JP5535095B2 - Work size measuring device - Google Patents

Work size measuring device Download PDF

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JP5535095B2
JP5535095B2 JP2011003975A JP2011003975A JP5535095B2 JP 5535095 B2 JP5535095 B2 JP 5535095B2 JP 2011003975 A JP2011003975 A JP 2011003975A JP 2011003975 A JP2011003975 A JP 2011003975A JP 5535095 B2 JP5535095 B2 JP 5535095B2
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workpiece
laser beam
dimension
vertex
line image
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JP2012145441A (en
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正宏 冨松
陽二 小澤
久二和 伊熊
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Daido Steel Co Ltd
OHM Electric Co Ltd
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Daido Steel Co Ltd
OHM Electric Co Ltd
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Description

本発明はワークの外形寸法を迅速かつ正確に測定できるワーク寸法測定装置に関する。   The present invention relates to a workpiece dimension measuring apparatus that can quickly and accurately measure an outer dimension of a workpiece.

ワーク外形を自動測定する測定装置としては特許文献１に示すようなものが知られている。これは三次元空間を移動可能としたＺ軸スピンドルの先端にタッチセンサを設けたものである。また、特許文献２には、測定寸法方向へ移動可能に配設した一対のＣＣＤカメラの光学的中心軸をワークの測定対象部の端に一致させることによってワークの平面的寸法を測定するものが示されている。さらに、特許文献３には、平行光線をワークに照射して、ワークの背後と側方にそれぞれ設置したＣＣＤ受光器の受光状況からワークの寸法を測定するものが示されている。   As a measuring device for automatically measuring the workpiece outer shape, a device as shown in Patent Document 1 is known. This is a touch sensor provided at the tip of a Z-axis spindle that can move in a three-dimensional space. Japanese Patent Application Laid-Open No. H10-228561 measures the planar dimension of a workpiece by matching the optical center axis of a pair of CCD cameras arranged so as to be movable in the measurement dimension direction with the end of the workpiece measurement target portion. It is shown. Further, Patent Document 3 discloses a technique in which a workpiece is irradiated with parallel light rays and the dimensions of the workpiece are measured from the light receiving conditions of CCD light receivers installed behind and on the sides of the workpiece.

特開平７−１５９１５１JP-A-7-159151 特開平７−２９４２１９JP-A-7-294219 特開２００７−１７２０２JP2007-17202

しかし、特許文献１に記載の装置では正確なワーク外形を得ようとするとタッチセンサをかなり多くのワーク外形点に順次接触させる必要があって測定に時間を要するという問題がある。また、特許文献２に記載の装置では帯状ワークの幅寸法等を測定することはできるが、円形ワーク等の直径を正確に測定することは困難である。さらに特許文献３に記載の装置ではワークの背後や側方に複数設けたＣＣＤ受光器の受光状況を判定するアルゴリズムが比較的複雑であるという問題がある。   However, the apparatus described in Patent Document 1 has a problem that it takes time for measurement because it is necessary to sequentially bring a touch sensor into contact with a large number of workpiece outline points in order to obtain an accurate workpiece outline. Moreover, although the apparatus of patent document 2 can measure the width dimension etc. of a strip | belt-shaped workpiece | work, it is difficult to measure the diameter of a circular workpiece | work etc. correctly. Furthermore, the apparatus described in Patent Document 3 has a problem that the algorithm for determining the light reception status of a plurality of CCD light receivers provided behind or on the side of the workpiece is relatively complicated.

そこで、本発明はこのような課題を解決するもので、円形ワーク等を含む種々のワークの形状を短時間で簡易かつ正確に測定できるワーク寸法測定装置を提供することを目的とする。   SUMMARY OF THE INVENTION The present invention solves such a problem, and an object of the present invention is to provide a workpiece dimension measuring apparatus that can easily and accurately measure the shapes of various workpieces including circular workpieces in a short time.

