JP5217882B2 - Microwave processing equipment - Google Patents
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- JP5217882B2 JP5217882B2 JP2008263810A JP2008263810A JP5217882B2 JP 5217882 B2 JP5217882 B2 JP 5217882B2 JP 2008263810 A JP2008263810 A JP 2008263810A JP 2008263810 A JP2008263810 A JP 2008263810A JP 5217882 B2 JP5217882 B2 JP 5217882B2
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/70—Feed lines
- H05B6/705—Feed lines using microwave tuning
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/72—Radiators or antennas
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- Control Of High-Frequency Heating Circuits (AREA)
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Description
本発明は、半導体素子を用いて構成したマイクロ波発生部を備えたマイクロ波処理装置に関するものである。 The present invention relates to a microwave processing apparatus including a microwave generation unit configured using a semiconductor element.
従来のこの種のマイクロ波処理装置は、一般には直方体形状の加熱室で構成され、一つあるいは複数の給電部を備えている。複数の給電部の構成としては、給電部を加熱室の上壁面と底壁面に設け、専用のマイクロ波発生部からそれぞれの給電部にマイクロ波を供給したものがある。 A conventional microwave processing apparatus of this type is generally composed of a rectangular parallelepiped heating chamber and includes one or a plurality of power feeding units. As a structure of a some electric power feeding part, there exists a thing which provided the electric power feeding part in the upper wall surface and bottom wall surface of a heating chamber, and supplied the microwave to each electric power feeding part from the microwave generation part for exclusive use.
また、被加熱物の加熱の均一化を促進することを狙いとして、加熱室を６面以上の多面体に形成し、各壁面の一部あるいは全部の面から、給電部である放射アンテナを加熱室内に突出して配置したものがある（例えば、特許文献１参照）。そして、互いの放射アンテナを異なる面に配したことで、互いの干渉を防止できるとしている。さらには、放射アンテナが、それぞれ異なる方向を向いているので、放射された電波は加熱室内のあらゆる方向に伝播し、壁面にて反射して散乱するため、加熱室内で電波は均一に分布するとしている。 In addition, with the aim of promoting uniform heating of the object to be heated, the heating chamber is formed in a polyhedron having six or more faces, and a radiation antenna as a feeding portion is connected to the heating chamber from a part or all of each wall surface. (See, for example, Patent Document 1). And, it is said that mutual interference can be prevented by arranging the radiation antennas on different surfaces. Furthermore, since the radiating antennas are directed in different directions, the radiated radio waves propagate in all directions in the heating chamber and are reflected and scattered by the wall surface, so that the radio waves are uniformly distributed in the heating chamber. Yes.
また、固体発振器が接続された各アンテナのうち少なくとも２個を加熱室の同一壁面に配置させるものがある（例えば、特許文献２参照）。そして、アンテナの設置数を増やすことにより加熱むらが少なくなり、均一加熱ができかつアンテナ相互の向き関係により反射波の影響をも無くすとしている。 In addition, there is an antenna in which at least two of the antennas connected to the solid-state oscillator are arranged on the same wall surface of the heating chamber (see, for example, Patent Document 2). By increasing the number of installed antennas, uneven heating can be reduced, uniform heating can be achieved, and the influence of reflected waves can be eliminated due to the orientation relationship between the antennas.
また、位相器を備えたものとして、半導体発振部と、発振部の出力を複数に分割する分配部と、分配された出力をそれぞれ増幅する複数の増幅部と、増幅部の出力を合成する合成部とを有し、分配部と増幅部との間に位相器を設けたものがある（例えば、特許文献３参照）。そして、位相器はダイオードのオンオフ特性により、マイクロ波の通過線路長を切り替える構成としている。また、合成部は、９０度および１８０度ハイブリッドを用いることで、合成部の出力を２つにすることができ、位相器を制御することで２出力の電力比を変化させたり、２出力間の位相を同相あるいは逆相にしたりできるとしている。 Also, with a phase shifter, a semiconductor oscillating unit, a distributing unit that divides the output of the oscillating unit into a plurality of components, a plurality of amplifying units that respectively amplify the distributed outputs, and a synthesis that combines the outputs of the amplifying units And a phase shifter is provided between the distribution unit and the amplification unit (see, for example, Patent Document 3). The phase shifter is configured to switch the length of the microwave pass line according to the on / off characteristics of the diode. In addition, the synthesis unit can use two 90-degree and 180-degree hybrids, so that the output of the synthesis unit can be made two. By controlling the phase shifter, the power ratio of two outputs can be changed, or between the two outputs Can be in-phase or out-of-phase.
また、この種のマイクロ波処理装置は、一般には電子レンジに代表されるようにマイクロ波発生部にマグネトロンと称される真空管を用いている。
しかしながら、前記従来の複数給電部は、各給電部間の干渉を回避させるように配置させたものであり、それぞれの給電部から放射されたマイクロ波は、放射方向がそれぞれ異なっているが、加熱室壁面での反射に伴う散乱およびその散乱したマイクロ波が、壁面にぶつかってさらに散乱という繰返しにより広範囲の散乱になるので、他の放射アンテナから放射されたマイクロ波からの干渉を防止することは不可能である。 However, the conventional multiple power feeding units are arranged so as to avoid interference between the power feeding units, and the microwaves radiated from the respective power feeding units have different radiation directions but are heated. Scattering due to reflection on the wall surface of the room and the scattered microwaves are scattered over a wide range by repeated scattering and colliding with the wall surface, preventing interference from microwaves radiated from other radiation antennas Impossible.
また、加熱室の同一壁面に複数のアンテナを配置させるものにあっては、単純にアンテナ数を複数設けたものとの差異が明確でなく、同一壁面に設けることの効果の内容開示がなく、実現の可能性のみである。 In addition, in the case of arranging a plurality of antennas on the same wall surface of the heating chamber, the difference from the simple provision of a plurality of antennas is not clear, and there is no disclosure of the contents of the effect of providing the same wall surface, It is only a possibility of realization.
さらに、位相器を備えたものにおいては、合成部の２つの出力から放射されるマイクロ波は、位相器によって位相を変化させることで２つの放射アンテナからの放射電力比や位相差を任意にかつ瞬時に変化させることは可能だけれども、その放射によってマイクロ波が供給される加熱室内に収納されたさまざまな形状・種類・量の異なる被加熱物を所望の状態に加熱することは難しいという課題を有していた。 Further, in the case of a device equipped with a phase shifter, the microwaves radiated from the two outputs of the combining unit can change the radiated power ratio and phase difference from the two radiating antennas by changing the phase by the phase shifter. Although it is possible to change it instantaneously, it is difficult to heat objects to be heated in various shapes, types, and quantities stored in a heating chamber to which microwaves are supplied by radiation to a desired state. Had.
