１０％より小さい場合は、接合部（嵌合部）での引っ掛かりが弱く、左右の引っ張り強度が低くなる可能があったり、ペリクル膜を張り付けた時の枠体の内側への撓みの際に、接合端面接合部に集中応力が大きくかかり、隙間やガタが接合端面部に起こる可能性があったりするので好ましくない。また、凸部Pの先端側の最大横寸法ｖが部材の幅に対して９０％より大きい場合は、上下からの嵌合時に、凸部Pが押しつぶされて外方向に膨出するため、枠体の内外側面が盛り上がる可能性があり好ましくない。   When the maximum lateral dimension t on the base side of the convex portion P is smaller than 5% with respect to the width of the member, the catch at the joint (fitting portion) is weak, and the left and right tensile strength may be reduced, When the pellicle film is attached to the inside of the frame body, it is not preferable because concentrated stress is applied to the joining end surface joining portion, and gaps and backlash may occur at the joining end surface portion. Further, when the maximum lateral dimension t on the base side of the convex portion P is larger than 80% with respect to the width of the member, the convex portion P is crushed and bulged outward when fitted from above and below, so that the frame The inner and outer surfaces of the body may rise, which is not preferable. Furthermore, when the maximum lateral dimension v on the tip side of the convex portion P is smaller than 10% with respect to the width of the member, the catching portion (fitting portion) is weakly caught and the left and right tensile strength may be lowered. In addition, when the pellicle film is attached to the inside of the frame body, concentrated stress is applied to the joining end surface joining portion, and there is a possibility that a gap or play may occur at the joining end surface portion. Further, when the maximum lateral dimension v on the front end side of the convex portion P is larger than 90% with respect to the width of the member, the convex portion P is crushed and bulges outward when fitted from above and below. The inner and outer surfaces of the body may rise, which is not preferable.

また、凸部Pの根元側の最大横寸法ｔは、凸部Pが設けられる部材（分割枠体）の厚さに対して５％〜８０％の長さに設定されることが好ましい。また、凸部Pの先端側の最大横寸法ｖは、凸部Pが設けられる部材（分割枠体）の厚さに対して１０％〜９０％の長さに設定されるのが好ましい。さらに、凸部Pの根元側の最大横寸法ｔは部材の厚さに対して７％〜６０％の長さに設定されるのがより好ましく、１０％〜４０％の長さに設定されるのがさらに好ましい。凸部Pの先端側の最大横寸法ｖは、部材の厚さに対して１５％〜７５％の長さに設定されるのがより好ましく、２０％〜５０％の長さに設定されるのがさらに好ましい。なお、上記のそれぞれの最大横寸法は、接合部の厚さに対して複数個あった場合は、各々の最大接合距離の総和を示している。   Moreover, it is preferable that the maximum horizontal dimension t on the base side of the convex portion P is set to a length of 5% to 80% with respect to the thickness of the member (divided frame body) on which the convex portion P is provided. Moreover, it is preferable that the maximum lateral dimension v on the tip side of the convex portion P is set to a length of 10% to 90% with respect to the thickness of the member (divided frame body) on which the convex portion P is provided. Furthermore, the maximum lateral dimension t on the base side of the convex portion P is more preferably set to a length of 7% to 60% with respect to the thickness of the member, and is set to a length of 10% to 40%. Is more preferable. The maximum lateral dimension v on the tip side of the convex portion P is more preferably set to a length of 15% to 75% with respect to the thickness of the member, and is set to a length of 20% to 50%. Is more preferable. In addition, each said maximum horizontal dimension has shown the sum total of each maximum joining distance, when there exist two or more with respect to the thickness of a junction part.