上記目的を達成するために、本第１発明では、ワーク（Ｗ）を挟んで両側に位置させられ、ワーク（Ｗ）に向けて一定長の線状レーザ光（Ｌ）を照射する一対のレーザ光照射手段（４Ａ，４Ｂ）と、これらレーザ光照射手段（４Ａ，４Ｂ）を互いに対向する方向で離間ないし接近方向へ移動させる移動駆動手段（２Ａ，２Ｂ）と、ワーク（Ｗ）に照射された線状レーザ光（Ｌ）がワーク（Ｗ）の表面に線像（Ｍ）を生じさせた際の移動距離に基づいてワーク（Ｗ）の外形寸法を算出する外形算出手段（６）とを備え、かつワーク（Ｗ）は円形であり、その外周面に生じる線像（Ｍ）は頂点（Ｍ１）を有する円弧状をなし、外形算出手段（６）は上記移動距離と頂点（Ｍ１）の位置に基づいてワーク（Ｗ）の外径を算出するものである。 In order to achieve the above object, according to the first aspect of the present invention, a pair of lasers that are positioned on both sides of a workpiece (W) and irradiate the workpiece (W) with a linear laser beam (L) of a certain length The light irradiation means (4A, 4B), the movement drive means (2A, 2B) for moving the laser light irradiation means (4A, 4B) in a direction opposite to each other or in the approaching direction, and the work (W) are irradiated. An outer shape calculating means (6) for calculating the outer dimension of the workpiece (W) based on the moving distance when the linear laser beam (L) generates a line image (M) on the surface of the workpiece (W). The workpiece (W) has a circular shape, and the line image (M) generated on the outer peripheral surface thereof has an arc shape having a vertex (M1), and the outer shape calculation means (6) has the moving distance and the vertex (M1). The outer diameter of the workpiece (W) is calculated based on the position .

本第１発明においては、レーザ光照射手段からワークに照射された線状レーザ光がワークの表面に線像を生じさせた際の移動距離に基づいてワークの外形寸法を算出しているから、ワークの形状を短時間で簡易かつ正確に測定できる。特に本第１発明ではレーザ光照射手段によって頂点を有する円弧状の線像を生じさせ、線像を生じさせた際の移動距離と頂点の位置より円形ワークの外径を短時間で簡易かつ正確に測定できる。 In the first invention, since the linear laser beam irradiated to the workpiece from the laser beam irradiation means calculates the outer dimension of the workpiece based on the moving distance when the line image is generated on the surface of the workpiece, The shape of the workpiece can be measured easily and accurately in a short time. In particular, in the first invention, an arc-shaped line image having a vertex is generated by the laser beam irradiation means, and the outer diameter of the circular workpiece is easily and accurately determined in a short time from the moving distance and the position of the vertex when the line image is generated. Can be measured.

本第２発明では、移動駆動手段（２Ａ，２Ｂ）によって互いに対向する方向で離間ないし接近方向へ移動させられる一対の接触式検知器（５Ａ，５Ｂ）を設け、外形算出手段（６）は頂点（Ｍ１）間を結ぶ線上で接触式検知器（５Ａ，５Ｂ）がワーク（Ｗ）の内周面に接触した際の移動距離よりワーク（Ｗ）の内径を算出するものである。 In the second aspect of the present invention, a pair of contact detectors (5A, 5B) that are moved away from each other or in an approaching direction by the movement drive means (2A, 2B) are provided, and the outer shape calculation means (6) is the apex. The inner diameter of the workpiece (W) is calculated from the moving distance when the contact detectors (5A, 5B) contact the inner peripheral surface of the workpiece (W) on the line connecting (M1).

本第２発明においては、線像の頂点を結ぶ線上で接触式検知器がワークの内周面に接触した際の移動距離よりワークの内径を短時間で簡易かつ正確に測定できる。 In the second invention, the inner diameter of the workpiece can be measured easily and accurately in a short time from the moving distance when the contact detector contacts the inner peripheral surface of the workpiece on the line connecting the vertices of the line image.

