JP5490813B2 - Reverse pressure gate valve - Google Patents

Reverse pressure gate valve Download PDF

Info

Publication number
JP5490813B2
JP5490813B2 JP2011535332A JP2011535332A JP5490813B2 JP 5490813 B2 JP5490813 B2 JP 5490813B2 JP 2011535332 A JP2011535332 A JP 2011535332A JP 2011535332 A JP2011535332 A JP 2011535332A JP 5490813 B2 JP5490813 B2 JP 5490813B2
Authority
JP
Japan
Prior art keywords
pressure
valve plate
sealing material
gate valve
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011535332A
Other languages
Japanese (ja)
Other versions
JPWO2011043189A1 (en
Inventor
智彦 佐川
真 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2011535332A priority Critical patent/JP5490813B2/en
Publication of JPWO2011043189A1 publication Critical patent/JPWO2011043189A1/en
Application granted granted Critical
Publication of JP5490813B2 publication Critical patent/JP5490813B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Fluid Mechanics (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Sealing Devices (AREA)
  • Lift Valve (AREA)

Description

本発明は、内圧の高さの関係が逆転することのある２つのチャンバーを仕切る逆圧対応仕切弁に関するものである。   The present invention relates to a gate valve for counter pressure that partitions two chambers in which the relationship of the height of internal pressure may be reversed.

半導体や薄膜、液晶パネル等の製造に使用される真空装置の複数の真空チャンバーを仕切るための仕切弁として、特許文献１に記載のものが知られている。特許文献１に記載の仕切弁は、対向して配置されるとともにそれぞれ連通孔の形成された２つのシール面の間に、スライド可能に配置された弁板を有するものとなっている。そして、仕切弁は、弁板を連通孔の位置までスライドさせることで、２つの真空チャンバーを仕切るように形成されている。なお、特許文献１の仕切弁の弁板には、加圧流体の供給に応じて膨張することで突出するシール材が設けられ、このシール材の突出によりシール面と弁板とのクリアランスをシールするようにしている。   As a gate valve for partitioning a plurality of vacuum chambers of a vacuum apparatus used for manufacturing a semiconductor, a thin film, a liquid crystal panel or the like, a valve described in Patent Document 1 is known. The gate valve described in Patent Document 1 has a valve plate that is disposed so as to be opposed to each other and is slidably disposed between two sealing surfaces each having a communication hole. The gate valve is formed so as to partition the two vacuum chambers by sliding the valve plate to the position of the communication hole. Note that the valve plate of the gate valve of Patent Document 1 is provided with a seal material that protrudes by expanding in response to the supply of pressurized fluid, and the protrusion between the seal material seals the clearance between the seal surface and the valve plate. Like to do.

一方、真空装置のその他の仕切弁として、連通孔の形成されたシール面に弁板を押し付けることで、真空チャンバー間を仕切る構造のものもある。例えば図５に示す仕切弁では、シリンダー５０の発生する推力で、連通孔５１の形成されたシール面５２に弁板５３を押し付けることで、２つの真空チャンバー５４、５５を仕切るようにしている。   On the other hand, as another gate valve of the vacuum apparatus, there is a structure in which a vacuum plate is partitioned by pressing a valve plate against a seal surface in which a communication hole is formed. For example, in the gate valve shown in FIG. 5, the two vacuum chambers 54 and 55 are partitioned by pressing the valve plate 53 against the seal surface 52 in which the communication hole 51 is formed by the thrust generated by the cylinder 50.

ここでシール面５２に当接される弁板５３の前面側の真空チャンバー５４が真空とされ、弁板５３の後背側の真空チャンバー５５が大気圧とされる正圧時には、弁板５３に対して同弁板５３をシール面５２に押し付ける方向に大気圧が作用する。そのため、このときには、比較的小さい推力で弁板５３のシール面５２への押し付けを維持することができる。一方、弁板５３の前面側の真空チャンバー５４が大気圧とされ、弁板５３の後背側の真空チャンバー５５が真空とされる逆圧時には、弁板５３に対して同弁板５３をシール面５２から引き離す方向に大気圧が作用する。そのため、このときには、弁板５３をシール面５２に押し付けた状態を維持するため、多大な推力が必要とされるようになる。なお、弁板５３に作用する大気圧の力は、弁板５３が大型化するに従って大きくなる。そのため、大型の弁板を採用する仕切弁では、シリンダー等の推力で弁板を押し付けても、大気圧に押されてシールを維持できなくなってしまうことがある。   Here, when the vacuum chamber 54 on the front side of the valve plate 53 abutting against the seal surface 52 is evacuated and the vacuum chamber 55 on the back side of the valve plate 53 is at a positive pressure, the atmospheric pressure is applied to the valve plate 53. Thus, atmospheric pressure acts in the direction in which the valve plate 53 is pressed against the seal surface 52. Therefore, at this time, the pressing of the valve plate 53 against the seal surface 52 can be maintained with a relatively small thrust. On the other hand, when the vacuum chamber 54 on the front side of the valve plate 53 is at atmospheric pressure and the vacuum chamber 55 on the back side of the valve plate 53 is in a vacuum, the valve plate 53 is sealed against the valve plate 53. Atmospheric pressure acts in a direction away from 52. Therefore, at this time, in order to maintain the state in which the valve plate 53 is pressed against the seal surface 52, a great amount of thrust is required. Note that the atmospheric pressure force acting on the valve plate 53 increases as the valve plate 53 increases in size. For this reason, in a gate valve that employs a large valve plate, even if the valve plate is pressed by a thrust of a cylinder or the like, the seal may not be maintained due to being pressed by atmospheric pressure.

そこで従来、上記のような逆圧に対応した真空装置の仕切弁として、非特許文献１に記載のものが提案されている。図６に示すように、この従来の逆圧対応仕切弁では、連通孔６０の形成されたシール面６１への押し付けに応じて連通孔６０を塞ぐ弁板６４の後背側に、同弁板６４とベローズ６３と圧力プレート６２とにより区画された空間６５が形成される。そして逆圧時には、弁板６４に形成された導入孔６６より空間６５に大気圧を導入して弁板６４の後背側を大気圧とすることで、弁板６４の前面に作用する大気圧の力を相殺して、小さい推力での弁板６４の押し付けを可能としている。   Therefore, conventionally, a gate valve described in Non-Patent Document 1 has been proposed as a gate valve for a vacuum apparatus that can cope with the above-described back pressure. As shown in FIG. 6, in this conventional counter valve for counter pressure, the valve plate 64 is provided on the back side of the valve plate 64 that closes the communication hole 60 in response to pressing against the seal surface 61 in which the communication hole 60 is formed. A space 65 defined by the bellows 63 and the pressure plate 62 is formed. At the time of reverse pressure, atmospheric pressure is introduced into the space 65 through the introduction hole 66 formed in the valve plate 64 and the back side of the valve plate 64 is set to atmospheric pressure, so that the atmospheric pressure acting on the front surface of the valve plate 64 is reduced. The force is offset and the valve plate 64 can be pressed with a small thrust.

