JP5218378B2 - Air flow measurement device - Google Patents

Air flow measurement device Download PDF

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JP5218378B2
JP5218378B2 JP2009259999A JP2009259999A JP5218378B2 JP 5218378 B2 JP5218378 B2 JP 5218378B2 JP 2009259999 A JP2009259999 A JP 2009259999A JP 2009259999 A JP2009259999 A JP 2009259999A JP 5218378 B2 JP5218378 B2 JP 5218378B2
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power supply
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JP2011106868A (en
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智之 滝口
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Denso Corp
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Denso Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

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  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Description

本発明は、薄膜式流量センサと検出回路とが組み込まれたセンサアッシーを備える空気流量測定装置に関する。   The present invention relates to an air flow rate measuring device including a sensor assembly in which a thin film type flow sensor and a detection circuit are incorporated.

空気流量測定装置は、例えば、自動車用エンジンの吸入空気量を計測するもので、流量センサと、流量センサの入出力を制御する回路を内蔵する回路チップと、回路チップと電気的に接続された端子とを有するＡＦＭ（エアフローメータ）アッシーと、ＡＦＭアッシーの端子と電気的に接続され、ワイヤーハーネスを通じて外部（例えば、エンジン制御装置）と電気的に接続するためのターミナルピンとを備える。
また、空気流量測定装置として、流量センサに加えて、サーミスタを内蔵しているものがある。 The air flow rate measuring device measures, for example, an intake air amount of an automobile engine, and is electrically connected to a flow rate sensor, a circuit chip having a circuit for controlling input / output of the flow rate sensor, and the circuit chip. An AFM (air flow meter) assembly having a terminal, and a terminal pin electrically connected to the terminal of the AFM assembly and electrically connected to the outside (for example, an engine control device) through a wire harness.
Some air flow rate measuring devices incorporate a thermistor in addition to a flow rate sensor.

従来のサーミスタを備えるボビン式の空気流量測定装置では、ＡＦＭアッシーの電源端子、出力端子、ＧＮＤ端子、サーミスタの電源端子、ＧＮＤ端子のそれぞれに接続するターミナルピンが設けられており、ターミナルピンの本数は５本であった（特許文献１参照）。   A bobbin-type air flow rate measuring device equipped with a conventional thermistor is provided with terminal pins connected to the AFM assembly power supply terminal, output terminal, GND terminal, thermistor power supply terminal, and GND terminal, respectively. Was five (see Patent Document 1).

ところで、ターミナルピンの本数は、ワイヤーハーネスの本数を減らすという観点から、できる限り少ない方がよい。そこで、ターミナルピンの本数を５本から４本に減らすために、ＡＦＭアッシーとサーミスタとのＧＮＤを共通化する方法が考えられる。しかし、ボビン式の空気流量測定装置ではＡＦＭアッシーでの消費電力が大きいため、ＧＮＤ共通化をするとサーミスタの検出電圧に誤差が生じるという不具合が生じてしまう。すなわち、ボビン式の空気流量測定装置では、ＧＮＤ共通化によりターミナルピンの本数を減らすことは困難である。   By the way, the number of terminal pins should be as small as possible from the viewpoint of reducing the number of wire harnesses. Therefore, in order to reduce the number of terminal pins from five to four, a method of sharing the GND of the AFM assembly and the thermistor can be considered. However, since the power consumption of the AFM assembly is large in the bobbin type air flow measuring device, there is a problem that an error occurs in the detection voltage of the thermistor when GND is shared. That is, in the bobbin type air flow rate measuring device, it is difficult to reduce the number of terminal pins due to common GND.

一方、ボビン式ではなく、薄膜式流量センサを有するシリコンチップ式の空気流量測定装置では、ＡＦＭアッシーの消費電力が少ないため、ＡＦＭアッシーとサーミスタとのＧＮＤ共通化をすることができる。   On the other hand, in a silicon chip type air flow rate measuring device having a thin film type flow rate sensor instead of a bobbin type, the power consumption of the AFM assembly is small, so that the AFM assembly and the thermistor can be shared by GND.

