JP5476195B2 - Drive device with force detection function - Google Patents

Drive device with force detection function Download PDF

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JP5476195B2
JP5476195B2 JP2010090096A JP2010090096A JP5476195B2 JP 5476195 B2 JP5476195 B2 JP 5476195B2 JP 2010090096 A JP2010090096 A JP 2010090096A JP 2010090096 A JP2010090096 A JP 2010090096A JP 5476195 B2 JP5476195 B2 JP 5476195B2
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connecting member
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drive device
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和廣 岡田
聡 江良
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Tri Force Management Corp
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本発明は、力検出機能をもった駆動装置に関し、特に、ロボットの関節部分などに利用するのに適し、所定の作用体に対して所定方向に作用した力を検出する検出機能と、当該作用体を所定方向に駆動する駆動機能と、を有する装置に関する。   The present invention relates to a drive device having a force detection function, and is particularly suitable for use in a joint portion of a robot and the like, and a detection function for detecting a force acting in a predetermined direction on a predetermined action body, and the action The present invention relates to a device having a drive function for driving a body in a predetermined direction.

ロボットや産業機械では、各部に様々な動作をさせるため、関節部分に駆動装置が取り付けられている。たとえば、ロボットアーム（腕）とグリッパー（手）を接続する手首の関節部分には、グリッパー（手）を任意の方向に駆動する駆動装置が設けられる。ロボットの足首の関節部分についても同様である。たとえば、下記の特許文献１には、サーボ制御が可能な回転モータで３組のリンクを駆動するロボットの手首用駆動装置が開示されており、特許文献２には、６本のリニアアクチュエータを用いて、多自由度マニピュレータとして機能するロボットアーム用駆動装置が開示されている。また、特許文献３には、プーリとベルトを用いて構成したロボット用の手首駆動装置が開示されている。   In a robot or an industrial machine, a drive device is attached to a joint portion in order to cause each part to perform various operations. For example, a wrist joint that connects a robot arm (arm) and a gripper (hand) is provided with a drive device that drives the gripper (hand) in an arbitrary direction. The same applies to the joint part of the ankle of the robot. For example, Patent Document 1 below discloses a wrist drive device for a robot that drives three sets of links with a servo motor capable of servo control, and Patent Document 2 uses six linear actuators. A robot arm drive device that functions as a multi-degree-of-freedom manipulator is disclosed. Patent Document 3 discloses a wrist drive device for a robot configured by using a pulley and a belt.

一方、ロボットや産業機械では、その動作制御を行うために、種々のタイプの力検出装置が利用されている。特に、ロボットアームの手首部分に取り付けて、グリッパーに加わる負荷を検出するための力検出装置としては、できるだけ構造が単純であり、三次元空間内での各座標軸に関する力をそれぞれ独立して検出できる装置が望まれている。一般に、力検出装置の検出対象には、所定の座標軸方向を向いた力成分と、所定の座標軸まわりのモーメント成分とがあり、三次元空間内にＸＹＺ三次元座標系を定義した場合、検出対象は、各座標軸方向の力成分Ｆｘ，Ｆｙ，Ｆｚと、各座標軸まわりのモーメント成分Ｍｘ，Ｍｙ，Ｍｚとの６つの成分になる。   On the other hand, various types of force detection devices are used in robots and industrial machines in order to control their operations. In particular, as a force detection device for detecting the load applied to the gripper by attaching to the wrist part of the robot arm, the structure is as simple as possible, and the force relating to each coordinate axis in the three-dimensional space can be detected independently. An apparatus is desired. In general, the detection target of the force detection device includes a force component directed in a predetermined coordinate axis direction and a moment component around the predetermined coordinate axis. When an XYZ three-dimensional coordinate system is defined in a three-dimensional space, the detection target Are six components including force components Fx, Fy, Fz in the direction of each coordinate axis and moment components Mx, My, Mz around each coordinate axis.

このような６つの力成分をそれぞれ独立して検出することができる力検出装置として、たとえば、下記の特許文献４には、比較的単純な構造をもった装置が開示されている。この特許文献４に開示された技術は、既に米国特許第６９１５７０９号・米国特許第７１２１１４７号・欧州特許第１４６４９３９号が付与されている技術であり、２枚の基板を複数の柱状体で接続した構造物を用意し、一方の基板を固定した状態において他方の基板に力を加えたときに、各柱状体の変位を個別に測定することにより、加えられた力の各成分を検出するものである。   As a force detection device capable of independently detecting such six force components, for example, Patent Document 4 below discloses a device having a relatively simple structure. The technique disclosed in Patent Document 4 is a technique to which US Pat. No. 6,915,709, US Pat. No. 7,712,147, and European Patent No. 1464939 are already provided, and two substrates are connected by a plurality of columnar bodies. When a structure is prepared and one substrate is fixed and a force is applied to the other substrate, the displacement of each columnar body is individually measured to detect each component of the applied force. is there.

また、下記の特許文献５に開示されている技術も、既に米国特許第７２１９５６１号が付与されている技術である。この技術によれば、各柱状体の変位を個別に測定するセンサとして静電容量素子を用い、この静電容量素子を構成する特定の電極間に配線を施すことにより、加えられた力の各成分を検出するための演算を単純化することが可能になる。   The technique disclosed in Patent Document 5 below is also a technique to which US Pat. No. 7,219,561 has already been granted. According to this technique, a capacitive element is used as a sensor for individually measuring the displacement of each columnar body, and wiring is applied between specific electrodes constituting the capacitive element, whereby each applied force is It is possible to simplify the calculation for detecting the component.

特開平９−０３８８８６号公報Japanese Patent Laid-Open No. 9-038886 特開２００１−００４００５号公報JP 2001-004005 A 特開２００６−００７３５５号公報JP 2006-007355 A 特開２００４−３５４０４９号公報JP 2004-354049 A 特開２００４−３２５３６７号公報JP 2004-325367 A

前述したとおり、ロボットや産業機械の駆動制御を行うためには、関節部分に、駆動装置とともに力検出装置を設ける必要がある。たとえば、アームの先に手首を介してグリッパーが接続されたロボットの場合、手首から先のグリッパーの部分を駆動するための駆動装置を手首の関節に取り付けるとともに、グリッパーの部分に作用した力を検出するための力検出装置を手首の関節に取り付けるのが好ましい。このように、ロボットの手首に取り付けるのに適した駆動装置や力検出装置は、たとえば、前掲の各特許文献に開示されているように、様々なタイプのものが知られている。   As described above, in order to perform drive control of a robot or an industrial machine, it is necessary to provide a force detection device together with the drive device at the joint portion. For example, in the case of a robot with a gripper connected to the tip of the arm via the wrist, a drive device for driving the gripper part ahead of the wrist is attached to the wrist joint and the force acting on the gripper part is detected. It is preferable to attach a force detection device to the wrist joint. As described above, various types of drive devices and force detection devices suitable for being attached to the wrist of the robot are known as disclosed in, for example, the above-mentioned patent documents.

しかしながら、従来提案されている一般的な駆動装置および力検出装置を、ロボットや産業機械の関節部分に組み込むと、関節部分の構造が複雑になり、また、関節部分が大型化せざるを得ない。構造が複雑になれば、製造コストも嵩むことになる。特に、ロボットアームの手首の構造部は、できるだけ単純な構造で構成するのが好ましいが、前掲の各特許文献に開示されている駆動装置および力検出装置を、それぞれ別個に手首部分に組み込むようにすると、手首の構造部の単純化を図るのは困難である。   However, when a conventional general drive device and force detection device are incorporated in a joint part of a robot or an industrial machine, the structure of the joint part becomes complicated and the joint part must be enlarged. . If the structure becomes complicated, the manufacturing cost also increases. In particular, it is preferable that the wrist structure portion of the robot arm has a simple structure as much as possible. However, the driving device and the force detection device disclosed in each of the above-mentioned patent documents are separately incorporated in the wrist portion. Then, it is difficult to simplify the wrist structure.

そこで本発明は、ロボットや産業機械などの関節部分を構成するのに適し、駆動機能とともに力検出機能を備え、かつ、構造の単純化を図ることが可能な力検出機能をもった駆動装置を提供することを目的とする。   Therefore, the present invention is suitable for constituting a joint portion of a robot, an industrial machine, etc., having a force detection function as well as a drive function, and having a force detection function capable of simplifying the structure. The purpose is to provide.

(1) 本発明の第１の態様は、所定の作用体に対して所定方向に作用した力を検出する検出機能と、作用体を所定方向に駆動する駆動機能と、を有する力検出機能をもった駆動装置において、
作用体として機能する上方構造体と、
上方構造体の下方に配置された下方構造体と、
上端が上方構造体の下面側に第１の上方接続部を介して接続され、下端が下方構造体の上面側に第１の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第１の伸縮駆動機構をもった第１の接続部材と、
上端が上方構造体の下面側に第２の上方接続部を介して接続され、下端が下方構造体の上面側に第２の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第２の伸縮駆動機構をもった第２の接続部材と、
上端が上方構造体の下面側に第３の上方接続部を介して接続され、下端が下方構造体の上面側に第３の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第３の伸縮駆動機構をもった第３の接続部材と、
上端が上方構造体の下面側に第４の上方接続部を介して接続され、下端が下方構造体の上面側に第４の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第４の伸縮駆動機構をもった第４の接続部材と、
第１〜第４の接続部材の下端の下方構造体に対する上下方向に関する変位をそれぞれ検出する第１〜第４のセンサと、
第１〜第４の伸縮駆動機構に所定の電気信号を与えて第１〜第４の接続部材の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、第１〜第４のセンサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作と、を行う制御ユニットと、
を設け、
第１〜第４の上方接続部は、それぞれ第１〜第４の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、それぞれ第１〜第４の接続部材の上端を上方構造体の下面に接続する構造を有するようにし、
第１〜第４の下方接続部は、それぞれ第１〜第４の接続部材の下端付近が下方構造体に対して任意の方向に傾斜可能となるように、かつ、下方構造体に対して上下方向に変位可能となるように、それぞれ第１〜第４の接続部材の下端を下方構造体の上面に接続する構造を有するようにしたものである。 (1) A first aspect of the present invention has a force detection function having a detection function for detecting a force acting on a predetermined acting body in a predetermined direction and a drive function for driving the acting body in a predetermined direction. In the drive device with
An upper structure that functions as an action body;
A lower structure disposed below the upper structure;
The upper end is connected to the lower surface side of the upper structure via the first upper connection portion, the lower end is connected to the upper surface side of the lower structure via the first lower connection portion, and based on the given electrical signal A first connecting member having a first telescopic drive mechanism for changing the length between the upper and lower ends;
The upper end is connected to the lower surface side of the upper structure via the second upper connection portion, the lower end is connected to the upper surface side of the lower structure via the second lower connection portion, and based on the given electrical signal A second connecting member having a second telescopic drive mechanism for changing the length between the upper and lower ends;
The upper end is connected to the lower surface side of the upper structure via the third upper connection portion, the lower end is connected to the upper surface side of the lower structure via the third lower connection portion, and based on the given electrical signal A third connecting member having a third telescopic drive mechanism for changing the length between the upper and lower ends;
The upper end is connected to the lower surface side of the upper structure via the fourth upper connection portion, the lower end is connected to the upper surface side of the lower structure via the fourth lower connection portion, and based on the given electrical signal A fourth connecting member having a fourth telescopic drive mechanism for changing the length between the upper and lower ends;
First to fourth sensors for detecting displacements in the vertical direction with respect to the lower structure at the lower ends of the first to fourth connecting members;
A driving operation for adjusting a length between the upper and lower ends of the first to fourth connecting members to a desired length by giving a predetermined electrical signal to the first to fourth expansion and contraction driving mechanisms; A control unit for performing a detection operation for outputting an electric signal indicating a force acting on the acting body based on a detection result of the fourth sensor;
Provided,
The first to fourth upper connecting portions are respectively first to fourth connecting members so that the vicinity of the upper ends of the first to fourth connecting members can be inclined in any direction with respect to the upper structure. Having a structure for connecting the upper end of the upper surface to the lower surface of the upper structure,
The first to fourth lower connecting portions are arranged so that the vicinity of the lower ends of the first to fourth connecting members can be inclined in any direction with respect to the lower structure, and are Each of the first to fourth connecting members has a structure for connecting to the upper surface of the lower structure so as to be displaceable in the direction.

(2) 本発明の第２の態様は、上述した第１の態様に係る力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に固着された第５の接続部材を更に設け、
第５の上方接続部は、第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、第５の接続部材の上端を上方構造体の下面に接続する構造を有するようにしたものである。 (2) According to a second aspect of the present invention, in the driving device having the force detection function according to the first aspect described above,
A fifth connecting member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion and a lower end fixed to the upper surface side of the lower structure;
The fifth upper connection portion connects the upper end of the fifth connection member to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connection member can be inclined in any direction with respect to the upper structure. It has a structure.

(3) 本発明の第３の態様は、上述した第２の態様に係る力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致するようにし、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、を行うようにしたものである。 (3) According to a third aspect of the present invention, in the drive device having the force detection function according to the second aspect described above,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member is made to coincide with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed And X-axis detection operation to output as the detection value of a moment Mx about the X-axis acting on the concrete body, in which to perform the.

(4) 本発明の第４の態様は、上述した第１の態様に係る力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に第５の下方接続部を介して接続された第５の接続部材と、
第５の接続部材の下端の下方構造体に対する上下方向に関する変位を検出する第５のセンサと、
を更に設け、
制御ユニットは、第１〜第５のセンサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作を行い、
第５の上方接続部は、第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、第５の接続部材の上端を上方構造体の下面に接続する構造を有するようにし、
第５の下方接続部は、第５の接続部材の下端付近が下方構造体に対して上下方向に変位可能となるように、第５の接続部材の下端を下方構造体の上面に接続する構造を有するようにしたものである。 (4) According to a fourth aspect of the present invention, in the driving device having the force detection function according to the first aspect described above,
A fifth connection member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion, and a lower end connected to the upper surface side of the lower structure via a fifth lower connection portion;
A fifth sensor for detecting a displacement in the vertical direction with respect to the lower structure at the lower end of the fifth connecting member;
Further provided,
Based on the detection results of the first to fifth sensors, the control unit performs a detection operation of outputting an electrical signal indicating the force acting on the acting body,
The fifth upper connection portion connects the upper end of the fifth connection member to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connection member can be inclined in any direction with respect to the upper structure. To have a structure,
The fifth lower connection portion has a structure in which the lower end of the fifth connection member is connected to the upper surface of the lower structure so that the vicinity of the lower end of the fifth connection member can be displaced vertically with respect to the lower structure. It is made to have.

(5) 本発明の第５の態様は、上述した第４の態様に係る力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致するようにし、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第５のセンサの検出値もしくは第１〜第５のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うようにしたものである。 (5) According to a fifth aspect of the present invention, in the drive device having the force detection function according to the fourth aspect described above,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member is made to coincide with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed An X-axis rotation detection operation that is output as a detection value of a moment Mx around the X-axis that has acted on the structure, and an electrical signal based on the detection value of the fifth sensor or the sum of the detection values of the first to fifth sensors, And a Z-axis direction detecting operation for outputting the detected value of the force Fz in the Z-axis direction acting on the upper structure in a state where the lower structure is fixed.

(6) 本発明の第６の態様は、上述した第１の態様に係る力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に第５の下方接続部を介して接続された第５の接続部材を更に設け、
第５の上方接続部は、第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、第５の接続部材の上端を上方構造体の下面に接続する構造を有するようにし、
第５の下方接続部は、第５の接続部材の下端付近が下方構造体に対して上下方向に変位可能となるように、第５の接続部材の下端を下方構造体の上面に接続する構造を有するようにしたものである。 (6) According to a sixth aspect of the present invention, in the driving device having the force detection function according to the first aspect described above,
There is further provided a fifth connection member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion and a lower end connected to the upper surface side of the lower structure via the fifth lower connection portion. ,
The fifth upper connection portion connects the upper end of the fifth connection member to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connection member can be inclined in any direction with respect to the upper structure. To have a structure,
The fifth lower connection portion has a structure in which the lower end of the fifth connection member is connected to the upper surface of the lower structure so that the vicinity of the lower end of the fifth connection member can be displaced vertically with respect to the lower structure. It is made to have.

(7) 本発明の第７の態様は、上述した第６の態様に係る力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致するようにし、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第１〜第４のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うようにしたものである。 (7) According to a seventh aspect of the present invention, in the drive device having the force detection function according to the sixth aspect described above,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member is made to coincide with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed An electric signal based on the sum of the detected values of the X-axis around the X-axis and the detected values of the first to fourth sensors output as a detected value of the moment Mx around the X-axis acting on the structure, in a state where the lower structure is fixed And a Z-axis direction detecting operation for outputting the detected value of the force Fz in the Z-axis direction acting on the upper structure.

(8) 本発明の第８の態様は、上述した第１の態様に係る力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に固着され、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構をもった第５の接続部材を更に設け、
第５の上方接続部は、第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、第５の接続部材の上端を上方構造体の下面に接続する構造を有するようにしたものである。 (8) According to an eighth aspect of the present invention, in the drive device having the force detection function according to the first aspect described above,
The upper end is connected to the lower surface side of the upper structure via the fifth upper connection portion, the lower end is fixed to the upper surface side of the lower structure, and depending on the extension force or compression force applied as an external force between the upper and lower ends A fifth connecting member having a telescopic driven mechanism for changing the length between the upper and lower ends;
The fifth upper connection portion connects the upper end of the fifth connection member to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connection member can be inclined in any direction with respect to the upper structure. It has a structure.

(9) 本発明の第９の態様は、上述した第８の態様に係る力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致するようにし、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第１〜第４のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うようにしたものである。 (9) According to a ninth aspect of the present invention, in the drive device having the force detection function according to the eighth aspect described above,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member is made to coincide with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed An electric signal based on the sum of the detected values of the X-axis around the X-axis and the detected values of the first to fourth sensors output as a detected value of the moment Mx around the X-axis acting on the structure, in a state where the lower structure is fixed And a Z-axis direction detecting operation for outputting the detected value of the force Fz in the Z-axis direction acting on the upper structure.

(10) 本発明の第１０の態様は、上述した第１〜第９の態様に係る力検出機能をもった駆動装置において、
すべての上方接続部および第１〜第４の下方接続部が、転がり球面軸受を含む構造体によって構成されているようにしたものである。 (10) According to a tenth aspect of the present invention, in the driving device having the force detection function according to the first to ninth aspects described above,
All the upper connection portions and the first to fourth lower connection portions are configured by a structure including a rolling spherical bearing.

(11) 本発明の第１１の態様は、上述した第３，第５，第７，第９のいずれかの態様に係る力検出機能をもった駆動装置において、
「標準姿勢」の状態では、第１の接続部材と第２の接続部材とがＹＺ平面に関して面対称をなし、第３の接続部材と第４の接続部材とがＸＺ平面に関して面対称をなすようにしたものである。 (11) An eleventh aspect of the present invention is a drive device having a force detection function according to any of the third, fifth, seventh, and ninth aspects described above,
In the “standard posture” state, the first connecting member and the second connecting member are symmetrical with respect to the YZ plane, and the third connecting member and the fourth connecting member are symmetrical with respect to the XZ plane. It is a thing.

(12) 本発明の第１２の態様は、上述した第３，第５，第７，第９のいずれかの態様に係る力検出機能をもった駆動装置において、
上方構造体が平板状の上方基板からなり、下方構造体が平板状の下方基板からなり、「標準姿勢」の状態では、上方基板および下方基板の基板面が、ＸＹ平面に平行になるように構成したものである。 (12) According to a twelfth aspect of the present invention, in the drive device having a force detection function according to any one of the third, fifth, seventh, and ninth aspects described above,
The upper structure is composed of a flat upper substrate, the lower structure is composed of a flat lower substrate, and in the “standard posture” state, the substrate surfaces of the upper substrate and the lower substrate are parallel to the XY plane. It is composed.

(13) 本発明の第１３の態様は、上述した第１２の態様に係る力検出機能をもった駆動装置において、
下面の４カ所に溝が形成された中間基板を、下方基板の上面に接合し、これら溝の底部には、それぞれ可撓性をもった膜部が形成されるようにし、
第１〜第４の下方接続部が、中間基板と、各膜部の上面に固定された転がり球面軸受と、によって構成されており、第１〜第４の接続部材の下端が転がり球面軸受、膜部、溝の側壁部を介して、下方基板に接続されるようにしたものである。 (13) According to a thirteenth aspect of the present invention, in the drive device having the force detection function according to the twelfth aspect described above,
The intermediate substrate having grooves formed at four locations on the lower surface is bonded to the upper surface of the lower substrate, and a flexible film portion is formed at the bottom of each groove,
The first to fourth lower connecting portions are constituted by an intermediate substrate and a rolling spherical bearing fixed to the upper surface of each film portion, and the lower ends of the first to fourth connecting members are rolling spherical bearings, It is configured to be connected to the lower substrate through the film part and the side wall part of the groove.

(14) 本発明の第１４の態様は、上述した第１３の態様に係る力検出機能をもった駆動装置において、
第１〜第４のセンサが、各膜部に形成された変位電極と、これら各変位電極に対向する下方基板の上面位置に固定された固定電極と、からなる容量素子によって構成されているようにしたものである。 (14) According to a fourteenth aspect of the present invention, in the drive device having the force detection function according to the thirteenth aspect described above,
The first to fourth sensors are constituted by a capacitive element including a displacement electrode formed on each film part and a fixed electrode fixed to the upper surface position of the lower substrate facing each displacement electrode. It is a thing.

(15) 本発明の第１５の態様は、上述した第１４の態様に係る力検出機能をもった駆動装置において、
中間基板が導電性材料から構成されており、膜部自身が変位電極として機能するようにしたものである。 (15) According to a fifteenth aspect of the present invention, in the drive device having the force detection function according to the fourteenth aspect described above,
The intermediate substrate is made of a conductive material, and the film part itself functions as a displacement electrode.

(16) 本発明の第１６の態様は、上述した第１〜第１５の態様に係る力検出機能をもった駆動装置において、
第１〜第４の接続部材を、
外側筒状部と、その内側に嵌合した内側柱状部と、を同一の軸上に配置してなる構造部と、
与えられた電気信号に基づいて、内側柱状部を外側筒状部に対して、上記軸に沿った方向に摺動させることにより全長を所望の長さに調整し、当該長さを維持させる伸縮駆動機構と、
を有するリニアアクチュエータによって構成したものである。 (16) According to a sixteenth aspect of the present invention, in the driving apparatus having the force detection function according to the first to fifteenth aspects described above,
The first to fourth connecting members are
A structure part formed by arranging the outer cylindrical part and the inner columnar part fitted inside thereof on the same axis;
Based on the given electrical signal, the inner columnar part is adjusted with respect to the outer cylindrical part in the direction along the axis to adjust the overall length to a desired length, and to extend and maintain the length. A drive mechanism;
It is comprised by the linear actuator which has.

(17) 本発明の第１７の態様は、上述した第１６の態様に係る力検出機能をもった駆動装置において、
リニアアクチュエータが、外側筒状部に対して内側柱状部を機械的に固定するロック機構を有するようにし、
制御ユニットが、検出動作を行う際には、このロック機構により、第１〜第４の接続部材の上下両端間の長さを一定に維持する制御を行うようにしたものである。 (17) According to a seventeenth aspect of the present invention, in the drive device having the force detection function according to the sixteenth aspect described above,
The linear actuator has a lock mechanism that mechanically fixes the inner columnar part to the outer cylindrical part,
When the control unit performs a detection operation, the lock mechanism controls the length between the upper and lower ends of the first to fourth connecting members to be constant.

(18) 本発明の第１８の態様は、上述した第１６の態様に係る力検出機能をもった駆動装置において、
リニアアクチュエータが、外側筒状部内に設けられた圧力室の圧力を制御するポンプと、圧力室の圧力を測定する圧力センサと、を有するようにし、
制御ユニットが、駆動動作を行う際には、ポンプに所定の駆動信号を与えて内側柱状部を摺動させることにより、リニアアクチュエータの全長を所望の長さに調整し、検出動作を行う際には、圧力センサによる測定値が一定となるようにポンプに所定の駆動信号を与えてフィードバック制御を行うようにしたものである。 (18) According to an eighteenth aspect of the present invention, in the drive device having the force detection function according to the sixteenth aspect described above,
The linear actuator has a pump for controlling the pressure of the pressure chamber provided in the outer cylindrical portion, and a pressure sensor for measuring the pressure of the pressure chamber;
When the control unit performs a drive operation, it applies a predetermined drive signal to the pump and slides the inner columnar portion to adjust the total length of the linear actuator to a desired length and perform a detection operation. Is a method in which feedback control is performed by giving a predetermined drive signal to the pump so that the measured value by the pressure sensor becomes constant.

(19) 本発明の第１９の態様は、所定の作用体に対して所定方向に作用した力を検出する検出機能と、作用体を所定方向に駆動する駆動機能と、を有する力検出機能をもった駆動装置において、
作用体として機能する上方構造体と、
上方構造体の下方に配置された下方構造体と、
下方構造体の上方位置に上方構造体が、少なくとも所定の１方向に傾斜可能な状態で支持されるように、上方構造体と下方構造体とを接続する中央接続部材と、
上端が上方構造体の下面側に上方接続部を介して接続され、下端が下方構造体の上面側に下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもち、中央接続部材の周囲に配置された複数Ｎ本の周辺接続部材と、
複数Ｎ本の周辺接続部材の下端の下方構造体に対する上下方向に関する変位をそれぞれ検出するセンサと、
伸縮駆動機構に所定の電気信号を与えて複数Ｎ本の周辺接続部材の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、センサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作と、を行う制御ユニットと、
を備え、
上方接続部は、周辺接続部材の上端付近が上方構造体に対して少なくとも所定の１方向に傾斜可能となるように、周辺接続部材の上端を上方構造体の下面に接続する構造を有し、
下方接続部は、周辺接続部材の下端付近が下方構造体に対して少なくとも所定の１方向に傾斜可能となるように、かつ、下方構造体に対して上下方向に変位可能となるように、周辺接続部材の下端を下方構造体の上面に接続する構造を有するようにしたものである。 (19) According to a nineteenth aspect of the present invention, there is provided a force detection function having a detection function for detecting a force acting on a predetermined action body in a predetermined direction and a drive function for driving the action body in a predetermined direction. In the drive device with
An upper structure that functions as an action body;
A lower structure disposed below the upper structure;
A central connecting member that connects the upper structure and the lower structure so that the upper structure is supported at a position above the lower structure so as to be tiltable in at least one predetermined direction;
The upper end is connected to the lower surface side of the upper structure via the upper connection portion, the lower end is connected to the upper surface side of the lower structure via the lower connection portion, and the length between the upper and lower ends based on the given electrical signal A plurality of N peripheral connection members arranged around the central connection member,
Sensors for detecting displacements in the vertical direction with respect to the lower structure at the lower ends of the plurality of N peripheral connection members;
Based on the drive operation that gives a predetermined electrical signal to the telescopic drive mechanism and adjusts the length between the upper and lower ends of the N peripheral connection members to a desired length and the detection result of the sensor. A detection unit that outputs an electrical signal indicating the force acting on the body,
With
The upper connection portion has a structure in which the upper end of the peripheral connection member is connected to the lower surface of the upper structure so that the vicinity of the upper end of the peripheral connection member can be inclined in at least one predetermined direction with respect to the upper structure.
The lower connection portion is arranged so that the vicinity of the lower end of the peripheral connection member can be tilted in at least one predetermined direction with respect to the lower structure and can be displaced in the vertical direction with respect to the lower structure. It has a structure in which the lower end of the connecting member is connected to the upper surface of the lower structure.

