JP5333154B2 - Vibration type driving device - Google Patents

Vibration type driving device Download PDF

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JP5333154B2
JP5333154B2 JP2009252048A JP2009252048A JP5333154B2 JP 5333154 B2 JP5333154 B2 JP 5333154B2 JP 2009252048 A JP2009252048 A JP 2009252048A JP 2009252048 A JP2009252048 A JP 2009252048A JP 5333154 B2 JP5333154 B2 JP 5333154B2
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drive shaft
vibration type
drive
conversion element
piezoelectric element
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JP2011097808A (en
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竜也 笹沼
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Konica Minolta Inc
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Description

本発明は、振動型駆動装置に関する。   The present invention relates to a vibration type driving device.

圧電素子のような電圧を機械的に変換する電気機械変換素子によって、駆動軸を軸方向に緩慢に変位させ、駆動軸に摩擦係合する移動体を駆動軸とともに移動させ、逆方向に駆動軸を急峻に変位させ、移動体をその慣性力によってその場に留めて駆動軸に対して滑り変位させる振動型駆動装置が公知である。   An electromechanical transducer that mechanically converts voltage, such as a piezoelectric element, slowly displaces the drive shaft in the axial direction, moves a moving body that frictionally engages the drive shaft together with the drive shaft, and drives the drive shaft in the opposite direction. There is known a vibration type driving device that abruptly displaces the moving body and keeps the moving body in place by the inertial force and slidingly displaces it relative to the driving shaft.

特許文献１には、圧電素子の伸縮方向の横側の面を不均衡に拘束するようにカラーを接着することにより、圧電素子の伸縮が駆動軸の傾斜を生じるようにして、移動体を圧電素子の伸縮方向と異なる方向にも駆動可能としたアクチュエータが記載されている。   In Patent Document 1, a collar is bonded so that the lateral surface of the piezoelectric element in the expansion / contraction direction is restrained in an unbalanced manner, so that the expansion / contraction of the piezoelectric element causes the inclination of the drive shaft, and the movable body is piezoelectric. An actuator that can be driven in a direction different from the expansion / contraction direction of the element is described.

特許文献１の発明では、電気機械変換素子の伸縮を非対称に拘束するカラーが必要であるので、従来の駆動装置よりも部品点数が多く、組立の工数も多い。   The invention of Patent Document 1 requires a collar that asymmetrically constrains the expansion and contraction of the electromechanical conversion element. Therefore, the number of parts is larger than that of a conventional driving device, and the number of assembly steps is also greater.

国際公開第ＷＯ２００９／０６６７０１号パンフレットInternational Publication No. WO2009 / 066701 Pamphlet

そこで、本発明は、部品点数が少なく、移動体を駆動軸上で滑り変位させられるとともに、駆動軸を傾斜することによって移動体を揺動させることもできる振動型駆動装置を提供することを課題とする。   Therefore, the present invention has an object to provide a vibration type driving device that has a small number of parts, can displace the moving body on the drive shaft, and can also swing the moving body by inclining the drive shaft. And

前記課題を解決するために、本発明による振動型駆動装置は、電圧が印加されると伸縮する電気機械変換素子と、前記電気機械変換素子の伸縮方向の横側の面に接合され、前記伸縮方向に延伸する駆動軸と、前記駆動軸に滑り変位可能に係合する移動体とを有するものとする。   In order to solve the above-mentioned problem, the vibration type driving device according to the present invention is joined to an electromechanical conversion element that expands and contracts when a voltage is applied, and a lateral surface in the expansion and contraction direction of the electromechanical conversion element. A driving shaft extending in the direction and a moving body engaged with the driving shaft so as to be slidable are provided.

