JP5640874B2 - Magnetic sensor - Google Patents

Magnetic sensor Download PDF

Info

Publication number
JP5640874B2
JP5640874B2 JP2011085665A JP2011085665A JP5640874B2 JP 5640874 B2 JP5640874 B2 JP 5640874B2 JP 2011085665 A JP2011085665 A JP 2011085665A JP 2011085665 A JP2011085665 A JP 2011085665A JP 5640874 B2 JP5640874 B2 JP 5640874B2
Authority
JP
Japan
Prior art keywords
magnetic sensor
sensor element
biaxial
magnetic
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011085665A
Other languages
Japanese (ja)
Other versions
JP2012220321A (en
Inventor
健二 飯島
健二 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2011085665A priority Critical patent/JP5640874B2/en
Publication of JP2012220321A publication Critical patent/JP2012220321A/en
Application granted granted Critical
Publication of JP5640874B2 publication Critical patent/JP5640874B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Magnetic Variables (AREA)

Description

本発明は、外部磁界を測定できるフラックスゲート型の磁気センサに関し、特に、直交するＸ軸、Ｙ軸、Ｚ軸の３軸方向の磁界を測定できるループ状コア型の三軸磁気センサに関する。   The present invention relates to a fluxgate type magnetic sensor capable of measuring an external magnetic field, and more particularly to a loop core type three-axis magnetic sensor capable of measuring magnetic fields in three axial directions of orthogonal X, Y, and Z axes.

フラックスゲート型磁気センサは、軟磁性材料からなるコアの飽和磁束密度の対称性を利用して磁束密度を計測するものとして知られている（例えば特許文献１、特許文献２参照）。
このような従来のフラックスゲート型磁気センサは、コアを励磁する励磁コイルと、コアに誘起する磁束密度の変化を検出する検出コイルとを備え、励磁コイルへ駆動電圧を印加することにより、コアを飽和磁束密度に達する領域まで磁束を励磁し、コアに誘起する磁束密度の変化を検出コイルから検出する。 A fluxgate type magnetic sensor is known as one that measures the magnetic flux density using the symmetry of the saturation magnetic flux density of a core made of a soft magnetic material (see, for example, Patent Document 1 and Patent Document 2).
Such a conventional fluxgate type magnetic sensor includes an excitation coil that excites the core and a detection coil that detects a change in magnetic flux density induced in the core. By applying a drive voltage to the excitation coil, the core is detected. A magnetic flux is excited to a region reaching the saturation magnetic flux density, and a change in magnetic flux density induced in the core is detected from the detection coil.

すなわち、コアに励磁磁界以外の外部磁界が印加されていない状態では、誘起する磁束密度は対称である。一方、コアに外部磁界が印加されると、励磁磁界に外部磁界が加算されるため、コアに加わる磁界に偏りが生じて磁束密度が非対称となる。この磁束密度を検出コイルで検出することにより外部磁界を計測するようにしている。   That is, in the state where an external magnetic field other than the excitation magnetic field is not applied to the core, the induced magnetic flux density is symmetric. On the other hand, when an external magnetic field is applied to the core, the external magnetic field is added to the excitation magnetic field, so that the magnetic field applied to the core is biased and the magnetic flux density becomes asymmetric. An external magnetic field is measured by detecting this magnetic flux density with a detection coil.

水平な面内で直交するＸ軸、Ｙ軸と、この水平面に垂直なＺ軸の３つの方向の検出コイルを有するフラックスゲート型三軸磁気センサとして、例えば図８に示すような、コアを棒状にした磁気センサと、図９，１０に示すような、コアを閉磁路形のループ状とした磁気センサとが知られている。   As a fluxgate type triaxial magnetic sensor having a detection coil in three directions of an X axis and a Y axis perpendicular to each other in a horizontal plane and a Z axis perpendicular to the horizontal plane, the core is formed in a rod shape as shown in FIG. There are known a magnetic sensor and a magnetic sensor whose core is a closed magnetic circuit loop as shown in FIGS.