(20) 本発明の第２０の態様は、上述した第１９の態様に係る力検出機能をもった駆動装置において、
下方構造体が平板状の下方基板からなり、その基板面に対して平行なＸＹ平面をもったＸＹＺ三次元座標系を定義したときに、中央接続部材の中心軸がＺ軸上にくるように、中央接続部材の下端が下方構造体に固着されており、中央接続部材の上端による上方構造体の支持中心点が常にＺ軸上に維持されるように構成したものである。 (20) According to a twentieth aspect of the present invention, in the drive device having the force detection function according to the nineteenth aspect described above,
When defining the XYZ three-dimensional coordinate system in which the lower structure is a flat lower substrate and has an XY plane parallel to the substrate surface, the central axis of the central connecting member is on the Z axis. The lower end of the central connection member is fixed to the lower structure, and the support center point of the upper structure by the upper end of the central connection member is always maintained on the Z axis.

(21) 本発明の第２１の態様は、上述した第２０の態様に係る力検出機能をもった駆動装置において、
中央接続部材が、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構を有し、中央接続部材の長さの変化に応じて、中央接続部材の上端による上方構造体の支持中心点がＺ軸に沿って移動するようにしたものである。 (21) According to a twenty-first aspect of the present invention, in the drive device having the force detection function according to the twentieth aspect described above,
The central connecting member has an expansion / contraction driven mechanism that changes the length between the upper and lower ends according to the extension force or compression force applied as an external force between the upper and lower ends. The support center point of the upper structure by the upper end of the connecting member is moved along the Z axis.

(22) 本発明の第２２の態様は、上述した第１９〜第２１の態様に係る力検出機能をもった駆動装置において、
中央接続部材の周囲に第１〜第４の周辺接続部材を配置し、これら４本の周辺接続部材の上下両端間の長さが互いに等しくなるように伸縮駆動機構を調整した「標準姿勢」の状態、かつ、検出対象となる力が作用していない状態では、第１の周辺接続部材の中心軸と第２の周辺接続部材の中心軸とが第１の平面上に位置し、第３の周辺接続部材の中心軸と第４の周辺接続部材の中心軸とが第１の平面に直交する第２の平面上に位置し、第１の平面に関して第３の周辺接続部材と第４の周辺接続部材とが面対称をなし、第２の平面に関して第１の周辺接続部材と第２の周辺接続部材とが面対称をなすようにしたものである。 (22) According to a twenty-second aspect of the present invention, in the driving device having the force detection function according to the nineteenth to twenty-first aspects described above,
A “standard posture” in which the first to fourth peripheral connection members are arranged around the central connection member, and the telescopic drive mechanism is adjusted so that the lengths between the upper and lower ends of these four peripheral connection members are equal to each other. In the state and the state where the force to be detected is not acting, the central axis of the first peripheral connection member and the central axis of the second peripheral connection member are located on the first plane, and the third The central axis of the peripheral connecting member and the central axis of the fourth peripheral connecting member are located on the second plane orthogonal to the first plane, and the third peripheral connecting member and the fourth peripheral with respect to the first plane The connection member is plane-symmetric, and the first peripheral connection member and the second peripheral connection member are plane-symmetric with respect to the second plane.

本発明に係る装置では、上方構造体と下方構造体とが、伸縮駆動機能をもった４本の接続部材によって接続されるので、これら接続部材を伸縮駆動することにより、上方構造体を下方構造体に対して駆動することができる。また、個々の接続部材の下端の上下方向に関する変位を検出するセンサが設けられているため、上方構造体に対して作用した特定方向の力を検出することも可能になり、駆動機能とともに力検出機能を備えた装置が実現できる。   In the apparatus according to the present invention, the upper structure and the lower structure are connected by four connection members having an expansion / contraction drive function. Can be driven against the body. In addition, since a sensor for detecting the displacement in the vertical direction of the lower end of each connecting member is provided, it is also possible to detect a force in a specific direction that has acted on the upper structure, thereby detecting the force together with the driving function. A device with a function can be realized.

このように、本発明に係る装置は、１台の装置でありながら、駆動装置と力検出装置との双方を兼ねる働きをするため、駆動装置と力検出装置とをそれぞれ別個に設ける場合に比べて、全体の構造を単純化することができ、小型化を実現することができ、コスト低減を図ることもできる。また、上方構造体と下方構造体とを接続部材で接続した構造をとるため、ロボットや産業機械などの関節部分を構成するのに適した単純な構造をもった装置になる。   As described above, the device according to the present invention functions as both a drive device and a force detection device although it is a single device, so that the drive device and the force detection device are provided separately from each other. Thus, the entire structure can be simplified, downsizing can be realized, and cost can be reduced. In addition, since the upper structure and the lower structure are connected by a connecting member, the apparatus has a simple structure suitable for configuring a joint portion such as a robot or an industrial machine.

４本の接続部材の上下両端は、端部が任意の方向に傾斜可能となるような構造をもった接続部材（たとえば、転がり球面軸受を利用した部材）を介して上下の構造体に接続されることになるが、上端のみが任意の方向に傾斜可能となるように接続された第５の接続部材を付加すれば、この第５の接続部材によって、上方構造体を下方構造体に対して安定して支持することができるようになる。   The upper and lower ends of the four connecting members are connected to the upper and lower structures via connecting members (for example, members using rolling spherical bearings) having a structure in which the end portions can be inclined in any direction. However, if a fifth connecting member connected so that only the upper end can be tilted in any direction is added, the upper connecting member is moved from the lower connecting member by the fifth connecting member. It becomes possible to support stably.

本発明の第１の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４００はブロックで示す）。It is a longitudinal cross-sectional view of the drive device with the force detection function which concerns on the 1st Embodiment of this invention (the control unit 400 is shown with a block). 図１に示す装置に用いられている接続部材Ｐ１０の拡大縦断面図である（ポンプの部分はブロックで示す）。It is an expanded longitudinal cross-sectional view of the connection member P10 used for the apparatus shown in FIG. 1 (the part of a pump is shown with a block). 図１に示す装置に用いられている転がり球面軸受Ｑ１０の拡大縦断面図である。FIG. 2 is an enlarged longitudinal sectional view of a rolling spherical bearing Q10 used in the apparatus shown in FIG. 図１に示す装置をＸＹ平面で切断し、上方部分を見上げた状態を示す横断面図である。FIG. 2 is a cross-sectional view showing a state in which the apparatus shown in FIG. 1 is cut along an XY plane and an upper part is looked up. 図１に示す装置を切断線５−５に沿った面で切断し、下方部分を見下ろした状態を示す横断面図である。FIG. 5 is a cross-sectional view showing a state in which the apparatus shown in FIG. 1 is cut along a plane along the cutting line 5-5 and the lower part is looked down. 図１に示す装置を切断線６−６に沿った面で切断し、下方部分を見下ろした状態を示す横断面図である（破線は、中間基板２００に設けられた溝および下方基板３００に設けられた固定電極を示す）。FIG. 6 is a cross-sectional view showing a state in which the apparatus shown in FIG. 1 is cut along a plane along the cutting line 6-6 and looks down on the lower part (broken lines are provided in the groove provided in the intermediate substrate 200 and the lower substrate 300 A fixed electrode is shown). 図１に示す装置の中間基板２００の下面図である。It is a bottom view of the intermediate substrate 200 of the apparatus shown in FIG. 図１に示す装置の下方基板３００の上面図である。It is a top view of the lower substrate 300 of the apparatus shown in FIG. 図１に示す装置における上方基板１００（作用体）を＋Ｙ軸まわりに駆動した状態を示す縦断面図である（制御ユニット４００はブロックで示す）。FIG. 2 is a longitudinal sectional view showing a state in which an upper substrate 100 (acting body) in the apparatus shown in FIG. 1 is driven around a + Y axis (a control unit 400 is shown by a block). 図１に示す装置の駆動動作を示すテーブルである。It is a table which shows the drive operation | movement of the apparatus shown in FIG. 図１に示す装置における上方基板１００（作用体）に対してＹ軸まわりのモーメント＋Ｍｙが作用した状態を示す縦断面図である（制御ユニット４００はブロックで示す）。It is a longitudinal cross-sectional view which shows the state which the moment + My around Y-axis acted with respect to the upper board | substrate 100 (action body) in the apparatus shown in FIG. 1 (the control unit 400 is shown with a block). 図１に示す装置の検出動作を示すテーブルである。It is a table which shows the detection operation of the apparatus shown in FIG. 本発明の第２の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４５０はブロックで示す）。It is a longitudinal cross-sectional view of the drive device with the force detection function which concerns on the 2nd Embodiment of this invention (the control unit 450 is shown with a block). 図１３に示す装置の検出動作を示すテーブルである。It is a table which shows the detection operation of the apparatus shown in FIG. 図１３に示す装置における上方基板１００（作用体）に対して＋Ｚ軸方向の力＋Ｆｚが作用した状態を示す縦断面図である。FIG. 14 is a longitudinal sectional view showing a state where a force + Fz in the + Z-axis direction is applied to the upper substrate 100 (acting body) in the apparatus shown in FIG. 13. 図１３に示す装置における上方基板１００（作用体）に対して−Ｚ軸方向の力−Ｆｚが作用した状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the state which force -Fz of -Z-axis direction acted on the upper board | substrate 100 (action body) in the apparatus shown in FIG. 本発明の第４の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４８０はブロックで示す）。It is a longitudinal cross-sectional view of the drive device with the force detection function which concerns on the 4th Embodiment of this invention (the control unit 480 is shown with a block). 図１７に示す装置の駆動動作を示すテーブルである。It is a table which shows the drive operation | movement of the apparatus shown in FIG. 図２に示す接続部材の変形例Ｐ１０′を示す拡大縦断面図である。FIG. 6 is an enlarged longitudinal sectional view showing a modified example P10 ′ of the connecting member shown in FIG. 図１に示す駆動装置を手首の関節部分に用いたロボットアームの側面図である。It is a side view of the robot arm which used the drive device shown in Drawing 1 for the joint part of a wrist.

以下、本発明を図示するいくつかの実施形態に基づいて説明する。   Hereinafter, the present invention will be described based on several embodiments illustrated in the drawings.

＜＜＜ §１． 第１の実施形態の構造 ＞＞＞
図１は、本発明の第１の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４００はブロックで示す）。この装置の主たる構成要素は、上方基板１００、中間基板２００、下方基板３００という３枚の平板状基板と、第１〜第５の接続部材Ｐ１０〜Ｐ５０という５本の柱状接続部材である（図１には、３本の接続部材Ｐ１０，Ｐ２０，Ｐ５０のみが現れている）。後述するとおり、第５の接続部材Ｐ５０は、この装置の中心軸を通る位置に配置され、第１〜第４の接続部材Ｐ１０〜Ｐ４０は、その周囲に配置されている。 <<< §1. Structure of the first embodiment >>
FIG. 1 is a longitudinal sectional view of a drive device having a force detection function according to a first embodiment of the present invention (a control unit 400 is shown as a block). The main components of this apparatus are three plate-like substrates, that is, an upper substrate 100, an intermediate substrate 200, and a lower substrate 300, and five columnar connection members called first to fifth connection members P10 to P50 (see FIG. 1 shows only three connecting members P10, P20 and P50). As will be described later, the fifth connecting member P50 is disposed at a position passing through the central axis of the apparatus, and the first to fourth connecting members P10 to P40 are disposed around the fifth connecting member P50.

ここでは、説明の便宜上、図示のとおり、第５の接続部材Ｐ５０の上端付近に原点Ｏをもち、図の右方向にＸ軸、図の紙面に垂直な奥へ向かう方向にＹ軸、図の上方向にＺ軸をそれぞれ配したＸＹＺ三次元座標系を定義する。図１は、この装置をＸＺ平面に沿って切断した縦断面図に相当する。   Here, for convenience of explanation, as shown, the origin O is in the vicinity of the upper end of the fifth connecting member P50, the X axis is in the right direction in the figure, the Y axis is in the direction perpendicular to the paper surface in the figure, An XYZ three-dimensional coordinate system in which the Z axis is arranged in the upward direction is defined. FIG. 1 corresponds to a longitudinal sectional view of the device cut along the XZ plane.

３枚の基板１００，２００，３００は、いずれも同じサイズの円盤状の基板であり、基板面がＸＹ平面に平行になり、その中心位置にＺ軸が貫通するように配置されている。もっとも、後述するように、第１〜第４の接続部材Ｐ１０〜Ｐ４０は、それぞれ伸縮駆動機構を有しており、その長さを調整することができる。図１に示す状態は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが互いに等しくなるように伸縮駆動機構を調整した状態（本願では「標準姿勢」と呼ぶ）ということになる。   The three substrates 100, 200, and 300 are all disk-shaped substrates of the same size, and are arranged so that the substrate surface is parallel to the XY plane and the Z-axis passes through the center position. However, as will be described later, each of the first to fourth connecting members P10 to P40 has an expansion / contraction drive mechanism, and the length thereof can be adjusted. The state shown in FIG. 1 is a state in which the telescopic drive mechanism is adjusted so that the lengths between the upper and lower ends of the first to fourth connecting members P10 to P40 are equal to each other (referred to as “standard posture” in the present application). become.

５本の接続部材Ｐ１０〜Ｐ５０は、上方基板１００の下面と中間基板２００の上面とを接続する機能を果たし、図示のような「標準姿勢」では、各接続部材Ｐ１０〜Ｐ５０の長手方向軸はＺ軸に平行になる。一方、下方基板３００の上面は、中間基板２００の下面に接合されている。   The five connecting members P10 to P50 serve to connect the lower surface of the upper substrate 100 and the upper surface of the intermediate substrate 200. In the “standard posture” as shown, the longitudinal axis of each connecting member P10 to P50 is Parallel to the Z axis. On the other hand, the upper surface of the lower substrate 300 is bonded to the lower surface of the intermediate substrate 200.

上方基板１００および下方基板３００は、完全な円盤状の基板であるが、中間基板２００は、円盤状の基板の下面の４カ所に円柱状の溝Ｇ１０〜Ｇ４０を形成した構造を有する。ここで、４カ所の溝Ｇ１０〜Ｇ４０の形成位置は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の配置位置に対応したものとなっている。図１には、第１および第２の接続部材Ｐ１０，Ｐ２０の直下の位置に、それぞれ溝Ｇ１０，Ｇ２０が形成されている状態が示されている。また、下方基板３００の上面の４カ所（溝Ｇ１０〜Ｇ４０の形成位置）には、それぞれ円盤状の固定電極Ｅ１０〜Ｅ４０が形成されている。図１には、第１および第２の溝Ｇ１０，Ｇ２０の内部に、それぞれ固定電極Ｅ１０，Ｅ２０が形成されている状態が示されている。   The upper substrate 100 and the lower substrate 300 are complete disk-shaped substrates, but the intermediate substrate 200 has a structure in which cylindrical grooves G10 to G40 are formed at four positions on the lower surface of the disk-shaped substrate. Here, the formation positions of the four grooves G10 to G40 correspond to the arrangement positions of the first to fourth connection members P10 to P40. FIG. 1 shows a state where grooves G10 and G20 are formed at positions immediately below the first and second connecting members P10 and P20, respectively. In addition, disk-shaped fixed electrodes E10 to E40 are formed at four positions (formation positions of the grooves G10 to G40) on the upper surface of the lower substrate 300, respectively. FIG. 1 shows a state in which fixed electrodes E10 and E20 are formed in the first and second grooves G10 and G20, respectively.

上方基板１００の材質は任意でよいが、中間基板２００は金属などの導電性基板によって構成するのが好ましい。これは、後述するように、中間基板２００の溝Ｇ１０〜Ｇ４０の底部をなす膜部２０１〜２０４を変位電極として利用できるようにするための配慮である。また、下方基板３００はガラスや樹脂などの絶縁性基板によって構成するのが好ましい。これは、その上面に形成される固定電極Ｅ１０〜Ｅ４０が互いに導通しないようにするための配慮である。   The upper substrate 100 may be made of any material, but the intermediate substrate 200 is preferably composed of a conductive substrate such as metal. This is a consideration for making it possible to use the film portions 201 to 204 forming the bottoms of the grooves G10 to G40 of the intermediate substrate 200 as displacement electrodes, as will be described later. The lower substrate 300 is preferably composed of an insulating substrate such as glass or resin. This is a consideration for preventing the fixed electrodes E10 to E40 formed on the upper surface from conducting to each other.

第１〜第４の接続部材Ｐ１０〜Ｐ４０は、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもっている。図１に示すとおり、第１および第２の接続部材Ｐ１０，Ｐ２０は、外側筒状部Ｐ１と内側柱状部Ｐ２とを有し、内側柱状部Ｐ２を外側筒状部Ｐ１に対して長手方向に駆動することにより、その全長を変化させる機能を有する。   The first to fourth connecting members P10 to P40 have an expansion / contraction drive mechanism that changes the length between the upper and lower ends based on a given electric signal. As shown in FIG. 1, the first and second connecting members P10 and P20 have an outer cylindrical portion P1 and an inner columnar portion P2, and the inner columnar portion P2 is arranged in the longitudinal direction with respect to the outer cylindrical portion P1. By driving, it has a function of changing its overall length.

図２は、図１に示す装置に用いられている接続部材Ｐ１０の拡大縦断面図である（ポンプＰ５の部分はブロックで示す）。このような構造を有する接続部材Ｐ１０は、一般にリニアアクチュエータとして市販されている。図示のとおり、この接続部材Ｐ１０は、円筒状の外側筒状部Ｐ１と、その内側に嵌合した円柱状の内側柱状部Ｐ２と、を同一の軸（摺動軸Ａ）上に配置してなる構造部を有している。内側柱状部Ｐ２は外側筒状部Ｐ１の内壁に沿って図の摺動軸Ａ方向に摺動する。外側筒状部Ｐ１と内側柱状部Ｐ２との接触面は十分な密閉性が確保されており、内側柱状部Ｐ２の左側には、図示のように密閉状態となった圧力室Ｐ３が設けられている。この圧力室Ｐ３は、導管Ｐ４を介してポンプＰ５へ繋がっている。また、内側柱状部Ｐ２の右方には上方竿状部Ｐ６が接続され、外側筒状部Ｐ３の左方には下方竿状部Ｐ７が接続されている。   FIG. 2 is an enlarged longitudinal sectional view of a connecting member P10 used in the apparatus shown in FIG. 1 (the pump P5 portion is shown as a block). The connection member P10 having such a structure is generally marketed as a linear actuator. As shown in the figure, this connecting member P10 has a cylindrical outer cylindrical portion P1 and a columnar inner columnar portion P2 fitted inside the same, arranged on the same axis (sliding axis A). It has the structure part which becomes. The inner columnar part P2 slides in the direction of the sliding axis A in the drawing along the inner wall of the outer cylindrical part P1. The contact surface between the outer cylindrical portion P1 and the inner columnar portion P2 is sufficiently sealed, and a pressure chamber P3 in a sealed state as shown in the drawing is provided on the left side of the inner columnar portion P2. Yes. The pressure chamber P3 is connected to the pump P5 through a conduit P4. Further, an upper hook-like part P6 is connected to the right side of the inner columnar part P2, and a lower hook-like part P7 is connected to the left side of the outer cylindrical part P3.

外部から電気信号を与えて、ポンプＰ５を駆動し、圧力室Ｐ３内部に空気を送ったり、逆に吸引したりすることにより、圧力室Ｐ３内部の圧力を増減させることができる。この圧力室Ｐ３内部の圧力変動によって、内側柱状部Ｐ２は図の摺動軸Ａ方向に摺動することになる。このようにポンプＰ５に所定の駆動信号を与えて駆動し、圧力室Ｐ３の内圧を制御すれば、内側柱状部Ｐ２の位置を自由に調整することができ、また、定位置に固定することもできる。結局、導管Ｐ４およびポンプＰ５は、内側柱状部Ｐ２を外側筒状部Ｐ１に対して、摺動軸Ａに沿った方向に摺動させることにより、この接続部材Ｐ１０の全長を所望の長さに調整し、また、当該長さを維持させる伸縮駆動機構として機能する。   The pressure inside the pressure chamber P3 can be increased or decreased by giving an electric signal from the outside, driving the pump P5, and sending air into the pressure chamber P3 or sucking it back. Due to the pressure fluctuation inside the pressure chamber P3, the inner columnar portion P2 slides in the sliding axis A direction in the figure. In this way, if the pump P5 is driven by giving a predetermined drive signal to control the internal pressure of the pressure chamber P3, the position of the inner columnar portion P2 can be freely adjusted, and can also be fixed at a fixed position. it can. Eventually, the conduit P4 and the pump P5 slide the inner columnar part P2 with respect to the outer cylindrical part P1 in the direction along the sliding axis A, so that the total length of the connecting member P10 becomes a desired length. It functions as a telescopic drive mechanism that adjusts and maintains the length.

なお、図２には、空気圧で伸縮制御を行うリニアアクチュエータの例を示すが、圧力室Ｐ３および導管Ｐ４に油やその他の媒質を充填させた油圧式のリニアアクチュエータを用いることもできる。あるいは、モータでねじを回転させて伸縮を行うようなリニアアクチュエータを用いてもかまわない。もちろん、リンク機構を用いて接続部材を構成し、個々のリンクのなす角を制御することにより、上下両端間の長さを調整することも可能である。要するに、本発明で用いる接続部材は、電気信号に基づいて上下両端間の長さを変えるアクチュエータであれば、どのような部材を用いてもかまわない。   Although FIG. 2 shows an example of a linear actuator that performs expansion / contraction control by air pressure, a hydraulic linear actuator in which oil or other medium is filled in the pressure chamber P3 and the conduit P4 can also be used. Alternatively, a linear actuator that extends and contracts by rotating a screw with a motor may be used. Of course, it is also possible to adjust the length between the upper and lower ends by configuring the connecting member using a link mechanism and controlling the angle formed by each link. In short, the connecting member used in the present invention may be any member as long as it is an actuator that changes the length between the upper and lower ends based on an electrical signal.

図２には、第１の接続部材Ｐ１０の構造例を示したが、第２〜第４の接続部材Ｐ２０〜Ｐ４０の構造も全く同じである。これに対して、第５の接続部材Ｐ５０は、図１に示されているとおり、単なる円柱状の構造体であり、伸縮機能は有していない。結局、図１に示す第１の実施形態に係る装置の場合、第１〜第４の接続部材Ｐ１０〜Ｐ４０は、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもったリニアアクチュエータによって構成されているが、第５の接続部材Ｐ５０は、そのような伸縮駆動機構をもたない柱状の構造体によって構成されていることになる。なお、図１では、図が繁雑になるのを避けるため、第１〜第４の接続部材Ｐ１０〜Ｐ４０については、導管Ｐ４およびポンプＰ５の図示は省略している。   Although FIG. 2 shows a structural example of the first connecting member P10, the structures of the second to fourth connecting members P20 to P40 are exactly the same. On the other hand, the 5th connection member P50 is a simple column-shaped structure as FIG. 1 shows, and does not have an expansion-contraction function. After all, in the case of the apparatus according to the first embodiment shown in FIG. 1, the first to fourth connecting members P10 to P40 are provided with an expansion / contraction drive mechanism that changes the length between the upper and lower ends based on a given electric signal. The fifth connecting member P50 is constituted by a columnar structure that does not have such a telescopic drive mechanism. In FIG. 1, the illustration of the conduit P4 and the pump P5 is omitted for the first to fourth connection members P10 to P40 in order to avoid the drawing from becoming complicated.

続いて、各接続部材Ｐ１０〜Ｐ５０と各基板との接続部分の構造を説明する。まず、第１〜第５の接続部材Ｐ１０〜Ｐ５０の上端部と上方基板１００との接続部分には、それぞれ転がり球面軸受Ｑ１０〜Ｑ５０が設けられている。同様に、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端部と中間基板２００との接続部分には、それぞれ転がり球面軸受Ｒ１０〜Ｒ４０が設けられている。このように、各接続部材の上下両端には、転がり球面軸受が設けられているが、唯一の例外は、第５の接続部材Ｐ５０の下端である。図１に示すとおり、第５の接続部材Ｐ５０の下端は、中間基板２００の上面に直接固着されている。結局、この図１に示す実施形態の場合、合計９カ所に転がり球面軸受が用いられていることになる。   Then, the structure of the connection part of each connection member P10-P50 and each board | substrate is demonstrated. First, rolling spherical bearings Q <b> 10 to Q <b> 50 are provided at connection portions between the upper ends of the first to fifth connection members P <b> 10 to P <b> 50 and the upper substrate 100, respectively. Similarly, rolling spherical bearings R <b> 10 to R <b> 40 are provided at connection portions between the lower ends of the first to fourth connection members P <b> 10 to P <b> 40 and the intermediate substrate 200, respectively. Thus, rolling spherical bearings are provided at the upper and lower ends of each connecting member, the only exception being the lower end of the fifth connecting member P50. As shown in FIG. 1, the lower end of the fifth connection member P <b> 50 is directly fixed to the upper surface of the intermediate substrate 200. Eventually, in the embodiment shown in FIG. 1, rolling spherical bearings are used in a total of nine places.

図３は、図１に示す転がり球面軸受Ｑ１０の基本構成を示す拡大縦断面図である。転がり球面軸受は、古くから様々なタイプのものが市販されている公知の軸受である。図示した転がり球面軸受は、ハウジングＱ１の内部に球状の空洞を設け、この空洞内に球体部Ｑ２を収容した構造を有する。ハウジングＱ１の上面は、上方基板１００の下面に接合される。また、球体部Ｑ２の下方には、上方竿状部Ｐ６が接合されている。この上方竿状部Ｐ６は、図２に示すように、内側柱状部Ｐ２へと繋がっている構成要素である。ハウジングＱ１と球体部Ｑ２との間の間隙部Ｑ３には、通常、ベアリング（図示省略）が充填されており、球体部Ｑ２はハウジングＱ１の内部で滑らかに回転することができる。   FIG. 3 is an enlarged longitudinal sectional view showing a basic configuration of the rolling spherical bearing Q10 shown in FIG. The rolling spherical bearing is a known bearing that has been commercially available in various types for a long time. The illustrated rolling spherical bearing has a structure in which a spherical cavity is provided inside the housing Q1, and the spherical body portion Q2 is accommodated in the cavity. The upper surface of the housing Q1 is joined to the lower surface of the upper substrate 100. Further, an upper hook-like portion P6 is joined below the spherical body portion Q2. As shown in FIG. 2, the upper bowl-shaped portion P6 is a component connected to the inner columnar portion P2. The gap Q3 between the housing Q1 and the sphere part Q2 is normally filled with a bearing (not shown), and the sphere part Q2 can rotate smoothly inside the housing Q1.

