JP5424472B2 - Torque sensor - Google Patents
Torque sensor Download PDFInfo
- Publication number
- JP5424472B2 JP5424472B2 JP2009161520A JP2009161520A JP5424472B2 JP 5424472 B2 JP5424472 B2 JP 5424472B2 JP 2009161520 A JP2009161520 A JP 2009161520A JP 2009161520 A JP2009161520 A JP 2009161520A JP 5424472 B2 JP5424472 B2 JP 5424472B2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- detection
- slit
- compensation
- torsion bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims description 185
- 238000005259 measurement Methods 0.000 claims description 18
- 238000004804 winding Methods 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 6
- 230000004907 flux Effects 0.000 description 49
- 230000007423 decrease Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Power Steering Mechanism (AREA)
Description
本発明は、トーションバーの捻れ角を検出することによりトルクを計測するトルクセンサに関するものである。 The present invention relates to a torque sensor that measures torque by detecting a twist angle of a torsion bar.
トーションバーの捻れ角を検出することによりトルクを計測するトルクセンサとしては、トーションバーの捻れ量に応じて開口面積が変化する窓を通過させた磁束の位相変化より、トーションバーに加わるトルクを検出するトルクセンサが知られている（特許文献１）。 Torque sensor that measures torque by detecting torsion angle of torsion bar detects torque applied to torsion bar from phase change of magnetic flux passed through window whose opening area changes according to torsion amount of torsion bar A torque sensor is known (Patent Document 1).
前述したトーションバーの捻れ量に応じて開口面積が変化する窓を通過させた磁束の位相変化よりトルクを検出するトルクセンサにおいては、ノイズ等の外乱による影響によって測定精度が劣化することがある。
そこで、本発明は、トーションバーの捻れ量に応じて開口面積が変化する窓を通過させた磁束の位相変化よりトルクを検出するトルクセンサにおいて、その測定精度を向上することを課題とする。
In the torque sensor that detects torque from the phase change of the magnetic flux that has passed through the window whose opening area changes according to the torsion amount of the torsion bar described above, the measurement accuracy may deteriorate due to the influence of disturbance such as noise.
Therefore, an object of the present invention is to improve the measurement accuracy of a torque sensor that detects torque based on a phase change of magnetic flux that has passed through a window whose opening area changes according to the amount of twist of a torsion bar.
前記課題達成のために、本発明は、トーションバーと、前記トーションバーの一端に固定された、前記トーションバーと同軸状に配置された、非磁性導電体で形成した第１円筒と、前記トーションバーの他端に固定された、前記第１円筒に挿入された形態で、前記トーションバーと同軸状に配置された、非磁性導電体で形成した第２円筒と、測定部とを有し、前記第１円筒と前記第２円筒とのうちの一方には基準スリットが設けられており、前記第１円筒と前記第２円筒とのうちの前記基準スリットが設けられていない方には、軸方向の位置を異ならせて配置した第１検出用スリットと第２検出用スリットとが設けられたトルクセンサを提供する。ここで、前記測定部は、前記第２円筒の内周側と前記第１円筒の外周側とのうちの一方側に、前記トーションバーの回転軸と同軸状に、軸方向の位置を異ならせて配置した第１駆動コイルと第２駆動コイルと、前記第２円筒の内周側と前記第１円筒の外周側とのうちの前記駆動コイルが配置されていない方側に、前記トーションバーの回転軸と同軸状に、軸方向の位置を異ならせて配置した第１検出コイルと第２検出コイルと第１補償コイルと第２補償コイルと、前記駆動コイルを交流駆動する駆動回路と、計測回路とを備えたものである。また、前記第１検出用スリットと前記第２検出用スリットとは、前記トーションバーの捩れに応じた量、前記基準スリットとの前記トーションバーの径方向に見た重なりの量が変化すると共に、前記トーションバーの捩れに応じた前記基準スリットとの前記重なりの量の変化量が、前記第１検出用スリットと前記第２検出用スリットとで相互に異なる量となるように配置されており、前記第１検出コイルと第１補償コイルとは直列接続されており、前記第２検出コイルと第２補償コイルとは直列接続されており、前記第１検出コイルと第１補償コイルとの巻き線の巻き方向は逆方向であり、前記第２検出コイルと前記第２補償コイルとの巻き線の巻き方向は逆方向であり、前記第１駆動コイルと前記第１検出コイルとは軸方向位置が前記第１検出用スリットと少なくとも一部重なるように配置され、前記第２駆動コイルと前記第２検出コイルとは軸方向位置が前記第２検出用スリットと少なくとも一部重なるように配置され、前記第１補償コイルと前記第２補償コイルとは、軸方向位置が、前記第１検出用スリット及び前記第２検出用スリットと重ならないように配置されており、前記計測回路は、前記直列接続された第１検出コイルと第１補償コイルの両端に誘起された電圧信号と、前記直列接続された第２検出コイルと第２補償コイルの両端に誘起された電圧信号の位相差を検出するものである。 To achieve the above object, the present invention provides a torsion bar, a first cylinder fixed to one end of the torsion bar, arranged coaxially with the torsion bar, and formed of a nonmagnetic conductor, and the torsion bar. A second cylinder formed of a non-magnetic conductor disposed coaxially with the torsion bar in a form inserted into the first cylinder, fixed to the other end of the bar, and a measuring unit; One of the first cylinder and the second cylinder is provided with a reference slit, and one of the first cylinder and the second cylinder that is not provided with the reference slit has a shaft. Provided is a torque sensor provided with a first detection slit and a second detection slit arranged in different directions. Here, the measurement unit has an axial position different from one of the inner peripheral side of the second cylinder and the outer peripheral side of the first cylinder so as to be coaxial with the rotation axis of the torsion bar. Of the torsion bar on the side where the drive coil is not disposed, of the first drive coil and the second drive coil arranged on the inner side and the outer circumference side of the second cylinder. A first detection coil, a second detection coil, a first compensation coil, a second compensation coil, and a drive circuit for AC driving the drive coil, which are arranged coaxially with the rotation axis and having different axial positions, and measurement And a circuit. Further, the first detection slit and the second detection slit change in an amount corresponding to the twist of the torsion bar, and an amount of overlap with the reference slit as viewed in the radial direction of the torsion bar, The amount of change in the amount of overlap with the reference slit according to the twist of the torsion bar is arranged such that the first detection slit and the second detection slit are different from each other. The first detection coil and the first compensation coil are connected in series, the second detection coil and the second compensation coil are connected in series, and the winding of the first detection coil and the first compensation coil The winding direction of the second detection coil and the second compensation coil is reverse, and the first drive coil and the first detection coil are axially positioned. The first The second drive coil and the second detection coil are disposed so as to at least partially overlap with the exit slit, and the axial position of the second drive coil and the second detection coil is disposed at least partially overlap with the second compensation coil. The coil and the second compensation coil are arranged so that their axial positions do not overlap the first detection slit and the second detection slit, and the measurement circuit is connected to the first connected in series. The voltage signal induced at both ends of the detection coil and the first compensation coil and the phase difference between the voltage signal induced at both ends of the second detection coil and the second compensation coil connected in series are detected.