凸部Pの根元側の最大横寸法ｔが部材の厚さに対して５％より小さい場合は、ペリクル膜の膜張力による内側への撓みの際に、接合部が弛みやすくなる可能性があるため好ましくない。また、凸部Pの根元側の最大横寸法ｔが部材の厚さに対して８０％より大きい場合は、左右からの嵌合時に、凸部Pが押しつぶされて外方向に膨出するため、枠体の上下側面が盛り上がる可能性があり好ましくない。さらに、凸部Pの先端側の最大横寸法ｖが部材の厚さに対して１０％より小さい場合は、ペリクル膜の膜張力による内側への撓みの際に、接合部が弛みやすくなる可能性があるため好ましくない。また、凸部Pの先端側の最大横寸法ｖが部材の厚さに対して９０％より大きい場合は、左右からの嵌合時に、凸部Pが押しつぶされて外方向に膨出するため、枠体の上下側面が盛り上がる可能性があり好ましくない。上下側面が盛り上がる場合は、枠体の平坦性が悪くなり貼りつけ精度が悪くなる可能性もあるため好ましくない。   When the maximum lateral dimension t on the base side of the convex portion P is smaller than 5% with respect to the thickness of the member, there is a possibility that the joint portion is easily loosened when the pellicle membrane is bent inward due to the film tension. Therefore, it is not preferable. Further, when the maximum lateral dimension t on the root side of the convex portion P is larger than 80% with respect to the thickness of the member, the convex portion P is crushed and bulges outward when fitting from the left and right. The upper and lower side surfaces of the frame body may rise, which is not preferable. Further, when the maximum lateral dimension v on the tip side of the convex portion P is smaller than 10% with respect to the thickness of the member, there is a possibility that the joint portion is likely to be loosened when the pellicle membrane is bent inward due to the film tension. This is not preferable. Further, when the maximum lateral dimension v on the tip side of the convex portion P is larger than 90% with respect to the thickness of the member, the convex portion P is crushed and bulges outward when fitting from the left and right. The upper and lower side surfaces of the frame body may rise, which is not preferable. When the upper and lower side surfaces rise, it is not preferable because the flatness of the frame body is deteriorated and the attaching accuracy may be deteriorated.

凸部Pの形状としては、丸形のピアス形状、楔形状、角形状、三角形状、その他種々の形状（ジグゾーパズルで採用されているような形状等）を採用することができる。凸部Pの個数は、部材（分割枠体）の幅や厚さに対して１個から複数個存在してもよい。１個の場合は、枠体の内側への撓みに対して接合部端面からの始端部に応力が集中的にかかるため、接合部端面にガタや隙間が空く可能性もある。そのため、カシメや接着剤等で補助的に接合部端面を別な接合方法で接合しても良い。ペリクル枠体は幅や厚さがさほど大きくないため、１個〜４個がより好ましく、１個〜２個が更に好ましい。   As the shape of the convex portion P, a round pierced shape, a wedge shape, a square shape, a triangular shape, and other various shapes (such as shapes used in a jigsaw puzzle) can be adopted. The number of the convex portions P may be one to a plurality with respect to the width and thickness of the member (divided frame body). In the case of one piece, stress is concentrated on the starting end portion from the joint end face with respect to the inward bending of the frame body, so there is a possibility that a gap or a gap is left on the joint end face. For this reason, the end surface of the joint portion may be joined by another joining method in an auxiliary manner with caulking, an adhesive, or the like. Since the width and thickness of the pellicle frame are not so large, one to four is more preferable, and one to two is more preferable.

なお、図８（ｃ）に示すような特殊な形状の凸部Pを採用した場合には、凸部Pの根元側部分の最大横寸法ｔを、凸部Pの先端側部分の最大横寸法ｖと同程度の長さに設定することもできる。   In addition, when the convex part P of special shape as shown in FIG.8 (c) is employ | adopted, the largest horizontal dimension t of the root side part of the convex part P is set to the largest horizontal dimension of the front end side part of the convex part P. FIG. It can also be set to the same length as v.