図８の棒状コア型三軸磁気センサは、立方体のケース１０に、励磁コイル並びに検出コイル（図面では省略されている）を巻回した２本一組の棒状コア１１，１２，１３をＸ，Ｙ，Ｚ方向に組み込んで構成されている。   The rod-shaped core type three-axis magnetic sensor of FIG. 8 includes a pair of rod-shaped cores 11, 12, 13 in which an exciting coil and a detection coil (omitted in the drawing) are wound around a cubic case 10. It is built in the Y and Z directions.

図９のループ状コア型三軸磁気センサは、励磁コイル（図示省略）を全周に巻回したループ状コア１４を方形状のケース１５に収納し、このケース１５の周面に検出コイル１６を一方向に巻回して構成した３つの一軸磁気センサ素子１７を、それぞれの検出コイルの巻回軸芯がＸ，Ｙ，Ｚ方向に向くように配置して構成されている。
また、図１０に示すループ状コア型三軸磁気センサは、上記図８で示した一軸磁気センサ素子１７と、ループ状コア１４を内蔵するケース１５の周面に互いに交差する２軸方向の検出コイル１８，１９を巻回した二軸磁気センサ素子２０とを形成し、それぞれの検出コイルの巻回軸芯がＸ，Ｙ，Ｚ方向に向くように配置してある。 The loop-shaped core type three-axis magnetic sensor of FIG. 9 houses a loop-shaped core 14 in which an exciting coil (not shown) is wound around the entire circumference in a rectangular case 15, and a detection coil 16 on the circumferential surface of the case 15. The three uniaxial magnetic sensor elements 17 configured by winding in one direction are arranged so that the winding axis of each detection coil faces in the X, Y, and Z directions.
Further, the loop-shaped core type triaxial magnetic sensor shown in FIG. 10 is detected in the biaxial direction intersecting with the peripheral surface of the case 15 containing the uniaxial magnetic sensor element 17 and the loop-shaped core 14 shown in FIG. A biaxial magnetic sensor element 20 around which the coils 18 and 19 are wound is formed, and the winding cores of the respective detection coils are arranged in the X, Y, and Z directions.

特開平１１−２３６８３号公報Japanese Patent Laid-Open No. 11-23683 特表２００９−５３５６１６号公報Special table 2009-535616 gazette

磁気センサによる外部磁界の検出感度を高くするには、励磁コイルを巻回するコアの磁路を長くすることが一つの条件となる。しかし、棒状コアでは、長い磁路を得るためにその全長を長くすると磁気センサ全体が大型化するため、小型化が要求される磁気センサでは検出感度の向上に限界があった。   In order to increase the detection sensitivity of the external magnetic field by the magnetic sensor, one condition is to lengthen the magnetic path of the core around which the exciting coil is wound. However, in the case of a rod-shaped core, if the entire length of the rod-shaped core is increased in order to obtain a long magnetic path, the entire magnetic sensor increases in size. Therefore, there is a limit to improvement in detection sensitivity in a magnetic sensor that is required to be downsized.

これに対し、ループ状コアでは、コアを閉磁路状のループとし、かつ、その全周に励磁コイルを巻回することができるために、棒状コアに比較して小型で高感度の磁気センサを形成することができる。
しかし、図示したループ状コア型三軸磁気センサでは、それぞれの一軸磁気センサ素子もしくは二軸磁気センサ素子が高感度であっても、各一軸磁気センサ素子、もしくは一軸磁気センサ素子と二軸磁気センサ素子の検出軸の中心点が離れているので、各磁気センサ素子における外部磁界の計測ポイントが一致せず、結果として高精度で感度の高い磁気センサが得られない、といった問題点があった。 On the other hand, in the loop-shaped core, since the core is a closed magnetic circuit-shaped loop and an excitation coil can be wound around the entire circumference of the loop-shaped core, a magnetic sensor having a small size and high sensitivity compared to the rod-shaped core can be obtained. Can be formed.
However, in the illustrated loop core type triaxial magnetic sensor, each uniaxial magnetic sensor element, or uniaxial magnetic sensor element and biaxial magnetic sensor, even if each uniaxial magnetic sensor element or biaxial magnetic sensor element is highly sensitive. Since the center points of the detection axes of the elements are separated, the measurement points of the external magnetic field in each magnetic sensor element do not coincide with each other, and as a result, a highly accurate and highly sensitive magnetic sensor cannot be obtained.

