JP5317906B2 - 成膜方法 - Google Patents
成膜方法 Download PDFInfo
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- JP5317906B2 JP5317906B2 JP2009218303A JP2009218303A JP5317906B2 JP 5317906 B2 JP5317906 B2 JP 5317906B2 JP 2009218303 A JP2009218303 A JP 2009218303A JP 2009218303 A JP2009218303 A JP 2009218303A JP 5317906 B2 JP5317906 B2 JP 5317906B2
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- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 150000002987 phenanthrenes Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- VLRICFVOGGIMKK-UHFFFAOYSA-N pyrazol-1-yloxyboronic acid Chemical compound OB(O)ON1C=CC=N1 VLRICFVOGGIMKK-UHFFFAOYSA-N 0.000 description 1
- 150000003220 pyrenes Chemical class 0.000 description 1
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910003449 rhenium oxide Inorganic materials 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- UGNWTBMOAKPKBL-UHFFFAOYSA-N tetrachloro-1,4-benzoquinone Chemical compound ClC1=C(Cl)C(=O)C(Cl)=C(Cl)C1=O UGNWTBMOAKPKBL-UHFFFAOYSA-N 0.000 description 1
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- OYQCBJZGELKKPM-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O-2].[Zn+2].[O-2].[In+3] OYQCBJZGELKKPM-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- CJGUQZGGEUNPFQ-UHFFFAOYSA-L zinc;2-(1,3-benzothiazol-2-yl)phenolate Chemical compound [Zn+2].[O-]C1=CC=CC=C1C1=NC2=CC=CC=C2S1.[O-]C1=CC=CC=C1C1=NC2=CC=CC=C2S1 CJGUQZGGEUNPFQ-UHFFFAOYSA-L 0.000 description 1
- GWDUZCIBPDVBJM-UHFFFAOYSA-L zinc;2-(2-hydroxyphenyl)-3h-1,3-benzothiazole-2-carboxylate Chemical compound [Zn+2].OC1=CC=CC=C1C1(C([O-])=O)SC2=CC=CC=C2N1.OC1=CC=CC=C1C1(C([O-])=O)SC2=CC=CC=C2N1 GWDUZCIBPDVBJM-UHFFFAOYSA-L 0.000 description 1
- QEPMORHSGFRDLW-UHFFFAOYSA-L zinc;2-(2-hydroxyphenyl)-3h-1,3-benzoxazole-2-carboxylate Chemical compound [Zn+2].OC1=CC=CC=C1C1(C([O-])=O)OC2=CC=CC=C2N1.OC1=CC=CC=C1C1(C([O-])=O)OC2=CC=CC=C2N1 QEPMORHSGFRDLW-UHFFFAOYSA-L 0.000 description 1
- HTPBWAPZAJWXKY-UHFFFAOYSA-L zinc;quinolin-8-olate Chemical compound [Zn+2].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 HTPBWAPZAJWXKY-UHFFFAOYSA-L 0.000 description 1
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- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Description
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を利用して、発光素子のEL層を形成する場合について説明する。また、本実施の形態は、光源を用いて加熱処理を行う場合について説明する。図1(A)は本発明の一態様の成膜用基板を示す斜視図であり、図1(B)及び図1(C)は本発明の一態様の成膜方法についての概念を示す斜視図である。
本実施の形態では、本発明の一態様の成膜方法について説明する。なお、本実施の形態では、本発明の一態様の成膜方法を用いて発光素子のEL層を形成する場合について説明する。なお、本実施の形態に示す成膜方法において、特に記載がない場合には、上記実施の形態と同様の材料及び作製方法によって行うものとする。
本実施の形態では、実施の形態2で説明した本発明の一態様の成膜方法で、成膜用基板を複数用いて発光素子のEL層を形成することにより、フルカラー表示が可能な発光装置の作製方法について説明する。
本実施の形態では、本発明の一態様の成膜方法を適用して、発光素子及び発光装置を作製する方法について説明する。
本実施の形態では、実施の形態4で説明した発光素子を用いて形成される発光装置について説明する。
本実施の形態では、本発明の一態様を適用した発光装置を用いて完成させた様々な電子機器および照明器具の一例について、図8を用いて説明する。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてTi膜を膜厚150nmで形成した。