また、本実施形態に係るペリクル用枠体において、接合される一方の部材の端部に設けられる凸部Pは、図６（ｂ）に示すように、接合される他方の部材の端部に設けられる凹部Cとの嵌合時に凹部Cの内周面によって内方に圧縮変形させられる余剰外周部分（以下、「接合ギャップ」という）Gを有している。接合ギャップGの寸法は、０．１ｍｍ以下であることが好ましい。接合するときに、上下又は左右から嵌め合いを行うが、この接合ギャップGが嵌め合い時に潰れて外方向に膨出されるために密接に接合が可能になる。接合ギャップGの寸法が０．１ｍｍより大きいと潰れる部分が大きくなり枠体の上下左右方向に盛り上がりがおこるため好ましくない。この接合ギャップGをもつことで、接着剤等が不要になり嵌め合いを行うだけで強固に接合が可能になる。接合ギャップGの寸法は、０．００５ｍｍ〜０．０６ｍｍとされるのが好ましく、０．０１ｍｍ〜０．０４ｍｍとされるのがさらに好ましい。   Further, in the pellicle frame according to the present embodiment, the protrusion P provided at the end of one member to be joined is formed at the end of the other member to be joined as shown in FIG. It has an excess outer peripheral portion (hereinafter referred to as “joining gap”) G that is compressed and deformed inward by the inner peripheral surface of the concave portion C when fitted with the provided concave portion C. The dimension of the bonding gap G is preferably 0.1 mm or less. When joining, fitting is performed from the top and bottom or from the left and right. Since this joining gap G is crushed and swelled outward when fitting, close joining is possible. If the size of the joint gap G is larger than 0.1 mm, the portion to be crushed becomes large and the frame body rises in the vertical and horizontal directions, which is not preferable. By having this bonding gap G, an adhesive or the like is not required, and it is possible to perform strong bonding simply by fitting. The dimension of the bonding gap G is preferably 0.005 mm to 0.06 mm, and more preferably 0.01 mm to 0.04 mm.

本発明は、上述の実施形態に限定されるものではない。例えば、上記実施形態では、各分割枠体の形状をある程度揃えているが、各分割枠体の形状が夫々相違していても差し支えない。   The present invention is not limited to the embodiment described above. For example, in the above embodiment, the shapes of the divided frame bodies are aligned to some extent, but the shapes of the divided frame bodies may be different from each other.

次に、実施例及び比較例を挙げて本実施形態をより具体的に説明するが、本実施形態はその要旨を超えない限り、下記の実施例に限定されるものではない。   Next, the present embodiment will be described more specifically with reference to examples and comparative examples. However, the present embodiment is not limited to the following examples as long as the gist thereof is not exceeded.

［実施例１］
大型ペリクル用枠体の材質（全ての分割枠体の材質）はアルミニウム合金、厚さを４．０ｍｍとし、長辺は、幅が６．０ｍｍ、長さが４３０ｍｍとした。また、短辺は、幅が６．０ｍｍ、長さが３００ｍｍで、短辺側全長に渡って溝が設けられており、溝の深さは２ｍｍ、溝の高さは１．５ｍｍであった。また、角部は曲率がＲ＝２ｍｍであった。その他は、図２のとおりに大型ペリクル用枠体を形成した。分割枠体２１ａ，２１ｂの長さは３７０ｍｍであり、分割枠体２１ｃ，２１ｄの長さは２４０ｍｍであった。接合部は、図６のように一方の部材の端部に丸形の凸部が１個設けられている形状とした。凸部の根元側の最大横寸法は１．６ｍｍの長さに設定され、凸部の先端側の最大横寸法は３．０ｍｍに設定され、接合ギャップの寸法を０．０３ｍｍに設定して、接着剤は使用せずに上下方向から嵌め合いを行った。目視検査をした結果、外観上は問題がなかった。 [Example 1]
The material of the large pellicle frame (the material of all the divided frames) was an aluminum alloy, the thickness was 4.0 mm, and the long sides were 6.0 mm wide and 430 mm long. The short side had a width of 6.0 mm and a length of 300 mm, and was provided with a groove over the entire length of the short side. The groove depth was 2 mm and the groove height was 1.5 mm. . Further, the curvature of the corner portion was R = 2 mm. Otherwise, a large pellicle frame was formed as shown in FIG. The length of the divided frames 21a and 21b was 370 mm, and the length of the divided frames 21c and 21d was 240 mm. The joining part was made into the shape by which one round convex part was provided in the edge part of one member like FIG. The maximum horizontal dimension on the root side of the convex part is set to a length of 1.6 mm, the maximum horizontal dimension on the tip side of the convex part is set to 3.0 mm, the dimension of the joint gap is set to 0.03 mm, The adhesive was fitted from above and below without using an adhesive. As a result of visual inspection, there was no problem in appearance.

