JP5294451B2 - Seating distance determination method and apparatus - Google Patents
Seating distance determination method and apparatusInfo
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Abstract
Description
本発明は、検出したい物体との距離を短時間に判定し、尚且つ高精度な検出を行うことができる着座距離判定装置に関し、更に詳しくは、ワークなどの寸法精度、着座面への密着度や物体の有無(例:ドリル刃先の有無検出)をエアにより検出することで、耐環境性(耐熱、耐水性、耐粉塵)に優れ、安定して検出することができるもので、主として、切削液、粉塵、金属粉などが多い所での検出(工作機械、プレス機械、鋳造機械、成形機、製材機、その他各種自動化装置)、 非接触検出が必要な装置での検出(製造機械、ガラス加工機、プラスチック成形機など)、 耐環境性(耐熱、耐水性)が必要な装置での検出(鉄鋼プラント、タイヤ成形機、洗浄機など)寸法精度の自動判定(工作機械、研摩機、分別機、電気(電子)部品加工など)などの技術分野で使用される着座距離判定方法とその装置に関する。 The present invention relates to a seating distance determination device capable of determining a distance from an object to be detected in a short time and performing highly accurate detection, and more specifically, dimensional accuracy of a workpiece or the like, and the degree of adhesion to a seating surface. By detecting the presence or absence of an object (eg, presence or absence of a drill edge) with air, it has excellent environmental resistance (heat resistance, water resistance, dust resistance) and can be detected stably. Detection in places where there is a lot of liquid, dust, metal powder, etc. (machine tools, press machines, casting machines, molding machines, lumber machines, and other various automation equipment), detection in equipment that requires non-contact detection (manufacturing machines, glass Processing machines, plastic molding machines, etc.) Detection with equipment that requires environmental resistance (heat resistance, water resistance) (steel plant, tire molding machine, washing machine, etc.) Automatic determination of dimensional accuracy (machine tools, sanding machines, sorting) Machine, electrical (electronic) parts processing, etc.) Seating distance determination methods used in any technical field and its equipment.
従来、斯かる着座距離判定装置としては、例えば、検出したい物体の面に空気が通るオリフィスを設け、このオリフィスより圧縮空気を流し、被検出物との距離によって発生する背圧を圧力検出器で圧力の上昇値の違いを測定し、被検出物との距離の違いを判定していた(特許文献1及び2参照)。
しかしながら、上述した従来の着座距離判定装置にあっては、例えば、披検出物までの距離が10μm以下の短い距離になってしまうと、背圧が上昇完了するまでに多くの時間が必要になり距離を判別するのに時間がかかってしまうといった問題があり、また、検出面に用意した検出オリフィスまでの配管が長く配管径が太いほど、圧力上昇に時間がかかり判定に時間がかかっていた。 However, in the conventional seating distance determination device described above, for example, if the distance to the object to be detected becomes a short distance of 10 μm or less, a lot of time is required until the back pressure finishes rising. There is a problem that it takes time to determine the distance, and the longer the pipe to the detection orifice prepared on the detection surface is, the longer the pipe diameter is, and the longer the pressure rises, the longer the determination takes.
更に、圧力の上昇による背圧の違いにより着座距離を検出する場合、背圧の変化の傾きは時間と共に変化してしまうので、判定時の誤差が生じ易く、特に判定する検出距離が短い場合(例えば、10μm以下のような場合)安定して検出することはできなかった。 Furthermore, when the seating distance is detected due to a difference in back pressure due to an increase in pressure, the inclination of the change in back pressure changes with time, so that an error in determination is likely to occur, and particularly when the detection distance to be determined is short ( For example, in the case of 10 μm or less, stable detection could not be performed.
また、検出距離の微調整のために、検出オリフィスとは別の場所に一定の微小流量を大気に放出することで調整を行うこともあり、空気の無駄な消費もあった。 Further, in order to finely adjust the detection distance, the adjustment may be performed by discharging a constant minute flow rate to the atmosphere at a place different from the detection orifice, and there is a wasteful consumption of air.
本発明はこのような従来の問題点に鑑みてなされたもので、検出したい物体との距離を短時間に判定することができると共に、仮令、判定する検出物と披検出物までの距離が短い時(10μm以下)でも安定して高精度な検出を行うことができる着座距離判定方法とその装置を提供することを目的としたものである。 The present invention has been made in view of such a conventional problem, and can determine the distance from the object to be detected in a short time, and the distance between the detected object to be detected and the detected object is short. It is an object of the present invention to provide a seating distance determination method and apparatus capable of performing stable and highly accurate detection even at times (10 μm or less).
