JP5150101B2 - セラミック材料 - Google Patents
セラミック材料 Download PDFInfo
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- JP5150101B2 JP5150101B2 JP2006548107A JP2006548107A JP5150101B2 JP 5150101 B2 JP5150101 B2 JP 5150101B2 JP 2006548107 A JP2006548107 A JP 2006548107A JP 2006548107 A JP2006548107 A JP 2006548107A JP 5150101 B2 JP5150101 B2 JP 5150101B2
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- 229910010293 ceramic material Inorganic materials 0.000 title claims description 34
- 239000000919 ceramic Substances 0.000 claims description 38
- 239000000203 mixture Substances 0.000 claims description 27
- 229910001610 cryolite Inorganic materials 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- 239000001301 oxygen Substances 0.000 claims description 14
- 239000000654 additive Substances 0.000 claims description 12
- 230000000996 additive effect Effects 0.000 claims description 9
- 229910052748 manganese Inorganic materials 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 7
- 229910052787 antimony Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 239000002243 precursor Substances 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000010936 titanium Substances 0.000 description 24
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 22
- 150000001768 cations Chemical class 0.000 description 17
- 239000010955 niobium Substances 0.000 description 17
- 238000005245 sintering Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 239000010949 copper Substances 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 9
- 238000006467 substitution reaction Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 238000010348 incorporation Methods 0.000 description 7
- 239000011230 binding agent Substances 0.000 description 6
- 238000000280 densification Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 239000006104 solid solution Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- -1 rare earth cations Chemical class 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052712 strontium Inorganic materials 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 238000002468 ceramisation Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000009283 thermal hydrolysis Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
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Description
Sr4(Sr1.667Nb2.333)O11.5V0.5→0.944Sr4(Sr2Nb2)O11V1+0.222Nb2O5
により、高い酸素空位濃度を有するSr4(Sr2Nb2)O11V1の固溶体が有効であり、かつ放出されるNb2O5が焼結助剤として使用されるPbO含有率によりPbNb2O6として結合し、かつAサイトでの空位の付加的な形成下でPZTペロブスカイト格子中に組み込まれることにより、酸素空位濃度の温度に依存した可変性の可能性を含んでいる。酸素の空位の形成により系はその後、均一な粒子の成長下で焼結緻密化を促進するメカニズムを有する。これに対して冷却および温度処理の際に、
Sr4(Sr1.667Nb2.333)O11.5V0.5→0.875
Sr4(Sr1.333Nb2.667)O12+SrO
により、逆のプロセスが考えられうる。このプロセスは電圧印加された圧電セラミック素子の長期間安定性に関して有利な酸素空位濃度の低下もしくは排除につながり、その際、析出したSrOはより強力な塩基PbOとしてPb(ZraTi1−a)O3(PZT)から排除される、つまり若干のPbOが放出され、かつ同時に若干の(ZraTi1−a)O3(SZT)が形成され、これはPZTホスト格子によりふたたび固溶体となる。
Sr4(Ca2−2x/3Nb2+2x/3)O11+xV1−xもしくは
Sr4(Mg2−2x/3Nb2+2x/3)O11+xV1−xまたは
Ba4(Ca2−2x/3Nb2+2x/3)O11+xV1−xもしくは
Ba4(Mg2−2x/3Nb2+2x/3)O11+xV1−x。
クリオライト構造を有する化合物の添加により変性されたPZTセラミック[Pb(ZraTi1−a)O3]1−b−c[Pb(FeIII 1/2NbV 1/2)O3]bのバッチ
2 セラミック層
3 電極層
4 外部電極
Claims (15)
- セラミック材料が全組成式A1−b−cBbCcを有し、その際、0≦b≦0.5および0<c<0.05が該当し、かつその際、
− Aは組成Pb(ZraTi1−a)O3を表し、かつその際、0.5≦a≦0.6が該当し、かつAは、BおよびCのためのホスト格子として用いられ、
− Bはペロブスカイト−格子タイプの添加剤成分を表し、かつ
− Cはクリオライト−格子タイプのセラミック材料を表し、全組成式
[Sr4(Sr2−2x/3Nb2+2x/3)O11+xV1−x]、
Sr4(Ca2−2x/3Nb2+2x/3)O11+xV1−x、
Sr4(Mg2−2x/3Nb2+2x/3)O11+xV1−x、
Ba4(Sr2−2x/3Nb2+2x/3)O11+xV1−x、または
Ba4(Mg2−2x/3Nb2+2x/3)O11+xV1−x
を有し、その際、それぞれのVは酸素空位を表し、かつその際、パラメータxについては0≦x<1が該当する、セラミック材料。 - 全組成式A1−b−cBbCcにおいて、0<c≦0.01が該当する、請求項1記載のセラミック材料。
- AおよびCが混晶相を形成する、請求項1または2記載のセラミック材料。
- Aが全組成式Pb(ZraTi1−a)O3の組成を有し、その際、aについては0.5≦a≦0.6が該当する、請求項1から3までのいずれか1項記載のセラミック材料。
- Bが全組成式KNbO3を有する、請求項1から4までのいずれか1項記載のセラミック材料。
- Bが全組成式Pb(MII 1/3MV 2/3)O3を有し、かつその際、MIIがMg、Zn、Co、Ni、MnまたはCuを表し、かつその際、MVがNb、TaまたはSbを表す、請求項1から5までのいずれか1項記載のセラミック材料。
- Bが全組成式Pb(MII 1/2MVI 1/2)O3を有し、かつその際、MIIがMg、Zn、Co、Ni、MnまたはCuを表し、かつその際、MVIがWを表す、請求項1から6までのいずれか1項記載のセラミック材料。
- Bが全組成式Pb(MIII 1/2MV 1/2)O3を有し、かつその際、MIIIがFe、Mn、CrまたはGaを表し、かつその際、MVがNb、TaまたはSbを表す、請求項1から7までのいずれか1項記載のセラミック材料。
- Bが全組成式Pb(MIII 2/3MVI 1/3)O3を有し、かつその際、MIIIがFe、Mn、CrまたはGaを表し、かつその際、MVIがWを表す、請求項1から8までのいずれか1項記載のセラミック材料。
- Bが全組成式Pb(LiI 1/4MV 3/4)O3を有し、かつその際、MVがNb、TaまたはSbを表す、請求項1から9までのいずれか1項記載のセラミック材料。
- さらになお3モル%までのPbO過剰を含有する、請求項1から10までのいずれか1項記載のセラミック材料。
- KNbO3を含有していない、請求項1から4までのいずれか1項記載のセラミック材料。
- 重なり合ったセラミック層(2)および該層の間に存在する電極層(3)のモノリシックな積層体を有し、その際、少なくとも1のセラミック層(2)は、請求項1から12までのいずれか1項記載のセラミック材料を含有する、圧電アクチュエータ。
- クリオライト構造を有するセラミック材料の前駆体材料を、PZTセラミックの前駆体材料と混合し、焼結する、請求項1から12までのいずれか1項記載のセラミック材料の製造方法。
- あらかじめ完成したクリオライト相をPZTセラミックの前駆体材料と混合し、焼結する、請求項1から12までのいずれか1項記載のセラミック材料の製造方法。
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DE10229086A1 (de) | 2001-09-29 | 2003-04-17 | Ceramtec Ag | Piezoelektrische keramische Werkstoffe auf der Basis von Bleizirkonattitanat (PZT) mit der Kristallstruktur des Perowskits |
DE10231471A1 (de) | 2001-09-29 | 2003-06-26 | Ceramtec Ag | Piezokeramische Werkstoffe auf der Basis von Blei-Zirkonat-Titanat (PZT) mit valenzkompensierten Ag-haltigen Komplexen |
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DE102007010239A1 (de) * | 2007-03-02 | 2008-09-04 | Epcos Ag | Piezoelektrisches Material, Vielschicht-Aktuator und Verfahren zur Herstellung eines piezoelektrischen Bauelements |
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2004
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2005
- 2005-01-14 US US10/586,035 patent/US8858822B2/en active Active
- 2005-01-14 EP EP05714869A patent/EP1704602B1/de active Active
- 2005-01-14 JP JP2006548107A patent/JP5150101B2/ja active Active
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US20070158608A1 (en) | 2007-07-12 |
EP1704602A1 (de) | 2006-09-27 |
EP1704602B1 (de) | 2012-12-19 |
JP2007523821A (ja) | 2007-08-23 |
DE102004002204A1 (de) | 2005-08-11 |
WO2005069396A1 (de) | 2005-07-28 |
US8858822B2 (en) | 2014-10-14 |
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