（寸法安定測定）
上記の枠体の外形寸法測定を行い、ホットプレート上で１４０℃、１０分間加熱処理を行った後、長辺中央部の外形寸法測定を行いその変形量を測定した。外形寸法測定は、ミツトヨ ＦＡＬ―１６００シリーズで測定した。その結果を表１に記載した。 (Dimensional stability measurement)
After measuring the external dimensions of the above frame body and performing a heat treatment at 140 ° C. for 10 minutes on a hot plate, the external dimensions of the central part of the long side were measured to determine the amount of deformation. External dimensions were measured with Mitutoyo FAL-1600 series. The results are shown in Table 1.

（接合強度テスト）
次に、接合強度テストを行った。上記と同様の接合形状部を含む１００ｍｍの棒状部材のサンプルを作製した。接合部は１００ｍｍの棒状部材の半分の５０ｍｍの位置とした。幅方向を上面に向けて、接合部から１０ｍｍあけてチャッキングを行い（チャッキングは、接合部から１０ｍｍ〜３０ｍｍの範囲）、チャッキングした反対側を接合部から１０ｍｍの箇所に力を加えて測定した。測定装置は、イマダのデジタルフォースゲージを使用した。結果を表１に記載した。 (Joint strength test)
Next, a bonding strength test was performed. A sample of a 100 mm rod-shaped member including the same joint shape portion as described above was produced. The joining portion was at a position of 50 mm, which is half of a 100 mm rod-shaped member. Chucking is performed 10mm from the joint with the width direction facing the upper surface (chucking is in the range of 10mm to 30mm from the joint), and the opposite side of chucking is applied to a location 10mm from the joint It was measured. The measuring device was an Imada digital force gauge. The results are shown in Table 1.

次に、この大型ペリクル用枠体に対し、粘着剤としてスチレンエチレンブチレンスチレン系のホットメルト粘着剤、厚さ１．４ｍｍをペリクル枠体の各辺に沿って塗布した。 別途、基板上にセルロースエステルのペリクル膜をスピンコート法により成膜し、その膜を仮枠に接着させ、その後基板から剥離させた。この仮枠は、アルミニウム製のものを使用した。その後、前記ホットメルト粘着材を塗布した大型ペリクル用枠体に、ホットメルト粘着剤が塗布されていない反対側の面に、アクリル系の膜接着剤を塗布し、仮枠のペリクル膜を接着させ硬化し、余剰膜を切断してペリクルを作製し、目視により外観を検査し、問題のないことを確認した。切断後、枠体が内側に撓むため、形状が安定した後、接合部の接合面を目視により確認した。その結果は表１の通りである。   Next, a styrene ethylene butylene styrene-based hot melt adhesive having a thickness of 1.4 mm was applied as an adhesive along each side of the pellicle frame to the large pellicle frame. Separately, a pellicle film of cellulose ester was formed on a substrate by spin coating, and the film was adhered to a temporary frame and then peeled off from the substrate. This temporary frame was made of aluminum. Thereafter, an acrylic film adhesive is applied to the opposite side of the large pellicle frame coated with the hot melt pressure-sensitive adhesive to which the hot-melt pressure-sensitive adhesive is not coated, and the pellicle film of the temporary frame is adhered. It hardened | cured, the excess film | membrane was cut | disconnected, the pellicle was produced, and the external appearance was test | inspected visually, and it confirmed that there was no problem. Since the frame body was bent inward after cutting, the joint surface of the joint portion was visually confirmed after the shape was stabilized. The results are shown in Table 1.