上述の如き従来の問題点を解決し、所期の目的を達成するため本発明の要旨とする構成は、検出面のオリフィスから空気を流出させ、被検出物が着座した際に供給空気を止める第1行程と、被検出物との距離による圧力変化を測定する第2工程と、圧力が低下し始めた圧力Pから一定時間Tが経過した後の圧力P''までの圧力変化量△Pを測定し及び/又はこの時間Tと圧力変化量△Pにより圧力変化の傾きを求める第3工程と、予め測定しておいた検出したい距離の傾きと比較して合格範囲か不合格範囲かを比較し判定する第4工程とを有する着座距離判定方法に存する。 In order to solve the conventional problems as described above and achieve the intended purpose, the structure of the present invention is to cause the air to flow out from the orifice of the detection surface and stop the supply air when the object to be detected is seated. The second step of measuring the pressure change due to the distance between the first step and the object to be detected, and the pressure change ΔP from the pressure P at which the pressure starts to drop to the pressure P ″ after a certain time T has elapsed. And / or the third step of obtaining the slope of the pressure change by the time T and the pressure change amount ΔP, and comparing with the slope of the distance to be detected which has been measured in advance, whether the pass range or the fail range. The present invention resides in a seating distance determination method having a fourth step of comparing and determining.
また、前記第3工程は、圧力変化量△Pのみを比較して若しくは圧力が低下し始めた圧力Pから圧力が低下した圧力値P1までの時間の変化量△Tで比較して圧力変化の傾きを求めても良い。 In the third step, only the pressure change amount ΔP is compared or the pressure change is compared with the time change amount ΔT from the pressure P at which the pressure starts to decrease to the pressure value P1 at which the pressure decreases. The inclination may be obtained.
更に、前記第3工程は、検出オリフィスから流出する圧縮空気が音速領域の間、略一定の傾きで圧力が低下することを利用して圧力変化量△Pを測定するのが良い。 Further, in the third step, it is preferable to measure the pressure change ΔP by utilizing the fact that the pressure of the compressed air flowing out from the detection orifice decreases with a substantially constant inclination during the sound velocity region.
また、前記第4工程は、被検出物との距離が小さいほど圧力変化の傾きが小さく、距離が大きいほど圧力変化の傾きが大きくなる特性を用いて合格範囲か否かを比較し判定するのが良い。 In the fourth step, the determination is made by comparing and determining whether the pressure range is acceptable or not by using the characteristic that the inclination of the pressure change is small as the distance to the object to be detected is small and the inclination of the pressure change is large as the distance is large. Is good.
更に、必要な情報や第4工程で得た判定結果を表示する表示手段及び/又はオープンコレクタ出力やリレー出力で外部に判定結果を出力する外部出力手段を備えるのが良い。 Furthermore, it is preferable to provide a display means for displaying necessary information and a judgment result obtained in the fourth step and / or an external output means for outputting the judgment result to the outside by an open collector output or a relay output.
また、前記表示手段は、予めマイクロメータによって各隙間での傾きを記憶しておき、その傾きと第3工程で判定した傾きを比較することで、ダイレクトに現在の着座距離が何ミリ、何ミクロンという結果を表示するのが良い。 In addition, the display means stores in advance the inclination at each gap with a micrometer, and compares the inclination with the inclination determined in the third step, so that the current seating distance can be directly measured in how many millimeters and how many microns. It is good to display the result.
本発明は上述のように構成され、特に、検出物と披検出物までの距離が短い時(10μm以下)や配管の長さが長く、配管径が太くなるほど、被検出物までの距離を判定するのに時間がかかってしまう問題を、短時間に判定できるといった効果を奏するものであり、また、供給する圧縮空気の圧力が検出中に変動したとしても検出精度に影響を及ぼさずに判定を維持することができる。 The present invention is configured as described above. In particular, when the distance between the detected object and the detected object is short (less than 10 μm) or the pipe is long and the pipe diameter is thick, the distance to the detected object is determined. It is effective to be able to determine the problem that takes time to do in a short time, and even if the pressure of the compressed air to be supplied fluctuates during detection, the detection accuracy is not affected. Can be maintained.
