JP5162702B2 - 表面形状測定装置 - Google Patents
表面形状測定装置 Download PDFInfo
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- JP5162702B2 JP5162702B2 JP2011510413A JP2011510413A JP5162702B2 JP 5162702 B2 JP5162702 B2 JP 5162702B2 JP 2011510413 A JP2011510413 A JP 2011510413A JP 2011510413 A JP2011510413 A JP 2011510413A JP 5162702 B2 JP5162702 B2 JP 5162702B2
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- 238000005259 measurement Methods 0.000 claims description 69
- 239000002131 composite material Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 12
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000005286 illumination Methods 0.000 description 13
- 238000007689 inspection Methods 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- YEOSPWRTBXRGIM-UHFFFAOYSA-N C(C1)C2N1CC2 Chemical compound C(C1)C2N1CC2 YEOSPWRTBXRGIM-UHFFFAOYSA-N 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2509—Color coding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
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- Physics & Mathematics (AREA)
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- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Processing (AREA)
Description
31:第1光源
32:第2光源
33:第3光源
40:制御部
I_3rd_data = n × (I_1st_data)k + m × (I_2nd_data)p
ここで、I_1st_dataは第1白黒イメージデータであり、I_2nd_dataは第2白黒イメージデータであり、I_3rd_dataは第3白黒イメージデータであり、n及びkは上記第3白黒イメージデータを算出するために上記第1白黒イメージデータに付与される定数であり、m及びpは上記第3白黒イメージデータを算出するために上記第2白黒イメージデータに付与される定数である。
Claims (4)
- 測定対象物の表面の2Dイメージを撮像する表面形状測定装置において、
第1単色光を前記測定対象物の表面に照射する第1光源と;
前記第1単色光と相異なる色相の第2単色光を前記測定対象物の表面に照射する第2光源と;
前記第1光源及び前記第2光源から照射されて前記測定対象物の表面で反射した前記第1単色光及び前記第2単色光を撮像する白黒カメラと;
前記第1単色光及び前記第2単色光が前記測定対象物の表面にそれぞれ照射される状態で前記第1単色光及び前記第2単色光にそれぞれ対応する第1白黒イメージデータ及び第2白黒イメージデータが獲得されるように前記第1光源、前記第2光源及び前記白黒カメラを制御し、前記第1白黒イメージデータ及び前記第2白黒イメージデータを利用して前記測定対象物の表面に関する合成カラーイメージを生成する制御部と、を含み;
前記第1単色光は緑色光及び青色光のうちいずれか一つを含み;
前記第2単色光は赤色光を含み;
前記制御部は、
前記第2白黒イメージデータと、前記青色光及び前記緑色光のうちいずれか一つの照射によって獲得された前記第1白黒イメージデータとに基づいて前記青色光及び前記緑色光のうちの他の一つに対する第3白黒イメージデータを算出して;
前記第1白黒イメージデータ、前記第2白黒イメージデータ及び前記算出された第3白黒イメージデータを合成して前記合成カラーイメージを生成することを特徴とする表面形状測定装置。 - 前記制御部は、下記数学式、
I_3rd_data = n × (I_1st_data)k + m × (I_2nd_data)p
(ここで、I_1st_dataは前記第1白黒イメージデータであり、I_2nd_dataは前記第2白黒イメージデータであり、I_3rd_dataは第3白黒イメージデータであり、n及びkは前記第3白黒イメージデータを算出するために前記第1白黒イメージデータに付与される定数であり、m及びpは前記第3白黒イメージデータを算出するために前記第2白黒イメージデータに付与される定数である)によって前記第3白黒イメージデータを算出することを特徴とする請求項1に記載の表面形状測定装置。 - 前記制御部は、前記第1白黒イメージデータ、前記第2白黒イメージデータ及び前記第3白黒イメージデータを互いに対応するピクセルについてのR,G,Bデータで処理して前記合成カラーイメージを生成することを特徴とする請求項1に記載の表面形状測定装置。
- 前記白黒カメラは、エリアスキャンカメラ(Area−scan camera)またはラインスキャンカメラ(Line−scan camera)の形態にて設けられることを特徴とする請求項3に記載の表面形状測定装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2008-0046004 | 2008-05-19 | ||