特開平５−２１５２４９号公報JP-A-5-215249

入江工研 株式会社 ゲートバルブカタログ ＮＯ．３１９ ＫＯＳＬＡＲＺＥ ＧＡＴＥ ＶＡＬＶＥ ９頁上部Irie Engineering Laboratory Gate Valve Catalog No. 319 KOSLARZE GATE VALVE top of page 9

図６の従来の逆圧対応仕切弁であれば、逆圧時にも、多大な推力を必要とすることなく、シールを維持することが確かに可能となる。しかしながら、こうした従来の逆圧対応仕切弁には、ベローズ６３や圧力プレート６２等が必要で、部品点数が多くなり、構造が複雑化してしまうという問題がある。   With the conventional counter valve for counter pressure shown in FIG. 6, it is possible to maintain the seal without requiring a large amount of thrust even during counter pressure. However, such a conventional counter valve for counter pressure requires the bellows 63, the pressure plate 62, etc., and there is a problem that the number of parts increases and the structure becomes complicated.

本発明は、こうした実情に鑑みてなされたものであり、比較的簡易な構造で逆圧時にもシールを確実に維持することのできる逆圧対応仕切弁を提供することにある。   The present invention has been made in view of such circumstances, and it is an object of the present invention to provide a counter-pressure-compatible gate valve that can reliably maintain a seal even during counter-pressure with a relatively simple structure.

本発明の一態様は、第１の内圧を有する第１のチャンバーと第２の内圧を有する第２のチャンバーとを仕切る逆圧対応仕切弁である。該逆圧対応仕切弁は、前記第１及び第２のチャンバーを連通する連通孔を有するシール面と、前記シール面に対する押し付けに応じて前記連通孔を塞ぐ弁板であって、前記第１のチャンバーが前記シール面に対向する前記弁板の前面側に位置し、前記第２のチャンバーが前記弁板の後背側に位置する前記弁板と、前記シール面と前記弁板とのいずれか一方から他方に向けて突出するとともに、その突出を解除可能に設けられて、その突出に応じて前記シール面と前記弁板とのクリアランスをシールするシール材とを備え、前記第１の内圧及び前記第２の内圧は、大気圧と真空とのいずれかであり、前記シール材は、前記第１の内圧が前記第２の内圧よりも高いときに前記第１の内圧と前記大気圧との差圧に応じて自動的に突出し、前記第１の内圧が前記第２の内圧よりも低いときに前記差圧に応じて自動的に突出を解除するように構成されている。 One embodiment of the present invention is a reverse pressure-compatible gate valve that partitions a first chamber having a first internal pressure and a second chamber having a second internal pressure. The reverse pressure corresponding gate valve is a seal surface having a communication hole that communicates the first and second chambers, and a valve plate that closes the communication hole in response to pressing against the seal surface. A chamber is located on the front side of the valve plate facing the seal surface, and the second chamber is located on the back side of the valve plate, and one of the seal surface and the valve plate with projecting toward the other from provided releasably its protruding, and a sealing member for sealing the clearance between the valve plate and the sealing surface in response to the projecting, the first pressure and the The second internal pressure is either an atmospheric pressure or a vacuum, and the sealing material has a difference between the first internal pressure and the atmospheric pressure when the first internal pressure is higher than the second internal pressure. automatically protrudes in response to pressure, the first Pressure is configured to release the automatically projected in response to the differential pressure is lower than the second pressure.

上記構成では、第１のチャンバーの第１の内圧が第２のチャンバーの第２の内圧よりも高い逆圧時には、シール材が突出する。それによりシール面と弁板とのクリアランスがシールされるようになる。そのため、第１の内圧と第２の内圧との圧力差によって弁板がシール面から離間する方向に押され、弁板がシール面から多少離間しても、突出したシール材によりシール面と弁板とのクリアランスのシールを維持することができる。   In the above configuration, the sealing material protrudes when the first internal pressure of the first chamber is higher than the second internal pressure of the second chamber. As a result, the clearance between the sealing surface and the valve plate is sealed. Therefore, even if the valve plate is pushed away from the seal surface due to the pressure difference between the first internal pressure and the second internal pressure, and the valve plate is slightly separated from the seal surface, the protruding seal material causes the valve The seal of clearance with the plate can be maintained.

本発明の逆圧対応仕切弁によれば、簡易な構造で逆圧時にもシールを確実に維持することができるようになる。   According to the gate valve for counter pressure according to the present invention, the seal can be reliably maintained even with counter pressure with a simple structure.

第１実施形態の逆圧対応仕切弁の弁板周囲の構造を示す断面図。Sectional drawing which shows the structure around the valve plate of the gate valve for back pressure of 1st Embodiment. 図１の逆圧対応仕切弁のシール材の状態を示す断面図であって、（ａ）は正圧時の、（ｂ）は正圧から逆圧へ、或いは逆圧から正圧への移行時の、シール材の状態をそれぞれ示す断面図。It is sectional drawing which shows the state of the sealing material of the reverse pressure corresponding gate valve of FIG. 1, Comprising: (a) at the time of a positive pressure, (b) is a transition from a positive pressure to a reverse pressure, or a reverse pressure to a positive pressure. Sectional drawing which each shows the state of the sealing material at the time. 図１の逆圧対応仕切弁の逆圧時のシール材の状態を示す断面図。Sectional drawing which shows the state of the sealing material at the time of the back pressure of the counter pressure corresponding gate valve of FIG. 第２実施形態の逆圧対応仕切弁のシール材の状態を示す断面図であって、（ａ）は正圧時の、（ｂ）は正圧から逆圧へ、或いは逆圧から正圧への移行時の、（ｃ）は逆圧時のシール材の状態をそれぞれ示す断面図。It is sectional drawing which shows the state of the sealing material of the reverse pressure corresponding gate valve of 2nd Embodiment, (a) is at the time of positive pressure, (b) is from positive pressure to reverse pressure, or from reverse pressure to positive pressure. (C) is sectional drawing which each shows the state of the sealing material at the time of back pressure at the time of transfer. 従来の真空装置の仕切弁の断面構造を示す断面図。Sectional drawing which shows the cross-section of the gate valve of the conventional vacuum apparatus. 従来の逆圧対応仕切弁の断面構造を示す断面図。Sectional drawing which shows the cross-section of the conventional counter pressure corresponding gate valve.