本発明は、上記従来の課題を解決するもので、複数の給電部それぞれから放射されるマイクロ波を最適に相互干渉させることで、さまざまな形状・種類・量の異なる被加熱物を所望の状態に加熱するマイクロ波処理装置を提供することを目的とする。 The present invention solves the above-described conventional problems, and optimally interferes microwaves radiated from each of a plurality of power feeding units, thereby allowing various shapes, types, and amounts of objects to be heated to be in a desired state. An object of the present invention is to provide a microwave processing apparatus that heats the heat.
前記従来の課題を解決するために、本発明のマイクロ波処理装置は、被加熱物を収容する加熱室と、発振部と、前記発振部の出力を複数に分配して出力する電力分配部と、前記電力分配部の少なくともひとつの出力位相を可変する位相可変部と、前記電力分配部および／または前記位相可変部の出力をそれぞれ電力増幅する増幅部と、前記増幅部の出力を前記加熱室に供給する給電部と、それぞれの前記給電部から前記増幅部方向に反射するマイクロ波電力を検出する電力検出部と、前記発振部の発振周波数と前記位相可変部の位相量を制御する制御部とを備え、前記制御部は前記加熱室に収容された前記被加熱物を加熱処理する前段階で、前記給電部から前記増幅部方向に反射するマイクロ波電力が最小とな
る周波数を検出する予備検出動作を行う構成とし、前記給電部は、前記加熱室の底壁面に４ヶ所以上の偶数ヶ所に配置され、前記加熱室の被加熱物設置水平面の略中心を通る垂直軸上の点に対し略対称に２つの前記給電部の組合せを複数設け、前記給電部の組合せを構成する２つの前記給電部間を結ぶ線が前記複数の給電部の組合せにおいて交差するように配置され、前記給電部の組合せは前記加熱室へ放射するマイクロ波電界の励振方向が一致するように配置され、前記制御部は、前記予備検出動作の検出結果に基づき前記複数の給電部の組合せ毎に供給するマイクロ波の相対的位相を制御すると共に、位相制御する前記給電部の組合せ間で前記給電部それぞれから放射されるマイクロ波電力を略一致させる構成としたものであり、略対称に配置した複数の給電部の組合せから放射した等しい小電力で、略対称な放射特性のマイクロ波が対等な条件で相互干渉して、指向性の強い大電力のマイクロ波分布になると共に、被加熱物を含む加熱室内の特性に合わせて、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御をして、強い指向性のマイクロ波電力の分布位置を操作し、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を効率的に加熱する装置を提供できる。
In order to solve the above-described conventional problems, a microwave processing apparatus of the present invention includes a heating chamber that accommodates an object to be heated , an oscillation unit, and a power distribution unit that distributes and outputs the output of the oscillation unit to a plurality of units. A phase variable unit that varies at least one output phase of the power distribution unit, an amplification unit that amplifies the power of the output of the power distribution unit and / or the phase variable unit, and an output of the amplification unit as the heating chamber A power supply unit that supplies power to the power supply unit, a power detection unit that detects microwave power reflected from each of the power supply units in the direction of the amplification unit, and a control unit that controls the oscillation frequency of the oscillation unit and the phase amount of the phase variable unit And the control unit minimizes the microwave power reflected from the power supply unit in the direction of the amplifying unit at a stage prior to heat-treating the object to be heated accommodated in the heating chamber.
The power feeding unit is arranged at an even number of four or more places on the bottom wall surface of the heating chamber, and is perpendicular to the center of the heated object installation horizontal plane of the heating chamber. A plurality of combinations of the two power feeding units are provided substantially symmetrically with respect to a point on the axis, and a line connecting the two power feeding units constituting the combination of the power feeding units intersects in the combination of the plurality of power feeding units. Arranged such that the excitation direction of the microwave electric field radiated to the heating chamber coincides, and the control unit combines the plurality of feeding units based on the detection result of the preliminary detection operation. It controls the relative phase of the microwaves supplied to each, which has a configuration which substantially matches the microwave power radiated from each of the feeding part among the combination of the feed unit for phase control, substantially symmetrical At equal small power radiated from a combination of a plurality of feeding parts arranged, and mutual interference with microwave comparable conditions substantially symmetrical radiation characteristic, it becomes a microwave distribution of high directivity high power, heated Relative phase control between microwaves radiated from power supply units arranged approximately symmetrically according to the characteristics of the heating chamber including the object, manipulates the distribution position of microwave power with strong directivity, and radiates it to the heating chamber The heated microwave can be efficiently absorbed by the object to be heated, and an apparatus for efficiently heating the object to be heated of various shapes, types and amounts can be provided.
本発明のマイクロ波処理装置は、複数の給電部それぞれから略対称な放射特性でマイクロ波を加熱室内に放射して、最適に相互干渉させることで、さまざまな形状・種類・量の異なる被加熱物を所望の状態に加熱するマイクロ波処理装置を提供することができる。 The microwave processing apparatus of the present invention radiates microwaves from a plurality of power feeding sections with substantially symmetrical radiation characteristics into a heating chamber and optimally interferes with each other, thereby allowing various shapes, types, and amounts of heated objects to be heated. A microwave processing apparatus for heating an object to a desired state can be provided.
