JP5106269B2 - Light transmission window assembly and lamp - Google Patents

Light transmission window assembly and lamp Download PDF

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JP5106269B2
JP5106269B2 JP2008168301A JP2008168301A JP5106269B2 JP 5106269 B2 JP5106269 B2 JP 5106269B2 JP 2008168301 A JP2008168301 A JP 2008168301A JP 2008168301 A JP2008168301 A JP 2008168301A JP 5106269 B2 JP5106269 B2 JP 5106269B2
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light transmission
transmission window
light
metal member
inner peripheral
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JP2010009952A (en
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俊孝 山田
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Kyocera Corp
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Description

本発明は、光透過窓接合体およびランプに関する。   The present invention relates to a light transmission window assembly and a lamp.

従来から、セラミックス等からなる筒状体の端部に、所望の波長の光を透過する光透過窓部材を接合した光透過窓接合体が提案されている。例えば、紫外線の中でも波長が短い、１０〜２００ｎｍ付近の波長の真空紫外線（ＶＵＶ；Ｖａｃｕｕｍ Ｕｌｔｒａ Ｖｉｏｌｅｔ）を透過する光透過窓部材の材質としては、フッ化マグネシウム（ＭｇＦ２）やフッ化カルシウム（ＣａＦ２）等が知られている。例えば、下記特許文献１には、セラミックスからなる筒状の外側管の端部に、フッ化マグネシウムあるいはフッ化カルシウムからなる光透過窓部材を接合してなる光透過窓接合体を備えた、誘電体バリア放電ランプが記載されている。図４は、下記特許文献１に示された、光透過窓接合体の一例について示している。
特開平８−２３６０８４号公報 Conventionally, the end portion of the cylindrical body made of ceramics or the like, light transmissive window assembly formed by joining a light transmissive window member transmit light of a desired wavelength is proposed. For example, as a material of the light transmission window member that transmits vacuum ultraviolet (VUV) having a wavelength of about 10 to 200 nm, which has a short wavelength among ultraviolet rays, magnesium fluoride (MgF 2 ) or calcium fluoride (CaF) is used. 2 ) etc. are known. For example, the following Patent Document 1, the end portion of the cylindrical outer tube made of ceramics, having a light transmissive window assembly formed by joining a light transmissive window member made of magnesium fluoride or calcium fluoride, A dielectric barrier discharge lamp is described. 4 is shown in Patent Document 1 shows an example of a light-transmissive window assembly.
JP-A-8-236084

図４に示すように、特許文献１に示す光透過窓接合体１００では、例えばセラミックス等からなる筒状部材１０２の端部に、金属製接合部材１０４が設けられている。特許文献１に示す光透過窓接合体１００では、この金属製接合部材１０４に、例えば低融点ガラス１０６を接着剤として用いて、例えばフッ化マグネシウム（ＭｇＦ ２ ）からなる光透過窓部材１０８を接合している。この際、接着剤である低融点ガラス１０６は、光透過窓部材１０８の一方主面の周縁部に沿って設けられ、光透過窓部材１０８のこの一方主面の周縁部と金属製接合部材１０４の端部とが接合されている。特許文献１では、金属製接合部材１０４と光透過窓部材１０８との間の熱膨張係数の違いによって発生する応力は、金属製部材１０４の端部１１０によって緩和され、急激な温度変化が生じても低融点ガラス１０６や光透過窓部材１０８の破損が生じないと記載されている。 As shown in FIG. 4, the light transmissive window assembly 100 shown in Patent Document 1, for example, the end portion of the cylindrical member 102 made of ceramics or the like, metallic joining member 104 is provided. In the light transmission window assembly 100 shown in Patent Document 1, a light transmission window member 108 made of, for example, magnesium fluoride (MgF 2 ) is bonded to the metal bonding member 104 using, for example, a low-melting glass 106 as an adhesive. is doing. In this case, an adhesive low-melting glass 106 is provided along the periphery of the hand main surface of the light transmitting window member 108, the peripheral edge portion of the one main surface of the light transmitting window member 108 and the metal bonding The end of the member 104 is joined. In Patent Document 1, the stress generated by the difference in thermal expansion coefficient between the metal joining member 104 and the light transmission window member 108 is relieved by the end portion 110 of the metal member 104, and a sudden temperature change occurs. Further, it is described that the low melting point glass 106 and the light transmission window member 108 are not damaged.

しかし、上記特許文献１のように、接着剤である低融点ガラス１０６を、光透過窓部材１０８の一方の主面の周縁部に沿って設けた場合、配置した低融点ガラス１０６が光透過窓部材１０８の主面の中央に向かって拡がり易い。低融点ガラス１０６が中央に向かって拡がった場合、光透過窓部材における光の透過を阻害する場合があった。また、低融点ガラス１０６が光透過窓部材１０８の主面の比較的広い範囲に広がった場合、低融点ガラス１０６と光透過窓部材１０８の熱膨張係数の違いに起因して発生する応力が比較的大きくなり、光透過窓部材１０８の破損が生じ易くなるといった課題もあった。本発明は、かかる課題を解決するためになされた発明である。 However, when the low-melting-point glass 106 that is an adhesive is provided along the peripheral edge of one main surface of the light-transmitting window member 108 as in Patent Document 1, the disposed low-melting-point glass 106 is the light-transmitting window. It tends to expand toward the center of the main surface of the member 108. When the low melting point glass 106 spreads toward the center, the light transmission window member may be inhibited from transmitting light. When the low melting point glass 106 has spread in a relatively wide range of the main surface of the light transmitting window member 108, stress generated due to the difference in thermal expansion coefficients of the low-melting glass 106 and the light transmitting window member 108 is compared There is also a problem that the light transmission window member 108 is easily damaged. The present invention has been made to solve such problems.

