JP5275661B2 - 自己較正型加速度計 - Google Patents
自己較正型加速度計 Download PDFInfo
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- JP5275661B2 JP5275661B2 JP2008086549A JP2008086549A JP5275661B2 JP 5275661 B2 JP5275661 B2 JP 5275661B2 JP 2008086549 A JP2008086549 A JP 2008086549A JP 2008086549 A JP2008086549 A JP 2008086549A JP 5275661 B2 JP5275661 B2 JP 5275661B2
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- Prior art keywords
- accelerometer
- sensing element
- mass
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- bias
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Description
加速度計の出力は、2006年2月28日に出願された米国特許出願第11/364,316号に記載されたリアルタイムのバイアス評価アルゴリズムを用いたデジタル信号プロセッサにおいて処理される。
また、MEMS3軸平面加速度計も、2004年12月13日に出願された米国特許出願第11/010,588号に記載されている。
パルス幅変調された電荷制御サーボを用いて静電力再平衡化されているプルーフマスは、米国特許第5,142,921号に記載されている。付勢方法は、"Bi-stable Micro Actuator and Optical Switch"と題する米国特許第6,591,027号に記載されている。質量変調の原理は、"High Accuracy Accelerometer"と題する米国特許第4,599,896号に記載されている。
MeasB(i)=Win(i)+/−BiasB
第1及び第2の間隔に関しては、次の通りである。
MeasA(1)=Win(1)+BiasA
MeasB(1)=Win(1)+BiasB
MeasA(2)=Win(2)−BiasA
MeasB(2)=Win(2)+BiasB
Claims (6)
- 感知要素を備えたバイアスを有する加速度計であって、感知要素は、
外側のプレートと、
該外側のプレートに2つのフレクシュアによって支持されたプルーフマスと、
該プルーフマス内に吊され、感知要素の質量中心を、アクチュエータからの力を供給することによって、第1の安定的位置と第2の安定的位置との間で移動させる二次質量であって、第1及び第2の安定的位置は、感知要素の感知軸である入力軸と垂直の平面上にあり、該入力軸は、第1及び第2の安定的位置の間にあり、感知要素の質量中心を移動させることにより、動的な動作条件の下で加速度計のバイアスを連続的に測定し零化する自己較正機構を有効にする二次質量と、
を備えていることを特徴とする加速度計。 - 請求項1記載の加速度計において、加速度下において、前記感知要素は、質量中心が第1の安定位置にある場合に、入力軸と直交する感知要素の支持中心線を中心にして時計回りに、第2の安定位置にある場合に、支持中心線を中心にして反時計回りに回転可能であることを特徴とする加速度計。
- 請求項1又は2記載の加速度計において、二次質量は、座屈ビーム・フレクシュアによってプルーフマス内に支持されており、二次質量は、アクチュエータによって力が印加されたときに、感知要素の支持中心線に平行に移動可能であることを特徴とする加速度計。
- 請求項3記載の加速度計において、アクチュエータは温度アクチュエータであり、座屈ビーム・フレクシュアにおける圧縮力を低減させることにより、二次質量が第1及び第2の安定位置の間で移動可能とされるよう構成されていることを特徴とする加速度計。
- 請求項1〜4いずれかに記載の加速度計において、入力軸は感知要素の平面に垂直であり、第1及び第2の安定位置が存在する平面が、感知要素の平面に平行であることを特徴とする加速度計。
- 請求項1〜4いずれかに記載の加速度計において、入力軸は感知要素の平面に平行であり、第1及び第2の安定位置が存在する平面が、感知要素の平面と垂直であることを特徴とする加速度計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/729,007 | 2007-03-28 | ||
US11/729,007 US7640786B2 (en) | 2007-03-28 | 2007-03-28 | Self-calibrating accelerometer |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013103643A Division JP5639685B2 (ja) | 2007-03-28 | 2013-05-16 | 自己較正型加速度計 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008241715A JP2008241715A (ja) | 2008-10-09 |
JP5275661B2 true JP5275661B2 (ja) | 2013-08-28 |
Family
ID=39561777
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008086549A Expired - Fee Related JP5275661B2 (ja) | 2007-03-28 | 2008-03-28 | 自己較正型加速度計 |
JP2013103643A Expired - Fee Related JP5639685B2 (ja) | 2007-03-28 | 2013-05-16 | 自己較正型加速度計 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013103643A Expired - Fee Related JP5639685B2 (ja) | 2007-03-28 | 2013-05-16 | 自己較正型加速度計 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7640786B2 (ja) |
EP (1) | EP1975631B1 (ja) |
JP (2) | JP5275661B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014077786A (ja) * | 2012-10-08 | 2014-05-01 | Northrop Grumman Systems Corp | 加速度計システムの動的な自己較正 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE528404C2 (sv) * | 2004-10-20 | 2006-11-07 | Imego Ab | Sensorarrangemang |
US9062971B2 (en) * | 2008-03-06 | 2015-06-23 | Texas Instruments Incorporated | E-compass, tilt sensor, memory and processor with coarse detilting procedure |
US7980115B2 (en) * | 2008-05-30 | 2011-07-19 | Northrop Grumman Guidance and Electronic Co, Inc. | Self-calibrating laser semiconductor accelerometer |