このため、図５に示すように、ターミナルピン１０１は、ＡＦＭアッシー１０２の電源端子１０３に接続されるＡＦＭ電源ピン１０４、ＡＦＭアッシー１０２の出力端子１０６に接続されるＡＦＭ出力ピン１０７、ＡＦＭアッシー１０２のＧＮＤ端子１０８およびサーミスタ１１０のＧＮＤ端子１１１に接続されるＧＮＤピン１１２、サーミスタ１１０の電源端子１１３に接続されるサーミスタ電源ピン１１４の４本にすることが可能である。   For this reason, as shown in FIG. 5, the terminal pin 101 includes an AFM power pin 104 connected to the power terminal 103 of the AFM assembly 102, an AFM output pin 107 connected to the output terminal 106 of the AFM assembly 102, and the AFM assembly 102. The thermistor power supply pin 114 connected to the GND terminal 108 of the thermistor 110, the GND pin 112 connected to the GND terminal 111 of the thermistor 110, and the power supply terminal 113 of the thermistor 110 can be provided.

しかし、従来のシリコンチップ式の空気流量測定装置では、ノイズ除去のために、ＡＦＭアッシー１０２の電源端子１０３とＧＮＤ端子１０８との間、ＧＮＤ端子１０８と出力端子１０６との間にコンデンサを配置する必要があるため、電源端子１０３と出力端子１０６との間にＧＮＤ端子１０８が配置される端子配列になっている（図５（ａ）参照）。   However, in the conventional silicon chip type air flow rate measuring device, capacitors are arranged between the power supply terminal 103 and the GND terminal 108 of the AFM assembly 102 and between the GND terminal 108 and the output terminal 106 in order to eliminate noise. Since it is necessary, the terminal arrangement is such that the GND terminal 108 is disposed between the power supply terminal 103 and the output terminal 106 (see FIG. 5A).

このため、上述のようにＧＮＤ共通化をした場合に、ＡＦＭアッシー１０２のＧＮＤ端子１０８とサーミスタ１１０のＧＮＤ端子１１１をＧＮＤピン１１２に接続するためには、ＡＦＭアッシー１０２の端子配列の一番端が電源端子１０３となっている場合、電源端子１０３を跨いで接続しなければならないので、ターミナルピン１０１のレイアウトが複雑になってしまう（図５（ｂ）参照）。   Therefore, when the GND is shared as described above, in order to connect the GND terminal 108 of the AFM assembly 102 and the GND terminal 111 of the thermistor 110 to the GND pin 112, the end of the terminal arrangement of the AFM assembly 102 is used. Is a power supply terminal 103, the connection must be made across the power supply terminal 103, which complicates the layout of the terminal pins 101 (see FIG. 5B).

特開２００７−１５５５３３号公報JP 2007-155533 A

本発明は、上記の問題点を解決するためになされたものであり、その目的は、シリコンチップ式の空気流量測定装置において、ターミナルピンのレイアウトを複雑にせずに、ターミナルピンの本数を４本に減らすことにある。   The present invention has been made to solve the above-described problems, and an object of the present invention is to increase the number of terminal pins in a silicon chip type air flow measurement device without complicating the layout of the terminal pins. There is to reduce it.

〔請求項１の手段〕
請求項１に記載の空気流量測定装置は、半導体基板の表面に薄膜抵抗体が形成された薄膜式流量センサと、薄膜式流量センサの入出力を制御する回路を内蔵する回路チップと、回路チップと電気的に接続された端子とを有するセンサアッシーと、端子と電気的に接続され、外部と電気的に接続するためのターミナルピンとを備える。 [Means of Claim 1]
The air flow rate measuring device according to claim 1 is a thin film type flow sensor in which a thin film resistor is formed on a surface of a semiconductor substrate, a circuit chip incorporating a circuit for controlling input / output of the thin film type flow rate sensor, and a circuit chip A sensor assembly having a terminal electrically connected to the terminal, and a terminal pin electrically connected to the terminal and electrically connected to the outside.