上記課題を解決するために、本発明は、端部に開口を有する管状のセラミック体と、前記セラミック体の前記端部と接合され、前記開口と連通する管路を形成する管状の金属部材と、前記管路を閉塞する光透過窓部材とを備え、前記光透過窓部材は、前記光透過窓部材の側面と前記金属部材の内周面との間に配された接合部材によって、前記金属部材に接
合されており、前記金属部材の前記内周面は、前記光透過窓部材よりも前記セラミック体から離れる側に、前記光透過窓部材から離れるにしたがって前記開口の中心軸に近づく曲部を有し、前記接合部材が、前記光透過窓部材の前記側面と前記金属部材の前記内周面との間から、前記内周面の前記曲部を含む領域にかけて延びていることを特徴とする光透過窓接合体を提供する。 In order to solve the above problems, the present onset Ming, a ceramic body of a tubular having an opening at an end portion, wherein is joined to the end portion of the ceramic body, the tubular metallic member which forms a conduit communicating with said opening When, and a light transmissive window member for closing the front Symbol line, before Symbol light transmitting window member, the bonding member disposed between the inner peripheral surface of the metal member and the side surface of the light transmitting window member The inner peripheral surface of the metal member is closer to the side away from the ceramic body than the light transmissive window member, and as the distance from the light transmissive window member increases, the inner peripheral surface of the metal member is in contact with the metal member. A region having a curved portion that approaches the central axis of the opening, and the joining member includes the curved portion of the inner peripheral surface from between the side surface of the light transmission window member and the inner peripheral surface of the metal member. extend toward providing a light transmissive window assembly according to claim Rukoto.

なお、前記接合部材は、前記光透過窓部材の、前記セラミック体と反対の側を向く一方主面の周縁部から、前記金属部材の前記内周面にかけて連なる表面を有することが好ましい。 Incidentally, the bonding member, the light transmission window member, from the periphery of one main surface facing the side opposite to the ceramic body, Rukoto which have a surface continuing toward the inner peripheral surface of the metal member is preferable.

また、前記光透過窓部材は、フッ化マグネシウム（ＭｇＦ２）の単結晶からなることが好ましい。 Further, the light transmitting window member is preferably made of a single crystal of magnesium fluoride (MgF 2).

また、前記金属部材は、銅（Ｃｕ）からなることが好ましい。 The metal member may be formed of copper (Cu) Tona Rukoto are preferred.

また、前記接合部材は、前記光透過窓部材の前記側面に被着されたメタライズ層と、前記メタライズ層と前記金属部材の前記内周面とを接合するロウ付層とからなることが好ましい。 Also, the joining member includes a metallized layer deposited on the side surface of the light transmitting window member is preferably made of a brazing layer of bonding the inner peripheral surface of the metal member and the metallizing layer.

また、前記メタライズ層がＡｇ−Ｃｕ−Ｔｉからなり、前記ロウ付層がＡｇ−Ｃｕロウからなることが好ましい。 Further, it is preferable that the metallized layer is made of Ag—Cu—Ti and the brazing layer is made of Ag — Cu solder.

本発明は、また、上記いずれかの光透過窓接合体を備え、前記セラミック体の前記管路内部での発光を、前記光透過窓部材を介して出射させることを特徴とするランプを、併せて提供する。 The present invention also includes a lamp comprising any one of the light transmitting window assemblies described above , wherein the ceramic body emits light emitted from the inside of the duct through the light transmitting window member. To provide.

本発明の光透過窓接合体では、光透過窓部材における光透過領域の面積を比較的広く確保し、透過する光の光量を比較的高くできる。また、本発明の光透過窓接合体では、光透過窓接合体を構成する各部材の熱膨張係数に起因した破損が抑制される。本発明のランプは、比較的高い信頼性で、比較的高い光量の光を照射できる。 In the light transmission window assembly of the present invention, the area of the light transmission region in the light transmission window member can be ensured to be relatively large, and the amount of transmitted light can be relatively high. Moreover, in the light transmissive window joined body of the present invention, breakage due to the thermal expansion coefficient of each member constituting the light transmissive window joined body is suppressed. The lamp of the present invention can irradiate a relatively high amount of light with relatively high reliability.

以下、本発明の光透過窓接合体の一実施形態について、詳細に説明する。図１は、本発明の光透過窓接合体の一実施形態を備えて構成される、本発明のランプの一実施形態である誘電体バリア放電ランプ（以降、放電ランプ１ともいう）の構成を示す概略断面図である。放電ランプ１は、例えば、光化学反応用の紫外線光源として使用される放電ランプの一種で、誘電体バリア放電によってエキシマ分子を形成し、該エキシマ分子から放射される光を、光透過窓部材から透過させて取り出す（光透過窓部材を透過した光を照射する）。 Hereinafter, an embodiment of the light transmission window assembly of the present invention will be described in detail. FIG. 1 shows a configuration of a dielectric barrier discharge lamp ( hereinafter also referred to as a discharge lamp 1) which is an embodiment of a lamp of the present invention, which is configured by including an embodiment of a light transmission window assembly of the present invention. It is a schematic sectional drawing shown. The discharge lamp 1 is a kind of discharge lamp used as an ultraviolet light source for photochemical reaction, for example, which forms excimer molecules by dielectric barrier discharge, and transmits light emitted from the excimer molecules from a light transmission window member. To take out (irradiate the light transmitted through the light transmission window member ).