［実施例２］
長辺の幅が９．０ｍｍ、長さが８００ｍｍ、短辺の幅が７．０ｍｍ、長さが４８０ｍｍ、角部の曲率がＲ＝０ｍｍとなるように設定した。それ以外の溝の長さ深さ、枠体の厚さは実施例１と同様にした。今回は、図４のような分割枠体にし、４１ｃ、４１ｄが４８０ｍｍ、４１ａ、４１ｂが７９０ｍｍとした。接合部は、図７（ａ）のように一方の部材の端部に丸形の凸部が２個設けられている形状とした。凸部の根元側の最大横寸法は１．５ｍｍの長さに設定され、凸部の先端側の最大横寸法は２．０ｍｍに設定され、接合ギャップの寸法を０．０２ｍｍに設定して、接着剤は使用せずに上下方向から嵌め合いを行った。目視検査を行った結果、外観上は問題がなかった。その後、ホットメルト粘着材の厚さを２．０ｍｍにした以外は実施例１と同様にペリクルを作製し、同じように評価を行った。その結果を表１に記載する。 [Example 2]
The width of the long side was set to 9.0 mm, the length was set to 800 mm, the width of the short side was set to 7.0 mm, the length was set to 480 mm, and the curvature of the corner portion was set to R = 0 mm. The length of the other grooves and the thickness of the frame were the same as in Example 1. In this example, the divided frames as shown in FIG. 4 were used, 41c and 41d were 480 mm, and 41a and 41b were 790 mm. As shown in FIG. 7A, the joint portion has a shape in which two round convex portions are provided at the end of one member. The maximum lateral dimension on the root side of the convex part is set to a length of 1.5 mm, the maximum lateral dimension on the tip side of the convex part is set to 2.0 mm, and the dimension of the joint gap is set to 0.02 mm, The adhesive was fitted from above and below without using an adhesive. As a result of visual inspection, there was no problem in appearance. Thereafter, a pellicle was prepared in the same manner as in Example 1 except that the thickness of the hot-melt adhesive material was 2.0 mm, and evaluation was performed in the same manner. The results are listed in Table 1.

［実施例３］
長辺の幅が２１．０ｍｍ、長さが２０００ｍｍ、短辺の幅が１９．５ｍｍ、長さが１８００ｍｍ、角部の曲率がＲ＝０ｍｍとなるように設定し、枠体の厚さを６．０ｍｍとした。それ以外の溝の長さ深さは実施例１と同様にした。今回は、図５のような分割枠体にし、５１ｃ、５１ｃ´、５１ｄ、５１ｄ´を各々９００ｍｍとし、５１ａ、５１ａ´、５１ｂ、５１ｂ´を各々９８２ｍｍとした。接合部は、図８（ａ）のように台形形状の凸部が３個設けられている形状とした。凸部の根元側の最大横寸法は２．１ｍｍの長さに設定され、凸部の先端側の最大横寸法は４．２ｍｍに設定され、接合ギャップの寸法を０．０１５ｍｍに設定して、接着剤は使用せずに上下方向から嵌め合いを行った。目視検査を行った結果、外観上は問題がなかった。その後、ホットメルト粘着材の厚さを２．０ｍｍにした以外は実施例１と同様にペリクルを作製し、同じように評価を行った。その結果を表１に記載する。 [Example 3]
The long side width is 21.0 mm, the length is 2000 mm, the short side width is 19.5 mm, the length is 1800 mm, and the corner curvature is R = 0 mm. 0.0 mm. The length and depth of the other grooves were the same as in Example 1. In this example, the divided frames as shown in FIG. 5 were used, 51c, 51c ′, 51d, and 51d ′ were each 900 mm, and 51a, 51a ′, 51b, and 51b ′ were 982 mm each. The joining part was made into the shape by which three trapezoid-shaped convex parts were provided like Fig.8 (a). The maximum lateral dimension on the root side of the convex part is set to a length of 2.1 mm, the maximum lateral dimension on the tip side of the convex part is set to 4.2 mm, the dimension of the joint gap is set to 0.015 mm, The adhesive was fitted from above and below without using an adhesive. As a result of visual inspection, there was no problem in appearance. Thereafter, a pellicle was prepared in the same manner as in Example 1 except that the thickness of the hot-melt adhesive material was 2.0 mm, and evaluation was performed in the same manner. The results are listed in Table 1.

