JP5149576B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP5149576B2 JP5149576B2 JP2007245928A JP2007245928A JP5149576B2 JP 5149576 B2 JP5149576 B2 JP 5149576B2 JP 2007245928 A JP2007245928 A JP 2007245928A JP 2007245928 A JP2007245928 A JP 2007245928A JP 5149576 B2 JP5149576 B2 JP 5149576B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fuse element
- element electrode
- semiconductor device
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 102
- 239000000758 substrate Substances 0.000 claims description 106
- 238000009792 diffusion process Methods 0.000 claims description 45
- 238000005520 cutting process Methods 0.000 claims description 37
- 238000009825 accumulation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 description 32
- 238000004519 manufacturing process Methods 0.000 description 23
- 239000012535 impurity Substances 0.000 description 17
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000002513 implantation Methods 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Power Engineering (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
Description
本発明の第1の実施形態について図面を参照して説明する。図1は、第1の実施形態に係る半導体装置の断面構成を示している。図1に示すように、本実施形態の半導体装置は、被保護素子21と、ヒューズ素子部31と、基板接続部41とを備えている。
以下に、本発明の第2の実施形態について図面を参照して説明する。図8は第2の実施形態に係る半導体装置の断面構成を示している。図8において図1と同一の構成要素には同一の符号を附すことにより説明を省略する。
12 ウェル
13 第1導電型拡散層
14 絶縁膜
14a 開口部
14b 開口部
15 導電膜
15A 下層導電膜
15B 上層導電膜
15a 開口部
21 被保護素子
22 被保護素子電極
31 ヒューズ素子部
32 ヒューズ素子電極
33 ヒューズ素子絶縁膜
41 基板接続部
42 基板接続電極
50 配線層
51A 第1の配線層配線
51B 第2の配線層配線
52A 第1の切断端子
52B 第2の切断端子
61 PN接合ダイオード
71 被保護素子形成領域
72 ヒューズ素子形成領域
73 基板接続部形成領域
Claims (12)
- 半導体基板に形成され、被保護素子電極を有する被保護素子と、
前記半導体基板と電気的に接続された基板接続電極を有する基板接続部と、
前記被保護素子電極と前記基板接続電極との間に形成されたヒューズ素子電極を有するヒューズ素子部とを備え、
前記半導体基板における前記基板接続電極と接続された部分は、第1導電型であり、
前記基板接続電極は第2導電型であり、
前記基板接続部は、前記半導体基板における前記基板接続電極と接続された部分に形成された第1導電型の拡散層を有しており、
前記ヒューズ素子電極は、所定の電流を流すことにより切断可能に形成され、
前記被保護素子電極、基板接続電極及びヒューズ素子電極は、前記ヒューズ素子電極が切断されていない状態において、一体に形成された導電膜からなることを特徴とする半導体装置。 - 前記半導体基板は、第1導電型ウェルを有し、
前記第1導電型の拡散層は、前記第1導電型ウェルに形成されていることを特徴とする請求項1に記載の半導体装置。 - 半導体基板に形成され、被保護素子電極を有する被保護素子と、
前記半導体基板と電気的に接続された基板接続電極を有する基板接続部と、
前記被保護素子電極と前記基板接続電極との間に形成されたヒューズ素子電極を有するヒューズ素子部とを備え、
前記導電膜は、前記ヒューズ素子電極の部分を除いて下層導電膜と上層導電膜とを含み、
前記ヒューズ素子電極は、ヒューズ素子絶縁膜と前記上層導電膜とが積層された積層構造を有しており、
前記ヒューズ素子電極は、所定の電流を流すことにより切断可能に形成され、
前記被保護素子電極、基板接続電極及びヒューズ素子電極は、前記ヒューズ素子電極が切断されていない状態において、一体に形成された導電膜からなることを特徴とする半導体装置。 - 前記基板接続電極は、前記上層導電膜が前記基板と接続されていることを特徴とする請求項3に記載の半導体装置。
- 前記ヒューズ素子電極は、切断され、
前記導電膜は、前記被保護素子電極と前記基板接続電極とが絶縁されていることを特徴とする請求項1〜4のいずれか1項に記載の半導体装置。 - 前記導電膜と前記基板との間に形成された絶縁膜をさらに備えていることを特徴とする請求項1〜5のいずれか1項に記載の半導体装置。
- 前記ヒューズ素子部は、
前記導電膜における前記ヒューズ素子電極の両側の部分とそれぞれ電気的に接続された第1の切断端子及び第2の切断端子とを有することを特徴とする請求項1〜6のいずれか1項に記載の半導体装置。 - 前記基板接続電極は、膜厚が4nm以下の基板接続絶縁膜を介在させて前記半導体基板と接続されていることを特徴とする請求項1〜7のいずれか1項に記載の半導体装置。
- 前記被保護素子は、電荷蓄積層への電子又は正孔の蓄積及び除去により特性が変化する不揮発性メモリであることを特徴とする請求項1〜8のいずれか1項に記載の半導体装置。
- 前記ヒューズ素子電極の線幅は、前記被保護素子電極の線幅及び前記基板接続電極の線幅よりも狭いことを特徴とする請求項1〜9のいずれか1項に記載の半導体装置。
- 前記導電膜は複数であり且つ互いに間隔をおいて平行に形成され、
隣接する導電膜において、前記ヒューズ素子電極及び基板接続電極は、前記被保護素子電極に対して反対側に形成され、
前記導電膜における前記ヒューズ素子電極の両側の部分の線幅は、前記被保護素子電極の線幅よりも太いことを特徴とする請求項1〜10に記載の半導体装置。 - 前記導電膜は、前記ヒューズ素子電極の部分を除いて金属シリサイド化されていることを特徴とする請求項1〜11のいずれか1項に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007245928A JP5149576B2 (ja) | 2007-09-21 | 2007-09-21 | 半導体装置 |
US12/194,915 US7821100B2 (en) | 2007-09-21 | 2008-08-20 | Semiconductor device and method for manufacturing the same |