この構成によれば、電気機械変換素子の駆動軸が接合された面の伸縮が阻害されるので、電気機械変換素子が不均衡に伸縮して湾曲する。これによって、駆動軸が傾斜し、移動体を揺動させられる。また、電気機械変換素子の伸縮によって、駆動軸は軸方向にも変位させられるので、急峻に駆動軸を変位させれば、移動体が駆動軸に対して滑り変位する。したがって、移動体の駆動軸に対する係合位置と、駆動軸の傾斜とによって、移動体を２次元に位置決めできる。   According to this configuration, since the expansion and contraction of the surface to which the drive shaft of the electromechanical conversion element is joined is hindered, the electromechanical conversion element expands and contracts unbalanced and curves. As a result, the drive shaft tilts, and the movable body can be swung. Further, since the drive shaft is displaced in the axial direction by the expansion and contraction of the electromechanical conversion element, if the drive shaft is suddenly displaced, the moving body slides and displaces with respect to the drive shaft. Therefore, the moving body can be positioned two-dimensionally by the engagement position of the moving body with respect to the drive shaft and the inclination of the drive shaft.

また、本発明の振動型駆動装置において、前記駆動軸は、前記電気機械変換素子の前記伸縮方向の長さの一部にのみ接合することが好ましい。   In the vibration type driving device of the present invention, it is preferable that the drive shaft is joined only to a part of the length of the electromechanical conversion element in the extension / contraction direction.

この構成によれば、電気機械変換素子の駆動軸が接合されていない部分は、印加された電圧に応じて直線的に寸法変位するので、主に駆動軸の軸方向の変位を生じさせる。これにより、移動体を駆動軸に対して効率よく滑り変位させられる。   According to this configuration, the portion where the drive shaft of the electromechanical conversion element is not joined is linearly displaced in accordance with the applied voltage, and therefore mainly causes displacement of the drive shaft in the axial direction. As a result, the movable body can be efficiently slid and displaced with respect to the drive shaft.

また、本発明の振動型駆動装置において、前記移動体および該移動体に駆動される被駆動物の重心は、前記駆動軸の中心軸から見て、前記電気機械変換素子の中心軸側に位置してもよい。   Further, in the vibration type driving device of the present invention, the center of gravity of the movable body and the driven object driven by the movable body is positioned on the central axis side of the electromechanical transducer element when viewed from the central axis of the driving shaft. May be.

この構成によれば、電気機械変換素子の伸縮方向と、移動体および被駆動物の質量による反力の方向とが近くなるので、捻れ方向に作用する力の成分が小さく、駆動効率が高くなる。また、この構成によれば、電気機械変換素子の伸縮方法に垂直な方向の寸法を小さくすることができ、装置の小型化が図れる。   According to this configuration, since the expansion / contraction direction of the electromechanical transducer and the direction of the reaction force due to the mass of the moving body and the driven object are close, the component of the force acting in the twisting direction is small and the driving efficiency is high. . Moreover, according to this structure, the dimension of the direction perpendicular | vertical to the expansion-contraction method of an electromechanical conversion element can be made small, and size reduction of an apparatus can be achieved.

また、本発明の振動型駆動装置において、前記電気機械変換素子および前記駆動軸は、ともに四角柱状であってもよい。   Further, in the vibration type driving device of the present invention, the electromechanical transducer and the drive shaft may both be square pillars.

この構成によれば、電気機械変換素子および駆動軸の製造が容易であり、互いの１つの横側面同士を貼着することで、電気機械変換素子の横側面に堅固に駆動軸を接合できる。   According to this configuration, it is easy to manufacture the electromechanical conversion element and the drive shaft, and the drive shaft can be firmly joined to the lateral side surface of the electromechanical conversion element by sticking one lateral side surface to each other.

また、本発明の振動型駆動装置において、前記駆動軸は、前記電気機械変換素子の一部を受け入れ、少なくとも部分的に前記電気機械変換素子に接合される凹部を有してもよく、前記電気機械変換素子が四角柱状であって、前記凹部が前記電気機械変換素子の３つの側面にそれぞれ接合される３つの平面からなってもよい。   In the vibration-type drive device of the present invention, the drive shaft may have a recess that receives a part of the electromechanical conversion element and is at least partially joined to the electromechanical conversion element. The mechanical conversion element may have a quadrangular prism shape, and the concave portion may include three planes that are respectively joined to three side surfaces of the electromechanical conversion element.