このようなトルクセンサによれば、ノイズ等の外乱によって前記第１検出コイルに誘起する信号成分は、当該外乱によって前記第１補償コイルに誘起する信号によって打ち消され、ノイズ等の外乱によって前記第２検出コイルに誘起する信号成分は、当該外乱によって前記第２補償コイルに誘起する信号によって打ち消される。よって、外乱による影響を抑制し測定精度を向上することができるようになる。 According to such a torque sensor, a signal component induced in the first detection coil due to disturbance such as noise is canceled out by a signal induced in the first compensation coil due to the disturbance, and the second component due to disturbance such as noise. The signal component induced in the detection coil is canceled by the signal induced in the second compensation coil due to the disturbance. Therefore, the influence of disturbance can be suppressed and the measurement accuracy can be improved.
ここで、このようなトルクセンサは、前記第１検出コイルと前記第２検出コイルとは、軸方向に見て、隣接して配置されており、前記第１補償コイルは、軸方向に見て、当該第１補償コイルと前記第１検出コイルとの間に前記第２検出コイルが位置するように配置され、前記第２補償コイルは、軸方向に見て、当該第２補償コイルと前記第２検出コイルとの間に前記第１検出コイルが位置するように配置されているように構成することが好ましい。 Here, in such a torque sensor, the first detection coil and the second detection coil are arranged adjacent to each other when viewed in the axial direction, and the first compensation coil is viewed in the axial direction. The second detection coil is disposed between the first compensation coil and the first detection coil, and the second compensation coil, when viewed in the axial direction, It is preferable that the first detection coil is disposed between the two detection coils.
このようにすることにより、前記第１駆動コイルから前記第２検出コイルに到達する磁束成分によって、前記第２検出コイルに誘起される信号成分である混信成分も、前記第１駆動コイルから前記第２補償コイルに到達する磁束成分によって前記第２補償コイルに誘起される信号成分によって、ほぼ相殺することができる。また、同様に、前記第２駆動コイルから前記第１検出コイルに到達する磁束成分によって、前記第１検出コイルに誘起される信号成分である混信成分も、前記第２駆動コイルから前記第１補償コイルに到達する磁束成分によって前記第１補償コイルに誘起される信号成分によって、ほぼ相殺することができる。よって、磁束成分の混信によって測定精度が劣化することを抑制し、その測定精度を向上することができる。 By doing so, an interference component, which is a signal component induced in the second detection coil by a magnetic flux component reaching the second detection coil from the first drive coil, is also generated from the first drive coil. The signal component induced in the second compensation coil by the magnetic flux component reaching the second compensation coil can be substantially canceled out. Similarly, an interference component, which is a signal component induced in the first detection coil by a magnetic flux component reaching the first detection coil from the second drive coil, is also generated from the second drive coil by the first compensation. The signal component induced in the first compensation coil by the magnetic flux component reaching the coil can be almost canceled out. Therefore, it can suppress that a measurement precision deteriorates by the interference of a magnetic flux component, and can improve the measurement precision.
なお、以上のトルクセンサにおいて、前記基準スリットは、軸方向位置を異ならせて配置した、前記第１検出用スリットと軸方向位置が少なくとも一部重なる第１基準スリットと、前記第２検出用スリットと軸方向位置が少なくとも一部重なる第２基準スリットとより構成するようにしてもよい。 In the torque sensor described above, the reference slit is arranged with a different axial position, the first reference slit at least partially overlapping the first detection slit, and the second detection slit. And a second reference slit at least partially overlapping in the axial direction.
以上のように、本発明によれば、トーションバーの捻れ量に応じて開口面積が変化する窓を通過させた磁束の位相変化よりトルクを検出するトルクセンサにおいて、その測定精度を向上することができる。 As described above, according to the present invention, it is possible to improve the measurement accuracy of a torque sensor that detects torque based on the phase change of magnetic flux that has passed through a window whose opening area changes according to the twist amount of the torsion bar. it can.
以下、本発明の実施形態について説明する。
まず、第１の実施形態について説明する。
図１に、本実施形態に係るトルクセンサの構成を示す。
ここで、図１ａはトルクセンサの正面を、図１ｂはトルクセンサの左側面を、図１ｃはトルクセンサの右側面を、図１ｄはトルクセンサの断面を、それぞれ模式的に表している。
図示するように、本トルクセンサは、測定対象のトルクが入力側（図１ａ、ｄにおける右方）端と出力側（図１ａ、ｄにおける左方）端との間の捻れ方向の力として加えられるトーションバー１０と、トーションバー１０に当該トーションバー１０の入力側で固定された入力側筒２１と、トーションバー１０に当該トーションバー１０の出力側で固定された出力側筒２２と、第１駆動コイル３１と、第２駆動コイル３２と、第１検出コイル４１と、第２検出コイル４２と、測定回路５０と、第１補償コイル４１０と、第２補償コイル４２０を有している。
Hereinafter, embodiments of the present invention will be described.
First, the first embodiment will be described.
FIG. 1 shows a configuration of a torque sensor according to the present embodiment.
Here, FIG. 1a schematically shows a front surface of the torque sensor, FIG. 1b schematically shows a left side surface of the torque sensor, FIG. 1c schematically shows a right side surface of the torque sensor, and FIG. 1d schematically shows a cross section of the torque sensor.
As shown in the figure, in the present torque sensor, the torque to be measured is applied as a force in the twisting direction between the input side (right side in FIGS. 1a and d) and the output side (left side in FIGS. 1a and d). A torsion bar 10, an input side cylinder 21 fixed to the torsion bar 10 on the input side of the torsion bar 10, an output side cylinder 22 fixed to the torsion bar 10 on the output side of the torsion bar 10, and a first The drive coil 31, the second drive coil 32, the first detection coil 41, the second detection coil 42, the measurement circuit 50, the first compensation coil 410, and the second compensation coil 420 are provided.
ここで、第１駆動コイル３１と第２駆動コイル３２とは直列に接続され、第１検出コイル４１と第１補償コイル４１０とは直列に接続され、第２検出コイル４２と第２補償コイル４２０とは直列に接続されている。
そして、図１ｄに示すように、第１駆動コイル３１と第２駆動コイル３２とは、巻き方向（したがって発生磁束の方向）が、相互に逆向きとなっている。また、第１検出コイル４１と第１補償コイル４１０とは、巻き方向が相互に逆向きとなっており、第２検出コイル４２と第２補償コイル４２０とは、巻き方向が相互に逆向きとなっている。
Here, the first drive coil 31 and the second drive coil 32 are connected in series, the first detection coil 41 and the first compensation coil 410 are connected in series, and the second detection coil 42 and the second compensation coil 420 are connected. Are connected in series.
As shown in FIG. 1d, the first drive coil 31 and the second drive coil 32 have their winding directions (and hence the direction of the generated magnetic flux) opposite to each other. Further, the winding direction of the first detection coil 41 and the first compensation coil 410 is opposite to each other, and the winding direction of the second detection coil 42 and the second compensation coil 420 is opposite to each other. It has become.