CN200810212653.0A CN101393913A (zh) | 2007-09-21 | 2008-08-27 | 半导体装置及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007245928A JP5149576B2 (ja) | 2007-09-21 | 2007-09-21 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009076777A JP2009076777A (ja) | 2009-04-09 |
JP2009076777A5 JP2009076777A5 (ja) | 2010-04-08 |
JP5149576B2 true JP5149576B2 (ja) | 2013-02-20 |
Family
ID=40470706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007245928A Active JP5149576B2 (ja) | 2007-09-21 | 2007-09-21 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7821100B2 (ja) |
JP (1) | JP5149576B2 (ja) |
CN (1) | CN101393913A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102569289A (zh) * | 2010-12-23 | 2012-07-11 | 中芯国际集成电路制造(上海)有限公司 | 消除天线效应的结构及消除天线效应的方法 |
US9048126B2 (en) * | 2013-03-12 | 2015-06-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods for measuring the full well capacity of CMOS image sensors |
CN104851876B (zh) * | 2014-02-17 | 2018-03-20 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件可靠性测试结构的保护电路及保护方法 |
US10181713B2 (en) * | 2014-10-17 | 2019-01-15 | Globalfoundries Inc. | Methods of post-process dispensation of plasma induced damage protection component |
US9793208B2 (en) * | 2015-09-29 | 2017-10-17 | Globalfoundries Singapore Pte. Ltd. | Plasma discharge path |
US11456293B2 (en) * | 2019-08-23 | 2022-09-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Polysilicon resistor structures |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE794202A (fr) * | 1972-01-19 | 1973-05-16 | Intel Corp | Liaison fusible pour circuit integre sur substrat semi-conducteur pour memoires |
US4412241A (en) * | 1980-11-21 | 1983-10-25 | National Semiconductor Corporation | Multiple trim structure |
JPS5846174B2 (ja) * | 1981-03-03 | 1983-10-14 | 株式会社東芝 | 半導体集積回路 |
US4518981A (en) * | 1981-11-12 | 1985-05-21 | Advanced Micro Devices, Inc. | Merged platinum silicide fuse and Schottky diode and method of manufacture thereof |
US4679310A (en) * | 1985-10-31 | 1987-07-14 | Advanced Micro Devices, Inc. | Method of making improved metal silicide fuse for integrated circuit structure |
US4862243A (en) * | 1987-06-01 | 1989-08-29 | Texas Instruments Incorporated | Scalable fuse link element |
JPH02296361A (ja) * | 1989-05-11 | 1990-12-06 | Mitsubishi Electric Corp | 半導体集積回路 |
US5376820A (en) * | 1992-02-05 | 1994-12-27 | Ncr Corporation | Semiconductor fuse structure |
JP3256626B2 (ja) * | 1994-05-15 | 2002-02-12 | 株式会社東芝 | 半導体装置 |
US5949127A (en) * | 1997-06-06 | 1999-09-07 | Integrated Device Technology, Inc. | Electrically programmable interlevel fusible link for integrated circuits |
US6034433A (en) * | 1997-12-23 | 2000-03-07 | Intel Corporation | Interconnect structure for protecting a transistor gate from charge damage |
KR100267107B1 (ko) * | 1998-09-16 | 2000-10-02 | 윤종용 | 반도체 소자 및 그 제조방법 |
US6163492A (en) * | 1998-10-23 | 2000-12-19 | Mosel Vitelic, Inc. | Programmable latches that include non-volatile programmable elements |
US6323534B1 (en) * | 1999-04-16 | 2001-11-27 | Micron Technology, Inc. | Fuse for use in a semiconductor device |
US6337502B1 (en) | 1999-06-18 | 2002-01-08 | Saifun Semicinductors Ltd. | Method and circuit for minimizing the charging effect during manufacture of semiconductor devices |
JP2001244338A (ja) * | 2000-02-25 | 2001-09-07 | Toshiba Corp | 半導体集積回路装置、半導体集積回路実装基板装置および半導体集積回路装置の入力保護機能解除方法 |
US6509236B1 (en) * | 2000-06-06 | 2003-01-21 | International Business Machines Corporation | Laser fuseblow protection method for silicon on insulator (SOI) transistors |