（第１の実施の形態）
以下、本発明の逆圧対応仕切弁を具体化した第１の実施の形態を、図１〜図３を参照して詳細に説明する。なお第１実施形態の逆圧対応仕切弁は、半導体や薄膜、液晶パネル等の製造に使用される真空装置において大気圧と真空とを仕切る弁として構成されている。(First embodiment)
Hereinafter, a first embodiment in which the counter pressure gate valve of the present invention is embodied will be described in detail with reference to FIGS. In addition, the back pressure corresponding gate valve of 1st Embodiment is comprised as a valve which partitions off atmospheric pressure and a vacuum in the vacuum apparatus used for manufacture of a semiconductor, a thin film, a liquid crystal panel, etc.

図１は、第１実施形態の逆圧対応仕切弁の側方から見た断面構造を示している。同図に示すように、第１実施形態の逆圧対応仕切弁は、第１真空チャンバー１及び第２真空チャンバー４の２つの真空チャンバーの連結部に設置されている。   FIG. 1 shows a cross-sectional structure as viewed from the side of a counter-pressure gate valve of the first embodiment. As shown in the figure, the gate valve for counter pressure according to the first embodiment is installed at a connection portion between two vacuum chambers, a first vacuum chamber 1 and a second vacuum chamber 4.

第２真空チャンバー４に連接される第１真空チャンバー１の側板には、両チャンバー１，４を連通する連通孔２が設けられている。こうした連通孔２の設けられた第１真空チャンバー１の側板の外周面は、連通孔２を塞ぐことで両真空チャンバー１，４の連通を遮断する弁板６が押し付けられるシール面３となっている。   The side plate of the first vacuum chamber 1 connected to the second vacuum chamber 4 is provided with a communication hole 2 for communicating both the chambers 1 and 4. The outer peripheral surface of the side plate of the first vacuum chamber 1 provided with such a communication hole 2 becomes a seal surface 3 on which the valve plate 6 that blocks the communication between the two vacuum chambers 1, 4 is pressed by closing the communication hole 2. Yes.

上記弁板６は、第２真空チャンバー４の内部に配設されている。この弁板６は、回動軸５に回動可能に軸支された基端を有する。弁板６は、図示しないシリンダーにより、図中半時計回りに回動することで、その前面がシール面３に押し付けられて連通孔２を塞ぐように配置されている。通常、弁板６の回動による連通孔２の開閉は、第１真空チャンバー１及び第２真空チャンバー４の内圧が同一となった状態で行われる。なお、第２真空チャンバー４の内部には、シール面３からの離間する方向への弁板６の変位を止めるストッパー７も配設されている。   The valve plate 6 is disposed inside the second vacuum chamber 4. The valve plate 6 has a base end that is pivotally supported by the rotation shaft 5. The valve plate 6 is arranged so that the front surface thereof is pressed against the seal surface 3 and closes the communication hole 2 by rotating counterclockwise in the drawing by a cylinder (not shown). Usually, the opening and closing of the communication hole 2 by the rotation of the valve plate 6 is performed in a state where the internal pressures of the first vacuum chamber 1 and the second vacuum chamber 4 are the same. A stopper 7 that stops the displacement of the valve plate 6 in the direction away from the seal surface 3 is also disposed inside the second vacuum chamber 4.

上記シール面３に対向する弁板６の前面には、連通孔２の外周を囲むようにシール材８が設置されている。また弁板６の前面のシール材８の内周には、弾性体からなるＯリング９も設置されている。第１実施形態では、Ｏリング９は第２のシール材として設けられている。   A sealing material 8 is provided on the front surface of the valve plate 6 facing the sealing surface 3 so as to surround the outer periphery of the communication hole 2. An O-ring 9 made of an elastic body is also installed on the inner periphery of the sealing material 8 on the front surface of the valve plate 6. In the first embodiment, the O-ring 9 is provided as a second sealing material.

シール材８は、中空の弾性材にて形成されている。こうしたシール材８の内部空間には、必要に応じ、配管１０によって空気の供給がなされるようになっている。第１実施形態では、この配管１０の一端は大気に開放されている。そして、シール材８の周囲とその内部空間との差圧に応じて、シール材８の断面形状が変化するようになっている。シール材８先端部の周囲が大気圧雰囲気下にあるときには、シール材８の周囲とシール材８の内部空間とは同圧（大気圧）となる。このときのシール材８は、弾性体であるため先端の凹んだ形状になる（図２（ａ）参照）。一方、シール材８先端部の周囲が真空下にあるときには、シール材８の周囲とシール材８の内部空間との差圧により、シール材８の内部空間に空気が供給されるようになる。そのため、このときのシール材８は、シール面３に向けてその先端が突出するように膨張する（図２（ｂ）および図３参照）。   The sealing material 8 is formed of a hollow elastic material. Air is supplied to the internal space of the sealing material 8 by a pipe 10 as necessary. In the first embodiment, one end of the pipe 10 is open to the atmosphere. And the cross-sectional shape of the sealing material 8 changes according to the differential pressure | voltage between the circumference | surroundings of the sealing material 8, and its internal space. When the periphery of the seal material 8 tip is in an atmospheric pressure atmosphere, the periphery of the seal material 8 and the internal space of the seal material 8 have the same pressure (atmospheric pressure). Since the sealing material 8 at this time is an elastic body, it has a concave shape at the tip (see FIG. 2A). On the other hand, when the periphery of the tip of the sealing material 8 is under vacuum, air is supplied to the internal space of the sealing material 8 due to the differential pressure between the periphery of the sealing material 8 and the internal space of the sealing material 8. Therefore, the sealing material 8 at this time expands so that the tip protrudes toward the sealing surface 3 (see FIGS. 2B and 3).

なお、こうした逆圧対応仕切弁の設けられた真空装置は、通常は、第１真空チャンバー１が真空とされ、第２真空チャンバー４が大気圧とされた、いわゆる正圧の状態、又は第１真空チャンバー１と第２真空チャンバー４とが同圧の状態で使用される。ただし、メンテナンスに際しては、第１真空チャンバー１が大気圧とされ、第２真空チャンバー４が真空とされた、いわゆる逆圧の状態とされることがある。以下に述べるように、第１実施形態の逆圧対応仕切弁は、正圧時であれ、逆圧時であれ、好適にシールを行えるように構成されている。   In addition, the vacuum apparatus provided with such a counter-pressure gate valve is usually in a so-called positive pressure state in which the first vacuum chamber 1 is evacuated and the second vacuum chamber 4 is atmospheric pressure, or first The vacuum chamber 1 and the second vacuum chamber 4 are used at the same pressure. However, during maintenance, the first vacuum chamber 1 may be at atmospheric pressure and the second vacuum chamber 4 may be in a so-called reverse pressure state. As will be described below, the gate valve for counter pressure according to the first embodiment is configured so that it can be suitably sealed whether it is positive pressure or counter pressure.

