JP5103596B2

JP5103596B2 - Substrate container and positioning structure thereof

Info

Publication number: JP5103596B2
Application number: JP2008269215A
Authority: JP
Inventors: 哲慶豊田; 祥一森
Original assignee: Hirata Corp
Current assignee: Hirata Corp
Priority date: 2008-10-17
Filing date: 2008-10-17
Publication date: 2012-12-19
Anticipated expiration: 2028-10-17
Also published as: JP2010098198A

Description

本発明は、基板収容容器およびその位置決め構造に係り、特に、半導体ウエハ、マスクガラスなどの基板を収容、輸送、保管するための基板収容容器の、ロードポートなどの載置台に載置される載置部の構造、および載置台との位置決め構造に関するものである。 The present invention relates to a substrate storage container and a positioning structure thereof, and in particular, to be mounted on a mounting table such as a load port of a substrate storage container for storing, transporting, and storing a substrate such as a semiconductor wafer or mask glass. The present invention relates to the structure of the mounting portion and the positioning structure with respect to the mounting table.

半導体ウエハなどの基板は、微小な粉塵による汚染を避けるために、基板収容容器に収容した状態で、輸送、保管され、各種の処理装置に供される。そして、この基板収容容器を、ロードポートなどの載置台に載置、位置決めした後、基板収容容器内の基板が各種の処理装置に供される。 A substrate such as a semiconductor wafer is transported and stored in a state where it is accommodated in a substrate accommodating container in order to avoid contamination by minute dust, and is provided to various processing apparatuses. And after mounting and positioning this board | substrate storage container on mounting bases, such as a load port, the board | substrate in a board | substrate storage container is provided to various processing apparatuses.

基板収容容器と載置台との一般的な位置決め機構としては、凹部材と凸部材の嵌合を利用するものがある。
従来は、図１３に示すように、基板収容容器９０の容器本体９１の底面９２に位置決め部材である断面Ｖ字状をした凹部材９３を複数箇所設け、図１４に示すように、載置台１００の載置面１０１に凸部材である位置決めピン１０２を設け、それぞれの凹凸部材９３，１０２を相互に嵌合させることにより、基板収容容器９０と載置台１００との位置決めを行っていた。容器本体９１の開口部９４は、図１４に二点鎖線で示す蓋部材９５により開閉自在とされる。 As a general positioning mechanism between the substrate container and the mounting table, there is a mechanism that uses the fitting of the concave member and the convex member.
Conventionally, as shown in FIG. 13, a plurality of concave members 93 having a V-shaped cross section as a positioning member are provided on the bottom surface 92 of the container main body 91 of the substrate housing container 90. Positioning pins 102, which are convex members, are provided on the mounting surface 101, and the concave and convex members 93 and 102 are fitted to each other, thereby positioning the substrate container 90 and the mounting table 100. The opening 94 of the container main body 91 can be opened and closed by a lid member 95 shown by a two-dot chain line in FIG.

ここで、容器本体９１の底面９２に設けられる凹部材９３（位置決め部材）は、ＳＥＭＩ規格で定められており、容器本体９１側にＶ溝９３が３個設けられ、それらのＶ溝９３の近傍に、図１５に示すように、基板収容容器９０の在席検出のための検出パッド１１０が設けられる。載置台１００の載置面１０１における検出パッド１１０に対応する位置には、図１６に示すように、在席検出センサ１２０が設けられる。 Here, the concave member 93 (positioning member) provided on the bottom surface 92 of the container main body 91 is defined by the SEMI standard, and three V grooves 93 are provided on the container main body 91 side, and in the vicinity of the V grooves 93. Further, as shown in FIG. 15, a detection pad 110 for detecting the presence of the substrate container 90 is provided. As shown in FIG. 16, a presence detection sensor 120 is provided at a position corresponding to the detection pad 110 on the mounting surface 101 of the mounting table 100.

位置決め部材は、容器本体の底面に直接設けられる場合と、容器本体の底に取り付けられるプレートに設ける場合とがある。
前者の例としては、精密基板を収納する精密基板収納容器の、容器本体の底面に備えられ、精密基板を加工するための加工装置側の位置決めピンとの係合に用いられる精密基板収納容器の位置決め部材が挙げられる（特許文献１参照）。この位置決め部材は、容器本体の底面に一体化されてなる。 The positioning member may be provided directly on the bottom surface of the container body or may be provided on a plate attached to the bottom of the container body.
As an example of the former, positioning of a precision substrate storage container that is provided on the bottom surface of a precision substrate storage container that stores a precision substrate and that is used for engagement with a positioning pin on a processing apparatus side for processing the precision substrate. A member is mentioned (refer patent document 1). This positioning member is integrated with the bottom surface of the container body.