放電ランプ１は、セラミック体である放電容器（セラミック体）１１と、金属部材１２と、光透過窓部材９（以降、光透過窓９ともいう）と、電極４および５と、交流電源１０とを備えて構成されている。放電容器１１は、例えばアルミナ（Ａｌ２Ｏ３）を主成分とするセラミックスからなり、外側管３と内側管２とが、閉塞端部１０４によって接続されている。セラミック体である放電容器１１は、一方の側（閉塞端部１０４の側）の端部が閉塞されるとともに、他方の端部には、筒状壁部１０６によって囲まれた開口１０８が形成されている。筒状壁部１０６の端部には、例えば銅（Ｃｕ）からなる金属部材１２が接合されている。金属部材１２は、内部に管路が形成された管状の部材であり、上記閉塞端部１０４の側の端面は、筒状壁部１０６の端面と接合されて、開口１０８と連通した管路
を形成している。セラミック体である放電容器１１と金属部材１２とは、例えば、放電容器１１の端面にＭｏ−Ｍｎメタライズを施し、Ｍｏ−Ｍｎ表面にＮｉメッキを被着し、金属部材１２とＮｉメッキ面の間にＡｇ−Ｃｕロウ箔を置いてロウ付けしてなる接合部７Ａを介して接合されている。 The discharge lamp 1 includes a discharge vessel (ceramic body) 11 that is a ceramic body, a metal member 12, a light transmission window member 9 (hereinafter also referred to as a light transmission window 9) , electrodes 4 and 5, an AC power source 10 , It is configured with. The discharge vessel 11 is made of, for example, alumina (Al 2 O 3) from the ceramics whose main component, and the outer tube 3 and inner tube 2 are connected by the closed end 104. The discharge vessel 11, which is a ceramic body, is closed at one end (the closed end 104 side), and the other end is formed with an opening 108 surrounded by a cylindrical wall portion 106. ing. A metal member 12 made of, for example, copper (Cu) is joined to the end of the cylindrical wall portion 106. The metal member 12 is a tubular member in which a pipe line is formed, and the end face on the closed end 104 side is joined to the end face of the cylindrical wall part 106 so that the pipe line communicating with the opening 108 is connected. Forming. For example, the discharge vessel 11 and the metal member 12 which are ceramic bodies are provided with Mo-Mn metallization on the end surface of the discharge vessel 11 and Ni plating is deposited on the Mo-Mn surface, and between the metal member 12 and the Ni plating surface. Are joined via a joint 7A formed by brazing an Ag-Cu brazing foil.

金属部材１２の内周面１２ａには光透過窓９が接合されており、光透過窓９が、開口１０８と連通した管路（金属部材１２によって周囲を囲まれた管路）を閉塞している。光透過窓９は、例えば、フッ化マグネシウム（ＭｇＦ２）の単結晶からなる。光透過窓９は、接合部材７Ｂを介して接合されている。フッ化マグネシウムあるいはフッ化カルシウムは、例えば、石英ガラスやサファイア等に比較し、真空紫外領域の透過率が優れており、誘電体バリア放電によって形成されてエキシマ分子から放射される光（真空紫外線領域の光）を、比較的良好に透過する。本実施形態の光透過窓９は、例えば、フッ化マグネシウム（ＭｇＦ２）のＣ面を主面とする単結晶である。フッ化マグネシウムの単結晶のうち、Ｃ面を主面とする単結晶の熱膨張係数は、金属部材１２を構成する例えば銅（Ｃｕ）の熱膨張係数と、比較的近くなっている。本実施形態における金属部材１２の形状、および、金属部材１２と光透過窓９との接合状態については、後に詳述する。なお、Ｃ面を主面とする単結晶に限定されず、例えばＣ面に垂直な主面を有する単結晶であってもよい。 A light transmission window 9 is joined to the inner peripheral surface 12 a of the metal member 12, and the light transmission window 9 closes a pipe line (a pipe line surrounded by the metal member 12) communicating with the opening 108. Yes. The light transmission window 9 is made of, for example, a single crystal of magnesium fluoride (MgF 2 ). Light transmission window 9 is joined via a joint member 7B. Magnesium fluoride or calcium fluoride, for example, has excellent transmittance in the vacuum ultraviolet region compared to quartz glass, sapphire, etc., and is emitted by excimer molecules formed by dielectric barrier discharge (vacuum ultraviolet region). Of light) is transmitted relatively well. The light transmission window 9 of the present embodiment is, for example, a single crystal whose main surface is a C-plane of magnesium fluoride (MgF 2 ). Of the magnesium fluoride single crystals, the thermal expansion coefficient of the single crystal having the C plane as the main surface is relatively close to the thermal expansion coefficient of, for example, copper (Cu) constituting the metal member 12. The shape of the metal member 12 and the bonding state of the metal member 12 and the light transmission window 9 in this embodiment will be described in detail later. The present invention is not limited to a single crystal having a major surface of C-plane, may be a single crystal having a vertical main surface, for example, C-plane.

放電容器１１の外側管３および内側管２の外面には、アルミニウムの蒸着によって形成した、光反射板を兼ねた誘電体バリア放電用の電極５および４がそれぞれ設けられている。放電容器１１は、一方の側が閉塞端部１０４によって閉塞され、かつ他方の側が光透過窓９によって閉塞され、内部に閉じた空間（放電空間８）が形成されている。放電ランプ１では、放電空間８に放電用ガスが充填されている。かかる放電ランプ１では、交流電源１０によって電極４、５に交流電圧が印加され、放電空間８に誘電体バリア放電が発生する。放電ランプ１では、この誘電体バリア放電によって、放電用ガスからエキシマ分子が形成され、このエキシマ分子から放射された光（真空紫外線領域の光）が、光透過窓９を透過して外部に出射される。本実施形態の放電ランプ１では、誘電体バリア放電の放電路に平行して光透過窓９が設けられており、光透過窓９の厚み方向（すなわち光の出射方向）に沿ったプラズマの厚みが比較的大きい。本実施形態の放電ランプ１では、光透過窓９を透過して出射される光の光量が、比較的大きい。 On the outer surfaces of the outer tube 3 and the inner tube 2 of the discharge vessel 11 are provided dielectric barrier discharge electrodes 5 and 4 that also serve as a light reflecting plate, which are formed by vapor deposition of aluminum. The discharge vessel 11 is closed on one side by the closed end 104 and closed on the other side by the light transmission window 9 to form a closed space (discharge space 8). In the discharge lamp 1, the discharge space 8 is filled with a discharge gas. In the discharge lamp 1 that written, AC voltage to the electrodes 4 and 5 is applied by the AC power source 10, a dielectric barrier discharge is generated in the discharge space 8. In the discharge lamp 1, excimer molecules are formed from the discharge gas by the dielectric barrier discharge, and light emitted from the excimer molecules (light in the vacuum ultraviolet region ) passes through the light transmission window 9 and is emitted to the outside. Is done. In the discharge lamp 1 of this embodiment, dielectrics have light transmissive window 9 in parallel with the discharge path of the barrier discharge is provided, the thickness direction of the light transmission window 9 (i.e. light emitting direction) of the plasma along the The thickness is relatively large. In the discharge lamp 1 of the present embodiment, the amount of light emitted through the light transmission window 9 is relatively large.

図２は、本実施形態の放電ランプ１が備える、本発明の光透過窓接合体の一実施形態について、より詳細に説明する断面図である。光透過窓接合体２０は、放電容器１１と、金属部材１２と、光透過窓９と、を備えて構成されている。上述のように、放電容器１１は、例えばアルミナ（Ａｌ２Ｏ３）を主成分とし、筒状壁部１０６によって囲まれた開口１０８が形成されている。筒状壁部１０６の端部には、例えば銅（Ｃｕ）からなる金属部材１２が接合されている。例えばアルミナ（Ａｌ２Ｏ３）からなる放電容器１１と、例えば銅（Ｃｕ）からなる金属部材１２とは、接合部７Ａを介して接合されている。 FIG. 2 is a cross-sectional view for explaining in more detail one embodiment of the light transmission window assembly of the present invention provided in the discharge lamp 1 of the present embodiment. The light transmission window assembly 20 includes a discharge vessel 11, a metal member 12, and a light transmission window 9. As described above, the discharge vessel 11 includes, for example, alumina (Al 2 O 3 ) as a main component, and the opening 108 surrounded by the cylindrical wall portion 106 is formed. A metal member 12 made of, for example, copper (Cu) is joined to the end of the cylindrical wall portion 106. For example, the discharge vessel 11 made of alumina (Al 2 O 3 ) and the metal member 12 made of copper (Cu), for example, are joined via the joint 7A.

金属部材１２は管状の部材であり、一方の側（閉塞端部１０４の側）の端面が、放電容器１１の端面と接合されて、金属部材１２の内周面１２ａで囲まれた、開口１０８と連通した管路を形成している。金属部材１２の内周面１２ａは、一方の側（閉塞端部１０４の側）から他方の側（光の透過方向に沿った側）に向かうにつれて、開口１０８の中心軸（図２中の破線Ｃで示す）に近づくように曲がった曲部１６を備えている。光透過接合体２０の作製の際、光透過窓９の一方の主面９ａが、金属部材１２の内周面１２ａの、この曲部１６に対応する位置に当接することで、金属部材１２に対する、光の透過方向に沿った位置が規定されている。 The metal member 12 is a tubular member, and an opening 108 whose one end surface (the closed end portion 104 side) is joined to the end surface of the discharge vessel 11 and surrounded by the inner peripheral surface 12 a of the metal member 12. It forms a conduit that communicates with each other. The inner peripheral surface 12a of the metal member 12 extends from the one side (the closed end 104 side) to the other side (the side along the light transmission direction) as the central axis of the opening 108 (broken line in FIG. 2). The curved portion 16 is bent so as to approach (indicated by C). During the production of the light transmitting assembly 20, one main surface 9a of the light transmission window 9, the inner circumferential surface 12a of the metal member 12, that contacts the position corresponding to the curved portion 16, to the metal member 12 A position along the light transmission direction is defined.

光透過接合体２０の作製の際、本実施形態の光透過窓９は、金属部材１２の一方の側（閉塞端部１０４の側）から、内周面１２ａで囲まれた管路内に挿入されて、中心軸に近づくように曲がって内径が狭まった曲部１６に対応する位置で、金属部材１２の内周面１２ａと、光透過窓９の一方主面９ａの周縁とが当接し、金属部材１２に対する光の透過方向に沿った位置が規定される。本実施形態の放電ランプ１では、開口１０８の中心軸（図２中の破線Ｃで示す）に近づくように曲がった曲部１６を備え、光透過窓９の、金属部材１２に対する光の透過方向に沿った位置が規定される。 At the time of manufacturing the light transmission joined body 20, the light transmission window 9 of the present embodiment is inserted from one side (the closed end 104 side) of the metal member 12 into a pipe line surrounded by the inner peripheral surface 12a. The inner peripheral surface 12a of the metal member 12 and the peripheral edge of the one main surface 9a of the light transmission window 9 are in contact with each other at a position corresponding to the curved portion 16 that is bent to approach the central axis and the inner diameter is narrowed. A position along the light transmission direction with respect to the metal member 12 is defined. The discharge lamp 1 of the present embodiment includes a curved portion 16 that is bent so as to approach the central axis of the opening 108 (indicated by a broken line C in FIG. 2), and the light transmission direction of the light transmission window 9 with respect to the metal member 12 A position along is defined.

図３は、金属部材１２と光透過窓９との接合状態について、より詳細に説明する断面図である。本実施形態の光透過窓９は、光透過窓９の側面９ｂが、金属部材１２の内周面１２ａと、接合部材７Ｂを介して接合されている。接合部材７Ｂは、光透過窓９の側面９ｂに設けられたメタライズ層７Ｂａと、メタライズ層７Ｂａと内周面１２ａとの間隙に設けられたロウ付層７Ｂｂとからなる。本実施形態の光透過窓接合体２０では、ロウ付層７Ｂｂは、光透過窓９の一方主面９ａの位置に対して、より光の照射方向の側（図３における上側）に、金属部材１２の内周面１２ａに沿って拡がっている。すなわち、本実施形態の光透過窓接合体２０では、接合部材７Ｂの表面は、光透過窓９の一方主面９ａの周縁部から、金属部材１２の内周面１２ａにかけて連なる。 FIG. 3 is a cross-sectional view illustrating in more detail the bonding state between the metal member 12 and the light transmission window 9. In the light transmission window 9 of the present embodiment, the side surface 9b of the light transmission window 9 is joined to the inner peripheral surface 12a of the metal member 12 via the joining member 7B. Bonding member 7B includes a metallized layer 7Ba provided on a side surface 9b of the light transmission window 9, metallization layer 7 B a and the inner brazing layer provided in a gap between the peripheral surface 12a 7Bb Toka Ranaru. In the light transmission window assembly 20 of the present embodiment, the brazing layer 7Bb is a metal member closer to the light irradiation direction side (upper side in FIG. 3) than the position of the one main surface 9a of the light transmission window 9. 12 extends along the inner peripheral surface 12a. That is, in the light transmissive window assembly 20 of the present embodiment, the surface of the bonding member 7B from the periphery of the main surface 9a of the light transmission window 9, continuous and Placing the inner peripheral surface 12a of the metal member 12.

本実施形態の光透過窓接合体２０は、より具体的には、例えばＡｇ−Ｃｕ―Ｔｉからなるメタライズ層７Ｂａが側面９ｂに設けられた光透過窓９が、Ａｇ−Ｃｕロウからなるロウ付け層７Ｂｂによって、金属部材１２の内周面１２ａと接合されている。光透過窓接合体２０の作製では、金属部材１２の一方の側（閉塞端部１０４の側）から、メタライズ層７Ｂａが側面９ｂに設けられた光透過窓９が、内周面１２ａで囲まれた管路内に挿入され、曲部１６において、内周面１２ａと、光透過窓９の一方主面９ａの周縁とが当接される。この状態で、メタライズ層７Ｂａと金属部材１２の内周面１２ａとの間隙にＡｇ−Ｃｕロウを供給し、メタライズ層７Ｂａと、Ｃｕからなる接合部材２０と、を比較的大きな接合強度で接合する。   More specifically, in the light transmission window assembly 20 of the present embodiment, for example, the light transmission window 9 in which the metallized layer 7Ba made of Ag—Cu—Ti is provided on the side surface 9b is brazed of Ag—Cu brazing. The inner surface 12a of the metal member 12 is joined by the layer 7Bb. In the manufacture of the light transmission window assembly 20, the light transmission window 9 in which the metallized layer 7Ba is provided on the side surface 9b is surrounded by the inner peripheral surface 12a from one side (the closed end 104 side) of the metal member 12. In the curved portion 16, the inner peripheral surface 12a and the peripheral edge of the one main surface 9a of the light transmission window 9 are brought into contact with each other. In this state, Ag—Cu solder is supplied to the gap between the metallized layer 7Ba and the inner peripheral surface 12a of the metal member 12, and the metallized layer 7Ba and the bonding member 20 made of Cu are bonded with a relatively large bonding strength. .

本実施形態の光透過窓接合体２０では、光透過窓９の一方主面９ａの周縁が曲部１６と接合部材７Ｂを介して接合しており、この一方主面９ａの位置に対して、より光の照射方向の側（図３中の上側）では、一方主面９ａから離れるにしたがって、内周面１２ａが中心軸Ｃに近づいている。光透過窓接合体２０では、メタライズ層７Ｂａと金属部材１２の内周面１２ａとの間隙に供給されたＡｇ−Ｃｕロウは、メタライズ層７Ｂａおよび内周面１２ａとの濡れによって、この間隙を一方主面９ａの側に進んでいく。Ａｇ−Ｃｕロウは、例えばフッ化マグネシウム（ＭｇＦ２）からなる光透過窓９の主面９ａに対する濡れ性に比べて、例えばＣｕからなる金属部材１２に対する濡れ性の方が、比較的高い。メタライズ層７Ｂａと金属部材１２の内周面１２ａとの間隙に供給されたＡｇ−Ｃｕロウは、一方主面９ａの側に到達した後は、濡れ性が比較的良好な、金属部材１２の内周面１２ａに沿って拡がる。本実施形態の光透過窓接合体２０では、接合部材７Ｂの表面は、光透過窓９の一方主面９ａの周縁部から、金属部材１２の内周面１２ａに向けて連なる。なお、光透過窓９の一方主面９ａの周縁部とは、光透過窓９の一方主面９ａの周縁と、一方主面９ａの内部領域に向けて周縁から所定長だけ離間した位置を通る周縁部区分線とで囲まれた領域を含む範囲をいう。なお、この所定長は、光透過窓９の一方主面９ａの重心位置を通る、一方主面９ａの周縁によって区切られた複数の線分のうち、最も短い長さの線分の５％の長さをいう。本実施形態の光透過窓接合体２０では、この周縁部に対応する範囲よりも内部には、接合部材７Ｂ（特にロウ付層７Ｂｂ）は被着されない。 In the light transmission window assembly 20 of the present embodiment, the peripheral edge of the one main surface 9a of the light transmission window 9 is bonded to the curved portion 16 via the bonding member 7B . On the more light irradiation side (the upper side in FIG. 3), the inner peripheral surface 12a approaches the central axis C as the distance from the main surface 9a increases. In the light transmission window assembly 20, the Ag—Cu solder supplied to the gap between the metallized layer 7Ba and the inner peripheral surface 12a of the metal member 12 causes this gap to be reduced by wetting with the metallized layer 7Ba and the inner peripheral surface 12a. Proceed to the main surface 9a side. A g -Cu wax, for example in comparison with the wettability to the main surface 9a of the light transmission window 9 made of magnesium fluoride (MgF 2), the direction of wettability to the metal member 12 made of, for example, Cu, relatively high. The Ag—Cu braze supplied to the gap between the metallized layer 7Ba and the inner peripheral surface 12a of the metal member 12 has a relatively good wettability after reaching the one main surface 9a side. It spreads along the peripheral surface 12a. In the light transmission window assembly 20 of the present embodiment, the surface of the bonding member 7 </ b> B continues from the peripheral edge portion of the one main surface 9 a of the light transmission window 9 toward the inner peripheral surface 12 a of the metal member 12. The peripheral portion of the one main surface 9a of the light transmission window 9 passes through a position separated from the peripheral edge of the one main surface 9a of the light transmission window 9 by a predetermined length from the periphery toward the inner region of the one main surface 9a. It refers to a range including a region surrounded by the periphery section line. The predetermined length passes through the centroid position of one main surface 9a of the light transmission window 9, whereas among the plurality of segments separated by the peripheral edge of the main surface 9a, 5% of the line segment of the shortest length The length of In light transmissive window assembly 20 of the present embodiment, inside than the range corresponding to the peripheral portion, the joining member 7B (in particular layer brazing 7Bb) is not deposited.

例えば、ロウ付層７Ｂｂが光透過窓９の一方主面９ａに拡がって被着された場合、光透過窓９における光の透過面積が比較的小さくなり、光透過窓９を透過する光の光量が減少する。またこの場合、例えばＡｇ−Ｃｕロウからなるロウ付層７Ｂｂと、フッ化マグネシウム（ＭｇＦ２）からなる光透過窓９との熱膨張係数の差に起因し、ロウ付層７Ｂｂの固化の際に光透過窓９に割れ等の破損が生じることがある。本実施形態の光透過窓接合体２
０では、接合部材７Ｂの表面は、光透過窓９の一方主面９ａの周縁部から、金属部材１２の内周面１２ａに向けて連なり、光透過窓９の一方主面９ａには、Ａｇ−Ｃｕロウからなるロウ付層７Ｂｂが被着されない。本実施形態の光透過窓接合体２０は、光透過窓９において光が透過できる面積を比較的広く確保することができる。また、本実施形態の光透過窓接合体２０は、光透過窓９の、金属部材１２に対する光の透過方向に沿った位置を比較的高い精度で規定しつつ、光透過窓９の破損が抑制される。 For example, when the brazing layer 7Bb is spread and applied to the one main surface 9a of the light transmission window 9, the light transmission area in the light transmission window 9 becomes relatively small, and the amount of light transmitted through the light transmission window 9 is reduced. Decrease. In this case, for example, due to the difference in thermal expansion coefficient between the brazing layer 7Bb made of Ag—Cu brazing and the light transmission window 9 made of magnesium fluoride (MgF 2 ), the brazing layer 7Bb is solidified. The light transmission window 9 may be broken or broken. Light transmission window assembly 2 of the present embodiment
In 0, the surface of the joining member 7B is continuous from the peripheral portion of the one main surface 9a of the light transmission window 9 toward the inner peripheral surface 12a of the metal member 12, and the one main surface 9a of the light transmission window 9 is Ag. -The brazing layer 7Bb made of Cu solder is not deposited. The light transmission window assembly 20 of the present embodiment can ensure a relatively wide area through which light can be transmitted in the light transmission window 9. Moreover, the light transmission window assembly 20 of the present embodiment suppresses damage to the light transmission window 9 while defining the position of the light transmission window 9 along the light transmission direction with respect to the metal member 12 with relatively high accuracy. Is done.

本実施形態の光透過窓接合体２０では、例えばＭｇＦ２からなる光透過窓９と、例えばＣｕからなる金属部材１２とが、Ａｇ−Ｃｕからなるロウ付層７Ｂｂによって接合されている。Ａｇ−Ｃｕからなるロウ付層７Ｂｂは、約７８０℃と融点が比較的高く、接合後の部材（本実施形態では、光透過窓接合体２０、および放電ランプ１）は、比較的高い耐熱性を備えている。本実施形態の光透過窓接合体２０、および本実施形態の放電ランプ１は、比較的高い温度に昇温する条件下でも、光透過窓９と金属部材１２とが、比較的高い接合状態を保っている。また、光透過窓接合体２０では、光透過窓９の、側面９ｂおよび一方主面９ａの周縁部のみに接合部材７Ｂが設けられている。本実施形態の光透過窓接合体２０では、このように、側面９ｂおよび一方主面９ａの周縁部にのみ接合部材７Ｂが設けられているので、例えば一方主面９ａにロウ付層７Ｂが被着されている場合と比較して、温度変化に起因して光透過窓９に生じる応力は比較的小さい。放電ランプ１は、放電容器１１内にプラズマを生成して光を発生し、プラズマに比較的近い位置に配置される光透過窓９および金属部材１２は、発光および消灯に応じて、比較的広い温度範囲で温度変化する。本実施形態の光透過窓接合体２０では、比較的広い温度範囲で温度が変化した場合でも、光透過窓９の損傷が抑制される。 In the light transmission window assembly 20 of the present embodiment, a light transmission window 9 made of, for example, MgF 2 and a metal member 12 made of, for example, Cu are joined together by a brazing layer 7Bb made of Ag—Cu. The brazing layer 7Bb made of Ag—Cu has a relatively high melting point of about 780 ° C., and the joined members (in this embodiment, the light transmission window assembly 20 and the discharge lamp 1) have a relatively high heat resistance. It has. The light transmission window assembly 20 of the present embodiment and the discharge lamp 1 of the present embodiment have a relatively high bonding state between the light transmission window 9 and the metal member 12 even under conditions where the temperature is raised to a relatively high temperature. I keep it. Further, in the light transmission window assembly 20, the bonding member 7 </ b> B is provided only in the peripheral portion of the side surface 9 b and the one main surface 9 a of the light transmission window 9. In light transmissive window assembly 20 of the present embodiment, thus, the only joint member 7B in the periphery of the side surface 9b and one main surface 9a is provided, the brazing layer 7B, for example, one main surface 9a to be Compared with the case where it is worn, the stress generated in the light transmission window 9 due to the temperature change is relatively small. The discharge lamp 1 generates plasma in the discharge vessel 11 to generate light, and the light transmission window 9 and the metal member 12 disposed at positions relatively close to the plasma are relatively wide according to light emission and extinction. The temperature changes in the temperature range. In the light transmission window assembly 20 of the present embodiment, damage to the light transmission window 9 is suppressed even when the temperature changes in a relatively wide temperature range.

また、本実施形態の光透過窓接合体２０では、Ｃ面を主面とするフッ化マグネシウム（ＭｇＦ２）単結晶体を光透過窓９とし、この光透過窓９を銅（Ｃｕ）からなる金属部材１２と接合している。Ｃ面を主面とするフッ化マグネシウム単結晶体の熱膨張係数は、金属部材１２を構成するＣｕの熱膨張係数と比較的近い。本実施形態の光透過窓接合体２０では、比較的広い温度範囲で温度が変化した場合でも、金属部材１２の熱膨張の程度と、光透過窓９の熱膨張の程度との差が、比較的小さくされている。また、光透過窓９と金属部材１２とにおいて、熱膨張の程度に差が生じた場合も、金属部材１２が積極的に変形し、光透過窓９にかかる応力を低減させることができる。本実施形態の光透過窓接合体２０では、比較的広い温度範囲で温度が変化した場合でも、光透過窓９の損傷が抑制される。 Further, in the light transmission window assembly 20 of the present embodiment, a magnesium fluoride (MgF 2 ) single crystal having a C plane as a main surface is used as the light transmission window 9, and the light transmission window 9 is made of copper (Cu). The metal member 12 is joined. The thermal expansion coefficient of the magnesium fluoride single crystal having the C plane as the main surface is relatively close to the thermal expansion coefficient of Cu constituting the metal member 12. In the light transmission window assembly 20 of the present embodiment, even when the temperature changes in a relatively wide temperature range, the difference between the degree of thermal expansion of the metal member 12 and the degree of thermal expansion of the light transmission window 9 is compared. It is made small. In addition, even when there is a difference in the degree of thermal expansion between the light transmission window 9 and the metal member 12, the metal member 12 is positively deformed, and the stress applied to the light transmission window 9 can be reduced. In the light transmission window assembly 20 of the present embodiment, damage to the light transmission window 9 is suppressed even when the temperature changes in a relatively wide temperature range.

本実施形態の光透過窓接合体２０を有して構成される放電ランプ１は、真空紫外領域の透過率が優れているフッ化マグネシウム単結晶体を透過窓として備えており、放電容器１１内で生じた光を、比較的大きな光量で出射させることができる。また、本実施形態の放電ランプ１では、例えば、発光および消光による温度変化に起因した光透過窓９の損傷が抑制され、比較的長期間使用した場合でも、放電容器１１内のガス濃度や気圧の変化が十分小さい。   The discharge lamp 1 including the light transmission window assembly 20 of the present embodiment includes a magnesium fluoride single crystal having excellent transmittance in the vacuum ultraviolet region as a transmission window. Can be emitted with a relatively large amount of light. Further, in the discharge lamp 1 of the present embodiment, for example, damage to the light transmission window 9 due to temperature change due to light emission and quenching is suppressed, and even when used for a relatively long period of time, the gas concentration and pressure in the discharge vessel 11 The change is small enough.

以上、本発明の一実施形態について詳細に説明したが、本発明の光透過窓接合体は、上記実施形態に限定されない。上記実施形態では、誘電体バリア放電ランプの光透過窓接合体について説明したが、例えば、グロー放電ランプやアーク放電ランプの光透過窓であってもよい。また、光透過窓接合部材の金属部材の形状は、上記実施形態に限定されず、例えば図４の従来例の図に例示されるように、金属部材が部分的に屈曲部を有していてもよい。本発明は上記実施例に限定されるものでなく、本発明の要旨を逸脱しない範囲において、各種の改良および変更を行ってもよいのはもちろんである。 Having described in detail an embodiment of the present invention, the light transmissive window assembly of the present invention is not limited to the above embodiment. In the above embodiment, the light transmission window assembly of the dielectric barrier discharge lamp has been described. However, for example, a light transmission window of a glow discharge lamp or an arc discharge lamp may be used. Moreover, the shape of the metal member of the light transmission window bonding member is not limited to the above embodiment, and the metal member partially has a bent portion as illustrated in the conventional example of FIG. Also good. Of course, the present invention is not limited to the above-described embodiments, and various improvements and modifications may be made without departing from the scope of the present invention.

本発明のランプの一実施形態である放電ランプの構成を示す概略断面図である。It is a schematic sectional drawing which shows the structure of the discharge lamp which is one Embodiment of the lamp | ramp of this invention. 図１に示す放電ランプが備える光透過窓接合体について説明する概略断面図である。It is a schematic sectional drawing explaining the light transmissive window assembly with which the discharge lamp shown in FIG. 1 is provided. 図２に示す光透過窓接合体の、金属部材と光透過窓との接合状態について説明する断面図である。It is sectional drawing explaining the joining state of the metal member and light transmissive window of the light transmissive window assembly shown in FIG. 従来の光透過窓接合体の一例の概略断面図である。It is a schematic cross-sectional view of a conventional light transmissive window assembly.

１ 誘電体バリア放電ランプ（放電ランプ）
７Ａ 接合部
７Ｂ 接合部材
７Ｂa メタライズ層
７Ｂｂ ロウ付層
９ 光透過窓部材（光透過窓）
９ａ 主面（一方主面）
９ｂ 側面
１０ 交流電源
１１ 放電容器（セラミック体）
１２ 金属部材
１２ａ 内周面
１６ 曲部
２０ 光透過窓接合体 1 Dielectric barrier discharge lamp ( discharge lamp )
7A joint
7B Joining member
7Ba metallized layer
7Bb Brazing layer 9 Light transmission window member ( light transmission window )
9a Main surface (one main surface)
9b Side surface 10 AC power source 11 Discharge vessel (ceramic body)
12 Metal member 12a Inner peripheral surface
16 pieces
20 Light transmission window assembly

Claims (7)

端部に開口を有する管状のセラミック体と、
前記セラミック体の前記端部と接合され、前記開口と連通する管路を形成する管状の金属部材と、
前記管路を閉塞する光透過窓部材とを備え、
前記光透過窓部材は、前記光透過窓部材の側面と前記金属部材の内周面との間に配された接合部材によって、前記金属部材に接合されており、
前記金属部材の前記内周面は、前記光透過窓部材よりも前記セラミック体から離れる側に、前記光透過窓部材から離れるにしたがって前記開口の中心軸に近づく曲部を有し、
前記接合部材が、前記光透過窓部材の前記側面と前記金属部材の前記内周面との間から、前記内周面の前記曲部を含む領域にかけて延びていることを特徴とする光透過窓接合体。 A tubular ceramic body having an opening at the end;
A tubular metal member joined to the end of the ceramic body to form a conduit communicating with the opening;
And a light transmissive window member for closing the pipe,
The light transmission window member is bonded to the metal member by a bonding member disposed between a side surface of the light transmission window member and an inner peripheral surface of the metal member,
The inner peripheral surface of the metallic member, on the side Ru are away from the previous SL ceramic body than the light transmission window member, have a curved portion closer to the central axis of the release Re Runishitagatte the opening from the light transmission window members And
The joining member, from between the inner peripheral surface of the metal member and the side surface of the light transmitting window member, the light transmission window, characterized in that it extends over the region including the curved portion of the inner peripheral surface Joined body. 前記接合部材は、前記光透過窓部材の、前記セラミック体と反対の側の主面の周縁部から、前記金属部材の前記内周面にかけて連なる表面を有することを特徴とする請求項１記載の光透過窓接合体。 The joining member, the light transmission window member, from the periphery of the main surface on the opposite side of the ceramic body, according to claim 1, characterized in that it has a surface continuous toward the inner peripheral surface of the metal member Light transmission window assembly. 前記光透過窓部材は、フッ化マグネシウム（ＭｇＦ２）の単結晶からなることを特徴とする請求項１または２記載の光透過窓接合体。 The light transmission window assembly according to claim 1, wherein the light transmission window member is made of a single crystal of magnesium fluoride (MgF 2 ). 前記金属部材は銅（Ｃｕ）からなることを特徴とする請求項３に記載の光透過窓接合体。 Light transmissive window assembly according to claim 3 wherein the metal member is a copper (Cu) Tona characterized Rukoto. 前記接合部材は、前記光透過窓部材の前記側面に被着されたメタライズ層と、前記メタライズ層と前記金属部材の前記内周面とを接合するロウ付層とからなることを特徴とする請求項１〜４のいずれかに記載の光透過窓接合体。 Wherein the joining member, characterized in that consists of a metallized layer deposited on the side surface of the light transmitting window member, the brazing layer for bonding the inner peripheral surface of the metal member and the metallizing layer and Item 5. The light transmission window assembly according to any one of Items 1 to 4. 前記メタライズ層がＡｇ−Ｃｕ−Ｔｉからなり、前記ロウ付層がＡｇ−Ｃｕロウからなることを特徴とする請求項５記載の光透過窓接合体。 The light transmission window assembly according to claim 5, wherein the metallized layer is made of Ag-Cu-Ti , and the brazing layer is made of Ag - Cu solder. 請求項１〜６のいずれかに記載の光透過窓接合体を備え、
前記セラミック体の内部で発光した光を、前記光透過窓部材を介して、前記セラミック体と反対の側に出射することを特徴とするランプ。 The light transmissive window assembly according to any one of claims 1 to 6,
A lamp characterized in that light emitted inside the ceramic body is emitted to the opposite side of the ceramic body through the light transmission window member .
JP2008168301A 2008-06-27 2008-06-27 Light transmission window assembly and lamp Expired - Fee Related JP5106269B2 (en)

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