図２（ａ）は、弁板６の前面側の第１真空チャンバー１の内部が真空とされ、弁板６の後背側の第２真空チャンバー４の内部が大気圧とされる正圧時の状態を示している。このときのシール材８先端部の周囲は大気圧雰囲気下にあり、またその内部空間も大気圧となる。そのため、このときのシール材８は、弾性体であるため先端の凹んだ形状になる。ただし、このときには、大気圧に基づく力Ｆが弁板６をシール面３に押し付ける方向に作用するため、比較的小さい推力で弁板６をシール面３に押し付けた状態が維持される。ちなみにこのときの弁板６とシール面３とのクリアランスは、Ｏリング９によりシールされている。   FIG. 2A shows a positive pressure when the inside of the first vacuum chamber 1 on the front side of the valve plate 6 is evacuated and the inside of the second vacuum chamber 4 on the back side of the valve plate 6 is at atmospheric pressure. Indicates the state. At this time, the periphery of the tip of the sealing material 8 is in an atmospheric pressure atmosphere, and the internal space is also atmospheric pressure. Therefore, since the sealing material 8 at this time is an elastic body, it has a concave shape at the tip. However, at this time, since the force F based on the atmospheric pressure acts in the direction of pressing the valve plate 6 against the seal surface 3, the state where the valve plate 6 is pressed against the seal surface 3 with a relatively small thrust is maintained. Incidentally, the clearance between the valve plate 6 and the seal surface 3 at this time is sealed by an O-ring 9.

図２（ｂ）は、弁板６の前面側の第１真空チャンバー１の内部、及び弁板６の後背側の第２真空チャンバー４の内部が真空とされる、正圧から逆圧への移行時の状態を示している。   FIG. 2B shows that the inside of the first vacuum chamber 1 on the front side of the valve plate 6 and the inside of the second vacuum chamber 4 on the back side of the valve plate 6 are evacuated, from positive pressure to reverse pressure. The state at the time of transition is shown.

例えばメンテナンス等を行うために、正圧から逆圧へ移行するときは、第１真空チャンバー１及び第２真空チャンバー４の内部を共に真空排気する。このとき、図２（ｂ）に示すように、シール材８の内部空間には、その先端部周囲とその内部空間との差圧により、配管１０を通じて空気が供給される。従って、シール材８は膨張してその先端がシール面３に向けて突出するように弾性変形する。   For example, when the pressure is shifted from the positive pressure to the reverse pressure for maintenance or the like, both the first vacuum chamber 1 and the second vacuum chamber 4 are evacuated. At this time, as shown in FIG. 2B, air is supplied to the internal space of the sealing material 8 through the pipe 10 due to the differential pressure between the periphery of the tip portion and the internal space. Therefore, the sealing material 8 expands and elastically deforms so that the tip protrudes toward the sealing surface 3.

図３は、弁板６の前面側の第１真空チャンバー１の内部が大気圧とされ、弁板６の後背側の第２真空チャンバー４の内部が真空とされる逆圧時の状態を示している。このときの弁板６には、大気圧に基づく力Ｆが弁板６をシール面３から引き離す方向に作用する。そのため、弁板６は大気圧に押されてストッパー７が機能する位置まで後退し、弁板６の前面とシール面３とのクリアランスが大きくなる。ただし、このときのシール材８は、図２（ｂ）に示したように正圧から逆圧への移行時から継続して、膨張した状態、即ちその先端がシール面３に向けて突出するように弾性変形した状態となっている。そのため、弁板６の前面とシール面３とのクリアランスが多少大きくなっても、突出したシール材８によりそのクリアランスがシールされるようになる。   FIG. 3 shows a state at the time of reverse pressure in which the inside of the first vacuum chamber 1 on the front side of the valve plate 6 is set to atmospheric pressure and the inside of the second vacuum chamber 4 on the back side of the valve plate 6 is evacuated. ing. At this time, the force F based on the atmospheric pressure acts on the valve plate 6 in the direction of pulling the valve plate 6 away from the seal surface 3. Therefore, the valve plate 6 is pushed back to the position where the stopper 7 functions by being pushed by the atmospheric pressure, and the clearance between the front surface of the valve plate 6 and the seal surface 3 is increased. However, the sealing material 8 at this time continues from the transition from the positive pressure to the reverse pressure, as shown in FIG. Thus, it is in an elastically deformed state. Therefore, even if the clearance between the front surface of the valve plate 6 and the seal surface 3 becomes somewhat large, the clearance is sealed by the protruding sealing material 8.

以上記述した第１実施形態の逆圧対応仕切弁によれば、少なくとも次の効果を奏することができる。
（１）シール面３に対向する弁板６の前面側の第１真空チャンバー１の内圧が同弁板６の後背側の第２真空チャンバー４の内圧よりも高い逆圧時には、シール材８が該シール材８の内圧に応じて突出され、それによりシール面３と弁板６とのクリアランスがシールされるようになる。そのため、大気圧によって弁板６がシール面３から離間する方向に押され、弁板６がシール面３から多少離間しても、突出したシール材８によりシール面３と弁板６とのクリアランスのシールを維持することができる。したがって、第１実施形態の逆圧対応仕切弁によれば、比較的簡易な構造で逆圧時にもシールを確実に維持することのできるようになる。According to the counter pressure corresponding gate valve of the first embodiment described above, at least the following effects can be obtained.
(1) When the internal pressure of the first vacuum chamber 1 on the front side of the valve plate 6 facing the seal surface 3 is higher than the internal pressure of the second vacuum chamber 4 on the back side of the valve plate 6, the sealing material 8 is It protrudes according to the internal pressure of the sealing material 8, and thereby the clearance between the sealing surface 3 and the valve plate 6 is sealed. Therefore, even if the valve plate 6 is pushed away from the seal surface 3 by the atmospheric pressure, and the valve plate 6 is somewhat separated from the seal surface 3, the clearance between the seal surface 3 and the valve plate 6 is caused by the protruding seal material 8. The seal can be maintained. Therefore, according to the gate valve for counter pressure according to the first embodiment, the seal can be reliably maintained even with counter pressure with a relatively simple structure.

