JP5237791B2 - ヘテロ接合太陽電池 - Google Patents
ヘテロ接合太陽電池 Download PDFInfo
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Description
本発明は、反転した幾何形状の層構造(invertierten Schichtstrukturgeometrie)を有するヘテロ接合太陽電池に関しており、p型又はn型ドーピング結晶半導体材料製のアブソーバー(吸収層)と、アブソーバー(吸収層)とは逆にドーピングされたアモルファス半導体材料製のエミッタと、アブソーバー(吸収層)とエミッタとの間のアモルファス半導体材料製の真性(高純度)中間層と、アブソーバー(吸収層)の光と同じ方向の面上のカバー層と、少数荷電坦体(キャリア)を反射する表面電界を形成する層列と、並びに、アブソーバー(吸収層)の光と同じ方向の面上の最小の陰影面を備えた一方のオーミックコンタクト構造と、前記アブソーバー(吸収層)の光とは反対方向の面上の他方のオーミックコンタクト構造とを備えた層構造のヘテロ接合(コンタクト)太陽電池に関する。
結晶化シリコンとアモルファスシリコンを有するヘテロ接合太陽電池は、益々技術的な意義が増大しつつある。ヘテロ接合太陽電池の通常の構造については、例えば、K.Brendel他の刊行物I: "Interface properties of a-Si:H/c-Si heterostructures" (Annual Report 2003, Hahn-Meitner-lnstitut, 78/79) から公知である。結晶化したp型ドーピングシリコン(c−Si(p))及び微結晶シリコン(μc−Si)製の中央のアブソーバー(吸収層)の、光と同じ方向の面上に、水素と「合金」された、乃至、水素を増加したn型ドーピングアモルファスシリコン(a−Si:H(n+))製のエミッタ及び透明の導電性の酸化層(TCO)がカバー層としてフィンガ状のフロントコンタクトの下側に設けられている。アブソーバー(吸収層)の光と同じ側の表面上のエミッタは、それに相応してアブソーバー(吸収層)に最早達することができない放射を吸収する。光と反対側の下側の面上には、アブソーバー(吸収層)と裏側コンタクトの全面との間に、水素を増加したアモルファスp型高ドーピングされたアモルファスシリコン層(a−Si:H(p+))が、小数荷電坦体(キャリア)を反射する表面電界(裏面電界:Back Surface Field:BSF)を形成するために設けられている。
HIT太陽電池と関連して詳細に上述したような、冒頭に記載したヘテロ接合太陽電池に基づいて、本発明の課題は、光の側の面上に、透明な導電性の電極(TOC)を設けないにも拘わらず、通常の幾何形状の層構造を備えた公知のヘテロ接合太陽電池に比肩し得る、太陽エネルギから電流を獲得する際の変換効率を提供するような、できる限り簡単に製造可能な、光学的な損失が僅かなヘテロ接合太陽電池用の幾何形状の層構造を提供することにある。簡単且つコスト上有利な製造方法で、できる限り僅かな材料、時間、特にエネルギを使って製造されたヘテロ接合太陽電池で、できる限り短いエネルギ回収期間(Energieruecklaufzeit)を達成する必要がある。
本発明の反転幾何形状の層構造を有するヘテロ接合太陽電池について、以下、図示の実施例を用いて詳細に説明する。
図1は、ヘテロ接合太陽電池の層構造の横断面図、
図2は、製造されたヘテロ接合太陽電池の暗特性及び明特性のダイアグラム、
図3は、図2のヘテロ接合太陽電池のスペクトル量子収量のダイアグラムである。
ARS 透明の反射防止膜
dAB アブソーバー(吸収層)の層厚
ddot ドーピングされたエミッタの層厚
di 真性中間層の層厚
DS カバー層
EM エミッタ
FSF 小数荷電坦体(キャリア)を反射する表面電界
HKS ヘテロジニアスなヘテロコンタクト太陽電池
IZS 真性中間層
i a−Si:H 真性アモルファスシリコン
KG コンタクト格子
LO 光の側の表面
LU 光と反対側の下側面
MS 金属層
nAB アブソーバー(吸収層)の光屈折率
nARS 反射防止膜の光学的屈折率
n c−Sin−n型ドーピングされた結晶シリコン
nL 空気の光学屈折率
OKS 上側のコンタクト構造
p a−Si:Hp p型ドーピングされたアモルファスシリコン
P 電位
PS パッシベーション層
eQA 外部量子効率
SD 電流密度
UKS 下側のコンタクト構造