上記カッコ内の符号は、後述する実施形態に記載の具体的手段との対応関係を示すものである。   The reference numerals in the parentheses indicate the correspondence with specific means described in the embodiments described later.

以上のように、本発明のワーク寸法測定装置によれば、円形ワーク等を含む種々のワークの形状を短時間で簡易かつ正確に測定することができる。   As described above, according to the workpiece dimension measuring device of the present invention, the shapes of various workpieces including circular workpieces can be measured easily and accurately in a short time.

ワーク測定装置の全体側面図である。It is a whole side view of a workpiece measuring device. 外径測定時の円形ワークの平面図である。It is a top view of the circular workpiece | work at the time of an outer diameter measurement. 内径測定時の円形ワークの平面図である。It is a top view of the circular workpiece | work at the time of an internal diameter measurement. 他の円形ワークの側面図である。It is a side view of another circular workpiece. 他の円形ワークの側面図である。It is a side view of another circular workpiece. 他の円形ワークの側面図である。It is a side view of another circular workpiece.

図１にはワーク測定装置の側面図を示す。図１において、一定幅の長板状の基体１には下面の両側に長手方向へ延びる移動駆動手段としてのスライダ機構２Ａ，２Ｂが設けられている。スライダ機構２Ａ，２Ｂは本実施形態では基体１を長手方向へ等分する同一長としてあり、小間隙をおいて対向位置している。各スライダ機構２Ａ，２Ｂには支持部材３Ａ，３Ｂが垂設されており、これら支持部材３Ａ，３Ｂにはそれぞれレーザ光照射手段たるレーザ変位計（例えば（株）キーエンス製ＬＪ−Ｇ０８０）４Ａ，４Ｂが互いに対向させて設けてある。   FIG. 1 shows a side view of the workpiece measuring apparatus. In FIG. 1, a long plate-like substrate 1 having a constant width is provided with slider mechanisms 2A and 2B as movement driving means extending in the longitudinal direction on both sides of the lower surface. In this embodiment, the slider mechanisms 2A and 2B have the same length that equally divides the base 1 in the longitudinal direction, and are opposed to each other with a small gap. Support members 3A and 3B are suspended from the slider mechanisms 2A and 2B, respectively, and a laser displacement meter (for example, LJ-G080 manufactured by Keyence Co., Ltd.) 4A serving as a laser beam irradiation unit is provided on each of the support members 3A and 3B. 4B are provided to face each other.

レーザ変位計４Ａ，４Ｂは、一定長の線状レーザ光を出力するレーザ出力器４１と、線状レーザ光の反射光を受光するＣＣＤ受光器４２を備えている。また、各支持部材３Ａ，３Ｂには側面に接触式検知器たるタッチプローブ５Ａ，５Ｂが設けられて、その接触子５１が下方へ突出している。ＣＣＤ受光器４２およびタッチプローブ５Ａ，５Ｂの出力信号は外形算出手段としてのパソコン６に入力している。なお、上記スライド機構２Ａ，２Ｂの駆動モータ２１がパソコン６の出力信号で制御されるようになっている。   The laser displacement meters 4A and 4B include a laser output device 41 that outputs linear laser light having a predetermined length, and a CCD light receiver 42 that receives reflected light of the linear laser light. The support members 3A and 3B are provided with touch probes 5A and 5B, which are contact detectors, on the side surfaces, and the contacts 51 protrude downward. The output signals of the CCD light receiver 42 and the touch probes 5A and 5B are input to the personal computer 6 as the outer shape calculating means. The drive motor 21 of the slide mechanisms 2A and 2B is controlled by the output signal of the personal computer 6.