また、端子は、回路チップからの出力端子、センサアッシー用の電源端子、回路チップの回路調整のための調整端子、第１のＧＮＤ端子、および第２のＧＮＤ端子を有し、第１のＧＮＤ端子と第２のＧＮＤ端子とは、回路チップのＧＮＤ配線に接続されている。そして、端子は、第１のＧＮＤ端子が、出力端子と電源端子に挟まれ、第２のＧＮＤ端子が一番端に並ぶ端子配列になっている。   The terminals include an output terminal from the circuit chip, a power supply terminal for sensor assembly, an adjustment terminal for circuit adjustment of the circuit chip, a first GND terminal, and a second GND terminal, and the first GND The terminal and the second GND terminal are connected to the GND wiring of the circuit chip. The terminals are arranged in such a way that the first GND terminal is sandwiched between the output terminal and the power supply terminal, and the second GND terminal is arranged at the end.

これによれば、回路チップからのＧＮＤ端子を２本（第１のＧＮＤ端子と第２のＧＮＤ端子）にし、その内の１本（第２のＧＮＤ端子）を端子配列の一番外側にすることで、他の端子を跨ぐことなしに、ＧＮＤ端子への接続ができるようになる。   According to this, there are two GND terminals from the circuit chip (the first GND terminal and the second GND terminal), and one of them (the second GND terminal) is the outermost terminal arrangement. Thus, connection to the GND terminal can be performed without straddling other terminals.

このため、空気流量測定装置がサーミスタを内蔵する場合において、サーミスタのＧＮＤを端子配列の一番外側にある第２のＧＮＤ端子に接続すれば、第１のＧＮＤ端子と第２のＧＮＤ端子とは、ともに回路チップのＧＮＤ配線に接続されているので、第１のＧＮＤ端子をターミナルピンのＧＮＤピンに接続することで、容易にサーミスタとセンサアッシーとのＧＮＤ共通化をすることができる。   For this reason, in the case where the air flow rate measuring device includes a thermistor, if the GND of the thermistor is connected to the second GND terminal on the outermost side of the terminal array, the first GND terminal and the second GND terminal are Since both are connected to the GND wiring of the circuit chip, the GND of the thermistor and the sensor assembly can be easily shared by connecting the first GND terminal to the GND pin of the terminal pin.

このため、ターミナルピンを、センサアッシーの電源端子に接続されるセンサアッシー用の電源ピン、センサアッシーの出力端子に接続される出力ピン、センサアッシーのＧＮＤ端子およびサーミスタのＧＮＤ端子に接続されるＧＮＤピン、サーミスタの電源端子に接続されるサーミスタ電源ピンの４本にすることが容易にでき、ターミナルピンに接続するワイヤーハーネスの本数も減らすことができる。   For this reason, the terminal pin is connected to the power supply terminal for the sensor assembly connected to the power supply terminal of the sensor assembly, the output pin connected to the output terminal of the sensor assembly, the GND terminal of the sensor assembly, and the GND connected to the GND terminal of the thermistor. The number of thermistor power pins connected to the pins and the power supply terminals of the thermistor can be easily increased, and the number of wire harnesses connected to the terminal pins can also be reduced.

また、第１のＧＮＤ端子は、出力端子と電源端子に挟まれているので、従来どおり、電源端子と第１のＧＮＤ端子との間、第１のＧＮＤ端子と出力端子との間にコンデンサを配置することでノイズ除去をすることができる。   In addition, since the first GND terminal is sandwiched between the output terminal and the power supply terminal, a capacitor is provided between the power supply terminal and the first GND terminal and between the first GND terminal and the output terminal as in the past. By arranging it, noise can be removed.

〔請求項２の手段〕
請求項２に記載の空気流量測定装置では、ターミナルピンが、出力端子と接続する出力ピンと、電源端子と接続する電源ピンと、第１のＧＮＤ端子と接続するＧＮＤピンとを有し、第２のＧＮＤ端子は、薄膜式流量センサとは別のセンサのＧＮＤと接続する。 [Means of claim 2]
In the air flow rate measuring device according to claim 2, the terminal pin includes an output pin connected to the output terminal, a power supply pin connected to the power supply terminal, and a GND pin connected to the first GND terminal, and the second GND. The terminal is connected to GND of a sensor different from the thin film type flow sensor.