後者の例としては、ウエハ収納用のポッドと、ポッドの底面に螺着されるボトムプレートと、を備える精密基板収納容器が挙げられる（特許文献２参照）。この精密基板収納容器は、ポッドに成形される嵌合ボスと、ボトムプレートに成形される嵌合突部とで位置決め取付手段が構成される。
特許第３９４２３７９号明細書特開２０００−９１４０９号公報 Examples of the latter include a precision substrate storage container including a wafer storage pod and a bottom plate screwed to the bottom surface of the pod (see Patent Document 2). In the precision substrate storage container, a positioning attachment means is constituted by a fitting boss formed on the pod and a fitting protrusion formed on the bottom plate.
Japanese Patent No. 3942379 JP 2000-91409 A

ところで、従来の位置決め部材、すなわちＶ溝９３を、その溝内に載置台１００の凸部材（位置決めピン１０２）に嵌合させ、これらの嵌合だけでＸ−Ｙ−Ｚ方向の位置決めを同時に行っていた。具体的には、位置決めピン１０２をＶ溝９３の溝面１１３に倣わせつつ、滑らせることで、溝面１１３にてＸ−Ｙ方向の位置決めがなされ、Ｖ溝９３の最深部にてＺ方向の位置決めがなされる。 By the way, a conventional positioning member, that is, a V-groove 93 is fitted into the convex member (positioning pin 102) of the mounting table 100 in the groove, and positioning in the X, Y, and Z directions is simultaneously performed only by these fittings. It was. Specifically, the positioning pin 102 is slid while following the groove surface 113 of the V-groove 93, thereby positioning in the XY direction on the groove surface 113, and in the Z direction at the deepest portion of the V-groove 93. Is positioned.

しかしながら、位置決めピン１０２が溝面１１３の途中に引っ掛かって基板収容容器９０に“浮き”が生じたり、位置決めピン１０２がＶ溝９３にオフセットした状態で着座、換言すると基板収容容器９０が僅かに傾いた状態で載置されたりすることがある。 However, the positioning pin 102 is caught in the middle of the groove surface 113 to cause “floating” in the substrate housing container 90, or the positioning pin 102 is seated with the V groove 93 being offset, in other words, the substrate housing container 90 is slightly tilted. It may be placed in a state where

前者の場合、検出パッド１１０と在席検出センサ１２０との間に隙間が生じ、在席検出センサ１２０が正常に作動しないことから容易に検出ができ、在席検出エラー（在席ＮＧ）となる。この場合、再度、基板収容容器９０を載置台１００上に置き直す必要があるが、検出そのものは可能である。 In the former case, there is a gap between the detection pad 110 and the presence detection sensor 120, and the presence detection sensor 120 does not operate normally, so that it can be easily detected, resulting in an presence detection error (NG). . In this case, it is necessary to place the substrate container 90 on the mounting table 100 again, but the detection itself is possible.

一方、後者の場合、Ｖ溝９３や位置決めピン１０２の加工精度が悪かったり、経年変化や摩耗などによりＶ溝９３の精度が低下してきたりしたときに生じる。これらの場合、基板収容容器９０と載置台１００との位置ずれは生じているものの、その位置ずれ量はごく僅かであることから、在席検出センサ１２０自体は正常に作動して在席ＯＫとなってしまうことがある。これらの場合、在席、すなわち容器の載置状態は正常と判断されているので、通常通り、図示しないロボットハンドが基板収容容器９０内に収容された基板を取りに行くことになる。しかしながら、基板収容容器９０は僅かに位置ずれしていることから、ロボットハンドが基板にぶつかってしまい、基板を破損するおそれがある。 On the other hand, the latter case occurs when the processing accuracy of the V-groove 93 or the positioning pin 102 is poor or the accuracy of the V-groove 93 is lowered due to aging or wear. In these cases, although the positional deviation between the substrate container 90 and the mounting table 100 has occurred, the positional deviation amount is very small. Therefore, the presence detection sensor 120 itself operates normally and the presence OK. It may become. In these cases, it is determined that the user is seated, that is, the container is placed in a normal state. Therefore, as usual, a robot hand (not shown) takes a substrate stored in the substrate storage container 90. However, since the substrate storage container 90 is slightly displaced, the robot hand may hit the substrate and damage the substrate.