第１の発明は、被加熱物を収容する加熱室と、発振部と、発振部の出力を複数に分配して出力する電力分配部と、前記電力分配部の少なくともひとつの出力位相を可変する位相可変部と、前記電力分配部および／または前記位相可変部の出力をそれぞれ電力増幅する増幅部と、前記増幅部の出力を前記加熱室に供給する給電部と、それぞれの前記給電部から前記増幅部方向に反射するマイクロ波電力を検出する電力検出部と、前記発振部の発振周波数と前記位相可変部の位相量を制御する制御部とを備え、前記制御部は前記加熱室に収容された前記被加熱物を加熱処理する前段階で、前記給電部から前記増幅部方向に反射するマイクロ波電力が最小となる周波数を検出する予備検出動作を行う構成とし、前記給電部は、前記加熱室の底壁面に４ヶ所以上の偶数ヶ所に配置され、前記加熱室の被加熱物設置水平面の略中心を通る垂直軸上の点に対し略対称に２つの前記給電部の組合せを複数設け、前記給電部の組合せを構成する２つの前記給電部間を結ぶ線が前記複数の給電部の組合せにおいて交差するように配置され、前記給電部の組合せは前記加熱室へ放射するマイクロ波電界の励振方向が一致するように配置され、前記制御部は、前記予備検出動作の検出結果に基づき前記複数の給電部の組合せ毎に供給するマイクロ波の相対的位相を制御すると共に、位相制御する前記給電部の組合せ間で前記給電部それぞれから放射されるマイクロ波電力を略一致させる構成としたものであり、略対称に配置した複数の給電部の組合せから放射した等しい小電力で、略対称な放射特性のマイクロ波が対等な条件で相互干渉して、指向性の強い大電力のマイクロ波分布になると共に、被加熱物を含む加熱室内の特性に合わせて、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御をして、強い指向性のマイクロ波電力の分布位置を操作し、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を効率的に加熱することができる。 1st invention changes the at least 1 output phase of the heating chamber which accommodates to-be-heated material, an oscillation part, the electric power distribution part which distributes and outputs the output of an oscillation part into multiple, and the said electric power distribution part A phase varying unit, an amplifying unit for amplifying the output of each of the power distributing unit and / or the phase varying unit, a power feeding unit for supplying the output of the amplifying unit to the heating chamber, and the power feeding unit A power detection unit for detecting microwave power reflected in the direction of the amplification unit; and a control unit for controlling the oscillation frequency of the oscillation unit and the phase amount of the phase variable unit, wherein the control unit is accommodated in the heating chamber. In addition, a pre-detection operation is performed to detect a frequency at which microwave power reflected from the power supply unit in the direction of the amplification unit is minimized before the object to be heated is heated. On the bottom wall of the room Disposed locations or more even locations, a plurality of combinations of two of the power supply unit substantially symmetrically with respect to a point on the vertical axis passing through the approximate center of the object to be heated placed horizontal surface of the heating chamber, the combination of the power supply unit line connecting between two of the feeding portion which configuration is arranged so as to intersect the combination of the plurality of feeding parts, the combination of the feed section as the direction of excitation of the microwave electric field radiated into the heating chamber is coincident The control unit is configured to control a relative phase of microwaves to be supplied for each combination of the plurality of power supply units based on a detection result of the preliminary detection operation, and between the combinations of the power supply units to perform phase control. the microwave power radiated from each feeding part is obtained by a configuration in which substantially coincide, with low power equal radiated from a plurality of combinations of power supply portion arranged substantially symmetrically, Mai substantially symmetrical radiation characteristic And mutual interference in Russia waves comparable conditions, it becomes a microwave distribution of high directivity high power, in accordance with the characteristics of the heating chamber containing an object to be heated is radiated from the feeding part arranged substantially symmetrically Micro By controlling the relative phase between waves, manipulating the distribution position of highly directional microwave power, the microwaves radiated into the heating chamber can be absorbed efficiently by the heated object, and various shapes and types -Heated objects with different amounts can be efficiently heated.
第２の発明は、特に、第１の発明の制御部が、予備検出動作の検出結果に基づき、略対称に配置した給電部の複数の組合せ毎に、供給するマイクロ波の出力を制御する構成としたものであり、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作による効果を維持しながら、被加熱物を含む加熱室内の特性に合わせて、必要な出力に設定でき、加熱室に放射したマイクロ波を
被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。
In the second invention, in particular, the control unit of the first invention controls the output of the microwave to be supplied for each of a plurality of combinations of power feeding units arranged substantially symmetrically based on the detection result of the preliminary detection operation. The heating chamber containing the object to be heated is maintained while maintaining the effect of the operation of the distribution position of the highly directional microwave power by the relative phase control between the microwaves radiated from the power supply section arranged substantially symmetrically. It can be set to the required output according to the characteristics of the product, microwaves radiated to the heating chamber can be efficiently absorbed by the heated object, and various heated objects with different shapes, types, and quantities are optimally heated. can do.
第３の発明は、特に、第１または２の発明の制御部が、予備検出動作の検出結果に基づき、略対称に配置した給電部の複数の組合せから、使用する組合せを選択し、マイクロ波の供給を制御する構成としたものであり、被加熱物を含む加熱室内の特性に合わせて、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作の組合せを選択して、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。 In the third aspect of the invention, in particular, the control unit of the first or second aspect of the invention selects a combination to be used from a plurality of combinations of power feeding units arranged substantially symmetrically based on the detection result of the preliminary detection operation, and the microwave. A highly directional microwave by controlling the relative phase between the microwaves radiated from the power supply section arranged approximately symmetrically according to the characteristics of the heating chamber including the object to be heated. By selecting a combination of power distribution position operations, microwaves radiated into the heating chamber can be efficiently absorbed by the object to be heated, and various objects of different shapes, types, and quantities are optimally heated. be able to.
第４の発明は、特に、第１または２の発明の制御部が、予備検出動作の検出結果に基づき、略対称に配置した給電部の複数の組合せ毎に、供給するマイクロ波の周波数を制御する構成としたものであり、略対称に配置した給電部組合せ単位で周波数制御を行うことで、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作による効果を維持しながら、動作周波数の違いにより生じる異なったマイクロ波電力の分布位置操作を組合せることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。 In the fourth aspect of the invention, in particular, the control unit of the first or second aspect of the invention controls the frequency of the microwave to be supplied for each of a plurality of combinations of power feeding units arranged substantially symmetrically based on the detection result of the preliminary detection operation. A highly directional microwave by controlling the relative phase between microwaves radiated from power supply units arranged approximately symmetrically by performing frequency control in units of power supply units arranged substantially symmetrically. While maintaining the effect of power distribution position operation, it is possible to combine different microwave power distribution position operations caused by differences in operating frequency, and optimally heat objects to be heated in various shapes, types, and quantities can do.
第５の発明は、特に、第１の発明の制御部が、マイクロ波処理の経過時間や、被加熱物のマイクロ波処理進捗状態を検知する検知器の検知結果および予備検出動作を再度繰り返して得られた検出結果に基づき、略対称に配置した給電部の複数の組合せ毎に制御しているマイクロ波の相対的位相値を変動する構成としたものであり、被加熱物を含む加熱室内の特性の変化に合わせて、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御を変えて、強い指向性のマイクロ波電力の分布位置を操作し、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。 In the fifth aspect of the invention, in particular, the controller of the first aspect of the invention repeats again the detection time and preliminary detection operation of the detector that detects the elapsed time of the microwave processing and the microwave processing progress state of the object to be heated. Based on the obtained detection results, it is configured to change the relative phase value of the microwaves controlled for each of a plurality of combinations of power feeding units arranged substantially symmetrically, and in the heating chamber including the object to be heated. By changing the relative phase control between the microwaves radiated from the power supply unit arranged approximately symmetrically according to the change in characteristics, the distribution position of the microwave power with strong directivity is manipulated, and the microwave radiated into the heating chamber is changed. The object to be heated can be efficiently absorbed, and the object to be heated of various shapes, types and amounts can be optimally heated.