検出圧力を設定するレギュレータを外部又は内部に設け、供給空気を遮断するための2ポート電磁弁を設け、この二次側に圧力変換器を設ける。検出物の検出面に用意した検出オリフィスまでの間の配管を行い、検出オリフィスより被検出物に対し空気を流出させる。配管の内部に空気温度センサ、外部に温度センサを設けて圧力変換器の温度による誤差に対し補正をかけると共に、必要な情報や判定した結果を表示させるための表示手段及び/又は判定結果を外部に出力する外部出力手段を備えるのが良い。 A regulator for setting the detection pressure is provided outside or inside, a 2-port solenoid valve for shutting off the supply air is provided, and a pressure converter is provided on the secondary side. Piping between the detection orifice prepared on the detection surface of the detection object is performed, and air flows out from the detection orifice to the detection object. An air temperature sensor is installed inside the piping, and a temperature sensor is installed outside to correct errors due to the temperature of the pressure transducer, and display means and / or judgment results to display necessary information and judgment results It is preferable to provide an external output means for outputting to the output.
次に、本発明に係る着座距離判定装置の実施の一例を図面を参照しながら説明する。図中Aは、本発明に係る着座距離判定装置であり、この着座距離判定装置Aは、図1に示すように、検出圧力を設定するレギュレータ1を内部又は外部に設け、供給空気を遮断するための2ポート電磁弁2を設け、この二次側に圧力変換器(圧力センサ・圧力スイッチ・圧力トランデューサなど)3を設け、2ポート電磁弁2と圧力変換器3を制御する制御回路を設ける。検出物の検出面に用意した検出オリフィスまでの間の配管を行い、検出オリフィス5より被検出物に対し空気を流出させる。尚、2ポート電磁弁2はノーマルオープン又はノーマルクローズのどちらを使用しても良いが、この場合制御回路上で検出を行なう時に空気を遮断するよう制御すれば良い。
Next, an example of implementation of the seating distance determination apparatus according to the present invention will be described with reference to the drawings. In the figure, A is a seating distance determination device according to the present invention. As shown in FIG. 1, this seating distance determination device A is provided with a
尚、配管の内部に空気温度センサ、外部に温度センサを設けて圧力変換器3の温度による誤差に対し補正をかけても良い。
Note that an error due to the temperature of the
次に、本発明に係る着座距離判定装置の第2実施例を図2を参照しながら説明する。検出物周辺の切屑やゴミや水・油などのノズル目詰まりを防ぐために、検出圧力よりも低いブロー圧力を流出しておき、被検出物を検出する時に検出圧力兼高圧ブロー側の2ポート電磁弁をONにした状態で2ポート電磁弁2をON/OFFさせて検出圧力を流出せしめる。
Next, a second embodiment of the seating distance determination apparatus according to the present invention will be described with reference to FIG. In order to prevent clogging of nozzles such as chips, dust, water, oil, etc. around the detection object, a blow pressure lower than the detection pressure is allowed to flow out, and when detecting the detection object, the 2-port electromagnetic on the detection pressure and high pressure blow side With the valve turned on, the 2-
これにより、常時検出圧力をかける必要がなく低圧ブローにより目詰まりも防止でき、待機中の空気のエネルギーを最小限に抑えることができる。また、切屑やゴミや水など汚れがひどく、低圧ブローでは十分でない場合に、例えば、検出圧力を高圧ブローに必要な圧力にすることで、高圧ブロー兼検出圧力として測定することもできる。図2(a)は低圧ブローのレギュレータ1と検出圧力兼高圧ブロー用2ポート電磁弁6を設けた場合の回路例。図2(b)は低圧ブローにレギュレータを用いずに低流量可変オリフィスを設けた場合の回路例。図2(c)は2ポート電磁弁2がノーマルクローズの場合の一例を示す。
Thereby, it is not necessary to always apply the detection pressure, and clogging can be prevented by low pressure blow, and the energy of air during standby can be minimized. Further, when dirt such as chips, dust or water is severe and low pressure blow is not sufficient, for example, by setting the detection pressure to a pressure necessary for high pressure blow, it can be measured as a high pressure blow / detection pressure. FIG. 2A shows a circuit example in which a low
次に、本発明の着座距離測定方法の第1行程について説明する。初めに、検出面と被検出物の距離を判定したい検出距離に設定し、検出物のオリフィスから空気を流出させ、被検出物が着座した際に、供給空気を一次的に遮断する。遮断時間は、約200msec〜500msec間遮断し、その後は遮断を解除し検出圧力Pに戻る。この遮断時に、二次側の圧力低下が早い条件の時に、最低でも必要な圧力値で遮断信号を解除するのが良い。 Next, the 1st process of the seating distance measuring method of this invention is demonstrated. First, the distance between the detection surface and the object to be detected is set to a detection distance to be determined, air is allowed to flow out from the orifice of the object to be detected, and the supply air is temporarily blocked when the object to be detected is seated. The shut-off time is shut off for about 200 msec to 500 msec, after which the shut-off is released and the detected pressure P is restored. At the time of this interruption, it is preferable to release the interruption signal at a necessary pressure value at the minimum when the secondary side pressure drop is fast.