そこで、本発明は、このような課題を解決し、精度のよい高感度の三軸磁気センサをコンパクトな構成で提供することを目的とする。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve such problems and provide a highly sensitive and highly sensitive three-axis magnetic sensor with a compact configuration.

上記目的を達成するために本発明では次のような技術的手段を講じた。すなわち、本発明の磁気センサは、二軸磁気センサ素子と一軸磁気センサ素子とからなり、二軸磁気センサ素子は、励磁コイルを巻回した磁性体製のリング状コアと、平面上で直交する２軸方向の磁界を検出する検出コイルを備え、一軸磁気センサ素子は、長円状の形態で形成され、励磁コイルを巻回した磁性体製のリング状コアと、このリング状コアを内蔵するケースとを備え、該ケースの外周面でリング状コアの軸芯に対して直交する面に１軸方向の磁界を検出する検出コイルが巻回されており、この一軸磁気センサ素子の検出コイルの巻回軸芯を二軸磁気センサ素子のリング状コアの軸芯と一致するように、一軸磁気センサ素子を二軸磁気センサ素子のリング状コアの中心部に配置させたことを特徴とするものである。 In order to achieve the above object, the present invention takes the following technical means. That is, the magnetic sensor of the present invention comprises a biaxial magnetic sensor element and a uniaxial magnetic sensor element, and the biaxial magnetic sensor element is orthogonal to the ring-shaped core made of a magnetic material around which an exciting coil is wound. A uniaxial magnetic sensor element having a detection coil for detecting a magnetic field in a biaxial direction is formed in an oval shape , and includes a ring-shaped core made of a magnetic material around which an excitation coil is wound, and this ring-shaped core is built in A detection coil for detecting a magnetic field in a uniaxial direction is wound on a surface orthogonal to the axial center of the ring-shaped core on the outer peripheral surface of the case, and the detection coil of the uniaxial magnetic sensor element is wound around the detection coil. The uniaxial magnetic sensor element is arranged at the center of the ring core of the biaxial magnetic sensor element so that the winding axis coincides with the axis of the ring core of the biaxial magnetic sensor element It is.

本発明によれば、一軸磁気センサ素子の検出コイルの巻回軸芯を二軸磁気センサ素子のリング状コアの軸芯と一致するように、一軸磁気センサ素子を二軸磁気センサ素子のリング状コアの中心部に配置させたので、各磁気センサ素子における３方向の検出コイルの計測中心を一致させることができ、これにより、計測される外部磁界の計測位置をピンポイントで正しく測定できて、高精度で感度の高い三軸磁気センサを得ることができる。   According to the present invention, the uniaxial magnetic sensor element is arranged in the ring shape of the biaxial magnetic sensor element so that the winding axis of the detection coil of the uniaxial magnetic sensor element coincides with the axial center of the ring shaped core of the biaxial magnetic sensor element. Since it is arranged at the center of the core, the measurement centers of the three-direction detection coils in each magnetic sensor element can be made to coincide with each other, so that the measurement position of the external magnetic field to be measured can be correctly measured at a pinpoint, A highly accurate and highly sensitive three-axis magnetic sensor can be obtained.

また、一軸磁気センサ素子のリング状コアを長円状の形態で形成しているので、真円状のコアに比べて磁路をより長く形成することができて、外部磁界のＺ軸方向の検出感度をさらに高めることができる。In addition, since the ring-shaped core of the uniaxial magnetic sensor element is formed in an oval shape, the magnetic path can be formed longer than the perfect circular core, and the external magnetic field in the Z-axis direction can be formed. The detection sensitivity can be further increased.