以上の事情を考慮して創案された本発明の目的は、基板収容容器を、確実に精度良く、載置台上に載置可能な基板収容容器およびその位置決め構造を提供することにある。 An object of the present invention, which has been created in view of the above circumstances, is to provide a substrate container and a positioning structure thereof that can place the substrate container on the mounting table reliably and accurately.

上記目的を達成すべく本発明に係る基板収容容器は、載置台上に水平に載置、位置決めされ、その内部に基板が収容される容器であって、前記基板収容容器の、前記載置台の載置面に載置される載置部に、先端が前記載置面と平行な平坦面に形成された突起部を少なくとも３つ設けると共に、漏斗状の凹部を少なくとも２つ設け、前記各突起部の平坦面を前記載置面に当接させ、平面同士を面接触させるようにしたものである。 In order to achieve the above object, a substrate storage container according to the present invention is a container that is horizontally placed and positioned on a mounting table, and in which a substrate is stored. The mounting portion mounted on the mounting surface is provided with at least three protrusions having a tip formed on a flat surface parallel to the mounting surface described above, and at least two funnel-shaped recesses. The flat surface of the part is brought into contact with the mounting surface, and the flat surfaces are brought into surface contact with each other.

また、前記突起部は、前記基板収容容器の載置部に、平面上において三角形の頂点を形成する位置関係にて３つ設けてもよい。
また、前記平坦面の少なくとも１つを、容器在席検出のための被在席検出部としてもよい。 In addition, three protrusions may be provided on the placement portion of the substrate container in a positional relationship that forms a triangular apex on a plane.
Further, at least one of the flat surfaces may be a seated seat detection unit for detecting container seating.

また、前記被在席検出部を構成する前記平坦面は、その他の平坦面よりも突出高さを低く設けてもよい。
また、前記基板収容容器は、その本体の底に基板収容容器を水平に支持するスタンド部を有し、そのスタンド部の底部に前記突起部および前記凹部を設けてもよい。
また、前記突起部の平坦面の少なくとも２つに、前記凹部を設けてもよい。 Further, the flat surface constituting the presence seat detection unit may be provided with a projecting height lower than other flat surfaces.
The substrate container may have a stand part for horizontally supporting the substrate container at the bottom of the main body, and the protrusion and the recess may be provided at the bottom part of the stand part.
Moreover, you may provide the said recessed part in at least 2 of the flat surface of the said projection part.

一方、本発明に係る基板収容容器の位置決め構造は、前述した本発明に係る基板収容容器と、その基板収容容器が載置される載置台とで構成され、前記基板収容容器を前記載置台上に水平に載置、位置決めする際の位置決め構造であって、前記載置台に、載置面よりも上方に突出する位置決めピンを少なくとも２つ設けると共に、載置面に在席検出部を少なくとも１つ設け、前記各突起部の平坦面を前記載置面に当接させ、前記載置台に対する前記基板収容容器の垂直方向の位置決めをし、前記各凹部内に前記位置決めピンを嵌入させ、前記載置台に対する前記基板収容容器の水平方向の位置決めをし、前記平坦面の少なくとも１つを前記在席検出部にて検出し、前記基板収容容器の在席を検出するものである。 On the other hand, the substrate storage container positioning structure according to the present invention includes the above-described substrate storage container according to the present invention and a mounting table on which the substrate storage container is mounted. In the positioning structure for horizontal mounting and positioning, at least two positioning pins projecting upward from the mounting surface are provided on the mounting table, and at least one presence detection unit is provided on the mounting surface. Provided, the flat surface of each projection is brought into contact with the mounting surface, the substrate receiving container is positioned in the vertical direction with respect to the mounting table, and the positioning pins are inserted into the recesses, The substrate container is positioned in the horizontal direction with respect to a mounting table, and at least one of the flat surfaces is detected by the presence detector, and the presence of the substrate container is detected.

また、前記載置部に前記凹部を離間して２つ設けると共に、一方の凹部を丸穴に、他方の凹部を長穴に形成し、丸穴に形成された前記凹部を一方の前記位置決めピンの基準穴とし、長穴に形成された前記凹部を他方の前記位置決めピンの回転拘束穴としてもよい。
また、前記載置部に前記凹部を離間して２つ設けると共に、両凹部を丸穴に形成し、一方の前記凹部に嵌入される前記位置決めピンを丸ピンに形成し、他方の前記凹部に嵌入される前記位置決めピンを、丸ピンの周面の少なくとも２箇所を切り落としてなる異形ピンに形成してもよい。 Further, the recessed portion is provided in the mounting portion with two spaced apart portions, one recessed portion is formed as a round hole, the other recessed portion is formed as a long hole, and the recessed portion formed in the round hole is formed as one positioning pin. It is good also considering the said recessed part formed in the long hole as a rotation restraint hole of the other said positioning pin.
In addition, the recessed portion is provided with two spaced apart recessed portions in the mounting portion, both recessed portions are formed in round holes, the positioning pin fitted into one of the recessed portions is formed in a round pin, and the other recessed portion is formed. The positioning pin to be inserted may be formed into a deformed pin formed by cutting off at least two places on the peripheral surface of the round pin.