次に、第2工程について説明する。被検出物との距離と配管ボリューム(配管径と配管長さ)により圧力低下度合いの圧力変化を測定する。圧力の変化は圧力の微小な変化を検出できるようにするため、圧力変換器(圧力センサ・圧力スイッチ・圧力トランデューサなど)のアナログ信号により得るのが望ましい。 Next, the second step will be described. The pressure change of the degree of pressure drop is measured by the distance to the object to be detected and the pipe volume (pipe diameter and pipe length). The change in pressure is preferably obtained by an analog signal of a pressure transducer (a pressure sensor, a pressure switch, a pressure transducer, etc.) so that a minute change in pressure can be detected.
次に、第3工程について説明する。検出圧力を加えて、2ポート電磁弁により空気を遮断すると、圧力が低下し始めるので、この圧力が低下し始めた圧力Pから一定時間Tが経過した後の圧力P'までの圧力変化量△Pを測定し、この圧力変化量△Pと時間Tにより傾きαを求める。この場合、判定結果を毎回T秒後に算出し得ることが出来るので、検出距離の判定時間を一定にすることが可能である。 Next, the third step will be described. When the detected pressure is applied and the air is shut off by the 2-port solenoid valve, the pressure starts to decrease. Therefore, the pressure change amount Δ from the pressure P at which this pressure has started to the pressure P ′ after a certain time T has elapsed Δ P is measured, and the inclination α is obtained from the pressure change ΔP and time T. In this case, the determination result can be calculated every T seconds, so that the detection time determination time can be made constant.
また、より検出距離の精度を得るためには、2ポート電磁弁による応答時間の誤差による影響を無くすために、圧力が低下し始めた圧力Pより例えば数%低下後の圧力P1を基準とし、この基準の圧力P1からある一定の時間T1 経過後の圧力P1'までの圧力変化量△P1を求め、次工程で、時間T1と圧力変化量△P1により傾きαを求めるのが良い。尚、圧力変化量と時間の積による面積を求め比較しても良い。 In addition, in order to obtain more accurate detection distance, in order to eliminate the influence of the response time error due to the 2-port solenoid valve, for example, based on the pressure P1 after a few percent drop from the pressure P at which the pressure started to drop, It is preferable to obtain a pressure change ΔP1 from the reference pressure P1 to a pressure P1 ′ after a certain time T1 has elapsed, and obtain a slope α from the time T1 and the pressure change ΔP1 in the next step. Note that an area based on the product of the pressure change amount and the time may be obtained and compared.
また、簡略化する場合は、この圧力変化量△P又は△P1で比較しても良い。更に、圧力が低下し始めた圧力Pから、圧力が低下した圧力値P1までの時間の変化量△T又は圧力が低下した圧力値Pから、圧力が低下した圧力値P1とさらに圧力が低下した圧力値P2までの時間の変化量△Tで比較しても良い。 In the case of simplification, the pressure change amount ΔP or ΔP1 may be used for comparison. Furthermore, from the pressure change P from the pressure P at which the pressure began to decrease to the pressure value P1 at which the pressure decreased, or from the pressure value P at which the pressure decreased, the pressure value P1 at which the pressure decreased and the pressure further decreased. The comparison may be made by the amount of change ΔT over time until the pressure value P2.
ここで求めた傾きαが小さいほど検出面と被検出物との隙間距離が狭く、大きいほど隙間距離が長いことを利用し、次工程で着座距離を判別する。 Using the fact that the gap distance between the detection surface and the object to be detected is narrower as the inclination α obtained here is smaller and the gap distance is longer as it is larger, the seating distance is determined in the next step.