Claims (7)
- ヘテロ接合太陽電池において、
該ヘテロ接合太陽電池は、
・ p型又はn型ドーピング結晶半導体材料製のアブソーバー(AB)と、
・ 前記アブソーバー(AB)とは逆の型でドーピングされたアモルファス半導体材料製の全面にわたるエミッタ(EM)とを有しており、
当該のエミッタ(EM)は、反転した層構造幾何形状で、アブソーバー(吸収層)(AB)の光側とは反対側の下側の面(LU)に配置されており、
さらに前記ヘテロ接合太陽電池は、
・ 前記アブソーバー(AB)と前記エミッタ(EM)との間の前記アモルファス半導体材料製の真性の中間層(IZS)と、
・ 前記アブソーバー(AB)の光側を向いた上側の面(LO)に設けられたただ1つのカバー層(DS)とを有しており、
当該のカバー層(DS)は、吸収材料に依存する材料選択により、透明の反射防止膜(ARS)としても、また前記アブソーバー(吸収層)(AB)のパッシベーション層(PS)としても形成されており、当該のパッシベーション層(PS)は、少数荷電坦体を反射する表面電界(FSF)として構成されており、
ただし前記のアブソーバー(AB)の光側を向いた上側面(LO)には、透明な導電性電極も、高濃度にドーピングされかつ当該上側面(LO)全面にわたる連続したSi-表面電界(FSF)の層も配置されてはおらず、
さらに前記ヘテロ接合太陽電池は、
・ 前記のアブソーバー(AB)の光側を向いた上側面(LO)に最小の陰影面を有するオーミックコンタクト構造(OKS)を有しており、
・ 前記のアブソーバー(AB)の光側を向いた上側面(LO)のオーミック構造(OKS)は、前記のカバー層(DS)を貫通しかつコンタクトフィンガ又はコンタクト格子として構成されており、
さらに前記ヘテロ接合太陽電池は、
・ 前記のアブソーバー(AB)の光側とは反対側を向いた下側面(LU)にオーミックコンタクト構造(UKS)を有しており、当該のオーミックコンタクト構造は、エミッタ(EM)全面に薄い平面状の金属層(MS)として構成されていることを特徴とするヘテロ接合太陽電池。 - 前記の透明なカバー層(DS)を貫通するコンタクト構造(OKS)の下側のアブソーバー(AB)内に荷電坦体を反射する領域(n+)が形成されている、
請求項1記載のヘテロ接合太陽電池。 - 前記アブソーバー(AB)は、n型ドーピング結晶シリコン(n c−Si)製であり、
前記エミッタ(EM)は、p型ドーピングアモルファスシリコン(p s−Si:H)製であり、
前記の真性の中間層(IZS)は、非ドーピングアモルファスシリコン(i a−Si:H)製である、
請求項1記載のヘテロ接合太陽電池。 - 前記のアブソーバー(AB)は、自己保持型のウエーハからなる、
請求項1から3迄の何れか1記載のヘテロ接合太陽電池。 - 前記のヘテロ接合太陽電池(HKS)の個々の層は、nmからμmの範囲の層厚でガラス基板に被着され、
当該のガラス基板は、前記のアブソーバー(AB)の光側とは反対側の下側面(LU)に配置されている、
請求項1から3までのいずれか1項に記載のヘテロ接合太陽電池。 - 前記のコンタクトフィンガ又はコンタクト格子(KG)は、銀(Ag)製であり、
前記の薄い平面状の金属層(MS)は金(Au)製である、
請求項1から5までのいずれか1項に記載のヘテロ接合太陽電池。 - 前記のカバー層(DS)は、窒化珪素(Si3N4)製でありかつほぼ70nmの厚さを有する、
請求項1から6迄の何れか1記載のヘテロ接合太陽電池。
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DE102005019225.4 | 2005-04-20 | ||
PCT/DE2006/000670 WO2006111138A1 (de) | 2005-04-20 | 2006-04-11 | Heterokontaktsolarzelle mit invertierter schichtstrukturgeometrie |
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AU2006236984A1 (en) | 2006-10-26 |
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KR101219926B1 (ko) | 2013-01-18 |
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