ここで、出力側筒２２は、非磁性導電体を用いて形成されており、トーションバー１０の入力側の底面が開放された円筒形状を有する。そして、トーションバー１０の出力側の底面の中心部分で、トーションバー１０の出力側に固定されている。
次に、入力側筒２１は、非磁性導電体を用いて形成されており、同軸入れ子状に間隔をあけて配置された二つの両底面の無い中空の円筒形状部である内筒部と外筒部をトーションバー１０の出力側端で連結した形状を有する。そして、入力側筒２１の内側の円筒形状部である内筒部がトーションバー１０の入力側に固定されている。また、入力側筒２１は、出力側筒２２の内側に、出力側筒２２と同軸入れ子状に配置されるように設けられている。
Here, the output side cylinder 22 is formed using a nonmagnetic conductor, and has a cylindrical shape in which the bottom surface on the input side of the torsion bar 10 is opened. And it is fixed to the output side of the torsion bar 10 at the center of the bottom surface on the output side of the torsion bar 10.
Next, the input side cylinder 21 is formed by using a nonmagnetic conductor, and is arranged in a coaxially nested manner with two inner bottom portions having no bottom surfaces and an inner cylindrical portion and an outer cylindrical portion. It has a shape in which the cylindrical portion is connected at the output side end of the torsion bar 10. An inner cylinder portion that is a cylindrical portion inside the input side cylinder 21 is fixed to the input side of the torsion bar 10. Further, the input side tube 21 is provided inside the output side tube 22 so as to be arranged coaxially with the output side tube 22.
そして、第１検出コイル４１と第２検出コイル４２と第１補償コイル４１０と第２補償コイル４２０は、出力側筒２２の周りに、トーションバー１０の回転軸と同軸状に巻き回した形態で、軸方向に、第２補償コイル４２０、第１検出コイル４１、第２検出コイル４２、第１補償コイル４１０の順序で並べて設けられている。 The first detection coil 41, the second detection coil 42, the first compensation coil 410, and the second compensation coil 420 are wound around the output side tube 22 coaxially with the rotation shaft of the torsion bar 10. In the axial direction, the second compensation coil 420, the first detection coil 41, the second detection coil 42, and the first compensation coil 410 are arranged in this order.
また、第１駆動コイル３１は、入力側筒２１の内筒部と外筒部の間に、トーションバー１０の回転軸と同軸状に巻き回した形態で、第１検出コイル４１に、入力側筒２１の外筒部と出力側筒２２の側壁を介して対面するように配置され、第２駆動コイル３２は、入力側筒２１の内筒部と外筒部の間に、トーションバー１０の回転軸と同軸状に巻き回した形態で、第２検出コイル４２に、入力側筒２１の外筒部と出力側筒２２の側壁を介して対面するように配置されている。 Further, the first drive coil 31 is wound around the first detection coil 41 in the form of being wound around the rotation axis of the torsion bar 10 between the inner cylinder portion and the outer cylinder portion of the input side cylinder 21. It arrange | positions so that the outer cylinder part of the pipe | tube 21 may face through the side wall of the output side cylinder 22, and the 2nd drive coil 32 is between the inner cylinder part and the outer cylinder part of the input side cylinder 21, and In the form of being wound coaxially with the rotation shaft, the second detection coil 42 is disposed so as to face the outer cylinder portion of the input side cylinder 21 and the side wall of the output side cylinder 22.
なお、第１駆動コイル３１と第２駆動コイル３２は、トルクセンサの全体すなわち静止系に対して固定的に設けてもよいし、入力側筒２１と共に回転するように入力側筒２１に対して固定して設けるようにしてもよい。また、第１検出コイル４１と第２検出コイル４２と第１補償コイル４１０と第２補償コイル４２０も、静止系に対して固定的に設けてもよいし、出力側筒２２と共に回転するように出力側筒２２に対して固定して設けるようにしてもよい。 The first drive coil 31 and the second drive coil 32 may be fixedly provided with respect to the entire torque sensor, that is, the stationary system, or with respect to the input side tube 21 so as to rotate together with the input side tube 21. You may make it provide fixed. In addition, the first detection coil 41, the second detection coil 42, the first compensation coil 410, and the second compensation coil 420 may be fixedly provided with respect to the stationary system, or may rotate with the output side tube 22. You may make it provide fixed with respect to the output side cylinder 22. FIG.
さて、出力側筒２２の側壁と入力側筒２１の外筒部との、第１駆動コイル３１が、第１検出コイル４１と対面する箇所と、第２駆動コイル３２が、第２検出コイル４２と対面する箇所とには、各々複数のスリットが設けられている。
すなわち、図２ａに示すように、出力側筒２２の側壁には、複数の周方向に並んだスリットである基準スリット６１が設けられている。
また、図２ｂに示すように入力側筒２１の外筒部の、第１駆動コイル３１が第１検出コイル４１と対面する部分には周方向に並んだスリットである第１検出用スリット６２が、第２駆動コイル３２が第２検出コイル４２と対面する部分には周方向に並んだスリットである第２検出用スリット６３が設けられている。
Now, the location where the first drive coil 31 faces the first detection coil 41 and the second drive coil 32 between the side wall of the output side cylinder 22 and the outer cylinder part of the input side cylinder 21 are the second detection coil 42. A plurality of slits are respectively provided at locations facing each other.
That is, as shown in FIG. 2 a, a plurality of reference slits 61 that are slits arranged in the circumferential direction are provided on the side wall of the output side tube 22.
Further, as shown in FIG. 2 b, a first detection slit 62, which is a slit arranged in the circumferential direction, is provided at a portion of the outer cylinder portion of the input side cylinder 21 where the first drive coil 31 faces the first detection coil 41. In the portion where the second drive coil 32 faces the second detection coil 42, a second detection slit 63 which is a slit arranged in the circumferential direction is provided.
そして、図２ｃに示すように、トルクセンサにおいて、基準スリット６１と第１検出用スリット６２、基準スリット６１と第２検出用スリット６３は軸方向位置が少なくとも一部重なり合うように配置されている。また、入力側から出力側を見て時計廻りに進む方向を前方向とし、反時計廻りに進む方向を後方向として、トーションバー１０に捻れが生じていない状態では、図２ｄ１に示すように、径方向に見て基準スリット６１の後側半分が第１検出用スリット６２の前側半分と重なり、基準スリット６１の前側半分が第２検出用スリット６３の後側半分と重なるように、基準スリット６１と第１検出用スリット６２と第２検出用スリット６３の配置の位相は各々設定されている。 As shown in FIG. 2c, in the torque sensor, the reference slit 61 and the first detection slit 62, and the reference slit 61 and the second detection slit 63 are arranged so that the axial positions at least partially overlap. Further, in a state in which the torsion bar 10 is not twisted with the direction proceeding clockwise from the input side as viewed from the output side as the forward direction and the direction proceeding counterclockwise as the rear direction, as shown in FIG. The reference slit 61 is arranged such that the rear half of the reference slit 61 overlaps the front half of the first detection slit 62 and the front half of the reference slit 61 overlaps the rear half of the second detection slit 63 when viewed in the radial direction. The phase of the arrangement of the first detection slit 62 and the second detection slit 63 is set respectively.