次に、第4工程について説明する。前工程で求めた傾きαと、予め測定しておいた着座距離の傾きβと比較して合格範囲か不合格範囲かを比較し判定する。例えば、図5に示すように、合格として判定したい検出距離の状態に検出物を設定し圧力変化の傾きβ1を求めておく。次に不合格として判定したい検出距離の状態に設定し、圧力変化の傾きβ2を求める。この二つの傾きの中心値を判定基準の傾きβとし、第3工程で求めた検出面と被検出物との圧力変化の傾きαがこの基準の傾きβよりも大きいか小さいかを判定し着座距離を判別する。より簡易的に基準を決めたい場合は傾きβ1又は傾きβ2を求めたものを判定基準の傾きβと置いても良いが、合格判定の着座距離での微小な誤差による誤検出を防ぐために補正値を考慮するほうが良い。 Next, the fourth step will be described. The inclination α obtained in the previous step is compared with the inclination β of the seating distance measured in advance to determine whether the range is acceptable or not. For example, as shown in FIG. 5, the detected object is set in the state of the detection distance to be determined as acceptable and the pressure change gradient β1 is obtained. Next, it is set to the state of the detection distance to be determined as rejected, and the pressure change gradient β2 is obtained. The center value of these two inclinations is set as the inclination β of the determination reference, and it is determined whether the inclination α of the pressure change between the detection surface and the detected object obtained in the third step is larger or smaller than the reference inclination β. Determine the distance. In order to determine the reference more simply, the slope β1 or the slope β2 obtained may be set as the reference reference slope β. However, a correction value is used in order to prevent erroneous detection due to a minute error in the seating distance of the pass judgment. Should be considered.
また、検出面と被検出物の距離をマスターゲージやマイクロメータで隙間を作り、複数の判定値を記憶させることで、検出面と被検出物との距離を判定した結果の値と比較し検出距離を数値に置き換えて判定させることもできる。例えば、マイクロメータを検出面に密着した状態の0μmから1μmや10μmごとの隙間を作り、各隙間の判定値を記憶させていく。第3工程で得た傾きαとこの複数の判定値とを比較することで、着座距離が何μmかを数値で直接表すことができる。 In addition, the distance between the detection surface and the object to be detected is created with a master gauge or micrometer, and multiple determination values are stored, so that the distance between the detection surface and the object to be detected is compared with the result of the determination. It can also be determined by replacing the distance with a numerical value. For example, a gap of 0 μm to 1 μm or 10 μm with the micrometer being in close contact with the detection surface is created, and the determination value of each gap is stored. By comparing the inclination α obtained in the third step with the plurality of determination values, it is possible to directly express how many μm the seating distance is by a numerical value.
特に、判定精度を必要としない場合は、予め測定しておいた検出物までの配管径や長さとノズルの径、検出圧力等による条件での判定値を記憶しておき、この判定値との比較をさせることでおおよその着座距離を判定できる。 In particular, when judgment accuracy is not required, the judgment value under the conditions such as the pipe diameter and length up to the detected object, the nozzle diameter, the detection pressure, etc., which has been measured in advance, is stored. An approximate seating distance can be determined by making a comparison.
次に、第5工程について説明する。例えば、図7に示すように、圧力値P、傾きα、傾きβ、判定結果などを表示し、その他、必要な情報を表示部に出力し判定結果を外部に出力信号を出す。出力信号としてはオープンコレクタ出力やリレー出力やアナログ出力信号など外部に判定結果を出力することができる。 Next, the fifth step will be described. For example, as shown in FIG. 7, the pressure value P, the inclination α, the inclination β, the determination result, and the like are displayed, and other necessary information is output to the display unit, and the determination result is output to the outside. As an output signal, an open collector output, a relay output, an analog output signal, or the like can be output to the outside.