この構成によれば、電気機械変換素子の伸縮方向と、駆動軸の軸方向とを平行にすることが容易である。また、四角柱状の電気機械変換素子をコの字型の凹部に嵌合させれば、電気機械変換素子と駆動軸との接合強度を高くできる。   According to this configuration, it is easy to make the expansion / contraction direction of the electromechanical conversion element parallel to the axial direction of the drive shaft. Further, if the quadrangular prism-shaped electromechanical conversion element is fitted into the U-shaped recess, the bonding strength between the electromechanical conversion element and the drive shaft can be increased.

また、本発明の振動型駆動装置において、前記電気機械変換素子に、前記移動体が前記駆動軸に対して軸方向片側に滑り変位するように、前記駆動軸を非対称に往復変位させる周期的な変動駆動電圧と、前記移動体が前記駆動軸に対して滑り変位しないように緩慢に変化する静動駆動電圧とを印加可能な駆動回路をさらに有してもよい。   Further, in the vibration type driving device according to the present invention, the electromechanical conversion element is periodically moved so that the driving shaft is asymmetrically reciprocally displaced so that the moving body is slidably displaced in one axial direction with respect to the driving shaft. You may further have a drive circuit which can apply a variable drive voltage and the static drive voltage which changes slowly so that the said mobile body may not slide-displace with respect to the said drive shaft.

この構成によれば、変動駆動電圧によって、移動体の駆動軸に対する係合位置を定め、静動駆動電圧によって、駆動軸の傾斜角度を定めることで、移動体を２次元に位置決めできる。   According to this configuration, the movable body can be positioned two-dimensionally by determining the engagement position of the movable body with respect to the drive shaft by the variable drive voltage and determining the tilt angle of the drive shaft by the static drive voltage.

本発明によれば、電気機械変換素子の横側面に駆動軸を接合したので、駆動軸の軸方向の変位によって移動体を駆動軸上で滑り変位させることができるとともに、駆動軸が電気機械変換素子の伸縮を部分的に阻害して電気機械変換素子を湾曲させることにより、駆動軸を移動体とともに揺動できる。これにより、移動体を２次元に位置決めできる。   According to the present invention, since the drive shaft is joined to the lateral side surface of the electromechanical transducer, the moving body can be slid and displaced on the drive shaft by the axial displacement of the drive shaft, and the drive shaft is electromechanically converted. By partially inhibiting the expansion and contraction of the element and bending the electromechanical conversion element, the drive shaft can be swung together with the moving body. Thereby, a mobile body can be positioned two-dimensionally.

本発明の第１実施形態の振動型駆動装置の側面図である。1 is a side view of a vibration type driving device according to a first embodiment of the present invention. 図１の振動型駆動装置の断面図である。It is sectional drawing of the vibration type drive device of FIG. 図１の振動型駆動装置の駆動回路の回路図である。It is a circuit diagram of the drive circuit of the vibration type drive device of FIG. 図１の振動型駆動装置の圧電素子を緩慢に伸張した時の側面図である。It is a side view when the piezoelectric element of the vibration type drive device of FIG. 1 is extended slowly. 図１の振動型駆動装置の圧電素子を急峻に伸張した時の側面図である。It is a side view when the piezoelectric element of the vibration type drive device of FIG. 図５の振動型駆動装置の圧電素子を緩慢に収縮した時の側面図である。FIG. 6 is a side view when the piezoelectric element of the vibration type driving device of FIG. 5 is slowly contracted. 図１の振動型駆動装置の移動体の位置決め範囲を示す側面図である。It is a side view which shows the positioning range of the moving body of the vibration type drive device of FIG. 図１の振動型駆動装置の圧電素子に逆極性の電圧を印加した時の側面図である。FIG. 2 is a side view when a voltage having a reverse polarity is applied to a piezoelectric element of the vibration type driving device of FIG. 1. 本発明の第２実施形態の振動型駆動装置の断面図である。It is sectional drawing of the vibration type drive device of 2nd Embodiment of this invention. 本発明の第３実施形態の振動型駆動装置の断面図である。It is sectional drawing of the vibration type drive device of 3rd Embodiment of this invention.