上記発明において、二軸磁気センサ素子の検出コイルは、四方に対応して４つに分断され、かつ、そのうちの対をなす二つの検出コイルどうしが互いに逆向きとなるように巻回され、平面上で直交する２軸方向の磁界を検出するような構成とするのがよい。In the above invention, the detection coil of the biaxial magnetic sensor element is divided into four corresponding to four directions, and two detection coils forming a pair of them are wound so that they are opposite to each other. It is preferable to adopt a configuration that detects magnetic fields in two axial directions orthogonal to each other.
これにより、一つのリング状コアで平面的に直交する２軸方向の磁界を高感度で検出することが可能な検出コイルを形成することができる。Thereby, the detection coil which can detect the magnetic field of the biaxial direction orthogonal to planarly by one ring-shaped core with high sensitivity can be formed.

本発明の磁気センサにおける二軸磁気センサ素子の説明図。Explanatory drawing of the biaxial magnetic sensor element in the magnetic sensor of this invention. 図１で示した二軸磁気センサ素子のコアを示す平面図。The top view which shows the core of the biaxial magnetic sensor element shown in FIG. 図１で示した二軸磁気センサ素子のコアを示す斜視図。The perspective view which shows the core of the biaxial magnetic sensor element shown in FIG. 本発明の磁気センサにおける二軸磁気センサ素子の別実施例を示す説明図。Explanatory drawing which shows another Example of the biaxial magnetic sensor element in the magnetic sensor of this invention. 本発明の磁気センサにおける一軸磁気センサ素子のコアを示す正面図。The front view which shows the core of the uniaxial magnetic sensor element in the magnetic sensor of this invention. 本発明の磁気センサの斜視図。The perspective view of the magnetic sensor of this invention. 本発明における一軸磁気センサの別の実施例を示す斜視図。The perspective view which shows another Example of the uniaxial magnetic sensor in this invention. 従来の棒状コア型三軸磁気センサの一例を示す斜視図。The perspective view which shows an example of the conventional rod-shaped core type | mold three-axis magnetic sensor. 従来のループ状コア型三軸磁気センサを示す斜視図。The perspective view which shows the conventional loop-shaped core type | mold triaxial magnetic sensor. 従来のループ状コア型三軸磁気センサの別の例を示す斜視図。The perspective view which shows another example of the conventional loop-shaped core type | mold three-axis magnetic sensor.

以下において、本発明にかかる磁気センサを、図１〜６に基づいて詳細に説明する。
本発明の磁気センサは、図１〜３で示す二軸磁気センサ素子Ａと、図５，６で示す一軸磁気センサ素子Ｂとから構成される。
二軸磁気センサ素子Ａは、磁性体からなるリング状コア１を備え、このコア１の全周面に励磁コイル２が巻回されており、さらに、コア周面には絶縁皮膜を介して検出コイル３が巻回されている。なお、図１では励磁コイル２の図示を省略した。 Below, the magnetic sensor concerning this invention is demonstrated in detail based on FIGS.
The magnetic sensor of the present invention includes a biaxial magnetic sensor element A shown in FIGS. 1 to 3 and a uniaxial magnetic sensor element B shown in FIGS.
The biaxial magnetic sensor element A includes a ring-shaped core 1 made of a magnetic material. An excitation coil 2 is wound around the entire peripheral surface of the core 1, and the core peripheral surface is detected via an insulating film. The coil 3 is wound. In FIG. 1, the excitation coil 2 is not shown.

