JP5189756B2 - 較正標準装置 - Google Patents
較正標準装置 Download PDFInfo
- Publication number
- JP5189756B2 JP5189756B2 JP2006308283A JP2006308283A JP5189756B2 JP 5189756 B2 JP5189756 B2 JP 5189756B2 JP 2006308283 A JP2006308283 A JP 2006308283A JP 2006308283 A JP2006308283 A JP 2006308283A JP 5189756 B2 JP5189756 B2 JP 5189756B2
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- Prior art keywords
- standard
- calibration
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- calibration standard
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 32
- 239000000523 sample Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 12
- 238000013016 damping Methods 0.000 claims description 8
- 230000001066 destructive effect Effects 0.000 claims description 6
- 230000005291 magnetic effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
- G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
- G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
- G01N27/9073—Recording measured data
- G01N27/9086—Calibrating of recording device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
同時に、エア・ギャップ36によって、測定プローブのセンサ素子の力の半径方向における線が遮断されなくなるという効果が得られ、従って、高測定精度が達成される。
Claims (12)
- 薄層の厚さを非破壊測定する装置に較正を施すための較正標準装置であって、
基礎材料の支持板(16)と、そして
前記基礎材料の前記支持板(16)に取り付けられた標準(17)と
を備え、
前記標準は前記装置を較正するための層厚を有し、
前記較正標準装置(11)の本体(12)に配置された保持装置(22)は、前記薄層の厚さの前記非破壊測定装置の測定プローブを前記標準(17)に配置すると、前記本体(12)に対する前記標準の位置を少なくとも1自由度だけ変化させることが可能になるように前記標準(17)を支持し、そして
前記保持装置(22)は少なくとも1つのバネ荷重弾性保持部材(24)を具備し、前記バネ荷重弾性保持部材(24)は前記標準(17)または前記標準(17)が配置された前記基礎材料の前記支持板(16)を中心で支持するための支持面(28)を具備する、
ことを特徴とする較正標準装置。 - 前記標準(17)が、前記標準(17)の表面に対して垂直な軸まわりにおけるねじれを防ぐように、前記保持装置(22)によって支持されることを特徴とする請求項1に記載の較正標準装置。
- 前記保持装置(22)に、ディスク形状ダイヤフラムとして設計された保持部材(24)が含まれることを特徴とする請求項1に記載の較正標準装置。
- 前記保持装置(22)に、弓形状の穿孔が施されたバネ・ディスクとして設計された保持部材(24)が含まれることを特徴とする請求項1に記載の較正標準装置。
- 前記保持装置(22)が、前記標準(17)と前記本体(12)の間に配置されることを特徴とする請求項1に記載の較正標準装置。
- 前記保持部材(22)の前記保持部材(24)が、前記本体(12)の陥凹部(21)に割り当てられることを特徴とする請求項1に記載の較正標準装置。
- 前記保持装置(22)に、前記陥凹部(21)の底部(32)に支えられて、前記保持部材(24)の下側に係合する、少なくとも1つの制振またはバネ部材(31)が含まれることを特徴とする請求項1に記載の較正標準装置。
- 前記制振またはバネ部材(31)が、前記保持部材(24)の中心軸に配置されることを特徴とする請求項7に記載の較正標準装置。
- 前記支持板(16)が前記本体(12)の収容部(14)に設けられ、前記標準(17)の静止位置における前記支持板(16)の表面が、前記本体(12)の表面(37)の高さに位置することを特徴とする請求項1に記載の較正標準装置。
- 前記本体(12)の前記収容部(14)と前記支持板(16)の間に、狭い外周ギャップ(36)が設けられていることを特徴とする請求項1に記載の較正標準装置。
- それぞれ、1つの標準(17)を備える複数の支持板(16)が、前記本体(12)に互いに隣接した列をなすように設けられ、互いに割り当てられた前記支持板(16)間に、狭いギャップ(36)が設けられることを特徴とする請求項1に記載の較正標準装置。
- 複数の標準(17)が、それぞれ、1つの支持板(16)に設けられ、本体(12)によって持ち上げられており、最大厚の前記標準(17)が、前記本体(12)の前記収容部(14)の中心に配置され、他の標準(17)は、前記最大厚の標準(17)に対して厚さが薄くなるように配置されることを特徴とする請求項1に記載の較正標準装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005054589.0 | 2005-11-14 | ||
DE102005054589.0A DE102005054589B4 (de) | 2005-11-14 | 2005-11-14 | Kalibriernormal |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007139771A JP2007139771A (ja) | 2007-06-07 |
JP5189756B2 true JP5189756B2 (ja) | 2013-04-24 |
Family
ID=37547251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006308283A Expired - Fee Related JP5189756B2 (ja) | 2005-11-14 | 2006-11-14 | 較正標準装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7784325B2 (ja) |
JP (1) | JP5189756B2 (ja) |
CN (1) | CN1975320B (ja) |
DE (1) | DE102005054589B4 (ja) |
FR (1) | FR2893407B1 (ja) |
GB (1) | GB2432423B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7448250B2 (en) * | 2005-06-20 | 2008-11-11 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Calibration standard |
GB0525306D0 (en) | 2005-12-13 | 2006-01-18 | Renishaw Plc | Method of machine tool calibration |
FR2949262B1 (fr) * | 2009-08-20 | 2012-12-28 | Snecma | Dispositif d'etalonnage de moyens de controle non destructif d'une piece de turbomachine |
EP2290486A1 (en) * | 2009-08-28 | 2011-03-02 | Renishaw plc | Machine tool calibration method |
US8623093B2 (en) | 2010-07-07 | 2014-01-07 | Zimmer, Inc. | Sleeve for modular revision hip stem |
CN102200423B (zh) * | 2011-02-21 | 2012-10-03 | 刘汉平 | 用于钢板生产厚度均匀性提升的8∑标准板及其制法 |
CN105377222A (zh) | 2013-07-19 | 2016-03-02 | 莱雅公司 | 包含特殊的两性表面活性剂和特殊的增稠聚合物的染色组合物 |
FR3008614B1 (fr) | 2013-07-19 | 2015-07-31 | Oreal | Composition de coloration comprenant un tensio actif amphotere particulier et un tensioactif sulfate |
BR112015031664B1 (pt) * | 2013-07-19 | 2020-11-17 | L'oreal | composição cosmética, processo para a tintura das fibras queratínicas e dispositivo com compartimentos múltiplos |
CN113231692B (zh) * | 2021-07-13 | 2021-09-21 | 江苏润杨精密制造有限公司 | 一种机械配件制造用金属板少切削加工设备 |
DE102022119877A1 (de) | 2022-08-08 | 2024-02-08 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Kalibriervorrichtung für ein Messgerät sowie Verfahren zur Kalibrierung eines Messgeräts |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS614801Y2 (ja) * | 1976-04-14 | 1986-02-14 | ||
US4425545A (en) * | 1981-07-27 | 1984-01-10 | Scalese Joseph J | Eddy current probe calibration standard |
JPS6138503A (ja) * | 1984-07-31 | 1986-02-24 | Ketsuto Kagaku Kenkyusho:Kk | 膜厚計 |
JPS6271801A (ja) * | 1985-09-26 | 1987-04-02 | Toshiba Corp | ジルコニウム基合金部材の酸化層厚さ測定用標準試料 |
US4738131A (en) * | 1987-06-17 | 1988-04-19 | Paul N. Gardner Company, Inc. | Guarded ring tensioned thickness standard |
JPH0710264Y2 (ja) * | 1988-05-31 | 1995-03-08 | 株式会社寺岡精工 | 計量秤およびその脚 |
US4963826A (en) * | 1989-07-18 | 1990-10-16 | The United States Of America As Represented By The Secretary Of Commerce | Reference standard block for use in nondestructive test probe calibration and method of manufacture thereof |
FR2704643B1 (fr) * | 1993-04-26 | 1995-06-23 | Lorraine Laminage | Procede et dispositf d'etalonnage pour un ensemble de mesure du profil transversal d'epaisseur d'un produit plat. |
US6014886A (en) * | 1998-06-30 | 2000-01-18 | Seh America, Inc. | Gauge block holder apparatus |
DE19918064C2 (de) * | 1999-04-21 | 2003-09-18 | Norbert Nix | Schichtdickenmeßgerät mit automatisierter Nulleinstellung und/oder Kalibrierung |
TR200002716A2 (tr) * | 1999-09-22 | 2001-04-20 | General Electric Company | İndüksiyon akımı ayar ölçüsü |
DE202004008995U1 (de) * | 2004-06-07 | 2005-10-13 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Kalibriervorrichtung zur Anpassung einer Messeinrichtung zur Messung der Dicke von Schichten auf einem Messgegenstand |
DE102006028135A1 (de) * | 2005-06-20 | 2006-12-28 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Kalibriernormal |
-
2005
- 2005-11-14 DE DE102005054589.0A patent/DE102005054589B4/de active Active
-
2006
- 2006-11-02 GB GB0621895A patent/GB2432423B/en not_active Expired - Fee Related
- 2006-11-09 FR FR0609782A patent/FR2893407B1/fr not_active Expired - Fee Related
- 2006-11-14 US US11/599,600 patent/US7784325B2/en active Active
- 2006-11-14 CN CN2006101719582A patent/CN1975320B/zh not_active Expired - Fee Related
- 2006-11-14 JP JP2006308283A patent/JP5189756B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1975320B (zh) | 2012-08-15 |
GB2432423B (en) | 2010-10-20 |
FR2893407B1 (fr) | 2014-02-14 |
US7784325B2 (en) | 2010-08-31 |
JP2007139771A (ja) | 2007-06-07 |
DE102005054589B4 (de) | 2017-11-02 |
DE102005054589A1 (de) | 2007-05-31 |
US20070119229A1 (en) | 2007-05-31 |
FR2893407A1 (fr) | 2007-05-18 |
CN1975320A (zh) | 2007-06-06 |
GB0621895D0 (en) | 2006-12-13 |
GB2432423A (en) | 2007-05-23 |
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