［比較例１］
接合部の無い、一枚の母材からの切り出し枠体を用意した。長辺の幅は９．０ｍｍ、長さは８００ｍｍ、短辺の幅は７．０ｍｍ、長さは４８０ｍｍとした。材質はアルミニウム合金、厚さを４．０ｍｍの大型ペリクル用枠体を用いた。短辺側全長に渡って溝が設けられており、溝の深さは２ｍｍ、溝の高さは１．５ｍｍであった。また、角部は曲率がＲ＝２ｍｍであった。それ以外は、実施例１と同様にペリクルを作製し、評価を同様に行った。その結果を表１に記載する。但し、接合部がないので接合強度テストは行っていない。 [Comparative Example 1]
A cut frame from a single base material without a joint was prepared. The long side width was 9.0 mm, the length was 800 mm, the short side width was 7.0 mm, and the length was 480 mm. The material was an aluminum alloy, and a large pellicle frame having a thickness of 4.0 mm was used. Grooves were provided over the entire length of the short side, the groove depth was 2 mm, and the groove height was 1.5 mm. Further, the curvature of the corner portion was R = 2 mm. Other than that, a pellicle was produced in the same manner as in Example 1 and evaluated in the same manner. The results are listed in Table 1. However, since there are no joints, no joint strength test was performed.

［比較例２］
接合部の形状を図９のような形状として、２液性の常温硬化型ウレタン接着剤を用いて接合した以外は、実施例１と同様にして大型ペリクル用枠体を作製した後、実施例１と同様にペリクルを作製し、評価を同様に行った。その結果を表１に記載する。大型ペリクル用枠体を作製後、目視検査を行ったところ、接着剤のダレが発生し、外観上も接着剤のダレによるシミ等が見受けられた。 [Comparative Example 2]
After the large pellicle frame was prepared in the same manner as in Example 1 except that the shape of the joint was as shown in FIG. 9 and was joined using a two-component room temperature curing urethane adhesive, Example A pellicle was prepared in the same manner as in No. 1 and evaluated in the same manner. The results are listed in Table 1. When a large pellicle frame was produced and then visually inspected, adhesive sagging occurred, and an appearance of the adhesive due to sagging adhesive was observed.

［参考例１］
接合部は、図１０のように一方の部材の端部に正三角形状の凸部が２個設けられている形状とした。凸部の根元側の最大横寸法は２．０ｍｍの長さに設定され、接合ギャップの寸法は０ｍｍに設定され、レーザー溶接で接合して大型ペリクル用枠体を作製した後、実施例１と同様にペリクルを作製し、評価を同様に行った。その結果を表１に記載する。大型ペリクル用枠体の作製後、目視検査を行ったところ、接合部に溶接の後の凹凸が発生し、外観としてはよくないものであった。また、ペリクル作製後の外観も、凹凸部分がキラキラ光って異物に見えて、検査性も良くないものとなった。 [Reference Example 1]
As shown in FIG. 10, the joining portion has a shape in which two regular triangular convex portions are provided at the end of one member. The maximum horizontal dimension on the base side of the convex part is set to a length of 2.0 mm, the dimension of the joint gap is set to 0 mm, and a large pellicle frame is manufactured by joining by laser welding. Similarly, a pellicle was prepared and evaluated in the same manner. The results are listed in Table 1. When a visual inspection was carried out after the production of the large pellicle frame, unevenness after welding occurred at the joint, and the appearance was not good. In addition, the appearance after the pellicle was produced also showed that the uneven portion was shining and looked as a foreign object, and the inspection property was not good.