（２）第１実施形態の逆圧対応仕切弁は、シール面３から離間する方向への弁板６の変位を止めるストッパー７を備えている。こうしたストッパー７が設けられていれば、逆圧時におけるシール面３からの弁板６の離間に伴う弁板６とシール面３との間のクリアランスの拡大をある程度に留めることができる。そのため、シール材８の突出により、弁板６とシール面３との間のクリアランスのシールをより確実に行うことができるようになる。   (2) The reverse pressure corresponding gate valve of the first embodiment includes a stopper 7 that stops displacement of the valve plate 6 in a direction away from the seal surface 3. If such a stopper 7 is provided, an increase in clearance between the valve plate 6 and the seal surface 3 due to the separation of the valve plate 6 from the seal surface 3 at the time of back pressure can be suppressed to some extent. For this reason, the clearance between the valve plate 6 and the sealing surface 3 can be more reliably sealed by the protrusion of the sealing material 8.

（３）第１実施形態の逆圧対応仕切弁では、シール材８の中空部分（内部空間）が配管１０を通じて大気開放されている。従って、シール材８先端部の周囲が大気圧雰囲気にあるときには、その内外の気圧が同圧となり、その中空部分への流体圧の印加が除荷される。一方、シール材８先端部の周囲が真空下にあるときには、その内外の差圧により、配管１０を通じてその中空部分に空気が供給されるようになる。そのため、このときのシール材８の中空部分には、大気圧が印加され、それによりシール材８が膨張してその先端が突出するようにその断面形状が変化する。そのため、第１実施形態の逆圧対応仕切弁では、第１真空チャンバー１内と大気圧雰囲気との差圧によって、自動的にシール材８の進退を行うことができるようになる。   (3) In the counter pressure counter valve of the first embodiment, the hollow portion (internal space) of the sealing material 8 is opened to the atmosphere through the pipe 10. Therefore, when the periphery of the front end portion of the sealing material 8 is in an atmospheric pressure atmosphere, the atmospheric pressure inside and outside thereof becomes the same pressure, and the application of fluid pressure to the hollow portion is unloaded. On the other hand, when the periphery of the front end portion of the sealing material 8 is under vacuum, air is supplied to the hollow portion through the pipe 10 due to the differential pressure inside and outside. Therefore, atmospheric pressure is applied to the hollow portion of the sealing material 8 at this time, whereby the sealing material 8 expands and its cross-sectional shape changes so that its tip protrudes. Therefore, in the counter pressure gate valve of the first embodiment, the seal material 8 can be automatically advanced and retracted by the differential pressure between the first vacuum chamber 1 and the atmospheric pressure atmosphere.

（第２の実施の形態）
次に、本発明の逆圧対応仕切弁を具体化した第２の実施の形態を、図４を併せ参照して説明する。なお第２実施形態の逆圧対応仕切弁の構成は、そのシール材の構成が変更されている以外は、第１の実施の形態のものと同じとなっている。したがって第２実施形態において第１の実施の形態のものと共通する構成には、同一の符号を付してその詳細な説明は省略する。(Second Embodiment)
Next, a second embodiment embodying the counter pressure gate valve of the present invention will be described with reference to FIG. Note that the configuration of the counter pressure gate valve of the second embodiment is the same as that of the first embodiment except that the configuration of the sealing material is changed. Therefore, in the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図４に示すように第２実施形態の逆圧対応仕切弁でも、シール材２０が進退可能に設けられている。このシール材２０は、その後背に形成された圧力室２２へのガス圧の印加（空気の供給）に応じて進出することで突出し、同圧力室２２からのガス圧の除荷に応じて後退することでその突出を解除するように構成されている。   As shown in FIG. 4, the sealing material 20 is also provided so as to be able to advance and retreat in the counter pressure corresponding gate valve of the second embodiment. The sealing material 20 protrudes by advancing in response to the application of gas pressure (air supply) to the pressure chamber 22 formed on the back of the sealing material 20 and retracts in response to the unloading of the gas pressure from the pressure chamber 22. It is comprised so that the protrusion may be cancelled | released.

図４（ａ）は、第１真空チャンバー１の内圧が同弁板６の後背側の第２真空チャンバー４の内圧よりも低く、大気圧により弁板６がシール面３に押し付ける方向に付勢される正圧時におけるシール材２０の状態を示している。同図に示すように、シール材２０は、弁板６の前面に形成された凹部２１に配設されており、シール材２０の後背には、凹部２１の周壁とシール材２０とによって圧力室２２が区画形成されている。この圧力室２２には、配管１０が接続されており、必要に応じ、その配管１０を通じて空気の供給がなされるようになっている。   FIG. 4A shows that the internal pressure of the first vacuum chamber 1 is lower than the internal pressure of the second vacuum chamber 4 on the back side of the valve plate 6, and the valve plate 6 is urged in a direction to press against the seal surface 3 by the atmospheric pressure. The state of the sealing material 20 at the time of positive pressure is shown. As shown in the figure, the sealing material 20 is disposed in a concave portion 21 formed on the front surface of the valve plate 6, and a pressure chamber is formed on the back of the sealing material 20 by the peripheral wall of the concave portion 21 and the sealing material 20. 22 is partitioned. A piping 10 is connected to the pressure chamber 22, and air is supplied through the piping 10 as necessary.

正圧時には、シール材２０先端部の周囲は大気圧雰囲気下にあり、その先端部周囲と圧力室２２内は共に大気圧となる。そのため、このときのシール材２０は、該シール材２０の押圧に応じて圧力室２２から空気が抜けることで、凹部２１内に引っ込んだ位置に後退する（図４（ａ）参照）。このときには、第２真空チャンバー４の大気圧に付勢されて、弁板６がシール面３に押し付けられており、弁板６とシール面３とのクリアランスはＯリング９（詳しくは図１参照）によりシールされている。   At the time of positive pressure, the periphery of the front end of the sealing material 20 is in an atmospheric pressure atmosphere, and both the periphery of the front end and the inside of the pressure chamber 22 are at atmospheric pressure. Therefore, the sealing material 20 at this time moves backward to the position where it is retracted into the recess 21 as air escapes from the pressure chamber 22 in response to the pressing of the sealing material 20 (see FIG. 4A). At this time, the valve plate 6 is pressed against the seal surface 3 by being urged by the atmospheric pressure of the second vacuum chamber 4, and the clearance between the valve plate 6 and the seal surface 3 is O-ring 9 (see FIG. 1 for details). ).