ここで、図２ｄ２は、トーションバー１０に捻れが生じていない状態において、第１駆動コイル３１と第２駆動コイル３２側から、第１検出用スリット６２と第２検出用スリット６３を介して出力側筒２２方向を見たようすを表しており、図示するように、この状態において、基準スリット６１と第１検出用スリット６２との重なりの量（面積）と、基準スリット６１と第２検出用スリット６３との重なりの量は等しい。 Here, FIG. 2d2 shows an output from the first drive coil 31 and the second drive coil 32 side through the first detection slit 62 and the second detection slit 63 when the torsion bar 10 is not twisted. In this state, as shown in the figure, the overlapping amount (area) of the reference slit 61 and the first detection slit 62, and the reference slit 61 and the second detection slit are shown. The amount of overlap with the slit 63 is equal.
一方、トーションバー１０の捻れが発生すると、基準スリット６１と第１検出用スリット６２との重なりの量と、基準スリット６１と第２検出用スリット６３との重なりの量は、大小方向について逆方向に変化する。すなわち、たとえば、トーションバー１０に、図２ｃに矢印で示すような捻れが生じると、図２ｅ１に示すように基準スリット６１と第１検出用スリット６２との重なりの量は増加し、基準スリット６１と第２検出用スリット６３との重なりの量は減少し、この状態において駆動コイル３１側から、第１検出用スリット６２と第２検出用スリット６３を介して出力側筒２２方向を見たようすは図２ｅ２のようになる。 On the other hand, when the torsion bar 10 is twisted, the amount of overlap between the reference slit 61 and the first detection slit 62 and the amount of overlap between the reference slit 61 and the second detection slit 63 are opposite in the magnitude direction. To change. That is, for example, when the torsion bar 10 is twisted as shown by an arrow in FIG. 2c, the amount of overlap between the reference slit 61 and the first detection slit 62 increases as shown in FIG. In this state, the amount of overlap between the first detection slit 62 and the second detection slit 63 is viewed from the drive coil 31 side. Is as shown in FIG. 2e2.
そして、このような、基準スリット６１と第１検出用スリット６２との重なりの量と、基準スリット６１と第２検出用スリット６３との重なりの量との、相互に逆方向の変化に伴って、直列接続した第１駆動コイル３１と第２駆動コイル３２とを交流信号で駆動したときに、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相には、異なる変化が表れる。結果、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相には、トーションバー１０の捻れ量に応じて異なる変化が表れることになる。 With such a change in the opposite direction between the amount of overlap between the reference slit 61 and the first detection slit 62 and the amount of overlap between the reference slit 61 and the second detection slit 63. When the first drive coil 31 and the second drive coil 32 connected in series are driven with an AC signal, different changes appear in the phases of the signals induced in the first detection coil 41 and the second detection coil 42. . As a result, different changes appear in the phases of the signals induced in the first detection coil 41 and the second detection coil 42 in accordance with the twist amount of the torsion bar 10.
ここで、基準スリット６１と第１検出用スリット６２との重なりの量、基準スリット６１と第２検出用スリット６３との重なりの量との、相互に逆方向の変化に伴って、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相に異なる変化が表れるのは、次の原理によるものと推定される。 Here, as the amount of overlap between the reference slit 61 and the first detection slit 62 and the amount of overlap between the reference slit 61 and the second detection slit 63 change in opposite directions, the first detection is performed. It is estimated that different changes appear in the phases of the signals induced in the coil 41 and the second detection coil 42 due to the following principle.
すなわち、直列接続した第１駆動コイル３１と第２駆動コイル３２とを交流信号で駆動したときに、第１検出コイル４１、第２検出コイル４２に信号を誘起する信号磁束の成分のうち、出力側２２筒の基準スリット６１と、入力側筒２１の第１検出用スリット６２または第２検出用スリット６３の双方を通過し出力側筒２２と入力側筒２１の双方を透過しなかった磁束成分を第１磁束成分、出力側筒２２のみを透過した磁束成分を第２磁束成分、入力側筒２１のみを透過した磁束成分を第３磁束成分、入力側筒２１と出力側筒２２の双方を透過した磁束成分を第４磁束成分とする。ここで、以上の第１検出コイル４１、第２検出コイル４２に到達する第２磁束成分は出力側筒２２の透過による位相変化を受けた磁束成分となり、第３磁束成分は入力側筒２１の透過による位相変化を受けた磁束成分となり、第４磁束成分は入力側筒２１の透過と出力側筒２２の透過による位相変化を受けた磁束成分となる。 That is, when the first drive coil 31 and the second drive coil 32 connected in series are driven with an alternating current signal, the output of the signal magnetic flux components that induce signals in the first detection coil 41 and the second detection coil 42 is output. Magnetic flux component that has passed through both the reference slit 61 of the side 22 cylinder and the first detection slit 62 or the second detection slit 63 of the input side cylinder 21 and has not passed through both the output side cylinder 22 and the input side cylinder 21 The first magnetic flux component, the magnetic flux component transmitted only through the output side cylinder 22 is the second magnetic flux component, the magnetic flux component transmitted only through the input side cylinder 21 is the third magnetic flux component, and both the input side cylinder 21 and the output side cylinder 22 are transmitted. Let the transmitted magnetic flux component be the fourth magnetic flux component. Here, the second magnetic flux component that reaches the first detection coil 41 and the second detection coil 42 is a magnetic flux component that has undergone a phase change due to transmission through the output side tube 22, and the third magnetic flux component is that of the input side tube 21. The fourth magnetic flux component is a magnetic flux component that has undergone a phase change due to the transmission of the input side cylinder 21 and the transmission of the output side cylinder 22.
そして、図２ｅ１に示すように基準スリット６１と第１検出用スリット６２との重なりの量が増加すると、第１検出コイル４１に到達する第１磁束成分の強度は増加し、第２磁束成分と第３磁束成分の強度は減少し、第４磁束成分の強度は増加する。一方、図２ｅ１に示すように、基準スリット６１と第２検出用スリット６３との重なりの量が減少すると、第２検出コイル４２に到達する第１磁束成分の強度は減少し、第２磁束成分と第３磁束成分の強度は増加し、第４磁束成分の強度は減少する。すなわち、トーションバー１０の捻れ量に応じて、第１検出コイル４１、第２検出コイル４２に到達する各磁束成分の強度は逆方向に変化する。 Then, as shown in FIG. 2e1, when the amount of overlap between the reference slit 61 and the first detection slit 62 increases, the intensity of the first magnetic flux component reaching the first detection coil 41 increases, and the second magnetic flux component and The intensity of the third magnetic flux component decreases and the intensity of the fourth magnetic flux component increases. On the other hand, as shown in FIG. 2e1, when the amount of overlap between the reference slit 61 and the second detection slit 63 decreases, the intensity of the first magnetic flux component reaching the second detection coil 42 decreases, and the second magnetic flux component And the intensity of the third magnetic flux component increases and the intensity of the fourth magnetic flux component decreases. That is, according to the twist amount of the torsion bar 10, the intensity | strength of each magnetic flux component which reaches | attains the 1st detection coil 41 and the 2nd detection coil 42 changes to a reverse direction.