検出コイル３は四方に４分断され、かつ、そのうちの対をなす二つの検出コイル３ａ，３ａ並びに３ｂ，３ｂどうしを互いに逆向きに巻回して接続することにより、一方の検出コイル３ａ，３ａをＸ軸用検出コイルとして、他方の検出コイル３ｂ，３ｂをＹ軸用検出コイルとして形成されている。   The detection coil 3 is divided into four in four directions, and two detection coils 3a, 3a and 3b, 3b, which form a pair, are wound in opposite directions to connect one detection coil 3a, 3a. As the X-axis detection coil, the other detection coils 3b and 3b are formed as a Y-axis detection coil.

一軸磁気センサ素子Ｂは、図５及び図６で示すように、励磁コイル５を全周に巻回した磁性体からなるリング状コア６と、このリング状コア６を内蔵するケース７とを備えている。本実施例では、リング状コア６は長円状の形態で形成されている。また、ケース７の外周面でリング状コア６の軸芯に対して直交する面に検出コイル８が巻回されている。
そして、この一軸磁気センサ素子Ｂの検出コイル８の巻回軸芯を二軸磁気センサ素子Ａのリング状コア１の軸芯に一致するように、一軸磁気センサ素子Ｂを二軸磁気センサ素子Ａの中心に配置することにより、一軸磁気センサ素子Ｂの検出コイル８がＺ軸用検出コイルとして形成されている。 As shown in FIGS. 5 and 6, the uniaxial magnetic sensor element B includes a ring-shaped core 6 made of a magnetic material in which the exciting coil 5 is wound around the entire circumference, and a case 7 in which the ring-shaped core 6 is built. ing. In the present embodiment, the ring-shaped core 6 is formed in an oval shape. Further, the detection coil 8 is wound around a surface orthogonal to the axis of the ring-shaped core 6 on the outer peripheral surface of the case 7.
Then, the uniaxial magnetic sensor element B is changed to the biaxial magnetic sensor element A so that the winding axis of the detection coil 8 of the uniaxial magnetic sensor element B coincides with the axial center of the ring-shaped core 1 of the biaxial magnetic sensor element A. The detection coil 8 of the uniaxial magnetic sensor element B is formed as a Z-axis detection coil.

以上の構成において、二軸磁気センサ素子Ａの励磁コイル２並びに、一軸磁気センサ素子Ｂの励磁コイル５に交流電流を流すと、二軸磁気センサ素子Ａでは、リング状コア１が励磁され、Ｘ軸用の検出コイル３ａ，３ａの内部、並びに、Ｙ軸用の検出コイル３ｂ，３ｂの内部に交流磁束が生じる。コア１に励磁磁界以外の外部磁界が印加されていない状態では、誘起する磁束密度も対称であるが、コアに外部磁界が印加されると、励磁磁界に外部磁界が加算されるため、コア１に加わる磁界に偏りが生じて磁束密度が非対称となる。この磁束密度の変化を検出コイル３ａ、３ａ並びに検出コイル３ｂ、３ｂで検出することにより、水平面上で互いに直交するＸ軸、Ｙ軸の２軸方向の外部磁界を検出することができる。   In the above configuration, when an alternating current is passed through the exciting coil 2 of the biaxial magnetic sensor element A and the exciting coil 5 of the uniaxial magnetic sensor element B, the ring-shaped core 1 is excited in the biaxial magnetic sensor element A, and X AC magnetic flux is generated in the detection coils 3a and 3a for the shaft and in the detection coils 3b and 3b for the Y-axis. In the state where an external magnetic field other than the excitation magnetic field is not applied to the core 1, the induced magnetic flux density is also symmetric. However, when an external magnetic field is applied to the core, the external magnetic field is added to the excitation magnetic field. The magnetic field applied to the magnetic field is biased, and the magnetic flux density becomes asymmetric. By detecting this change in magnetic flux density with the detection coils 3a and 3a and the detection coils 3b and 3b, it is possible to detect external magnetic fields in the X-axis and Y-axis directions perpendicular to each other on the horizontal plane.