薄膜式流量センサとは別のセンサとして、例えば、サーミスタのＧＮＤ端子を接続することができる。
これによれば、サーミスタを内蔵するシリコンチップ式の空気流量測定装置において、容易にターミナルピンを４本にすることができる。
また、サーミスタ以外のセンサのＧＮＤ端子を接続しても、ターミナルピンの本数、ワイヤーハーネスの本数を削減することができる。 As a sensor different from the thin film type flow sensor, for example, the GND terminal of the thermistor can be connected.
According to this, in the silicon chip type air flow measuring device incorporating the thermistor, the number of terminal pins can be easily increased to four.
Moreover, even if the GND terminals of sensors other than the thermistor are connected, the number of terminal pins and the number of wire harnesses can be reduced.

ＡＦＭアッシーの構成図である（実施例）。It is a block diagram of an AFM assembly (Example). ＡＦＭアッシーの要部斜視図である（実施例）。It is a principal part perspective view of an AFM assembly (Example). ＡＦＭアッシーとターミナルピンの斜視図である（実施例）。It is a perspective view of an AFM assembly and a terminal pin (example). 空気流量測定装置の要部斜視図である（実施例）。It is a principal part perspective view of an air flow measuring device (example). （ａ）はＡＦＭアッシーの正面図、（ｂ）は、ＡＦＭアッシーとターミナルピンとサーミスタの接続状態を示す図である。（従来例）。(A) is a front view of the AFM assembly, and (b) is a diagram showing a connection state of the AFM assembly, the terminal pin, and the thermistor. (Conventional example).

本発明の空気流量測定装置は、半導体基板の表面に薄膜抵抗体が形成された薄膜式流量センサと、薄膜式流量センサの入出力を制御する回路を内蔵する回路チップと、回路チップと電気的に接続された端子とを有するセンサアッシーと、端子と電気的に接続され、外部と電気的に接続するためのターミナルピンとを備える。   An air flow rate measuring device of the present invention includes a thin film type flow sensor having a thin film resistor formed on the surface of a semiconductor substrate, a circuit chip containing a circuit for controlling input / output of the thin film type flow rate sensor, a circuit chip and an electrical A sensor assembly having a terminal connected to the terminal, and a terminal pin electrically connected to the terminal and electrically connected to the outside.

また、端子は、回路チップからの出力端子、センサアッシー用の電源端子、回路チップの回路調整のための調整端子、第１のＧＮＤ端子、および第２のＧＮＤ端子を有し、第１のＧＮＤ端子と第２のＧＮＤ端子とは、回路チップのＧＮＤ配線に接続されている。そして、端子は、第１のＧＮＤ端子が、出力端子と電源端子に挟まれ、第２のＧＮＤ端子が一番端に並ぶ端子配列になっている。   The terminals include an output terminal from the circuit chip, a power supply terminal for sensor assembly, an adjustment terminal for circuit adjustment of the circuit chip, a first GND terminal, and a second GND terminal, and the first GND The terminal and the second GND terminal are connected to the GND wiring of the circuit chip. The terminals are arranged in such a way that the first GND terminal is sandwiched between the output terminal and the power supply terminal, and the second GND terminal is arranged at the end.

また、ターミナルピンは、出力端子と接続する出力ピンと、電源端子と接続する電源ピンと、第１のＧＮＤ端子と接続するＧＮＤピンとを有し、第２のＧＮＤ端子は、薄膜式流量センサとは別のセンサのＧＮＤと接続する。   The terminal pin has an output pin connected to the output terminal, a power supply pin connected to the power supply terminal, and a GND pin connected to the first GND terminal. The second GND terminal is different from the thin film flow sensor. Connect to the GND of the sensor.

〔実施例の構成〕
実施例の空気流量測定装置１の構成を、図１〜４を用いて説明する。
空気流量測定装置１は、例えば、自動車用エンジンの吸入空気量を計測するエアフローメータであり、エアクリーナの下流側に接続するダクト（図示せず）に取り付けられている。
空気流量測定装置１は、空気流量を測定するためのＡＦＭアッシー２（センサアッシー）と、吸入空気の温度を測定するためのサーミスタ３と、ＡＦＭアッシー２及びサーミスタ３と電気的に接続されるとともに、ワイヤーハーネスを通じて外部と電気的に接続されるターミナルピン４とを備える（図３、４参照）。 [Configuration of Example]
The structure of the air flow measuring device 1 of an Example is demonstrated using FIGS.
The air flow rate measuring device 1 is, for example, an air flow meter that measures the intake air amount of an automobile engine, and is attached to a duct (not shown) connected to the downstream side of the air cleaner.
The air flow rate measuring device 1 is electrically connected to the AFM assembly 2 (sensor assembly) for measuring the air flow rate, the thermistor 3 for measuring the temperature of the intake air, the AFM assembly 2 and the thermistor 3. And a terminal pin 4 electrically connected to the outside through a wire harness (see FIGS. 3 and 4).

