JP5465942B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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Description
図1を用いて、本発明の実施の形態1における第1の接続構造を説明する。本実施の形態においては、半導体チップ、または、半導体チップを搭載した配線基板を積層した半導体装置を例に、積層した半導体チップまたは配線基板の電極間の接続構造について説明する。
図8から図12を用いて、本発明の実施の形態2として、前記実施の形態1の接続構造を用いた半導体装置の製造方法について説明する。この半導体装置の仕様は、半導体チップを中間基板上に4段積層し、中間基板の裏面には、マザーボードに実装するためにはんだバンプを取り付けた構造を有するものである。
図13及び図14を用いて、本発明の実施の形態3として、前記実施の形態1の接続構造を用いた別の半導体装置の製造方法について説明する。前記実施の形態2ではSiウェハ上で一括してはんだバンプ形成を行い、ダイシングして個片の半導体チップ32となったものを使用し、この半導体チップ32の能動素子面34を上にして積層し、最後にまとめて有機基板45に接続させた。しかし、この方法に限るものではない。
図15を用いて、本発明の実施の形態4として、前記実施の形態1の接続構造を他の接続形態に用いた例について説明する。図15は、Cuポスト51を有する半導体チップ52を有機基板53に接続する方法を示した例である。
31…Siウェハ、32…半導体チップ、33…はんだバンプ、34…能動素子面(Siウェハ)、35…凹部、36…導電部材、37…はんだペースト(Sn−Inはんだ粉末とNi粒子と有機成分とを混合)、38…メタルマスク、40…電極(裏面)、41…境界線、42…熱圧着装置のステージ、43…モールド樹脂、44…積層接続した半導体チップ、45…有機基板、46…電極、47…はんだボール(外部端子用)、48…半導体装置、49…アンダーフィル樹脂、50…半導体装置、51…Cuポスト、52…半導体チップ、53…有機基板、54…電極、55…はんだペースト(Sn−Biはんだ粉末とNi粒子と有機成分とを混合)、56…接続構造体、61…基板、62…半導体チップ、63…半導体パッケージ、64…スルーホール電極、65…接続構造、66…モールド樹脂、67…はんだボール。
Claims (12)
- Cuから成る基板電極を有する配線基板と、
Cuから成るチップ電極を有し、前記チップ電極と前記基板電極の間に供給されたSn−Inはんだ粉末とNi粒子を混ぜたはんだペーストを加熱することで、その内部にSn−Cu−Ni化合物を析出させたはんだ層を介して前記配線基板上に搭載された半導体チップと、を含む、半導体装置。 - 前記Sn−Cu−Ni化合物は、前記半導体チップの前記チップ電極あるいは前記配線基板の前記基板電極のどちらか一方と接触する請求項1記載の半導体装置。
- 前記Sn−Cu−Ni化合物は、前記半導体チップの前記チップ電極および前記配線基板の前記基板電極の両方と接触する請求項1記載の半導体装置。
- 以下の工程を含む半導体装置の製造方法:
(a)Cuから成るチップ電極を有する半導体チップと、Cuから成る基板電極を有する配線基板を準備する工程;
(b)Sn−Inはんだ粉末とNi粒子を混ぜたはんだペーストを、前記半導体チップの前記チップ電極と前記配線基板の前記基板電極の間に供給する工程;
(c)前記はんだペーストを加熱することで、その内部にSn−Cu−Ni化合物を析出させたはんだ層を形成する工程。 - 前記Sn−Cu−Ni化合物は、前記半導体チップの前記チップ電極あるいは前記配線基板の前記基板電極のどちらか一方と接触する請求項4記載の半導体装置の製造方法。
- 前記Sn−Cu−Ni化合物は、前記半導体チップの前記チップ電極および前記配線基板の前記基板電極の両方と接触する請求項4記載の半導体装置の製造方法。
- Cuから成る第1チップ電極を有する第1半導体チップと、
Cuから成る第2チップ電極を有し、前記第1チップ電極と前記第2チップ電極の間に供給されたSn−Inはんだ粉末とNi粒子を混ぜたはんだペーストを加熱することで、その内部にSn−Cu−Ni化合物を析出させたはんだ層を介して前記第1半導体チップ上に搭載された第2半導体チップと、を含む、半導体装置。 - 前記Sn−Cu−Ni化合物は、前記第1半導体チップの前記第1チップ電極あるいは前記第2半導体チップの前記第2チップ電極のどちらか一方と接触する請求項7記載の半導体装置。
- 前記Sn−Cu−Ni化合物は、前記第1半導体チップの前記第1チップ電極および前記第2半導体チップの前記第2チップ電極の両方と接触する請求項7記載の半導体装置。
- 以下の工程を含む半導体装置の製造方法:
(a)Cuから成る第1チップ電極を有する第1半導体チップと、Cuから成る第2チップ電極を有する第2半導体チップを準備する工程;
(b)Sn−Inはんだ粉末とNi粒子を混ぜたはんだペーストを、前記第1半導体チップの前記第1チップ電極と前記第2半導体チップの前記第2チップ電極の間に供給する工程;
(c)前記はんだペーストを加熱することで、その内部にSn−Cu−Ni化合物を析出させたはんだ層を形成する工程。 - 前記Sn−Cu−Ni化合物は、前記第1半導体チップの前記第1チップ電極あるいは前記第2半導体チップの前記第2チップ電極のどちらか一方と接触する請求項10記載の半導体装置の製造方法。
- 前記Sn−Cu−Ni化合物は、前記第1半導体チップの前記第1チップ電極および前記第2半導体チップの前記第2チップ電極の両方と接触する請求項10記載の半導体装置の製造方法。
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