US20110077891A1 (en) * | 2009-09-25 | 2011-03-31 | Sirf Technology Holdings, Inc. | Accelerometer-only calibration method |
DE102011006427A1 (de) * | 2011-03-30 | 2012-10-04 | Robert Bosch Gmbh | Drehratensensor und Verfahren zur Kalibrierung eines Drehratensensors |
US9229026B2 (en) | 2011-04-13 | 2016-01-05 | Northrop Grumman Guaidance and Electronics Company, Inc. | Accelerometer systems and methods |
WO2012153335A1 (en) * | 2011-05-09 | 2012-11-15 | Ramot At Tel-Aviv University Ltd. | Bistable force and/or acceleration sensor |
US8371882B1 (en) * | 2011-08-03 | 2013-02-12 | Tyco Electronics Corporation | Straddle mount connector for a pluggable transceiver module |
US9341646B2 (en) | 2012-12-19 | 2016-05-17 | Northrop Grumman Guidance And Electronics Company, Inc. | Bias reduction in force rebalanced accelerometers |
US10352960B1 (en) * | 2015-10-30 | 2019-07-16 | Garmin International, Inc. | Free mass MEMS accelerometer |
ITUA20162172A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento |
US11525941B2 (en) | 2018-03-28 | 2022-12-13 | Halliburton Energy Services, Inc. | In-situ calibration of borehole gravimeters |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3241355A (en) * | 1963-05-31 | 1966-03-22 | Honeywell Inc | Accelerometer calibration means |
US4599896A (en) * | 1983-02-22 | 1986-07-15 | Litton Systems, Inc. | High accuracy accelerometer |
US5142921A (en) | 1990-10-29 | 1992-09-01 | Litton Systems, Inc. | Force balance instrument with electrostatic charge control |
US5886259A (en) * | 1996-04-01 | 1999-03-23 | Alliedsignal Inc. | Axis aligned rate and acceleration sensor |
JP2000338129A (ja) * | 1999-03-19 | 2000-12-08 | Ngk Insulators Ltd | 加速度センサ素子の感度較正方法 |
DE10060091B4 (de) * | 2000-12-02 | 2004-02-05 | Eads Deutschland Gmbh | Mikromechanischer Inertialsensor |
US6591027B2 (en) | 2001-02-27 | 2003-07-08 | Litton Systems, Inc. | Bi-stable micro-actuator and optical switch |
US6701786B2 (en) * | 2002-04-29 | 2004-03-09 | L-3 Communications Corporation | Closed loop analog gyro rate sensor |
EP1711836A1 (en) | 2004-01-07 | 2006-10-18 | Northrop Grumman Corporation | Coplanar proofmasses employable to sense acceleration along three axes |
US7073380B2 (en) * | 2004-02-17 | 2006-07-11 | Honeywell International, Inc. | Pyramid socket suspension |
US7066004B1 (en) * | 2004-09-02 | 2006-06-27 | Sandia Corporation | Inertial measurement unit using rotatable MEMS sensors |
US7103477B1 (en) * | 2005-08-08 | 2006-09-05 | Northrop Grumman Corporation | Self-calibration for an inertial instrument based on real time bias estimator |
-
2007
- 2007-03-28 US US11/729,007 patent/US7640786B2/en active Active
-
2008
- 2008-03-07 EP EP08102372.3A patent/EP1975631B1/en not_active Expired - Fee Related
- 2008-03-28 JP JP2008086549A patent/JP5275661B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-16 JP JP2013103643A patent/JP5639685B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014077786A (ja) * | 2012-10-08 | 2014-05-01 | Northrop Grumman Systems Corp | 加速度計システムの動的な自己較正 |
Also Published As
Publication number | Publication date |
---|---|
JP2008241715A (ja) | 2008-10-09 |
JP2013152253A (ja) | 2013-08-08 |
EP1975631B1 (en) | 2013-05-08 |
EP1975631A2 (en) | 2008-10-01 |
US20080236242A1 (en) | 2008-10-02 |
US7640786B2 (en) | 2010-01-05 |
JP5639685B2 (ja) | 2014-12-10 |
EP1975631A3 (en) | 2012-02-08 |
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