ＡＦＭアッシー２は、半導体基板の表面に薄膜抵抗体が形成された薄膜式流量センサ６と、薄膜式流量センサ６の入出力を制御する回路を内蔵する回路チップ７とを有する（図１参照）。
薄膜式流量センサ６は、半導体基板の表面に薄膜抵抗体で形成された発熱素子（図示せず）と感温素子（図示せず）とを有する。 The AFM assembly 2 includes a thin film type flow sensor 6 in which a thin film resistor is formed on the surface of a semiconductor substrate, and a circuit chip 7 incorporating a circuit for controlling input / output of the thin film type flow sensor 6 (see FIG. 1). .
The thin film type flow sensor 6 has a heating element (not shown) and a temperature sensitive element (not shown) formed of a thin film resistor on the surface of a semiconductor substrate.

回路チップ７は、薄膜式流量センサ６と入出力可能に接続されており、例えば、薄膜式流量センサ６の発熱素子に流れる電流を制御する制御回路や、薄膜式流量センサ６から出力される信号を演算及び増幅して出力する出力回路等が設けられている。   The circuit chip 7 is connected to the thin film type flow sensor 6 so as to be able to input / output. For example, the circuit chip 7 is a control circuit for controlling the current flowing through the heating element of the thin film type flow sensor 6 or a signal output from the thin film type flow sensor 6. An output circuit or the like is provided for calculating and amplifying the signal.

また、ＡＦＭアッシー２には、回路チップ７と電気的に接続された端子８が突出するように設けられており、端子８は後述するターミナルピン４に接続される。
端子８は、図１に示すように、ＡＦＭアッシー２用の電源端子１０、出力端子１１、調整端子１２、第１のＧＮＤ端子１３、および第２のＧＮＤ端子１４の５本の端子からなる。
そして、端子配列は、調整端子１２、出力端子１１、第１のＧＮＤ端子１３、電源端子１０、第２のＧＮＤ端子１４の順に並んでおり、第１のＧＮＤ端子１３が出力端子１１と電源端子１０に挟まれるとともに、第２のＧＮＤ端子１４が端子配列の一番端になるように設けられている。 Further, the AFM assembly 2 is provided with a terminal 8 electrically connected to the circuit chip 7 so as to protrude, and the terminal 8 is connected to a terminal pin 4 to be described later.
As shown in FIG. 1, the terminal 8 includes five terminals, that is, a power supply terminal 10 for the AFM assembly 2, an output terminal 11, an adjustment terminal 12, a first GND terminal 13, and a second GND terminal 14.
The terminal arrangement is arranged in the order of the adjustment terminal 12, the output terminal 11, the first GND terminal 13, the power supply terminal 10, and the second GND terminal 14. The first GND terminal 13 is connected to the output terminal 11 and the power supply terminal. 10 and the second GND terminal 14 is provided at the end of the terminal array.

電源端子１０は回路チップ７の電源配線１７に接続されており、出力端子１１は、回路チップ７からの出力信号が出力される出力配線１８に接続されており、調整端子１２は回路チップ７の回路調整のために設けられた回路チップ７の調整配線１９に接続されている。   The power supply terminal 10 is connected to the power supply wiring 17 of the circuit chip 7, the output terminal 11 is connected to the output wiring 18 from which the output signal from the circuit chip 7 is output, and the adjustment terminal 12 is connected to the circuit chip 7. It is connected to the adjustment wiring 19 of the circuit chip 7 provided for circuit adjustment.