［参考例２］
接合部は、図１１のように一方の部材の端部に台形形状の凸部が３個設けられている形状とした。凸部の根元側の最大横寸法は４．２ｍｍの長さに設定され、凸部の先端側の最大横寸法は２．１ｍｍの長さに設定され、接合ギャップの寸法は０ｍｍに設定され、焼きバメを用いて接合して大型ペリクル用枠体を作製した。その後は、実施例３と同様にペリクルを作製し、評価を同様に行った。その結果を表１に記載する。大型ペリクル用枠体の作製後、目視検査を行ったところ、外観は良好であったが、接合強度が弱いため、ペリクル作製後の目視検査にて、隙間やガタが見受けられ、そこに異物が挟まっていた。また、形状が矩形状ではなくなっていた。 [Reference Example 2]
The joining part was made into the shape by which three trapezoid-shaped convex parts were provided in the edge part of one member like FIG. The maximum horizontal dimension on the base side of the convex part is set to a length of 4.2 mm, the maximum horizontal dimension on the tip side of the convex part is set to a length of 2.1 mm, and the dimension of the joint gap is set to 0 mm, A frame for a large pellicle was produced by bonding using a shrinking swivel. Thereafter, a pellicle was produced in the same manner as in Example 3 and evaluated in the same manner. The results are listed in Table 1. When the visual inspection was performed after manufacturing the large pellicle frame, the appearance was good, but because the bonding strength was weak, gaps and backlash were observed in the visual inspection after the pellicle was manufactured, and there was foreign matter there. It was caught. Moreover, the shape was not rectangular.

Figure 0005653690
Figure 0005653690

本発明は、分割枠体を用いたペリクル枠体であって、大型ペリクルの分野で利用できる。   The present invention is a pellicle frame using a divided frame and can be used in the field of large pellicles.

１…ペリクル、２…ペリクル用枠体、２ａ・２ｂ…長辺、２ｃ・２ｄ…短辺、３…ペリクル膜、４…開口部、４ａ・４ｂ…長辺、４ｃ・４ｄ…短辺、５…角部、５ａ・５ｂ…長辺、５ｃ・５ｄ…短辺、２１ａ・２１ｂ…分割枠体（長辺用部材）、２１ｃ・２１ｄ…分割枠体（短辺用部材）、２１ｅ・２１ｆ・２１ｇ・２１ｈ…分割枠体（角部用部材）、４１ａ・４１ｂ…分割枠体（長辺用部材）、４１ｃ・４１ｄ…分割枠体（短辺用部材）、４１ａ・４１ｂ…分割枠体（長辺用部材）、４１ｃ・４１ｄ…分割枠体（短辺用部材）、Ｃ…凹部、Ｇ…接合ギャップ（余剰外周部分）、Ｐ…凸部。   DESCRIPTION OF SYMBOLS 1 ... Pellicle, 2 ... Pellicle frame body, 2a * 2b ... Long side, 2c * 2d ... Short side, 3 ... Pellicle film, 4 ... Opening part, 4a * 4b ... Long side, 4c * 4d ... Short side, 5 ... corner, 5a · 5b ... long side, 5c · 5d ... short side, 21a · 21b ... split frame (long side member), 21c · 21d ... split frame (short side member), 21e · 21f · 21g / 21h: Divided frame (member for corner), 41a / 41b ... Divided frame (long side member), 41c / 41d ... Divided frame (short side member), 41a / 41b ... Divided frame ( Long side members), 41c and 41d, divided frame bodies (short side members), C, concave portions, G, bonding gaps (excess outer peripheral portions), P, convex portions.