一方、第１検出コイル４１、第２検出コイル４２に誘起される信号は、各磁束成分の合成ベクトルを表すものとなり、この合成ベクトルの位相は、各位相の磁束成分の強度比によって変化する。よって、第１検出コイル４１に誘起される信号の位相には基準スリット６１と第１検出用スリット６２との重なりの量の変化に応じた変化が、第２検出コイル４２に誘起される信号の位相には基準スリット６１と第２検出用スリット６３との重なりの量の変化に応じた変化が表れ、結果、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相には、トーションバー１０の捻れ量に応じて異なる変化が表れることになる。ここで、図３は、1.8mm幅のスリットを設けた2mm厚のアルミニウム板を２枚重ね、スリットの重なり量を変化させながら、10kHzの駆動信号で２枚重ねたアルミニウム板の一方側に設けた駆動コイルを駆動して磁束を印加したときに、２枚重ねたアルミニウム板の他方側に設けた検出コイルに誘起された信号の駆動信号に対する位相を測定した結果３０１を表したものである。図より、スリットの重なり量の変化に応じた位相変化が検出信号に表れることが分かる。なお、図中３０２は、以上の原理に基づいた計算値を表している。 On the other hand, the signal induced in the first detection coil 41 and the second detection coil 42 represents a combined vector of each magnetic flux component, and the phase of this combined vector changes depending on the intensity ratio of the magnetic flux component of each phase. Therefore, the phase of the signal induced in the first detection coil 41 changes according to the change in the amount of overlap between the reference slit 61 and the first detection slit 62 and the signal induced in the second detection coil 42 In the phase, a change corresponding to a change in the amount of overlap between the reference slit 61 and the second detection slit 63 appears. As a result, the phase of the signal induced in the first detection coil 41 and the second detection coil 42 is Different changes appear depending on the twisting amount of the torsion bar 10. Here, Fig. 3 shows two 2mm thick aluminum plates with 1.8mm width slits, and is provided on one side of the two aluminum plates with 10kHz drive signal while changing the slit overlap amount. The result 301 which measured the phase with respect to the drive signal of the signal induced in the detection coil provided in the other side of the aluminum plate which piled up two when the drive coil which drive was applied and magnetic flux was applied is represented. From the figure, it can be seen that a phase change corresponding to a change in the amount of overlap of the slits appears in the detection signal. In the figure, reference numeral 302 represents a calculated value based on the above principle.
さて、このように、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相には、トーションバー１０の捻れ量に応じて異なる変化が表れるので、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相差を測定すれば、トーションバー１０の捻れ量を測定することができ、この捻れ量より、トーションバー１０に加えられたトルクを算定することができる。 As described above, since the phase of the signal induced in the first detection coil 41 and the second detection coil 42 varies depending on the twisting amount of the torsion bar 10, the first detection coil 41 and the second detection coil 41 If the phase difference of the signal induced in the detection coil 42 is measured, the twist amount of the torsion bar 10 can be measured, and the torque applied to the torsion bar 10 can be calculated from the twist amount.
ここで、このような直列接続した第１駆動コイル３１と第２駆動コイル３２の駆動と、第１検出コイル４１、第２検出コイル４２に誘起される信号の位相差の測定を行うのが測定回路５０である。
すなわち、図４ａに示すように、測定回路５０は、発振回路５１と、第１差動増幅器５２と、第２差動増幅器５３と、位相差検出回路５４とを有している。そして、発振回路５１は、交流の駆動信号を生成して、直列に接続された第１駆動コイル３１と第２駆動コイル３２に印加して一次磁束を発生し、第１差動増幅器５２は、直列接続された第１検出コイル４１と第１補償コイル４１０の両端に誘起起電力によって生じる検出信号を増幅し、第２差動増幅器５３は、直列接続された第２検出コイル４２と第２補償コイル４２０の両端に誘起起電力によって生じる検出信号を増幅する。
Here, the measurement is performed by driving the first drive coil 31 and the second drive coil 32 connected in series, and measuring the phase difference of signals induced in the first detection coil 41 and the second detection coil 42. Circuit 50.
That is, as shown in FIG. 4a, the measurement circuit 50 includes an oscillation circuit 51, a first differential amplifier 52, a second differential amplifier 53, and a phase difference detection circuit 54. The oscillation circuit 51 generates an alternating drive signal and applies it to the first drive coil 31 and the second drive coil 32 connected in series to generate a primary magnetic flux. The first differential amplifier 52 A detection signal generated by the induced electromotive force is amplified at both ends of the first detection coil 41 and the first compensation coil 410 connected in series, and the second differential amplifier 53 is connected to the second detection coil 42 and the second compensation connected in series. A detection signal generated by the induced electromotive force at both ends of the coil 420 is amplified.
そして、位相差検出回路５４は、第１差動増幅器５２が増幅した検出信号と、第２差動増幅器５３が増幅した検出信号との位相差を検出する。そして、この位相差検出回路５４が検出した位相差の大きさによって、トーションバー１０の捻れ量すなわちトーションバー１０に加えられたトルクが表されることになる。 The phase difference detection circuit 54 detects the phase difference between the detection signal amplified by the first differential amplifier 52 and the detection signal amplified by the second differential amplifier 53. The amount of twist of the torsion bar 10, that is, the torque applied to the torsion bar 10 is represented by the magnitude of the phase difference detected by the phase difference detection circuit 54.
ここで、前述したように、直列接続された第１検出コイル４１と第１補償コイル４１０の、巻き方向は相互に逆向きとなっており、直列接続された第２検出コイル４２と第２補償コイル４２０とは、巻き方向が相互に逆向きとなっている。したがって、ノイズ等の外乱によって第１検出コイル４１に誘起する信号成分は、当該外乱によって第１補償コイル４１０に誘起する信号によって打ち消され、ノイズ等の外乱によって第２検出コイル４２に誘起する信号成分は、当該外乱によって第２補償コイル４２０に誘起する信号によって打ち消される。 Here, as described above, the winding directions of the first detection coil 41 and the first compensation coil 410 connected in series are opposite to each other, and the second detection coil 42 and the second compensation coil connected in series are opposite to each other. The winding direction of the coil 420 is opposite to each other. Therefore, the signal component induced in the first detection coil 41 due to a disturbance such as noise is canceled out by the signal induced in the first compensation coil 410 due to the disturbance, and the signal component induced in the second detection coil 42 due to the disturbance such as noise. Is canceled by a signal induced in the second compensation coil 420 by the disturbance.
また、上述の通り、図５ａに示すように、第２補償コイル４２０、第１検出コイル４１、第２検出コイル４２、第１補償コイル４１０の順序で、以上の各コイルは配置されており、第１駆動コイル３１は第１検出コイルに対面するように配置され、第２駆動コイル３２は第２検出コイル４２に対面するように配置されている。 Further, as described above, as shown in FIG. 5a, the respective coils are arranged in the order of the second compensation coil 420, the first detection coil 41, the second detection coil 42, and the first compensation coil 410, The first drive coil 31 is disposed so as to face the first detection coil, and the second drive coil 32 is disposed so as to face the second detection coil 42.