図４（ｂ）は、真空チャンバー１の内部、及び弁板６の後背側の第２真空チャンバー４の内部が真空とされる、正圧から逆圧への移行時の状態を示している。
例えばメンテナンス等を行うために、正圧から逆圧へ移行するときは、第１真空チャンバー１及び第２真空チャンバー４の内部を共に真空排気する。このとき、図４（ｂ）に示すように、圧力室２２の内部空間には、シール材２０の先端部周囲と圧力室２２の内部空間との差圧により、配管１０を通じて空気が供給され、シール材２０は、その空気に付勢されてシール面３に向けて進出する。FIG. 4B shows a state in which the inside of the vacuum chamber 1 and the inside of the second vacuum chamber 4 on the back side of the valve plate 6 are evacuated, when the pressure is changed from the positive pressure to the reverse pressure.
For example, when the pressure is shifted from the positive pressure to the reverse pressure for maintenance or the like, both the first vacuum chamber 1 and the second vacuum chamber 4 are evacuated. At this time, as shown in FIG. 4B, air is supplied to the internal space of the pressure chamber 22 through the pipe 10 due to the differential pressure between the periphery of the tip portion of the sealing material 20 and the internal space of the pressure chamber 22. The sealing material 20 is urged by the air and advances toward the sealing surface 3.

図４（ｃ）は、第１真空チャンバー１の内圧が同弁板６の後背側の第２真空チャンバー４の内圧よりも高く、大気圧により弁板６がシール面３から離間する方向に付勢される逆圧時におけるシール材２０の状態を示している。このときのシール材２０先端部の周囲は真空下にあり、その後背の圧力室２２は大気圧となる。そのため、図４（ｂ）に示した正圧から逆圧への移行時から継続して、圧力室２２に配管１０を通じて空気が供給されており、シール材２０がシール面３に向けて進出した状態となっている。即ち、シール材２０は、その先端がシール面３に向けて突出するように弾性変形した状態となっている。このときの弁板６は、第１真空チャンバー１からの大気圧に押されており、弁板６の前面とシール面３とのクリアランスが拡大するが、シール材２０がシール面３に向けて突出してそのクリアランスをシールするようになる。   FIG. 4C shows that the internal pressure of the first vacuum chamber 1 is higher than the internal pressure of the second vacuum chamber 4 on the back side of the valve plate 6, and the valve plate 6 is separated from the seal surface 3 due to atmospheric pressure. The state of the sealing material 20 at the time of back pressure to be applied is shown. At this time, the periphery of the front end portion of the sealing material 20 is under vacuum, and the pressure chamber 22 behind it is at atmospheric pressure. Therefore, air is supplied to the pressure chamber 22 through the pipe 10 continuously from the transition from the positive pressure to the reverse pressure shown in FIG. 4B, and the sealing material 20 advances toward the sealing surface 3. It is in a state. That is, the sealing material 20 is in an elastically deformed state so that the tip thereof protrudes toward the sealing surface 3. At this time, the valve plate 6 is pushed by the atmospheric pressure from the first vacuum chamber 1, and the clearance between the front surface of the valve plate 6 and the seal surface 3 increases, but the seal material 20 faces the seal surface 3. Protrusions and seal the clearance.

以上説明した第２実施形態によっても、少なくとも第１の実施の形態と同様の効果を奏することができる。
なお、以上の各実施形態は以下のように変更してもよい。Also according to the second embodiment described above, at least the same effects as those of the first embodiment can be obtained.
The above embodiments may be modified as follows.

・第１の実施の形態では、逆圧時には、シール材８の先端部周囲とその内部空間との差圧により、その内部空間に空気が供給されて、それによりシール材８がその先端が突出するようにその断面形状が変化するようになっていた。また第２の実施の形態では、逆圧時には、シール材２０の先端部周囲とその後背の圧力室２２との差圧により、圧力室２２に空気が供給されて、それによりシール材２０が前進してその先端が突出されるようになっていた。このように上記各実施形態では、シール材８、２０の突出及びその解除が、第１真空チャンバー１の内圧の変化に応じて自動的に行われるようになっている。この第１真空チャンバー１の内圧を利用することに加えて、シール材８の内部空間や圧力室２２に圧縮空気を供給することで、シール材８、２０の突出を意図的に行うようにしても良い。また空気以外の加圧ガスを用いてシール材８、２０を突出させたり、加圧液体を用いてシール材８、２０を突出させたりするようにしても良い。すなわち、シール材８、２０の突出及びその解除は、任意の流体の流体圧の印加及びその除荷を通じて行うことが可能である。また可能であれば、発条の弾性反発力や電磁力等の流体圧以外の推力を用いてシール材８、２０を突出させるようにしても良い。   In the first embodiment, at the time of reverse pressure, air is supplied to the internal space due to the differential pressure between the periphery of the tip portion of the seal material 8 and the internal space, thereby causing the tip of the seal material 8 to protrude. As such, the cross-sectional shape has changed. Further, in the second embodiment, at the time of reverse pressure, air is supplied to the pressure chamber 22 due to the differential pressure between the periphery of the front end portion of the sealing material 20 and the pressure chamber 22 behind it, thereby the sealing material 20 advances. And the tip was projected. As described above, in each of the above embodiments, the protrusion of the sealing materials 8 and 20 and the release thereof are automatically performed according to the change in the internal pressure of the first vacuum chamber 1. In addition to using the internal pressure of the first vacuum chamber 1, compressed air is supplied to the internal space of the sealing material 8 and the pressure chamber 22 so that the sealing materials 8 and 20 are intentionally projected. Also good. Further, the sealing materials 8 and 20 may be projected using a pressurized gas other than air, or the sealing materials 8 and 20 may be projected using a pressurized liquid. That is, the protrusion of the sealing materials 8 and 20 and the release thereof can be performed through application of fluid pressure of an arbitrary fluid and unloading thereof. Further, if possible, the sealing materials 8 and 20 may be protruded by using a thrust other than fluid pressure such as elastic repulsive force or electromagnetic force.

・第１の実施の形態では、中空の弾性体を用い、その内部空間に流体圧を供給することでシール材８の断面形状を変化させるようにしていたが、それ以外の手法によりシール材の断面形状を変化させることも可能である。例えば形状記憶材料を用いてシール材を形成し、加熱等を通じてシール材の断面形状を変化させるようにしても良い。   In the first embodiment, a hollow elastic body is used, and the cross-sectional shape of the sealing material 8 is changed by supplying fluid pressure to the internal space. It is also possible to change the cross-sectional shape. For example, a sealing material may be formed using a shape memory material, and the cross-sectional shape of the sealing material may be changed through heating or the like.

・上記実施形態では、弁板６がシール面３からある程度以上に離間しないように弁板６をストッパー７によって支持するようにした。こうしたストッパー７を省略して、例えばシリンダー等が弁板６に加える推力だけで、シール材８、２０の突出により弁板６とシール面３との間をシール可能な範囲に弁板６のシール面３からの離間を止めてもよい。   In the above embodiment, the valve plate 6 is supported by the stopper 7 so that the valve plate 6 is not separated from the seal surface 3 to some extent. The stopper 7 is omitted, and the valve plate 6 is sealed within a range in which the gap between the valve plate 6 and the seal surface 3 can be sealed by the protrusion of the seal members 8 and 20 only by thrust applied by the cylinder or the like to the valve plate 6, for example. The separation from the surface 3 may be stopped.

・上記実施形態では、弁板６にＯリング９を設け、正圧時には、このＯリング９により弁板６とシール面３とのクリアランスをシールするようにしていた。こうした正圧時のシールをＯリング９以外のシール部材を用いて行うようにしても良い。またＯリング９等のシール部材を省略して、突出が解除された状態のシール材８、２０だけで正圧時のシールを行っても良い。   In the above embodiment, the O-ring 9 is provided on the valve plate 6, and the clearance between the valve plate 6 and the seal surface 3 is sealed by the O-ring 9 at the time of positive pressure. Such positive pressure sealing may be performed using a seal member other than the O-ring 9. Alternatively, the sealing member such as the O-ring 9 may be omitted, and the sealing at the positive pressure may be performed only with the sealing materials 8 and 20 in a state where the protrusion is released.

・上記実施形態では、弁板６にシール材８、２０を配設するようにしていたが、弁板６が押し付けられるシール面３にシール材８、２０を設けるようにしても良い。また、Ｏリング９をシール面３に設けてもよい。   In the above embodiment, the sealing materials 8 and 20 are disposed on the valve plate 6, but the sealing materials 8 and 20 may be provided on the sealing surface 3 against which the valve plate 6 is pressed. An O-ring 9 may be provided on the seal surface 3.

・上記実施形態では、弁板６をシリンダーにより駆動させるようにしていたが、モーター等、他の推力発生装置で弁板６を駆動するようにしても良い。
・上記実施形態では、回動により連通孔２を塞ぐ位置へと移動するように弁板６が構成されていたが、スライドにより連通孔２を塞ぐ位置へと移動するように弁板６が構成されてもよい。In the above embodiment, the valve plate 6 is driven by the cylinder, but the valve plate 6 may be driven by another thrust generating device such as a motor.
In the above embodiment, the valve plate 6 is configured to move to a position where the communication hole 2 is closed by rotation, but the valve plate 6 is configured to move to a position where the communication hole 2 is closed by sliding. May be.

・上記実施形態では、真空装置において大気圧と真空とを仕切る弁として本発明に係る逆圧対応仕切弁を構成した場合について説明したが、本発明の逆圧対応仕切弁は、それ以外の用途にも適用することができる。要は、内圧の高さの関係が逆転することのある２つのチャンバーを仕切る任意の弁に、本発明の逆圧対応仕切弁を適用することが可能である。   In the above embodiment, a case has been described in which the counter pressure corresponding gate valve according to the present invention is configured as a valve for partitioning the atmospheric pressure and the vacuum in the vacuum device, but the counter pressure corresponding gate valve of the present invention is used for other purposes. It can also be applied to. In short, it is possible to apply the counter pressure corresponding gate valve of the present invention to any valve that partitions two chambers in which the relationship of the height of the internal pressure may be reversed.

・上記実施形態では、弁部６、弁部６の駆動機構（回動軸５）、およびストッパー７は第２真空チャンバー４内に配置されるものであったが、それらは第１真空チャンバー１内に配置されてもよい。   In the above embodiment, the valve unit 6, the driving mechanism (rotating shaft 5) of the valve unit 6, and the stopper 7 are arranged in the second vacuum chamber 4. It may be arranged inside.

Claims (6)

第１の内圧を有する第１のチャンバーと第２の内圧を有する第２のチャンバーとを仕切る逆圧対応仕切弁であって、
前記第１及び第２のチャンバーを連通する連通孔を有するシール面と、
前記シール面に対する押し付けに応じて前記連通孔を塞ぐ弁板であって、前記第１のチャンバーが前記シール面に対向する前記弁板の前面側に位置し、前記第２のチャンバーが前記弁板の後背側に位置する前記弁板と、
前記シール面と前記弁板とのいずれか一方から他方に向けて突出するとともに、その突出を解除可能に設けられて、その突出に応じて前記シール面と前記弁板とのクリアランスをシールするシール材と、を備え、
前記第１の内圧及び前記第２の内圧は、大気圧と真空とのいずれかであり、
前記シール材は、前記第１の内圧が前記第２の内圧よりも高いときに前記第１の内圧と前記大気圧との差圧に応じて自動的に突出し、前記第１の内圧が前記第２の内圧よりも低いときに前記差圧に応じて自動的に突出を解除するように構成されていることを特徴とする逆圧対応仕切弁。 A gate valve for counter pressure that partitions a first chamber having a first internal pressure and a second chamber having a second internal pressure,
A seal surface having a communication hole communicating the first and second chambers;
A valve plate that closes the communication hole in response to pressing against the seal surface, wherein the first chamber is located on the front side of the valve plate facing the seal surface, and the second chamber is the valve plate The valve plate located on the back side of
A seal that protrudes from one of the seal surface and the valve plate toward the other and that can be released, and seals the clearance between the seal surface and the valve plate according to the protrusion. With materials,
The first internal pressure and the second internal pressure are either atmospheric pressure or vacuum,
The sealing material automatically protrudes according to a differential pressure between the first internal pressure and the atmospheric pressure when the first internal pressure is higher than the second internal pressure, and the first internal pressure is A gate valve for counter pressure, which is configured to automatically release the protrusion according to the differential pressure when the pressure is lower than the internal pressure of 2. 前記シール材は、進退可能に設けられ、前記逆圧対応仕切弁はさらに、前記シール材の後背に形成されて大気に開放された圧力室を備えており、
前記シール材は、前記圧力室への前記大気圧の印加に応じて進出することで突出し、同圧力室への前記大気圧の除荷に応じて後退することでその突出を解除する、請求項１に記載の逆圧対応仕切弁。 The sealing material is provided so as to be able to advance and retreat, and the counter pressure corresponding gate valve further includes a pressure chamber formed at the back of the sealing material and opened to the atmosphere .
The sealing material, releasing the protrusion by retracting in response to unloading of said air pressure protrude by entering, in the same pressure chamber in response to application of said air pressure to said pressure chamber, claim The gate valve for counter pressure as described in 1 . 前記シール材は、その断面形状を変化させることで突出する、請求項１に記載の逆圧対応仕切弁。 The gate valve for counter pressure according to claim 1, wherein the sealing material protrudes by changing its cross-sectional shape. 前記シール材は、中空の弾性体にて形成されて中空内が大気に開放され、該中空内への前記大気圧の印加により膨張することでその断面形状を変化させる、請求項３に記載の逆圧対応仕切弁。 The sealing member is formed by a hollow elastic body within the hollow is opened to the atmosphere, the cross-sectional shape is changed by expanding the application of the atmospheric pressure to the hollow inside of claim 3 Counter pressure gate valve. 前記シール面と前記弁板とのいずれか一方に設けられ、前記第１の内圧が前記第２の内
圧よりも低いときに前記シール面と前記弁板とのクリアランスをシールする第２のシール材をさらに備える請求項１〜４のいずれか一項に記載の逆圧対応仕切弁。 Wherein either provided on one sealing surface and said valve plate, a second sealing member for sealing the clearance of the sealing surface and said valve plate when said first pressure is lower than the second pressure The reverse pressure gate valve according to any one of claims 1 to 4 , further comprising: 前記シール面から離間する方向への前記弁板の変位を止めるストッパーをさらに備える請求項１〜５のいずれか１項に記載の逆圧対応仕切弁。 The gate valve for counter pressure according to any one of claims 1 to 5 , further comprising a stopper for stopping displacement of the valve plate in a direction away from the seal surface.
JP2011535332A 2009-10-06 2010-09-22 Reverse pressure gate valve Active JP5490813B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011535332A JP5490813B2 (en) 2009-10-06 2010-09-22 Reverse pressure gate valve

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009232604 2009-10-06
JP2009232604 2009-10-06
PCT/JP2010/066396 WO2011043189A1 (en) 2009-10-06 2010-09-22 Gate valve compatible with adverse pressure
JP2011535332A JP5490813B2 (en) 2009-10-06 2010-09-22 Reverse pressure gate valve

Publications (2)

Publication Number Publication Date
JPWO2011043189A1 JPWO2011043189A1 (en) 2013-03-04
JP5490813B2 true JP5490813B2 (en) 2014-05-14

Family

ID=43856657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011535332A Active JP5490813B2 (en) 2009-10-06 2010-09-22 Reverse pressure gate valve

Country Status (3)

Country Link
JP (1) JP5490813B2 (en)
TW (1) TWI407031B (en)
WO (1) WO2011043189A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101341431B1 (en) * 2012-03-02 2014-01-02 주식회사 에스에프에이 Gate valve and vacuum processing apparatus having the same
JP6150388B2 (en) * 2013-06-05 2017-06-21 入江工研株式会社 Gate valves and chambers
CN103644308B (en) * 2013-12-17 2016-04-13 中冶京诚工程技术有限公司 Air seal offset type bell valve
TW201823613A (en) 2016-08-22 2018-07-01 美商應用材料股份有限公司 Vacuum chamber having inflatable seal
CN114389185B (en) * 2022-03-07 2022-11-08 深圳市众视通线材有限公司 High power maintenance case of security

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve
JPS6062664U (en) * 1983-10-07 1985-05-01 日立造船株式会社 Butterfly valve seal structure
JPS61104863U (en) * 1984-12-17 1986-07-03
JPS62166372U (en) * 1986-04-10 1987-10-22
JPH01261573A (en) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd Vacuum sluice valve
JPH05215249A (en) * 1992-02-05 1993-08-24 Ulvac Seiki Kk Gate valve for vacuum equipment
JP2010092523A (en) * 2008-10-06 2010-04-22 Showa Denko Kk Inline deposition device, method of manufacturing magnetic recording medium, and gate valve
JP2011012531A (en) * 2009-06-02 2011-01-20 Sekisui Chem Co Ltd Vacuum valve and vacuum valve control system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve
JPS6062664U (en) * 1983-10-07 1985-05-01 日立造船株式会社 Butterfly valve seal structure
JPS61104863U (en) * 1984-12-17 1986-07-03
JPS62166372U (en) * 1986-04-10 1987-10-22
JPH01261573A (en) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd Vacuum sluice valve
JPH05215249A (en) * 1992-02-05 1993-08-24 Ulvac Seiki Kk Gate valve for vacuum equipment
JP2010092523A (en) * 2008-10-06 2010-04-22 Showa Denko Kk Inline deposition device, method of manufacturing magnetic recording medium, and gate valve
JP2011012531A (en) * 2009-06-02 2011-01-20 Sekisui Chem Co Ltd Vacuum valve and vacuum valve control system

Also Published As

Publication number Publication date
JPWO2011043189A1 (en) 2013-03-04
TW201116745A (en) 2011-05-16
TWI407031B (en) 2013-09-01
WO2011043189A1 (en) 2011-04-14

Similar Documents

Publication Publication Date Title
JP5490813B2 (en) Reverse pressure gate valve
US6796545B2 (en) Poppet valve seal mechanism
JP6358727B1 (en) Gate valve
JP5378526B2 (en) Gate valve
US20070057214A1 (en) Valve for essentially gastight closing a flow path
JP2007333209A (en) Vacuum valve
TWI320832B (en) Slide valve
JP2010038308A (en) Gate valve device
JP5613087B2 (en) Gate valve
US3043469A (en) Device for providing a seal for a hollow body containing a pressurized fluid
JP2007170437A (en) Vacuum gate valve
GB2041497A (en) Gate valve
JP6384246B2 (en) Pneumatically operated valve
CN210178930U (en) Gas spring mechanical seal
JP2000283361A (en) Extremely low resistance sliding type seal structure with o-ring
JP5481079B2 (en) Gate valve and gate valve opening and closing method
US6761555B2 (en) Device for automatically producing an opening or cavity in the side of a ceramic product during molding in a mould
JP6562334B1 (en) Gate valve
CN205841552U (en) A kind of clutch actuator piston and the sealing structure of housing
CN210890124U (en) Low-temperature valve
JP2000145980A (en) Gate valve
US6199870B1 (en) Seal
JPH0463270B2 (en)
JP2001516430A (en) High pressure piston seal
KR20230013300A (en) Structure for pipe connection

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130906

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20140212

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20140226

R150 Certificate of patent or registration of utility model

Ref document number: 5490813

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250