上記支持部材３Ａ，３Ｂの移動位置はスライダ機構２Ａ，２Ｂ内に設けたリニアスケール（図示略）によって検出されている。また、基体１は中央上面がロボットアームＨに結合されており、ロボットアームＨによって、支持台Ｓ上に載置されたワークＷに対して予めティーチングされた所定の位置に位置決めされる。すなわち各支持部材３Ａ，３Ｂが基体１の中央から遠い外端にあるときに、これら支持部材３Ａ，３ＢがワークＷの中心線から大きくずれない範囲で、ワークＷを挟んでその両側に位置するように基体１が水平姿勢で位置決めされる。   The movement positions of the support members 3A and 3B are detected by a linear scale (not shown) provided in the slider mechanisms 2A and 2B. The base 1 has a central upper surface coupled to the robot arm H, and is positioned by the robot arm H at a predetermined position taught in advance with respect to the workpiece W placed on the support base S. That is, when the support members 3A and 3B are at the outer ends far from the center of the base 1, the support members 3A and 3B are positioned on both sides of the work W so as not to deviate greatly from the center line of the work W. Thus, the base body 1 is positioned in a horizontal posture.

ワークＷが円形の場合は、左右の支持部材３Ａ，３Ｂを互いに接近する方向へ移動させて、図１に示すように線状レーザ光ＬをワークＷの外周面に照射する。支持部材３Ａ，３Ｂは、レーザ出力器４１の光軸とＣＣＤ受光器４２の光軸が交差する点がワークＷの外周面上になる距離までワークＷの外周面に接近させられる。そして、図２に示すように、この時ワークＷの外周面に生じた線像Ｍが各レーザ変位計４Ａ，４ＢのＣＣＤ受光器４２で捉えられる。線像Ｍは、ロボットアームＨの軸心を中心に回転することで図２に示すようにワークＷの外周面に沿った円弧となる。   When the workpiece W is circular, the left and right support members 3A and 3B are moved in directions approaching each other, and the linear laser beam L is irradiated onto the outer peripheral surface of the workpiece W as shown in FIG. The supporting members 3A and 3B are brought close to the outer peripheral surface of the workpiece W up to a distance where the point where the optical axis of the laser output device 41 and the optical axis of the CCD light receiver 42 intersect is on the outer peripheral surface of the workpiece W. As shown in FIG. 2, the line image M generated on the outer peripheral surface of the workpiece W at this time is captured by the CCD light receivers 42 of the laser displacement meters 4A and 4B. The line image M becomes an arc along the outer peripheral surface of the workpiece W as shown in FIG. 2 by rotating around the axis of the robot arm H.

この円弧は頂点Ｍ１を有するから、左右のＣＣＤ受光器４２で捉えられた各線像Ｍの頂点Ｍ１を結ぶ線がワークＷの中心Ｏを通る中心線Ｃであり、上記頂点Ｍ１を結ぶ線の長さがワークＷの外径Ｄとなる。そこで、パソコン６内では、両支持部材３Ａ，３Ｂが移動した際の、基体１の中央から両支持部材３Ａ，３Ｂまでの距離Ｙｌ，Ｙｒ（図１）と、レーザ変位計４Ａ，４Ｂの寸法Ｘ、および各レーザ変位計４Ａ，４Ｂから頂点Ｍ１までの、基体１の長手方向に沿った距離Ｓｌ，Ｓｒから以下の計算式（１）で円形ワークの直径Ｄを算出する。なお、ワークＷの周方向の複数個所で直径Ｄを算出する必要がある場合にはロボットアームＨの軸心を中心に左右の支持部材３Ａ，３Ｂを適当角度旋回させることによって行う。
Ｄ＝Ｙｌ−（Ｓｌ＋Ｘ）＋Ｙｒ−（Ｓｒ＋Ｘ）
＝Ｙｌ＋Ｙｒ−（Ｓｌ＋Ｓｒ＋２Ｘ） …（１） Since this circular arc has a vertex M1, the line connecting the vertexes M1 of the line images M captured by the left and right CCD light receivers 42 is the center line C passing through the center O of the workpiece W, and the length of the line connecting the vertexes M1. Is the outer diameter D of the workpiece W. Therefore, in the personal computer 6, the distances Yl and Yr (FIG. 1) from the center of the base 1 to the support members 3A and 3B and the dimensions of the laser displacement meters 4A and 4B when the support members 3A and 3B move. The diameter D of the circular workpiece is calculated by X and the distances S1 and Sr along the longitudinal direction of the substrate 1 from the laser displacement meters 4A and 4B to the vertex M1 by the following calculation formula (1). When it is necessary to calculate the diameter D at a plurality of locations in the circumferential direction of the work W, the left and right support members 3A and 3B are turned by an appropriate angle around the axis of the robot arm H.
D = Yl− (Sl + X) + Yr− (Sr + X)
= Yl + Yr- (Sl + Sr + 2X) (1)