そして、第１のＧＮＤ端子１３と第２のＧＮＤ端子１４とは、ともに、回路チップ７のＧＮＤ配線２０に接続されている。
例えば、回路チップ７がリードフレーム２２上に形成されており、第１のＧＮＤ端子１３と第２のＧＮＤ端子１４とは、ＡＦＭアッシー２の内部のリードフレーム２２上で導通しており、リードフレーム２２を介して回路チップ７のＧＮＤ配線２０に接続されている（図２参照）。 The first GND terminal 13 and the second GND terminal 14 are both connected to the GND wiring 20 of the circuit chip 7.
For example, the circuit chip 7 is formed on the lead frame 22, and the first GND terminal 13 and the second GND terminal 14 are electrically connected on the lead frame 22 inside the AFM assembly 2. 22 is connected to the GND wiring 20 of the circuit chip 7 via 22 (see FIG. 2).

そして、電源端子１０と第１のＧＮＤ端子１３との間、第１のＧＮＤ端子１３と出力端子１１との間にはノイズ除去のため、コンデンサ（図示せず）が配置されている。   A capacitor (not shown) is disposed between the power supply terminal 10 and the first GND terminal 13 and between the first GND terminal 13 and the output terminal 11 for noise removal.

サーミスタ３は、吸入空気の温度を検出するためのものであり、抵抗体２４と抵抗体２４の両側に設けられたリード部２５、２６を有する。   The thermistor 3 is for detecting the temperature of the intake air, and has a resistor 24 and lead portions 25 and 26 provided on both sides of the resistor 24.

ターミナルピン４は、ＡＦＭ出力ピン３０、ＧＮＤピン３１、ＡＦＭ用のＡＦＭ電源ピン３２、および、サーミスタ用のサーミスタ電源ピン３３の４本からなる。
ＡＦＭ出力ピン３０の一端は出力端子１１と接続され、ＡＦＭ電源ピン３２の一端は電源端子１０と接続され、ＧＮＤピン３１の一端は第１のＧＮＤ端子１３と接続され、サーミスタ電源ピン３３の一端はサーミスタ３のリード部２５と接続される。
また、第２のＧＮＤ端子１４は、ターミナル３４を介して、サーミスタ３のリード部２６（ＧＮＤ）と接続される。 The terminal pin 4 includes four pins, that is, an AFM output pin 30, a GND pin 31, an AFM power supply pin 32 for AFM, and a thermistor power supply pin 33 for the thermistor.
One end of the AFM output pin 30 is connected to the output terminal 11, one end of the AFM power supply pin 32 is connected to the power supply terminal 10, one end of the GND pin 31 is connected to the first GND terminal 13, and one end of the thermistor power supply pin 33. Is connected to the lead portion 25 of the thermistor 3.
The second GND terminal 14 is connected to the lead portion 26 (GND) of the thermistor 3 via the terminal 34.

なお、調整端子１２は、ターミナルピン４と並んで設けられた調整ピン３６に接続される。調整ピン３６は、外部と常時接続するものではなく、回路調整時のみに使用するものであり、ワイヤーハーネスを通じて外部に電気的に接続されるターミナルピン４とは異なる。   The adjustment terminal 12 is connected to an adjustment pin 36 provided side by side with the terminal pin 4. The adjustment pin 36 is not always connected to the outside but is used only during circuit adjustment, and is different from the terminal pin 4 that is electrically connected to the outside through a wire harness.

また、ターミナルピン４は、流量検出流路（図示せず）を形成するハウジング３８の上部に一体的に形成されたコネクタ３９に各ピン３０〜３３の他端が突出するように埋設されて、各ピン３０〜３３の他端にワイヤーハーネスを通じて外部（例えば、エンジン制御装置）に電気的に接続できるようになっている（図４参照）。
なお、調整ピン３６は、コネクタケース４０内に収容されており、コネクタ３９に他端が突出していない。 The terminal pin 4 is embedded in a connector 39 integrally formed on the upper part of the housing 38 forming a flow rate detection flow path (not shown) so that the other ends of the pins 30 to 33 protrude. The other ends of the pins 30 to 33 can be electrically connected to the outside (for example, an engine control device) through a wire harness (see FIG. 4).
The adjustment pin 36 is accommodated in the connector case 40, and the other end does not protrude from the connector 39.