Claims (8)

平面視矩形状の開口部を備えるペリクル用枠体であって、
端部同士が接合されることにより前記開口部の周縁を形成する部材を有し、
接合される一方の部材の端部には、接合される他方の部材に向けて突出する少なくとも一つの凸部が設けられ、
前記他方の部材の端部には、前記凸部を嵌合させる凹部が設けられ、
前記凸部を前記凹部に嵌合させることにより前記一方の部材の端部が前記他方の部材の端部に接合され、
前記凸部は、根元側の最大横寸法（ｔ）が先端側の最大横寸法（ｖ）よりも短くなるように形成される、ペリクル用枠体。 A pellicle frame having an opening having a rectangular shape in plan view,
Having a member that forms the periphery of the opening by joining the ends together,
The end of one member to be joined is provided with at least one convex portion protruding toward the other member to be joined,
A concave portion for fitting the convex portion is provided at the end of the other member,
The end of the one member is joined to the end of the other member by fitting the convex portion into the concave portion ,
The convex portion, the root side maximum transverse dimension (t) is Ru is formed to be shorter than the maximum transverse dimension of the distal (v), pellicle frame of. 前記凸部の根元側の最大横寸法（ｔ）は、前記凸部が設けられる部材の幅に対して５％〜８０％の長さに設定される、請求項１に記載のペリクル用枠体。 Maximum transverse dimension of the base side of the protrusion (t), the convex portion is set to a width of 5% to 80% of the length with respect to the member to be provided, pellicle frame according to claim 1 . 前記凸部の先端側の最大横寸法（ｖ）は、前記凸部が設けられる部材の幅に対して１０％〜９０％の長さに設定される、請求項１又は２に記載のペリクル用枠体。 Maximum lateral dimension of the distal end side of the convex portion (v), the convex portion is set to a width between 10% and 90% of the length with respect to the member to be provided, for pellicle according to claim 1 or 2 Frame. 前記凸部の根元側の最大横寸法（ｔ）は、前記凸部が設けられる部材の厚さに対して５％〜８０％の長さに設定される、請求項１から３の何れか一項に記載のペリクル用枠体。 Maximum transverse dimension of the base side of the protrusion (t), the convex portion is set to 5% to 80% of the length to the thickness of the member provided, any one of claims 1 to 3 one A frame for a pellicle according to Item. 前記凸部の先端側の最大横寸法（ｖ）は、前記凸部が設けられる部材の厚さに対して１０％〜９０％の長さに設定される、請求項１から４の何れか一項に記載のペリクル用枠体。 Maximum lateral dimension of the distal end side of the convex portion (v), the convex portion is set to 10% to 90% of the length to the thickness of the member provided, any one of claims 1 to 4 one A frame for a pellicle according to Item. 前記凸部は、前記凹部との嵌合時に前記凹部の内周面によって内方に圧縮変形させられる余剰外周部分を有する、請求項１から５の何れか一項に記載のペリクル用枠体。 The pellicle frame according to any one of claims 1 to 5 , wherein the convex portion has an excessive outer peripheral portion that is compressed and deformed inward by an inner peripheral surface of the concave portion when fitted with the concave portion. 前記余剰外周部分の寸法は、０．００５ｍｍ以上０．１ｍｍ以下に設定される、請求項６に記載のペリクル用枠体。 The pellicle frame according to claim 6 , wherein a dimension of the excess outer peripheral portion is set to 0.005 mm or more and 0.1 mm or less. 請求項１から７の何れか一項に記載のペリクル用枠体と、
前記ペリクル用枠体の前記開口部を覆うように展張支持されたペリクル膜と、
を備える、ペリクル。 A frame for a pellicle according to any one of claims 1 to 7 ,
A pellicle film that is stretched and supported so as to cover the opening of the pellicle frame;
A pellicle.
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