また、一軸磁気センサ素子Ｂでは、励磁コイル５に交流電流を流すことによって、リング状コア６が励磁され、Ｚ軸用検出コイル８の内部に交流磁束が生じる。これにより、上記同様の原理によりコア６に加わる磁界に偏りが生じて磁束密度が非対称となる。この磁束密度の変化を検出コイル８で検出することにより垂直なＺ軸方向の外部磁界を計測することができる。   Further, in the uniaxial magnetic sensor element B, by passing an alternating current through the exciting coil 5, the ring-shaped core 6 is excited, and an alternating magnetic flux is generated inside the Z-axis detecting coil 8. Thereby, the magnetic field applied to the core 6 is biased by the same principle as described above, and the magnetic flux density becomes asymmetric. By detecting this change in magnetic flux density with the detection coil 8, the external magnetic field in the vertical Z-axis direction can be measured.

本実施例では、一軸磁気センサ素子Ｂの検出コイル８の巻回軸芯を二軸磁気センサ素子Ａのリング状コア１の軸芯と一致するように、一軸磁気センサ素子Ｂを二軸磁気センサ素子Ａのリング状コア１の中心部に配置させてあるので、各磁気センサ素子におけるＸ軸用検出コイル３ａ，３ａ、Ｙ軸用検出コイル３ｂ，３ｂ並びにＺ軸用検出コイル８の計測中心が一致し、これにより、計測される外部磁界の計測位置を正しく確定でき、高精度で感度の高い三軸磁気センサを得ることができる。   In the present embodiment, the uniaxial magnetic sensor element B is a biaxial magnetic sensor so that the winding axis of the detection coil 8 of the uniaxial magnetic sensor element B coincides with the axial center of the ring-shaped core 1 of the biaxial magnetic sensor element A. Since it is arranged at the center of the ring-shaped core 1 of the element A, the measurement centers of the X-axis detection coils 3a and 3a, the Y-axis detection coils 3b and 3b, and the Z-axis detection coil 8 in each magnetic sensor element. Accordingly, the measurement position of the external magnetic field to be measured can be correctly determined, and a highly accurate and highly sensitive three-axis magnetic sensor can be obtained.

また、本実施例では、一軸磁気センサ素子Ｂのリング状コア６を長円状の形態としたので、真円状のコアに比べて同じ横幅（真円状コアの直径幅と長円状コアの短径方向の幅をいう）とした場合、検出に有効な磁路をより長く形成することができ、これにより外部磁界のＺ軸方向の検出感度をさらに高めることができる。   Further, in this embodiment, the ring-shaped core 6 of the uniaxial magnetic sensor element B has an oval shape, so that it has the same lateral width (diameter width of an oval core and an oval core as compared with an oval core). In this case, a magnetic path effective for detection can be formed longer, and the detection sensitivity of the external magnetic field in the Z-axis direction can be further increased.

なお、本発明では、図４に示すように、二軸磁気センサ素子Ａを、励磁コイルを巻回したコア１がケース４に収納され、このケース４の外周面に検出コイル３が先の実施例同様に巻回されているような構成としてもよい。   In the present invention, as shown in FIG. 4, the core 1 around which the excitation coil is wound is housed in the case 4 of the biaxial magnetic sensor element A, and the detection coil 3 is mounted on the outer peripheral surface of the case 4 earlier. It is good also as a structure wound like the example.

また、本発明では、一軸磁気センサ素子Ｂを図７に示すような構成とすることもできる。この実施例では、一軸磁気センサ素子Ｂは、二軸磁気センサ素子Ａと同じように、励磁コイルを巻回したリング状コア６の外周面をリング状の絶縁ケース７’で覆い、そのリング状絶縁ケース７’の外周面でリング状コア６の軸芯に対して直交する左右両部に、Ｚ軸方向の外部磁界を検出するＺ軸用検出コイル８ａ，８ａを巻回して構成されている。   In the present invention, the uniaxial magnetic sensor element B may be configured as shown in FIG. In this embodiment, the uniaxial magnetic sensor element B, like the biaxial magnetic sensor element A, covers the outer peripheral surface of the ring-shaped core 6 around which the exciting coil is wound with a ring-shaped insulating case 7 ', and the ring-shaped magnetic sensor element B Z-axis detection coils 8a, 8a for detecting an external magnetic field in the Z-axis direction are wound around both the right and left parts orthogonal to the axis of the ring-shaped core 6 on the outer peripheral surface of the insulating case 7 '. .