ハウジングＱ１，球体部Ｑ２，上方竿状部Ｐ６は、いずれも金属などの剛体から構成されているが、ハウジングＱ１の内部に収容された球体部Ｑ２は、任意の方向に回転することができるため、ハウジングＱ１の下面に形成された導出口Ｑ４から下方に導出された上方竿状部Ｐ６は、この導出口Ｑ４の広がりの範囲において、自由に回動することができる。結局、この転がり球面軸受Ｑ１０を介して接続された第１の接続部材Ｐ１０の上端付近は、上方基板１００に対して任意の方向に傾斜可能となるように接続されることになる。   The housing Q1, the sphere part Q2, and the upper bowl-shaped part P6 are all made of a rigid body such as metal, but the sphere part Q2 accommodated inside the housing Q1 can rotate in any direction. The upper hook-like portion P6 led downward from the lead-out port Q4 formed on the lower surface of the housing Q1 can freely rotate within the range of the lead-out port Q4. Eventually, the vicinity of the upper end of the first connecting member P10 connected via the rolling spherical bearing Q10 is connected to the upper substrate 100 so as to be inclined in an arbitrary direction.

図３には、第１の接続部材Ｐ１０の上端を上方基板１００に接続するための転がり球面軸受Ｑ１０の構造例を示したが、第２〜第５の接続部材Ｐ２０〜Ｐ５０の上端を上方基板１００に接続するための転がり球面軸受Ｑ２０〜Ｑ５０の構造も全く同じである。また、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を中間基板２００に接続するための転がり球面軸受Ｒ１０〜Ｒ４０の構造も全く同じである。たとえば、図３に示す転がり球面軸受Ｑ１０を上下反転させたものが、転がり球面軸受Ｒ１０となり、下方竿状部Ｐ７を中間基板２００に接続する役割を果たす。   FIG. 3 shows a structural example of the rolling spherical bearing Q10 for connecting the upper end of the first connecting member P10 to the upper substrate 100. The upper ends of the second to fifth connecting members P20 to P50 are connected to the upper substrate. The structures of the rolling spherical bearings Q20 to Q50 for connecting to 100 are exactly the same. The structures of the rolling spherical bearings R10 to R40 for connecting the lower ends of the first to fourth connecting members P10 to P40 to the intermediate substrate 200 are also the same. For example, the rolling spherical bearing Q10 shown in FIG. 3 is turned upside down to form a rolling spherical bearing R10, which plays a role of connecting the lower flange portion P7 to the intermediate substrate 200.

図１に示されているとおり、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上端は、それぞれ転がり球面軸受Ｑ１０〜Ｑ４０を介して上方基板１００の下面に接続されている。これに対して、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端は、それぞれ転がり球面軸受Ｒ１０〜Ｒ４０を介して中間基板２００の上面に接続され、更に、この中間基板２００が下方基板３００の上面に接続されている。   As shown in FIG. 1, the upper ends of the first to fourth connection members P10 to P40 are connected to the lower surface of the upper substrate 100 via rolling spherical bearings Q10 to Q40, respectively. On the other hand, the lower ends of the first to fourth connecting members P10 to P40 are connected to the upper surface of the intermediate substrate 200 via rolling spherical bearings R10 to R40, respectively. Connected to the top surface.

このように、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を中間基板２００を介して下方基板３００に接続する構造を採るのは、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端付近が下方基板３００に対して上下方向（Ｚ軸方向）に変位可能となるように接続するためである。すなわち、中間基板２００における転がり球面軸受Ｒ１０〜Ｒ４０の取り付け箇所には、溝Ｇ１０〜Ｇ４０が形成されており、これら溝Ｇ１０〜Ｇ４０の底部には、それぞれ膜部２０１〜２０４が形成されている。膜部２０１〜２０４の厚みは、力検出に必要な撓みが生じるのに適した厚みに設計される。このように、膜部２０１〜２０４は可撓性をもっているため、ダイアフラムとして機能し、Ｚ軸方向を向いた力が作用すると撓みが生じ、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端付近は、下方基板３００に対して上下方向（Ｚ軸方向）に変位する。後述するように、本発明に係る装置の力検出機能は、この上下方向の変位に基づいて行われる。   As described above, the structure in which the lower ends of the first to fourth connection members P10 to P40 are connected to the lower substrate 300 via the intermediate substrate 200 is in the vicinity of the lower ends of the first to fourth connection members P10 to P40. This is for connecting to the lower substrate 300 so as to be displaceable in the vertical direction (Z-axis direction). That is, grooves G10 to G40 are formed at the attachment positions of the rolling spherical bearings R10 to R40 on the intermediate substrate 200, and film parts 201 to 204 are formed at the bottoms of the grooves G10 to G40, respectively. The thicknesses of the film portions 201 to 204 are designed to have a thickness suitable for causing a deflection necessary for force detection. Thus, since the film parts 201-204 have flexibility, it functions as a diaphragm, and when the force which faced the Z-axis direction acts, bending will arise and the lower end vicinity of the 1st-4th connection members P10-P40 Is displaced in the vertical direction (Z-axis direction) with respect to the lower substrate 300. As will be described later, the force detection function of the apparatus according to the present invention is performed based on this vertical displacement.

図４は、図１に示す装置をＸＹ平面で切断し、上方部分を見上げた状態を示す横断面図である。したがって、図には、上方基板１００の下面図が、５組の転がり球面軸受Ｑ１０〜Ｑ５０とともに示されている。各転がり球面軸受Ｑ１０〜Ｑ５０の部分には、ハウジングＱ１と球体部Ｑ２とが示されている。図示のとおり、中央に配置された転がり球面軸受Ｑ５０の球体部Ｑ２の中心位置にＸＹＺ三次元座標系の原点Ｏが定義され、図の右方向にＸ軸、図の下方向にＹ軸がとられている。しかも、軸受Ｑ１０はＸ軸の正の部分に配置され、軸受Ｑ２０はＸ軸の負の部分に配置され、軸受Ｑ３０はＹ軸の正の部分に配置され、軸受Ｑ４０はＹ軸の負の部分に配置されている。また、これら４組の軸受Ｑ１０〜Ｑ４０は、原点Ｏから等距離の位置に配置されている。   FIG. 4 is a cross-sectional view showing a state in which the apparatus shown in FIG. 1 is cut along the XY plane and the upper part is looked up. Therefore, in the figure, a bottom view of the upper substrate 100 is shown together with five sets of rolling spherical bearings Q10 to Q50. In each of the rolling spherical bearings Q10 to Q50, a housing Q1 and a spherical part Q2 are shown. As shown in the figure, the origin O of the XYZ three-dimensional coordinate system is defined at the center position of the sphere part Q2 of the rolling spherical bearing Q50 arranged in the center, and the X axis is on the right side of the figure and the Y axis is on the lower side of the figure. It has been. In addition, the bearing Q10 is disposed in the positive part of the X axis, the bearing Q20 is disposed in the negative part of the X axis, the bearing Q30 is disposed in the positive part of the Y axis, and the bearing Q40 is the negative part of the Y axis. Is arranged. Further, these four sets of bearings Q10 to Q40 are arranged at equidistant positions from the origin O.

図５は、図１に示す装置を切断線５−５に沿った面で切断し、下方部分を見下ろした状態を示す横断面図である。したがって、図には、中間基板２００の上面図が、５組の接続部材Ｐ１０〜Ｐ５０とともに示されている。第１〜第４の接続部材Ｐ１０〜Ｐ４０の部分には、外側筒状部Ｐ１と内側柱状部Ｐ２とが示されており（導管Ｐ４およびポンプＰ５の図示は省略）、前述したとおり、リニアアクチュエータとして機能する。これに対して、第５の接続部材Ｐ５０は、円柱状の構造体であり、リニアアクチュエータとしての機能は有していない。第１〜第４の接続部材Ｐ１０〜Ｐ４０は、それぞれ転がり球面軸受Ｒ１０〜Ｒ４０（図５には現れていない）を介して中間基板２００の上面に接続されている。   FIG. 5 is a cross-sectional view showing a state in which the device shown in FIG. 1 is cut along a plane along the cutting line 5-5 and the lower part is looked down. Therefore, in the drawing, a top view of the intermediate substrate 200 is shown together with five sets of connecting members P10 to P50. The outer cylindrical part P1 and the inner columnar part P2 are shown in the first to fourth connecting members P10 to P40 (the conduit P4 and the pump P5 are not shown), and as described above, the linear actuator Function as. On the other hand, the fifth connecting member P50 is a cylindrical structure and does not have a function as a linear actuator. The first to fourth connection members P10 to P40 are connected to the upper surface of the intermediate substrate 200 via rolling spherical bearings R10 to R40 (not shown in FIG. 5), respectively.

図５には、便宜上、Ｘ軸およびＹ軸の投影像を示してある。図１に示すような「標準姿勢」では、各接続部材Ｐ１０〜Ｐ５０の上下両端を通る直線、すなわち長手方向軸（中心軸）はＺ軸に平行になり、第１の接続部材Ｐ１０の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材Ｐ２０の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材Ｐ３０の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材Ｐ４０の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材Ｐ５０の上下両端を通る直線はＺ軸に一致する。   FIG. 5 shows X-axis and Y-axis projection images for convenience. In the “standard posture” as shown in FIG. 1, the straight line passing through the upper and lower ends of each connection member P10 to P50, that is, the longitudinal axis (center axis) is parallel to the Z axis, and the upper and lower ends of the first connection member P10. The straight line that passes through the X axis in the positive region intersects with the upper and lower ends of the second connecting member P20, the straight line that passes through the X axis and the negative region, and the straight line that passes through the upper and lower ends of the third connecting member P30 is the Y axis. The straight line passing through the upper and lower ends of the fourth connecting member P40 intersects the Y axis in the negative region, and the straight line passing through the upper and lower ends of the fifth connecting member P50 coincides with the Z axis.

図６は、図１に示す装置を切断線６−６に沿った面で切断し、下方部分を見下ろした状態を示す横断面図である。したがって、図には、中間基板２００の上面図が、４組の転がり球面軸受Ｒ１０〜Ｒ４０および第５の接続部材Ｐ５０とともに示されている。各転がり球面軸受Ｒ１０〜Ｒ４０の部分には、ハウジングＱ１および球体部Ｑ２の上面ならびに下方竿状部Ｐ７の横断面が示されている。この図６にも、便宜上、Ｘ軸およびＹ軸の投影像を示してある。このＸ軸，Ｙ軸の投影像に関して、軸受Ｒ１０はＸ軸の正の部分に配置され、軸受Ｒ２０はＸ軸の負の部分に配置され、軸受Ｒ３０はＹ軸の正の部分に配置され、軸受Ｒ４０はＹ軸の負の部分に配置されている。また、これら４組の軸受Ｒ１０〜Ｒ４０は、Ｚ軸から等距離の位置に配置されている。   FIG. 6 is a cross-sectional view showing a state in which the apparatus shown in FIG. 1 is cut along a plane along the cutting line 6-6 and the lower part is looked down. Therefore, in the figure, a top view of the intermediate substrate 200 is shown together with four sets of rolling spherical bearings R10 to R40 and a fifth connecting member P50. In each of the rolling spherical bearings R10 to R40, the upper surface of the housing Q1 and the spherical body part Q2 and the cross section of the lower bowl-shaped part P7 are shown. FIG. 6 also shows X-axis and Y-axis projection images for convenience. Regarding the projected images of the X axis and the Y axis, the bearing R10 is disposed in the positive part of the X axis, the bearing R20 is disposed in the negative part of the X axis, and the bearing R30 is disposed in the positive part of the Y axis. The bearing R40 is disposed in the negative part of the Y axis. Further, these four sets of bearings R10 to R40 are arranged at positions equidistant from the Z-axis.

なお、図６に破線で示された円は、中間基板２００の下面に設けられた溝Ｇ１０〜Ｇ４０の側面部および下方基板３００の上面に形成された円盤状の固定電極Ｅ１０〜Ｅ４０の位置を示している。前述したとおり、中間基板２００の溝Ｇ１０〜Ｇ４０の底部を構成する膜部２０１〜２０４は、可撓性を有しており、第１〜第４の接続部材の下端から受けるＺ軸方向の力に基づいて撓み（変位）を生じる。   6 indicate the positions of the disk-shaped fixed electrodes E10 to E40 formed on the side surfaces of the grooves G10 to G40 provided on the lower surface of the intermediate substrate 200 and the upper surface of the lower substrate 300. Show. As described above, the film portions 201 to 204 constituting the bottoms of the grooves G10 to G40 of the intermediate substrate 200 have flexibility, and the Z-axis direction force received from the lower ends of the first to fourth connecting members. Causes deflection (displacement).

図７は、図１に示す装置の中間基板２００の下面図であり、図８は、図１に示す装置の下方基板３００の上面図である。図７，図８にも、便宜上、Ｘ軸およびＹ軸の投影像を示してある。図７に示すとおり、このＸ軸，Ｙ軸の投影像に関して、膜部２０１（溝Ｇ１０）はＸ軸の正の部分に配置され、膜部２０２（溝Ｇ２０）はＸ軸の負の部分に配置され、膜部２０３（溝Ｇ３０）はＹ軸の正の部分に配置され、膜部２０４（溝Ｇ４０）はＹ軸の負の部分に配置されている。同様に、図８に示すとおり、このＸ軸，Ｙ軸の投影像に関して、固定電極Ｅ１０はＸ軸の正の部分に配置され、固定電極Ｅ２０はＸ軸の負の部分に配置され、固定電極Ｅ３０はＹ軸の正の部分に配置され、固定電極Ｅ４０はＹ軸の負の部分に配置されている。   7 is a bottom view of the intermediate substrate 200 of the apparatus shown in FIG. 1, and FIG. 8 is a top view of the lower substrate 300 of the apparatus shown in FIG. 7 and 8 also show X-axis and Y-axis projection images for convenience. As shown in FIG. 7, with respect to the projected images of the X and Y axes, the film part 201 (groove G10) is arranged in the positive part of the X axis, and the film part 202 (groove G20) is placed in the negative part of the X axis. The film part 203 (groove G30) is disposed in the positive part of the Y axis, and the film part 204 (groove G40) is disposed in the negative part of the Y axis. Similarly, as shown in FIG. 8, with respect to the X-axis and Y-axis projection images, the fixed electrode E10 is disposed in the positive part of the X-axis, and the fixed electrode E20 is disposed in the negative part of the X-axis. E30 is arranged in the positive part of the Y axis, and the fixed electrode E40 is arranged in the negative part of the Y axis.

ここに示す実施形態の場合、中間基板２００は金属などの導電性材料から構成されているため、膜部２０１〜２０４はそれ自身が変位電極として機能する（中間基板２００を絶縁性材料で構成した場合は、膜部２０１〜２０４の下面に導電層を形成し、これを変位電極として用いればよい）。したがって、膜部２０１（変位電極）と固定電極Ｅ１０とによって第１の容量素子Ｃ１０が構成され、膜部２０２（変位電極）と固定電極Ｅ２０とによって第２の容量素子Ｃ２０が構成され、膜部２０３（変位電極）と固定電極Ｅ３０とによって第３の容量素子Ｃ３０が構成され、膜部２０４（変位電極）と固定電極Ｅ４０とによって第４の容量素子Ｃ４０が構成される。   In the embodiment shown here, since the intermediate substrate 200 is made of a conductive material such as metal, the film portions 201 to 204 themselves function as displacement electrodes (the intermediate substrate 200 is made of an insulating material). In this case, a conductive layer may be formed on the lower surface of the film portions 201 to 204 and used as a displacement electrode). Therefore, the film part 201 (displacement electrode) and the fixed electrode E10 constitute a first capacitive element C10, and the film part 202 (displacement electrode) and the fixed electrode E20 constitute a second capacitive element C20. 203 (displacement electrode) and the fixed electrode E30 constitute a third capacitive element C30, and the film portion 204 (displacement electrode) and the fixed electrode E40 constitute a fourth capacitive element C40.

これら各容量素子Ｃ１０〜Ｃ４０の静電容量値（ここでは、同じ符号Ｃ１０〜Ｃ４０で示すことにする）は、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端の下方基板３００に対する上下方向に関する変位（Ｚ軸方向に関する変位）に応じて変化する。たとえば、図１において、第１の接続部材Ｐ１０の下端が図の下方へ変位すると、膜部２０１は下方へと押圧されて撓み、容量素子Ｃ１０を構成する一対の電極間距離は減少し、静電容量値Ｃ１０は増加する。逆に、第１の接続部材Ｐ１０の下端が図の上方へ変位すると、膜部２０１は上方へと引っ張られて撓み、容量素子Ｃ１０を構成する一対の電極間距離は増加し、静電容量値Ｃ１０は減少する。結局、各容量素子Ｃ１０〜Ｃ４０は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端の下方基板３００に対する上下方向に関する変位をそれぞれ検出する第１〜第４のセンサとして機能することになる。   The capacitance values of these capacitive elements C10 to C40 (in this case, denoted by the same reference numerals C10 to C40) are the vertical directions with respect to the lower substrate 300 at the lower ends of the first to fourth connecting members P10 to P40, respectively. Changes according to the displacement (displacement in the Z-axis direction). For example, in FIG. 1, when the lower end of the first connecting member P10 is displaced downward in the drawing, the film portion 201 is pressed downward and bends, and the distance between the pair of electrodes constituting the capacitive element C10 is reduced. The capacitance value C10 increases. Conversely, when the lower end of the first connecting member P10 is displaced upward in the drawing, the film portion 201 is pulled upward and bends, the distance between the pair of electrodes constituting the capacitive element C10 increases, and the capacitance value C10 decreases. Eventually, each of the capacitive elements C10 to C40 functions as first to fourth sensors that respectively detect displacements in the vertical direction with respect to the lower substrate 300 at the lower ends of the first to fourth connection members P10 to P40.

＜＜＜ §２． 第１の実施形態の動作 ＞＞＞
続いて、ここでは、§１で述べた第１の実施形態（図１に示す装置）の動作を説明する。本発明に係る装置の特徴は、所定の作用体に対して所定方向に作用した力を検出する検出機能と、この作用体を所定方向に駆動する駆動機能と、を有している点である。図１に示す装置の場合、上方基板１００が作用体としての役割を果たし、下方基板３００を固定した状態において、上方基板１００に対して所定方向に作用した力を検出する検出機能と、下方基板３００に対して、上方基板１００を所定方向に駆動する駆動機能とを有することになる。 <<< §2. Operation of the first embodiment >>
Subsequently, the operation of the first embodiment (apparatus shown in FIG. 1) described in §1 will be described here. The device according to the present invention is characterized in that it has a detection function for detecting a force acting on a predetermined acting body in a predetermined direction and a drive function for driving the acting body in a predetermined direction. . In the case of the apparatus shown in FIG. 1, the upper substrate 100 serves as an action body, and in the state where the lower substrate 300 is fixed, a detection function for detecting a force acting on the upper substrate 100 in a predetermined direction, and the lower substrate 300 has a driving function of driving the upper substrate 100 in a predetermined direction.

本発明に係る装置では、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもった４組の接続部材Ｐ１０〜Ｐ４０（リニアアクチュエータ）が用いられる。各接続部材の具体的な構成例は、図２に示すとおりである。各接続部材は、上方基板１００と下方基板３００との間を接続する役割を果たすが、その上端は上方基板１００の下面側に上方接続部を介して接続され、下端は下方基板３００の上面側に下方接続部を介して接続される。   In the apparatus according to the present invention, four sets of connection members P10 to P40 (linear actuators) having an expansion / contraction drive mechanism that changes the length between the upper and lower ends based on a given electric signal are used. A specific configuration example of each connection member is as shown in FIG. Each connection member plays a role of connecting the upper substrate 100 and the lower substrate 300, and its upper end is connected to the lower surface side of the upper substrate 100 via the upper connection portion, and its lower end is the upper surface side of the lower substrate 300. Via the lower connection.

図１に示す第１の実施形態の場合、４組の上方接続部は、転がり球面軸受Ｑ１０〜Ｑ４０によって構成されている。第１〜第４の接続部材Ｐ１０〜Ｐ４０について用いられる上方接続部に必要な要件は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上端付近が上方基板１００に対して任意の方向に傾斜可能となるように、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の上端を上方基板１００の下面に接続する機能を有している点である。既に述べたとおり、転がり球面軸受Ｑ１０〜Ｑ４０は、このような要件を満たす最適の部材である。   In the case of the first embodiment shown in FIG. 1, the four sets of upper connecting portions are constituted by rolling spherical bearings Q10 to Q40. The requirements for the upper connection part used for the first to fourth connection members P10 to P40 are that the vicinity of the upper ends of the first to fourth connection members P10 to P40 can be inclined in any direction with respect to the upper substrate 100. The upper and lower ends of the first to fourth connecting members P10 to P40 are connected to the lower surface of the upper substrate 100, respectively. As already described, the rolling spherical bearings Q10 to Q40 are optimum members that satisfy such requirements.

一方、第１〜第４の接続部材Ｐ１０〜Ｐ４０について用いられる下方接続部には、２つの要件が課される。第１の要件は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端付近が下方基板３００に対して任意の方向に傾斜可能となるように、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を下方基板１００の上面に接続する機能を有している点である。転がり球面軸受Ｒ１０〜Ｒ４０は、このような第１の要件を満たすために用いられている部材である。そして、第２の要件は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端付近が下方基板３００に対して上下方向に変位可能となるように、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を下方基板３００の上面に接続する構造を有している点である。中間基板２００は、このような第２の要件を満たすために用いられている部材である。   On the other hand, two requirements are imposed on the lower connection portions used for the first to fourth connection members P10 to P40. The first requirement is that the first to fourth connection members P10 to P40 are arranged such that the vicinity of the lower ends of the first to fourth connection members P10 to P40 can be inclined in any direction with respect to the lower substrate 300. It has a function of connecting the lower end of the lower substrate 100 to the upper surface of the lower substrate 100. The rolling spherical bearings R10 to R40 are members used to satisfy such a first requirement. The second requirement is that the first to fourth connection members P10 to P10 are arranged such that the vicinity of the lower ends of the first to fourth connection members P10 to P40 can be displaced in the vertical direction with respect to the lower substrate 300. The lower end of P40 is connected to the upper surface of the lower substrate 300. The intermediate substrate 200 is a member used to satisfy such a second requirement.

図１に示す第１の実施形態の場合、下面の４カ所に溝Ｇ１０〜Ｇ４０が形成された中間基板２００を下方基板３００の上面に接合し、各溝Ｇ１０〜Ｇ４０の底部に可撓性をもった膜部２０１〜２０４を形成し、これら膜部２０１〜２０４の上面に、転がり球面軸受Ｒ１０〜Ｒ４０を接続する構造を採っている。その結果、第１〜第４の下方接続部は、中間基板２００と、各膜部２０１〜２０４の上面に固定された転がり球面軸受Ｒ１０〜Ｒ４０と、によって構成されることになり、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端は、転がり球面軸受Ｒ１０〜Ｒ４０、膜部２０１〜２０４、溝Ｇ１０〜Ｇ４０の側壁部を介して、下方基板３００に接続される。   In the case of the first embodiment shown in FIG. 1, an intermediate substrate 200 having grooves G10 to G40 formed at four locations on the lower surface is bonded to the upper surface of the lower substrate 300, and the bottom of each groove G10 to G40 is made flexible. The film portions 201 to 204 are formed, and rolling spherical bearings R10 to R40 are connected to the upper surfaces of the film portions 201 to 204. As a result, the first to fourth lower connecting portions are constituted by the intermediate substrate 200 and the rolling spherical bearings R10 to R40 fixed to the upper surfaces of the film portions 201 to 204. The lower ends of the fourth connection members P10 to P40 are connected to the lower substrate 300 via the rolling spherical bearings R10 to R40, the film portions 201 to 204, and the side walls of the grooves G10 to G40.

一方、本発明に係る装置には、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端の下方基板３００に対する上下方向に関する変位をそれぞれ検出する第１〜第４のセンサが設けられている。§１で述べたとおり、図１に示す第１の実施形態の場合、導電性材料から構成された膜部２０１〜２０４（変位電極）と、これに対向する位置に配された固定電極Ｅ１０〜Ｅ４０によって構成される容量素子Ｃ１０〜Ｃ４０およびその静電容量値を検出する構成要素が、第１〜第４のセンサとして機能する。   On the other hand, the apparatus according to the present invention is provided with first to fourth sensors for detecting displacements in the vertical direction relative to the lower substrate 300 at the lower ends of the first to fourth connecting members P10 to P40. As described in §1, in the case of the first embodiment shown in FIG. 1, film portions 201 to 204 (displacement electrodes) made of a conductive material, and fixed electrodes E10 to E10 disposed at positions facing the film portions 201 to 204 (displacement electrodes). Capacitance elements C10 to C40 constituted by E40 and components for detecting the capacitance value function as first to fourth sensors.

更に、本発明に係る装置には、図１にブロック図として示されているように、制御ユニット４００が設けられている。この制御ユニット４００は、第１〜第４の伸縮駆動機構（第１〜第４の接続部材Ｐ１０〜Ｐ４０を構成する各ポンプＰ５）に所定の電気信号を与えて第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、第１〜第４のセンサの検出結果（容量素子Ｃ１０〜Ｃ４０の静電容量値）に基づいて、上方基板１００に作用した力を示す電気信号を出力する検出動作と、を行う。   Furthermore, the apparatus according to the present invention is provided with a control unit 400, as shown in a block diagram in FIG. The control unit 400 gives a predetermined electrical signal to the first to fourth expansion / contraction drive mechanisms (the pumps P5 constituting the first to fourth connection members P10 to P40) to provide the first to fourth connection members. Based on the driving operation for adjusting the length between the upper and lower ends of P10 to P40 to be a desired length and the detection results of the first to fourth sensors (capacitance values of the capacitive elements C10 to C40). Then, a detection operation for outputting an electric signal indicating a force acting on the upper substrate 100 is performed.

さて、上述した各要件を満たすように、第１〜第４の接続部材Ｐ１０〜Ｐ４０によって上方基板１００と下方基板３００とを接続すると、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さを変化させることにより、上方基板１００を下方基板３００に対して所定方向に駆動することができ、上方基板１００の下方基板３００に対する姿勢を変化させることができる。すなわち、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態では、図１に示すように、上方基板１００は下方基板３００に対して平行な姿勢を保つことになるが、上方基板１００の下方基板３００に対する姿勢は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さに依存して決定される。したがって、制御ユニット４００から第１〜第４の接続部材Ｐ１０〜Ｐ４０を構成する各ポンプＰ５に所定の駆動信号を与えて長さの調整を行うことにより、所定の自由度の範囲内で、上方基板１００の下方基板３００に対する姿勢を制御することができる。   Now, when the upper board | substrate 100 and the lower board | substrate 300 are connected by the 1st-4th connection members P10-P40 so that each requirement mentioned above may be met, the length of the 1st-4th connection members P10-P40 is set. By changing, the upper substrate 100 can be driven in a predetermined direction with respect to the lower substrate 300, and the posture of the upper substrate 100 with respect to the lower substrate 300 can be changed. That is, in the “standard posture” state in which the first to fourth expansion / contraction drive mechanisms are adjusted so that the lengths between the upper and lower ends of the first to fourth connection members P10 to P40 are equal to each other, as shown in FIG. As described above, the upper substrate 100 maintains a posture parallel to the lower substrate 300. The posture of the upper substrate 100 with respect to the lower substrate 300 is between the upper and lower ends of the first to fourth connection members P10 to P40. It depends on the length. Accordingly, by adjusting the length by giving a predetermined drive signal from the control unit 400 to each of the pumps P5 constituting the first to fourth connecting members P10 to P40, within the range of the predetermined degree of freedom, The posture of the substrate 100 with respect to the lower substrate 300 can be controlled.