したがって、第１駆動コイル３１から第２検出コイル４２に到達する磁束成分５１１によって、第２検出コイル４２に誘起される信号成分である混信成分も、第１駆動コイル３１から第２補償コイル４２０に到達する磁束成分５１２によって第２補償コイル４２０に誘起される信号成分によって、ほぼ相殺することができる。また、同様に、第２駆動コイル３２から第１検出コイル４１に到達する磁束成分５２１によって、第１検出コイル４１に誘起される信号成分である混信成分も、第２駆動コイル３２から第１補償コイル４１０に到達する磁束成分５２２によって第１補償コイル４１０に誘起される信号成分によって、ほぼ相殺することができる。 Accordingly, an interference component, which is a signal component induced in the second detection coil 42 by the magnetic flux component 511 reaching the second detection coil 42 from the first drive coil 31, is also transferred from the first drive coil 31 to the second compensation coil 420. The signal component induced in the second compensation coil 420 by the arriving magnetic flux component 512 can be almost canceled out. Similarly, an interference component that is a signal component induced in the first detection coil 41 by the magnetic flux component 521 that reaches the first detection coil 41 from the second drive coil 32 is also compensated from the second drive coil 32 by the first compensation. The signal component induced in the first compensation coil 410 by the magnetic flux component 522 reaching the coil 410 can be substantially canceled out.
なお、上述のように、第１駆動コイル３１と第２駆動コイル３２との発生磁束の方向を相互に逆方向としているのは、トーションバー１０の回転に依存した誤差を抑制するためである。
ここで、以上のように第１補償コイル４１０と第２補償コイル４２０を設けた効果を示す。
無負荷でトーションバー１０を回転させたときに、図４ａに示す第１補償コイル４１０と第２補償コイル４２０を設けた構成によって測定回路５０で計測された位相差を図５ｂ１に、図４ｂに示すように第１補償コイル４１０と第２補償コイル４２０を設けずに第１検出コイル４１の両端を第１差動増幅器５２に、第２検出コイル４２の両端を第２差動増幅器５３に接続した構成によって測定回路５０で計測された位相差を図５ｂ２に示す。
As described above, the directions of the magnetic fluxes generated by the first drive coil 31 and the second drive coil 32 are opposite to each other in order to suppress errors depending on the rotation of the torsion bar 10.
Here, the effect of providing the first compensation coil 410 and the second compensation coil 420 as described above will be described.
When the torsion bar 10 is rotated with no load, the phase difference measured by the measurement circuit 50 by the configuration provided with the first compensation coil 410 and the second compensation coil 420 shown in FIG. 4a is shown in FIG. 5b1 and FIG. 4b. As shown, both ends of the first detection coil 41 are connected to the first differential amplifier 52 and both ends of the second detection coil 42 are connected to the second differential amplifier 53 without providing the first compensation coil 410 and the second compensation coil 420. FIG. 5b2 shows the phase difference measured by the measurement circuit 50 with the configuration described above.
ここでは、無負荷でトーションバー１０を回転させているので、検出されるべき位相差は０である。そして、図５ｂ２に示すように、第１補償コイル４１０と第２補償コイル４２０を設けなかった場合には、ノイズ等の外乱によって計測される位相差が大きく変動しているのに対して、図５ｂ１に示すように、第１補償コイル４１０と第２補償コイル４２０を設けた場合にはノイズ等の外乱による計測される位相差の変動は小さく、その変動の大きさは、第１補償コイル４１０と第２補償コイル４２０を設けなかった場合のおよそ１/３以下となる。 Here, since the torsion bar 10 is rotated with no load, the phase difference to be detected is zero. As shown in FIG. 5b2, when the first compensation coil 410 and the second compensation coil 420 are not provided, the phase difference measured due to disturbances such as noise greatly fluctuates. As shown in FIG. 5b1, when the first compensation coil 410 and the second compensation coil 420 are provided, the variation of the measured phase difference due to disturbance such as noise is small, and the magnitude of the variation is the first compensation coil 410. And about 1/3 or less of the case where the second compensation coil 420 is not provided.
よって、これより第１補償コイル４１０と第２補償コイル４２０を設けることにより、ノイズ等の外乱による影響や、磁束信号の混信による測定精度の劣化を抑制できることが分かる。
以上、本発明の実施形態について説明した。
なお、以上で説明してきた実施形態では、第１駆動コイル３１と第２駆動コイル３２を出力側筒２２の外周側に設け、第１検出コイル４１と第２検出コイル４２と第１補償コイル４１０と第２補償コイル４２０を入力側筒２１の内筒部と外筒部の間に配置するようにしてもよい。また、基準スリット６１を入力側筒２１に、第１検出用スリット６２と第２検出用スリット６３を出力側筒２２に設けるように構成してもよい。また、入力側筒２１をトーションバーの出力側に、出力側筒２２をトーションバーの入力側に固定するようにしてもよい。
Therefore, it can be seen that the provision of the first compensation coil 410 and the second compensation coil 420 can suppress the influence of disturbance such as noise and the deterioration of measurement accuracy due to interference of magnetic flux signals.
The embodiment of the present invention has been described above.
In the embodiment described above, the first drive coil 31 and the second drive coil 32 are provided on the outer peripheral side of the output side tube 22, and the first detection coil 41, the second detection coil 42, and the first compensation coil 410 are provided. The second compensation coil 420 may be disposed between the inner cylinder portion and the outer cylinder portion of the input side cylinder 21. Further, the reference slit 61 may be provided in the input side cylinder 21, and the first detection slit 62 and the second detection slit 63 may be provided in the output side cylinder 22. The input side tube 21 may be fixed to the output side of the torsion bar, and the output side tube 22 may be fixed to the input side of the torsion bar.
また、以上の実施形態においては、基準スリット６を、図２ｆ１に示すように、第１検出用スリット６２と軸方向位置が少なくとも一部重なる部分と、第２検出用スリット６３と軸方向位置が少なくとも一部重なる部分とを分割して、二列に径方向に並んだ形態で設けるようにしてもよい。また、この場合には、基準スリット６の第１検出用スリット６２と軸方向位置が少なくとも一部重なる部分と、第２検出用スリット６３と軸方向位置が少なくとも一部重なる部分とは、図２ｆ２に示すように径方向にずらして配置するようにしてもよい。 In the above embodiment, as shown in FIG. 2f1, the reference slit 6 has a portion at least partially overlapping with the first detection slit 62, and the second detection slit 63 and the axial position. At least part of the overlapping part may be divided and provided in the form of two rows arranged in the radial direction. Further, in this case, a portion where the first detection slit 62 of the reference slit 6 overlaps at least partially with the axial position and a portion where the second detection slit 63 overlaps at least partially with the axial position are shown in FIG. As shown in FIG. 4, the radial positions may be shifted.
