JP5536344B2 - レーザー加工装置 - Google Patents

レーザー加工装置 Download PDF

Info

Publication number: JP5536344B2
Authority: JP; Japan
Prior art keywords: laser beam; axis direction; lens; chuck table; adjusting
Prior art date: 2009-01-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2009003571A

Other languages

English (en)

Japanese (ja)

Other versions

JP2010158710A (ja

Inventor

龍吾大庭

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Disco Corp

Original Assignee

Disco Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2009-01-09

Filing date

2009-01-09

Publication date

2014-07-02

2009-01-09 Application filed by Disco Corp filed Critical Disco Corp

2009-01-09 Priority to JP2009003571A priority Critical patent/JP5536344B2/ja

2009-12-29 Priority to KR1020090132342A priority patent/KR101530390B1/ko

2010-07-22 Publication of JP2010158710A publication Critical patent/JP2010158710A/ja

2014-07-02 Application granted granted Critical

2014-07-02 Publication of JP5536344B2 publication Critical patent/JP5536344B2/ja

Status Active legal-status Critical Current

2029-01-09 Anticipated expiration legal-status Critical

Links

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Images

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/0461—Welding tables

Landscapes

Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Mechanical Engineering (AREA)
Laser Beam Processing (AREA)

JP2009003571A 2009-01-09 2009-01-09 レーザー加工装置 Active JP5536344B2 (ja)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
JP2009003571A JP5536344B2 (ja)	2009-01-09	2009-01-09	レーザー加工装置
KR1020090132342A KR101530390B1 (ko)	2009-01-09	2009-12-29	레이저 가공 장치

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2009003571A JP5536344B2 (ja)	2009-01-09	2009-01-09	レーザー加工装置

Publications (2)

Publication Number	Publication Date
JP2010158710A JP2010158710A (ja)	2010-07-22
JP5536344B2 true JP5536344B2 (ja)	2014-07-02

Family

ID=42576274

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2009003571A Active JP5536344B2 (ja)	2009-01-09	2009-01-09	レーザー加工装置

Country Status (2)

Country	Link
JP (1)	JP5536344B2 (ko)
KR (1)	KR101530390B1 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP6234312B2 (ja) *	2014-04-11	2017-11-22	株式会社ディスコ	積層基板の加工方法
JP6860429B2 (ja) *	2017-06-07	2021-04-14	株式会社ディスコ	レーザ加工方法及びレーザ加工装置
JP2019111542A (ja)	2017-12-21	2019-07-11	株式会社ディスコ	レーザ加工装置
JP7269088B2 (ja) *	2019-05-07	2023-05-08	株式会社ディスコ	レーザー加工装置
JP7353171B2 (ja)	2019-12-26	2023-09-29	株式会社ディスコ	レーザー加工装置
JP2023037219A (ja)	2021-09-03	2023-03-15	株式会社ディスコ	レーザー加工装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6293095A (ja) *	1985-10-18	1987-04-28	Matsushita Electric Ind Co Ltd	レ−ザ加工装置
JPH0220681A (ja) *	1988-07-05	1990-01-24	Fujitsu Ltd	レーザビームの集束方法
JP4663047B2 (ja) *	1998-07-13	2011-03-30	株式会社半導体エネルギー研究所	レーザー照射装置及び半導体装置の作製方法
JP3439179B2 (ja) *	2000-07-28	2003-08-25	三菱重工業株式会社	レーザーエッチング方法
JP2005072174A (ja) *	2003-08-22	2005-03-17	Disco Abrasive Syst Ltd	基板とその表面に積層された積層体から構成された被加工物の分割方法
JP4646690B2 (ja) *	2005-05-10	2011-03-09	ミヤチテクノス株式会社	金メッキ剥離装置
JP2007184421A (ja) *	2006-01-06	2007-07-19	Mitsubishi Heavy Ind Ltd	太陽電池モジュールの製造方法及び太陽電池モジュール
JP2007275962A (ja) *	2006-04-10	2007-10-25	Disco Abrasive Syst Ltd	レーザー加工装置
JP5021258B2 (ja) *	2006-09-08	2012-09-05	日立造船株式会社	レーザによる溝加工方法
JP2008207210A (ja) *	2007-02-26	2008-09-11	Disco Abrasive Syst Ltd	レーザー光線照射装置およびレーザー加工機

2009
- 2009-01-09 JP JP2009003571A patent/JP5536344B2/ja active Active
- 2009-12-29 KR KR1020090132342A patent/KR101530390B1/ko active IP Right Grant

Also Published As

Publication number	Publication date
KR101530390B1 (ko)	2015-06-19
KR20100082711A (ko)	2010-07-19
JP2010158710A (ja)	2010-07-22

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