また、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが固定されるようにした状態において、上方基板１００に対して外力が作用すると、作用した外力によって第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端から各膜部２０１〜２０４に対して、上下方向の力（Ｚ軸方向の力）が加わり、可撓性をもったダイアフラムとして機能する各膜部２０１〜２０４が撓みを生じることになる。その結果、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端は上下方向に変位を生じ、当該変位は、第１〜第４のセンサによって検出される。したがって、制御ユニット４００は、第１〜第４のセンサの検出値に基づいて、上方基板１００に対して作用した外力の方向および大きさを検出することができる。   In addition, in the state where the length between the upper and lower ends of the first to fourth connection members P10 to P40 is fixed, when an external force is applied to the upper substrate 100, the first to fourth are applied by the applied external force. The vertical force (Z-axis direction force) is applied to the film parts 201 to 204 from the lower ends of the connection members P10 to P40, and the film parts 201 to 204 functioning as flexible diaphragms. It will bend. As a result, the lower ends of the first to fourth connecting members P10 to P40 are displaced in the vertical direction, and the displacement is detected by the first to fourth sensors. Therefore, the control unit 400 can detect the direction and magnitude of the external force applied to the upper substrate 100 based on the detection values of the first to fourth sensors.

このように、本発明に係る装置では、第１〜第４の接続部材Ｐ１０〜Ｐ４０を設けることが必須である。図１に示す第１の実施形態の場合、更に、第５の接続部材Ｐ５０が設けられている。この第５の接続部材Ｐ５０は、上方基板１００を下方基板３００の上方に安定して支持する機能を果たすものである。本発明に係る装置の動作原理上は、必ずしも第５の接続部材Ｐ５０を設ける必要はないが、実用上は、上方基板１００の位置を安定させるため、第５の接続部材Ｐ５０を設けるのが好ましい。   Thus, in the apparatus according to the present invention, it is essential to provide the first to fourth connection members P10 to P40. In the case of the first embodiment shown in FIG. 1, a fifth connecting member P50 is further provided. The fifth connecting member P50 serves to stably support the upper substrate 100 above the lower substrate 300. The fifth connection member P50 is not necessarily provided on the operating principle of the apparatus according to the present invention. However, in practice, it is preferable to provide the fifth connection member P50 in order to stabilize the position of the upper substrate 100. .

§１で述べたとおり、第５の接続部材Ｐ５０は、単なる支柱として機能する構成要素であり、リニアアクチュエータとしての伸縮機能は有していない。第５の接続部材Ｐ５０の上端は、上方基板１００の下面側に第５の上方接続部を介して接続され、下端は、下方基板３００の上面に固着されている（実際には、中間基板２００を介して固着されている）。ここで、第５の上方接続部は、第５の接続部材Ｐ５０の上端付近が上方基板１００に対して任意の方向に傾斜可能となるように、第５の接続部材Ｐ５０の上端を上方基板１００の下面に接続する構造を有する構成要素であり、具体的には、§１で述べたとおり、転がり球面軸受Ｑ５０（図３に示す軸受Ｑ１０と同じもの）が第５の上方接続部として用いられている。   As described in §1, the fifth connection member P50 is a component that functions as a simple support, and does not have an expansion / contraction function as a linear actuator. The upper end of the fifth connection member P50 is connected to the lower surface side of the upper substrate 100 via the fifth upper connection portion, and the lower end is fixed to the upper surface of the lower substrate 300 (actually, the intermediate substrate 200). Is fixed through). Here, the fifth upper connection portion has the upper end of the fifth connection member P50 as the upper substrate 100 so that the vicinity of the upper end of the fifth connection member P50 can be inclined in an arbitrary direction with respect to the upper substrate 100. Specifically, as described in §1, a rolling spherical bearing Q50 (same as the bearing Q10 shown in FIG. 3) is used as the fifth upper connecting portion. ing.

図１に示す第１の実施形態の場合、第５の接続部材Ｐ５０によって、上方基板１００の下面中心部が支持される。具体的には、転がり球面軸受Ｑ５０を構成する球体部Ｑ２の中心点（図１の原点Ｏ）は固定点となる。実際には、第５の接続部材Ｐ５０を完全な剛体で構成することは困難なので、第５の接続部材Ｐ５０の微小な撓みにより、転がり球面軸受Ｑ５０を構成する球体部Ｑ２の中心点は変位を生じるが、そのような変位は極めて微小な変位であるため、以下の説明では無視することにする。結局、この第１の実施形態の場合、上方基板１００は、図示する原点Ｏの位置を回動中心として回動し、下方基板３００に対する姿勢を変えることができる。   In the case of the first embodiment shown in FIG. 1, the lower surface center portion of the upper substrate 100 is supported by the fifth connection member P50. Specifically, the center point (the origin O in FIG. 1) of the sphere part Q2 constituting the rolling spherical bearing Q50 is a fixed point. Actually, since it is difficult to form the fifth connecting member P50 with a complete rigid body, the center point of the spherical portion Q2 constituting the rolling spherical bearing Q50 is displaced by the minute bending of the fifth connecting member P50. Although this occurs, such a displacement is extremely small and will be ignored in the following description. After all, in the case of the first embodiment, the upper substrate 100 can be rotated with the position of the origin O shown in the figure as the rotation center, and the posture with respect to the lower substrate 300 can be changed.

ここでは、まず、この第１の実施形態に係る装置における駆動機能を説明する。この装置において、原点Ｏの位置を中心点とする上方基板１００の回動動作は、Ｙ軸まわりの回動動作と、Ｘ軸まわりの回動動作とに分解して考えることができる。図９は、図１に示す装置における上方基板１００（作用体）を＋Ｙ軸まわりに駆動した状態を示す縦断面図である（制御ユニット４００はブロックで示す）。なお、本願では、特定の座標軸まわりの回転方向について、右ねじを当該座標軸の正方向に進めるための回転方向を、当該座標軸の正まわりの回転方向と定義する。したがって、図９において、上方基板１００を＋Ｙ軸まわりに駆動する回転方向は、図示の紙面上における時計まわりの方向になる。   Here, first, the drive function of the apparatus according to the first embodiment will be described. In this apparatus, the rotation operation of the upper substrate 100 about the position of the origin O can be considered as being divided into a rotation operation around the Y axis and a rotation operation around the X axis. FIG. 9 is a longitudinal sectional view showing a state in which the upper substrate 100 (acting body) in the apparatus shown in FIG. 1 is driven around the + Y axis (the control unit 400 is shown as a block). In the present application, for the rotation direction around a specific coordinate axis, the rotation direction for advancing the right screw in the positive direction of the coordinate axis is defined as the rotation direction around the coordinate axis. Therefore, in FIG. 9, the rotation direction for driving the upper substrate 100 around the + Y axis is the clockwise direction on the paper surface shown in the drawing.

このように、上方基板１００を＋Ｙ軸まわりに駆動するには、第１の接続部材Ｐ１０の上下両端間の長さを縮め、第２の接続部材Ｐ２０の上下両端間の長さを伸ばす制御を行えばよい。具体的には、制御ユニット４００から、第１の接続部材Ｐ１０を構成するリニアアクチュエータのポンプＰ５に対して、圧力室Ｐ３の圧力を減少させる駆動信号を与え、第２の接続部材Ｐ２０を構成するリニアアクチュエータのポンプＰ５に対して、圧力室Ｐ３の圧力を増加させる駆動信号を与えればよい。各リニアアクチュエータでは、圧力室Ｐ３の圧力を一定に維持する方向に力が作用し、第１の接続部材Ｐ１０については圧力室Ｐ３の体積が減少し、第２の接続部材Ｐ２０については圧力室Ｐ３の体積が増加するように、内側柱状部Ｐ２が外側筒状部Ｐ１の内部を摺動する。その結果、第１の接続部材Ｐ１０は縮み、第２の接続部材Ｐ２０は伸び、図示のような状態になる。このとき、第３の接続部材Ｐ３０および第４の接続部材Ｐ４０の長さは変わらない。   As described above, in order to drive the upper substrate 100 around the + Y axis, the length between the upper and lower ends of the first connection member P10 is shortened and the length between the upper and lower ends of the second connection member P20 is increased. Just do it. Specifically, a drive signal for decreasing the pressure in the pressure chamber P3 is given from the control unit 400 to the pump P5 of the linear actuator constituting the first connecting member P10, thereby constituting the second connecting member P20. What is necessary is just to give the drive signal which increases the pressure of the pressure chamber P3 with respect to the pump P5 of a linear actuator. In each linear actuator, a force acts in a direction to keep the pressure in the pressure chamber P3 constant, the volume of the pressure chamber P3 decreases for the first connection member P10, and the pressure chamber P3 for the second connection member P20. The inner columnar portion P2 slides inside the outer cylindrical portion P1 so that the volume of the inner cylindrical portion P2 increases. As a result, the first connecting member P10 is contracted, and the second connecting member P20 is extended to be in the state shown in the figure. At this time, the lengths of the third connecting member P30 and the fourth connecting member P40 are not changed.

上方基板１００を−Ｙ軸まわり（図９における反時計まわり）に駆動するには、上述した動作とは逆に、第１の接続部材Ｐ１０の上下両端間の長さを伸ばし、第２の接続部材Ｐ２０の上下両端間の長さを縮める制御を行えばよい。また、上方基板１００を＋Ｘ軸まわりに駆動するには、第３の接続部材Ｐ３０の上下両端間の長さを伸ばし、第４の接続部材Ｐ４０の上下両端間の長さを縮める制御を行い、−Ｘ軸まわりに駆動するには、第３の接続部材Ｐ３０の上下両端間の長さを縮め、第４の接続部材Ｐ４０の上下両端間の長さを伸ばす制御を行えばよい。   In order to drive the upper substrate 100 around the −Y axis (counterclockwise in FIG. 9), the length between the upper and lower ends of the first connection member P10 is increased and the second connection is performed, contrary to the above-described operation. Control to shorten the length between the upper and lower ends of the member P20 may be performed. In order to drive the upper substrate 100 around the + X axis, the length between the upper and lower ends of the third connection member P30 is increased, and the length between the upper and lower ends of the fourth connection member P40 is controlled. In order to drive around the −X axis, the length between the upper and lower ends of the third connecting member P30 may be shortened and the length between the upper and lower ends of the fourth connecting member P40 may be increased.

図１０は、このような原理に基づいて、図１に示す装置を駆動するための駆動動作を示すテーブルであり、上方基板１００を特定の駆動方向に駆動するために必要な各接続部材Ｐ１０〜Ｐ５０の伸縮動作を示している。テーブルの各欄の「縮」は接続部材を縮めることを示し、「伸」は接続部材を伸ばすことを示し、「０」は長さをそのまま維持させることを示している。なお、「Ｐ５０」の列の「φ」は、第５の接続部材５０が伸縮機能を有していないことを示している。   FIG. 10 is a table showing a driving operation for driving the apparatus shown in FIG. 1 on the basis of such a principle, and each connection member P10 required to drive the upper substrate 100 in a specific driving direction. The expansion / contraction operation of P50 is shown. “Reduction” in each column of the table indicates that the connection member is reduced, “extension” indicates that the connection member is extended, and “0” indicates that the length is maintained as it is. Note that “φ” in the column “P50” indicates that the fifth connecting member 50 does not have an expansion / contraction function.

制御ユニット４００は、この図１０のテーブルに示す原理に基づいて、上方基板１００をＹ軸まわりおよびＸ軸まわりに駆動する機能を有する。たとえば、上方基板１００を図９に示すように「＋Ｙ軸まわり」に駆動するためには、テーブルの「＋Ｙ軸まわり」の欄に示されているように、接続部材Ｐ１０を「縮め」、接続部材Ｐ２０を「伸ばし」、接続部材Ｐ３０，Ｐ４０，Ｐ５０は長さをそのまま維持させればよい。伸縮量を増やせば、それだけ回転駆動量（回転角度）も増加することになる。もちろん、Ｙ軸まわりの駆動とＸ軸まわりの駆動とを同時に行うことができるので、上方基板１００を任意の方向に任意の角度だけ傾斜させる制御が可能である。   The control unit 400 has a function of driving the upper substrate 100 around the Y axis and around the X axis based on the principle shown in the table of FIG. For example, in order to drive the upper substrate 100 around “+ Y axis” as shown in FIG. 9, the connection member P10 is “shrinked” and connected as shown in the “around + Y axis” column of the table. The member P20 is “stretched”, and the lengths of the connecting members P30, P40, and P50 may be maintained as they are. Increasing the amount of expansion / contraction increases the amount of rotation (rotation angle) accordingly. Of course, since the driving around the Y axis and the driving around the X axis can be performed simultaneously, it is possible to control the upper substrate 100 to be inclined in an arbitrary direction by an arbitrary angle.

なお、「縮める量」と「伸ばす量」とは、上方基板１００や中間基板２００に応力が生じないように、互いに見合った量となるように調整する必要がある。近似的には、「縮める量」＝「伸ばす量」として問題ないが、厳密に制御するためには、個々の回転角度を得るための「縮める量」と「伸ばす量」とを予め演算しておき、この演算値に基づいた伸縮制御を行うようにすればよい。   The “shrink amount” and the “stretch amount” need to be adjusted so as to correspond to each other so that no stress is generated in the upper substrate 100 and the intermediate substrate 200. Approximately, there is no problem as “amount to shrink” = “amount to extend”, but in order to control strictly, “amount to reduce” and “amount to extend” for obtaining individual rotation angles are calculated in advance. The expansion / contraction control may be performed based on the calculated value.

続いて、この第１の実施形態に係る装置における検出機能を説明する。この検出機能は、下方基板３００を固定した状態において、上方基板１００に作用した外力を示す電気信号を出力する機能である。この装置の検出動作は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さが、上方基板１００に作用した外力によって変化しないことを前提としている。したがって、制御ユニット４００は、検出動作を行っている間、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さが変わらないよう、伸縮駆動機構を制御する必要がある。   Subsequently, a detection function in the apparatus according to the first embodiment will be described. This detection function is a function of outputting an electric signal indicating an external force applied to the upper substrate 100 in a state where the lower substrate 300 is fixed. The detection operation of this apparatus is based on the premise that the lengths of the first to fourth connection members P <b> 10 to P <b> 40 do not change due to an external force applied to the upper substrate 100. Therefore, the control unit 400 needs to control the telescopic drive mechanism so that the lengths of the first to fourth connection members P10 to P40 do not change during the detection operation.

図１１は、図１に示す装置が検出動作を行っている際に、上方基板１００（作用体）に対してＹ軸まわりのモーメント＋Ｍｙが作用した状態を示す縦断面図である（制御ユニット４００はブロックで示す）。上述したとおり、検出動作中、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さは一定であるから、図示のとおり、上方基板１００に対してＹ軸まわりのモーメント＋Ｍｙが作用すると、第１の接続部材Ｐ１に対しては、下方への押圧力が加わり、膜部２０１が下方へと撓み、第１の接続部材Ｐ１の下端は下方へ変位する。また、第２の接続部材Ｐ２に対しては、上方への引っ張り力が加わり、膜部２０２が上方へと撓み、第２の接続部材Ｐ２の下端は上方へ変位する。   FIG. 11 is a longitudinal sectional view showing a state in which a moment + My around the Y axis acts on the upper substrate 100 (acting body) when the apparatus shown in FIG. 1 is performing a detection operation (control unit 400). Is shown as a block). As described above, since the lengths of the first to fourth connection members P10 to P40 are constant during the detection operation, when the moment + My around the Y-axis acts on the upper substrate 100 as shown in the figure, the first A downward pressing force is applied to the connecting member P1, and the film portion 201 is bent downward, and the lower end of the first connecting member P1 is displaced downward. Further, an upward pulling force is applied to the second connecting member P2, the film portion 202 is bent upward, and the lower end of the second connecting member P2 is displaced upward.

その結果、膜部２０１（変位電極）と固定電極Ｅ１０とによって構成される容量素子Ｃ１０（第１のセンサ）の静電容量値Ｃ１０は増加し、膜部２０２（変位電極）と固定電極Ｅ２０とによって構成される容量素子Ｃ２０（第２のセンサ）の静電容量値Ｃ２０は減少する。このとき、第３の接続部材Ｐ３０および第４の接続部材Ｐ４０には外力は加わらないので、膜部２０３，２０４に撓みは生じない。よって、膜部２０３（変位電極）と固定電極Ｅ３０とによって構成される容量素子Ｃ３０（第３のセンサ）の静電容量値Ｃ３０と、膜部２０４（変位電極）と固定電極Ｅ４０とによって構成される容量素子Ｃ４０（第４のセンサ）の静電容量値Ｃ４０と、には変化は生じない。   As a result, the capacitance value C10 of the capacitive element C10 (first sensor) constituted by the film part 201 (displacement electrode) and the fixed electrode E10 increases, and the film part 202 (displacement electrode), the fixed electrode E20, The capacitance value C20 of the capacitive element C20 (second sensor) constituted by decreases. At this time, since no external force is applied to the third connecting member P30 and the fourth connecting member P40, the film portions 203 and 204 are not bent. Therefore, the capacitance value C30 of the capacitive element C30 (third sensor) constituted by the film part 203 (displacement electrode) and the fixed electrode E30, and the film part 204 (displacement electrode) and the fixed electrode E40 are constituted. There is no change in the capacitance value C40 of the capacitive element C40 (fourth sensor).

一方、Ｙ軸まわりのモーメント−Ｍｙ（図１１とは逆まわりのモーメント）が作用した場合は、上述とは逆の現象が生じ、静電容量値Ｃ１０は減少し、静電容量値Ｃ２０は増加し、静電容量値Ｃ３０，Ｃ４０は変化しない。同様に、Ｘ軸まわりのモーメント＋Ｍｘが作用した場合は、静電容量値Ｃ３０は減少し、静電容量値Ｃ４０は増加し、静電容量値Ｃ１０，Ｃ２０は変化しない。また、Ｘ軸まわりのモーメント−Ｍｘが作用した場合は、静電容量値Ｃ３０は増加し、静電容量値Ｃ４０は減少し、静電容量値Ｃ１０，Ｃ２０は変化しない。   On the other hand, when the moment about the Y axis -My (moment in the direction opposite to that in FIG. 11) is applied, a phenomenon opposite to the above occurs, and the capacitance value C10 decreases and the capacitance value C20 increases. However, the capacitance values C30 and C40 do not change. Similarly, when the moment + Mx around the X axis acts, the capacitance value C30 decreases, the capacitance value C40 increases, and the capacitance values C10 and C20 do not change. When the moment -Mx around the X axis is applied, the capacitance value C30 increases, the capacitance value C40 decreases, and the capacitance values C10 and C20 do not change.

図１２は、このような原理に基づいて、図１に示す装置による外力の検出を行う検出動作を示すテーブルである。テーブルのＣ１０〜Ｃ４０の各欄の「＋」は静電容量値が増加することを示し、「−」は静電容量値が減少することを示し、「０」は静電容量値が変化しないことを示している。たとえば、「モーメント＋Ｍｙ」を検出対象とする欄では、Ｃ１０は「＋」，Ｃ２０は「−」，Ｃ３０は「０」，Ｃ４０は「０」と記載されているが、これは、静電容量値Ｃ１０は増加し、静電容量値Ｃ２０は減少し、静電容量値Ｃ３０，Ｃ４０は変化しないことを示している。   FIG. 12 is a table showing a detection operation for detecting an external force by the apparatus shown in FIG. 1 based on such a principle. “+” In each column of C10 to C40 in the table indicates that the capacitance value increases, “−” indicates that the capacitance value decreases, and “0” indicates that the capacitance value does not change. It is shown that. For example, in the column where “moment + My” is a detection target, C10 is “+”, C20 is “−”, C30 is “0”, and C40 is “0”. The value C10 increases, the capacitance value C20 decreases, and the capacitance values C30 and C40 do not change.

また、演算式の欄に記載された式は、各軸まわりのモーメントの値を符号付きの値として求めるための式である。たとえば、モーメントＭｙについて「Ｍｙ＝Ｃ１０−Ｃ２０」なる演算式が記載されているが、これは、静電容量値Ｃ１０から静電容量値Ｃ２０を減じる演算によって、モーメントＭｙが得られることを示している。同様に、モーメントＭｘについて「Ｍｘ＝Ｃ４０−Ｃ３０」なる演算式が記載されているが、これは、静電容量値Ｃ４０から静電容量値Ｃ３０を減じる演算によって、モーメントＭｘが得られることを示している。得られたモーメントＭｙ，Ｍｘの符号は、モーメントの回転方向を示す。このような演算式によって、モーメントＭｙ，Ｍｘが得られる理由は、テーブルのＣ１０〜Ｃ４０の各欄の記号を考慮すれば、容易に理解できよう。   In addition, the formula described in the column of the calculation formula is a formula for obtaining the value of the moment about each axis as a signed value. For example, although an arithmetic expression “My = C10−C20” is described for the moment My, this indicates that the moment My can be obtained by subtracting the capacitance value C20 from the capacitance value C10. Yes. Similarly, although an arithmetic expression “Mx = C40−C30” is described for the moment Mx, this indicates that the moment Mx can be obtained by subtracting the capacitance value C30 from the capacitance value C40. ing. The signs of the obtained moments My and Mx indicate the rotation direction of the moment. The reason why the moments My and Mx can be obtained by such an arithmetic expression can be easily understood by considering the symbols in the columns C10 to C40 of the table.

制御ユニット４００は、この図１２のテーブルに示す演算式に基づく演算を行うことにより、上方基板１００に外力として作用したＹ軸まわりのモーメントＭｙおよびＸ軸まわりのモーメントＭｘを検出する機能を有する。   The control unit 400 has a function of detecting the moment My around the Y axis and the moment Mx around the X axis that acted on the upper substrate 100 as external forces by performing calculations based on the calculation formula shown in the table of FIG.

結局、図１に示す第１の実施形態に係る装置は、上方基板１００を下方基板３００に対して、Ｙ軸まわりに駆動するＹ軸まわり駆動動作と、Ｘ軸まわりに駆動するＸ軸まわり駆動動作とを行う機能を有しており、また、下方基板３００を固定した状態において、上方基板１００に対して外力として作用するＹ軸まわりのモーメントＭｙを検出するＹ軸まわり検出動作と、Ｘ軸まわりのモーメントＭｘを検出するＸ軸まわり検出動作と、を行う機能を有していることになる。   After all, the apparatus according to the first embodiment shown in FIG. 1 drives the upper substrate 100 around the Y axis with respect to the lower substrate 300, and the X axis driving that drives around the X axis. A Y-axis detection operation for detecting a moment My around the Y-axis acting as an external force on the upper substrate 100 in a state where the lower substrate 300 is fixed, and an X-axis It has a function of performing the X axis detection operation for detecting the surrounding moment Mx.

この第１の実施形態に係る装置が、上記機能を果たすことができるのは、各接続部材が特有の配置を採っているためである。すなわち、第５の接続部材Ｐ５０の上端付近に原点ＯをもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材Ｐ１０の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材Ｐ２０の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材Ｐ３０の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材Ｐ４０の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材Ｐ５０の上下両端を通る直線はＺ軸に一致するような配置を採っている。   The reason why the device according to the first embodiment can fulfill the above-mentioned function is that each connecting member has a specific arrangement. That is, when an XYZ three-dimensional coordinate system having an origin O near the upper end of the fifth connecting member P50 is defined, the lengths between the upper and lower ends of the first to fourth connecting members P10 to P40 are equal to each other. In the “standard posture” state in which the first to fourth telescopic drive mechanisms are adjusted, the straight line passing through the upper and lower ends of the first connecting member P10 intersects the X axis in the positive region, and the second connecting member P20 A straight line passing through the upper and lower ends intersects with the X axis in the negative region, a straight line passing through the upper and lower ends of the third connecting member P30 intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member P40 is A straight line that intersects the Y axis in the negative region and passes through the upper and lower ends of the fifth connecting member P50 is arranged to coincide with the Z axis.

このため、制御ユニット４００は、第１の接続部材Ｐ１０の上下両端間の長さと、第２の接続部材Ｐ２０の上下両端間の長さと、の差を変化させることにより、下方基板３００に対する上方基板１００の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作を行うことができ、また、第３の接続部材Ｐ３０の上下両端間の長さと、第４の接続部材Ｐ４０の上下両端間の長さと、の差を変化させることにより、下方基板３００に対する上方基板１００の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作を行うことができる。   For this reason, the control unit 400 changes the difference between the length between the upper and lower ends of the first connection member P10 and the length between the upper and lower ends of the second connection member P20, thereby changing the upper substrate relative to the lower substrate 300. It is possible to perform a driving operation around the Y axis that changes the posture of 100 around the Y axis, and the length between the upper and lower ends of the third connecting member P30 and the length between the upper and lower ends of the fourth connecting member P40. By changing the difference, the driving operation around the X-axis that changes the posture of the upper substrate 100 relative to the lower substrate 300 around the X-axis can be performed.

更に、制御ユニット４００は、第１のセンサの検出値（静電容量値Ｃ１０）と第２のセンサの検出値（静電容量値Ｃ２０）との差を示す電気信号「Ｃ１０−Ｃ２０」を、下方基板３００を固定した状態において上方基板１００に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作を行うことができ、また、第４のセンサの検出値（静電容量値Ｃ４０）と第３のセンサの検出値（静電容量値Ｃ３０）との差を示す電気信号「Ｃ４０−Ｃ３０」を、下方基板３００を固定した状態において上方基板１００に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作を行うことができる。   Furthermore, the control unit 400 generates an electric signal “C10−C20” indicating a difference between the detection value (capacitance value C10) of the first sensor and the detection value (capacitance value C20) of the second sensor. It is possible to perform a detection operation around the Y axis that is output as a detection value of the moment My around the Y axis acting on the upper substrate 100 in a state where the lower substrate 300 is fixed, and the detection value (capacitance of the fourth sensor) Value C40) and an electric signal “C40-C30” indicating a difference between the detection value (capacitance value C30) of the third sensor and around the X axis acting on the upper substrate 100 in a state where the lower substrate 300 is fixed. A detection operation around the X axis that is output as a detection value of the moment Mx can be performed.

＜＜＜ §３． 第２〜第４の実施形態 ＞＞＞
これまで、図１に示す第１の実施形態に係る装置の構造を§１で説明し、その動作を§２で説明した。ここでは、この第１の実施形態の変形例として、第２〜第４の実施形態を順に述べる。 <<< §3. Second to fourth embodiments >>
So far, the structure of the apparatus according to the first embodiment shown in FIG. 1 has been described in Section 1 and the operation thereof has been described in Section 2. Here, as a modification of the first embodiment, the second to fourth embodiments will be described in order.

＜３−１： 第２の実施形態＞
図１３は、本発明の第２の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４５０はブロックで示す）。この図１３に示す第２の実施形態に係る装置と、図１に示す第１の実施形態に係る装置との相違は、第５の接続部材Ｐ５０の下方部分の構造（溝Ｇ５０，固定電極Ｅ５０）と、制御ユニットの検出動作のみである。 <3-1: Second Embodiment>
FIG. 13 is a longitudinal sectional view of a drive device having a force detection function according to the second embodiment of the present invention (the control unit 450 is shown as a block). The difference between the apparatus according to the second embodiment shown in FIG. 13 and the apparatus according to the first embodiment shown in FIG. 1 is the structure of the lower part of the fifth connecting member P50 (groove G50, fixed electrode E50). ) And only the detection operation of the control unit.