また、サーミスタ３はコネクタ３９の下方でハウジング３８の外側に設けられているため、サーミスタ電源ピン３３およびターミナル３４の他端は、コネクタ３９の下方に延びており、それぞれ、サーミスタ３のリード部２５、２６に接続される（図３、４参照）。   Further, since the thermistor 3 is provided below the connector 39 and outside the housing 38, the other end of the thermistor power pin 33 and the terminal 34 extends below the connector 39, and each of the lead portions 25 of the thermistor 3 is provided. , 26 (see FIGS. 3 and 4).

〔実施例の作用効果〕
実施例の空気流量測定装置１によれば、ＡＦＭアッシー２の端子８は、ＡＦＭアッシー２内で導通する２つのＧＮＤ端子（第１のＧＮＤ端子１３と第２のＧＮＤ端子１４）を有し、第１のＧＮＤ端子１３が出力端子１１と電源端子１０に挟まれるとともに、第２のＧＮＤ端子１４は、各端子の並びの一番端に位置するように端子８が並んでいる。 [Effects of Example]
According to the air flow rate measuring apparatus 1 of the embodiment, the terminal 8 of the AFM assembly 2 has two GND terminals (a first GND terminal 13 and a second GND terminal 14) that are conducted in the AFM assembly 2, The first GND terminal 13 is sandwiched between the output terminal 11 and the power supply terminal 10, and the second GND terminal 14 is arranged with the terminals 8 so as to be located at the end of the arrangement of the terminals.

これによれば、端子配列の一番端にある第２のＧＮＤ端子１４にサーミスタ３のリード部２６を接続することで、サーミスタ３とＡＦＭアッシー２とのＧＮＤを共通化することができる。すなわち、他の端子を跨ぐことなく第２のＧＮＤ端子１４に接続できるので、ターミナルピン４のレイアウトを複雑にすることなく、容易にサーミスタ３とＡＦＭアッシー２とのＧＮＤ共通化を実現することができる。   According to this, the GND of the thermistor 3 and the AFM assembly 2 can be shared by connecting the lead portion 26 of the thermistor 3 to the second GND terminal 14 at the end of the terminal array. That is, since it can be connected to the second GND terminal 14 without straddling other terminals, it is possible to easily realize common GND between the thermistor 3 and the AFM assembly 2 without complicating the layout of the terminal pins 4. it can.

このため、ターミナルピン４を、ＡＦＭ出力ピン３０、ＡＦＭ用のＡＦＭ電源ピン３２、ＧＮＤピン３１、および、サーミスタ用のサーミスタ電源ピン３３の４本にすることが容易にでき、ターミナルピン４に接続するワイヤーハーネスの本数も減らすことができる。   For this reason, the terminal pin 4 can be easily made into four pins, that is, an AFM output pin 30, an AFM power supply pin 32 for AFM, a GND pin 31, and a thermistor power supply pin 33 for the thermistor. The number of wire harnesses to be reduced can also be reduced.

また、第１のＧＮＤ端子１３は、出力端子１１と電源端子１０に挟まれているので、従来どおり、電源端子１０と第１のＧＮＤ端子１３との間、第１のＧＮＤ端子１３と出力端子１１との間にコンデンサを配置することでノイズ除去をすることができる。   Further, since the first GND terminal 13 is sandwiched between the output terminal 11 and the power supply terminal 10, the first GND terminal 13 and the output terminal are provided between the power supply terminal 10 and the first GND terminal 13 as usual. Noise can be removed by placing a capacitor between the capacitor 11 and the capacitor 11.

〔変形例〕
空気流量測定装置１の態様は、実施例に限定されず、様々な変形例を考えることができる。例えば、実施例では第２のＧＮＤ端子１４をサーミスタ３のＧＮＤ（リード部２６）と接続したが、サーミスタ３に限らず、薄膜式流量センサ６とは別の他のセンサのＧＮＤと接続してもよい。
また、実施例では、第１のＧＮＤ端子１３と第２のＧＮＤ端子１４とがリードフレーム２２上で導通していたが、これに限らず、第１のＧＮＤ端子１３と第２のＧＮＤ端子１４とがともに回路チップ７のＧＮＤ配線２０と電気的に接続されていればよい。 [Modification]
The aspect of the air flow rate measuring device 1 is not limited to the embodiment, and various modifications can be considered. For example, in the embodiment, the second GND terminal 14 is connected to the GND (lead portion 26) of the thermistor 3. However, the second GND terminal 14 is not limited to the thermistor 3, and is connected to the GND of another sensor different from the thin film type flow sensor 6. Also good.
In the embodiment, the first GND terminal 13 and the second GND terminal 14 are electrically connected to each other on the lead frame 22. However, the present invention is not limited to this, and the first GND terminal 13 and the second GND terminal 14 are connected. Both of them may be electrically connected to the GND wiring 20 of the circuit chip 7.