また、前記平坦面の少なくとも１つを、その他の平坦面よりも突出高さを低く設けて容器在席検出のための被在席検出部とし、その少なくとも１つの被在席検出部を前記在席検出部にて検出するようにしてもよい。
また、前記在席検出部が、載置面よりも上方に突出され、かつ、載置面に没入自在なドグセンサや、前記載置台内部に設けられ、載置面に臨んで垂直上向きに配置される非接触センサであってもよい。 Further, at least one of the flat surfaces is provided with a projecting height lower than the other flat surfaces to be a seated seat detection unit for container seating detection, and the at least one seated seat detection unit is the seated seat detection unit. You may make it detect in a seat detection part.
Further, the presence detection unit protrudes upward from the placement surface and can be immersed in the placement surface, and is provided inside the placement table, and is arranged vertically upward facing the placement surface. A non-contact sensor may be used.

本発明によれば、基板収容容器の載置部に、先端が載置台の載置面と平行な平坦面に形成された突起部と、漏斗状の凹部とを設け、基板収容容器と載置台との位置決めを、水平方向（Ｘ−Ｙ方向）の位置決めと垂直方向（Ｚ方向）の位置決めとを別々に分け、それぞれ別々の部材で位置決めするようにしたことで、基板収容容器の水平方向および垂直方向の位置決め精度が良好となるという優れた効果を発揮する。 According to the present invention, the mounting portion of the substrate storage container is provided with the protrusion formed on the flat surface parallel to the mounting surface of the mounting table and the funnel-shaped recess, and the substrate storage container and the mounting table The horizontal positioning (X-Y direction) and the vertical direction (Z direction) are separately divided and positioned by separate members, so that the horizontal direction of the substrate container and An excellent effect is achieved that the positioning accuracy in the vertical direction is good.

以下、本発明の好適一実施の形態を添付図面に基づいて説明する。
図１に示すように、本実施の形態に係る基板収容容器１０は、載置台２００上に水平に載置、位置決めされ、その内部に基板Ｗが収容される。 DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a preferred embodiment of the invention will be described with reference to the accompanying drawings.
As shown in FIG. 1, the substrate storage container 10 according to the present embodiment is horizontally placed and positioned on a mounting table 200, and a substrate W is accommodated therein.

（基板収容容器）
基板収容容器１０は、内部に基板Ｗの収容空間を有する容器本体１１と、容器本体前面（図１中では右面）の開口部１２を開閉自在に閉塞する蓋部材１３とで主に構成される。また、容器本体１１の上面、側面の所定の位置に、容器搬送のためのハンドル１４が設けられる。 (Substrate container)
The substrate storage container 10 is mainly composed of a container main body 11 having a storage space for the substrate W therein, and a lid member 13 that closes the opening 12 on the front surface of the container main body (the right surface in FIG. 1) so as to be opened and closed. . Further, a handle 14 for transporting the container is provided at a predetermined position on the upper surface and side surface of the container body 11.

基板収容容器１０の、載置台２００の載置面２０１に載置される載置部１５（容器本体１１の底部）には、図４に示すように、先端が載置面２０１と平行な平坦面３１１に形成された突起部（検出パッド）３１と、漏斗状の凹部（位置決め穴）３２が設けられる。突起部３１の数は特に限定するものではないが、３つが最も好ましい。また、凹部３２の数は少なくとも２つあればよく、特に限定するものではないが、２つが最も好ましい。平坦面３１１の平面視形状は特に限定するものではなく、図３に示す長円形状、円形状、楕円形状、矩形形状、多角形形状などであってよい。 As shown in FIG. 4, the mounting portion 15 (the bottom portion of the container body 11) of the substrate container 10 that is mounted on the mounting surface 201 of the mounting table 200 has a flat tip that is parallel to the mounting surface 201. A protrusion (detection pad) 31 formed on the surface 311 and a funnel-shaped recess (positioning hole) 32 are provided. The number of protrusions 31 is not particularly limited, but is most preferably three. Moreover, the number of the recessed parts 32 should just be at least two, and although it does not specifically limit, two is the most preferable. The planar view shape of the flat surface 311 is not particularly limited, and may be an oval shape, a circular shape, an elliptical shape, a rectangular shape, a polygonal shape, or the like shown in FIG.