JP2001257271A (ja) * | 2001-02-13 | 2001-09-21 | Seiko Epson Corp | 半導体装置およびその製造方法 |
US6979868B2 (en) * | 2001-04-18 | 2005-12-27 | United Microelectronics Corp. | Bypass circuits for reducing plasma damage |
JP3445585B2 (ja) * | 2001-08-31 | 2003-09-08 | 沖電気工業株式会社 | 半導体装置の製造方法 |
US6927472B2 (en) * | 2001-11-14 | 2005-08-09 | International Business Machines Corporation | Fuse structure and method to form the same |
JP2005175155A (ja) * | 2003-12-10 | 2005-06-30 | Seiko Epson Corp | 半導体装置の製造方法及び半導体装置 |
JP2005203668A (ja) * | 2004-01-19 | 2005-07-28 | Matsushita Electric Ind Co Ltd | 半導体記憶装置 |
US7193292B2 (en) * | 2004-12-02 | 2007-03-20 | Taiwan Semiconductor Manufacturing Co., Ltd | Fuse structure with charge protection circuit |
JP4865302B2 (ja) * | 2005-11-11 | 2012-02-01 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US7474548B2 (en) * | 2005-12-13 | 2009-01-06 | Panasonic Corporation | Semiconductor memory device and method for manufacturing the same |
KR20070114557A (ko) * | 2006-05-29 | 2007-12-04 | 삼성전자주식회사 | 퓨즈를 갖는 반도체 기억 소자 및 그 형성 방법 |
JP2008166441A (ja) * | 2006-12-27 | 2008-07-17 | Spansion Llc | 半導体装置およびその製造方法 |
-
2007
- 2007-09-21 JP JP2007245928A patent/JP5149576B2/ja active Active
-
2008
- 2008-08-20 US US12/194,915 patent/US7821100B2/en active Active
- 2008-08-27 CN CN200810212653.0A patent/CN101393913A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN101393913A (zh) | 2009-03-25 |
JP2009076777A (ja) | 2009-04-09 |
US20090078988A1 (en) | 2009-03-26 |
US7821100B2 (en) | 2010-10-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6385873B2 (ja) | 半導体装置およびその製造方法 | |
JP5149576B2 (ja) | 半導体装置 | |
US9985039B2 (en) | Semiconductor device and method of manufacturing the same | |
JP2010182751A (ja) | 不揮発性半導体記憶装置及びその製造方法 | |
US10475891B2 (en) | Reliable non-volatile memory device | |
US9406687B1 (en) | Integration of memory devices with different voltages | |
JP2008244097A (ja) | 半導体装置及びその製造方法 | |
US7626227B2 (en) | Semiconductor device with reduced transistor breakdown voltage for preventing substrate junction currents | |
JP4405489B2 (ja) | 不揮発性半導体メモリ | |
JP2008166441A (ja) | 半導体装置およびその製造方法 | |
US7670904B2 (en) | Nonvolatile memory device and method for fabricating the same | |
TWI784086B (zh) | 半導體裝置之製造方法 | |
US20100213987A1 (en) | Semiconductor memory device and driving method for the same | |
JP2009054909A (ja) | 半導体装置、その製造方法及び駆動方法 | |
JP4667279B2 (ja) | 半導体装置の製造方法 | |
JP2009194221A (ja) | 半導体装置およびその製造方法 | |
JP6501588B2 (ja) | 半導体装置の製造方法 | |
JP2007096197A (ja) | 半導体装置 | |
JP2008251665A (ja) | 不揮発性半導体記憶装置 | |
JP5579577B2 (ja) | 半導体装置の製造方法 | |
JP2009176890A (ja) | 半導体記憶装置及びその駆動方法 | |
JP2019054221A (ja) | 半導体装置およびその製造方法 | |
JP2004296768A (ja) | 半導体装置およびその製造方法 | |
JP2008198771A (ja) | 不揮発性半導体記憶装置及びその製造方法 | |
JP2014204036A (ja) | 半導体装置および半導体装置の製造方法。 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100219 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100219 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20120125 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121002 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121011 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121101 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121120 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121130 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5149576 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151207 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |