JP5201161B2 - Linear motor and table feeder using the same - Google Patents

Linear motor and table feeder using the same Download PDF

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JP5201161B2
JP5201161B2 JP2010055059A JP2010055059A JP5201161B2 JP 5201161 B2 JP5201161 B2 JP 5201161B2 JP 2010055059 A JP2010055059 A JP 2010055059A JP 2010055059 A JP2010055059 A JP 2010055059A JP 5201161 B2 JP5201161 B2 JP 5201161B2
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field
yoke
linear motor
magnetic
armature
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JP2011193554A (en
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和哉 湯川
敦志 川原
清剛 永松
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2010055059A priority Critical patent/JP5201161B2/en
Priority to KR20110019546A priority patent/KR101489031B1/en
Priority to CN201110053649.6A priority patent/CN102195437B/en
Priority to US13/042,477 priority patent/US20110219989A1/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • H02K1/278—Surface mounted magnets; Inset magnets

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)

Description

本発明は、工作機や半導体製造装置等のＦＡ機器のテーブル送りに利用されるリニアモータおよびそれを用いたテーブル送り装置に関する。   The present invention relates to a linear motor used for table feed of FA equipment such as a machine tool and a semiconductor manufacturing apparatus, and a table feed device using the linear motor.

通常、工作機や半導体製造装置等のＦＡ機器のテーブル送りに用いられるリニアモータとしては、界磁ヨーク上の進行方向に沿って交互に極性が異なる複数の永久磁石を隣り合わせに並べて配置した界磁部と、当該界磁部と磁気的空隙を介して対向する電機子コアに電機子巻線を巻装してなる電機子部とから構成されている。このようなリニアモータの界磁部を構成する永久磁石の個数を偶数個とすること（偶数極界磁）が一般的である（例えば、特許文献１参照）。   Usually, as a linear motor used for table feed of FA equipment such as a machine tool or a semiconductor manufacturing apparatus, a field magnet in which a plurality of permanent magnets having different polarities are arranged side by side along the traveling direction on the field yoke is arranged. And an armature portion in which an armature winding is wound around an armature core facing the field portion via a magnetic gap. In general, the number of permanent magnets constituting the field part of such a linear motor is an even number (even pole field) (see, for example, Patent Document 1).

一方、製造装置等の大型化により、発生電磁推力を低下させることなく、小型化し、軽量かつ経済的なリニアモータが要求されている。
そこで、リニアモータの小型化による界磁ヨークの磁気飽和を軽減し、発生電磁推力の低下を回避するために、界磁部を構成する永久磁石の個数を奇数個とするもの（奇数極界磁、例えば、特許文献２参照）、あるいは小型化し、軽量かつ経済的な奇数個の永久磁石を有するリニアモータを提供するために、界磁部における両端の永久磁石の幅寸法を他の永久磁石の幅寸法の２分の１とするものが提案されている（例えば、特許文献３参照） On the other hand, with the increase in the size of manufacturing apparatuses and the like, there is a demand for a linear motor that is small, light, and economical without reducing the generated electromagnetic thrust.
Therefore, in order to reduce the magnetic saturation of the field yoke due to the miniaturization of the linear motor and to avoid the decrease of the generated electromagnetic thrust, the number of permanent magnets constituting the field part is set to an odd number (odd pole field magnet). For example, in order to provide a linear motor having an odd number of permanent magnets that is lighter and economical in size, the width dimension of the permanent magnets at both ends in the field part can be reduced to that of other permanent magnets. The thing which makes it the half of the width dimension is proposed (for example, refer to patent documents 3).

特開２０００−０３７０７０JP 2000-037070 特開２０００−３４１９３０JP 2000-341930 A 特開平６−２４５４８０JP-A-6-245480

しかしながら、従来技術においては、例えば、特許文献２では界磁部の永久磁石を奇数極とすることにより、磁気的空隙における磁束密度にバイアスが生じ、発生電磁推力の低下を回避しても、モータ特性が十分に向上しないという問題があった。
また、特許文献３では界磁部の永久磁石を奇数個配置し、その両端の永久磁石の幅寸法を他の永久磁石の幅寸法の２分の１としているため、製造上、加工コストや作業工数がかかる。 However, in the prior art, for example, in Patent Document 2, by setting the permanent magnet of the field part to an odd-numbered pole, a bias is generated in the magnetic flux density in the magnetic air gap, and even if a decrease in the generated electromagnetic thrust is avoided, the motor There was a problem that the characteristics were not sufficiently improved.
Further, in Patent Document 3, an odd number of permanent magnets in the field portion are arranged, and the width dimension of the permanent magnets at both ends thereof is set to one half of the width dimension of other permanent magnets. It takes man-hours.

本発明はこのような問題点に鑑みてなされたものであり、製造性を向上させながら強度を維持しつつ、小型化し、軽量かつ経済的で、奇数極界磁ながらモータ特性の低下を回避するリニアモータおよびそれを用いたテーブル送り装置を提供することを目的とする。   The present invention has been made in view of the above problems, and while maintaining the strength while improving the manufacturability, the present invention is miniaturized, lightweight and economical, and avoids the deterioration of the motor characteristics while being an odd pole field. An object of the present invention is to provide a linear motor and a table feeder using the linear motor.

上記問題を解決するため、本発明は次のように構成したものである。
本発明は、平板状の一対の界磁ヨークにそれぞれ交互に極性が異なるように直線方向に並べて配置された複数個の永久磁石を有する界磁部と、前記界磁部と磁気的空隙を介して対向配置された電機子巻線を有する電機子部と、備え、前記界磁部と前記電機子部の何れか一方を固定子に、他方を移動子として相対的に走行するリニアモータにおいて、前記一対の界磁ヨークのそれぞれに配置される永久磁石が奇数個であり前記一対の界磁ヨークは、該界磁ヨークの直線方向と直交する方向の一方の端部を部分的に接続する磁性体のヨーク固定部材が設けられ、前記一対の界磁ヨークは、前記各々の界磁ヨークの直線方向に沿った両端の対称な位置にて前記ヨーク固定部材により接続され、前記永久磁石の極ピッチに対する前記ヨーク固定部材の幅の比が１．０以上であることを特徴としている。
本発明は、前記リニアモータにおいて、前記ヨーク固定部材と前記界磁ヨークの互いに直交する接続部位に強度メンバとなる非磁性部材を設けたことを特徴としている。
本発明は、前記リニアモータにおいて、前記界磁ヨークの両端に設けた前記ヨーク固定部材同士の間における空間部に強度メンバとなる非磁性部材を設けたことを特徴としている。
本発明は、前記リニアモータを用いたテーブル送り装置であることを特徴としている。 In order to solve the above problems, the present invention is configured as follows.
The present invention provides a field portion having a plurality of permanent magnets arranged in a linear direction so that the polarities are alternately different from each other on a pair of flat field yokes, and the field portion and the magnetic gap are interposed therebetween. An armature portion having armature windings arranged opposite to each other, and a linear motor that relatively travels using either the field portion or the armature portion as a stator and the other as a mover, the pair of the field each permanent magnet is disposed is an odd number of the pair of field yoke of the yoke, the magnetic connecting one end portion in the direction perpendicular to the linear direction of the interfacial magnetic yoke partially body yoke fixing member is provided with the pair of the field yoke, which is connected by a yoke fixing member at symmetrical positions of both ends along the linear direction of the each of the field yoke, the pole pitch of the permanent magnet Of the yoke fixing member against Is characterized in that the ratio of 1.0 or more.
The present invention, in the linear motor is characterized in that a non-magnetic member as a strength member to the connection portion which are perpendicular to each other of the yoke fixing member and the magnetic field yoke.
The present invention, in the above linear motor is characterized in that a non-magnetic member serving as strength members to the space between the yoke fixing members to each other provided on both ends of the field magnet yoke.
The present invention is characterized in that a table feed apparatus using the linear motor.

本発明によると、永久磁石の個数を奇数とする界磁部を構成する奇数極界磁リニアモータにおいて、界磁ヨークを部分的に接続する磁性体のヨーク固定部材を備えることによって、両端の漏洩磁束を減少させる。このため、電機子部からみた界磁部は、相対的に両端は周期的な境界があることになり、極数が偶数の場合と同等の界磁を得る。
本発明によると、リニアモータ効果を有するテーブル送り装置を実現することができる。 According to the present invention, in an odd pole field linear motor that constitutes a field part with an odd number of permanent magnets, leakage of both ends can be achieved by providing a magnetic yoke fixing member that partially connects the field yoke. Reduce magnetic flux. For this reason, the field part seen from the armature part has a periodic boundary relatively at both ends, and obtains a field equivalent to the case where the number of poles is an even number.
According to the present invention, it is possible to realize a table feed apparatus having a re linear motors effect.

本発明の第１実施形態を示すリニアモータ界磁部の全体斜視図、The whole perspective view of the linear motor field part which shows a 1st embodiment of the present invention, 第１実施形態におけるリニアモータ界磁部の磁束分布を説明するための模式図であって、（ａ）は全体正面図、（ｂ）は側面図、It is a schematic diagram for demonstrating the magnetic flux distribution of the linear motor field part in 1st Embodiment, Comprising: (a) is a whole front view, (b) is a side view, 第１実施形態の変形例を示すリニアモータ界磁部の全体斜視図、The whole perspective view of the linear motor field part which shows the modification of a 1st embodiment, 本発明の第２実施形態を示すリニアモータ界磁部の全体斜視図、The whole perspective view of the linear motor field part which shows a 2nd embodiment of the present invention, ヨーク固定部材の幅寸法に対する磁束密度の変化を示したグラフ、A graph showing the change in magnetic flux density with respect to the width dimension of the yoke fixing member, 第２実施形態の変形例を示すリニアモータ界磁部の全体斜視図、The whole perspective view of the linear motor field part which shows the modification of a 2nd embodiment, 本実施形態のリニアモータを工作機のテーブル送り装置に適用した例を示すものであって、（ａ）はその側断面図、（ｂ）は（ａ）のテーブルを取り外した状態を示すと共に進行方向に沿って上面から見た平面図The example which applied the linear motor of this embodiment to the table feeder of a machine tool is shown, Comprising: (a) is the sectional side view, (b) shows the state which removed the table of (a), and progresses Plan view seen from above along the direction

以下、本発明の実施の形態について図を参照して説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図１は、本発明の第１実施形態を示すリニアモータ界磁部の全体斜視図である。
図１において、本発明は、界磁部は一対の平板状の界磁ヨーク１ａ、１ｂと、該界磁ヨーク１ａ、１ｂ上のそれぞれに直線方向に沿って交互に極性が異なるように並べて配置された奇数個（本例では５個）の永久磁石２ａ〜２ｅで構成されている。また、界磁部を構成する永久磁石２ａ〜２ｅを配置した１対の界磁ヨーク１ａ、１ｂは、該界磁ヨークの直線方向（図１のストローク方向）と直交する方向の一方の端部を部分的に閉じるように二つのヨーク固定部材３ａ、３ｂ（磁性体）にて接続されると共に、該界磁ヨーク１ａ、１ｂの直線方向に沿った両端の対称な位置に配置されている。 FIG. 1 is an overall perspective view of a linear motor field part showing a first embodiment of the present invention.
In FIG. 1, in the present invention, field portions are arranged side by side so as to be alternately different in polarity along a linear direction on a pair of flat field yokes 1a and 1b and on the field yokes 1a and 1b. The odd-numbered (5 in this example) permanent magnets 2a to 2e are formed. Further, the pair of field yokes 1a and 1b in which the permanent magnets 2a to 2e constituting the field part are arranged are one end part in a direction orthogonal to the linear direction (stroke direction in FIG. 1) of the field yoke. Are connected by two yoke fixing members 3a and 3b (magnetic material) so as to be partially closed, and are arranged at symmetrical positions on both ends along the linear direction of the field yokes 1a and 1b.

次に本発明の動作を説明する。
図４は、第１実施形態におけるリニアモータ界磁部の磁束分布を説明するための模式図であって、（ａ）は全体斜視図、（ｂ）は側面図である。図４に示すように、界磁ヨーク１ａ、１ｂを部分的に接続するヨーク固定部材３ａ、３ｂを備えているため、前期磁気回路に加え、磁気的空隙を介して永久磁石２ａ〜２ｅと、界磁ヨーク１ａ、１ｂと、ヨーク固定材３ａ、３ｂとを通る磁気回路を形成する。このため、図示しない電機子部からみた界磁部は、相対的に界磁部の両端が周期的な境界を有することになり、界磁の極数が偶数の場合と同等となる。 Next, the operation of the present invention will be described.
4A and 4B are schematic views for explaining the magnetic flux distribution of the linear motor field part in the first embodiment, where FIG. 4A is an overall perspective view and FIG. 4B is a side view. As shown in FIG. 4, since the yoke fixing members 3a and 3b for partially connecting the field yokes 1a and 1b are provided, in addition to the previous magnetic circuit, the permanent magnets 2a to 2e through magnetic gaps, A magnetic circuit passing through the field yokes 1a and 1b and the yoke fixing members 3a and 3b is formed. For this reason, the field part seen from the armature part (not shown) has a periodic boundary relatively at both ends of the field part, and is equivalent to the case where the number of poles of the field is an even number.

第１実施形態は上記に示したごとく、永久磁石２ａ〜２ｅの個数を奇数とする界磁部を構成する奇数極界磁リニアモータにおいて、界磁ヨーク１ａ、１ｂに、該界磁ヨークのストローク方向と直交する方向の一方の端部を部分的に閉じるように接続する二つのヨーク固定部材３ａ、３ｂを設けることで、両端の漏洩磁束を減少させることができるため、電機子部からみた界磁部は、相対的に界磁部の両端は周期的な境界が存在することになり、極数が偶数の場合と同等の界磁を得られる。   As described above, in the first embodiment, in the odd pole field linear motor constituting the field portion in which the number of the permanent magnets 2a to 2e is an odd number, the field yokes 1a and 1b are provided with the stroke of the field yoke. By providing two yoke fixing members 3a and 3b that are connected so as to partially close one end in a direction perpendicular to the direction, leakage magnetic flux at both ends can be reduced. The magnetic part has a periodic boundary relatively at both ends of the field part, and a field equivalent to the case where the number of poles is an even number can be obtained.

次に、図３は第１実施形態の変形例を示すリニアモータ界磁部の全体斜視図である。
図３において、第１実施形態は、ヨーク固定部材３ａ、３ｂ間における空間部に強度メンバとなる非磁性部材４を設ける構成にしても構わない。このようにすることで、製造性を向上させながら強度を維持しつつ、小型化し、軽量かつ経済的で、奇数極界磁ながらモータ特性の低下を回避するリニアモータを提供することができる。 Next, FIG. 3 is an overall perspective view of a linear motor field part showing a modification of the first embodiment.
In FIG. 3, the first embodiment may be configured such that the nonmagnetic member 4 serving as a strength member is provided in the space between the yoke fixing members 3a and 3b. By doing so, it is possible to provide a linear motor that is downsized, lightweight and economical while maintaining strength while improving manufacturability, and avoids deterioration in motor characteristics while being an odd pole field.

図４は、本発明の第２実施形態を示すリニアモータ界磁部の全体斜視図である。
図４において、第２実施形態が第１実施形態と異なる点は、ヨーク固定部材３ａ、３ｂの幅Ａを少なくとも永久磁石２ａ〜２ｅの極ピッチの長さＰｍと等しくした点である。
図５は、ヨーク固定部材の幅寸法に対する磁束密度の変化を示したグラフである。横軸に磁極ピッチＰｍに対するヨーク固定部材の幅寸法Ａとの比をとり、縦軸に永久磁石の厚み方向の中央部分における磁束密度（Ｔ）の数値を取って、それらの関係を表したものである。図５から、Ａ／Ｐｍが１，０以上で、永久磁石の磁束密度のオフセット量が０．００５以下となり安定するため、ヨーク固定部材の幅を少なくとも永久磁石の極ピッチと等しくすれば、界磁ヨーク両端の漏洩磁束を最適に減少させることができる。
また、第２実施形態の動作については基本的には、第１実施形態と同じなので、その説明を省略する。 FIG. 4 is an overall perspective view of a linear motor field part showing a second embodiment of the present invention.
In FIG. 4, the second embodiment differs from the first embodiment in that the width A of the yoke fixing members 3a and 3b is at least equal to the length Pm of the pole pitch of the permanent magnets 2a to 2e.
FIG. 5 is a graph showing changes in magnetic flux density with respect to the width dimension of the yoke fixing member. The horizontal axis represents the ratio of the yoke fixing member width dimension A to the magnetic pole pitch Pm, and the vertical axis represents the magnetic flux density (T) in the central portion of the permanent magnet in the thickness direction and represents the relationship between them. It is. FIG. 5 shows that when A / Pm is 10 or more and the offset amount of the magnetic flux density of the permanent magnet is 0.005 or less and stable, if the width of the yoke fixing member is at least equal to the pole pitch of the permanent magnet, The leakage magnetic flux at both ends of the magnetic yoke can be optimally reduced.
In addition, the operation of the second embodiment is basically the same as that of the first embodiment, and a description thereof will be omitted.

第２実施形態は上記構成にしたので、第１実施形態と同様に界磁ヨーク１ａ、１ｂを部分的に接続するヨーク固定部材３ａ、３ｂを備えるが。該ヨーク固定部材の幅を少なくとも永久磁石２ａ〜２ｅの極ピッチの長さと等しくすることで、第１実施形態よりもさらに両端の漏洩磁束を減少させ、電機子部からみた界磁部の両端は相対的に周期的な境界が存在することになり、極数が偶数の場合と同等の界磁を得られる。   Since the second embodiment has the above-described configuration, it includes yoke fixing members 3a and 3b that partially connect the field yokes 1a and 1b as in the first embodiment. By making the width of the yoke fixing member at least equal to the length of the pole pitch of the permanent magnets 2a to 2e, the leakage magnetic flux at both ends is further reduced than in the first embodiment, and both ends of the field portion viewed from the armature portion are There will be a relatively periodic boundary, and a field equivalent to the case where the number of poles is an even number can be obtained.

次に、図６は第２実施形態の変形例を示すリニアモータ界磁部の全体斜視図である。
図６において、第２実施形態は、界磁ヨーク１ａ、１ｂの両端に配置したヨーク固定部材３ａ、３ｂと界磁ヨークとの接続部位に強度メンバとなる非磁性部材５を設ける構成にしても構わない。このようにすることで、製造性を向上させながら強度を維持しつつ、小型化し、軽量かつ経済的で、奇数極界磁ながらモータ特性の低下を回避するリニアモータを提供することができる。 Next, FIG. 6 is an overall perspective view of a linear motor field part showing a modification of the second embodiment.
In FIG. 6, the second embodiment has a configuration in which a nonmagnetic member 5 serving as a strength member is provided at a connection portion between the yoke fixing members 3a and 3b disposed at both ends of the field yokes 1a and 1b and the field yoke. I do not care. By doing so, it is possible to provide a linear motor that is downsized, lightweight and economical while maintaining strength while improving manufacturability, and avoids deterioration in motor characteristics while being an odd pole field.

図7は本実施形態のリニアモータを工作機のテーブル送り装置に適用した例を示すものであって、（ａ）はその側断面図、（ｂ）は（ａ）のテーブルを取り外した状態を示すと共に進行方向に沿って上面から見た平面図である。
リニアモータは、界磁ヨーク１ａ、１ｂ上の進行方向に沿って複数個の永久磁石（２ａ…）を隣接して配置した界磁部６を固定子に、電機子コア８に電機子巻線１０を巻装してなる電機子部７を可動子として構成されており、界磁ヨーク１ａ、１ｂの端部を進行方向に沿ってヨーク固定部材３ａ、３ｂにより部分的に接続している。なお、可動子を構成する電機子部７の上面には電機子取付板１２を介してテーブル１３が設けられており、可動子は固定台１４に設けたリニアガイド１１によって摺動支持されている。
このように小型・軽量で、モータ特性の低下の少ないリニアモータをテーブル送り装置に適用することで、高精度な位置決め送りを実現することができる。 FIG. 7 shows an example in which the linear motor of this embodiment is applied to a table feed device of a machine tool, where (a) is a side sectional view thereof, and (b) is a state in which the table of (a) is removed. It is the top view seen from the upper surface along the advancing direction while showing.
In the linear motor, a field portion 6 in which a plurality of permanent magnets (2a...) Are arranged adjacent to each other along a traveling direction on the field yokes 1a and 1b is used as a stator, and an armature winding is provided on an armature core 8. The armature portion 7 formed by winding 10 is configured as a mover, and the end portions of the field yokes 1a and 1b are partially connected by yoke fixing members 3a and 3b along the traveling direction. A table 13 is provided on the upper surface of the armature portion 7 constituting the mover via an armature mounting plate 12, and the mover is slidably supported by a linear guide 11 provided on the fixed base 14. .
By applying such a linear motor that is small and light and has little deterioration in motor characteristics to the table feeding device, highly accurate positioning feed can be realized.

なお、上記実施形態のうち、第１実施形態（図３の変形例）で、ヨーク固定部材間における空間部に強度メンバとなる非磁性部材を設けたり、あるいは第２実施形態（図６の変形例）で、界磁ヨークの両端に配置したヨーク固定部材と界磁ヨークとの接続部位に強度メンバとなる非磁性部材を設けた構成を示したが、これに替えて、第１実施形態で、ヨーク固定部材と界磁ヨークとの接続部位に強度メンバとなる非磁性部材を設けたり、あるいは、第２実施形態で、ヨーク固定部材間における空間部に強度メンバとなる毘磁性部材を設けるようにしても構わない。   Of the above-described embodiments, in the first embodiment (modified example of FIG. 3), a nonmagnetic member serving as a strength member is provided in the space between the yoke fixing members, or in the second embodiment (modified in FIG. 6). In the example), a configuration is shown in which a nonmagnetic member serving as a strength member is provided at the connection portion between the yoke fixing member disposed at both ends of the field yoke and the field yoke. A nonmagnetic member serving as a strength member is provided at a connection portion between the yoke fixing member and the field yoke, or a magnetic member serving as a strength member is provided in the space between the yoke fixing members in the second embodiment. It doesn't matter.

以上、奇数極界磁リニアモータの特徴である構成、動作、効果について、界磁側を中心に詳細に説明を述べた。
本来、従来技術となる、偶数極の永久磁石を有する偶数極界磁リニアモータでは、推力を上げることを目的として設計上、電機子との関係から巻線係数を高くとるように、電機子における磁石列と直交する方向のティースの長さをスロットピッチより大きくとることが普通である。
ここで、偶数極界磁リニアモータの場合を、図７の奇数極界磁を用いて説明すると（ティースの長さは符号Ｈｔ、スロットピッチは符号Ｐｓに相当する）、電機子巻線１０の銅損を低く抑えるために電機子７のスロットピッチＰｓを広くし、 ティース幅Ｂｔを狭くする手段をとるが、ティース幅Ｂｔの一定の範囲から外れて狭すぎると、かえって推力飽和の問題を生じることになる。
そこで、客先から要求されるリニアモータの仕様（電機子、界磁寸法）を一定の状態で、推力飽和を受け難くし、巻線係数の高い、リニモータを実現する必要があったが、電機子７および界磁６の寸法をそのままで、電機子７のティース幅Ｂｔの一定推力飽和を受け難くし、巻線係数を高くする手段として、界磁６側を構成する永久磁石の個数を例えば、偶数個から奇数個に変更して界磁極数を減らしたリニアモータを採用する場合があった。電機子、界磁寸法を変えたく無い場合に、偶数極界磁から奇数極界磁のリニアモータに替えると、偶数極界磁リニアモータのようなティース幅Ｂｔを狭めるといった設計手法をとることなく、単に界磁極数（永久磁石の個数）を変更することで、推力飽和の問題を回避できるという点で有利な効果を奏する。 The configuration, operation, and effects that are the characteristics of the odd pole field linear motor have been described in detail with a focus on the field side.
Originally, in an even pole field linear motor having an even pole permanent magnet, which is a conventional technology, in order to increase the thrust, the armature has a high winding coefficient from the relation with the armature. Usually, the length of the teeth in the direction orthogonal to the magnet array is larger than the slot pitch.
Here, the case of the even pole field linear motor will be described using the odd pole field magnet of FIG. 7 (the length of the teeth corresponds to the symbol Ht and the slot pitch corresponds to the symbol Ps). In order to keep the copper loss low, the slot pitch Ps of the armature 7 is widened and the teeth width Bt is narrowed. However, if the tooth width Bt is out of a certain range and is too narrow, the problem of thrust saturation occurs. It will be.
Therefore, it was necessary to realize a linear motor with a high winding coefficient that is less susceptible to thrust saturation with the linear motor specifications (armature, field dimensions) required by the customer being constant. For example, the number of permanent magnets constituting the field 6 side can be used as a means for making the coil 7 less susceptible to constant thrust saturation of the tooth width Bt of the armature 7 and increasing the winding coefficient while keeping the dimensions of the child 7 and the field 6 unchanged. In some cases, a linear motor having a reduced number of field poles is adopted by changing from an even number to an odd number. If you do not want to change the armature and field dimensions, switching from an even pole field motor to an odd pole field linear motor without using a design technique such as narrowing the teeth width Bt like an even pole field linear motor. By simply changing the number of field poles (number of permanent magnets), there is an advantageous effect in that the problem of thrust saturation can be avoided.

１ａ、１ｂ 界磁ヨーク
２ａ、２ｂ、２ｃ、２ｄ、２ｅ 永久磁石
３ａ、３ｂ ヨーク固定部材
４、５ 非磁性部材
６ 界磁
７ 電機子
８ 電機子コア
９ ティース
１０ 電機子巻線
１１ リニアガイド
１２ 電機子取付板
１３ テーブル
１４ 固定台 1a, 1b Field yoke 2a, 2b, 2c, 2d, 2e Permanent magnet 3a, 3b Yoke fixing member 4, 5 Nonmagnetic member 6 Field 7 Armature 8 Armature core 9 Teeth 10 Armature winding 11 Linear guide 12 Armature mounting plate 13 Table 14 Fixing base

Claims (4)

平板状の一対の界磁ヨークにそれぞれ交互に極性が異なるように直線方向に並べて配置された複数個の永久磁石を有する界磁部と、
前記界磁部と磁気的空隙を介して対向配置された電機子巻線を有する電機子部と、
を備え、前記界磁部と前記電機子部の何れか一方を固定子に、他方を移動子として相対的に走行するリニアモータにおいて、
前記一対の界磁ヨークのそれぞれに配置される永久磁石が奇数個であり、
前記一対の界磁ヨークは、該界磁ヨークの直線方向と直交する方向の一方の端部を部分的に接続する磁性体のヨーク固定部材が設けられ、
前記一対の界磁ヨークは、前記各々の界磁ヨークの直線方向に沿った両端の対称な位置にて前記ヨーク固定部材により接続され、
前記永久磁石の極ピッチに対する前記ヨーク固定部材の幅の比が１．０以上である
ことを特徴とするリニアモータ。 A field portion having a plurality of permanent magnets arranged in a linear direction so that the polarities are alternately different from each other on a pair of flat field yokes;
An armature portion having an armature winding disposed opposite to the field portion via a magnetic gap;
In a linear motor that travels relatively using either the field part or the armature part as a stator and the other as a mover,
There are an odd number of permanent magnets disposed in each of the pair of field yokes,
It said pair of field yoke is provided a yoke fixing member of a magnetic material connecting one end portion in the direction perpendicular to the linear direction of the interfacial magnetic yoke part,
The pair of field yokes are connected by the yoke fixing members at symmetrical positions at both ends along the linear direction of each field yoke,
A linear motor, wherein a ratio of a width of the yoke fixing member to a pole pitch of the permanent magnet is 1.0 or more . 前記ヨーク固定部材と前記界磁ヨークの互いに直交する接続部位に強度メンバとなる非磁性部材を設けたことを特徴とする請求項１記載のリニアモータ。 The yoke fixing member and the magnetic field linear motor according to claim 1 Symbol mounting, characterized in that a non-magnetic member as a strength member to the connection portion that are orthogonal to each other of the yoke. 前記界磁ヨークの両端に設けた前記ヨーク固定部材同士の間における空間部に強度メンバとなる非磁性部材を設けたことを特徴とする請求項１記載のリニアモータ。 Linear motor according to claim 1 Symbol mounting, characterized in that a non-magnetic member serving as strength members to the space between the yoke fixing members to each other provided on both ends of the field magnet yoke. 請求項１〜３の何れか１項に記載のリニアモータを用いたことを特徴とするテーブル送り装置。 Table feed apparatus characterized by using a linear motor according to any one of claims 1-3.
JP2010055059A 2010-03-11 2010-03-11 Linear motor and table feeder using the same Expired - Fee Related JP5201161B2 (en)

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CN201110053649.6A CN102195437B (en) 2010-03-11 2011-03-07 Linear motor and table feed apparatus
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