ワークＷの内径Ｅを測定する必要がある場合には、各支持部材３Ａ，３Ｂを基体１の中央に近い内端へ移動させた状態で、左右のタッチプローブ５Ａ，５Ｂを結ぶ線が、上述の方法で検出されたワークＷの中心線Ｃと一致するようにロボットアームＨによって基体１を平行移動させる（図３）。そして、スライダ機構２Ａ、２Ｂにより各支持部材３Ａ，３Ｂを、タッチプローブ５Ａ，５Ｂの接触子５１がワークＷの内周面に当接するまで互いに外方へ移動させ、この間の支持部材３Ａ，３Ｂの移動距離からパソコン６内でワークＷの内径Ｅを算出する。このようにタッチプローブ５Ａ，５Ｂの接触子５１をワークＷの内周面に一回接触させるだけでその内径Ｅを迅速かつ正確に測定することができる。   When it is necessary to measure the inner diameter E of the workpiece W, the lines connecting the left and right touch probes 5A and 5B with the support members 3A and 3B moved to the inner ends close to the center of the base 1 are the above-mentioned lines. The base 1 is translated by the robot arm H so as to coincide with the center line C of the workpiece W detected by the method (FIG. 3). Then, the support members 3A and 3B are moved outward by the slider mechanisms 2A and 2B until the contacts 51 of the touch probes 5A and 5B come into contact with the inner peripheral surface of the work W, and the support members 3A and 3B in the meantime. The inner diameter E of the workpiece W is calculated in the personal computer 6 from the movement distance of. As described above, the inner diameter E can be measured quickly and accurately only by bringing the contact 51 of the touch probes 5A and 5B into contact with the inner peripheral surface of the workpiece W once.

以上のように、本実施形態のワーク寸法測定装置によれば、円形ワークＷの外径Ｄと内径Ｅを短時間で簡易かつ正確に測定することができる。本実施形態のワーク寸法測定装置は、例えばスパッタリングターゲット（ターゲット材）のようなワークＷの各部寸法を迅速かつ正確に測定することができる。例えば、図４に示す凹陥部のある円形ワークＷの場合、ワークＷの厚み寸法Ｊ，Ｋは基体１の姿勢を垂直にして、スライダ機構２Ａ、２Ｂにより各支持部材３Ａ，３Ｂ上のレーザ変位計４Ａ，４Ｂを上下方向からワークＷを挟むように接近させることによって測定する。なお、この場合の線像は頂点の無い直線状のものとなり、各ＣＣＤ受光器４２で得られた直線間の距離がワークＷの厚み寸法Ｊ，Ｋとなる。外径Ｄ１，Ｄ２および内径Ｅは基体１の姿勢を水平に戻して上述の方法で迅速に測定できる。   As described above, according to the workpiece dimension measuring apparatus of the present embodiment, the outer diameter D and the inner diameter E of the circular workpiece W can be easily and accurately measured in a short time. The workpiece dimension measuring apparatus of this embodiment can measure each part dimension of the workpiece | work W like a sputtering target (target material) rapidly and correctly, for example. For example, in the case of the circular workpiece W having the recessed portion shown in FIG. 4, the thickness dimensions J and K of the workpiece W are set so that the posture of the base body 1 is vertical, and the laser displacements on the support members 3A and 3B by the slider mechanisms 2A and 2B. Measurement is performed by bringing the total 4A and 4B close to each other so as to sandwich the workpiece W from above and below. The line image in this case is a straight line having no apex, and the distance between the straight lines obtained by each CCD light receiver 42 is the thickness dimension J, K of the workpiece W. The outer diameters D1 and D2 and the inner diameter E can be quickly measured by returning the posture of the base body 1 to the horizontal and using the method described above.