以上本発明の代表的な実施例について説明したが、本発明は必ずしも上記の実施形態に特定されるものでない。例えば、一軸磁気センサ素子Ｂのリング状コア６を、図示した長円状の形態に代えて真円状の形態としてもよい。その他本発明では、その目的を達成し、請求の範囲を逸脱しない範囲内で適宜修正、変更することが可能である。   While typical examples of the present invention have been described above, the present invention is not necessarily limited to the above embodiments. For example, the ring-shaped core 6 of the uniaxial magnetic sensor element B may be a perfect circle instead of the illustrated ellipse. Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

本発明の磁気センサは、水平なＸ軸、Ｙ軸の２軸方向の磁界と、垂直なＺ軸方向の磁界を測定できるループ状コア型の三軸磁気センサに利用することができる。   The magnetic sensor of the present invention can be used as a loop-shaped core type three-axis magnetic sensor capable of measuring a magnetic field in the biaxial direction of the horizontal X-axis and the Y-axis and a magnetic field in the vertical Z-axis direction.

Ａ 二軸磁気センサ素子
Ｂ 一軸磁気センサ素子
１ 二軸磁気センサ素子のリング状コア
２ 励磁コイル
３ 検出コイル
３ａ Ｘ軸用検出コイル
３ｂ Ｙ軸用検出コイル
４ ケース
５ 励磁コイル
６ 一軸磁気センサ素子のリング状コア
７ ケース
８ 検出コイル（Ｚ軸用検出コイル）
A Biaxial magnetic sensor element B Uniaxial magnetic sensor element 1 Ring core of biaxial magnetic sensor element 2 Excitation coil 3 Detection coil 3a X axis detection coil 3b Y axis detection coil 4 Case 5 Excitation coil 6 Uniaxial magnetic sensor element Ring-shaped core 7 Case 8 Detection coil (Z-axis detection coil)

Claims (2)

二軸磁気センサ素子と一軸磁気センサ素子とからなり、
二軸磁気センサ素子は、励磁コイルを巻回した磁性体製のリング状コアと、平面上で直交する２軸方向の磁界を検出する検出コイルを備え、
一軸磁気センサ素子は、長円状の形態で形成され、励磁コイルを巻回した磁性体製のリング状コアと、このリング状コアを内蔵するケースとを備え、該ケースの外周面でリング状コアの軸芯に対して直交する面に１軸方向の磁界を検出する検出コイルが巻回されており、
この一軸磁気センサ素子の検出コイルの巻回軸芯を二軸磁気センサ素子のリング状コアの軸芯と一致するように、一軸磁気センサ素子を二軸磁気センサ素子のリング状コアの中心部に配置させたことを特徴とする磁気センサ。 It consists of a biaxial magnetic sensor element and a uniaxial magnetic sensor element,
The biaxial magnetic sensor element includes a ring-shaped core made of a magnetic material around which an exciting coil is wound, and a detection coil that detects a magnetic field in a biaxial direction perpendicular to the plane.
The uniaxial magnetic sensor element is formed in an oval shape, and includes a magnetic ring-shaped core around which an exciting coil is wound, and a case containing the ring-shaped core. A detection coil for detecting a magnetic field in one axial direction is wound on a surface orthogonal to the axis of the core,
Place the uniaxial magnetic sensor element in the center of the ring-shaped core of the biaxial magnetic sensor element so that the winding axis of the detection coil of the uniaxial magnetic sensor element matches the axis of the ring-shaped core of the biaxial magnetic sensor element. A magnetic sensor characterized by being arranged. 二軸磁気センサ素子の検出コイルは、四方に対応して４つに分断され、かつ、そのうちの対をなす二つの検出コイルどうしが互いに逆向きとなるように巻回され、平面上で直交する２軸方向の磁界を検出するようにした請求項１に記載の磁気センサ。   The detection coil of the biaxial magnetic sensor element is divided into four corresponding to four directions, and two detection coils forming a pair of them are wound so that they are opposite to each other, and are orthogonal on a plane. The magnetic sensor according to claim 1, wherein a magnetic field in a biaxial direction is detected.
JP2011085665A 2011-04-07 2011-04-07 Magnetic sensor Expired - Fee Related JP5640874B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011085665A JP5640874B2 (en) 2011-04-07 2011-04-07 Magnetic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011085665A JP5640874B2 (en) 2011-04-07 2011-04-07 Magnetic sensor

