JP5305293B2 - ホローカソードプラズマを利用した基板処理装置 - Google Patents
ホローカソードプラズマを利用した基板処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 140
- 238000000034 method Methods 0.000 claims description 103
- 238000002347 injection Methods 0.000 claims description 15
- 239000007924 injection Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 210000002381 plasma Anatomy 0.000 description 111
- 239000007789 gas Substances 0.000 description 81
- 230000000694 effects Effects 0.000 description 13
- 150000002500 ions Chemical class 0.000 description 10
- 150000003254 radicals Chemical class 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000004380 ashing Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 238000009616 inductively coupled plasma Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 oxygen radicals Chemical class 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32596—Hollow cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32633—Baffles
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- Condensed Matter Physics & Semiconductors (AREA)
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Description
によって放電させてプラズマを生成する第1プラズマ生成部と、前記第1プラズマ生成部を通過したガスの密度を均一にする第2プラズマ生成部とを含む。
また、ホローカソード及びバッフルの噴射口によって、2回、プラズマが生成されるので、均一で高密度のプラズマを提供することができる。さらに、広い領域にかけて、均一なプラズマが提供されるので、大面積の半導体プロセスに適用することができる。
か一つでコーティングされる。
110、210、310、410、510 プロセスチャンバ
120、220、320、420、520 ガス供給部
130、230、330、430、530 基板支持部
140、240、340、440、540 ホローカソード
150、250、350、450 バッフル
260、360、460、560 下部電極
Claims (12)
- 内部に基板処理プロセスが実行される空間が設けられ、ガスの排気のための排気口が形成されたプロセスチャンバと、
前記プロセスチャンバ内部にガスを供給するガス供給部と、
前記プロセスチャンバの内部に位置して基板を支持する基板支持部と、
前記プロセスチャンバの内部に位置して底面にプラズマが生成される複数の下側凹部が形成されたホローカソードと、
前記ホローカソードの下方に位置して複数の噴射口が形成されたバッフルと、
前記ホローカソードに電力を供給する電力供給源と、を含み、
前記ホローカソードには、前記下側凹部の上端から延びて該ホローカソードの上面まで貫通形成された流入ホールが設けられ、
前記流入ホールは、前記下側凹部に向かって細くなっており、
前記下側凹部のうち、一部のみに前記流入ホールが設けられ、
前記下側凹部のうちで、前記流入ホールが設けられていない下側凹部は、前記流入ホールが設けられた下側凹部の間に配置されていることを特徴とするホローカソードプラズマを利用した基板処理装置。 - 前記下側凹部のうちで、前記流入ホールが設けられた下側凹部は、前記流入ホールが設けられていない下側凹部の間に配置されていることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記基板支持部には、下部電極が設けられており、
前記電力供給源は、前記ホローカソード、下部電極及びバッフルのうちの少なくとも一つに電力を供給することを特徴とする請求項1又は2に記載のホローカソードプラズマを利用した基板処理装置。 - 前記ホローカソード及び下部電極にはそれぞれ、前記電力供給源が接続され、
前記バッフルは、接地されていることを特徴とする請求項3に記載のホローカソードプラズマを利用した基板処理装置。 - 前記ホローカソードは、前記プロセスチャンバ内の上部に位置し、
前記バッフルは、前記ホローカソードの下方に位置し、
前記ガス供給部は、前記プロセスチャンバの側面に位置し、前記ホローカソードと前記バッフルの間にガスを供給し、
前記基板支持部は、前記バッフルの下方に位置することを特徴とする請求項4に記載のホローカソードプラズマを利用した基板処理装置。 - 前記ガス供給部は、前記プロセスチャンバの上部に位置し、
前記ホローカソードは、前記ガス供給部の下方に位置し、
前記バッフルは、前記ホローカソードの下方に位置し、
前記基板支持部は、前記バッフルの下方に位置することを特徴とする請求項4に記載のホローカソードプラズマを利用した基板処理装置。 - 前記下側凹部の断面積は、前記流入ホールの断面積よりも広いことを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記流入ホールは、断面が円形であり、直径が0.5〜3mmであることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記流入ホールは、上部の断面積が下部の断面積よりも広くなるテーパ形状となっていることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記下側凹部は、下部の断面積が上部の断面積よりも広くなるテーパ形状となっていることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記下側凹部は、断面が円形であり、直径が1〜10mmであり、高さが直径の1〜2倍であることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
- 前記ホローカソードは、酸化膜、窒化膜及び誘電体コーティングのうち何れか一つでコーティングされていることを特徴とする請求項1に記載のホローカソードプラズマを利用した基板処理装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2008-0067664 | 2008-07-11 | ||
KR1020080067664A KR100978859B1 (ko) | 2008-07-11 | 2008-07-11 | 할로우 캐소드 플라즈마 발생장치 및 할로우 캐소드플라즈마를 이용한 대면적 기판 처리장치 |
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JP2010021140A JP2010021140A (ja) | 2010-01-28 |
JP5305293B2 true JP5305293B2 (ja) | 2013-10-02 |
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US (2) | US20100006226A1 (ja) |
JP (1) | JP5305293B2 (ja) |
KR (1) | KR100978859B1 (ja) |
TW (1) | TWI427669B (ja) |
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2008
- 2008-07-11 KR KR1020080067664A patent/KR100978859B1/ko active IP Right Grant
-
2009
- 2009-06-05 US US12/457,280 patent/US20100006226A1/en not_active Abandoned
- 2009-06-05 TW TW098118844A patent/TWI427669B/zh not_active IP Right Cessation
- 2009-06-22 JP JP2009147707A patent/JP5305293B2/ja not_active Expired - Fee Related
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2013
- 2013-05-01 US US13/874,891 patent/US20130240492A1/en not_active Abandoned
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7208949B2 (ja) | 2020-05-22 | 2023-01-19 | 水ing株式会社 | アンモニア態窒素含有希釈対象物の希釈処理方法及び希釈処理装置 |
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Publication number | Publication date |
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KR100978859B1 (ko) | 2010-08-31 |
US20130240492A1 (en) | 2013-09-19 |
TWI427669B (zh) | 2014-02-21 |
TW201009882A (en) | 2010-03-01 |
JP2010021140A (ja) | 2010-01-28 |
KR20100007160A (ko) | 2010-01-22 |
US20100006226A1 (en) | 2010-01-14 |
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