また、以上の実施形態においては、トーションバー１０に捻れが生じていない状態のみにおいて、または、トーションバー１０の捻れが生じた状態のみにおいて、または、トーションバー１０に捻れの如何に関わらずに、第１検出用スリット６２と第２検出用スリット６３が、径方向に見て基準スリット６１と重ならないように構成するようにしてもよい。但し、第１検出用スリット６２と第２検出用スリット６３の、基準スリット６１に対する周方向の配置は異ならせるようにする。 Further, in the above embodiment, only in a state where the torsion bar 10 is not twisted, only in a state where the torsion bar 10 is twisted, or regardless of whether the torsion bar 10 is twisted or not, The first detection slit 62 and the second detection slit 63 may be configured not to overlap the reference slit 61 when viewed in the radial direction. However, the arrangement of the first detection slit 62 and the second detection slit 63 in the circumferential direction with respect to the reference slit 61 is different.
図２ｇ１は、トーションバー１０の捻れの如何によらず、第１検出用スリット６２と第２検出用スリット６３が、径方向に見て基準スリット６１と重ならないように構成した場合を示しており、この場合には、トーションバー１０に捻れに応じて、図２ｇ２に示すように、第１検出用スリット６２の基準スリット６１に対する周方向の距離と、第２検出用スリット６３基準スリット６１に対する周方向の距離とに異なった変化が現れる。 FIG. 2g1 shows a case where the first detection slit 62 and the second detection slit 63 are configured so as not to overlap the reference slit 61 when viewed in the radial direction, regardless of whether the torsion bar 10 is twisted. In this case, according to the twist of the torsion bar 10, as shown in FIG. 2g2, the circumferential distance of the first detection slit 62 relative to the reference slit 61 and the second detection slit 63 relative to the reference slit 61 are adjusted. Different changes appear in the direction distance.
したがって、このようにした場合でも、第１検出コイル４１で検出される前述した第１磁束成分の強度と第２磁束成分の強度と第３磁束成分の強度との組み合わせと、第２検出コイル４２で検出される第１磁束成分の強度と第２磁束成分の強度と第３磁束成分の強度との組み合わせは、トーションバー１０に捻れ量に応じて異なったものとなるので、このようにしても測定回路５０において、トーションバー１０に捻れ量を検出できることになる。 Therefore, even in this case, the combination of the strength of the first magnetic flux component, the strength of the second magnetic flux component, and the strength of the third magnetic flux component detected by the first detection coil 41, and the second detection coil 42 are used. The combination of the strength of the first magnetic flux component, the strength of the second magnetic flux component, and the strength of the third magnetic flux component detected by the above becomes different depending on the twist amount of the torsion bar 10, so that In the measurement circuit 50, the torsion bar 10 can detect the twist amount.
１０…トーションバー、２１…入力側筒、２２…出力側筒、３１…第１駆動コイル、３２…第２駆動コイル、４１…第１検出コイル、４２…第２検出コイル、５０…測定回路、５１…発振回路、５２…第１差動増幅器、５３…第２差動増幅器、５４…位相差検出回路、６１…基準スリット、６２…第１検出用スリット、６３…第２検出用スリット、４１０…第１補償コイル、４２０…第２補償コイル。 DESCRIPTION OF SYMBOLS 10 ... Torsion bar, 21 ... Input side cylinder, 22 ... Output side cylinder, 31 ... 1st drive coil, 32 ... 2nd drive coil, 41 ... 1st detection coil, 42 ... 2nd detection coil, 50 ... Measurement circuit, DESCRIPTION OF SYMBOLS 51 ... Oscillator circuit 52 ... 1st differential amplifier, 53 ... 2nd differential amplifier, 54 ... Phase difference detection circuit, 61 ... Reference | standard slit, 62 ... 1st detection slit, 63 ... 2nd detection slit, 410 ... 1st compensation coil, 420 ... 2nd compensation coil.
Claims (2)
前記トーションバーの一端に固定された、前記トーションバーと同軸状に配置された、非磁性導電体で形成した第１円筒と、
前記トーションバーの他端に固定された、前記第１円筒に挿入された形態で、前記トーションバーと同軸状に配置された、非磁性導電体で形成した第２円筒と、
測定部とを有し、
前記第１円筒と前記第２円筒とのうちの一方には基準スリットが設けられており、
前記第１円筒と前記第２円筒とのうちの前記基準スリットが設けられていない方には、軸方向の位置を異ならせて配置した第１検出用スリットと第２検出用スリットとが設けられており、
前記測定部は、
前記第２円筒の内周側と前記第１円筒の外周側とのうちの一方側に、前記トーションバーの回転軸と同軸状に、軸方向の位置を異ならせて配置した第１駆動コイルと第２駆動コイルと、
前記第２円筒の内周側と前記第１円筒の外周側とのうちの前記第１駆動コイルと前記第２駆動コイルとが配置されていない方側に、前記トーションバーの回転軸と同軸状に、軸方向の位置を異ならせて配置した第１検出コイルと第２検出コイルと第１補償コイルと第２補償コイルと、
前記第１駆動コイルと前記第２駆動コイルとを交流駆動する駆動回路と、
計測回路とを有し、
前記第１検出用スリットと前記第２検出用スリットとは、前記トーションバーの捩れに応じた量、前記基準スリットとの前記トーションバーの径方向に見た重なりの量が変化すると共に、前記トーションバーの捩れに応じた前記基準スリットとの前記重なりの量の変化量が、前記第１検出用スリットと前記第２検出用スリットとで相互に異なる量となるように配置されており、
前記第１検出コイルと前記第１補償コイルとは直列接続されており、前記第２検出コイルと前記第２補償コイルとは直列接続されており、前記第１検出コイルと前記第１補償コイルとの巻き線の巻き方向は逆方向であり、前記第２検出コイルと前記第２補償コイルとの巻き線の巻き方向は逆方向であり、
前記第１駆動コイルと前記第１検出コイルとは軸方向位置が前記第１検出用スリットと少なくとも一部重なるように配置され、前記第２駆動コイルと前記第２検出コイルとは軸方向位置が前記第２検出用スリットと少なくとも一部重なるように配置され、前記第１補償コイルと前記第２補償コイルとは、軸方向位置が、前記第１検出用スリット及び前記第２検出用スリットと重ならないように配置されており、
前記計測回路は、前記直列接続された第１検出コイルと第１補償コイルの両端に誘起された電圧信号と、前記直列接続された第２検出コイルと第２補償コイルの両端に誘起された電圧信号の位相差を検出し、
前記第１検出コイルと前記第２検出コイルとは、軸方向に見て、隣接して配置されており、前記第１補償コイルは、軸方向に見て、当該第１補償コイルと前記第１検出コイルとの間に前記第２検出コイルが位置するように配置され、前記第２補償コイルは、軸方向に見て、当該第２補償コイルと前記第２検出コイルとの間に前記第１検出コイルが位置するように配置されていると共に、
前記第１駆動コイルと前記第２検出コイルとの距離と、前記第１駆動コイルと前記第２補償コイルとの距離とがほぼ等しくなり、かつ、前記第２駆動コイルと前記第１検出コイルとの距離と、前記第２駆動コイルと前記第１補償コイルとの距離とがほぼ等しくなる位置関係で、前記第１駆動コイル、前記第２駆動コイル、前記第１検出コイル、前記第２検出コイル、前記第１補償コイル及び前記第２補償コイルは配置されていることを特徴とするトルクセンサ。 A torsion bar,
A first cylinder made of a non-magnetic conductor, which is fixed to one end of the torsion bar and is arranged coaxially with the torsion bar;
A second cylinder formed of a non-magnetic conductor, which is fixed to the other end of the torsion bar, and is inserted into the first cylinder and arranged coaxially with the torsion bar;
Having a measurement unit,
A reference slit is provided in one of the first cylinder and the second cylinder,
One of the first cylinder and the second cylinder that is not provided with the reference slit is provided with a first detection slit and a second detection slit that are arranged at different axial positions. And
The measuring unit is
A first drive coil disposed on one side of the inner circumference side of the second cylinder and the outer circumference side of the first cylinder, coaxially with the rotational axis of the torsion bar, and with different axial positions; A second drive coil;
Of the inner circumference side of the second cylinder and the outer circumference side of the first cylinder, on the side where the first drive coil and the second drive coil are not arranged, coaxial with the rotation axis of the torsion bar In addition, a first detection coil, a second detection coil, a first compensation coil, and a second compensation coil, which are arranged at different axial positions,
A drive circuit for AC driving the first drive coil and the second drive coil ;
Measuring circuit,
The first detection slit and the second detection slit have an amount corresponding to a twist of the torsion bar, an amount of overlap with the reference slit in the radial direction of the torsion bar, and the torsion bar. The amount of change in the amount of overlap with the reference slit according to the twist of the bar is arranged such that the first detection slit and the second detection slit are different from each other,