KR1020080046004A KR100902170B1 (ko) | 2008-05-19 | 2008-05-19 | 표면형상 측정장치 |
PCT/KR2009/001611 WO2009142390A2 (ko) | 2008-05-19 | 2009-03-30 | 표면형상 측정장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011521256A JP2011521256A (ja) | 2011-07-21 |
JP5162702B2 true JP5162702B2 (ja) | 2013-03-13 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011510413A Active JP5162702B2 (ja) | 2008-05-19 | 2009-03-30 | 表面形状測定装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8487999B2 (ja) |
EP (1) | EP2282163A4 (ja) |
JP (1) | JP5162702B2 (ja) |
KR (1) | KR100902170B1 (ja) |
CN (1) | CN101970981A (ja) |
TW (1) | TWI414749B (ja) |
WO (1) | WO2009142390A2 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5874116B2 (ja) * | 2009-07-30 | 2016-03-02 | 国立研究開発法人産業技術総合研究所 | 画像撮影装置および画像撮影方法 |
CN102305600B (zh) * | 2011-05-17 | 2013-04-24 | 东莞市神州视觉科技有限公司 | 一种贴片印刷锡膏快速三维测量方法 |
KR101642897B1 (ko) * | 2011-07-13 | 2016-07-26 | 주식회사 고영테크놀러지 | 검사방법 |
EP2679143B1 (en) * | 2011-11-11 | 2017-09-27 | Olympus Corporation | Wireless image transmission system |
CN103292703A (zh) * | 2012-02-24 | 2013-09-11 | 天津三星电机有限公司 | 一种基于Labview的贴片电容电极宽度测量方法 |
US9074886B2 (en) * | 2012-07-09 | 2015-07-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Line-width measurement device and measurement method using the same |
KR101394436B1 (ko) | 2012-08-20 | 2014-05-13 | (주) 루켄테크놀러지스 | 3차원 표면 형상 측정장치 및 3차원 표면 형상 측정방법 |
CN102980526B (zh) * | 2012-08-23 | 2016-08-24 | 杭州先临三维科技股份有限公司 | 用黑白相机获取彩色图像的三维扫描仪及其扫描方法 |
CN103115589B (zh) * | 2013-02-01 | 2017-08-25 | 厦门思泰克智能科技股份有限公司 | 一种红绿蓝三色led光测量装置 |
CN103234476B (zh) * | 2013-04-01 | 2014-04-02 | 廖怀宝 | 物体二维轮廓识别方法 |
CN103499296A (zh) * | 2013-10-21 | 2014-01-08 | 东华大学 | 基于机器视觉的批量零件自动检测***及方法 |
WO2015171459A1 (en) * | 2014-05-05 | 2015-11-12 | Alcoa Inc. | Apparatus and methods for weld measurement |
CN104155307A (zh) * | 2014-08-27 | 2014-11-19 | 昆山元崧电子科技有限公司 | 应用于aoi检测的3d视觉复检设备 |
CN106168467A (zh) * | 2015-05-20 | 2016-11-30 | 上海沸谷自动化科技有限公司 | 一种三维检测装置及方法 |
CN104949632A (zh) * | 2015-07-07 | 2015-09-30 | 北京博维恒信科技发展有限公司 | 物体表面形状三维扫描*** |
JP6917762B2 (ja) * | 2017-05-09 | 2021-08-11 | 株式会社キーエンス | 画像検査装置 |
JP6857079B2 (ja) * | 2017-05-09 | 2021-04-14 | 株式会社キーエンス | 画像検査装置 |
CN110475036B (zh) * | 2019-06-28 | 2021-08-27 | 佛山市景瞳科技有限公司 | 一种多谱段陶瓷光谱还原***及方法 |
CN113032919B (zh) * | 2021-03-12 | 2022-03-04 | 奥特斯科技(重庆)有限公司 | 部件承载件制造方法、处理***、计算机程序和***架构 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02151702A (ja) * | 1988-12-02 | 1990-06-11 | Sharp Corp | 部品装着検査装置 |
JP2776692B2 (ja) * | 1992-06-30 | 1998-07-16 | シーケーディ株式会社 | ハンダ配設状況識別方法及び識別装置 |
JP2001153621A (ja) * | 1999-11-30 | 2001-06-08 | Nidek Co Ltd | 外観検査装置 |
JP3551188B2 (ja) * | 2002-01-10 | 2004-08-04 | オムロン株式会社 | 表面状態検査方法および基板検査装置 |
JP4248216B2 (ja) * | 2002-09-30 | 2009-04-02 | 株式会社ミツトヨ | 画像測定機のカラー画像作成装置およびカラー画像合成方法 |
US20040125205A1 (en) * | 2002-12-05 | 2004-07-01 | Geng Z. Jason | System and a method for high speed three-dimensional imaging |
EP1716388A4 (en) * | 2004-02-20 | 2009-01-21 | Univ South Florida | PROCESS FOR OPTICAL COHERENCE TOMOGRAPHY IN FULL COLOR |
EP1607041B1 (en) * | 2004-06-17 | 2008-01-16 | Cadent Ltd. | Method for providing data associated with the intraoral cavity |
US7466291B2 (en) * | 2005-03-15 | 2008-12-16 | Niranjan Damera-Venkata | Projection of overlapping single-color sub-frames onto a surface |
US7541588B2 (en) * | 2005-07-12 | 2009-06-02 | Northrop Grumman Corporation | Infrared laser illuminated imaging systems and methods |
JP2009537054A (ja) * | 2006-05-12 | 2009-10-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 光学走査デバイス |
JP2008070185A (ja) * | 2006-09-13 | 2008-03-27 | Toppan Printing Co Ltd | 位相再生法による形状計測方法および形状計測装置 |
US7773138B2 (en) * | 2006-09-13 | 2010-08-10 | Tower Semiconductor Ltd. | Color pattern and pixel level binning for APS image sensor using 2×2 photodiode sharing scheme |
US7893975B2 (en) * | 2006-10-13 | 2011-02-22 | Apple Inc. | System and method for processing images using predetermined tone reproduction curves |
FR2925706B1 (fr) * | 2007-12-19 | 2010-01-15 | Soc Tech Michelin | Dispositif d'evaluation de la surface d'un pneumatique. |
CN104990516B (zh) * | 2009-02-25 | 2019-05-28 | 立体光子国际有限公司 | 用于三维计量***的强度和彩色显示 |
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2008
- 2008-05-19 KR KR1020080046004A patent/KR100902170B1/ko active IP Right Grant
-
2009
- 2009-03-30 EP EP09750712.3A patent/EP2282163A4/en not_active Withdrawn
- 2009-03-30 US US12/598,578 patent/US8487999B2/en active Active
- 2009-03-30 WO PCT/KR2009/001611 patent/WO2009142390A2/ko active Application Filing
- 2009-03-30 JP JP2011510413A patent/JP5162702B2/ja active Active
- 2009-03-30 CN CN2009801028726A patent/CN101970981A/zh active Pending
- 2009-05-15 TW TW098116204A patent/TWI414749B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI414749B (zh) | 2013-11-11 |
JP2011521256A (ja) | 2011-07-21 |
WO2009142390A2 (ko) | 2009-11-26 |
WO2009142390A3 (ko) | 2010-01-21 |
EP2282163A2 (en) | 2011-02-09 |
KR100902170B1 (ko) | 2009-06-10 |
US8487999B2 (en) | 2013-07-16 |
CN101970981A (zh) | 2011-02-09 |
EP2282163A4 (en) | 2013-09-04 |
US20100289893A1 (en) | 2010-11-18 |
TW200951398A (en) | 2009-12-16 |
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