Publications (2)

Publication Number Publication Date
JP2012220321A JP2012220321A (en) 2012-11-12
JP5640874B2 true JP5640874B2 (en) 2014-12-17

Family

ID=47271993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011085665A Expired - Fee Related JP5640874B2 (en) 2011-04-07 2011-04-07 Magnetic sensor

Country Status (1)

Country Link
JP (1) JP5640874B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499795A (en) * 2013-09-29 2014-01-08 北京纳特斯拉科技有限公司 Multifunctional magnetometer with combination of searching coil type and flux-gate type and application thereof
CN104733150B (en) * 2013-12-24 2017-12-29 天津三环乐喜新材料有限公司 A kind of quadrupole radiation magnetizes the magnetic-flux measurement coil and preparation method thereof of toroidal magnet

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01121877U (en) * 1988-02-13 1989-08-18
JPH0288182U (en) * 1988-12-23 1990-07-12
JPH1123683A (en) * 1997-06-27 1999-01-29 Shimadzu Corp Biaxial flux gate type magnetic sensor
WO2007126164A1 (en) * 2006-04-28 2007-11-08 Microgate, Inc. Thin film 3 axis fluxgate and the implementation method thereof

Also Published As

Publication number Publication date
JP2012220321A (en) 2012-11-12

Similar Documents

Publication Publication Date Title
JP2017072456A5 (en)
JP7076780B2 (en) Core structure and strain detector for detecting changes in permeability
JP2007052019A (en) Magnetometer for enhancing demagnetization region
JP2013124875A (en) Current sensor
JP6460372B2 (en) Magnetic sensor, method for manufacturing the same, and measuring instrument using the same
JP2005164531A (en) Magnetostrictive torque sensor
KR20150066833A (en) Othogonal type fluxgate sensor
JP2007155727A (en) Eddy current sensor and its sensor coil
JP5640874B2 (en) Magnetic sensor
JP2006194602A (en) Triaxial magnetometric sensor
JP5576840B2 (en) Magnetic characteristic measuring sensor and magnetic characteristic measuring method using the same
WO2003001144A1 (en) Equipment for measuring displacement
JP5121679B2 (en) Fluxgate magnetic sensor
JP4305271B2 (en) Magnetostrictive torque sensor
JP5713744B2 (en) Current sensor
KR101607025B1 (en) Fulxgate current sensing unit
JP2012198053A (en) Magnetic sensor and current sensor using the same
JP4385340B2 (en) Displacement sensor using Helmholtz coil
JP2013050330A (en) Magnetic sensor and current sensor using the same
JP2021189096A (en) Magnetic field detector and magnetic field detector array
JP6822222B2 (en) Magnetic property measuring instrument, magnetic property measuring system, and magnetic property measuring method
JP2009063396A (en) Current sensor
JP5683001B2 (en) Magnetostrictive torque detector
JP5900014B2 (en) Magnetic shield device
TWI436082B (en) Magnetic field sensor device and manufacture method thereof

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130719

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140306

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140408

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140523

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140930

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20141013

R151 Written notification of patent or utility model registration

Ref document number: 5640874

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees