JP5488444B2 - Radiation temperature control device - Google Patents

Radiation temperature control device Download PDF

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JP5488444B2
JP5488444B2 JP2010282063A JP2010282063A JP5488444B2 JP 5488444 B2 JP5488444 B2 JP 5488444B2 JP 2010282063 A JP2010282063 A JP 2010282063A JP 2010282063 A JP2010282063 A JP 2010282063A JP 5488444 B2 JP5488444 B2 JP 5488444B2
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JP2012127624A (en
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憲司 泉
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Nihon Spindle Manufacturing Co Ltd
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Description

本発明は、ブース内に配設された輻射パネル内に流体を循環供給してブース内を輻射温調する輻射温調手段を備えた輻射温調装置に関する。   The present invention relates to a radiation temperature adjusting device including a radiation temperature adjusting means for circulatingly supplying a fluid into a radiation panel disposed in a booth to adjust the temperature of the inside of the booth.

従来から、電子顕微鏡等の精密機器による各種作業は、周囲温度等の環境からの影響により、その計測精度や運転状態が悪影響を受ける場合があることから、通常、精密機器が配設されるブース内の温度を所定温度に温調する温調装置が採用される。
このような温調装置として、温調された空気をブース内に送り込んで当該ブース内を所定温度に温調する送風式の温調装置がある。しかしながら、この送風式の温調装置では、ブース内に空気を送り込むため、当該ブース内には空気の対流が発生して、精密機器の計測精度や運転状態に悪影響を与えてしまう場合がある。
そのため、ブース内の空気の流れを極力発生させないようにしながら、温調を行う温調装置として、ブース内に輻射パネルを配設し当該輻射パネルに流体を通流させることで、当該流体からの輻射によりブース内の空気を温調する輻射温調装置が提案されている。 Traditionally, various operations using precision instruments such as electron microscopes can be adversely affected by environmental effects such as ambient temperature, so the measurement accuracy and operating conditions may be adversely affected. A temperature control device that adjusts the temperature inside to a predetermined temperature is employed.
As such a temperature control device, there is a blow-type temperature control device that sends temperature-controlled air into a booth and controls the temperature inside the booth to a predetermined temperature. However, in this air temperature control device, since air is sent into the booth, air convection occurs in the booth, which may adversely affect the measurement accuracy and operating state of precision equipment.
Therefore, as a temperature control device that controls the temperature while preventing the flow of air in the booth as much as possible, a radiant panel is arranged in the booth and the fluid is allowed to flow through the radiant panel. There has been proposed a radiation temperature control device that controls the temperature of air in a booth by radiation.

一方で、例えば、特許文献１に開示の温調装置では、熱源器にて温調された空気を、ブース内に直接送風する構成と、ブースの天井部に配設された輻射パネル内に送風する構成との両方を備えることが開示されている。そして、室内負荷が大きい起動時には、温調された空気をブース内に直接送風させる送風式の温調を行い、室内負荷が小さくなると、温調された空気を輻射パネル内に通流させ、輻射パネルからの輻射により輻射温調を行うように構成されている。   On the other hand, for example, in the temperature control device disclosed in Patent Document 1, the air temperature-controlled by the heat source device is directly blown into the booth, and the air is blown into the radiation panel disposed on the ceiling of the booth. It is disclosed that both are included. When the indoor load is high, the air temperature is controlled by blowing air to the booth directly, and when the indoor load is small, the temperature-controlled air is passed through the radiant panel. The radiation temperature is adjusted by radiation from the panel.

特開平６−２０１１５４号公報JP-A-6-201154

しかしながら、特許文献１に開示の温調装置では、温調された空気を、ブース内に直接送風する構成と、ブースの天井部に配設された輻射パネル内に送風する構成との両方を備えるため、構造が複雑となりやすく、コストの上昇、設置スペースの増加、装置の大型化等の問題が生じる。   However, the temperature control device disclosed in Patent Document 1 has both a configuration in which the temperature-controlled air is directly blown into the booth and a configuration in which the air is blown into the radiation panel disposed on the ceiling of the booth. Therefore, the structure tends to be complicated, and problems such as an increase in cost, an increase in installation space, and an increase in the size of the apparatus occur.

一方で、送風式の温調装置では、上述のとおり、精密機器の運転状態等に悪影響を与えかねないので、輻射温調装置を採用することが好ましいが、輻射温調装置では、基本的に、輻射パネルからの輻射により伝熱する構成であるため、ブース内の空気温度の上昇は非常に遅くなる。そのため、輻射温調装置の起動時には、ブース内の空気温度が空気用目標設定温度となるまでに、非常に長い時間（例えば、２４時間程度以上）が必要となるという問題がある。また、このように長い時間輻射温調する場合には、起動における輻射温調手段の運転のために余分なエネルギーが必要となる。   On the other hand, as described above, since the air temperature control device may adversely affect the operation state of the precision instrument, it is preferable to employ the radiation temperature control device. Since the structure is such that heat is transferred by radiation from the radiation panel, the rise in the air temperature in the booth becomes very slow. Therefore, at the time of starting the radiation temperature control device, there is a problem that a very long time (for example, about 24 hours or more) is required until the air temperature in the booth becomes the target temperature for air. Further, when adjusting the radiation temperature for such a long time, extra energy is required for the operation of the radiation temperature adjusting means at the start-up.

本発明は、かかる事情に鑑みてなされたものであり、その目的は、輻射温調手段の起動運転において、簡便な構成で、ブース内の空気温度をより短い時間で空気用目標設定温度に収束するように安定させ、省エネを実現できる輻射温調装置を提供することにある。   The present invention has been made in view of such circumstances, and its purpose is to converge the air temperature in the booth to the air target set temperature in a shorter time with a simple configuration in the startup operation of the radiation temperature adjusting means. An object of the present invention is to provide a radiation temperature control device that can stabilize and realize energy saving.

上記目的を達成するための本発明に係る輻射温調装置は、ブース内に配設された輻射パネル内に流体を循環供給して前記ブース内を輻射温調する輻射温調手段と、前記輻射温調手段の運転を制御する制御手段とを備えた輻射温調装置であって、その特徴構成は、
前記ブースが、天井部と側壁部とを備えて構成され、
前記ブース内の空気を前記輻射パネルの外表面に送風する送風手段を、前記ブース内に配設し、
板状の前記輻射パネルが、前記側壁部に沿って配設されるとともに、前記送風手段が前記輻射パネルと前記側壁部との間に配設され、
前記輻射温調手段の起動運転において、前記制御手段が、前記輻射温調手段を働かせて前記ブース内を輻射温調するとともに、前記送風手段を働かせて、前記送風手段により送風される空気を前記輻射パネルの外表面に吹付けて、当該空気と前記輻射パネル内の流体との間で熱交換させ、当該空気の対流により前記ブース内を温調する点にある。 In order to achieve the above object, a radiation temperature control device according to the present invention comprises a radiation temperature control means for circulating and supplying a fluid to a radiation panel disposed in a booth to adjust the radiation temperature in the booth, and the radiation A radiation temperature control device comprising a control means for controlling the operation of the temperature control means, the characteristic configuration is:
The booth is configured with a ceiling part and a side wall part,
Blower means for blowing air in the booth to the outer surface of the radiation panel is disposed in the booth,
The plate-like radiation panel is disposed along the side wall portion, and the air blowing means is disposed between the radiation panel and the side wall portion,
In the start-up operation of the radiant temperature adjusting means, the control means operates the radiant temperature adjusting means to adjust the radiant temperature inside the booth, and the air blowing means operates the air blown by the air blowing means. It is in the point which sprays on the outer surface of a radiation panel, makes it heat-exchange between the said air and the fluid in the said radiation panel, and temperature-controls the inside of the said booth by the convection of the said air.

上記特徴構成によれば、輻射温調手段の起動運転の際には、輻射パネルからの輻射により輻射温調を行うとともに、送風手段により送風されるブース内の空気を輻射パネルの外表面に吹付けて、当該空気と輻射パネル内の流体との間で熱交換させ、当該空気の対流によりブース内の対流温調を行うことができる。
ここで、この輻射温調手段の輻射パネルから輻射されることによる伝熱及びブース内の空気が輻射パネルに接触することによる伝熱（輻射温調）のみでは、ブース内の空気温度を空気用目標設定温度に収束させるために非常に長い時間（例えば、２４時間程度以上）がかかる。そのため、この輻射温調手段を働かせるのと同時又は少し遅れた時期に、送風手段を働かせることで、送風手段により送風されるブース内の空気を輻射パネルの外表面に吹付けて、当該空気と輻射パネル内の流体との間で強制的に熱交換させ、輻射パネル内の流体が有する多くの熱（冷熱や温熱）を対流する空気によりブース内に伝熱させることができる（対流温調）。すなわち、単位時間当たりに、輻射温調のみで輻射パネルからブース内に供給される熱量よりも、輻射温調と対流温調とにより輻射パネルからブース内に供給される熱量の方が多くなり、輻射パネル内の流体が有する熱をより効率よくブース内の空気の温調に利用することができる。
これにより、ブース内に送風手段を設ける簡単な構成で、輻射温調手段の起動運転の際に、輻射温調手段と送風手段とを働かせるだけで、より短い時間（例えば、１２時間程度）でブース内の空気温度を空気用目標設定温度に収束させ安定化させることができる。また、起動運転の際の運転時間が短くなるので、省エネを図ることができる。
よって、輻射温調手段の運転の際に、簡便な構成で、ブース内の空気温度をより短い時間で空気用目標設定温度に収束するように安定させ、省エネを実現できる。
更に、ブースが内部空間に外部から空気等が侵入しないように天井部と側壁部とを備えて形成され、この側壁部に沿って板状の輻射パネルが配設されるとともに、送風手段が、輻射パネルと側壁部との間に配設されている。この送風手段の配設場所は、輻射パネルから輻射され伝熱される熱（冷熱や温熱）が滞留し易い場所（輻射パネルと側壁部との間）である。この配設場所で送風手段が輻射パネルの外表面にブース内の空気を吹付けて対流させることで、輻射パネル内の流体が有する多くの熱（冷熱や温熱）を対流する空気によりブース内に伝熱させることができる（対流温調）とともに、輻射パネルと側壁部との間に滞留する熱（冷熱や温熱）も当該対流する空気によりブース内に伝熱させることができる。
よって、輻射パネル内の流体が有するより多くの熱量（冷熱や温熱）を対流する空気によりブース内に伝熱させ、輻射パネル内の流体が有する熱をより一層効率よくブース内の空気の温調に利用することができる。 According to the above characteristic configuration, when the radiation temperature adjusting means is activated, the radiation temperature is adjusted by radiation from the radiation panel, and the air in the booth blown by the blowing means is blown to the outer surface of the radiation panel. In addition, heat can be exchanged between the air and the fluid in the radiation panel, and convection temperature control in the booth can be performed by convection of the air.
Here, only the heat transfer by radiation from the radiation panel of the radiation temperature control means and the heat transfer by the air in the booth contacting the radiation panel (radiation temperature control), the air temperature in the booth is used for air. It takes a very long time (for example, about 24 hours or more) to converge to the target set temperature. For this reason, by operating the air blowing means at the same time as the radiation temperature adjusting means is activated or slightly delayed, the air in the booth blown by the air blowing means is blown to the outer surface of the radiation panel, and the air and Heat can be forcibly exchanged with the fluid in the radiant panel, and the heat in the fluid in the radiant panel can be transferred to the booth by the convection air (convection temperature control). . That is, the amount of heat supplied from the radiant panel to the booth by the radiant temperature control and the convection temperature control is larger than the amount of heat supplied from the radiant panel to the booth by only the radiant temperature control per unit time. The heat of the fluid in the radiant panel can be used more efficiently for temperature control of the air in the booth.
Thus, with a simple configuration in which the air blowing means is provided in the booth, the radiation temperature adjusting means and the air blowing means can be operated in a shorter time (for example, about 12 hours) when the radiation temperature adjusting means is activated. The air temperature in the booth can be converged and stabilized at the target temperature for air. In addition, since the operation time during the start-up operation is shortened, energy saving can be achieved.
Therefore, when the radiation temperature adjusting means is operated, the air temperature in the booth can be stabilized so as to converge to the air target set temperature in a shorter time with a simple configuration, thereby realizing energy saving.
Furthermore, the booth is formed with a ceiling part and a side wall part so that air or the like does not enter the internal space from the outside, a plate-like radiation panel is disposed along the side wall part, and the air blowing means, It is arrange | positioned between the radiation panel and the side wall part. The place where the air blowing means is disposed is a place (between the radiation panel and the side wall) where heat (cold heat or heat) radiated from the radiation panel and transferred is likely to stay. The air blower blows the air in the booth onto the outer surface of the radiant panel at this location and causes convection, so that the air in the radiant panel has a lot of heat (cold or hot) in the booth. In addition to being able to transfer heat (convection temperature control), heat (cold heat and hot heat) staying between the radiant panel and the side wall can be transferred to the booth by the convection air.
Therefore, the heat in the booth is transferred to the booth by convection air with a larger amount of heat (cold or hot) of the fluid in the radiant panel, and the heat of the fluid in the radiant panel is more efficiently controlled. Can be used.

本発明に係る輻射温調装置の更なる特徴構成は、前記ブース内の空気の空気温度を検出する空気温度検出手段を備え、
前記輻射温調手段の起動運転において、前記空気温度検出手段により検出された空気温度が空気用目標設定温度となった場合に、前記制御手段が、前記送風手段を停止させる点にある。 A further characteristic configuration of the radiation temperature control device according to the present invention includes an air temperature detecting means for detecting an air temperature of the air in the booth,
In the starting operation of the radiation temperature adjusting means, the control means stops the air blowing means when the air temperature detected by the air temperature detecting means reaches the target set temperature for air.

上記特徴構成によれば、輻射温調手段の起動運転において、空気温度が空気用目標設定温度となった場合には、制御手段が、輻射温調手段の運転を継続させつつ、送風手段を停止させる。これにより、起動運転から通常運転（輻射温調）に変更され、ブース内を輻射温調のみで温調することとなり、空気温度を空気用目標設定温度に収束させ安定させた状態を維持することができる。   According to the above characteristic configuration, in the start-up operation of the radiation temperature adjusting means, when the air temperature reaches the target set temperature for air, the control means stops the air blowing means while continuing the operation of the radiation temperature adjusting means. Let As a result, the start-up operation is changed to the normal operation (radiation temperature control), and the inside of the booth is controlled only by the radiation temperature control, and the air temperature is converged to the target set temperature for air and maintained in a stable state. Can do.

本発明に係る輻射温調装置の更なる特徴構成は、前記ブース内の空気の空気温度を検出する空気温度検出手段を備え、
前記輻射温調手段の起動運転において、前記制御手段が、前記空気温度検出手段により検出された空気温度と空気用目標設定温度との偏差が大きい場合には、前記輻射パネル内に循環供給される流体の流体用目標設定温度と空気用目標設定温度との温度差が大きくなるように流体用目標設定温度を設定し、前記空気温度と空気用目標設定温度との偏差が小さい場合には、流体用目標設定温度と空気用目標設定温度との温度差が小さくなるように流体用目標設定温度を設定する点にある。 A further characteristic configuration of the radiation temperature control device according to the present invention includes an air temperature detecting means for detecting an air temperature of the air in the booth,
In the start-up operation of the radiation temperature adjusting means, when the deviation between the air temperature detected by the air temperature detecting means and the air target set temperature is large, the control means is circulated and supplied into the radiation panel. When the fluid target set temperature is set so that the temperature difference between the fluid target set temperature and the air target set temperature is large, and the deviation between the air temperature and the air target set temperature is small, the fluid The target set temperature for fluid is set so that the temperature difference between the target set temperature for air and the target set temperature for air becomes small.

上記特徴構成によれば、制御手段が、空気温度（例えば、３０℃）と空気用目標設定温度（例えば、２０〜２２℃）との偏差が大きい場合（室内負荷が大きい場合（例えば、偏差が８〜１０℃））には、流体の流体用目標設定温度と空気用目標設定温度（例えば、２０〜２２℃）との温度差が大きくなるように流体用目標設定温度（例えば、１０℃）を設定し、空気用目標設定温度（例えば、２０〜２２℃）に対して大きな温度差（例えば、１０〜１２℃）を備えた流体用目標設定温度（例えば、１０℃）となった流体が、輻射パネルにより循環供給される。
また、制御手段が、空気温度（例えば、２５℃）と空気用目標設定温度（例えば、２０〜２２℃）との偏差が小さい場合（室内負荷が小さい場合（例えば、偏差が３〜５℃））には、流体用目標設定温度と空気用目標設定温度（例えば、２０〜２２℃）との温度差が小さくなるように流体用目標設定温度（例えば、１５〜１８℃）を設定し、空気用目標設定温度（例えば、２０〜２２℃）に対して小さな温度差（例えば、２〜７℃）を備えた流体用目標設定温度（例えば、１５〜１８℃）となった流体が、輻射パネルにより循環供給される。
なお、上記偏差が大きい場合及び小さい場合のいずれの場合も、流体用目標設定温度は、検出された空気温度からみて空気用目標設定温度の反対側の温度（冷房運転の場合には空気用目標設定温度の低温側の温度、暖房運転の場合には空気用目標設定温度の高温側の温度）に設定される。
これにより、ブース内の室内負荷が大きい場合には、高い熱量（冷熱量又は温熱量）を備えた流体によりブース内の迅速な輻射温調ができ、これに対して室内負荷が小さい場合には、低い熱量（冷熱量又は温熱量）を備えた流体によりブース内を輻射温調して、空気用目標設定温度に収束し安定させることができる。
また、室内負荷が大きい場合に、より迅速な輻射温調ができるので、輻射温調手段の起動運転における運転時間を低減することができ、省エネを図ることができる。 According to the above characteristic configuration, when the control means has a large deviation between the air temperature (for example, 30 ° C.) and the air target set temperature (for example, 20 to 22 ° C.) (when the indoor load is large (for example, the deviation is 8 to 10 ° C)), the fluid target set temperature (for example, 10 ° C) so that the temperature difference between the fluid target set temperature and the air target set temperature (for example, 20 to 22 ° C) becomes large. The fluid having a target set temperature for fluid (for example, 10 ° C.) having a large temperature difference (for example, 10 to 12 ° C.) with respect to the target set temperature for air (for example, 20 to 22 ° C.) Circulated and supplied by the radiation panel.
Further, when the control means has a small deviation between the air temperature (for example, 25 ° C.) and the air target set temperature (for example, 20 to 22 ° C.) (when the indoor load is small (for example, the deviation is 3 to 5 ° C.)). ), The target set temperature for fluid (for example, 15 to 18 ° C.) is set so that the temperature difference between the target set temperature for fluid and the target set temperature for air (for example, 20 to 22 ° C.) becomes small. The fluid having a target set temperature for fluid (for example, 15 to 18 ° C.) having a small temperature difference (for example, 2 to 7 ° C.) with respect to the target set temperature (for example, 20 to 22 ° C.) Is circulated and supplied.
In both cases where the deviation is large and small, the fluid target set temperature is the temperature on the opposite side of the air target set temperature from the detected air temperature (in the case of cooling operation, the air target set temperature). The temperature is set to the low temperature side of the set temperature, or to the high temperature side of the target set temperature for air in the case of heating operation.
As a result, when the indoor load in the booth is large, a rapid radiation temperature control in the booth can be performed with a fluid having a high amount of heat (cold heat amount or heat amount). On the other hand, when the indoor load is small The inside of the booth can be radiantly temperature-controlled with a fluid having a low amount of heat (cold heat amount or warm heat amount), and can be converged and stabilized at the target set temperature for air.
Further, since the radiation temperature can be adjusted more quickly when the indoor load is large, the operation time in the startup operation of the radiation temperature adjusting means can be reduced, and energy saving can be achieved.

輻射温調装置を備えた輻射温調システムの概略構成図Schematic configuration diagram of a radiation temperature control system equipped with a radiation temperature control device 起動運転及び通常運転における空気温度、空気用目標設定温度、流体温度、流体用目標設定温度、送風ファンの運転状態を示す概念図Conceptual diagram showing air temperature, target set temperature for air, fluid temperature, target set temperature for fluid, and operating state of blower fan in start-up operation and normal operation 制御部による温調制御の概略作動フロー図Schematic operation flow diagram of temperature control by the control unit

本発明に係る輻射温調装置Ｅを備えた輻射温調システムＤについて、図１〜図３を参照しながら説明する。   The radiation temperature control system D provided with the radiation temperature control apparatus E which concerns on this invention is demonstrated referring FIGS. 1-3.

輻射温調システムＤは、図１に示すように、電子顕微鏡Ｆ（精密機器の一例）が収容されるブース１と、輻射温調装置Ｅとを備えて構成される。
輻射温調装置Ｅは、ブース１内に配設された輻射パネル２ａ内に流体Ｑ（例えば、水）を循環供給してブース１内の空気Ｐを輻射温調する輻射温調手段２と、輻射パネル２ａ内に供給される流体Ｑの流体温度Ｑ１を検出する流体用温度センサ３（流体温度検出手段の一例）と、ブース１内の空気Ｐの空気温度Ｐ１を検出する空気用温度センサ４（空気温度検出手段の一例）と、輻射温調手段２等の運転を制御する制御部５（制御手段の一例）と、ブース１内の空気Ｐを輻射パネル２ａの外表面に送風する送風ファン２０（送風手段の一例）とを備える。なお、図示を省略するが、制御部５にはブース１内の空気用目標設定温度Ｐ２及び流体用目標設定温度Ｑ２等を設定可能で、設定された各種情報を記憶可能な記憶部を備えている。
以下では、ブース１、輻射温調装置Ｅ、送風ファン２０の構成を説明した後、輻射温調装置Ｅの運転（起動運転、通常運転）について説明する。 As shown in FIG. 1, the radiation temperature adjustment system D includes a booth 1 in which an electron microscope F (an example of a precision instrument) is accommodated, and a radiation temperature adjustment device E.
The radiant temperature control device E circulates and supplies a fluid Q (for example, water) in a radiant panel 2a disposed in the booth 1, and radiates the temperature of the air P in the booth 1 to adjust the radiant temperature. A fluid temperature sensor 3 (an example of fluid temperature detection means) that detects a fluid temperature Q1 of the fluid Q supplied into the radiation panel 2a, and an air temperature sensor 4 that detects an air temperature P1 of the air P in the booth 1. (An example of air temperature detection means), a control unit 5 (an example of control means) for controlling the operation of the radiation temperature adjusting means 2 and the like, and a blower fan for blowing the air P in the booth 1 to the outer surface of the radiation panel 2a 20 (an example of a blowing means). Although not shown, the control unit 5 includes a storage unit that can set the target set temperature P2 for air and the target set temperature Q2 for fluid in the booth 1 and can store various set information. Yes.
Below, after explaining the configuration of the booth 1, the radiation temperature control device E, and the blower fan 20, the operation (startup operation, normal operation) of the radiation temperature control device E will be described.

ブース１は、図１に示すように、天井部１ａ及び側壁部１ｂを構成する壁面により囲繞されて概略立方体形状に形成されており、ブース１内の内部空間に外部から空気等が侵入しないように構成され、ブース１はクリーンルームとされている。ブース１内には、輻射温調装置Ｅから供給される流体Ｑからの輻射により、ブース１内の空気Ｐを温調する一対の板状の輻射パネル２ａが、互いに対向する状態で、それぞれ側壁部１ｂに沿って配設されている。ブース１の内部空間の底部には架台Ｇが配設され、当該架台Ｇ上に電子顕微鏡Ｆが載置された状態でブース１内に収容されている。   As shown in FIG. 1, the booth 1 is surrounded by wall surfaces constituting the ceiling part 1 a and the side wall part 1 b and is formed in a substantially cubic shape so that air or the like does not enter the internal space in the booth 1 from the outside. The booth 1 is a clean room. In the booth 1, a pair of plate-like radiation panels 2 a that regulate the temperature of the air P in the booth 1 by radiation from the fluid Q supplied from the radiation temperature control device E are side walls in a state of facing each other. Arranged along the portion 1b. A gantry G is disposed at the bottom of the internal space of the booth 1, and the electron microscope F is placed on the gantry G and is accommodated in the booth 1.

ブース１内には、ブース１内の空気Ｐの空気温度Ｐ１を検出する空気用温度センサ４が配設されている。空気用温度センサ４により検出された空気温度Ｐ１は、輻射温調装置Ｅの制御部５に入力される構成となっている。   In the booth 1, an air temperature sensor 4 for detecting the air temperature P1 of the air P in the booth 1 is disposed. The air temperature P1 detected by the air temperature sensor 4 is input to the control unit 5 of the radiation temperature control device E.

輻射温調装置Ｅの輻射温調手段２は、圧縮機１０、凝縮器１１、第１電磁弁１４、膨張弁１２、蒸発器１３（冷却手段の一例）の順に冷媒Ａ（図中点線矢印参照）を循環させる冷凍回路Ｃを備えて構成されている。蒸発器１３は、膨張された冷媒Ａと流体Ｑとを熱交換させて流体Ｑを冷却させるように構成されている。膨張弁１２は、冷凍回路Ｃを通流する冷媒Ａの流量を調整自在で、当該冷媒Ａを膨張可能に構成されている。また、第１電磁弁１４は、冷凍回路Ｃを通流する冷媒Ａの断続、すなわち、当該冷媒Ａの通流の停止状態と通流状態とに切換できるように構成されている。なお、第１電磁弁１４を、冷媒Ａの通流状態では当該冷媒Ａの流量を調整可能な構成としてもよい。   The radiant temperature control means 2 of the radiant temperature control apparatus E is a refrigerant A (refer to the dotted line arrow in the figure) in the order of the compressor 10, the condenser 11, the first electromagnetic valve 14, the expansion valve 12, and the evaporator 13 (an example of a cooling means). ) Is circulated in a refrigeration circuit C. The evaporator 13 is configured to cool the fluid Q by exchanging heat between the expanded refrigerant A and the fluid Q. The expansion valve 12 is configured such that the flow rate of the refrigerant A flowing through the refrigeration circuit C can be adjusted and the refrigerant A can be expanded. Further, the first solenoid valve 14 is configured to be able to switch between the intermittent state of the refrigerant A flowing through the refrigeration circuit C, that is, the stopped state and the flowing state of the refrigerant A. Note that the first electromagnetic valve 14 may be configured such that the flow rate of the refrigerant A can be adjusted when the refrigerant A is flowing.

冷凍回路Ｃには、圧縮機１０と凝縮器１１との間から分岐される分岐冷凍回路Ｃ１が設けられている。
分岐冷凍回路Ｃ１は、冷媒Ａを圧縮機１０と凝縮器１１との間から分岐させて、冷凍回路Ｃにおける膨張弁１２と蒸発器１３との間に戻すように構成されている。分岐冷凍回路Ｃ１には、冷媒Ａの流れ方向の上流側から順に、蒸発器１３にて冷却された流体Ｑを、分岐冷凍回路Ｃ１を通流する冷媒Ａと熱交換させて、流体Ｑを加熱する再熱器１５、分岐冷凍回路Ｃ１を通流する冷媒Ａの断続、すなわち、当該冷媒Ａの通流の停止状態と通流状態とに切換できるように構成された第２電磁弁１６が配設されている。第２電磁弁１６を、冷媒Ａの通流状態では当該冷媒Ａの流量を調整可能な構成としてもよい。なお、分岐冷凍回路Ｃ１では、冷凍回路Ｃの蒸発器１３及び圧縮機１０を共用している。 The refrigeration circuit C is provided with a branch refrigeration circuit C1 that branches from between the compressor 10 and the condenser 11.
The branch refrigeration circuit C1 is configured to branch the refrigerant A from between the compressor 10 and the condenser 11 and return it between the expansion valve 12 and the evaporator 13 in the refrigeration circuit C. In the branch refrigeration circuit C1, the fluid Q cooled by the evaporator 13 is heat-exchanged with the refrigerant A flowing through the branch refrigeration circuit C1 in order from the upstream side in the flow direction of the refrigerant A to heat the fluid Q. The second solenoid valve 16 is arranged so as to be able to switch between the intermittent state of the refrigerant A flowing through the branch refrigerating circuit C1 and the refrigerant A flowing through the branch refrigeration circuit C1, that is, the stopped state and the flowing state of the refrigerant A. It is installed. The second electromagnetic valve 16 may be configured such that the flow rate of the refrigerant A can be adjusted when the refrigerant A is flowing. In the branch refrigeration circuit C1, the evaporator 13 and the compressor 10 of the refrigeration circuit C are shared.

また、輻射温調手段２は、流体Ｑを、蒸発器１３、再熱器１５、電気ヒータ１７、送液ポンプ１８、輻射パネル２ａの入口及び出口、蒸発器１３の順に循環通流させる流体循環流路１９が設けられている。この流体循環流路１９に設けられた電気ヒータ１７は、公知の電気ヒータであり、流体循環流路１９を通流し、再熱器１５により加熱された流体Ｑをさらに加熱可能に構成されている。また、流体循環流路１９に設けられた送液ポンプ１８は、流体Ｑを流体循環流路１９に循環通流させる循環手段として機能する。この流体循環流路１９は、送液ポンプ１８の下流側と輻射パネル２ａの上流側との間で分岐しており、流体Ｑを一対の輻射パネル２ａにそれぞれ供給可能に構成され、それぞれの輻射パネル２ａの下流側と蒸発器１３の上流側との間で合流しており、一対の輻射パネル２ａから排出された流体Ｑを蒸発器１３側に通流可能に構成されている。   In addition, the radiation temperature adjusting means 2 is a fluid circulation that circulates the fluid Q in the order of the evaporator 13, the reheater 15, the electric heater 17, the liquid feed pump 18, the inlet and outlet of the radiation panel 2 a, and the evaporator 13. A flow path 19 is provided. The electric heater 17 provided in the fluid circulation channel 19 is a known electric heater, and is configured to be able to further heat the fluid Q that flows through the fluid circulation channel 19 and is heated by the reheater 15. . Further, the liquid feed pump 18 provided in the fluid circulation channel 19 functions as a circulation means for circulating the fluid Q through the fluid circulation channel 19. The fluid circulation channel 19 branches between the downstream side of the liquid feed pump 18 and the upstream side of the radiation panel 2a, and is configured to be able to supply the fluid Q to the pair of radiation panels 2a, respectively. It joins between the downstream side of the panel 2a and the upstream side of the evaporator 13, and it is comprised so that the fluid Q discharged | emitted from a pair of radiation panel 2a can flow to the evaporator 13 side.

この流体循環流路１９において送液ポンプ１８の下流側と一対の輻射パネル２ａの上流側（一対の輻射パネル２ａに分岐する箇所よりも上流側）との間には、一対の輻射パネル２ａに供給される流体Ｑの流体温度Ｑ１を検出する流体用温度センサ３が配設されている。流体用温度センサ３により検出された流体温度Ｑ１は、輻射温調装置Ｅの制御部５に入力される構成となっている。   In the fluid circulation channel 19, between the downstream side of the liquid feed pump 18 and the upstream side of the pair of radiation panels 2a (upstream side from the portion branched to the pair of radiation panels 2a), the pair of radiation panels 2a are connected. A fluid temperature sensor 3 for detecting the fluid temperature Q1 of the supplied fluid Q is disposed. The fluid temperature Q1 detected by the fluid temperature sensor 3 is configured to be input to the control unit 5 of the radiation temperature adjusting device E.

輻射パネル２ａは、公知の輻射パネルにより構成され、ブース１内に一対設けられて、例えば、板状の輻射パネル２ａ内に蛇行して配設された伝熱パイプ（図示せず）内を入口から出口に向かって流体Ｑが通流することにより、当該流体Ｑからの輻射（伝熱）によりブース１内の空気Ｐを温調することが可能に構成されている。   The radiation panel 2a is constituted by a known radiation panel, and is provided in a pair in the booth 1, for example, an inlet through a heat transfer pipe (not shown) meanderingly disposed in the plate-like radiation panel 2a. When the fluid Q flows from the outlet toward the outlet, the temperature of the air P in the booth 1 can be controlled by radiation (heat transfer) from the fluid Q.

制御部５は、公知の情報演算処理手段から構成され、圧縮機１０、膨張弁１２、第１電磁弁１４、第２電磁弁１６、電気ヒータ１７、送液ポンプ１８、送風ファン２０等の作動状態を制御し、冷媒Ａ、流体Ｑの流量や温度制御等が可能に構成されている。なお、制御部５には、各機器の作動状態に関する信号が、当該各機器から入力されるように構成されている。   The control unit 5 includes known information calculation processing means, and operates the compressor 10, the expansion valve 12, the first electromagnetic valve 14, the second electromagnetic valve 16, the electric heater 17, the liquid feed pump 18, the blower fan 20, and the like. The state is controlled, and the flow rate and temperature control of the refrigerant A and the fluid Q are possible. Note that the control unit 5 is configured to receive a signal related to the operating state of each device from each device.

送風ファン２０は、輻射パネル２ａの外表面にブース１内の空気Ｐを吹き付け、当該空気Ｐをブース１内に対流させることができる構成（例えば、軸流送風機や斜流送風機等）であればよいが、本実施形態では、プロペラファン（軸流送風機）により構成されている。送風ファン２０は、ブース１内において、ブース１の側壁部１ｂと輻射パネル２ａとの間に形成された間隙に配設されている。送風ファン２０の配設数については適宜設定可能であるが、本実施形態では、一対の輻射パネル２ａのそれぞれに２つの送風ファン２０が配設され、全体として４つの送風ファン２０が配設されている。なお、送風ファン２０は、輻射パネル２ａ、ブース１の側壁部１ｂや底部に固定配設される。また、送風ファン２０の運転は、制御部５からの信号により制御される。   The blower fan 20 is configured to blow the air P in the booth 1 onto the outer surface of the radiation panel 2a and convect the air P into the booth 1 (for example, an axial blower or a mixed flow blower). Although it is good, in this embodiment, it is comprised by the propeller fan (axial flow fan). The blower fan 20 is disposed in the booth 1 in a gap formed between the side wall 1b of the booth 1 and the radiation panel 2a. Although the number of the blower fans 20 can be set as appropriate, in the present embodiment, two blower fans 20 are disposed in each of the pair of radiation panels 2a, and four blower fans 20 are disposed as a whole. ing. The blower fan 20 is fixedly disposed on the radiation panel 2a, the side wall 1b and the bottom of the booth 1. The operation of the blower fan 20 is controlled by a signal from the control unit 5.

次に、輻射温調装置Ｅの運転方法について、図２及び図３を参照して、ブース１内を冷房する場合について説明する。
輻射温調装置Ｅの起動運転時（電子顕微鏡Ｆの作業開始前）には、ユーザが操作部（図示せず）を操作して輻射温調装置Ｅを起動させると共に（ステップ♯１）、ブース１内の空気Ｐの空気温度Ｐ１が当該電子顕微鏡Ｆの作業に最適な温度（空気用目標設定温度Ｐ２：例えば２０〜２２℃）となるように、当該空気用目標設定温度Ｐ２を入力して設定する（ステップ♯２）。なお、輻射温調装置Ｅの起動と同時に、制御部５が、予め設定された温度を記憶部（図示せず）から読み出して、空気用目標設定温度Ｐ２として用いてもよい。 Next, the operation method of the radiation temperature control apparatus E will be described with reference to FIGS. 2 and 3 in the case where the booth 1 is cooled.
During startup operation of the radiation temperature control device E (before the work of the electron microscope F is started), the user operates the operation unit (not shown) to start the radiation temperature control device E (step # 1), and the booth The air target set temperature P2 is input so that the air temperature P1 of the air P in 1 becomes an optimum temperature for the operation of the electron microscope F (target set temperature P2 for air: 20 to 22 ° C., for example). Set (step # 2). At the same time as the activation of the radiation temperature control device E, the control unit 5 may read a preset temperature from a storage unit (not shown) and use it as the air target set temperature P2.

そして、制御部５は、輻射パネル２ａ内に循環供給される流体Ｑの流体用目標設定温度Ｑ２を設定する。すなわち、制御部５は、図２に示すように、流体用目標設定温度Ｑ２と空気用目標設定温度Ｐ２との温度差Δｓである温度差Δｓ１が大きくなるように（温度差Δｓ１が所定値（例えば、１０℃）以上の最大値となるように）、流体用目標設定温度Ｑ２を、流体用目標設定温度Ｑ２としての第１流体用目標設定温度Ｑ２１（例えば、１０℃）に設定する（ステップ♯３）。第１流体用目標設定温度Ｑ２１は、検出された空気温度Ｐ１からみて空気用目標設定温度Ｐ２よりも低温側の温度に設定される。   And the control part 5 sets the target set temperature Q2 for fluids of the fluid Q circulated and supplied in the radiation panel 2a. That is, as shown in FIG. 2, the controller 5 increases the temperature difference Δs1, which is the temperature difference Δs between the fluid target set temperature Q2 and the air target set temperature P2 (the temperature difference Δs1 is a predetermined value ( For example, the fluid target set temperature Q2 is set to a first fluid target set temperature Q21 (for example, 10 ° C.) as the fluid target set temperature Q2 (step 10). # 3). The first fluid target set temperature Q21 is set to a temperature lower than the air target set temperature P2 in view of the detected air temperature P1.

さらに、制御部５は、輻射温調装置Ｅの起動と同時に、送風ファン２０の運転を開始させ、当該送風ファン２０を所定の回転数で回転させる（ステップ♯４）。なお、本実施形態では、ステップ♯１〜♯４は時間的に略同時に行われている。   Further, simultaneously with the activation of the radiation temperature adjusting device E, the control unit 5 starts the operation of the blower fan 20 and rotates the blower fan 20 at a predetermined rotational speed (step # 4). In this embodiment, steps # 1 to # 4 are performed substantially simultaneously in time.

これにより、送風ファン２０の運転により、ブース１内の空気Ｐを輻射パネル２ａの外表面に吹付けて、当該空気Ｐと輻射パネル２ａ内の流体Ｑとを強制的に熱交換させ、流体Ｑが有する多くの熱（冷熱）を対流する空気Ｐによりブース１内に伝熱させることができる（対流温調）。
この送風ファン２０は、例えば、図１において左側に配設された輻射パネル２ａでは、ブース１の側壁部１ｂから輻射パネル２ａに向かう方向（図１において、左から右に向かう方向）に送風され、当該送風は輻射パネル２ａの外表面に吹付けられて外表面に沿って通流した後、当該外表面の上下及び左右の各端部から電子顕微鏡Ｆが配設されたブース１の中央部（対向配置された一対の輻射パネル２ａ間）に通流する。特に、輻射パネル２ａから輻射され伝熱される熱（冷熱）が滞留し易い場所（輻射パネル２ａと側壁部１ｂとの間）で送風ファン２０が輻射パネル２ａの外表面にブース１内の空気Ｐを吹付けて対流させることで、輻射パネル２ａ内の流体Ｑが有する多くの熱（冷熱）を対流する空気Ｐによりブース１内に伝熱させることができる（対流温調）とともに、輻射パネル２ａと側壁部１ｂとの間に滞留する熱（冷熱）も当該対流する空気Ｐによりブース１内に伝熱させることができる。 Thereby, the air P in the booth 1 is blown to the outer surface of the radiant panel 2a by the operation of the blower fan 20, and the air P and the fluid Q in the radiant panel 2a are forcibly heat-exchanged. Can be transferred to the booth 1 by convection air P (convection temperature control).
For example, in the radiant panel 2a disposed on the left side in FIG. 1, the blower fan 20 is blown in the direction from the side wall 1b of the booth 1 toward the radiant panel 2a (the direction from left to right in FIG. 1). The blower is blown to the outer surface of the radiation panel 2a and flows along the outer surface, and then the central portion of the booth 1 in which the electron microscope F is disposed from the upper and lower and left and right ends of the outer surface. It flows through (between a pair of opposed radiation panels 2a). In particular, in the place where the heat (cold heat) radiated from the radiation panel 2a is likely to stay (between the radiation panel 2a and the side wall 1b), the blower fan 20 is placed on the outer surface of the radiation panel 2a on the air P in the booth 1. Can be transferred to the booth 1 by the convection air P (convection temperature control) and the radiation panel 2a. The heat (cold heat) staying between the side wall 1b and the side wall 1b can also be transferred into the booth 1 by the convection air P.

従って、単位時間当たりに、輻射温調のみで輻射パネル２ａからブース１内に供給される熱量よりも、輻射温調と対流温調とにより輻射パネル２ａからブース１内に供給される熱量の方が多くなり、輻射パネル２ａ内の流体Ｑが有する熱をより効率よくブース１内の空気Ｐの温調に利用することができる。
よって、ブース１内に送風ファン２０を設ける簡単な構成で、輻射温調手段２の起動運転の際に、輻射温調手段２と送風ファン２０とを働かせるだけで、より短い時間（例えば、１２時間程度）でブース１内の空気温度Ｐ１を空気用目標設定温度Ｐ２に収束させ安定化させることができる。また、起動運転の際の運転時間が短くなるので、省エネを図ることができる。 Accordingly, the amount of heat supplied from the radiant panel 2a to the booth 1 by the radiant temperature control and the convection temperature control is more than the amount of heat supplied from the radiant panel 2a to the booth 1 only by the radiant temperature control per unit time. Therefore, the heat of the fluid Q in the radiant panel 2a can be used for the temperature control of the air P in the booth 1 more efficiently.
Therefore, with a simple configuration in which the blower fan 20 is provided in the booth 1, a shorter time (for example, 12) can be obtained simply by operating the radiation temperature adjusting means 2 and the blower fan 20 when the radiation temperature adjusting means 2 is activated. The air temperature P1 in the booth 1 can be converged to the air target set temperature P2 and stabilized in about time). In addition, since the operation time during the start-up operation is shortened, energy saving can be achieved.

次に、制御部５は、検出された空気温度Ｐ１と空気用目標設定温度Ｐ２との偏差Δｔを導出し、当該偏差Δｔが大きい場合（偏差Δｔが所定値以上の場合）には（ステップ♯５：Ｙｅｓ）、設定された第１流体用目標設定温度Ｑ２１（例えば、１０℃）にて運転を継続する。図２において、このときの偏差Δｔを偏差Δｔ１と記載し、第１流体用目標設定温度Ｑ２１と空気用目標設定温度Ｐ２との温度差Δｓを温度差Δｓ１と記載する。なお、偏差Δｔが大きいか否かを判断する所定値は、空気用目標設定温度Ｐ２＋α（例えば、Ｐ２＋２〜３℃）に設定される。
一方で、制御部５は、空気温度Ｐ１（例えば、２５℃）と空気用目標設定温度Ｐ２（例えば、２０〜２２℃）との偏差Δｔが小さい場合（偏差Δｔが所定値（例えば、Ｐ２＋２〜３℃）より小さい場合）には（ステップ♯５：Ｎｏ）、設定された第１流体用目標設定温度Ｑ２１を、流体用目標設定温度Ｑ２と空気用目標設定温度Ｐ２との温度差Δｓが小さくなるように（温度差Δｓ２が所定値（例えば、１０℃）より小さくなるように）、第２流体用目標設定温度Ｑ２２（例えば、１５〜１８℃）に変更（再設定）する（ステップ♯６）。図２において、このときの偏差Δｔを偏差Δｔ２と記載し、第２流体用目標設定温度Ｑ２２と空気用目標設定温度Ｐ２との温度差Δｓを温度差Δｓ２と記載する。第２流体用目標設定温度Ｑ２２は、検出された空気温度Ｐ１からみて空気用目標設定温度Ｐ２よりも低温側の温度に設定される。
従って、制御部５は、実際、空気用温度センサ４により検出されたブース１内の空気Ｐの空気温度Ｐ１と空気用目標設定温度Ｐ２との偏差Δｔ（偏差Δｔ１、Δｔ２）に対応する形態で、流体用目標設定温度Ｑ２と空気用目標設定温度Ｐ２とがそれぞれ所定の温度差Δｓ（温度差Δｓ１、Δｓ２）を生じるように流体用目標設定温度Ｑ２（Ｑ２１、Ｑ２２）を設定することとなる。 Next, the control unit 5 derives a deviation Δt between the detected air temperature P1 and the air target set temperature P2, and when the deviation Δt is large (when the deviation Δt is greater than or equal to a predetermined value) (step # 5: Yes), the operation is continued at the set target set temperature Q21 for the first fluid (for example, 10 ° C.). In FIG. 2, the deviation Δt at this time is referred to as deviation Δt1, and the temperature difference Δs between the first fluid target set temperature Q21 and the air target set temperature P2 is described as a temperature difference Δs1. The predetermined value for determining whether or not the deviation Δt is large is set to the air target set temperature P2 + α (for example, P2 + 2 to 3 ° C.).
On the other hand, when the deviation Δt between the air temperature P1 (for example, 25 ° C.) and the air target set temperature P2 (for example, 20 to 22 ° C.) is small (the deviation Δt is a predetermined value (for example, P2 + 2 to 2). (Step # 5: No), the first target fluid temperature setting Q21 is less than the target fluid temperature target temperature Q2 and the air target temperature setting P2. In such a manner (so that the temperature difference Δs2 becomes smaller than a predetermined value (eg, 10 ° C.)), it is changed (reset) to the second fluid target set temperature Q22 (eg, 15-18 ° C.) (step # 6). ). In FIG. 2, the deviation Δt at this time is described as a deviation Δt2, and the temperature difference Δs between the second fluid target set temperature Q22 and the air target set temperature P2 is described as a temperature difference Δs2. The second fluid target set temperature Q22 is set to a temperature lower than the air target set temperature P2 in view of the detected air temperature P1.
Therefore, the control unit 5 actually corresponds to the deviation Δt (deviations Δt1, Δt2) between the air temperature P1 of the air P in the booth 1 detected by the air temperature sensor 4 and the air target set temperature P2. Then, the fluid target set temperature Q2 (Q21, Q22) is set such that the fluid target set temperature Q2 and the air target set temperature P2 respectively generate a predetermined temperature difference Δs (temperature differences Δs1, Δs2). .

これにより、輻射温調装置Ｅの起動運転時において、輻射温調手段２にて温調され流体用目標設定温度Ｑ２となった流体Ｑにより、ブース１内の空気Ｐが空気用目標設定温度Ｐ２となるように輻射温調することができる。さらに、ブース１の室内負荷が大きい場合（偏差Δｔ１）には、高い熱量（冷熱量又は温熱量）を備えた流体Ｑ（第１流体用目標設定温度Ｑ２１）によりブース１内の迅速な輻射温調ができ、これに対して室内負荷が小さい場合（偏差Δｔ２）には、低い熱量（冷熱量又は温熱量）を備えた流体Ｑ（第２流体用目標設定温度Ｑ２２）によりブース１内を輻射温調して、空気用目標設定温度Ｐ２に収束し安定させることができる。また、室内負荷が大きい場合に、より迅速な輻射温調ができるので、輻射温調手段２の起動運転における運転時間を低減することができ、省エネを図ることができる。   Thereby, at the time of start-up operation of the radiation temperature control device E, the air P in the booth 1 is changed to the target set temperature P2 for the air by the fluid Q that has been temperature-controlled by the radiation temperature control means 2 and has become the target set temperature Q2 for the fluid. The radiation temperature can be adjusted so that Furthermore, when the indoor load of the booth 1 is large (deviation Δt1), the rapid radiation temperature in the booth 1 is obtained by the fluid Q (first fluid target set temperature Q21) having a high amount of heat (cooling amount or heating amount). In contrast, when the indoor load is small (deviation Δt2), the inside of the booth 1 is radiated by the fluid Q (second fluid target set temperature Q22) having a low calorific value (cold heat amount or warm heat amount). The temperature can be adjusted to converge and stabilize at the air target set temperature P2. Further, since the radiation temperature can be adjusted more quickly when the indoor load is large, the operation time in the startup operation of the radiation temperature adjusting means 2 can be reduced, and energy saving can be achieved.

そして、制御部５は、偏差Δｔがゼロ（略ゼロ）となった場合（ステップ♯７：Ｙｅｓ）、すなわち、ブース１内の空気温度Ｐ１が空気用目標設定温度Ｐ２となった場合には、送風ファン２０の運転を停止させる（ステップ♯８）。この状態では、ブース１内は、電子顕微鏡Ｆの運転に適した温度となっているので、送風ファン２０による対流温調を停止し、起動運転から通常運転（輻射温調）に変更させ、ブース１内を輻射温調のみで温調することで、空気温度Ｐ１を空気用目標設定温度Ｐ２に収束させ安定させた状態を維持することができる（ステップ♯９）。なお、偏差Δｔがゼロ（略ゼロ）となっていない場合（ステップ♯７：Ｎｏ）には、送風ファン２０等の運転を継続する。   When the deviation Δt becomes zero (substantially zero) (step # 7: Yes), that is, when the air temperature P1 in the booth 1 becomes the air target set temperature P2, The operation of the blower fan 20 is stopped (step # 8). In this state, the booth 1 has a temperature suitable for the operation of the electron microscope F. Therefore, the convection temperature control by the blower fan 20 is stopped, and the startup operation is changed to the normal operation (radiation temperature control). By adjusting the temperature within 1 only by adjusting the radiation temperature, the air temperature P1 can be converged to the air target set temperature P2 and maintained in a stable state (step # 9). If the deviation Δt is not zero (substantially zero) (step # 7: No), the operation of the blower fan 20 and the like is continued.

通常運転では、制御部５は、空気温度Ｐ１が空気用目標設定温度Ｐ２に収束し安定した状態を維持するために、輻射温調手段２の運転を制御して、輻射パネル２ａに供給する流体Ｑの流体温度Ｑ１及び流体用目標設定温度Ｑ２を適宜変更させるように構成されている。この通常運転では、輻射温調のみでブース１内が温調されるので、ブース１内に空気Ｐの対流がほとんど発生せず、電子顕微鏡Ｆの作業に悪影響を与えることは防止されている。   In the normal operation, the control unit 5 controls the operation of the radiation temperature adjusting means 2 and supplies the radiation panel 2a with the fluid so that the air temperature P1 converges to the air target set temperature P2 and maintains a stable state. The fluid temperature Q1 of Q and the target set temperature Q2 for fluid are appropriately changed. In this normal operation, the inside of the booth 1 is temperature-controlled only by the radiation temperature control, so that almost no convection of the air P occurs in the booth 1 and it is possible to prevent the work of the electron microscope F from being adversely affected.

よって、本願に係る輻射温調装置Ｅでは、輻射温調手段２の起動運転において、簡便な構成で、ブース１内の空気温度Ｐ１をより短い時間で空気用目標設定温度Ｐ２に収束するように安定させ省エネを実現でき、通常運転においては、空気Ｐの対流等の影響を受けることなく電子顕微鏡Ｆによる作業を行うことができる。   Therefore, in the radiation temperature control apparatus E according to the present application, the air temperature P1 in the booth 1 is converged to the air target set temperature P2 in a shorter time with a simple configuration in the startup operation of the radiation temperature control means 2. It is possible to stabilize and save energy, and in normal operation, the work by the electron microscope F can be performed without being affected by the convection of the air P or the like.

〔別実施形態〕
（Ａ）上記実施形態においては、輻射温調手段２の起動（図３のステップ♯１）、空気用目標設定温度Ｐ２の設定（ステップ♯２）、流体用目標設定温度Ｑ２の設定（ステップ♯３）、送風ファン２０の運転開始（ステップ♯４）を、時間的に略同時に行う構成としたが、輻射温調手段２の起動運転時において、輻射温調及び対流温調を行って、ブース１内をより短い時間で空気用目標設定温度Ｐ２に収束するように安定させることができれば、特にこの構成に限定されるものではない。
例えば、上記ステップ♯１〜♯３を略同時に行い、その後、時間的に少し遅れた時期に、送風ファン２０の運転を開始する（ステップ♯４を行う）構成としてもよい。すなわち、輻射パネル２ａ内の流体Ｑの流体温度Ｑ１が、設定された流体用目標設定温度Ｑ２（例えば、第１流体用目標設定温度Ｑ２１）に確実に収束した時点で、送風ファン２０の運転を開始する構成とすることで、ブース１内の空気Ｐと輻射パネル２ａ内の流体Ｑとの熱交換をより効率よく行うことができる。また、ステップ♯１〜♯４を順次実行することもできる。 [Another embodiment]
(A) In the above embodiment, activation of the radiation temperature adjusting means 2 (step # 1 in FIG. 3), setting of the air target set temperature P2 (step # 2), and setting of the fluid target set temperature Q2 (step #) 3) Although the start of the operation of the blower fan 20 (step # 4) is performed almost simultaneously in time, the radiation temperature control and the convection temperature control are performed during the start-up operation of the radiation temperature control means 2, and the booth If it can be stabilized so that the inside of 1 is converged to the target temperature P2 for air in a shorter time, it is not particularly limited to this configuration.
For example, the steps # 1 to # 3 may be performed substantially simultaneously, and thereafter, the operation of the blower fan 20 may be started (step # 4 is performed) at a time slightly delayed in time. That is, when the fluid temperature Q1 of the fluid Q in the radiant panel 2a reliably converges to the set fluid target set temperature Q2 (for example, the first fluid target set temperature Q21), the blower fan 20 is operated. By setting it as the structure which starts, heat exchange with the air P in the booth 1 and the fluid Q in the radiation panel 2a can be performed more efficiently. Further, steps # 1 to # 4 can be executed sequentially.

（Ｂ）上記実施形態においては、冷房運転について説明したが、暖房運転の際にも本願の輻射温調装置Ｅを良好に適用することができる。 (B) Although the cooling operation has been described in the above embodiment, the radiation temperature control device E of the present application can be favorably applied also during the heating operation.

（Ｃ）上記実施形態においては、起動運転時において輻射温調手段２により輻射パネル２ａに供給する流体Ｑの流体用目標設定温度Ｑ２を、偏差Δｔの大小に応じて、例えば、１０℃（第１流体用目標設定温度Ｑ２１）、１５〜１８℃（第２流体用目標設定温度Ｑ２２）の２段階の温度に設定する例について説明したが、空気温度Ｐ１を適切に空気用目標設定温度Ｐ２に収束させ安定させることができれば、設定する温度やその段階数は適宜変更することができる。
また、通常運転時には、流体Ｑの流体用目標設定温度Ｑ２を、空気用目標設定温度Ｐ２に設定してもよい。 (C) In the above-described embodiment, the target set temperature Q2 for the fluid Q supplied to the radiation panel 2a by the radiation temperature adjusting means 2 during the start-up operation is set to, for example, 10 ° C. according to the magnitude of the deviation Δt. The example in which the temperature is set to two stages of the target set temperature Q21 for 1 fluid and 15 to 18 ° C. (target set temperature Q22 for the second fluid) has been described. If convergence and stabilization can be achieved, the set temperature and the number of steps can be changed as appropriate.
Further, during normal operation, the target set temperature Q2 for the fluid Q may be set to the target set temperature P2 for air.

（Ｄ）上記実施形態においては、冷却手段として冷凍回路Ｃの蒸発器１３を採用し、加熱手段として電気ヒータ１７及び分岐冷凍回路Ｃ１の再熱器１５を採用したが、冷却手段や加熱手段としては、流体Ｑを冷却できる公知の冷却手段や加熱できる公知の加熱手段を用いることができる。また、冷却手段や加熱手段の数についても適宜設定することができる。 (D) In the above embodiment, the evaporator 13 of the refrigeration circuit C is adopted as the cooling means, and the electric heater 17 and the reheater 15 of the branch refrigeration circuit C1 are adopted as the heating means. However, as the cooling means and the heating means, May be a known cooling means capable of cooling the fluid Q or a known heating means capable of heating. The number of cooling means and heating means can also be set as appropriate.

以上説明したように、輻射温調手段の起動運転において、簡便な構成で、ブース内の空気温度をより短い時間で空気用目標設定温度に収束するように安定させ、省エネを実現できる輻射温調装置として有効に利用することができる。   As described above, in the start-up operation of the radiation temperature control means, the radiation temperature control capable of realizing energy saving by stabilizing the air temperature in the booth to converge to the target temperature for air in a shorter time with a simple configuration. It can be effectively used as a device.

１ ブース
１ａ 天井部
１ｂ 側壁部
２ 輻射温調手段
２ａ 輻射パネル
３ 流体用温度センサ（流体温度検出手段）
４ 空気用温度センサ（空気温度検出手段）
５ 制御部（制御手段）
２０ 送風ファン（送風手段）
Ｐ１ 空気温度
Ｐ２ 空気用目標設定温度
Ｑ１ 流体温度
Ｑ２ 流体用目標設定温度
Ｃ 冷凍回路
Ｃ１ 分岐冷凍回路（冷凍回路）
Ｅ 輻射温調装置
Ｆ 電子顕微鏡（精密機器）
Ｐ 空気
Ｑ 流体
Δｔ１、Δｔ２ 偏差
Δｓ１、Δｓ２ 温度差 DESCRIPTION OF SYMBOLS 1 Booth 1a Ceiling part 1b Side wall part 2 Radiation temperature control means 2a Radiation panel 3 Fluid temperature sensor (fluid temperature detection means)
4 Air temperature sensor (air temperature detection means)
5 Control unit (control means)
20 Blower fan (Blower unit)
P1 Air temperature P2 Air target set temperature Q1 Fluid temperature Q2 Fluid target set temperature C Refrigeration circuit C1 Branch refrigeration circuit (refrigeration circuit)
E Radiation temperature control device F Electron microscope (Precision equipment)
P Air Q Fluid Δt1, Δt2 Deviation Δs1, Δs2 Temperature difference

Claims (3)

ブース内に配設された輻射パネル内に流体を循環供給して前記ブース内を輻射温調する輻射温調手段と、前記輻射温調手段の運転を制御する制御手段とを備えた輻射温調装置であって、
前記ブースが、天井部と側壁部とを備えて構成され、
前記ブース内の空気を前記輻射パネルの外表面に送風する送風手段を、前記ブース内に配設し、
板状の前記輻射パネルが、前記側壁部に沿って配設されるとともに、前記送風手段が前記輻射パネルと前記側壁部との間に配設され、
前記輻射温調手段の起動運転において、前記制御手段が、前記輻射温調手段を働かせて前記ブース内を輻射温調するとともに、前記送風手段を働かせて、前記送風手段により送風される空気を前記輻射パネルの外表面に吹付けて、当該空気と前記輻射パネル内の流体との間で熱交換させ、当該空気の対流により前記ブース内を温調する輻射温調装置。 Radiation temperature control means comprising: a radiation temperature adjusting means for circulatingly supplying a fluid into a radiation panel disposed in the booth to adjust the radiation temperature inside the booth; and a control means for controlling the operation of the radiation temperature adjusting means. A device,
The booth is configured with a ceiling part and a side wall part,
Blower means for blowing air in the booth to the outer surface of the radiation panel is disposed in the booth,
The plate-like radiation panel is disposed along the side wall portion, and the air blowing means is disposed between the radiation panel and the side wall portion,
In the start-up operation of the radiant temperature adjusting means, the control means operates the radiant temperature adjusting means to adjust the radiant temperature inside the booth, and the air blowing means operates the air blown by the air blowing means. A radiation temperature control device that sprays on the outer surface of a radiation panel to exchange heat between the air and the fluid in the radiation panel, and adjusts the temperature of the booth by convection of the air. 前記ブース内の空気の空気温度を検出する空気温度検出手段を備え、
前記輻射温調手段の起動運転において、前記空気温度検出手段により検出された空気温度が空気用目標設定温度となった場合に、前記制御手段が、前記送風手段を停止させる請求項１に記載の輻射温調装置。 Air temperature detecting means for detecting the air temperature of the air in the booth,
2. The control device according to claim 1, wherein, in the start-up operation of the radiation temperature adjusting unit, the control unit stops the air blowing unit when the air temperature detected by the air temperature detecting unit becomes a target set temperature for air. Radiation temperature control device. 前記ブース内の空気の空気温度を検出する空気温度検出手段を備え、
前記輻射温調手段の起動運転において、前記制御手段が、前記空気温度検出手段により検出された空気温度と空気用目標設定温度との偏差が大きい場合には、前記輻射パネル内に循環供給される流体の流体用目標設定温度と空気用目標設定温度との温度差が大きくなるように流体用目標設定温度を設定し、前記空気温度と空気用目標設定温度との偏差が小さい場合には、流体用目標設定温度と空気用目標設定温度との温度差が小さくなるように流体用目標設定温度を設定する請求項１又は２に記載の輻射温調装置。 Air temperature detecting means for detecting the air temperature of the air in the booth,
In the start-up operation of the radiation temperature adjusting means, when the deviation between the air temperature detected by the air temperature detecting means and the air target set temperature is large, the control means is circulated and supplied into the radiation panel. When the fluid target set temperature is set so that the temperature difference between the fluid target set temperature and the air target set temperature is large, and the deviation between the air temperature and the air target set temperature is small, the fluid The radiation temperature adjusting device according to claim 1 or 2, wherein the target temperature setting for fluid is set so that a temperature difference between the target temperature setting for air and the target temperature setting for air is small.
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