また、図５に示すような段付きの円形ワークＷについても、その厚みＪ，Ｋ、外径Ｄ１，Ｄ２を上述の方法で迅速に測定でき、さらには図６に示すような円錐台形ワークＷについてもその厚みＪと外径Ｄを上述の方法で迅速に測定できる。   Further, for the stepped circular workpiece W as shown in FIG. 5, the thicknesses J and K and the outer diameters D1 and D2 can be quickly measured by the above-described method. Furthermore, the truncated cone workpiece W as shown in FIG. The thickness J and the outer diameter D can be quickly measured by the above method.

１…基体、２Ａ，２Ｂ…スライダ機構（移動駆動手段）、４Ａ，４Ｂ…レーザ変位計（レーザ光照射手段）、５Ａ，５Ｂ‥タッチプローブ（接触式検知器）、６…パソコン（外形算出手段）、Ｈ‥ロボットアーム、Ｌ…線状レーザ光、Ｍ‥線像、Ｍ１…頂点、Ｗ…ワーク。 DESCRIPTION OF SYMBOLS 1 ... Base | substrate, 2A, 2B ... Slider mechanism (movement drive means), 4A, 4B ... Laser displacement meter (laser beam irradiation means), 5A, 5B ... Touch probe (contact type detector), 6 ... Personal computer (outline calculation means) ), H ... robot arm, L ... linear laser beam, M ... line image, M1 ... vertex, W ... work.

Claims (2)

ワークを挟んで両側に位置させられ、前記ワークに向けて一定長の線状レーザ光を照射する一対のレーザ光照射手段と、これらレーザ光照射手段を互いに対向する方向で離間ないし接近方向へ移動させる移動駆動手段と、前記ワークに照射された前記線状レーザ光が前記ワークの表面に線像を生じさせた際の移動距離に基づいて前記ワークの外形寸法を算出する外形算出手段とを備え、かつ前記ワークは円形であり、その外周面に生じる前記線像は頂点を有する円弧状をなし、前記外形算出手段は前記移動距離と前記頂点の位置に基づいて前記ワークの外径を算出するものであるワーク寸法測定装置。 A pair of laser beam irradiation means that are positioned on both sides of the workpiece and irradiate a linear laser beam of a certain length toward the workpiece, and these laser beam irradiation means are moved away from each other or in an approaching direction. Movement driving means for causing the workpiece, and outer shape calculation means for calculating an outer dimension of the workpiece based on a movement distance when the linear laser light applied to the workpiece generates a line image on the surface of the workpiece. The workpiece is circular, and the line image generated on the outer peripheral surface has an arc shape having a vertex, and the outer shape calculating means calculates the outer diameter of the workpiece based on the moving distance and the position of the vertex. A workpiece dimension measuring device. 前記移動駆動手段によって互いに対向する方向で離間ないし接近方向へ移動させられる一対の接触式検知器を設け、前記外形算出手段は前記頂点間を結ぶ線上で前記接触式検知器が前記ワークの内周面に接触した際の移動距離より前記ワークの内径を算出するものである請求項１に記載のワーク寸法測定装置。 A pair of contact-type detectors that are moved away from each other in a direction facing each other by the movement driving means or an approaching direction are provided, and the outer shape calculation means is configured such that the contact-type detector is located on the inner circumference of the workpiece on a line connecting the vertices. The workpiece dimension measuring apparatus according to claim 1 , wherein an inner diameter of the workpiece is calculated from a moving distance when contacting the surface.
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