１ 空気流量測定装置
２ ＡＦＭアッシー（センサアッシー）
３ サーミスタ（別のセンサ）
４ ターミナルピン
６ 薄膜式流量センサ
７ 回路チップ
８ 端子
１０ ＡＦＭアッシー用の電源端子
１１ 出力端子
１２ 調整端子
１３ 第１のＧＮＤ端子
１４ 第２のＧＮＤ端子
２０ ＧＮＤ配線
２５ サーミスタのリード部（電源）
２６ サーミスタのリード部（ＧＮＤ）
３０ ＡＦＭ出力ピン（出力ピン）
３１ ＧＮＤピン
３２ ＡＦＭ電源ピン（電源ピン）
３３ サーミスタ電源ピン 1 Air flow measurement device 2 AFM assembly (sensor assembly)
3 Thermistor (another sensor)
4 Terminal pin 6 Thin film type flow sensor 7 Circuit chip 8 Terminal 10 AFM assembly power supply terminal 11 Output terminal 12 Adjustment terminal 13 First GND terminal 14 Second GND terminal 20 GND wiring 25 Thermistor lead (power supply)
26 Thermistor lead (GND)
30 AFM output pin (output pin)
31 GND pin 32 AFM power supply pin (power supply pin)
33 Thermistor power pin

Claims (2)

半導体基板の表面に薄膜抵抗体が形成された薄膜式流量センサと、前記薄膜式流量センサの入出力を制御する回路を内蔵する回路チップと、前記回路チップと電気的に接続された端子とを有するセンサアッシーと、
前記端子と電気的に接続され、外部と電気的に接続するためのターミナルピンとを備える空気流量測定装置であって、
前記端子は、前記回路チップからの出力端子、前記センサアッシー用の電源端子、前記回路チップの回路調整のための調整端子、第１のＧＮＤ端子、および第２のＧＮＤ端子を有し、
前記第１のＧＮＤ端子と前記第２のＧＮＤ端子とは、前記回路チップのＧＮＤ配線に接続されており、
前記端子は、前記第１のＧＮＤ端子が、前記出力端子と前記電源端子に挟まれ、前記第２のＧＮＤ端子が一番端に並ぶ端子配列になっていることを特徴とする空気流量測定装置。 A thin film flow sensor having a thin film resistor formed on the surface of a semiconductor substrate, a circuit chip containing a circuit for controlling input / output of the thin film flow sensor, and a terminal electrically connected to the circuit chip Having a sensor assembly;
An air flow rate measuring device comprising a terminal pin electrically connected to the terminal and electrically connected to the outside,
The terminals include an output terminal from the circuit chip, a power supply terminal for the sensor assembly, an adjustment terminal for circuit adjustment of the circuit chip, a first GND terminal, and a second GND terminal,
The first GND terminal and the second GND terminal are connected to a GND wiring of the circuit chip,
The air flow measuring device, wherein the terminal has a terminal arrangement in which the first GND terminal is sandwiched between the output terminal and the power supply terminal, and the second GND terminal is arranged at the end. . 請求項１に記載の空気流量測定装置において、
前記ターミナルピンは、前記出力端子と接続する出力ピンと、前記電源端子と接続する電源ピンと、前記第１のＧＮＤ端子と接続するＧＮＤピンとを有し、
前記第２のＧＮＤ端子は、前記薄膜式流量センサとは別のセンサのＧＮＤと接続することを特徴とする空気流量測定装置。
The air flow rate measuring device according to claim 1,
The terminal pin has an output pin connected to the output terminal, a power supply pin connected to the power supply terminal, and a GND pin connected to the first GND terminal,
The second GND terminal is connected to a GND of a sensor different from the thin film type flow rate sensor.
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