具体的には、まず、図１に示す装置における中間基板２００が、図１３に示す装置では中間基板２５０に置き換えられている。中間基板２００には、下面の４カ所に溝Ｇ１０〜Ｇ４０が設けられていたが、中間基板２５０には、これら４カ所の溝Ｇ１０〜Ｇ４０に加えて、中心部に第５の溝Ｇ５０が設けられている。また、下方基板３００の上面には、４枚の固定電極Ｅ１０〜Ｅ４０に加えて、中心部に第５の固定電極Ｅ５０が形成されている。   Specifically, first, the intermediate substrate 200 in the apparatus shown in FIG. 1 is replaced with the intermediate substrate 250 in the apparatus shown in FIG. In the intermediate substrate 200, grooves G10 to G40 are provided at four positions on the lower surface. On the intermediate substrate 250, in addition to the four grooves G10 to G40, a fifth groove G50 is provided at the center. It has been. In addition to the four fixed electrodes E10 to E40, a fifth fixed electrode E50 is formed at the center on the upper surface of the lower substrate 300.

図１３に示すとおり、第５の溝Ｇ５０の底部は、可撓性をもった膜部２０５を構成し、第５の接続部材Ｐ５０の下端は、この可撓性をもった膜部２０５の上面に固着されている。その結果、第５の接続部材Ｐ５０の上端に上下方向の外力（Ｚ軸方向の外力）が加わると、膜部２０５が上下に撓みを生じ、第５の接続部材Ｐ５０は上下方向に変位する。ここで、膜部２０５は導電性を有しており（中間基板２５０は、全体が金属などの導電性材料によって構成されている）、対向する位置に配置された第５の固定電極Ｅ５０とによって、第５の容量素子Ｃ５０を構成する。   As shown in FIG. 13, the bottom of the fifth groove G50 constitutes a flexible film part 205, and the lower end of the fifth connecting member P50 is the upper surface of the flexible film part 205. It is fixed to. As a result, when an external force in the vertical direction (external force in the Z-axis direction) is applied to the upper end of the fifth connection member P50, the film portion 205 is bent up and down, and the fifth connection member P50 is displaced in the vertical direction. Here, the film part 205 has conductivity (the intermediate substrate 250 is entirely made of a conductive material such as a metal), and the fifth fixed electrode E50 arranged at an opposing position. The fifth capacitive element C50 is configured.

この第５の容量素子Ｃ５０は、第５の接続部材Ｐ５０の下端の下方基板３００に対する上下方向に関する変位を検出する第５のセンサとして機能する。すなわち、第５の接続部材Ｐ５０の下端が下方へ変位すると、第５の容量素子Ｃ５０の静電容量値Ｃ５０は増加し、第５の接続部材Ｐ５０の下端が上方へ変位すると、第５の容量素子Ｃ５０の静電容量値Ｃ５０は減少する。   The fifth capacitive element C50 functions as a fifth sensor that detects a displacement in the vertical direction with respect to the lower substrate 300 at the lower end of the fifth connection member P50. That is, when the lower end of the fifth connection member P50 is displaced downward, the capacitance value C50 of the fifth capacitive element C50 increases, and when the lower end of the fifth connection member P50 is displaced upward, the fifth capacitance The capacitance value C50 of the element C50 decreases.

このように、図１３に示す装置では、第５の接続部材Ｐ５０の上端は、上方基板１００の下面側に第５の上方接続部を介して接続され、下端は下方基板３００の上面側に第５の下方接続部を介して接続されている。ここで、第５の上方接続部は、第５の接続部材Ｐ５０の上端付近が上方基板１００に対して任意の方向に傾斜可能となるように、第５の接続部材Ｐ５０の上端を上方基板１００の下面に接続する構造を有している。具体的には、図１３に示す装置における第５の上方接続部は、図１に示す装置と同様に、転がり球面軸受Ｑ５０によって構成されている。   13, the upper end of the fifth connection member P50 is connected to the lower surface side of the upper substrate 100 via the fifth upper connection portion, and the lower end is connected to the upper surface side of the lower substrate 300. 5 are connected via a lower connection portion. Here, the fifth upper connection portion has the upper end of the fifth connection member P50 as the upper substrate 100 so that the vicinity of the upper end of the fifth connection member P50 can be inclined in an arbitrary direction with respect to the upper substrate 100. It has a structure connected to the lower surface of the. Specifically, the fifth upper connecting portion in the apparatus shown in FIG. 13 is configured by a rolling spherical bearing Q50, similarly to the apparatus shown in FIG.

一方、図１３に示す装置の場合、第５の接続部材Ｐ５０の下端は、第５の下方接続部を介して下方基板３００に接続されている。この第５の下方接続部は、第５の接続部材Ｐ５０の下端付近が下方基板３００に対して上下方向に変位可能となるように、第５の接続部材Ｐ５０の下端を下方基板３００の上面に接続する構造を有している。具体的には、図１３に示す装置における第５の下方接続部は、中間基板２５０の中心部分、すなわち、膜部２０５および溝Ｇ５０の側壁部によって構成されており、第５の接続部材Ｐ５０の下端は、膜部２０５および溝Ｇ５０の側壁部を介して、下方基板３００に接続されている。   On the other hand, in the case of the apparatus shown in FIG. 13, the lower end of the fifth connecting member P50 is connected to the lower substrate 300 via the fifth lower connecting portion. The fifth lower connection portion has the lower end of the fifth connection member P50 on the upper surface of the lower substrate 300 so that the vicinity of the lower end of the fifth connection member P50 can be displaced vertically with respect to the lower substrate 300. It has a connection structure. Specifically, the fifth lower connection portion in the apparatus shown in FIG. 13 is constituted by the central portion of the intermediate substrate 250, that is, the side wall portion of the film portion 205 and the groove G50. The lower end is connected to the lower substrate 300 via the film part 205 and the side wall part of the groove G50.

結局、この図１３に示す装置の場合、第１〜第５の接続部材Ｐ１０〜Ｐ５０の下端は、それぞれ可撓性をもった膜部２０１〜２０５の上面に接続されていることになる。したがって、これら第１〜第５の接続部材Ｐ１０〜Ｐ５０に対して、作用体として機能する上方基板１００から上下方向（Ｚ軸方向）への外力が加わると、これら第１〜第５の接続部材Ｐ１０〜Ｐ５０の下端は上下方向（Ｚ軸方向）に変位を生じることになる。当該変位は、第１〜第５のセンサ（第１〜第５の容量素子Ｃ１０〜Ｃ５０）によって検出されるので、制御ユニットは、この第１〜第５のセンサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作を行うことができる。   After all, in the case of the apparatus shown in FIG. 13, the lower ends of the first to fifth connecting members P10 to P50 are connected to the upper surfaces of the flexible film portions 201 to 205, respectively. Accordingly, when an external force in the vertical direction (Z-axis direction) is applied to the first to fifth connection members P10 to P50 from the upper substrate 100 that functions as an action body, the first to fifth connection members. The lower ends of P10 to P50 are displaced in the vertical direction (Z-axis direction). Since the displacement is detected by the first to fifth sensors (first to fifth capacitive elements C10 to C50), the control unit operates based on the detection results of the first to fifth sensors. A detection operation for outputting an electrical signal indicating the force acting on the body can be performed.

図１４は、図１３に示す装置の検出動作を示すテーブルである。この図１４に示すテーブルは、図１２に示すテーブル（図１の装置の検出動作を示すテーブル）に、検出対象として＋Ｆｚ，−Ｆｚを付加するとともに、第５のセンサ（容量素子Ｃ５０の静電容量値）の検出結果を付加したものである。図１３に示す装置の上方基板１００（作用体）に、外力としてモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘが作用したときの検出動作は、図１に示す装置の検出動作と全く同じである。したがって、図１に示す装置と同様に、制御ユニット４５０は、「Ｍｙ＝Ｃ１０−Ｃ２０」なる演算によりモーメントＭｙを求め、「Ｍｘ＝Ｃ４０−Ｃ３０」なる演算によりモーメントＭｘを求めることができる。この場合、第５の接続部材Ｐ５０にはＺ軸方向の力は作用しないので、第５のセンサの静電容量値Ｃ５０に変化は生じない（図１４のテーブルの対応欄は「０」（変化なし）を示している）。   FIG. 14 is a table showing the detection operation of the apparatus shown in FIG. The table shown in FIG. 14 adds + Fz and −Fz as detection targets to the table shown in FIG. 12 (the table showing the detection operation of the apparatus shown in FIG. 1) and the fifth sensor (the electrostatic capacitance of the capacitive element C50). (Capacitance value) detection result is added. The detection operation when moments + My, -My, + Mx, -Mx are applied as external forces to the upper substrate 100 (acting body) of the apparatus shown in FIG. 13 is exactly the same as the detection operation of the apparatus shown in FIG. Therefore, similarly to the apparatus shown in FIG. 1, the control unit 450 can obtain the moment My by the calculation “My = C10−C20” and can determine the moment Mx by the calculation “Mx = C40−C30”. In this case, since the force in the Z-axis direction does not act on the fifth connecting member P50, the capacitance value C50 of the fifth sensor does not change (the corresponding column in the table of FIG. 14 is “0” (change None)).

図１３に示す装置の特徴は、更に、Ｚ軸方向の力＋Ｆｚ，−Ｆｚの検出が可能になる点である。図１５は、図１３に示す装置における上方基板１００（作用体）に対して＋Ｚ軸方向の力＋Ｆｚが作用した状態を示す縦断面図である。上方基板１００は上方へ変位し、第５の接続部材Ｐ５０の上端は、原点Ｏより上方に変位する。この装置においても、検出動作中は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さが、上方基板１００に作用した外力によって変化しないことを前提としているので、制御ユニット４５０は、検出動作を行っている間、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さが変わらないよう伸縮駆動機構を制御する。このように、第１〜第４の接続部材Ｐ１０〜Ｐ４０の長さが変わらなければ、上方基板１００に対して作用した＋Ｚ軸方向の力＋Ｆｚにより、第１〜第５の接続部材Ｐ１０〜Ｐ５０に対して上方への引っ張り力が加わると、図示のとおり、その下端はいずれも上方へと変位し、第１〜第５の容量素子Ｃ１０〜Ｃ５０の静電容量値は減少する。図１４のテーブルにおける「＋Ｆｚ」の欄の「−」は、このような静電容量値の減少を示している。   A feature of the apparatus shown in FIG. 13 is that it becomes possible to detect forces + Fz and −Fz in the Z-axis direction. FIG. 15 is a longitudinal sectional view showing a state where a force + Fz in the + Z-axis direction is applied to the upper substrate 100 (acting body) in the apparatus shown in FIG. The upper substrate 100 is displaced upward, and the upper end of the fifth connecting member P50 is displaced upward from the origin O. Also in this apparatus, during the detection operation, it is assumed that the lengths of the first to fourth connection members P10 to P40 are not changed by the external force applied to the upper substrate 100. During the operation, the telescopic drive mechanism is controlled so that the lengths of the first to fourth connecting members P10 to P40 do not change. As described above, if the lengths of the first to fourth connection members P10 to P40 do not change, the first to fifth connection members P10 to P50 are caused by the force + Fz in the + Z-axis direction applied to the upper substrate 100. When an upward pulling force is applied, the lower ends thereof are displaced upward as shown in the figure, and the capacitance values of the first to fifth capacitive elements C10 to C50 are reduced. “−” In the column “+ Fz” in the table of FIG. 14 indicates such a decrease in the capacitance value.

一方、図１６は、図１３に示す装置における上方基板１００（作用体）に対して−Ｚ軸方向の力−Ｆｚが作用した状態を示す縦断面図である。上方基板１００は下方へ変位し、第５の接続部材Ｐ５０の上端は、原点Ｏより下方に変位する。このように、上方基板１００に対して作用した−Ｚ軸方向の力−Ｆｚにより、第１〜第５の接続部材Ｐ１０〜Ｐ５０に対して下方への押圧力が加わると、図示のとおり、その下端はいずれも下方へと変位し、第１〜第５の容量素子Ｃ１０〜Ｃ５０の静電容量値は増加する。図１４のテーブルにおける「−Ｆｚ」の欄の「＋」は、このような静電容量値の増加を示している。   On the other hand, FIG. 16 is a longitudinal sectional view showing a state in which a force −Fz in the −Z-axis direction is applied to the upper substrate 100 (acting body) in the apparatus shown in FIG. 13. The upper substrate 100 is displaced downward, and the upper end of the fifth connecting member P50 is displaced downward from the origin O. Thus, when a downward pressing force is applied to the first to fifth connecting members P10 to P50 by the -Z-axis direction force -Fz acting on the upper substrate 100, as shown in the drawing, The lower ends are all displaced downward, and the capacitance values of the first to fifth capacitive elements C10 to C50 are increased. “+” In the column “−Fz” in the table of FIG. 14 indicates such an increase in capacitance value.

そこで、第５のセンサ（第５の容量素子Ｃ５０）を、力Ｆｚの検出に利用することにすれば、図１４のテーブルの演算式欄に示されているとおり、「Ｆｚ＝−Ｃ５０」なる演算により力Ｆｚを求めることができる。もっとも、この式で得られる値Ｆｚは、作用したＺ軸方向の力Ｆｚの絶対値ではない。上方基板１００に何ら外力が作用していない状態であっても、静電容量値Ｃ５０は所定の基準値Ｃrefをとる。そこで、実際には、当該基準値ＣrefをＦｚ＝０に対応する値とし、静電容量値Ｃ５０の当該基準値Ｃrefに対する増減量を力Ｆｚに対応する絶対値として用いるようにすればよい。なお、「Ｆｚ＝−Ｃ５０」なる演算式において、「Ｃ５０」にマイナス符号が付加されているのは、図示の座標系の定義では、Ｚ軸正方向の力＋Ｆｚが作用したときに静電容量値Ｃ５０は減少し、Ｚ軸負方向の力−Ｆｚが作用したときに静電容量値Ｃ５０は増加し、力の方向と静電容量値の増減とが逆転しているので、これを調整するための便宜である。   Therefore, if the fifth sensor (fifth capacitive element C50) is used for detecting the force Fz, “Fz = −C50” is obtained as shown in the arithmetic expression column of the table of FIG. The force Fz can be obtained by calculation. However, the value Fz obtained by this equation is not the absolute value of the applied force Fz in the Z-axis direction. Even when no external force is applied to the upper substrate 100, the capacitance value C50 takes a predetermined reference value Cref. Therefore, in practice, the reference value Cref may be a value corresponding to Fz = 0, and the increase / decrease amount of the capacitance value C50 with respect to the reference value Cref may be used as an absolute value corresponding to the force Fz. In the arithmetic expression “Fz = −C50”, “C50” is added with a minus sign because, in the definition of the coordinate system shown in the figure, the capacitance when the force + Fz in the positive direction of the Z-axis is applied. The value C50 decreases, and when the force -Fz in the negative Z-axis direction is applied, the capacitance value C50 increases, and the force direction and the increase / decrease in the capacitance value are reversed. This is a convenience.

ところで、図１４のテーブルを見れば明らかなように、力Ｆｚの検出には、必ずしも第５のセンサ（第５の容量素子Ｃ５０）を利用する必要はない。テーブルの欄外に記載したとおり、力Ｆｚは、「Ｆｚ＝−（Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０）」なる演算によって求めることもできるし、「Ｆｚ＝−（Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０＋Ｃ５０）」なる演算によって求めることもできる。ここで、演算式にマイナス符号が付加されているのは、上述したとおり、図示の座標系の定義では、力の方向と静電容量値の増減とが逆転しているので、これを調整するための便宜である。   Incidentally, as apparent from the table of FIG. 14, it is not always necessary to use the fifth sensor (fifth capacitive element C50) for detecting the force Fz. As described in the margin of the table, the force Fz can be obtained by an operation “Fz = − (C10 + C20 + C30 + C40)” or can be obtained by an operation “Fz = − (C10 + C20 + C30 + C40 + C50)”. Here, the minus sign is added to the arithmetic expression because, as described above, in the definition of the coordinate system shown in the figure, the direction of the force and the increase / decrease in the capacitance value are reversed. This is a convenience.

一方、この図１３に示す装置における駆動動作は、図１に示す装置と全く同様である。すなわち、図１０のテーブルに示す駆動動作により、上方基板１００を下方基板３００に対して、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりに駆動することができる。   On the other hand, the driving operation of the apparatus shown in FIG. 13 is exactly the same as that of the apparatus shown in FIG. That is, the upper substrate 100 can be driven around the + Y axis, the −Y axis, the + X axis, and the −X axis with respect to the lower substrate 300 by the driving operation shown in the table of FIG.

このように、図１３に示す第２の実施形態に係る装置は、図１に示す第１の実施形態に係る装置と同様に、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動動作（Ｙ軸まわり駆動動作とＸ軸まわり駆動動作）を行う機能と、外力として作用したモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘを検出する検出動作（Ｙ軸まわり検出動作とＸ軸まわり検出動作）を行う機能と、を有している。その上、更に、外力として作用した力＋Ｆｚ，−Ｆｚを検出する検出動作（Ｚ軸方向検出動作）を行う付加機能を有している。   As described above, the apparatus according to the second embodiment shown in FIG. 13 is similar to the apparatus according to the first embodiment shown in FIG. 1, around the + Y axis, around the −Y axis, around the + X axis, and −X axis. A function that performs a driving operation around the Y axis (a driving operation around the Y axis and a driving operation around the X axis) and a detection operation that detects the moments + My, -My, + Mx, and -Mx acting as an external force (the Y axis detection operation and the X axis) A function of performing a rotation detection operation). In addition, it has an additional function of performing a detection operation (Z-axis direction detection operation) for detecting forces + Fz and −Fz acting as external forces.

このＺ軸方向検出動作は、第５のセンサの検出値（静電容量値Ｃ５０）もしくは第１〜第５のセンサの検出値の総和（静電容量値Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０＋Ｃ５０）に基づく電気信号を、Ｚ軸方向の力Ｆｚの検出値として出力することによって行うことができる。具体的には、前述したとおり、上方基板１００に何ら外力が作用していない状態での静電容量値「Ｃ５０」もしくは静電容量値の総和「Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０＋Ｃ５０」の値を基準値Ｃrefとして、当該基準値Ｃrefに対する増減量の符号を逆転した値を示す電気信号を、力Ｆｚに対応する電気信号として出力すればよい。   This Z-axis direction detection operation is performed by converting an electrical signal based on the detection value of the fifth sensor (capacitance value C50) or the sum of the detection values of the first to fifth sensors (capacitance value C10 + C20 + C30 + C40 + C50) to the Z-axis. This can be done by outputting the detected value of the direction force Fz. Specifically, as described above, the value of the capacitance value “C50” or the sum of the capacitance values “C10 + C20 + C30 + C40 + C50” when no external force is applied to the upper substrate 100 is set as the reference value Cref. What is necessary is just to output the electrical signal which shows the value which reversed the code | symbol of the increase / decrease amount with respect to the value Cref as an electrical signal corresponding to force Fz.

＜３−２： 第３の実施形態＞
第３の実施形態は、前述した第２の実施形態に係る装置から、第５のセンサを取り去ったものである。具体的には、図１３に示す構成において、第５の固定電極Ｅ５０を省略し、第５の容量素子Ｃ５０の静電容量値Ｃ５０の検出に係る構成要素を省略したものである。なお、溝Ｇ５０は設けられており、第５の接続部材Ｐ５０の下端が、可撓性をもった膜部２０５の上面に固着される点に変わりはない。すなわち、この第３の実施形態の場合も、第５の接続部材Ｐ５０の下端は、第５の下方接続部を介して下方基板３００に接続されており、第５の下方接続部は、第５の接続部材Ｐ５０の下端付近が下方基板３００に対して上下方向に変位可能となるように、第５の接続部材Ｐ５０の下端を下方基板３００の上面に接続する構造を有している。 <3-2: Third Embodiment>
In the third embodiment, the fifth sensor is removed from the apparatus according to the second embodiment described above. Specifically, in the configuration shown in FIG. 13, the fifth fixed electrode E50 is omitted, and the components related to the detection of the capacitance value C50 of the fifth capacitive element C50 are omitted. The groove G50 is provided, and there is no change in that the lower end of the fifth connecting member P50 is fixed to the upper surface of the film portion 205 having flexibility. That is, also in the case of the third embodiment, the lower end of the fifth connection member P50 is connected to the lower substrate 300 via the fifth lower connection portion, and the fifth lower connection portion is the fifth lower connection portion. The lower end of the fifth connection member P50 is connected to the upper surface of the lower substrate 300 so that the vicinity of the lower end of the connection member P50 can be displaced in the vertical direction with respect to the lower substrate 300.

図１４のテーブルの欄外に記載したとおり、力Ｆｚは、「Ｆｚ＝−（Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０）」なる演算によって求めることもできる。この演算式には、第５の容量素子Ｃ５０の静電容量値Ｃ５０は利用されていないので、当該演算式に基づいて力Ｆｚを求めるようにすれば、第５のセンサ（第５の容量素子Ｃ５０）は不要になる。   As described in the margin of the table in FIG. 14, the force Fz can also be obtained by the calculation “Fz = − (C10 + C20 + C30 + C40)”. Since the capacitance value C50 of the fifth capacitive element C50 is not used in this calculation formula, if the force Fz is obtained based on the calculation formula, the fifth sensor (the fifth capacitance element) is obtained. C50) becomes unnecessary.

結局、この第３の実施形態に係る装置は、第５のセンサを有していないが、前述した第２の実施形態に係る装置と同様に、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動動作（Ｙ軸まわり駆動動作とＸ軸まわり駆動動作）を行う機能と、外力として作用したモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘおよび力＋Ｆｚ，−Ｆｚを検出する検出動作（Ｙ軸まわり検出動作，Ｘ軸まわり検出動作，Ｚ軸方向検出動作）を行う機能と、を有している。   After all, the device according to the third embodiment does not have the fifth sensor, but, like the device according to the second embodiment described above, around the + Y axis, around the −Y axis, and around the + X axis. , -X-axis drive operation (Y-axis drive operation and X-axis drive operation) and detection to detect moments + My, -My, + Mx, -Mx and forces + Fz, -Fz acting as external forces And a function of performing operations (Y-axis rotation detection operation, X-axis rotation detection operation, Z-axis direction detection operation).

ここで、Ｚ軸方向検出動作は、第１〜第４のセンサの検出値の総和（静電容量値Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０）に基づく電気信号を、Ｚ軸方向の力Ｆｚの検出値として出力することによって行うことができる。具体的には、上方基板１００に何ら外力が作用していない状態での静電容量値の総和「Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０」の値を基準値Ｃrefとして、当該基準値Ｃrefに対する増減量の符号を逆転した値を示す電気信号を、力Ｆｚに対応する電気信号として出力すればよい。   Here, the Z-axis direction detection operation is performed by outputting an electric signal based on the sum of the detection values of the first to fourth sensors (capacitance value C10 + C20 + C30 + C40) as a detection value of the force Fz in the Z-axis direction. be able to. Specifically, the sum of the capacitance values “C10 + C20 + C30 + C40” when no external force is applied to the upper substrate 100 is set as a reference value Cref, and a value obtained by reversing the sign of the increase / decrease amount with respect to the reference value Cref is obtained. The electric signal shown may be output as an electric signal corresponding to the force Fz.

＜３−３： 第４の実施形態＞
図１７は、本発明の第４の実施形態に係る力検出機能をもった駆動装置の縦断面図である（制御ユニット４８０はブロックで示す）。この図１７に示す第４の実施形態に係る装置と、図１に示す第１の実施形態に係る装置との相違は、第５の接続部材の構造と、制御ユニットの検出動作のみである。 <3-3: Fourth Embodiment>
FIG. 17 is a longitudinal sectional view of a driving apparatus having a force detection function according to the fourth embodiment of the present invention (the control unit 480 is shown by a block). The difference between the apparatus according to the fourth embodiment shown in FIG. 17 and the apparatus according to the first embodiment shown in FIG. 1 is only the structure of the fifth connecting member and the detection operation of the control unit.

具体的には、まず、図１に示す装置における第５の接続部材Ｐ５０が、図１７に示す装置では第５の接続部材Ｐ５０′に置き換えられている。この第５の接続部材Ｐ５０′は、上端が上方基板１００の下面側に第５の上方接続部を介して接続され、下端が中間基板２００の上面に固着されている、という点では、図１に示す第５の接続部材Ｐ５０と同じである。図１７に示す装置の場合も、第５の上方接続部は、第５の接続部材Ｐ５０′の上端付近が上方基板１００に対して任意の方向に傾斜可能となるように、第５の接続部材Ｐ５０′の上端を上方基板１００の下面に接続する構造を有する。具体的には、図１７に示す装置の場合も、第５の上方接続部は、転がり球面軸受Ｑ５０によって構成されている。   Specifically, first, the fifth connecting member P50 in the apparatus shown in FIG. 1 is replaced with a fifth connecting member P50 ′ in the apparatus shown in FIG. The fifth connection member P50 ′ has an upper end connected to the lower surface side of the upper substrate 100 via a fifth upper connection portion, and a lower end fixed to the upper surface of the intermediate substrate 200 in FIG. This is the same as the fifth connection member P50 shown in FIG. Also in the case of the apparatus shown in FIG. 17, the fifth upper connecting portion is provided with the fifth connecting member so that the vicinity of the upper end of the fifth connecting member P50 ′ can be inclined with respect to the upper substrate 100 in an arbitrary direction. The upper end of P50 ′ is connected to the lower surface of the upper substrate 100. Specifically, in the case of the apparatus shown in FIG. 17 as well, the fifth upper connection portion is constituted by a rolling spherical bearing Q50.

ただ、図１に示す第５の接続部材Ｐ５０は、単なる支柱として機能する円柱状の部材であったが、図１７に示す第５の接続部材Ｐ５０′は、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構をもっている。具体的には、図１７に示されているとおり、第５の接続部材Ｐ５０′は、円筒状の外側筒状部Ｐ８と、その内部に嵌合する内側柱状部Ｐ２と、その上部に連なった上方竿状部Ｐ６と、によって構成されている。このような構造は、図２に示す第１の接続部材Ｐ１０の構造に類似しているが、第５の接続部材Ｐ５０′には、ポンプＰ５は設けられていない。このため、第５の接続部材Ｐ５０′は、リニアアクチュエータとしての機能は有していない。   However, the fifth connecting member P50 shown in FIG. 1 is a columnar member that functions as a simple column, but the fifth connecting member P50 ′ shown in FIG. 17 is applied as an external force between the upper and lower ends. It has an expansion / contraction driven mechanism that changes the length between the upper and lower ends according to the extension force or compression force. Specifically, as shown in FIG. 17, the fifth connecting member P50 'is connected to the cylindrical outer cylindrical portion P8, the inner columnar portion P2 fitted therein, and the upper portion thereof. And an upper bowl-shaped part P6. Such a structure is similar to the structure of the first connecting member P10 shown in FIG. 2, but the pump P5 is not provided in the fifth connecting member P50 ′. Therefore, the fifth connection member P50 ′ does not have a function as a linear actuator.

図１７に示すとおり、外側筒状部Ｐ８の内部に形成される圧力室Ｐ３は、通気孔Ｈによって外部に通じており、圧力室Ｐ３の圧力は大気圧に等しくなる。結局、第５の接続部材Ｐ５０′は、自発的な伸縮駆動機構はもたないが、上下両端間に外力として伸張力もしくは圧縮力が加えられた場合、内側柱状部Ｐ２が外側筒状部Ｐ８に対して長手方向に摺動し、上下両端間の長さを変える伸縮従動機構をもっている。また、外側筒状部Ｐ８の下端は、中間基板２００の上面に固着されているので、第５の接続部材Ｐ５０′の中心軸は常にＺ軸上の位置を保つことになる。   As shown in FIG. 17, the pressure chamber P3 formed inside the outer cylindrical portion P8 communicates with the outside through the vent hole H, and the pressure in the pressure chamber P3 becomes equal to the atmospheric pressure. Eventually, the fifth connecting member P50 ′ does not have a voluntary expansion / contraction drive mechanism, but when an extension force or a compression force is applied as an external force between the upper and lower ends, the inner columnar portion P2 becomes the outer cylindrical portion P8. It has a telescopic driven mechanism that slides in the longitudinal direction and changes the length between the upper and lower ends. Further, since the lower end of the outer cylindrical portion P8 is fixed to the upper surface of the intermediate substrate 200, the central axis of the fifth connecting member P50 ′ always maintains the position on the Z axis.

結局、第５の接続部材Ｐ５０′の上端（転がり球面軸受Ｑ５０の球体部Ｑ２の中心）は、図の上下方向に移動するため、固定点にはならず、原点Ｏに対して変位することになる（この第４の実施形態では、原点Ｏは、第５の接続部材Ｐ５０′の中心軸上の任意の位置に設定すればよい）。ただ、その移動範囲は、Ｚ軸上に限定される。実用上は、第５の接続部材Ｐ５０′を完全な剛体で構成することはできないので、第５の接続部材Ｐ５０′の上端は、厳密に言えば、第５の接続部材Ｐ５０′自身の撓みによってＺ軸から外れることになるが、ここでは、そのような撓みによる微小な変位は無視する。   Eventually, the upper end of the fifth connecting member P50 ′ (the center of the sphere part Q2 of the rolling spherical bearing Q50) moves in the vertical direction in the figure, so that it does not become a fixed point but is displaced with respect to the origin O. (In the fourth embodiment, the origin O may be set at an arbitrary position on the central axis of the fifth connecting member P50 '). However, the movement range is limited on the Z axis. In practical use, the fifth connecting member P50 ′ cannot be formed of a completely rigid body. Therefore, strictly speaking, the upper end of the fifth connecting member P50 ′ is caused by the bending of the fifth connecting member P50 ′ itself. Although it will deviate from the Z-axis, here, a small displacement due to such bending is ignored.

このように、図１７に示す装置では、伸縮従動機構をもった第５の接続部材Ｐ５０′を設けるようにしたため、上方基板１００の下方基板３００に対する変位の自由度が増えることになる。すなわち、図１に示す装置の場合、上方基板１００の下方基板３００に対する変位の自由度は、Ｘ軸まわりの回動およびＹ軸まわりの回動に限られていたのに対して、図１７に示す装置の場合、更に、Ｚ軸方向への移動という自由度が加わり、制御ユニット４８０は、上方基板１００を下方基板３００に対してＺ軸方向へ駆動する駆動動作を行うことが可能になる。   As described above, in the apparatus shown in FIG. 17, since the fifth connecting member P50 ′ having the expansion / contraction driven mechanism is provided, the degree of freedom of displacement of the upper substrate 100 with respect to the lower substrate 300 is increased. That is, in the case of the apparatus shown in FIG. 1, the degree of freedom of displacement of the upper substrate 100 relative to the lower substrate 300 is limited to the rotation about the X axis and the rotation about the Y axis. In the case of the illustrated apparatus, the degree of freedom of movement in the Z-axis direction is further added, and the control unit 480 can perform a driving operation for driving the upper substrate 100 with respect to the lower substrate 300 in the Z-axis direction.

図１８は、図１７に示す装置の駆動動作を示すテーブルである。この図１８に示すテーブルは、図１０に示すテーブル（図１の装置の駆動動作を示すテーブル）に、駆動方向として、更に、＋Ｚ軸方向および−Ｚ軸方向を付加したものである。なお、第５の接続部材Ｐ５０′は、外力の作用によって伸縮することは可能であるが、自発的な伸縮駆動機構はもたないため、図１８のテーブルにおいて、Ｐ５０′の列には符号「φ」（伸縮駆動機構をもたない意味）を記してある。   FIG. 18 is a table showing the driving operation of the apparatus shown in FIG. The table shown in FIG. 18 is obtained by adding a + Z axis direction and a −Z axis direction to the table shown in FIG. 10 (a table showing the driving operation of the apparatus of FIG. 1) as the driving direction. The fifth connecting member P50 ′ can be expanded and contracted by the action of an external force, but does not have a spontaneous expansion and contraction drive mechanism. Therefore, in the table of FIG. “φ” (meaning that there is no telescopic drive mechanism) is marked.

図１７に示す装置の上方基板１００（作用体）を下方基板３００に対して、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりに駆動するときの駆動動作は、図１に示す装置の駆動動作と全く同じである。ただ、第５の接続部材Ｐ５０′の上端（転がり球面軸受Ｑ５０の球体部Ｑ２の部分）は、図の上下方向に移動するため、上方基板１００の回動中心は必ずしも原点Ｏにはならない。したがって、回動中心が原点Ｏから外れた状態での駆動は、厳密に言えば、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動にはならないが、本願では、このように回動中心が原点Ｏから外れた場合についても、便宜上、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動と呼ぶことにする。   The driving operation when the upper substrate 100 (acting body) of the apparatus shown in FIG. 17 is driven around the + Y axis, the −Y axis, the + X axis, and the −X axis with respect to the lower substrate 300 is shown in FIG. The driving operation of the apparatus shown is exactly the same. However, since the upper end of the fifth connecting member P50 ′ (the portion of the spherical portion Q2 of the rolling spherical bearing Q50) moves in the vertical direction in the figure, the center of rotation of the upper substrate 100 is not necessarily the origin O. Therefore, strictly speaking, driving in a state where the center of rotation deviates from the origin O does not drive around the + Y axis, around the −Y axis, around the + X axis, and around the −X axis. Thus, even when the center of rotation deviates from the origin O, for convenience, it will be referred to as driving around the + Y axis, around the −Y axis, around the + X axis, and around the −X axis.

図１７に示す装置の特徴は、更に、＋Ｚ軸方向への駆動と、−Ｚ軸方向への駆動とが可能になる点である。すなわち、図１８のテーブルに示されているとおり、第１〜第４の接続部材Ｐ１０〜Ｐ４０を「伸ばす」駆動動作を行えば、上方基板１００を＋Ｚ軸方向へ駆動することができ、第１〜第４の接続部材Ｐ１０〜Ｐ４０を「縮める」駆動動作を行えば、上方基板１００を−Ｚ軸方向へ駆動することができる。このとき、４本の接続部材Ｐ１０〜Ｐ４０の伸縮量を同一にすれば、上方基板１００は、Ｚ軸方向に平行移動することになる。伸縮量に差をもたせた場合は、Ｙ軸まわりもしくはＸ軸まわりの回動動作と、Ｚ軸方向への平行移動動作とを合成した駆動動作が行われる。   The feature of the apparatus shown in FIG. 17 is that the driving in the + Z-axis direction and the driving in the −Z-axis direction are further possible. That is, as shown in the table of FIG. 18, the upper substrate 100 can be driven in the + Z-axis direction by performing the driving operation of “stretching” the first to fourth connecting members P10 to P40. The upper substrate 100 can be driven in the −Z-axis direction by performing a driving operation that “shrinks” the fourth connecting members P10 to P40. At this time, if the expansion / contraction amounts of the four connection members P10 to P40 are the same, the upper substrate 100 moves in parallel in the Z-axis direction. When there is a difference in the amount of expansion / contraction, a driving operation is performed in which a rotation operation around the Y axis or the X axis and a parallel movement operation in the Z axis direction are combined.

一方、この図１７に示す第４の実施形態に係る装置における検出動作は、前述した第３の実施形態に係る装置における検出動作と全く同様である。すなわち、制御ユニット４８０は、図１４のテーブルに示す検出動作により、上方基板１００に対して外力として作用したモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘおよび力＋Ｆｚ，−Ｆｚを検出することができる（第３の実施形態に係る装置と同様に、第５のセンサを有していないため、Ｆｚの検出には、Ｆｚ＝−（Ｃ１０＋Ｃ２０＋Ｃ３０＋Ｃ４０）なる演算式を用いることになる）。   On the other hand, the detection operation in the apparatus according to the fourth embodiment shown in FIG. 17 is exactly the same as the detection operation in the apparatus according to the third embodiment described above. That is, the control unit 480 can detect the moments + My, −My, + Mx, −Mx and the forces + Fz, −Fz acting on the upper substrate 100 as external forces by the detection operation shown in the table of FIG. Similarly to the apparatus according to the third embodiment, since the fifth sensor is not included, an arithmetic expression of Fz = − (C10 + C20 + C30 + C40) is used for detecting Fz).

なお、上述したとおり、第１〜第４の接続部材Ｐ１０〜Ｐ４０を伸縮駆動して、上方基板１００を上下方向に変位させると、上方基板１００の回動中心が原点Ｏから外れた状態になるので、そのような状態で検出したモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘは、厳密には、Ｙ軸まわりやＸ軸まわりのモーメントにはならないが、一般的な用途で利用する上では、大きな支障は生じない。正確な検出値が必要な場合には、上方基板１００の回動中心（転がり球面軸受Ｑ５０の球体部Ｑ２の中心）と原点Ｏとの距離を何らかの方法で認識し（たとえば、ポンプＰ５に対して与えた駆動信号の大きさに基づいて認識できる）、当該距離に基づく幾何学的な補正を行えばよい。   As described above, when the first to fourth connecting members P10 to P40 are driven to expand and contract to displace the upper substrate 100 in the vertical direction, the center of rotation of the upper substrate 100 deviates from the origin O. Therefore, strictly speaking, the moments + My, −My, + Mx, and −Mx detected in such a state do not become moments around the Y axis or the X axis, but are large when used for general purposes. There will be no hindrance. When an accurate detection value is required, the distance between the rotation center of the upper substrate 100 (the center of the spherical portion Q2 of the rolling spherical bearing Q50) and the origin O is recognized by some method (for example, with respect to the pump P5). It can be recognized based on the magnitude of the applied drive signal), and geometric correction based on the distance may be performed.

このように、図１７に示す第４の実施形態に係る装置は、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動動作に加えて、更に、＋Ｚ軸方向、−Ｚ軸方向への駆動動作を行う機能を有しており、また、外力として作用したモーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘおよび力＋Ｆｚ，−Ｆｚの検出動作を行う機能を有している。   As described above, the apparatus according to the fourth embodiment shown in FIG. 17 has, in addition to driving operations around the + Y axis, around the −Y axis, around the + X axis, and around the −X axis, further in the + Z axis direction, −Z It has a function of performing driving operation in the axial direction, and also has a function of detecting operation of moments + My, −My, + Mx, −Mx and forces + Fz, −Fz acting as external forces.

＜＜＜ §４． その他の変形例／応用例 ＞＞＞
これまで、本発明に係る装置を第１〜第４の実施形態について述べた。ここでは、その他の変形例や応用例を述べることにする。 <<< §4. Other modifications / applications >>>
So far, the apparatus according to the present invention has been described with respect to the first to fourth embodiments. Here, other modifications and application examples will be described.

＜４−１： 第５の接続部材を省略した変形例＞
第１〜第４の実施形態は、いずれも５本の接続部材Ｐ１０〜Ｐ５０を用いて、上方基板１００と下方基板３００（中間基板２００）とを接続しているが、本発明に係る装置では、少なくとも第１〜第４の接続部材Ｐ１０〜Ｐ４０を設けてあれば、＋Ｙ軸まわり、−Ｙ軸まわり、＋Ｘ軸まわり、−Ｘ軸まわりの駆動動作と、モーメント＋Ｍｙ，−Ｍｙ，＋Ｍｘ，−Ｍｘおよび力＋Ｆｚ，−Ｆｚの検出動作とを行うことが可能である。 <4-1: Modification in which the fifth connecting member is omitted>
In each of the first to fourth embodiments, the upper substrate 100 and the lower substrate 300 (intermediate substrate 200) are connected using five connection members P10 to P50. If at least the first to fourth connecting members P10 to P40 are provided, the driving operation around the + Y axis, the −Y axis, the + X axis, and the −X axis and the moments + My, −My, + Mx, − Mx and force + Fz, -Fz detection operations can be performed.

なお、第１〜第４の接続部材Ｐ１０〜Ｐ４０のみで上方基板１００と下方基板３００とを接続した場合、そのままでは両基板の位置関係を安定させることはできない。しかしながら、両基板の直径と等しい内径をもったパイプの内部で利用するようなケースでは、４本の接続部材のみを用いた装置でも両基板の位置関係をパイプ内壁の支持によって安定させることができ、産業上、十分な利用価値がある。また、クレーンなどの物品吊上具の一部に利用した場合も、重力によって両基板の位置関係を安定させることができる。   In addition, when the upper board | substrate 100 and the lower board | substrate 300 are connected only by the 1st-4th connection members P10-P40, the positional relationship of both board | substrates cannot be stabilized as it is. However, in the case of use inside a pipe having an inner diameter equal to the diameter of both substrates, the positional relationship between both substrates can be stabilized by supporting the inner wall of the pipe even in an apparatus using only four connecting members. Industrially, it has enough utility value. Also, when used for a part of an article lifting tool such as a crane, the positional relationship between the two substrates can be stabilized by gravity.

第１〜第４の実施形態において、更に、第５の接続部材Ｐ５０，Ｐ５０′を設けているのは、上方基板１００を下方基板３００の上方に安定して支持するためである。第５の接続部材Ｐ５０，Ｐ５０′を用いれば、上方基板１００の中心が必ずＺ軸上にくるように位置決めすることができ、上方基板１００の姿勢を安定させることができる。本発明に係る装置では、上述したように、用途によっては、必ずしも第５の接続部材を設ける必要はないが、一般的な用途に利用する場合は、上方基板１００の位置を安定させるため、第５の接続部材を設けるのが好ましい。   In the first to fourth embodiments, the fifth connection members P50 and P50 ′ are further provided to stably support the upper substrate 100 above the lower substrate 300. If the fifth connecting members P50 and P50 ′ are used, the upper substrate 100 can be positioned so that the center of the upper substrate 100 is always on the Z axis, and the posture of the upper substrate 100 can be stabilized. In the apparatus according to the present invention, as described above, it is not always necessary to provide the fifth connecting member depending on the application. However, when the apparatus is used for a general application, the position of the upper substrate 100 is stabilized. 5 connecting members are preferably provided.

＜４−２： 上方接続部／下方接続部の変形例＞
これまで述べた実施形態の場合、第１〜第５の上方接続部および第１〜第４の下方接続部が、転がり球面軸受を含む構造体によって構成されているが、これらの接続部は、必ずしも転がり球面軸受を用いて構成する必要はない。 <4-2: Modification Example of Upper Connection Portion / Lower Connection Portion>
In the case of the embodiments described so far, the first to fifth upper connecting portions and the first to fourth lower connecting portions are constituted by a structure including a rolling spherical bearing. It is not always necessary to use a rolling spherical bearing.

第１〜第５の上方接続部に要求される条件は、それぞれ第１〜第５の接続部材Ｐ１０〜Ｐ５０の上端付近が上方基板１００に対して任意の方向に傾斜可能となるように（接続部材の中心軸の上端を先端点とし、Ｚ軸に平行な中心軸をもった所定の円錐を定義したときに、接続部材の中心軸がこの円錐内を自由に移動できるように）、それぞれ第１〜第５の接続部材Ｐ１０〜Ｐ５０の上端を上方基板１００の下面に接続する構造を有していることである。したがって、上方接続部は必ずしも転がり球面軸受を用いて構成する必要はなく、一般的な転がり軸受けを複数組み合わせて上方接続部を構成したり、リンク機構によって上方接続部を構成したりすることも可能である。   The conditions required for the first to fifth upper connecting portions are such that the vicinity of the upper ends of the first to fifth connecting members P10 to P50 can be inclined with respect to the upper substrate 100 in any direction (connection). The center axis of the connecting member is free to move in this cone when a predetermined cone is defined with the upper end of the central axis of the member as the tip and a central axis parallel to the Z axis). That is, the upper ends of the first to fifth connecting members P10 to P50 are connected to the lower surface of the upper substrate 100. Therefore, it is not always necessary to configure the upper connecting portion using a rolling spherical bearing, and it is possible to configure an upper connecting portion by combining a plurality of general rolling bearings, or to configure an upper connecting portion by a link mechanism. It is.

一方、第１〜第４の下方接続部には、次の２つの条件が要求される。第１の条件は、第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端付近が下方基板３００に対して任意の方向に傾斜可能となるように（接続部材の中心軸の下端を先端点とし、Ｚ軸に平行な中心軸をもった所定の円錐を定義したときに、接続部材の中心軸がこの円錐内を自由に移動できるように）、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を下方基板３００の上面に接続する構造を有していることである。当該構造は、必ずしも転がり球面軸受を用いて構成する必要はなく、一般的な転がり軸受けを複数組み合わせて構成したり、リンク機構によって構成したりすることも可能である。   On the other hand, the following two conditions are required for the first to fourth lower connecting portions. The first condition is that the vicinity of the lower ends of the first to fourth connecting members P10 to P40 can be inclined in an arbitrary direction with respect to the lower substrate 300 (the lower end of the central axis of the connecting member is a leading point, When a predetermined cone having a central axis parallel to the Z axis is defined, the central axis of the connecting member can freely move in the cone), and the first to fourth connecting members P10 to P40 respectively. That is, the lower end is connected to the upper surface of the lower substrate 300. The structure does not necessarily need to be configured by using a rolling spherical bearing, and can be configured by combining a plurality of general rolling bearings or by a link mechanism.

第１〜第４の下方接続部に要求される第２の条件は、下方基板３００に対して上下方向に変位可能となるように、それぞれ第１〜第４の接続部材Ｐ１０〜Ｐ４０の下端を下方基板３００の上面に接続する構造を有することである（この条件は、第２および第３の実施形態における第５の接続部材の下端を接続する第５の下方接続部にも要求される条件である）。これまで述べた実施形態の場合、下方基板３００の上面に中間基板２００を配置し、この中間基板２００の下面に溝を掘って、その底部に可撓性をもった膜部（ダイアフラム）を形成した構造により、下方接続部を構成しているが、下方接続部は、必ずしもこのような膜部を用いて構成する必要はない。たとえば、膜部の代わりに、ビーム構造体（たとえば、２本のビームを直交させた十文字状の構造体）を用いて下方接続部を構成してもよい。   The second condition required for the first to fourth lower connecting portions is that the lower ends of the first to fourth connecting members P <b> 10 to P <b> 40 are respectively set so as to be displaceable in the vertical direction with respect to the lower substrate 300. This is to have a structure connected to the upper surface of the lower substrate 300 (this condition is also required for the fifth lower connection portion connecting the lower ends of the fifth connection members in the second and third embodiments). Is). In the embodiment described so far, the intermediate substrate 200 is disposed on the upper surface of the lower substrate 300, and a groove is dug in the lower surface of the intermediate substrate 200 to form a flexible film portion (diaphragm) at the bottom. Although the lower connection portion is configured by the structure described above, the lower connection portion is not necessarily configured using such a film portion. For example, instead of the film portion, the lower connection portion may be configured using a beam structure (for example, a cross-shaped structure in which two beams are orthogonally crossed).

＜４−３： 各接続部材の対称性＞
これまで述べた実施形態の場合、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、各接続部材が幾何学的対称性を有するように配置されていた。すなわち、「標準姿勢」の状態では、第１の接続部材Ｐ１０と第２の接続部材Ｐ２０とがＹＺ平面に関して面対称をなし、第３の接続部材Ｐ３０と第４の接続部材Ｐ４０とがＸＺ平面に関して面対称をなし、第５の接続部材Ｐ５０，Ｐ５０′がＺ軸上にくるような配置が採られていた。 <4-3: Symmetry of each connecting member>
In the case of the embodiment described so far, the “standard posture” in which the first to fourth extension drive mechanisms are adjusted so that the lengths between the upper and lower ends of the first to fourth connection members P10 to P40 are equal to each other. In the state, each connecting member was arranged to have geometric symmetry. That is, in the “standard posture” state, the first connecting member P10 and the second connecting member P20 are plane-symmetric with respect to the YZ plane, and the third connecting member P30 and the fourth connecting member P40 are XZ plane. Is arranged so that the fifth connecting members P50 and P50 'are on the Z-axis.

しかしながら、本発明を実施する上で、上記対称性は必ずしも必要ではなく、対称性をもたない配置を採った場合でも、駆動動作や検出動作は可能である。ただ、上述した対称性をもった配置を採ると、駆動動作における伸縮量や、検出動作におけるセンサの出力値にも対称性が得られるため、制御ユニットにおける制御動作や演算処理が簡素化されることになる。   However, in implementing the present invention, the above-described symmetry is not necessarily required, and even when an arrangement without symmetry is adopted, a driving operation and a detection operation are possible. However, if the arrangement having the above-described symmetry is adopted, symmetry is also obtained in the expansion / contraction amount in the driving operation and the output value of the sensor in the detection operation, so that the control operation and arithmetic processing in the control unit are simplified. It will be.

たとえば、図１０のテーブルに基づいて、＋Ｙ軸まわりの駆動動作を行う場合、第１の接続部材Ｐ１０と第２の接続部材Ｐ２０とがＹＺ平面に関して面対称の関係にあれば、第１の接続部材Ｐ１０の圧縮量と第２の接続部材Ｐ２０の伸張量とが同一になるような制御を行えばよい。対称性が確保されていない場合、適切な回動運動が行われるよう圧縮量と伸張量とを調整する処理が必要になる。   For example, when a driving operation around the + Y axis is performed based on the table of FIG. 10, if the first connecting member P10 and the second connecting member P20 are in a plane-symmetric relationship with respect to the YZ plane, the first connection Control may be performed so that the compression amount of the member P10 and the expansion amount of the second connecting member P20 are the same. If symmetry is not ensured, it is necessary to adjust the amount of compression and the amount of expansion so that an appropriate rotational movement is performed.

同様に、図１２のテーブルにおいて、「Ｍｙ＝Ｃ１０−Ｃ２０」や「Ｍｘ＝Ｃ４０−Ｃ３０」なる演算式でモーメントＭｙやＭｘの値が得られるのは、上述した対称性が確保されているためである。対称性が確保されていない場合、各静電容量値に所定の係数を乗じる補正が必要になる。   Similarly, in the table of FIG. 12, the values of the moments My and Mx are obtained with the arithmetic expressions “My = C10−C20” and “Mx = C40−C30” because the above-described symmetry is ensured. It is. If symmetry is not ensured, correction is required by multiplying each capacitance value by a predetermined coefficient.

したがって、実用上は、各接続部材について、上述した対称性を確保した配置を採るようにするのが好ましい。   Therefore, in practice, it is preferable to adopt an arrangement that ensures the above-described symmetry for each connection member.

＜４−４： 上方構造体／下方構造体の変形例＞
本発明に係る装置は、作用体として機能する上方構造体と、この上方構造体の下方に配置された下方構造体と、両者間を接続する少なくとも４本の接続部材と、を有し、下方構造体を固定した状態において上方構造体に作用した力を検出する検出機能と、下方構造体に対して上方構造体を所定方向に駆動する駆動機能と、を有する力検出機能をもった駆動装置である。 <4-4: Modification of upper structure / lower structure>
An apparatus according to the present invention includes an upper structure that functions as an action body, a lower structure disposed below the upper structure, and at least four connecting members that connect the two. A drive device having a force detection function having a detection function for detecting a force acting on the upper structure while the structure is fixed, and a drive function for driving the upper structure in a predetermined direction with respect to the lower structure It is.

これまで述べた実施形態の場合、上方構造体が平板状の上方基板１００からなり、下方構造体が平板状の下方基板３００からなり、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、上方基板１００および下方基板２００の基板面が、ＸＹ平面に平行になるような構造を採っていた。   In the case of the embodiments described so far, the upper structure is composed of the flat upper substrate 100, the lower structure is composed of the flat lower substrate 300, and between the upper and lower ends of the first to fourth connecting members P10 to P40. A structure in which the substrate surfaces of the upper substrate 100 and the lower substrate 200 are parallel to the XY plane in the “standard posture” state in which the first to fourth expansion / contraction driving mechanisms are adjusted so that the lengths of the upper and lower substrates are equal to each other. Was adopted.

しかしながら、上方構造体および下方構造体は、必ずしも平板状の基板によって構成する必要はなく、任意形状の構造体によって構成してかまわない。たとえば、上方基板１００の代わりに、球形をした構造体を上方構造体として利用することも可能であり、これまで述べた実施形態における上方基板１００を任意形状の上方構造体に置き換え、下方基板３００を任意形状の下方構造体に置き換えてもかまわない。ただ、工業製品として量産性を確保し、また、薄型化を図る上では、これまで述べた実施形態のように、上方構造体および下方構造体を平板状の基板によって構成するようにし、「標準姿勢」の状態において、上方基板１００および下方基板２００の基板面が、ＸＹ平面に平行になるような構造を採るのが好ましい。   However, the upper structure and the lower structure do not necessarily need to be configured by a flat substrate, and may be configured by an arbitrarily shaped structure. For example, instead of the upper substrate 100, a spherical structure can be used as the upper structure. The upper substrate 100 in the embodiments described above is replaced with an upper structure of an arbitrary shape, and the lower substrate 300 is used. May be replaced with an arbitrarily shaped lower structure. However, in order to secure mass productivity as an industrial product and to reduce the thickness, the upper structure and the lower structure are configured by a flat plate-like substrate as in the embodiments described so far. In the “posture” state, it is preferable to adopt a structure in which the substrate surfaces of the upper substrate 100 and the lower substrate 200 are parallel to the XY plane.

＜４−５： センサの変形例＞
これまで述べた実施形態では、各膜部に形成された変位電極と、これら各変位電極に対向する下方基板の上面位置に固定された固定電極と、からなる容量素子によって、第１〜第５のセンサを構成していたが、本発明に用いるセンサは、各接続部材の下方構造体に対する上下方向に関する変位を検出する機能を有していれば、どのようなセンサを用いてもかまわない。たとえば、膜部に形成した歪みゲージやピエゾ抵抗素子などをセンサとして利用することも可能である。 <4-5: Modification of sensor>
In the embodiments described so far, the first to fifth elements are constituted by the capacitive elements including the displacement electrodes formed on the respective film portions and the fixed electrodes fixed to the upper surface position of the lower substrate facing the respective displacement electrodes. However, any sensor may be used as long as the sensor used in the present invention has a function of detecting the displacement of each connecting member in the vertical direction with respect to the lower structure. For example, a strain gauge or a piezoresistive element formed on the film portion can be used as a sensor.

なお、センサの出力値は、必ずしも作用した外力の大きさに比例したものにはならないので、図１２や図１４に示す演算式に基づいて得られる演算値は、厳密には線形の検出値にはならない可能性がある。したがって、より正確な線形検出値を得るためには、作用した外力の大きさと各接続部材のＺ軸方向に関する変位との関係や、当該変位とセンサの出力値との関係を考慮した換算テーブルを設けておき、この換算テーブルを利用して、図１２や図１４に示す演算式に基づいて得られる演算値に対して補正を行うようにすればよい。   Since the output value of the sensor is not necessarily proportional to the magnitude of the applied external force, the calculated value obtained based on the calculation formulas shown in FIGS. 12 and 14 is strictly a linear detection value. It may not be possible. Therefore, in order to obtain a more accurate linear detection value, a conversion table that considers the relationship between the magnitude of the applied external force and the displacement of each connecting member in the Z-axis direction and the relationship between the displacement and the output value of the sensor. It is only necessary to correct the calculated values obtained based on the calculation formulas shown in FIGS. 12 and 14 by using this conversion table.

＜４−６： 接続部材の変形例＞
これまで述べた実施形態では、第１〜第４の接続部材Ｐ１０〜Ｐ４０として、図２に示すようなリニアアクチュエータを用いた例を述べた。このリニアアクチュエータは、外側筒状部Ｐ１と、その内側に嵌合した内側柱状部Ｐ２と、を同一の摺動軸Ａ上に配置してなる構造部と、与えられた電気信号に基づいて、内側柱状部Ｐ２を外側筒状部Ｐ１に対して、摺動軸Ａに沿った方向に摺動させることにより全長を所望の長さに調整し、当該長さを維持させる伸縮駆動機構（導管Ｐ４およびポンプＰ５）とを備えている。 <4-6: Modification of connecting member>
In the embodiment described so far, the example in which the linear actuator as shown in FIG. 2 is used as the first to fourth connecting members P10 to P40 has been described. This linear actuator is based on a structure part formed by arranging an outer cylindrical part P1 and an inner columnar part P2 fitted inside thereof on the same sliding axis A, and a given electrical signal. A telescopic drive mechanism (conduit P4) that adjusts the total length to a desired length by sliding the inner columnar portion P2 with respect to the outer cylindrical portion P1 in the direction along the sliding axis A and maintains the length. And a pump P5).

もちろん、この図２に示すリニアアクチュエータは、本発明に用いる接続部材の一例であり、本発明で用いる接続部材は、たとえば、リンク機構を用いた部材など、電気信号に基づいて上下両端間の長さを変えるアクチュエータであれば、どのような部材を用いてもかまわない。   Of course, the linear actuator shown in FIG. 2 is an example of a connection member used in the present invention. The connection member used in the present invention is a length between upper and lower ends based on an electrical signal, such as a member using a link mechanism. Any member may be used as long as the actuator changes the thickness.

なお、本発明に係る駆動装置は、力検出装置としても機能するという特徴を有しているが、力検出装置としての機能を果たす際には、接続部材の伸縮状態をしっかりと固定しておくのが好ましい。たとえば、接続部材として、図２に示すようなリニアアクチュエータを用いる場合、駆動装置として機能させる際には、ポンプＰ５を駆動して圧力室Ｐ３内部の圧力を増減し、内側柱状部Ｐ２を摺動させることになるが、力検出装置として機能させる際には、検出対象となる外力によって内側柱状部Ｐ２が摺動してしまうと、正しい検出値を得ることができなくなる。したがって、力検出装置として機能させる際には、測定を開始する前（外力が作用する前）に、内側柱状部Ｐ２が摺動しないよう、何らかの方法で固定するのが好ましい。   Although the drive device according to the present invention has a feature of functioning also as a force detection device, when the function as the force detection device is fulfilled, the expansion and contraction state of the connecting member is firmly fixed. Is preferred. For example, when a linear actuator as shown in FIG. 2 is used as a connecting member, when functioning as a drive device, the pump P5 is driven to increase or decrease the pressure inside the pressure chamber P3, and the inner columnar portion P2 slides. However, when functioning as a force detection device, if the inner columnar part P2 slides due to an external force to be detected, a correct detection value cannot be obtained. Therefore, when functioning as a force detection device, it is preferable to fix the inner columnar part P2 by some method before the measurement is started (before the external force is applied).

具体的には、たとえば、外側筒状部Ｐ１に機械的なロック機構を設け、このロック機構により、内側柱状部Ｐ２の位置を固定するようにしておけばよい（一例としては、外側筒状部Ｐ１の内径を機械的に絞るような機構を設けておき、内側柱状部Ｐ２が摩擦力によって移動しないようにすればよい）。制御ユニットは、検出動作を行う際には、このロック機構により、第１〜第４の接続部材Ｐ１０〜Ｐ４０の上下両端間の長さを一定に維持する制御を行うようにすればよい。   Specifically, for example, a mechanical locking mechanism may be provided in the outer cylindrical portion P1, and the position of the inner columnar portion P2 may be fixed by this locking mechanism (for example, the outer cylindrical portion P1). A mechanism for mechanically reducing the inner diameter of P1 may be provided so that the inner columnar portion P2 does not move due to frictional force). When performing the detection operation, the control unit may perform control to keep the length between the upper and lower ends of the first to fourth connection members P10 to P40 constant by the lock mechanism.

なお、接続部材の伸縮状態の固定は、必ずしも機械的なロック機構によって行う必要はなく、電気的な制御で行うことも可能である。図１９は、図２に示す接続部材の変形例Ｐ１０′を示す拡大縦断面図である。この図１９に示す接続部材Ｐ１０′も、リニアアクチュエータであるが、導管Ｐ４にポンプＰ５と圧力センサＰ９とが接続されている。圧力センサＰ９は、圧力室Ｐ３の圧力を検出する機能を有している。圧力センサＰ９によって検出された圧力の検出信号は、制御ユニット４００，４５０，４８０へと与えられる。制御ユニットは、圧力センサＰ９が検出した圧力が一定値に維持されるように、ポンプＰ５を制御するための駆動信号を出力する。こうして、制御ユニットによるフィードバック制御が行われ、圧力室Ｐ３の内部圧力は一定値に維持される。すなわち、内側柱状部Ｐ２の伸縮状態は固定されることになる。   It should be noted that the expansion and contraction of the connecting member is not necessarily performed by a mechanical locking mechanism, and can be performed by electrical control. FIG. 19 is an enlarged longitudinal sectional view showing a modification P10 ′ of the connecting member shown in FIG. The connecting member P10 ′ shown in FIG. 19 is also a linear actuator, but a pump P5 and a pressure sensor P9 are connected to the conduit P4. The pressure sensor P9 has a function of detecting the pressure in the pressure chamber P3. The detection signal of the pressure detected by the pressure sensor P9 is given to the control units 400, 450, and 480. The control unit outputs a drive signal for controlling the pump P5 so that the pressure detected by the pressure sensor P9 is maintained at a constant value. Thus, feedback control by the control unit is performed, and the internal pressure of the pressure chamber P3 is maintained at a constant value. That is, the expansion / contraction state of the inner columnar part P2 is fixed.

要するに、外側筒状部Ｐ１内に設けられた圧力室Ｐ３の圧力を制御するポンプＰ５と、圧力室Ｐ３の圧力を測定する圧力センサＰ９と、を有するリニアアクチュエータを各接続部材として用いれば、制御ユニット４００，４５０，４８０は、駆動動作を行う際には、ポンプＰ５に所定の駆動信号を与えて内側柱状部Ｐ２を摺動させることにより、リニアアクチュエータの全長を所望の長さに調整し、検出動作を行う際には、圧力センサＰ９による測定値が一定となるようにポンプＰ５に所定の駆動信号を与えてフィードバック制御を行うことができる。   In short, if a linear actuator having a pump P5 for controlling the pressure of the pressure chamber P3 provided in the outer cylindrical portion P1 and a pressure sensor P9 for measuring the pressure of the pressure chamber P3 is used as each connecting member, the control is performed. When the units 400, 450, and 480 perform a driving operation, a predetermined driving signal is given to the pump P5 to slide the inner columnar portion P2, thereby adjusting the total length of the linear actuator to a desired length. When performing the detection operation, feedback control can be performed by giving a predetermined drive signal to the pump P5 so that the measurement value by the pressure sensor P9 is constant.

なお、図１９に示すようなリニアアクチュエータＰ１０′を、各接続部材として用いた装置の場合、力検出装置として機能させる際に、圧力センサＰ９を容量素子からなるセンサの代わりとして利用することができる。すなわち、リニアアクチュエータ１０′の摺動軸Ａ方向に作用する力は、圧力室Ｐ３の圧力変動として圧力センサＰ９によって検出することができるので、圧力センサＰ９は、これまで述べてきた実施形態で用いられている容量素子からなるセンサと同等の機能を果たす。   In the case of a device using a linear actuator P10 ′ as shown in FIG. 19 as each connecting member, the pressure sensor P9 can be used in place of a sensor made of a capacitive element when functioning as a force detection device. . That is, the force acting in the direction of the sliding axis A of the linear actuator 10 'can be detected by the pressure sensor P9 as a pressure fluctuation in the pressure chamber P3. Therefore, the pressure sensor P9 is used in the embodiments described so far. It performs the same function as a sensor composed of a capacitive element.

たとえば、図１に示す駆動装置における第１〜第４の接続部材Ｐ１０〜Ｐ４０として、図１９に示すリニアアクチュエータＰ１０′を用いるようにすれば、４個の圧力センサＰ９の出力変化は、図１２のテーブルに示す４個の静電容量式センサＣ１０〜Ｃ４０の出力変化と同様になるので、これら圧力センサの検出信号を利用して、作用した力の検出を行うことができる。   For example, if the linear actuator P10 ′ shown in FIG. 19 is used as the first to fourth connecting members P10 to P40 in the drive device shown in FIG. 1, the output changes of the four pressure sensors P9 are as shown in FIG. Since the output changes of the four capacitance sensors C10 to C40 shown in the table of FIG. 4 are the same, the applied force can be detected using the detection signals of these pressure sensors.

また、上述したように、４個の圧力センサによって検出された圧力をそれぞれ一定値に維持するため、制御ユニット４００，４５０，４８０によるフィードバック制御が行われるので、圧力センサの検出信号の代わりに、このフィードバック制御信号（各ポンプへ与える駆動信号）を利用して、作用した力の検出を行うこともできる。このようにリニアアクチュエータＰ１０′を接続部材として用いた装置では、静電容量式センサを設ける必要はなくなる。   Further, as described above, feedback control is performed by the control units 400, 450, and 480 in order to maintain the pressure detected by the four pressure sensors at a constant value, so that instead of the detection signal of the pressure sensor, It is also possible to detect the applied force using this feedback control signal (drive signal given to each pump). Thus, in an apparatus using the linear actuator P10 ′ as a connecting member, it is not necessary to provide a capacitive sensor.

＜４ー７：中央接続部材と周辺接続部材とによる構成＞
§２〜§３で述べた第１〜第４の実施形態は、いずれも中心に配置された第５の接続部材によって、下方基板の上方位置に上方基板を支持する構成を採っている。すなわち、装置の中心に支柱として機能する第５の接続部材を配置し、その周囲に第１〜第４の接続部材を配置した構成を採る。このように、本発明に係る装置の構造を、「支柱として機能する中央接続部材と、その周囲に配置された複数の周辺接続部材とによって、下方構造体の上方に上方構造体を支持する構造」として把握すると、本発明は、次のような特徴を備えた装置に係る発明として捉えることができる。 <4-7: Configuration with central connecting member and peripheral connecting member>
Each of the first to fourth embodiments described in §2 to §3 adopts a configuration in which the upper substrate is supported at an upper position of the lower substrate by the fifth connecting member disposed in the center. That is, the structure which arrange | positions the 5th connection member which functions as a support | pillar in the center of an apparatus, and has arrange | positioned the 1st-4th connection member around it is taken. As described above, the structure of the apparatus according to the present invention is defined as “a structure in which the upper structure is supported above the lower structure by the central connection member functioning as the support column and the plurality of peripheral connection members arranged around the center connection member. , The present invention can be understood as an invention relating to an apparatus having the following characteristics.

すなわち、本発明に係る装置は、所定の作用体に対して所定方向に作用した力を検出する検出機能と、この作用体を所定方向に駆動する駆動機能と、を有する装置であって、次の各構成要素を有している。
（１）作用体として機能する上方構造体
（２）この上方構造体の下方に配置された下方構造体
（３）下方構造体の上方位置に上方構造体が、少なくとも所定の１方向に傾斜可能な状態で支持されるように、上方構造体と下方構造体とを接続する中央接続部材
（４）上端が上方構造体の下面側に上方接続部を介して接続され、下端が下方構造体の上面側に下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもち、中央接続部材の周囲に配置された複数Ｎ本の周辺接続部材
（５）複数Ｎ本の周辺接続部材の下端の下方構造体に対する上下方向に関する変位をそれぞれ検出するセンサ
（６）伸縮駆動機構に所定の電気信号を与えて複数Ｎ本の周辺接続部材の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、センサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作と、を行う制御ユニット That is, an apparatus according to the present invention is an apparatus having a detection function for detecting a force acting on a predetermined acting body in a predetermined direction and a driving function for driving the acting body in a predetermined direction. It has each component of.
(1) Upper structure that functions as an action body (2) Lower structure disposed below the upper structure (3) The upper structure can be tilted at least in one predetermined direction above the lower structure The upper end of the central connection member (4) connecting the upper structure and the lower structure is connected to the lower surface side of the upper structure via the upper connection portion so that the lower structure is supported by the lower structure. A plurality of N peripheral connection members that are connected to the upper surface side via a lower connection portion and have a telescopic drive mechanism that changes the length between the upper and lower ends based on a given electrical signal, and are arranged around the central connection member (5) Sensors for detecting displacements in the vertical direction with respect to the lower structure at the lower ends of the plurality of N peripheral connection members (6) Upper and lower ends of the plurality of N peripheral connection members by applying predetermined electrical signals to the expansion and contraction drive mechanism The length between each is the desired length A driving operation be adjusted to be, based on the detection result of the sensor, the control unit performing a detection operation for outputting an electrical signal indicative of the force exerted on the working body, the

ここで、上方接続部は、周辺接続部材の上端付近が上方構造体に対して少なくとも所定の１方向に傾斜可能となるように、周辺接続部材の上端を上方構造体の下面に接続する構造を有しており、下方接続部は、周辺接続部材の下端付近が下方構造体に対して少なくとも所定の１方向に傾斜可能となるように、かつ、下方構造体に対して上下方向に変位可能となるように、周辺接続部材の下端を下方構造体の上面に接続する構造を有している。   Here, the upper connection portion has a structure in which the upper end of the peripheral connection member is connected to the lower surface of the upper structure so that the vicinity of the upper end of the peripheral connection member can be inclined in at least one predetermined direction with respect to the upper structure. And the lower connecting portion can be displaced in the vertical direction with respect to the lower structure so that the vicinity of the lower end of the peripheral connecting member can be inclined at least in one predetermined direction with respect to the lower structure. Thus, the lower end of the peripheral connection member is connected to the upper surface of the lower structure.

特に、これまで述べた第１の実施形態（図１）および第４の実施形態（図１７）の場合、下方構造体が平板状の下方基板からなり、その基板面に対して平行なＸＹ平面をもったＸＹＺ三次元座標系を定義したときに、中央接続部材（第５の接続部材Ｐ５０，Ｐ５０′）の中心軸がＺ軸上にくるように、中央接続部材の下端が下方構造体に固着されており、中央接続部材の上端による上方構造体の支持中心点が常にＺ軸上に維持されるように構成されている。   In particular, in the case of the first embodiment (FIG. 1) and the fourth embodiment (FIG. 17) described so far, the lower structure consists of a flat lower substrate, and the XY plane is parallel to the substrate surface. When defining an XYZ three-dimensional coordinate system with a center connection member (fifth connection members P50, P50 '), the lower end of the central connection member is located on the lower structure so that the central axis is on the Z axis. It is fixed, and is configured so that the support center point of the upper structure by the upper end of the central connection member is always maintained on the Z axis.

なお、第２および第３の実施形態（図１３）の場合は、膜部２０５に撓みが生じると、中央接続部材Ｐ５０の中心軸はＺ軸から外れる可能性があるが、「標準姿勢」の状態、かつ、検出対象となる力が作用していない状態では、第１および第４の実施形態と同様に、中央接続部材の中心軸がＺ軸上にくるように、中央接続部材の下端が下方構造体に接続されており、中央接続部材の上端による上方構造体の支持中心点が常にＺ軸上に維持されるように構成されていることになる。   In the case of the second and third embodiments (FIG. 13), when the film portion 205 is bent, the central axis of the central connecting member P50 may be deviated from the Z axis. In a state where the force to be detected is not applied, the lower end of the central connection member is positioned so that the central axis of the central connection member is on the Z axis, as in the first and fourth embodiments. It is connected to the lower structure, and the support center point of the upper structure by the upper end of the central connection member is always maintained on the Z axis.

また、第４の実施形態（図１７）の場合は、中央接続部材Ｐ５０′が、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構を有している。このため、既に述べたとおり、中央接続部材Ｐ５０′の長さの変化に応じて、中央接続部材Ｐ５０′の上端による上方構造体の支持中心点がＺ軸に沿って移動することになる。   In the case of the fourth embodiment (FIG. 17), the central connection member P50 ′ has a telescopic driven mechanism that changes the length between the upper and lower ends in accordance with an extension force or a compression force applied as an external force between the upper and lower ends. have. For this reason, as already described, the support center point of the upper structure by the upper end of the center connection member P50 ′ moves along the Z axis in accordance with the change in the length of the center connection member P50 ′.

上述したとおり、中央接続部材の周囲に配置する周辺接続部材を複数Ｎ本設けるようにし、この複数Ｎ本の周辺接続部材の下端の下方構造体に対する上下方向に関する変位をそれぞれ検出するためのセンサを設けるようにすれば、作用体に対して所定方向に作用した力を検出する検出機能と、この作用体を所定方向に駆動する駆動機能とをもった装置を構成することが可能である。これまで述べた第１〜第４の実施形態は、いずれもＮ＝４として、４本の周辺接続部材を設けた例であるが、たとえば、Ｎ＝２として、２本の周辺接続部材のみを設けた場合でも、中央接続部材によって、下方構造体の上方位置に上方構造体が支持されていれば、力検出機能をもった駆動装置として何ら支障は生じない。もちろん、３本の周辺接続部材を設けたり、６本の周辺接続部材を設けたりすることも可能であり、Ｎは任意に設定することができる。   As described above, a plurality of N peripheral connection members arranged around the central connection member are provided, and sensors for detecting the displacement in the vertical direction with respect to the lower structure at the lower end of the plurality of N peripheral connection members are provided. If provided, it is possible to configure a device having a detection function for detecting a force acting on the acting body in a predetermined direction and a driving function for driving the acting body in a predetermined direction. The first to fourth embodiments described so far are examples in which N = 4 and four peripheral connection members are provided. For example, N = 2 and only two peripheral connection members are provided. Even if it is provided, if the upper structure is supported by the central connecting member at an upper position of the lower structure, there is no problem as a drive device having a force detection function. Of course, it is possible to provide three peripheral connection members or six peripheral connection members, and N can be arbitrarily set.

ただ、周辺接続部材の数を減らすと、駆動方向の自由度や検出対象となる力の向きは制限されてしまう。たとえば、図１に示す第１の実施形態において、中央接続部材Ｐ５０と、Ｘ軸上に配置された２本の周辺接続部材Ｐ１０，Ｐ２０のみを残し、Ｙ軸上に配置された２本の周辺接続部材Ｐ３０，Ｐ４０（図１では、示されていない）を省略した場合、駆動方向はＹ軸まわりのみに限定され、検出対象となる力もＹ軸まわりのモーメントＭｙに限定されることになる。もっとも、この場合、各上方接続部および各下方接続部は、各周辺接続部材の上端および下端付近がＸ軸方向に傾斜可能となるように接続できればよく、Ｙ軸方向に傾斜させる必要はないので、必ずしも転がり球面軸受のような任意の方向に傾斜可能な軸受を用いる必要はない。   However, if the number of peripheral connection members is reduced, the degree of freedom in the driving direction and the direction of the force to be detected are limited. For example, in the first embodiment shown in FIG. 1, only the central connection member P50 and the two peripheral connection members P10 and P20 arranged on the X axis are left, and the two peripherals arranged on the Y axis are left. When the connecting members P30 and P40 (not shown in FIG. 1) are omitted, the driving direction is limited only to the Y axis, and the force to be detected is also limited to the moment My about the Y axis. However, in this case, each upper connection portion and each lower connection portion need only be connected so that the vicinity of the upper end and lower end of each peripheral connection member can be inclined in the X-axis direction, and does not need to be inclined in the Y-axis direction. It is not always necessary to use a bearing that can tilt in any direction, such as a rolling spherical bearing.

駆動方向の自由度や検出対象となる力の向きを増やすには、周辺接続部材の数Ｎを増やすようにすればよい。たとえば、Ｙ軸まわりおよびＸ軸まわりの駆動方向を確保し、Ｙ軸まわりのモーメントＭｙおよびＸ軸まわりのモーメントＭｘを検出できるようにするためには、これまで述べた実施形態のように、中央接続部材の周囲に４本の周辺接続部材を配置した構成を採ればよい。この場合、効率的な駆動動作および効率的な検出動作を行う上では、４本の周辺接続部材の配置に幾何学的な対称性が確保されるようにするのが好ましい。   In order to increase the degree of freedom in the driving direction and the direction of the force to be detected, the number N of peripheral connection members may be increased. For example, in order to ensure the driving directions around the Y axis and the X axis and to detect the moment My around the Y axis and the moment Mx around the X axis, as in the embodiments described above, What is necessary is just to take the structure which has arrange | positioned the four peripheral connection members around the connection member. In this case, in order to perform an efficient drive operation and an efficient detection operation, it is preferable to ensure geometric symmetry in the arrangement of the four peripheral connection members.

具体的には、これまで述べた実施形態のように、４本の周辺接続部材の上下両端間の長さが互いに等しくなるように伸縮駆動機構を調整した「標準姿勢」の状態、かつ、検出対象となる力が作用していない状態において、第１の周辺接続部材Ｐ１０の中心軸と第２の周辺接続部材Ｐ２０の中心軸とが第１の平面（これまでの実施形態の場合ＸＺ平面）上に位置し、第３の周辺接続部材Ｐ３０の中心軸と第４の周辺接続部材Ｐ４０の中心軸とが第１の平面に直交する第２の平面（これまでの実施形態の場合ＹＺ平面）上に位置し、第１の平面に関して第３の周辺接続部材Ｐ３０と第４の周辺接続部材Ｐ４０とが面対称をなし、第２の平面に関して第１の周辺接続部材Ｐ１０と第２の周辺接続部材Ｐ２０とが面対称をなすような配置を採るのが好ましい。   Specifically, as in the embodiments described so far, the “normal posture” state in which the extension drive mechanism is adjusted so that the lengths between the upper and lower ends of the four peripheral connection members are equal to each other, and the detection is performed. In a state where the target force is not acting, the central axis of the first peripheral connecting member P10 and the central axis of the second peripheral connecting member P20 are the first plane (in the case of the previous embodiments, the XZ plane). A second plane that is located above and in which the central axis of the third peripheral connecting member P30 and the central axis of the fourth peripheral connecting member P40 are orthogonal to the first plane (in the case of the previous embodiments, the YZ plane) The third peripheral connection member P30 and the fourth peripheral connection member P40 are located on the first plane and symmetrical with respect to the first plane, and the first peripheral connection member P10 and the second peripheral connection are related to the second plane. It is preferable to adopt an arrangement that is symmetrical with the member P20. Arbitrariness.

＜４−８： ロボットアームへの応用例＞
図２０は、図１に示す駆動装置を手首の関節部分に用いたロボットアーム８００の側面図である。このロボットアーム８００は、アーム部８１０、手首関節部８２０、グリッパ部８３０によって構成されており、手首関節部８２０として、図１に示す駆動装置（図には、上方基板１００，中間基板２００，下方基板３００，接続部材Ｐが示されている）が用いられている。グリッパ部８３０は、一対の把持部材８３１，８３２およびベース部材８３３を有し、ベース部材８３３の内部に組み込まれている駆動機構によって、一対の把持部材８３１，８３２が駆動され、把持動作が行われる。図には、床面８５０上に置かれた物体８４０を把持する動作を行っている状態が示されている。 <4-8: Application example to robot arm>
FIG. 20 is a side view of a robot arm 800 using the driving device shown in FIG. 1 for the wrist joint. The robot arm 800 includes an arm portion 810, a wrist joint portion 820, and a gripper portion 830. As the wrist joint portion 820, the driving device shown in FIG. The substrate 300 and the connecting member P are shown). The gripper unit 830 includes a pair of gripping members 831 and 832 and a base member 833, and the pair of gripping members 831 and 832 are driven by a driving mechanism incorporated in the base member 833 to perform a gripping operation. . The figure shows a state in which an operation of gripping an object 840 placed on the floor surface 850 is performed.

ベース部材８３３は上方基板１００に固着されており、下方基板３００はアーム部８１０に固着されている。手首関節部８２０として用いられている駆動装置は、上述したとおり、下方基板３００を固定した状態において、上方基板１００をＸ軸およびＹ軸まわりに駆動することができるので、グリッパ部８３０の姿勢が、物体８４０を把持するのに適した向きになるように回転駆動させた後、把持部材８３１，８３２によって物体８４０を掴む動作を行うことができる。   The base member 833 is fixed to the upper substrate 100, and the lower substrate 300 is fixed to the arm portion 810. As described above, the driving device used as the wrist joint portion 820 can drive the upper substrate 100 around the X axis and the Y axis in a state where the lower substrate 300 is fixed. Then, after the object 840 is driven to rotate in a direction suitable for gripping the object 840, the gripping members 831 and 832 can grip the object 840.

また、物体８４０を掴んだ後、この装置の検出機能を利用すれば、物体８４０からグリッパ部８３０（上方基板１００）に加わる重力を、Ｘ軸およびＹ軸まわりのモーメントに基づいて測定することができるので、物体８４０の質量を量ることが可能になる。   Further, if the detection function of this apparatus is used after grasping the object 840, the gravity applied from the object 840 to the gripper unit 830 (upper substrate 100) can be measured based on the moment about the X axis and the Y axis. As a result, the mass of the object 840 can be measured.

５，６：切断線
１００：上方基板（上方構造体）
２００：中間基板（下方接続部）
２０１〜２０５：膜部
３００：下方基板（下方構造体）
４００：制御ユニット
４５０：制御ユニット
４８０：制御ユニット
８００：ロボットアーム
８１０：アーム部
８２０：手首関節部
８３０：グリッパ部
８３１，８３２：把持部材
８３３：ベース部材
８４０：物体
８５０：床面
Ａ：摺動軸
Ｃ１０〜Ｃ５０（容量素子からなるセンサ／静電容量値）
Ｅ１０〜Ｅ５０：固定電極
Ｆｚ：Ｚ軸方向の力
Ｇ１０〜Ｇ５０：溝
Ｈ：通気孔
Ｍｘ：Ｘ軸まわりのモーメント
Ｍｙ：Ｙ軸まわりのモーメント
Ｏ：ＸＹＺ三次元座標系の原点
Ｐ：接続部材
Ｐ１：外側筒状部
Ｐ２：内側柱状部
Ｐ３：圧力室
Ｐ４：導管
Ｐ５：ポンプ
Ｐ６：上方竿状部
Ｐ７：下方竿状部
Ｐ８：外側筒状部
Ｐ９：圧力センサ
Ｐ１０，Ｐ１０′：第１の接続部材（リニアアクチュエータ）
Ｐ２０：第２の接続部材（リニアアクチュエータ）
Ｐ３０：第３の接続部材（リニアアクチュエータ）
Ｐ４０：第４の接続部材（リニアアクチュエータ）
Ｐ５０，Ｐ５０′：第５の接続部材
Ｑ１：ハウジング
Ｑ２：球体部
Ｑ３：間隙部
Ｑ４：導出口
Ｑ１０〜Ｑ５０：転がり球面軸受（上方接続部）
Ｒ１０〜Ｒ４０：転がり球面軸受（下方接続部）
Ｘ：ＸＹＺ三次元座標系の座標軸
Ｙ：ＸＹＺ三次元座標系の座標軸
Ｚ：ＸＹＺ三次元座標系の座標軸 5, 6: Cutting line 100: Upper substrate (upper structure)
200: Intermediate substrate (lower connection part)
201-205: Film part 300: Lower substrate (lower structure)
400: Control unit 450: Control unit 480: Control unit 800: Robot arm 810: Arm part 820: Wrist joint part 830: Gripper parts 831, 832: Gripping member 833: Base member 840: Object 850: Floor A: Sliding Axis C10 to C50 (sensor consisting of capacitive element / capacitance value)
E10 to E50: Fixed electrode Fz: Force in the Z axis direction G10 to G50: Groove H: Vent hole Mx: Moment about X axis My: Moment about Y axis O: Origin of XYZ three-dimensional coordinate system P: Connection member P1 : Outer cylindrical part P2: Inner columnar part P3: Pressure chamber P4: Conduit P5: Pump P6: Upper hook part P7: Lower hook part P8: Outer pipe part P9: Pressure sensors P10, P10 ': First Connecting member (linear actuator)
P20: Second connecting member (linear actuator)
P30: Third connecting member (linear actuator)
P40: Fourth connecting member (linear actuator)
P50, P50 ': Fifth connection member Q1: Housing Q2: Sphere part Q3: Gap part Q4: Deriving port Q10 to Q50: Rolling spherical bearing (upper connection part)
R10 to R40: Rolling spherical bearing (lower connection part)
X: coordinate axis of XYZ three-dimensional coordinate system Y: coordinate axis of XYZ three-dimensional coordinate system Z: coordinate axis of XYZ three-dimensional coordinate system

Claims (22)

所定の作用体に対して所定方向に作用した力を検出する検出機能と、前記作用体を所定方向に駆動する駆動機能と、を有する装置であって、
前記作用体として機能する上方構造体と、
前記上方構造体の下方に配置された下方構造体と、
上端が前記上方構造体の下面側に第１の上方接続部を介して接続され、下端が前記下方構造体の上面側に第１の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第１の伸縮駆動機構をもった第１の接続部材と、
上端が前記上方構造体の下面側に第２の上方接続部を介して接続され、下端が前記下方構造体の上面側に第２の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第２の伸縮駆動機構をもった第２の接続部材と、
上端が前記上方構造体の下面側に第３の上方接続部を介して接続され、下端が前記下方構造体の上面側に第３の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第３の伸縮駆動機構をもった第３の接続部材と、
上端が前記上方構造体の下面側に第４の上方接続部を介して接続され、下端が前記下方構造体の上面側に第４の下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える第４の伸縮駆動機構をもった第４の接続部材と、
前記第１〜第４の接続部材の下端の前記下方構造体に対する上下方向に関する変位をそれぞれ検出する第１〜第４のセンサと、
前記第１〜第４の伸縮駆動機構に所定の電気信号を与えて前記第１〜第４の接続部材の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、前記第１〜第４のセンサの検出結果に基づいて、前記作用体に作用した力を示す電気信号を出力する検出動作と、を行う制御ユニットと、
を備え、
前記第１〜第４の上方接続部は、それぞれ前記第１〜第４の接続部材の上端付近が前記上方構造体に対して任意の方向に傾斜可能となるように、それぞれ前記第１〜第４の接続部材の上端を前記上方構造体の下面に接続する構造を有し、
前記第１〜第４の下方接続部は、それぞれ前記第１〜第４の接続部材の下端付近が前記下方構造体に対して任意の方向に傾斜可能となるように、かつ、前記下方構造体に対して上下方向に変位可能となるように、それぞれ前記第１〜第４の接続部材の下端を前記下方構造体の上面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 An apparatus having a detection function for detecting a force acting on a predetermined acting body in a predetermined direction, and a driving function for driving the working body in a predetermined direction,
An upper structure that functions as the acting body;
A lower structure disposed below the upper structure;
An upper end is connected to the lower surface side of the upper structure via a first upper connection portion, and a lower end is connected to the upper surface side of the lower structure via a first lower connection portion. A first connection member having a first telescopic drive mechanism that changes the length between the upper and lower ends based on the first connection member;
An upper end is connected to the lower surface side of the upper structure via a second upper connection portion, and a lower end is connected to the upper surface side of the lower structure via a second lower connection portion. A second connecting member having a second expansion / contraction drive mechanism for changing the length between the upper and lower ends based on;
An upper end is connected to the lower surface side of the upper structure via a third upper connection portion, and a lower end is connected to the upper surface side of the lower structure via a third lower connection portion. A third connecting member having a third expansion / contraction drive mechanism for changing the length between the upper and lower ends based on;
An upper end is connected to the lower surface side of the upper structure via a fourth upper connection portion, and a lower end is connected to the upper surface side of the lower structure via a fourth lower connection portion. A fourth connecting member having a fourth expansion / contraction drive mechanism for changing the length between the upper and lower ends based on;
First to fourth sensors for detecting displacements in the vertical direction with respect to the lower structure at the lower ends of the first to fourth connecting members;
A driving operation for adjusting a length between the upper and lower ends of the first to fourth connecting members to a desired length by giving a predetermined electrical signal to the first to fourth telescopic driving mechanisms; A control unit for performing a detection operation for outputting an electric signal indicating a force acting on the acting body based on detection results of the first to fourth sensors;
With
The first to fourth upper connecting portions are respectively arranged in the first to fourth directions so that the vicinity of the upper ends of the first to fourth connecting members can be inclined in any direction with respect to the upper structure. 4 has a structure for connecting the upper end of the connection member to the lower surface of the upper structure,
The first to fourth lower connecting portions are arranged so that the vicinity of the lower ends of the first to fourth connecting members can be inclined in any direction with respect to the lower structure, and the lower structure Drive having a force detection function, wherein the drive has a structure for connecting the lower ends of the first to fourth connection members to the upper surface of the lower structure so as to be displaceable in the vertical direction apparatus. 請求項１に記載の力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に固着された第５の接続部材を更に有し、
前記第５の上方接続部は、前記第５の接続部材の上端付近が前記上方構造体に対して任意の方向に傾斜可能となるように、前記第５の接続部材の上端を前記上方構造体の下面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 1,
A fifth connecting member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion and a lower end fixed to the upper surface side of the lower structure;
The fifth upper connecting portion is configured such that the upper end of the fifth connecting member is inclined to the upper structure so that the vicinity of the upper end of the fifth connecting member can be inclined in any direction with respect to the upper structure. A drive device having a force detection function, characterized in that the drive device has a structure connected to the lower surface of the head. 請求項２に記載の力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致し、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、を行うことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 2,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member coincides with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed Drive device having a force detecting function, wherein the X-axis detection operation to output as the detection value of a moment Mx about the X-axis acts on the forming member, to make a. 請求項１に記載の力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に第５の下方接続部を介して接続された第５の接続部材と、
前記第５の接続部材の下端の下方構造体に対する上下方向に関する変位を検出する第５のセンサと、
を更に有し、
制御ユニットは、第１〜第５のセンサの検出結果に基づいて、作用体に作用した力を示す電気信号を出力する検出動作を行い、
前記第５の上方接続部は、前記第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、前記第５の接続部材の上端を上方構造体の下面に接続する構造を有し、
前記第５の下方接続部は、前記第５の接続部材の下端付近が下方構造体に対して上下方向に変位可能となるように、前記第５の接続部材の下端を下方構造体の上面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 1,
A fifth connection member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion, and a lower end connected to the upper surface side of the lower structure via a fifth lower connection portion;
A fifth sensor for detecting a displacement in a vertical direction with respect to a lower structure at a lower end of the fifth connection member;
Further comprising
Based on the detection results of the first to fifth sensors, the control unit performs a detection operation of outputting an electrical signal indicating the force acting on the acting body,
The fifth upper connecting portion is configured such that the upper end of the fifth connecting member is inclined to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connecting member can be inclined in an arbitrary direction with respect to the upper structure. Has a structure to connect to,
The fifth lower connection portion has the lower end of the fifth connection member on the upper surface of the lower structure so that the vicinity of the lower end of the fifth connection member can be displaced vertically with respect to the lower structure. A drive device having a force detection function characterized by having a connection structure. 請求項４に記載の力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致し、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第５のセンサの検出値もしくは第１〜第５のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 4,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member coincides with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and an electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor Top with the structure fixed An X-axis rotation detection operation that is output as a detection value of a moment Mx around the X-axis that has acted on the structure, and an electrical signal based on the detection value of the fifth sensor or the sum of the detection values of the first to fifth sensors, And a Z-axis direction detecting operation for outputting a detected value of a force Fz in the Z-axis direction applied to the upper structure in a state where the lower structure is fixed. 請求項１に記載の力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に第５の下方接続部を介して接続された第５の接続部材を更に有し、
前記第５の上方接続部は、前記第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、前記第５の接続部材の上端を上方構造体の下面に接続する構造を有し、
前記第５の下方接続部は、前記第５の接続部材の下端付近が下方構造体に対して上下方向に変位可能となるように、前記第５の接続部材の下端を下方構造体の上面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 1,
A fifth connection member having an upper end connected to the lower surface side of the upper structure via a fifth upper connection portion and a lower end connected to the upper surface side of the lower structure via the fifth lower connection portion is further provided. And
The fifth upper connecting portion is configured such that the upper end of the fifth connecting member is inclined to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connecting member can be inclined in an arbitrary direction with respect to the upper structure. Has a structure to connect to,
The fifth lower connection portion has the lower end of the fifth connection member on the upper surface of the lower structure so that the vicinity of the lower end of the fifth connection member can be displaced vertically with respect to the lower structure. A drive device having a force detection function characterized by having a connection structure. 請求項６に記載の力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致し、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第１〜第４のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 6,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member coincides with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed An electric signal based on the sum of the detected values of the X-axis around the X-axis and the detected values of the first to fourth sensors output as a detected value of the moment Mx around the X-axis acting on the structure, in a state where the lower structure is fixed A drive device having a force detection function characterized by performing a Z-axis direction detection operation that outputs a detected value of a force Fz in the Z-axis direction that has acted on the upper structure. 請求項１に記載の力検出機能をもった駆動装置において、
上端が上方構造体の下面側に第５の上方接続部を介して接続され、下端が下方構造体の上面側に固着され、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構をもった第５の接続部材を更に有し、
前記第５の上方接続部は、前記第５の接続部材の上端付近が上方構造体に対して任意の方向に傾斜可能となるように、前記第５の接続部材の上端を上方構造体の下面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 1,
The upper end is connected to the lower surface side of the upper structure via the fifth upper connection portion, the lower end is fixed to the upper surface side of the lower structure, and depending on the extension force or compression force applied as an external force between the upper and lower ends A fifth connecting member having a telescopic driven mechanism for changing the length between the upper and lower ends;
The fifth upper connecting portion is configured such that the upper end of the fifth connecting member is inclined to the lower surface of the upper structure so that the vicinity of the upper end of the fifth connecting member can be inclined in an arbitrary direction with respect to the upper structure. A drive device having a force detection function, characterized in that it has a structure to be connected to. 請求項８に記載の力検出機能をもった駆動装置において、
第５の接続部材の上端付近に原点をもつＸＹＺ三次元座標系を定義したときに、第１〜第４の接続部材の上下両端間の長さが互いに等しくなるように第１〜第４の伸縮駆動機構を調整した「標準姿勢」の状態において、第１の接続部材の上下両端を通る直線はＸ軸と正領域で交差し、第２の接続部材の上下両端を通る直線はＸ軸と負領域で交差し、第３の接続部材の上下両端を通る直線はＹ軸と正領域で交差し、第４の接続部材の上下両端を通る直線はＹ軸と負領域で交差し、第５の接続部材の上下両端を通る直線はＺ軸に一致し、
制御ユニットは、第１の接続部材の上下両端間の長さと、第２の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＹ軸まわりに変化させるＹ軸まわり駆動動作と、第３の接続部材の上下両端間の長さと、第４の接続部材の上下両端間の長さと、の差を変化させることにより、下方構造体に対する上方構造体の姿勢をＸ軸まわりに変化させるＸ軸まわり駆動動作と、第１のセンサの検出値と第２のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＹ軸まわりのモーメントＭｙの検出値として出力するＹ軸まわり検出動作と、第４のセンサの検出値と第３のセンサの検出値との差を示す電気信号を、下方構造体を固定した状態において上方構造体に作用したＸ軸まわりのモーメントＭｘの検出値として出力するＸ軸まわり検出動作と、第１〜第４のセンサの検出値の総和に基づく電気信号を、下方構造体を固定した状態において上方構造体に作用したＺ軸方向の力Ｆｚの検出値として出力するＺ軸方向検出動作と、を行うことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 8,
When an XYZ three-dimensional coordinate system having an origin in the vicinity of the upper end of the fifth connecting member is defined, the lengths between the upper and lower ends of the first to fourth connecting members are equal to each other. In the “standard posture” state in which the telescopic drive mechanism is adjusted, the straight line passing through the upper and lower ends of the first connecting member intersects the X axis in the positive region, and the straight line passing through the upper and lower ends of the second connecting member is the X axis. A straight line passing through the negative region, passing through the upper and lower ends of the third connecting member intersects with the Y axis in the positive region, and a straight line passing through the upper and lower ends of the fourth connecting member intersects with the Y axis in the negative region, The straight line passing through the upper and lower ends of the connecting member coincides with the Z axis,
The control unit changes the difference between the length between the upper and lower ends of the first connection member and the length between the upper and lower ends of the second connection member, thereby changing the attitude of the upper structure relative to the lower structure to the Y axis. By changing the difference between the Y-axis driving operation that changes around, the length between the upper and lower ends of the third connecting member, and the length between the upper and lower ends of the fourth connecting member, In the state where the lower structure is fixed, an electric signal indicating the difference between the detected value of the first sensor and the detected value of the second sensor and the driving operation around the X axis that changes the posture of the structure around the X axis An electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, and the electric signal indicating the difference between the detected value of the fourth sensor and the detected value of the third sensor, as the detected value of the moment My about the Y axis acting on the upper structure Top with the structure fixed An electric signal based on the sum of the detected values of the X-axis around the X-axis and the detected values of the first to fourth sensors output as a detected value of the moment Mx around the X-axis acting on the structure, in a state where the lower structure is fixed A drive device having a force detection function characterized by performing a Z-axis direction detection operation that outputs a detected value of a force Fz in the Z-axis direction that has acted on the upper structure. 請求項１〜９のいずれかに記載の力検出機能をもった駆動装置において、
すべての上方接続部および第１〜第４の下方接続部が、転がり球面軸受を含む構造体によって構成されていることを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to any one of claims 1 to 9,
All the upper connection parts and the 1st-4th lower connection part are comprised by the structure containing a rolling spherical bearing, The drive device with the force detection function characterized by the above-mentioned. 請求項３，５，７，９のいずれかに記載の力検出機能をもった駆動装置において、
「標準姿勢」の状態では、第１の接続部材と第２の接続部材とがＹＺ平面に関して面対称をなし、第３の接続部材と第４の接続部材とがＸＺ平面に関して面対称をなすことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to any one of claims 3, 5, 7, and 9,
In the “standard posture” state, the first connecting member and the second connecting member are symmetrical with respect to the YZ plane, and the third connecting member and the fourth connecting member are symmetrical with respect to the XZ plane. A drive device with a force detection function characterized by 請求項３，５，７，９のいずれかに記載の力検出機能をもった駆動装置において、
上方構造体が平板状の上方基板からなり、下方構造体が平板状の下方基板からなり、「標準姿勢」の状態では、前記上方基板および前記下方基板の基板面が、ＸＹ平面に平行になるように構成されていることを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to any one of claims 3, 5, 7, and 9,
The upper structure is composed of a flat upper substrate, and the lower structure is composed of a flat lower substrate. In the “standard posture” state, the substrate surfaces of the upper substrate and the lower substrate are parallel to the XY plane. A drive device having a force detection function characterized by being configured as described above. 請求項１２に記載の力検出機能をもった駆動装置において、
下面の４カ所に溝が形成された中間基板が、下方基板の上面に接合されており、これら溝の底部にはそれぞれ可撓性をもった膜部が形成され、
第１〜第４の下方接続部が、前記中間基板と、前記各膜部の上面に固定された転がり球面軸受と、によって構成されており、第１〜第４の接続部材の下端が前記転がり球面軸受、前記膜部、前記溝の側壁部を介して、下方基板に接続されていることを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 12,
Intermediate substrates having grooves formed at four locations on the lower surface are joined to the upper surface of the lower substrate, and flexible film portions are formed at the bottoms of these grooves,
The 1st-4th lower connection part is comprised by the said intermediate | middle board | substrate and the rolling spherical bearing fixed to the upper surface of each said film part, and the lower end of the 1st-4th connection member is the said rolling. A drive device having a force detection function, wherein the drive device is connected to a lower substrate through a spherical bearing, the film portion, and a side wall portion of the groove. 請求項１３に記載の力検出機能をもった駆動装置において、
第１〜第４のセンサが、各膜部に形成された変位電極と、これら各変位電極に対向する下方基板の上面位置に固定された固定電極と、からなる容量素子によって構成されていることを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 13,
The 1st-4th sensor is comprised by the capacitive element which consists of the displacement electrode formed in each film | membrane part, and the fixed electrode fixed to the upper surface position of the lower board | substrate facing each these displacement electrodes. A drive device with a force detection function characterized by 請求項１４に記載の力検出機能をもった駆動装置において、
中間基板が導電性材料から構成されており、膜部自身が変位電極として機能することを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to claim 14,
A driving device having a force detection function, wherein the intermediate substrate is made of a conductive material, and the film part itself functions as a displacement electrode. 請求項１〜１５のいずれかに記載の力検出機能をもった駆動装置において、
第１〜第４の接続部材が、
外側筒状部と、その内側に嵌合した内側柱状部と、を同一の軸上に配置してなる構造部と、
与えられた電気信号に基づいて、前記内側柱状部を前記外側筒状部に対して、前記軸に沿った方向に摺動させることにより全長を所望の長さに調整し、当該長さを維持させる伸縮駆動機構と、
を有するリニアアクチュエータによって構成されていることを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to any one of claims 1 to 15,
The first to fourth connecting members are
A structure part formed by arranging the outer cylindrical part and the inner columnar part fitted inside thereof on the same axis;
Based on the given electrical signal, the total length is adjusted to a desired length by sliding the inner columnar portion with respect to the outer cylindrical portion in the direction along the axis, and the length is maintained. A telescopic drive mechanism,
A drive device having a force detection function, characterized in that the drive device has a force detection function. 請求項１６に記載の力検出機能をもった駆動装置において、
リニアアクチュエータが、外側筒状部に対して内側柱状部を機械的に固定するロック機構を有し、
制御ユニットが、検出動作を行う際には、前記ロック機構により、第１〜第４の接続部材の上下両端間の長さを一定に維持する制御を行うことを特徴とする力検出機能をもった駆動装置。 The drive device with a force detection function according to claim 16,
The linear actuator has a lock mechanism that mechanically fixes the inner columnar part to the outer cylindrical part,
When the control unit performs a detection operation, the control unit has a force detection function characterized by controlling the length between the upper and lower ends of the first to fourth connecting members to be constant by the lock mechanism. Drive device. 請求項１６に記載の力検出機能をもった駆動装置において、
リニアアクチュエータが、外側筒状部内に設けられた圧力室の圧力を制御するポンプと、前記圧力室の圧力を測定する圧力センサと、を有し、
制御ユニットが、駆動動作を行う際には、前記ポンプに所定の駆動信号を与えて内側柱状部を摺動させることにより、リニアアクチュエータの全長を所望の長さに調整し、検出動作を行う際には、前記圧力センサによる測定値が一定となるように前記ポンプに所定の駆動信号を与えてフィードバック制御を行うことを特徴とする力検出機能をもった駆動装置。 The drive device with a force detection function according to claim 16,
The linear actuator has a pump for controlling the pressure of the pressure chamber provided in the outer cylindrical portion, and a pressure sensor for measuring the pressure of the pressure chamber,
When the control unit performs a drive operation, it applies a predetermined drive signal to the pump and slides the inner columnar portion to adjust the overall length of the linear actuator to a desired length and perform a detection operation. Includes a force detection function, wherein feedback control is performed by giving a predetermined drive signal to the pump so that a measurement value by the pressure sensor is constant. 所定の作用体に対して所定方向に作用した力を検出する検出機能と、前記作用体を所定方向に駆動する駆動機能と、を有する装置であって、
前記作用体として機能する上方構造体と、
前記上方構造体の下方に配置された下方構造体と、
前記下方構造体の上方位置に前記上方構造体が、少なくとも所定の１方向に傾斜可能な状態で支持されるように、前記上方構造体と前記下方構造体とを接続する中央接続部材と、
上端が前記上方構造体の下面側に上方接続部を介して接続され、下端が前記下方構造体の上面側に下方接続部を介して接続され、与えられた電気信号に基づいて上下両端間の長さを変える伸縮駆動機構をもち、前記中央接続部材の周囲に配置された複数Ｎ本の周辺接続部材と、
前記複数Ｎ本の周辺接続部材の下端の前記下方構造体に対する上下方向に関する変位をそれぞれ検出するセンサと、
前記伸縮駆動機構に所定の電気信号を与えて前記複数Ｎ本の周辺接続部材の上下両端間の長さがそれぞれ所望の長さになるように調整する駆動動作と、前記センサの検出結果に基づいて、前記作用体に作用した力を示す電気信号を出力する検出動作と、を行う制御ユニットと、
を備え、
前記上方接続部は、前記周辺接続部材の上端付近が前記上方構造体に対して少なくとも所定の１方向に傾斜可能となるように、前記周辺接続部材の上端を前記上方構造体の下面に接続する構造を有し、
前記下方接続部は、前記周辺接続部材の下端付近が前記下方構造体に対して少なくとも所定の１方向に傾斜可能となるように、かつ、前記下方構造体に対して上下方向に変位可能となるように、前記周辺接続部材の下端を前記下方構造体の上面に接続する構造を有することを特徴とする力検出機能をもった駆動装置。 An apparatus having a detection function for detecting a force acting on a predetermined acting body in a predetermined direction, and a driving function for driving the working body in a predetermined direction,
An upper structure that functions as the acting body;
A lower structure disposed below the upper structure;
A central connecting member for connecting the upper structure and the lower structure so that the upper structure is supported at a position above the lower structure so as to be inclined in at least one predetermined direction;
The upper end is connected to the lower surface side of the upper structure via an upper connection portion, the lower end is connected to the upper surface side of the lower structure via a lower connection portion, and between the upper and lower ends based on a given electrical signal A plurality of N peripheral connection members having a telescopic drive mechanism for changing the length, and arranged around the central connection member;
Sensors for detecting displacements in the vertical direction with respect to the lower structure at the lower ends of the N peripheral connection members;
Based on a drive operation that gives a predetermined electrical signal to the telescopic drive mechanism to adjust the length between the upper and lower ends of the N peripheral connection members to a desired length, and the detection result of the sensor A control unit for performing a detection operation for outputting an electric signal indicating a force acting on the acting body,
With
The upper connection portion connects the upper end of the peripheral connection member to the lower surface of the upper structure so that the vicinity of the upper end of the peripheral connection member can be inclined at least in one predetermined direction with respect to the upper structure. Has a structure,
The lower connection portion can be displaced in the vertical direction with respect to the lower structure such that the vicinity of the lower end of the peripheral connection member can be inclined at least in one predetermined direction with respect to the lower structure. As described above, the drive device having a force detection function, characterized in that it has a structure for connecting the lower end of the peripheral connection member to the upper surface of the lower structure. 請求項１９に記載の力検出機能をもった駆動装置において、
下方構造体が平板状の下方基板からなり、その基板面に対して平行なＸＹ平面をもったＸＹＺ三次元座標系を定義したときに、中央接続部材の中心軸がＺ軸上にくるように、中央接続部材の下端が下方構造体に固着されており、中央接続部材の上端による上方構造体の支持中心点が常にＺ軸上に維持されるように構成されていることを特徴とする力検出機能をもった駆動装置。 The drive device with a force detection function according to claim 19,
When defining the XYZ three-dimensional coordinate system in which the lower structure is a flat lower substrate and has an XY plane parallel to the substrate surface, the central axis of the central connecting member is on the Z axis. The lower end of the central connection member is fixed to the lower structure, and the support center point of the upper structure by the upper end of the central connection member is always maintained on the Z axis. Drive device with detection function. 請求項２０に記載の力検出機能をもった駆動装置において、
中央接続部材が、上下両端間に外力として加えられた伸張力もしくは圧縮力に応じて上下両端間の長さを変える伸縮従動機構を有し、中央接続部材の長さの変化に応じて、中央接続部材の上端による上方構造体の支持中心点がＺ軸に沿って移動することを特徴とする力検出機能をもった駆動装置。 The drive device with a force detection function according to claim 20,
The central connecting member has an expansion / contraction driven mechanism that changes the length between the upper and lower ends according to the extension force or compression force applied as an external force between the upper and lower ends. A driving device having a force detection function, wherein a support center point of an upper structure by an upper end of a connection member moves along a Z axis. 請求項１９〜２１のいずれかに記載の力検出機能をもった駆動装置において、
中央接続部材の周囲に第１〜第４の周辺接続部材が配置されており、これら４本の周辺接続部材の上下両端間の長さが互いに等しくなるように伸縮駆動機構を調整した「標準姿勢」の状態、かつ、検出対象となる力が作用していない状態では、第１の周辺接続部材の中心軸と第２の周辺接続部材の中心軸とが第１の平面上に位置し、第３の周辺接続部材の中心軸と第４の周辺接続部材の中心軸とが前記第１の平面に直交する第２の平面上に位置し、前記第１の平面に関して第３の周辺接続部材と第４の周辺接続部材とが面対称をなし、前記第２の平面に関して第１の周辺接続部材と第２の周辺接続部材とが面対称をなすことを特徴とする力検出機能をもった駆動装置。 In the drive device with the force detection function according to any one of claims 19 to 21,
The first to fourth peripheral connecting members are arranged around the central connecting member, and the “standard posture” is adjusted by adjusting the expansion / contraction driving mechanism so that the lengths between the upper and lower ends of the four peripheral connecting members are equal to each other. ”And the state where the force to be detected is not acting, the central axis of the first peripheral connection member and the central axis of the second peripheral connection member are located on the first plane, A central axis of the third peripheral connection member and a central axis of the fourth peripheral connection member are located on a second plane orthogonal to the first plane, and the third peripheral connection member with respect to the first plane A drive having a force detection function, wherein the fourth peripheral connection member has a plane symmetry, and the first peripheral connection member and the second peripheral connection member have a plane symmetry with respect to the second plane. apparatus.
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