第６の発明は、特に、第１または２の発明の制御部が、マイクロ波処理の経過時間や、被加熱物のマイクロ波処理進捗状態を検知する検知器の検知結果および予備検出動作を再度繰り返して得られた検出結果に基づき、略対称に配置した給電部の複数の組合せ毎に制御しているマイクロ波出力値を変動する構成としたものであり、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作による効果を維持しながら、被加熱物を含む加熱室内の特性の変化に合わせて、必要な出力に調整でき、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。 In the sixth aspect of the invention, in particular, the control unit of the first or second aspect of the invention again performs the detection result and preliminary detection operation of the detector that detects the elapsed time of the microwave processing and the microwave processing progress state of the object to be heated. Based on the detection results obtained repeatedly, the microwave output value controlled for each of a plurality of combinations of power feeding units arranged approximately symmetrically is varied, and radiation is performed from power feeding units arranged substantially symmetrically. While maintaining the effect of the distribution position operation of microwave power with strong directivity by relative phase control between the microwaves to be adjusted, it can be adjusted to the required output according to the change in the characteristics of the heating chamber including the object to be heated, The microwaves radiated to the heating chamber can be efficiently absorbed by the object to be heated, and the objects to be heated of various shapes, types, and quantities can be optimally heated.
第７の発明は、特に、第１から３または５または６のいずれか１つの発明の制御部は、マイクロ波処理の経過時間や、被加熱物のマイクロ波処理進捗状態を検知する検知器の検知結果および予備検出動作を再度繰り返して得られた検出結果に基づき、略対称に配置した給電部の複数の組合せから、使用する組合せを選択し直し、マイクロ波の供給を制御する構成としたものであり、被加熱物を含む加熱室内の特性の変化に合わせて、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作の組合せの選択を変え、加熱室に放射したマイクロ波を被加熱物に効率的に吸収させることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。 In the seventh aspect of the invention, in particular, the control unit of any one of the first to third or fifth or sixth aspects of the invention is a detector for detecting the elapsed time of the microwave treatment and the microwave treatment progress state of the object to be heated. Based on the detection result obtained by repeating the detection result and the preliminary detection operation again, the configuration to control the microwave supply by reselecting the combination to be used from a plurality of combinations of the power feeding units arranged approximately symmetrically Combined operation of strong directional microwave power distribution position by relative phase control between microwaves radiated from power supply parts arranged almost symmetrically according to changes in the characteristics of the heating chamber including the object to be heated The microwaves radiated to the heating chamber can be efficiently absorbed by the object to be heated, and the objects to be heated of various shapes, types, and quantities can be optimally heated.
第８の発明は、特に、第１または２または４から６のいずれか１つの発明の制御部は、マイクロ波処理の経過時間や、被加熱物のマイクロ波処理進捗状態を検知する検知器の検知結果および予備検出動作を再度繰り返して得られた検出結果に基づき、略対称に配置し
た給電部の複数の組合せ毎に制御しているマイクロ波の周波数値を変動する被加熱物を含む加熱室内の特性の変化に合わせて、略対称に配置した給電部組合せ単位での周波数制御を変動させることで、略対称に配置した給電部から放射するマイクロ波間の相対的位相制御による、強い指向性のマイクロ波電力の分布位置操作による効果を維持しながら、動作周波数の違いにより生じる異なったマイクロ波電力の分布位置操作の組合せを変えることができ、さまざまな形状・種類・量の異なる被加熱物を最適に加熱することができる。
In the eighth aspect of the invention, in particular, the control unit of the first aspect or the second aspect or any one of the fourth to sixth aspects of the invention is a detector for detecting an elapsed time of microwave processing and a microwave processing progress state of an object to be heated. Based on the detection result and the detection result obtained by repeating the preliminary detection operation again, the heating chamber including the object to be heated that varies the frequency value of the microwave controlled for each of the plurality of combinations of the power feeding units arranged substantially symmetrically By changing the frequency control in the unit combination of the power supply units arranged approximately symmetrically in accordance with the change in the characteristics of the antenna, strong directivity is achieved by the relative phase control between the microwaves radiated from the power supply units arranged approximately symmetrically. While maintaining the effect of the operation of the distribution position of the microwave power, the combination of the operation of the distribution position of the different microwave power caused by the difference in operating frequency can be changed. It is possible to optimally heat the amount of different object to be heated.
以下、本発明の実施の形態について、図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.
（実施の形態１）
図１は、本発明の第１の実施の形態におけるマイクロ波処理装置の構成図である。
(Embodiment 1)
FIG. 1 is a configuration diagram of a microwave processing apparatus according to the first embodiment of the present invention.
図１において、マイクロ波発生部は半導体素子を用いて構成した発振部１ａ、１ｃ、発振部１ａ、１ｃの出力を２分配する電力分配部２ａ、２ｃ、電力分配部２ａ、２ｃそれぞれの出力を増幅する半導体素子を用いて構成した増幅部４ａ〜４ｄ、増幅部４ａ〜４ｄによって増幅されたマイクロ波出力を加熱室８内に放射する給電部５ａ〜５ｄ、および電力分配部２ａ、２ｃと増幅部４ａ〜４ｄを接続するマイクロ波伝播路に挿入され入出力に任意の位相差を発生させる位相可変部３ａ〜３ｄ、増幅部４ａ〜４ｄと給電部５ａ〜５ｄを接続するマイクロ波伝播路に挿入され、給電部５ａ〜５ｄから増幅部４ａ〜４ｄ方向に反射するマイクロ波反射電力を検出する電力検出部６ａ〜６ｄ、電力検出部６ａ〜６ｄによって検出される反射電力に応じて発振部１ａ、１ｃの発振周波数と位相可変部３ａ〜３ｄの位相量を制御する制御部７とで構成している。 In FIG. 1, the microwave generation unit includes oscillation units 1 a and 1 c configured using semiconductor elements, power distribution units 2 a and 2 c that distribute the outputs of the oscillation units 1 a and 1 c, and outputs of the power distribution units 2 a and 2 c. Amplifying units 4a to 4d configured using semiconductor elements to be amplified, power feeding units 5a to 5d for radiating the microwave output amplified by the amplifying units 4a to 4d into the heating chamber 8, and power distribution units 2a and 2c and amplification Phase variable units 3a to 3d that are inserted into the microwave propagation path connecting the units 4a to 4d and generate an arbitrary phase difference between input and output, and the microwave propagation path that connects the amplifiers 4a to 4d and the power feeding units 5a to 5d Depending on the reflected power detected by the power detectors 6a to 6d and the power detectors 6a to 6d that detect the microwave reflected power that is inserted and reflected from the power feeders 5a to 5d in the direction of the amplifiers 4a to 4d. Oscillation unit 1a, are constituted by a control unit 7 for controlling the phase of the oscillation frequency and the phase variable parts 3a~3d of 1c.
また、本発明のマイクロ波処理装置は、被加熱物９を収納する略直方体構造からなる加熱室８を有し、加熱室８は金属材料からなる壁面および被加熱物９を収納するために開閉する開閉扉（図示していない）と、被加熱物９を載置する載置台１２にて、供給されるマイクロ波を内部に閉じ込めるように構成している。そして、発振部１ａ、１ｃで発生したマイクロ波出力が伝播され、加熱室８内に放射供給する４ヶ所の給電部５ａ〜５ｄは全て加熱室８を構成する壁面の底壁面に配置されている。 In addition, the microwave processing apparatus of the present invention has a heating chamber 8 having a substantially rectangular parallelepiped structure for storing the object 9 to be heated, and the heating chamber 8 is opened and closed to store the wall surface and the object 9 to be heated. The microwave to be supplied is confined in the opening / closing door (not shown) and the mounting table 12 on which the object to be heated 9 is mounted. Then, the microwave output generated in the oscillation units 1 a and 1 c is propagated, and the four power supply units 5 a to 5 d that radiate and supply the heating chamber 8 are all arranged on the bottom wall surface of the wall that constitutes the heating chamber 8. .
増幅部４ａ〜４ｄは、低誘電損失材料から構成した誘電体基板の片面に形成した、導電体パターンにて回路を構成し、各増幅部４ａ〜４ｄの増幅素子である半導体素子を良好に動作させるべく、各半導体素子の入力側と出力側にそれぞれ整合回路を配している。電力分配部２ａ、２ｃは、例えばウィルキンソン型分配器のような出力間に位相差を生じない同相分配器であってもよいし、ブランチライン型やラットレース型のような出力間に位相差を生じる分配器であっても構わない。 The amplifying units 4a to 4d configure a circuit with a conductor pattern formed on one side of a dielectric substrate made of a low dielectric loss material, and operate the semiconductor elements that are the amplifying elements of the amplifying units 4a to 4d satisfactorily. In order to achieve this, matching circuits are provided on the input side and output side of each semiconductor element. The power distribution units 2a and 2c may be in-phase distributors that do not cause a phase difference between outputs such as a Wilkinson distributor, or may have a phase difference between outputs such as a branch line type or a rat race type. It may be the resulting distributor.
この電力分配部２ａ、２ｃによって、各々の出力には発振部１ａ、１ｃから入力されたマイクロ波電力の略１／２の電力が伝播される。位相可変部３ａ〜３ｄは、印加電圧に応じて容量が変化する容量可変素子を用いて構成し、各々の位相可変範囲は、０度から略１８０度の範囲としている。これによって位相可変部３ａ〜３ｄより出力されるマイクロ波電力の位相差は０度から±１８０度の範囲を制御することができる。 By the power distribution units 2a and 2c, approximately 1/2 of the microwave power input from the oscillation units 1a and 1c is propagated to the respective outputs. The phase variable units 3a to 3d are configured using a variable capacitance element whose capacitance changes according to the applied voltage, and each phase variable range is a range from 0 degrees to about 180 degrees. As a result, the phase difference of the microwave power output from the phase variable units 3a to 3d can be controlled in the range of 0 degree to ± 180 degrees.
電力検出部６ａ〜６ｄは、給電部５ａ〜５ｄから増幅部４ａ〜４ｄ方向に反射するマイクロ波、いわゆる反射波の電力を抽出するものであり、電力結合度を例えば約４０ｄＢとし、反射電力の約１／１００００の電力量を抽出する。この電力信号は、それぞれ検波ダイオード（図示していない）で整流化しコンデンサ（図示していない）で平滑処理して、その出力信号を制御部７に入力させている。 The power detection units 6a to 6d extract microwaves reflected from the power supply units 5a to 5d in the direction of the amplification units 4a to 4d, so-called reflected wave power. The power coupling degree is, for example, about 40 dB, and the reflected power About 1/10000 of the amount of power is extracted. The power signals are rectified by a detection diode (not shown), smoothed by a capacitor (not shown), and the output signal is input to the control unit 7.
制御部７は、使用者が直接入力する被加熱物９の加熱条件、あるいは加熱中に被加熱物９の加熱状態を検知する検知器から得られる加熱情報と、電力検出部６ａ〜６ｄの検出情報とに基づいて、マイクロ波発生部の構成要素である発振部１ａ、１ｃと増幅部４ａ〜４ｄのそれぞれに供給する駆動電力の制御や位相可変部３ａ〜３ｄに供給する電圧を制御し、加熱室８内に収納された被加熱物９を最適に加熱する。 The control unit 7 includes heating information obtained from a detector for detecting the heating condition of the article 9 to be heated, which is directly input by the user, or a heating state of the article 9 to be heated, and detection by the power detection units 6a to 6d. Based on the information, control of the driving power supplied to each of the oscillation units 1a, 1c and the amplification units 4a-4d, which are components of the microwave generation unit, and the voltage supplied to the phase variable units 3a-3d, The object to be heated 9 accommodated in the heating chamber 8 is optimally heated.
以上のように構成されたマイクロ波処理装置について、以下その動作、作用を説明する。 About the microwave processing apparatus comprised as mentioned above, the operation | movement and an effect | action are demonstrated below.
まず、被加熱物９を加熱室８に収納し、その加熱条件を操作部（図示していない）から入力し、加熱開始キーを押す。加熱開始信号を受けた制御部７の制御出力信号により、マイクロ波発生部が動作を開始する。制御手段７は、駆動電源（図示していない）を動作させて発振部１ａ、１ｃに電力を供給する。この時、発振部１ａ、１ｃの初期の発振周波数は、例えば２４００ＭＨｚに設定する電圧信号を供給し、発振が開始する。発振部１ａ、１ｃを動作させると、その出力は電力分配部２ａ、２ｃにて各々略１／２分配され、４つのマイクロ波電力信号となる。以降、駆動電源を制御して増幅部４ａ〜４ｄを動作させる。そして、それぞれのマイクロ波電力信号は、並列動作する増幅部４ａ〜４ｄ、電力検出部６ａ〜６ｄを経て、給電部５ａ〜５ｄにそれぞれ出力され、加熱室８内に放射される。 First, the object to be heated 9 is stored in the heating chamber 8, the heating condition is input from an operation unit (not shown), and the heating start key is pressed. In response to the control output signal of the control unit 7 that has received the heating start signal, the microwave generation unit starts its operation. The control means 7 operates a drive power supply (not shown) to supply power to the oscillation units 1a and 1c. At this time, the initial oscillation frequency of the oscillation units 1a and 1c is supplied with a voltage signal set to 2400 MHz, for example, and oscillation starts. When the oscillating units 1a and 1c are operated, their outputs are distributed approximately ½ each by the power distributing units 2a and 2c, resulting in four microwave power signals. Thereafter, the drive power supply is controlled to operate the amplification units 4a to 4d. The microwave power signals are output to the power feeding units 5 a to 5 d through the amplification units 4 a to 4 d and the power detection units 6 a to 6 d that operate in parallel, and are radiated into the heating chamber 8.
加熱室８内に供給されるマイクロ波電力が被加熱物に１００％吸収されると、加熱室８からの反射電力は０Ｗになるが、被加熱物９の種類・形状・量により加熱室８のインピーダンスが変わり、マイクロ波電力供給側との整合ずれなどにより、給電部５ａ〜５ｄから増幅部４ａ〜４ｄ方向に伝播するマイクロ波反射電力が生じる。電力検出器６ａ〜６ｄは、このマイクロ波反射電力を検出し、その反射電力量に比例した検出信号を制御部７に送る。 When 100% of the microwave power supplied into the heating chamber 8 is absorbed by the object to be heated, the reflected power from the heating chamber 8 becomes 0 W. However, the heating chamber 8 depends on the type, shape, and amount of the object 9 to be heated. As a result, the microwave reflected power propagates in the direction from the power supply units 5a to 5d to the amplification units 4a to 4d due to misalignment with the microwave power supply side. The power detectors 6 a to 6 d detect the microwave reflected power and send a detection signal proportional to the reflected power amount to the control unit 7.
制御部７は、加熱室８に収容された被加熱物９を加熱処理する前段階で、発振部１ａ、１ｃと位相可変部３ａ〜３ｄとを制御して、電力検出器６ａ〜６ｄで検出する反射電力を極小化する発振周波数を見極め、加熱処理条件を確定する予備検出動作を行う。予備検出動作で制御部７は、発振部１ａ、１ｃの発振周波数を例えば２４００ＭＨｚから１ＭＨｚピッチで、周波数可変範囲の上限である２５００ＭＨｚに到達するまで動作させ、同時に、給電部５ａ〜５ｄから増幅部４ａ〜４ｄ方向に反射するマイクロ波電力を電力検出器６ａ〜６ｄにて検出することで、反射電力を最小とする発振周波数情報を得ることができる。 The control unit 7 controls the oscillation units 1a and 1c and the phase variable units 3a to 3d and detects them by the power detectors 6a to 6d before the heat treatment of the object 9 accommodated in the heating chamber 8. The preliminary detection operation is performed to determine the oscillation frequency for minimizing the reflected power to be generated and to determine the heat treatment condition. In the preliminary detection operation, the control unit 7 operates the oscillation frequencies of the oscillation units 1a and 1c from 2400 MHz to 1 MHz, for example, until reaching the upper limit of the frequency variable range of 2500 MHz, and at the same time from the power supply units 5a to 5d. By detecting the microwave power reflected in the directions 4a to 4d by the power detectors 6a to 6d, it is possible to obtain oscillation frequency information that minimizes the reflected power.
同様に、略対称に配置した給電部組合せ間の相対的位相差を位相可変部３ａ〜３ｄの制御により調整し、電力検出器６ａ〜６ｄで検出する反射電力を極小化する位相制御条件を見極めることができる。制御部７は、反射電力が最も小さくなる発振周波数と位相差の条件で、発振部１ａ、１ｃおよび位相可変部３ａ〜３ｄを制御するとともに、入力された加熱条件に対応した出力が得られるように発振出力を制御する。制御部７の制御に応じた発振周波数のマイクロ波は、増幅部４ａ〜４ｄで、制御に応じた電力となり、それぞれの給電部５ａ〜５ｄ入力部に制御に応じた位相差で供給され、さらに加熱室８内に放射される。 Similarly, the relative phase difference between the power feeding unit combinations arranged substantially symmetrically is adjusted by the control of the phase variable units 3a to 3d, and the phase control condition for minimizing the reflected power detected by the power detectors 6a to 6d is determined. be able to. The control unit 7 controls the oscillation units 1a and 1c and the phase variable units 3a to 3d under the conditions of the oscillation frequency and the phase difference at which the reflected power is minimized so that an output corresponding to the input heating condition can be obtained. To control the oscillation output. The microwaves of the oscillation frequency according to the control of the control unit 7 become power according to the control in the amplification units 4a to 4d, supplied to the respective power feeding units 5a to 5d with a phase difference corresponding to the control, and Radiated into the heating chamber 8.
このように、予備検出動作で得た反射電力を最小とする発振周波数情報および位相制御条件に基づいて、被加熱物９を含む加熱室８内の特性に合わせて、動作を開始することで加熱室８に放射したマイクロ波を効率的に被加熱物９に吸収させることができ、さらに、加熱処理中もマイクロ波処理の経過時間や、赤外線センサーなど別途設けた検知器の検知結果および予備検出動作を再度繰り返して得られた検出結果に基づき、被加熱物９を含む加熱室８内の特性の変化に合わせた動作条件の修正を行うことで、様々な形状・種類・量
の異なる被加熱物９に対しても、反射電力が最も小さくなる思惑通りの設定条件で、高効率な加熱を開始することができ、増幅部４ａ〜４ｄに備えられた半導体素子が、反射電力によって過剰に発熱することも防止でき、熱的な破壊を回避することができる。
In this way, heating is started by starting the operation in accordance with the characteristics in the heating chamber 8 including the article 9 to be heated, based on the oscillation frequency information and the phase control conditions that minimize the reflected power obtained in the preliminary detection operation. Microwaves radiated to the chamber 8 can be efficiently absorbed by the article 9 to be heated, and also during the heat treatment, the elapsed time of the microwave treatment, the detection result of a separate detector such as an infrared sensor, and preliminary detection Based on the detection result obtained by repeating the operation again, the operation conditions are modified in accordance with the changes in the characteristics in the heating chamber 8 including the object 9 to be heated, so that various shapes, types, and amounts of heated Also for the object 9, high-efficiency heating can be started under the setting conditions as expected so that the reflected power is minimized, and the semiconductor elements provided in the amplification units 4a to 4d generate excessive heat due to the reflected power. To do You can stop, it is possible to avoid thermal destruction.
次に、給電部５ａ〜５ｄの配置とマイクロ波電力の分布との関係について説明する。 Next, the relationship between the arrangement of the power feeding units 5a to 5d and the distribution of the microwave power will be described.
図２は、本発明の第１の実施の形態におけるマイクロ波処理装置の斜視図である。 FIG. 2 is a perspective view of the microwave processing apparatus according to the first embodiment of the present invention.
図２において、加熱室８の載置台１２下側の底壁面に、４ヶ所の給電部５ａ〜５ｄが、給電部５ａ、５ｂおよび給電部５ｃ、５ｄの組合せで、加熱室中心軸１３上の中心点１０に対して、略対称な位置に設置されている。更に、給電部５ａ、５ｂの放射マイクロ波電界の励振方向１１ａが同じ向きとなるよう設置され、給電部５ａ、５ｂからのマイクロ波は、加熱室中心軸１３に対して、略対称な放射特性となる。給電部５ａ、５ｂそれぞれから放射された略対称な放射特性で、ほぼ同等な小電力のマイクロ波が、対等に相互干渉して合成し、大電力で指向性の強いマイクロ波分布を加熱室内に発生させる。 In FIG. 2, four power feeding portions 5 a to 5 d are provided on the bottom wall surface of the heating chamber 8 on the lower side of the mounting table 12, on the heating chamber central axis 13 by a combination of the power feeding portions 5 a and 5 b and the power feeding portions 5 c and 5 d. It is installed at a position that is substantially symmetrical with respect to the center point 10. Further, the power supply units 5 a and 5 b are installed so that the excitation directions 11 a of the radiated microwave electric fields are the same, and the microwaves from the power supply units 5 a and 5 b have substantially symmetric radiation characteristics with respect to the heating chamber central axis 13. It becomes. Microwaves of approximately equal low power radiated from each of the power feeding units 5a and 5b, which are substantially the same, are synthesized by mutual interference, and a microwave distribution with high power and strong directivity is generated in the heating chamber. generate.
給電部５ａ、５ｂ間の相対的位相をずらすと、給電部５ａ、５ｂそれぞれから放射されたマイクロ波の相互干渉位置が給電部５ａ、５ｂを結ぶ線方向に変動し、強いマイクロ波分布の位置を操作することができる。給電部５ｃ、５ｄも同様にマイクロ波放射方向が略対称で、励振方向１１ｃが同じ向きとなるよう設置され、略対称な放射特性となり、相互干渉により発生するマイクロ波分布の位置を相対的位相制御で操作することができる。 When the relative phase between the power feeding parts 5a and 5b is shifted, the mutual interference position of the microwaves radiated from the power feeding parts 5a and 5b fluctuates in the line direction connecting the power feeding parts 5a and 5b, and the position of the strong microwave distribution Can be operated. Similarly, the power feeding units 5c and 5d are installed so that the microwave radiation directions are substantially symmetric and the excitation directions 11c are the same direction, so that they have substantially symmetric radiation characteristics, and the positions of the microwave distributions generated by mutual interference are relative phase. Can be operated by control.
４ヶ所の給電部５ａ〜５ｄ全てを合成したマイクロ波分布は、励振方向１１ａ、１１ｃの向きにより特性が決まる。励振方向１１ａ、１１ｃが直交している場合、給電部５ａ、５ｂの相互干渉で発生したマイクロ波分布と、給電部５ｃ、５ｄの相互干渉で発生したマイクロ波分布とは、相互の干渉がほとんど無く、給電部５ａ、５ｂおよび給電部５ｃ、５ｄそれぞれのマイクロ波分布を単純に重ね合わせた加熱が行なわれる。励振方向１１ａ、１１ｃが直交しない場合は、その角度の直角からのずれに見合った相互干渉が起こり、給電部５ａ、５ｂおよび給電部５ｃ、５ｄそれぞれのマイクロ波分布が合成され、より指向性の強いマイクロ波分布を加熱室８内に発生させる。 The characteristics of the microwave distribution obtained by synthesizing all the four power feeding units 5a to 5d are determined by the directions of the excitation directions 11a and 11c. When the excitation directions 11a and 11c are orthogonal to each other, there is almost no mutual interference between the microwave distribution generated by the mutual interference of the power feeding units 5a and 5b and the microwave distribution generated by the mutual interference of the power feeding units 5c and 5d. Without heating, heating is performed by simply superimposing the microwave distributions of the power feeding units 5a and 5b and the power feeding units 5c and 5d. When the excitation directions 11a and 11c are not orthogonal to each other, mutual interference corresponding to the deviation of the angle from the right angle occurs, and the microwave distributions of the power feeding units 5a and 5b and the power feeding units 5c and 5d are combined, and more directivity is achieved. A strong microwave distribution is generated in the heating chamber 8.
以上説明のように、給電部５ａ、５ｂおよび給電部５ｃ、５ｄのそれぞれの組合せ内では、被加熱物９設置水平面の略中心に略対称な位置に設置し、周波数および出力値をほぼ一致させ、略対称な放射特性にしているので、給電部５ａ、５ｂおよび給電部５ｃ、５ｄのそれぞれの組合せ内での相対的位相制御により、マイクロ波分布の位置を操作でき、両者のマイクロ波分布を重ね合わせまたは合成して強いマイクロ波分布の位置を２次元方向へ操作することができる。例えば、略対称な放射特性の給電部５ａ、５ｂそれぞれから放射されたマイクロ波が、対等に相互干渉して合成した大電力で、指向性の強いマイクロ波分布の位置を相対的位相制御で、被加熱物９設置水平面の略中心へ操作し、同時に給電部５ｃ、５ｄ組合せに対しても同様の制御を行うと、マイクロ波分布を強く中央に集中させることができる。 As described above, in each combination of the power feeding units 5a and 5b and the power feeding units 5c and 5d, the heating target 9 is installed at a substantially symmetric position about the center of the installation horizontal plane, and the frequency and the output value are substantially matched. Therefore, the position of the microwave distribution can be manipulated by the relative phase control in each combination of the power feeding units 5a and 5b and the power feeding units 5c and 5d. The position of a strong microwave distribution can be manipulated in a two-dimensional direction by superposition or synthesis. For example, the microwaves radiated from the power supply units 5a and 5b having substantially symmetric radiation characteristics are combined with each other by mutual interference, and the position of the highly directional microwave distribution is controlled by relative phase control. By operating to the approximate center of the horizontal surface of the article 9 to be heated and simultaneously performing the same control for the combination of the power feeding units 5c and 5d, the microwave distribution can be strongly concentrated in the center.
また、給電部５ａ、５ｂおよび給電部５ｃ、５ｄのそれぞれの組合せ内で周波数および出力値をほぼ一致させて、略対称な放射特性にして、相対的位相制御によるマイクロ波分布の位置操作をし、両者組合せ間では、周波数や出力値を違えて、両者のマイクロ波分布を重ね合わせまたは合成した強いマイクロ波分布の位置を制御することもできる。 In addition, the frequency and the output value are substantially matched in each combination of the power feeding units 5a and 5b and the power feeding units 5c and 5d so that the radiation characteristics are substantially symmetrical, and the position of the microwave distribution is controlled by relative phase control. It is also possible to control the position of the strong microwave distribution obtained by superimposing or synthesizing both microwave distributions by changing the frequency and output value between the two combinations.
このように動作することで強いマイクロ波分布の操作ができ、加熱室８に放射したマイクロ波を効率的に被加熱物９に吸収させることができ、様々な形状・種類・量の異なる被加熱物を高効率で最適に加熱することができる。 By operating in this way, it is possible to operate a strong microwave distribution, the microwaves radiated to the heating chamber 8 can be efficiently absorbed by the object 9 to be heated, and the objects to be heated of various shapes, types and amounts are different. The object can be optimally heated with high efficiency.
本実施の形態では４ヶ所給電の構成を示しているが、本実施の形態に拘束されるものではなく、給電部を増やしたりした場合も同様にそれぞれの励振方向角度に見合った相互干渉が起こり、マイクロ波分布を合成または重ね合わせたマイクロ波分布を加熱室８内に発生させることができ、同様に相対的位相制御をすることで、発生するマイクロ波分布の位置を操作することができる。 In this embodiment, the configuration of power feeding at four points is shown. However, the present embodiment is not restricted to this embodiment, and when the number of feeding parts is increased, mutual interference corresponding to each excitation direction angle occurs in the same manner. A microwave distribution obtained by combining or superimposing the microwave distributions can be generated in the heating chamber 8, and the position of the generated microwave distribution can be manipulated by performing relative phase control in the same manner.
以上のように、本発明にかかるマイクロ波処理装置は、偶数で４ヶ所以上の給電部全てを加熱室の底壁面に略対称に配置し、略対称配置給電部間の位相差制御によりマイクロ波分布を操作できるので、電子レンジで代表されるような誘電加熱を利用した処理装置や生ゴミ処理機、あるいは半導体製造装置であるプラズマ電源のマイクロ波電源などの用途にも適用できる。 As described above, in the microwave processing apparatus according to the present invention, all even four or more power supply units are arranged substantially symmetrically on the bottom wall surface of the heating chamber, and the microwave is controlled by phase difference control between the substantially symmetrically arranged power supply units. Since the distribution can be manipulated, the present invention can be applied to a processing apparatus and a garbage processing machine using dielectric heating as represented by a microwave oven, or a microwave power source of a plasma power source as a semiconductor manufacturing apparatus.
１ａ、１ｃ 発振部
２ａ、２ｃ 電力分配部
３ａ〜３ｄ 位相可変部
４ａ〜４ｄ 増幅部
５ａ〜５ｄ 給電部
６ａ〜６ｄ 電力検出部
７ 制御部
８ 加熱室
９ 被加熱物
１０ 中心点
１１ａ、１１ｃ 励振方向
１２ 載置台
１３ 加熱室中心軸
DESCRIPTION OF SYMBOLS 1a, 1c Oscillation part 2a, 2c Power distribution part 3a-3d Phase variable part 4a-4d Amplification part 5a-5d Power supply part 6a-6d Power detection part 7 Control part 8 Heating chamber 9 Heated object 10 Center point 11a, 11c Excitation Direction 12 Mounting table 13 Central axis of heating chamber
Claims (8)
前記制御部は前記加熱室に収容された前記被加熱物を加熱処理する前段階で、前記給電部から前記増幅部方向に反射するマイクロ波電力が最小となる周波数を検出する予備検出動作を行う構成とし、
前記給電部は、前記加熱室の底壁面に４ヶ所以上の偶数ヶ所に配置され、前記加熱室の被加熱物設置水平面の略中心を通る垂直軸上の点に対し略対称に２つの前記給電部の組合せを複数設け、前記給電部の組合せを構成する２つの前記給電部間を結ぶ線が前記複数の給電部の組合せにおいて交差するように配置され、前記給電部の組合せは前記加熱室へ放射するマイクロ波電界の励振方向が一致するように配置され、
前記制御部は、前記予備検出動作の検出結果に基づき前記複数の給電部の組合せ毎に供給するマイクロ波の相対的位相を制御すると共に、位相制御する前記給電部の組合せ間で前記給電部それぞれから放射されるマイクロ波電力を略一致させる構成としたマイクロ波処理装置。 A heating chamber that accommodates an object to be heated; an oscillation unit; a power distribution unit that distributes and outputs the output of the oscillation unit; and a phase variable unit that varies at least one output phase of the power distribution unit; An amplifying unit that amplifies the output of each of the power distribution unit and / or the phase variable unit, a feeding unit that supplies the output of the amplifying unit to the heating chamber, and a reflection from each feeding unit toward the amplifying unit A power detection unit for detecting the microwave power, and a control unit for controlling the oscillation frequency of the oscillation unit and the phase amount of the phase variable unit,
The controller performs a pre-detection operation for detecting a frequency at which the microwave power reflected from the power supply unit toward the amplification unit is minimized before the object to be heated housed in the heating chamber is heat-treated. With configuration,
The power feeding units are arranged at an even number of four or more places on the bottom wall surface of the heating chamber, and the two power feedings are substantially symmetrical with respect to a point on a vertical axis passing through a substantial center of a heated object installation horizontal plane of the heating chamber. A plurality of combinations of parts are provided, and a line connecting the two power feeding parts constituting the combination of the power feeding parts is arranged to intersect in the combination of the plurality of power feeding parts, and the combination of the power feeding parts is connected to the heating chamber It is arranged such the direction of excitation of the microwave electric field for emitting match,
The control unit controls the relative phase of the microwaves to be supplied for each combination of the plurality of power supply units based on the detection result of the preliminary detection operation, and each of the power supply units between the combinations of the power supply units to be phase-controlled. A microwave processing apparatus configured to substantially match the microwave power radiated from the apparatus.
クロ波処理装置。 The microwave according to claim 1 or 2 , wherein the control unit is configured to control a frequency of a microwave to be supplied for each of a plurality of combinations of power feeding units arranged substantially symmetrically based on a detection result of the preliminary detection operation. Processing equipment.
The control unit is arranged approximately symmetrically based on the elapsed time of the microwave processing, the detection result of the detector that detects the microwave processing progress state of the object to be heated, and the detection result obtained by repeating the preliminary detection operation again. The microwave processing apparatus according to any one of claims 1 and 2, or 4 to 6, wherein the microwave frequency value controlled for each of the plurality of combinations of the power feeding units is varied.
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