尚、本発明の着座距離判定方法及びその装置は、本実施例に限定されることなく、本発明の目的の範囲内で自由に設計変更し得るものであり、本発明はそれらの全てを包摂するものである。例えば、図6に示すように、検出箇所が複数ある場合で連式を構成する場合、検出物毎に2ポート電磁弁2と圧力変換器3を設けることで、各検出距離を個別に判定することが可能となる。
It should be noted that the seating distance determination method and apparatus of the present invention are not limited to this embodiment, and can be freely modified within the scope of the object of the present invention, and the present invention includes all of them. To do. For example, as shown in FIG. 6, when there are a plurality of detection points and a series is configured, each detection distance is individually determined by providing a 2-
また、システムの電気的な処理として、電磁弁を制御する機器は無接点(トランジスタ・SSR等)の物を用いても良い。有接点を用いても良いが有接点の場合、電磁弁を切り替える信号が無接点のものと比べて遅く応答時間が安定しない。 As an electrical process of the system, a non-contact (transistor, SSR, etc.) device may be used as the device for controlling the electromagnetic valve. A contact point may be used, but in the case of a contact point, the signal for switching the solenoid valve is slower than the contactless one and the response time is not stable.
そのため、最終的な検出判定時間が数十msec無接点に比べて遅くなる。検出距離になったら、電磁弁を約200msec〜500msecほどの短時間でON/OFF制御させる。この時、検出圧力が、数%(約0.1〜1%)低下した圧力から一定の時間(例えば100〜150msec間)の圧力変化による傾きの違いを算出することにより、電磁弁の応答時間の誤差に影響することなく検出面と被検出物の距離を短時間に判別することができる。 For this reason, the final detection determination time is delayed as compared with the contactlessness of several tens of milliseconds. When the detection distance is reached, the solenoid valve is ON / OFF controlled in a short time of about 200msec to 500msec. At this time, the error in the response time of the solenoid valve is calculated by calculating the difference in slope due to the pressure change for a certain period of time (for example, between 100 and 150 msec) from the pressure where the detected pressure has decreased by several% (about 0.1 to 1%). The distance between the detection surface and the object to be detected can be determined in a short time without affecting.
また、より高精度に検出判定を行いたい場合は、検出圧力から低下する圧力P1を固定することで、同じ圧力からの変化量を求められるので、より高精度の検出が可能となる。 In addition, when it is desired to perform detection determination with higher accuracy, the amount of change from the same pressure can be obtained by fixing the pressure P1 that decreases from the detection pressure, so that detection with higher accuracy is possible.
更に、制御をより簡略化させるためには、2ポート電磁弁を遮断した時間から、約40msec後から200msec間の圧力の変化による傾きを算出しても精度よく判定をすることが可能である。 Furthermore, in order to further simplify the control, it is possible to make a precise determination even by calculating a slope due to a change in pressure between about 40 msec and 200 msec from the time when the 2-port solenoid valve is shut off.
この判定方法の場合、検出距離の判定時間を一定の時間にすることができる。しかし、圧力の変動や長期間放置後の一回目の検出結果が安定しないことがあるので、圧力変動を受けにくいように精度の良いレギュレータや長期間放置後は予め数回電磁弁を開閉させ初期運転を行う必要がある。 In the case of this determination method, the detection distance determination time can be set to a fixed time. However, because the first detection result after pressure fluctuation or long-term standing may not be stable, a highly accurate regulator or the solenoid valve is opened and closed several times in advance after leaving it for a long time to prevent pressure fluctuation. It is necessary to drive.
また、より高精度にしたい場合は、センサの温度変化による特性誤差を相殺させるために、空気通路内部又は外部の空気温度の結果をフィードバックして、補正させることでより高精度に着座距離を検出することができる。 For higher accuracy, the seating distance can be detected more accurately by feeding back and correcting the results of the air temperature inside or outside the air passage in order to cancel out the characteristic error caused by the temperature change of the sensor. can do.
例えば、本実施例で示す検出方式である圧力変化を検出する方法と、従来の方式である背圧を検出する方法を併用することにより、短時間に判定した後も従来の方法で引き続き検出距離を確認することで、先に検出した判定結果に誤りがあるかないかの再判定をすることにより、誤検出を防ぐと共に、より確実な検出を行うことができる。 For example, by using the method for detecting pressure change, which is a detection method shown in the present embodiment, and the method for detecting back pressure, which is a conventional method, the detection distance continues using the conventional method even after a short time determination. By re-determining whether or not there is an error in the previously detected determination result, erroneous detection can be prevented and more reliable detection can be performed.
1 レギュレータ
2 2ポート電磁弁
3 圧力変換器
4 配管
5 検出オリフィス
6 2ポート電磁弁(検出圧力兼高圧ブロー用)
1
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