これより、本発明の実施形態について、図面を参照しながら説明する。図１に、本発明の第１実施形態の振動型駆動装置１を示す。振動型駆動装置１は、錘２と、錘２に一端が固定された四角柱状の圧電素子（電気機械変換素子）３と、四角柱状をなし、圧電素子３の横側面の錘２と反対側の一部に、その横側面が接合され、圧電素子３と平行に延伸するように保持された駆動軸４と、駆動軸４に摩擦力によって係合し、駆動軸４に沿って滑り変位可能な移動体５とからなる。   Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 shows a vibration type driving apparatus 1 according to a first embodiment of the present invention. The vibration type driving device 1 includes a weight 2, a square columnar piezoelectric element (electromechanical conversion element) 3 having one end fixed to the weight 2, and a square columnar shape opposite to the weight 2 on the lateral side surface of the piezoelectric element 3. The drive shaft 4 is joined to a part of the drive shaft 4 and held so as to extend parallel to the piezoelectric element 3. The drive shaft 4 is engaged with the drive shaft 4 by a frictional force, and can be slid along the drive shaft 4. Mobile body 5.

圧電素子３は、圧電材料と電極とを多数積層してなり、電極間に電圧が印加されるとその電圧に応じて積層方向に伸縮する積層型圧電素子である。また、圧電素子３は、図２に示すように、断面形状が略正方形であり、印加された電圧に応じて長軸方向（図１の水平方向）の長さが変化する。例えば、圧電素子３は、正の極性の電圧が印加されると伸張し、負の極性の電圧が印加されると収縮する。   The piezoelectric element 3 is a stacked piezoelectric element that is formed by stacking a large number of piezoelectric materials and electrodes, and expands and contracts in the stacking direction according to the voltage applied between the electrodes. In addition, as shown in FIG. 2, the piezoelectric element 3 has a substantially square cross-sectional shape, and the length in the major axis direction (horizontal direction in FIG. 1) changes according to the applied voltage. For example, the piezoelectric element 3 expands when a positive polarity voltage is applied, and contracts when a negative polarity voltage is applied.

駆動軸４は、図２に示すように、長辺が圧電素子３の一辺よりも長い長方形の断面形状を有し、その長辺を構成する横側面が、圧電素子３の１つの横側面に、接着剤６によって接合されている。また、移動体５は、駆動軸４の中心軸から見て、圧電素子３の中心軸（伸縮方向の軸）側に、レンズ７を一体に保持している。したがって、移動体５はレンズ７と一体に移動し、移動体５とレンズ７とを合わせたものの重心は、駆動軸４の中心軸から、圧電素子３の中心軸側にずれている。   As shown in FIG. 2, the drive shaft 4 has a rectangular cross-sectional shape whose long side is longer than one side of the piezoelectric element 3, and the lateral side that forms the long side is one lateral side of the piezoelectric element 3. , And bonded by an adhesive 6. In addition, the moving body 5 integrally holds the lens 7 on the center axis (axis in the expansion / contraction direction) side of the piezoelectric element 3 when viewed from the center axis of the drive shaft 4. Therefore, the movable body 5 moves integrally with the lens 7, and the center of gravity of the combined movable body 5 and lens 7 is shifted from the central axis of the drive shaft 4 toward the central axis of the piezoelectric element 3.

図３に、振動型駆動装置１の駆動回路８の構成を示す。駆動回路８は、不図示のマイコンが出力する制御信号に従って電圧３Ｖ、デューティ比０．３または０．７の矩形波からなる周期的な変動駆動電圧を生成するパルス発生器（Pulse Width Modulator）９と、マイコンが出力するディジタル信号を電圧０〜３Ｖのアナログ電圧に変換した静動駆動電圧を生成するＤＡ変換器１０と、変動駆動電圧と静動駆動電圧とを例えば１：４の比で足し合わせて（重畳して）０〜１５Ｖの駆動電圧を生成する加算器１１と、加算器１１の出力を電流増幅するパワーアンプ１２とからなる。パワーアンプ１２で増幅された駆動電圧は、圧電素子３に印加される。この構成において、圧電素子３に印加される駆動電圧は、０〜１２Ｖの静動駆動電圧と、波高３Ｖの変動駆動電圧とを重畳したものであるといえる。尚、ＤＡ変換器１０の出力は１Ｖ／ｓｅｃ以下の変化率で緩慢に変化するように設定されている。   FIG. 3 shows the configuration of the drive circuit 8 of the vibration type drive device 1. The drive circuit 8 is a pulse generator (Pulse Width Modulator) 9 that generates a periodically varying drive voltage composed of a rectangular wave having a voltage of 3 V and a duty ratio of 0.3 or 0.7 in accordance with a control signal output from a microcomputer (not shown). A DA converter 10 that generates a static drive voltage obtained by converting a digital signal output from the microcomputer into an analog voltage of 0 to 3 V, and a variable drive voltage and the static drive voltage are added in a ratio of 1: 4, for example. In addition, it includes an adder 11 that generates (superimposes) a drive voltage of 0 to 15 V, and a power amplifier 12 that amplifies the output of the adder 11. The drive voltage amplified by the power amplifier 12 is applied to the piezoelectric element 3. In this configuration, it can be said that the drive voltage applied to the piezoelectric element 3 is obtained by superimposing a static drive voltage of 0 to 12V and a variable drive voltage of a wave height of 3V. The output of the DA converter 10 is set so as to change slowly at a change rate of 1 V / sec or less.

図４に示すように、圧電素子３に駆動回路７から正の静動駆動電圧を印加すると、図４に示すように、圧電素子３は軸方向に伸張しようとするが、駆動軸４が貼着されている部分は、駆動軸４によって伸張が阻害される。このため、圧電素子３は、横側面に駆動軸４が貼着されていない錘２側の部分は、その中心軸方向に真っ直ぐに伸張するが、反対側の横側面に駆動軸４が貼着されている部分は、駆動軸４が貼着された横側面の伸張量が小さく、反対側の横側面の伸張量が大きくなる。すると、圧電素子３の伸縮方向に駆動軸４が貼着された範囲は、図示するように、湾曲することで横側面の長さの違いを吸収するため、駆動軸４は、圧電素子３の湾曲に伴って傾斜する。駆動軸４が十分に堅い場合、接着剤６の弾性によって、圧電素子３からの剥離が防止される。   As shown in FIG. 4, when a positive static drive voltage is applied to the piezoelectric element 3 from the drive circuit 7, the piezoelectric element 3 tries to expand in the axial direction as shown in FIG. The stretched portion of the attached portion is inhibited by the drive shaft 4. For this reason, in the piezoelectric element 3, the portion on the side of the weight 2 where the drive shaft 4 is not attached to the side surface extends straight in the direction of the central axis, but the drive shaft 4 is attached to the opposite side surface. In the portion where the drive shaft 4 is stuck, the extension amount of the lateral side surface to which the drive shaft 4 is attached is small, and the extension amount of the opposite lateral side surface is large. Then, the range where the drive shaft 4 is adhered in the expansion / contraction direction of the piezoelectric element 3 absorbs the difference in length of the lateral side surface by being curved, as shown in the figure. Inclined with curvature. When the drive shaft 4 is sufficiently rigid, peeling from the piezoelectric element 3 is prevented by the elasticity of the adhesive 6.

二点鎖線で示した状態から、圧電素子３が緩慢に伸張した場合、図４に示すように、移動体５は、駆動軸４と一体に移動する。しかしながら、圧電素子３が急峻に伸張した場合、移動体５（およびレンズ７）は、自身の慣性力（質量）によってその場に留まろうとするため、図５に示すように、駆動軸４に沿って圧電素子３側に滑り変位する。同様に、圧電素子３を緩慢に収縮させると、移動体５は、駆動軸４に摩擦係合したまま、駆動軸４と一体に移動するが、圧電素子３を急峻に収縮させると、移動体５は、慣性力によって、駆動軸４上で圧電素子３と反対側に滑り変位する。   When the piezoelectric element 3 extends slowly from the state indicated by the two-dot chain line, the moving body 5 moves integrally with the drive shaft 4 as shown in FIG. However, when the piezoelectric element 3 expands sharply, the moving body 5 (and the lens 7) tries to stay in place by its own inertial force (mass), and as shown in FIG. Along the piezoelectric element 3 side. Similarly, when the piezoelectric element 3 is slowly contracted, the moving body 5 moves integrally with the drive shaft 4 while being frictionally engaged with the drive shaft 4, but when the piezoelectric element 3 is contracted sharply, the moving body 5 moves. 5 is slid to the opposite side of the piezoelectric element 3 on the drive shaft 4 due to inertial force.

変動駆動電圧のデューティ比が０．３の場合、圧電素子３は、急峻に伸張し、緩慢に収縮する変位を繰り返す。このとき、移動体５は、図６に示すように、圧電素子３の伸張時には、駆動軸４に対して滑り変位し、圧電素子３の収縮時には、駆動軸４と一体に揺動する。これを繰り返すことで、移動体５は、変動駆動電圧のパルス数に比例する距離だけ、駆動軸４上を圧電素子３側に滑り移動する。変動駆動電圧のデューティ比が０．７の場合、圧電素子３は、緩慢に伸張し、急峻に収縮する。したがって、移動体５は、駆動軸４上を圧電素子３から遠ざかる方向に移動する。   When the duty ratio of the variable drive voltage is 0.3, the piezoelectric element 3 repeats a displacement that expands steeply and contracts slowly. At this time, as shown in FIG. 6, the moving body 5 slides and displaces with respect to the drive shaft 4 when the piezoelectric element 3 is extended, and swings integrally with the drive shaft 4 when the piezoelectric element 3 contracts. By repeating this, the moving body 5 slides on the drive shaft 4 toward the piezoelectric element 3 by a distance proportional to the number of pulses of the variable drive voltage. When the duty ratio of the variable drive voltage is 0.7, the piezoelectric element 3 expands slowly and contracts sharply. Therefore, the moving body 5 moves on the drive shaft 4 in a direction away from the piezoelectric element 3.

以上のように、振動型駆動装置１では、変動駆動電圧によって、移動体５の駆動軸４上の係合位置を定めることができる。また、圧電素子３の屈曲の度合いは印加される電圧に応じて調節できるため、静動駆動電圧の電圧によって駆動軸４の傾斜角度を定めることができる。したがって、図７に示すように、移動体５が保持するレンズ７の光学中心を、光軸に直交する平面上で、２次元的に位置決めできる。このために、レンズ７の光学中心の座標に応じて、移動体５が駆動軸４に係合する位置と駆動軸４を傾斜させるための静動駆動電圧の値とを決定できるように、コンピュータに、参照テーブルや変換式を記憶させることが好ましい。   As described above, in the vibration type drive device 1, the engagement position on the drive shaft 4 of the moving body 5 can be determined by the variable drive voltage. Further, since the degree of bending of the piezoelectric element 3 can be adjusted according to the applied voltage, the inclination angle of the drive shaft 4 can be determined by the voltage of the static drive voltage. Therefore, as shown in FIG. 7, the optical center of the lens 7 held by the moving body 5 can be positioned two-dimensionally on a plane orthogonal to the optical axis. For this reason, the computer can determine the position where the moving body 5 engages with the drive shaft 4 and the value of the static drive voltage for tilting the drive shaft 4 according to the coordinates of the optical center of the lens 7. It is preferable to store the reference table and the conversion formula.

尚、本実形態では、圧電素子３の伸縮方向の長さの約半分に駆動軸４が貼着されているが、圧電素子３において、駆動軸４が貼着された部分は、主に、屈曲して駆動軸４を揺動させるのに寄与し、駆動軸４が貼着されていない部分は、伸縮方向に駆動軸４を平行移動させるのに寄与する。したがって、圧電素子３の全長に対する駆動軸４を接合する長さの割合が小さい程、移動体５の移動速度が高くなり、駆動軸４および移動体５の揺動可能な角度が小さくなる。逆に、圧電素子３の全長に対する駆動軸４を接合する長さがの割合が大きい程、移動体５の移動速度が低くなり、駆動軸４および移動体５の揺動可能な角度が大きくなる。   In this embodiment, the drive shaft 4 is attached to about half the length of the piezoelectric element 3 in the expansion / contraction direction. In the piezoelectric element 3, the portion where the drive shaft 4 is attached is mainly The bent portion contributes to swinging of the drive shaft 4, and the portion where the drive shaft 4 is not attached contributes to parallel movement of the drive shaft 4 in the extending and contracting direction. Therefore, the smaller the ratio of the length for joining the drive shaft 4 to the entire length of the piezoelectric element 3, the higher the moving speed of the moving body 5 and the smaller the swingable angle of the driving shaft 4 and the moving body 5. Conversely, as the ratio of the length of the drive shaft 4 to the total length of the piezoelectric element 3 increases, the moving speed of the moving body 5 decreases and the swingable angle of the driving shaft 4 and the moving body 5 increases. .

また、本実施形態の駆動回路８では、圧電素子３に正の電圧しか印加できないが、圧電素子３に極性が逆の負の電圧を印加すれば、図８に示すように、圧電素子３を電圧が印加されていない状態よりも収縮させつつ正の電圧印加時と反対方向に湾曲させられる。これにより、駆動軸４の軸方向の変位を大きくして、移動体５の滑り移動速度を高くし、駆動軸４および移動体５の揺動範囲を広くすること可能である。   Further, in the drive circuit 8 of the present embodiment, only a positive voltage can be applied to the piezoelectric element 3, but if a negative voltage having a reverse polarity is applied to the piezoelectric element 3, the piezoelectric element 3 is connected as shown in FIG. It is bent in a direction opposite to that when a positive voltage is applied while contracting from a state where no voltage is applied. Thereby, the axial displacement of the drive shaft 4 can be increased, the sliding movement speed of the moving body 5 can be increased, and the swing range of the drive shaft 4 and the moving body 5 can be widened.

以上の実施形態において、駆動軸４は、四角柱状であり、その１つの横側面が、四角柱状の圧電素子３の１つの横側面に貼着されている。しかしながら、図９に示す本発明の第２実施形態の振動型駆動装置のように、駆動軸４は、Ｖ字溝のように、その中に円柱状の圧電素子３の一部を受け入れ、その内面の少なくとも一部に圧電素子３が接合されるような凹部１３が形成されていてもよい。   In the above embodiment, the drive shaft 4 has a quadrangular prism shape, and one lateral side surface thereof is attached to one lateral side surface of the quadrangular columnar piezoelectric element 3. However, like the vibration type drive device of the second embodiment of the present invention shown in FIG. 9, the drive shaft 4 receives a part of the cylindrical piezoelectric element 3 therein, like a V-shaped groove, A recess 13 may be formed so that the piezoelectric element 3 is bonded to at least a part of the inner surface.

駆動軸４に、凹部１３を形成することで、圧電素子３の伸縮方向の中心軸と駆動軸４の中心軸とが平行になるように、圧電素子３と駆動軸４とを接合するのが容易になる。   By forming the recess 13 in the drive shaft 4, the piezoelectric element 3 and the drive shaft 4 are joined so that the central axis in the expansion / contraction direction of the piezoelectric element 3 and the central axis of the drive shaft 4 are parallel to each other. It becomes easy.

また、本発明では、図１０に示す第３実施形態の振動型駆動装置のように、駆動軸４に、四角柱状の圧電素子３を受け入れるコの字型の凹部１３を形成してもよい。本実施形態では、第１実施形態よりも圧電素子３と駆動軸４との接着面積が大きいので、より高い接合強度が得られる。   Further, in the present invention, a U-shaped concave portion 13 for receiving the quadrangular prism-shaped piezoelectric element 3 may be formed on the drive shaft 4 as in the vibration type drive device of the third embodiment shown in FIG. In this embodiment, since the bonding area between the piezoelectric element 3 and the drive shaft 4 is larger than that in the first embodiment, higher bonding strength can be obtained.

１…振動型駆動装置
２…錘
３…圧電素子（電気機械変換素子）
４…駆動軸
５…移動体
６…接着剤
７…レンズ
８…駆動回路
９…パルス発生器（変動駆動電圧源）
１０…ＤＡ変換器（静動駆動電圧源）
１３…凹部 DESCRIPTION OF SYMBOLS 1 ... Vibration type drive device 2 ... Weight 3 ... Piezoelectric element (electromechanical conversion element)
DESCRIPTION OF SYMBOLS 4 ... Drive shaft 5 ... Moving body 6 ... Adhesive 7 ... Lens 8 ... Drive circuit 9 ... Pulse generator (variable drive voltage source)
10 ... DA converter (static drive voltage source)
13 ... Recess

Claims (7)

電圧が印加されると伸縮する電気機械変換素子と、
前記電気機械変換素子の伸縮方向の横側の面に接合され、前記伸縮方向に延伸する駆動軸と、
前記駆動軸に滑り変位可能に係合する移動体とを有することを特徴とする振動型駆動装置。 An electromechanical transducer that expands and contracts when a voltage is applied;
A drive shaft that is joined to a lateral surface of the electromechanical transducer in the expansion and contraction direction and extends in the expansion and contraction direction;
A vibration type driving apparatus comprising: a moving body that is slidably engaged with the driving shaft. 前記駆動軸は、前記電気機械変換素子の前記伸縮方向の長さの一部にのみ接合されていることを特徴とする請求項１に記載の振動型駆動装置。   2. The vibration type driving device according to claim 1, wherein the drive shaft is joined only to a part of the length of the electromechanical conversion element in the expansion and contraction direction. 前記移動体および該移動体に駆動される被駆動物の重心は、前記駆動軸の中心軸から見て、前記電気機械変換素子の中心軸側に位置することを特徴とする請求項１または２に記載の振動型駆動装置。   The center of gravity of the movable body and a driven object driven by the movable body is located on the central axis side of the electromechanical transducer as viewed from the central axis of the driving shaft. The vibration type driving device described in 1. 前記電気機械変換素子および前記駆動軸は、ともに四角柱状であることを特徴とする請求項１から３のいずれかに記載の振動型駆動装置。   4. The vibration type driving device according to claim 1, wherein both the electromechanical conversion element and the drive shaft have a quadrangular prism shape. 5. 前記駆動軸は、前記電気機械変換素子の一部を受け入れ、少なくとも部分的に前記電気機械変換素子に接合される凹部を有することを特徴とする請求項１から３のいずれかに記載の振動型駆動装置。   4. The vibration type according to claim 1, wherein the drive shaft has a concave portion that receives a part of the electromechanical conversion element and is at least partially joined to the electromechanical conversion element. 5. Drive device. 前記電気機械変換素子は、四角柱状であり、前記凹部は、前記電気機械変換素子の３つの面にそれぞれ接合される３つの平面からなることを特徴とする請求項５に記載の振動型駆動装置。   6. The vibration type driving device according to claim 5, wherein the electromechanical conversion element has a quadrangular prism shape, and the concave portion includes three planes respectively joined to three surfaces of the electromechanical conversion element. . 前記電気機械変換素子に、前記移動体が前記駆動軸に対して軸方向片側に滑り変位するように、前記駆動軸を非対称に往復変位させる周期的な変動駆動電圧と、前記移動体が前記駆動軸に対して滑り変位しないように緩慢に変化する静動駆動電圧とを印加可能な駆動回路をさらに有することを特徴とする請求項１から６のいずれかに記載の振動型駆動装置。   The electromechanical transducer has a periodically varying drive voltage for reciprocally displacing the drive shaft so that the movable body is slid and displaced in one axial direction with respect to the drive shaft, and the movable body is the drive 7. The vibration type driving device according to claim 1, further comprising a drive circuit capable of applying a static drive voltage that slowly changes so as not to slide and displace with respect to the shaft.
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