第1の材料層に用いる高分子化合物として、ガラス転移温度が285℃のシクロオレフィンポリマーを用いた以外は、構成例1と同様に作製した。つまり、第1の材料層は、第1の成膜材料としてCzPA、第2の成膜材料として2PCAPA、高分子化合物としてガラス転移温度が285℃のシクロオレフィンポリマー、溶媒としてトルエンを含む。第1の材料層の膜厚は150nmとし、第1の材料層中のトルエン、シクロオレフィンポリマー、CzPA及び2PCAPAの比率は、重量比で150:5:1:0.05(=トルエン:シクロオレフィンポリマー:CzPA:2PCAPA)となるように調節した。
真空蒸着法を用いて、CzPAと2PCAPAとを共蒸着することにより、被成膜基板であるガラス基板にEL層を形成した。このとき、成膜室内を真空度5×10−3Pa以下に保った。EL層の膜厚は30nmとし、EL層中のCzPAと2PCAPAの比率が重量比で1:0.05(=CzPA:2PCAPA)となるように調節した。なお、共蒸着とは、異なる複数の物質をそれぞれ異なる蒸発源から同時に蒸発させる蒸着法である。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてTi膜を膜厚150nmで形成した。
なお、本実施例で用いた物質の構造式を以下に示す。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてチタン(Ti)膜を膜厚150nmで形成した。
真空蒸着法を用いて、BAlq、NPB及びIr(tppr)2(acac)とを共蒸着することにより、被成膜基板であるガラス基板にEL層を形成した。このとき、成膜室内は真空度5×10−3Pa以下に保った。EL層の膜厚は30nmとし、EL層中のBAlq、NPB及びIr(tppr)2(acac)の比率は、重量比で1:0.15:0.06(=BAlq:NPB:Ir(tppr)2(acac))となるように調節した。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてTi膜を膜厚150nmで形成した。
なお、本実施例で用いた物質の構造式を以下に示す。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてTi膜を膜厚150nmで形成した。
構成例4におけるシクロオレフィンポリマーの代わりに、PVKを用いた。つまり、第1の材料層に含まれる高分子化合物として、PVKを用いた以外は構成例4と同様に作製した。
真空蒸着法を用いて、CzPAとPCBAPAとを共蒸着することにより、被成膜基板であるガラス基板にEL層を形成した。また、成膜室内は、真空度5×10−3Pa以下に保った。EL層の膜厚は30nmとし、EL層中のCzPA及びPCBAPAの比率は、重量比で1:0.1(=CzPA:PCBAPA)となるように調節した。
支持基板である第1の基板としてガラス基板を用いた。第1の基板上に、吸収層としてTi膜を膜厚150nmで形成した。
103 吸収層
105 第1の材料層
105a 第1の成膜材料
105b 第2の成膜材料
107 第2の基板
109 第2の材料層
301 第1の基板
302 反射層
303 吸収層
304 断熱層
305 第1の材料層
306 保護層
307 第2の基板
308 電極層
309 第2の材料層
310 光
311 絶縁物
312 開口部
401 反射層
402 開口部
411 EL層(R)
412 EL層(G)
413 EL層(B)
414 絶縁物
901 基板
902 第1の電極
903 EL層
904 第2の電極
911 正孔注入層
912 正孔輸送層
913 発光層
914 電子輸送層
915 電子注入層
1001 基板
1004 絶縁層
1013 第1の電極
1014 隔壁
1016 第2の電極
1021 発光領域
1022 隔壁
1102 データ線
1103 走査線
1104 隔壁
1105 領域
1106 入力端子
1107 入力端子
1108 接続配線
1109a FPC
1109b FPC
1200 EL層
1201 駆動回路部(ソース側駆動回路)
1202 画素部
1203 駆動回路部(ゲート側駆動回路)
1204 封止基板
1205 シール材
1207 空間
1208 配線
1209 FPC
1210 素子基板
1211 スイッチング用TFT
1212 電流制御用TFT
1213 第1の電極
1214 絶縁物
1215 発光素子
1216 第2の電極
1223 nチャネル型TFT
1224 pチャネル型TFT
9100 テレビジョン装置
9101 筐体
9103 表示部
9105 スタンド
9107 表示部
9109 操作キー
9110 リモコン操作機
9201 本体
9202 筐体
9203 表示部
9204 キーボード
9205 外部接続ポート
9206 マウス
9301 筐体
9302 筐体
9303 連結部
9304 表示部
9305 表示部
9306 スピーカ部
9307 記録媒体挿入部
9308 LEDランプ
9309 操作キー
9310 接続端子
9311 センサ
9312 マイクロフォン
9401 照明部
9402 傘
9403 可変アーム
9404 支柱
9405 台
9406 電源
9500 携帯電話機
9501 筐体
9502 表示部
9503 操作ボタン
9504 外部接続ポート
9505 スピーカ
9506 マイク
Claims (7)
- 第1の基板の一方の面上に、材料層を形成し、
前記第1の基板の一方の面と第2の基板の被成膜面とを対向させて配置し、
前記第1の基板の他方の面側から光を照射し、
前記第2の基板の前記被成膜面に膜を形成する成膜方法であって、
前記第1の基板の一方の面と前記材料層との間に、光吸収層を有し、
前記材料層は、複数の成膜材料及び高分子化合物を有し、
前記膜は、前記複数の成膜材料を有し、
前記複数の成膜材料及び前記高分子化合物は、下記数式(1)を満たすことを特徴とする成膜方法。
- 請求項1において、
前記光吸収層は、島状またはストライプ状であることを特徴とする成膜方法。 - 請求項1において、
前記第1の基板と前記光吸収層との間に、開口部を有する反射層を有することを特徴とする成膜方法。 - 請求項3において、
前記反射層と前記光吸収層との間に、前記反射層の開口部と重なる位置に開口部を有する断熱層を有することを特徴とする成膜方法。 - 請求項1乃至請求項4のいずれか一項において、
前記光吸収層と前記材料層との間に、保護層を有することを特徴とする成膜方法。 - 請求項1乃至請求項5のいずれか一項において、
前記高分子化合物としてシクロオレフィンポリマーを用いることを特徴とする成膜方法。 - 請求項1乃至請求項6のいずれか一項において、
前記光は、レーザ発振装置、フラッシュランプ又はハロゲンランプから照射されることを特徴とする成膜方法。
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