The first detection coil and the first compensation coil are connected in series, the second detection coil and the second compensation coil are connected in series, and the first detection coil and the first compensation coil And the winding direction of the winding of the second detection coil and the second compensation coil is the reverse direction,
The first drive coil and the first detection coil are arranged such that their axial positions overlap at least partially with the first detection slit, and the second drive coil and the second detection coil have an axial position. The first compensation coil and the second compensation coil are disposed so as to at least partially overlap with the second detection slit, and the axial positions of the first compensation coil and the second compensation coil overlap with the first detection slit and the second detection slit. It is arranged so as not to become
The measuring circuit includes a voltage signal induced at both ends of the first detection coil and the first compensation coil connected in series, and a voltage induced at both ends of the second detection coil and the second compensation coil connected in series. Detect the phase difference of the signal,
The first detection coil and the second detection coil are disposed adjacent to each other when viewed in the axial direction, and the first compensation coil and the first compensation coil are viewed in the axial direction. The second detection coil is disposed so as to be positioned between the detection coil and the second compensation coil when viewed in the axial direction, between the second compensation coil and the second detection coil. It is arranged so that the detection coil is located ,
The distance between the first drive coil and the second detection coil is substantially equal to the distance between the first drive coil and the second compensation coil, and the second drive coil and the first detection coil And the first drive coil, the second drive coil, the first detection coil, and the second detection coil in a positional relationship in which the distance between the second drive coil and the first compensation coil is substantially equal. The torque sensor , wherein the first compensation coil and the second compensation coil are arranged .
前記基準スリットは、軸方向位置を異ならせて配置した、前記第１検出用スリットと軸方向位置が少なくとも一部重なる第１基準スリットと、前記第２検出用スリットと軸方向位置が少なくとも一部重なる第２基準スリットとより構成されていることを特徴とするトルクセンサ。 The torque sensor according to claim 1,
The reference slit is arranged at a different axial position, the first reference slit is at least partially overlapping with the first detection slit, and the axial position is at least partially with respect to the second detection slit. A torque sensor comprising: an overlapping second reference slit.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009161520A JP5424472B2 (en) | 2009-07-08 | 2009-07-08 | Torque sensor |
| US12/569,382 US8069736B2 (en) | 2008-09-30 | 2009-09-29 | Torque sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009161520A JP5424472B2 (en) | 2009-07-08 | 2009-07-08 | Torque sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011017578A JP2011017578A (en) | 2011-01-27 |
| JP5424472B2 true JP5424472B2 (en) | 2014-02-26 |
Family
ID=43595489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009161520A Active JP5424472B2 (en) | 2008-09-30 | 2009-07-08 | Torque sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5424472B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5988421B2 (en) * | 2012-04-06 | 2016-09-07 | 株式会社小野測器 | Torque sensor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3729230A1 (en) * | 1987-09-02 | 1989-03-16 | Bosch Gmbh Robert | MEASURING DEVICE FOR A TURNING ANGLE AND / OR TORQUE |
| JPH0754273B2 (en) * | 1987-12-26 | 1995-06-07 | 大同特殊鋼株式会社 | Torxense |
| JP4810021B2 (en) * | 2001-08-31 | 2011-11-09 | 株式会社アミテック | Position detection device |
| JP4285248B2 (en) * | 2004-01-19 | 2009-06-24 | 日立電線株式会社 | Torque sensor and steering angle sensor |
| JP2006030088A (en) * | 2004-07-20 | 2006-02-02 | Hitachi Ltd | Torque sensor and construction method thereof |
| JP5189315B2 (en) * | 2007-04-24 | 2013-04-24 | 株式会社小野測器 | Torque sensor |
-
2009
- 2009-07-08 JP JP2009161520A patent/JP5424472B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011017578A (en) | 2011-01-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5189315B2 (en) | Torque sensor | |
| JP2013127368A (en) | Torque sensor | |
| JP2008160909A (en) | Detector with built-in motor | |
| JP2017015696A (en) | Relative angle detection device, torque sensor, electrically-driven power steering device and vehicle | |
| US8069736B2 (en) | Torque sensor | |
| US10352730B2 (en) | Inductive rotation sensor with improved accuracy | |
| JP6867386B2 (en) | Resolver | |
| JP3583671B2 (en) | Torque detector | |
| JP5424472B2 (en) | Torque sensor | |
| JP4971805B2 (en) | Torque sensor | |
| JP6108009B2 (en) | Relative angle detection device, torque sensor, electric power steering device, and vehicle | |
| JP4404763B2 (en) | Eddy current sensor device for measuring shaft torque | |
| JP5129710B2 (en) | Torque sensor | |
| JP2010085155A (en) | Torque sensor | |
| JP5129715B2 (en) | Torque sensor | |
| JP5158867B2 (en) | Rotation angle detector | |
| JP2010091506A (en) | Torque sensor | |
| JP5281601B2 (en) | Reluctance type resolver | |
| JP2514205B2 (en) | Magnetostrictive torque sensor | |
| JPS61137036A (en) | Steering force detector | |
| JP2008026222A (en) | Torque sensor | |
| JP2002062201A (en) | Torque sensor | |
| JP6071609B2 (en) | Magnetostrictive torque sensor | |
| WO2011024678A1 (en) | Rotational angle sensor | |
| JP3387337B2 (en) | Torque sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111201 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120529 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120531 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120720 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130319 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130409 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131119 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131125 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5424472 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |