JP5213440B2 - 基板容器及び基板容器用の作動サブアッセンブリ - Google Patents
基板容器及び基板容器用の作動サブアッセンブリ Download PDFInfo
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Description
通常、搬送容器はシリコンウエハや磁性ディスクの加工の前、間及び後において一括して該ウエハーやディスクを搬送及び/又は貯蔵するのに利用される。前記ウエハーは集積回路へと加工され、ディスクはコンピュータ用の磁性記憶ディスクへと加工されることができる。ウエハー、ディスク、基板といった用語はこの記載中においては置換可能に用いられており、これらの用語はいずれも他に特に示されていないかぎり、半導体ウエハー、磁性ディスク、フラットパネル基板や他の同様な基板を推し得る。
図1Aは、ウエハー容器102、底部104及び囲み部106を有するウエハー容器組立体100の一例を図示している。底部104はウエハー容器102を外気108から隔離することができる内部空間を形成するために囲み部106と密封的に係合するためのものである。図1に示すように、ウエハー容器102はその内部に複数のシリコンウエハを保持し、位置を決めるための複数の構成部材110を有することができる。通常、構成部材110は隣接するウエハーとの接触が最小となるようシリコンウエハを保持し位置決めし、これによって、シリコンウエハの加工及び/または輸送中に起こり得るウエハーの損傷を減らすことができる。図1Bは、開口した前部104、前部ドア105、及び囲み部107を有しFOUPsまたはFOSBとして知られる他の形状のウエハー容器組立体103を図示している。ウエハーWは開口した前部から水平方向に取り出すことができる。内部側に形成されたスロットはウエハーを保持する。シールを備えた前部ドア105は、外気から隔離された内部空間を形成するために囲み部107と密封的に係合する。ウエハー容器の構造は、参照によってここに導入する、例えばバートら(Bhatt et al. )の複合基板キャリヤ(CompositeSubstrate Carrier)という名称の米国特許第6,428,729号に記載されている。加えて、前開口部及びそこに係止するドアを有し、FOUPsまたはFOSBsとして知られるウエハー搬送容器は本出願の出願人によって所有され、参照によってここに導入する、例えば米国特許第6,354,601号、同5,788,082号、同6,010,008号に記載されている。グロメット124、125用の受容構造109が囲み部の底壁中にあり得る。
Claims (25)
- 開いた側または底をもつ囲み部と、前記開いた側または底を密閉するためのドアと、第1の弾性グロメットとを有する基板容器であって、前記ドアと囲み部の一方は、前記囲み部に形成されて囲み部を介する基板容器の内部への流体アクセスを提供する第1アクセス構造を有し、該第1アクセス構造は容器内から容器外へと通じる開口部を有し、また前記第1アクセス構造は円筒状の内向面を有し、前記内向面は前記基板容器の外部から内部へと前記囲み部の厚さにわたって少なくとも部分的に延びる高さを有し、前記第1の弾性グロメットは 貫通穴を有するほぼ円筒状の形状を有し、かつ前記第1アクセス構造の円筒状内向面と係合して該円筒状内向面との半径方向の流体密封を行なうよう形成された円筒状の外向面と、前記基板容器の外側に露出しておりパージ装置の一部であるノズル又は突起部に対する密封面を提供する軸方向の着座面とを有し、該着座面は前記貫通穴と前記外向面との間に位置する端面に設けられ、前記第1の弾性グロメットの貫通穴は前記密封面内に位置する流路を提供しており、
前記第1の弾性グロメットの貫通穴に設けられた作動部材をさらに有し、前記貫通穴は前記作動部材との半径方向の流体密封を行なう密封面を提供している、基板容器。 - 囲み部内に形成されて、囲み部を介する基板容器内への流体アクセスを提供する第2アクセス構造を有し、該第2アクセス構造は容器内から容器外へと通じる開口部を有し、また前記第2アクセス構造は円筒状の内向面を有し、さらに前記第2アクセス構造の円筒状内向面と係合するよう形成された円筒状の外向面を有する第2の弾性グロメットを有する請求項1の基板容器。
- 前記第1及び第2の弾性グロメットの各々が一つの軸を有し、前記第1及び第2アクセス構造の各々が、対応する前記第1若しくは第2の弾性グロメットの軸に対して垂直に位置しており且つ前記開口部内に広がる壁を有し、
前記第1アクセス構造の前記壁及び前記第2アクセス構造の前記壁の各々が保持面及び反対の外部に露出した面を有しており、前記壁の各々がそこを通る複数の穴を備えている請求項2の基板容器。 - 前記第1及び第2アクセス構造の前記壁の各々が少なくとも部分的にグロメットを保持している請求項3の基板容器。
- 前記第1の弾性グロメットの外向面にはテーパが付けられている請求項1の基板容器。
- 前記作動部材が弁を有する請求項5の基板容器。
- 前記第1の弾性グロメットが平面状の端面を有し、前記作動部材が前記平面状の端面と前記第1アクセス構造との間に位置すると共に前記端面及び前記第1アクセス構造と接触している請求項1の基板容器。
- 前記作動部材がフィルタを有する請求項7の基板容器。
- 前記作動部材がセンサーを有する請求項5の基板容器。
- 前記第1の弾性グロメットが一対の端面を有し、前記作動部材が二つの端面の中間に実質的に位置する請求項5の基板容器。
- 前記作動部材が逆止弁であり、前記第1の弾性グロメットによってフィルタが定位置に拘束されている請求項10の基板容器。
- 前記第1の弾性グロメットがパージ連結部と係合するための外部に露出した平面状の端面を有する請求項5の基板容器。
- 前記第1の弾性グロメットが基板容器の内部と外部のパージ装置との間の流体密封的な接続を容易にすることができる外部に露出した接触面を有する請求項1の基板容器。
- 前記第1の弾性グロメットが外部のパージ用部品との密封を容易にする少なくとも一つの特徴構造を有する本体を含む請求項1の基板容器。
- パージ用ポートと、弾性グロメットと、逆止弁とを有する基板容器であって、
前記パージ用ポートは、基板容器の外部から内部へと該基板容器の厚さにわたって少なくとも部分的に延びる高さを有し、
前記弾性グロメットは、前記パージ用ポート内に密封的に配置されていてパージ用ポートとの半径方向の流体密封を与えており、前記弾性グロメットは貫通穴を有するほぼ円筒状の形状を有し、該貫通穴は前記基板容器の内部から外部へと延びる流路を提供し、前記基板容器の外部に露出しておりパージ装置の一部であるノズル又は突起部に対して軸方向に係合可能な密封面を提供する着座面を有し、該着座面は前記弾性グロメットの端面に設けられ、
前記逆止弁は前記貫通穴の中に設置されていて前記弾性グロメットと半径方向に密封係合している、基板容器。 - 囲み部と、
囲み部との流体密封的な係合を確立し、内部空間を形成するためのふた部、とを有する基板容器であって、
ふた部と囲み部の少なくとも一方が、少なくとも一つの流入口と、流出口と、流体排出部とを含む少なくとも一つのアクセス構造を有し、
少なくとも一つのアクセス構造がそれと半径方向に流体密封的に係合する弾性グロメットを保持し、
前記弾性グロメットが貫通穴を有するほぼ円筒状の形状を有し、該貫通穴は前記基板容器の内部から外部への流路を提供する流体通路を形成し、前記貫通穴は少なくとも一つの作動部材を半径方向の流体密封的に係合した状態で保持する円筒面を有し、前記弾性グロメットは、前記貫通穴の周囲に前記基板容器の外部に露出してパージ装置の一部であるノズル又は突起部と軸方向に密封連結される密封面を提供する着座面を有する基板容器。 - ふた部が複数のアクセス構造を有する請求項16の基板容器。
- 少なくとも一つのアクセス構造が前記弾性グロメットと密封的に連通する内部表面を有する流路を含む請求項16の基板容器。
- 少なくとも一つの作動部材が逆止弁を有する請求項16の基板容器。
- 少なくとも一つの作動部材がフィルタを有する請求項16の基板容器。
- 前記弾性グロメットが減圧源又は流体供給源と基板容器の内部空間との間の密封係合を容易にするためのものである請求項16の基板容器。
- 前記弾性グロメットが外部露出面と連結するノズルを有する請求項16の基板容器。
- ほぼ円筒形状の弾性グロメットと第1の作動部材とを有し、
前記弾性グロメットは(a)基板容器の隣接した適合表面に対する半径方向の流体密封シールを維持するための外部表面と(b)隣接した適合表面に対する流体密封シールを維持するための内部表面を有し、前記基板容器の内部から外部への流路を提供する穴と(c)前記穴の周囲において当該弾性グロメットの外部に露出しておりパージ装置の一部であるノズル又は突起部と軸方向に密封連結する密封面を提供する着座面を備えた端面とを有し、
前記第1の作動部材は全体が前記穴内に収容された状態で前記穴内に設置され、前記穴の内部表面と適合して前記弾性グロメットとの流体密封をOリングを用いることなく提供する外部表面を有している
基板容器用の作動サブアッセンブリ。 - 前記第1の作動部材が弁である請求項23の作動サブアッセンブリ。
- 前記弾性グロメットによって保持されたフィルタをさらに有する請求項23の作動サブアッセンブリ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56352804P | 2004-04-18 | 2004-04-18 | |
US60/563,528 | 2004-04-18 | ||
US11/108,619 US7328727B2 (en) | 2004-04-18 | 2005-04-17 | Substrate container with fluid-sealing flow passageway |
US11/108,619 | 2005-04-17 | ||
PCT/US2005/013261 WO2005102872A2 (en) | 2004-04-18 | 2005-04-18 | Substrate container with fluid-sealing flow passageway |
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JP2011042017A Division JP5301589B2 (ja) | 2004-04-18 | 2011-02-28 | ウエハー容器をパージする方法 |
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JP2007508637A Active JP5213440B2 (ja) | 2004-04-18 | 2005-04-18 | 基板容器及び基板容器用の作動サブアッセンブリ |
JP2011042017A Active JP5301589B2 (ja) | 2004-04-18 | 2011-02-28 | ウエハー容器をパージする方法 |
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JP2011042017A Active JP5301589B2 (ja) | 2004-04-18 | 2011-02-28 | ウエハー容器をパージする方法 |
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US (3) | US7328727B2 (ja) |
EP (1) | EP1737763A2 (ja) |
JP (2) | JP5213440B2 (ja) |
KR (1) | KR101213311B1 (ja) |
CN (1) | CN101683650B (ja) |
WO (1) | WO2005102872A2 (ja) |
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-
2005
- 2005-04-17 US US11/108,619 patent/US7328727B2/en active Active
- 2005-04-18 WO PCT/US2005/013261 patent/WO2005102872A2/en active Application Filing
- 2005-04-18 CN CN200910148668XA patent/CN101683650B/zh active Active
- 2005-04-18 JP JP2007508637A patent/JP5213440B2/ja active Active
- 2005-04-18 EP EP05736974A patent/EP1737763A2/en not_active Withdrawn
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2006
- 2006-11-17 KR KR1020067024104A patent/KR101213311B1/ko active IP Right Grant
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2008
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- 2011-02-28 JP JP2011042017A patent/JP5301589B2/ja active Active
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- 2014-05-19 US US14/281,222 patent/US20150041359A1/en not_active Abandoned
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10453723B2 (en) | 2014-11-12 | 2019-10-22 | Miraial Co., Ltd. | Gas purge filter |
KR20200125717A (ko) | 2018-09-28 | 2020-11-04 | 미라이얼 가부시키가이샤 | 기판 수납 용기 |
US11887875B2 (en) | 2018-09-28 | 2024-01-30 | Miraial Co., Ltd. | Substrate storing container |
Also Published As
Publication number | Publication date |
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WO2005102872A3 (en) | 2006-12-21 |
US20080121560A1 (en) | 2008-05-29 |
US7328727B2 (en) | 2008-02-12 |
US20150041359A1 (en) | 2015-02-12 |
CN101683650A (zh) | 2010-03-31 |
US20050252827A1 (en) | 2005-11-17 |
KR20070007936A (ko) | 2007-01-16 |
WO2005102872A2 (en) | 2005-11-03 |
KR101213311B1 (ko) | 2012-12-17 |
US8727125B2 (en) | 2014-05-20 |
JP2011181930A (ja) | 2011-09-15 |
JP2007533166A (ja) | 2007-11-15 |
CN101683650B (zh) | 2011-12-21 |
EP1737763A2 (en) | 2007-01-03 |
JP5301589B2 (ja) | 2013-09-25 |
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