突起部３１は、図３に示すように、三角形の頂点を形成する位置関係にて、基板収容容器１０の載置部１５に設けられる。また、凹部３２は、図４に示すように、穴奥側（図４中では上側）に向かって先細りとなるテーパ状に形成されるピンガイド部３２１と、ピンガイド部３２１の穴奥側から連続して垂直上向きに形成されるピン嵌入部（垂直穴部）３２２とで構成される。ここで、各突起部３１は、好ましくは正三角形、または二等辺三角形の頂点を形成する位置関係に配置される。また、各凹部３２は、後述するＸ−Ｙ方向の位置決め精度を高めるべく、できるかぎり離間して設けることが好ましい。ピンガイド部３２１とピン嵌入部３２との境界部は、連続、かつ、滑らかとなるようＲ状に形成される。 As shown in FIG. 3, the protruding portion 31 is provided on the placement portion 15 of the substrate container 10 in a positional relationship that forms a triangular apex. Further, as shown in FIG. 4, the concave portion 32 includes a pin guide portion 321 formed in a tapered shape that tapers toward the back side of the hole (upper side in FIG. 4), and from the back side of the hole of the pin guide portion 321. It is comprised by the pin insertion part (vertical hole part) 322 formed continuously and perpendicularly upwards. Here, the protrusions 31 are preferably arranged in a positional relationship that forms vertices of an equilateral triangle or an isosceles triangle. Moreover, it is preferable to provide each recessed part 32 as spaced apart as possible, in order to improve the positioning accuracy of the XY direction mentioned later. A boundary portion between the pin guide portion 321 and the pin insertion portion 32 is formed in an R shape so as to be continuous and smooth.

図３においては、突起部３１が全て検出パッドである場合を例に挙げたが、特にこれに限定するものではない。例えば、図６に示すように、載置部１５に、突起高さの異なる２種類の突起部３１，６３１を設けてもよい。突起高さは、例えば、突起部６３１よりも突起部３１の方が高く形成される。この場合、突起高さの高い突起部３１が載置面２０１に当接される垂直位置決め部となり、突起高さの低い突起部６３１が後述する在席検出部に対する被在席検出部となる。突起部６３１は、図５に示すように、突起部３１の近傍に少なくとも１つ（図５中では２つ図示）設けられる。 In FIG. 3, the case where all the protrusions 31 are detection pads has been described as an example, but the present invention is not particularly limited thereto. For example, as illustrated in FIG. 6, the mounting portion 15 may be provided with two types of protrusions 31 and 631 having different protrusion heights. For example, the protrusion 31 is formed higher than the protrusion 631. In this case, the protruding portion 31 with a high protrusion height becomes a vertical positioning portion that comes into contact with the placement surface 201, and the protruding portion 631 with a low protrusion height becomes an attended seat detection portion with respect to a seating detection portion described later. As shown in FIG. 5, at least one protrusion 631 is provided in the vicinity of the protrusion 31 (two are shown in FIG. 5).

（載置台）
この基板収容容器１０が載置される載置台２００は、その載置面２０１に、載置面２０１よりも上方に突出させて垂直上向きに設けられる位置決めピン４０が２つ、載置面２０１よりも上方に突出され、かつ、載置面２０１に没入自在なドグセンサ（在席検出部）４１が１つ設けられる。ドグセンサ４１の数は少なくとも１つあればよく、特に限定するものではないが、その上限数は突起部３１の数と同数とされる。 (Mounting table)
The mounting table 200 on which the substrate container 10 is mounted has two positioning pins 40 that are provided on the mounting surface 201 so as to protrude upward from the mounting surface 201 and are provided vertically upward. Also, one dog sensor (a seating detection unit) 41 that protrudes upward and can be freely immersed in the mounting surface 201 is provided. The number of dog sensors 41 may be at least one and is not particularly limited, but the upper limit number is the same as the number of protrusions 31.

この載置台２００と基板収容容器１０との位置決め構造は、位置決めピン４０と凹部３２との係合、および突起部３１の平坦面３１１と載置台２００の載置面２０１との当接、にて構成される。位置決めピン４０およびドグセンサ４１は、突起部３１および凹部３２と対向する位置に設けられる。 The positioning structure between the mounting table 200 and the substrate container 10 is based on the engagement between the positioning pin 40 and the recess 32 and the contact between the flat surface 311 of the protrusion 31 and the mounting surface 201 of the mounting table 200. Composed. The positioning pin 40 and the dog sensor 41 are provided at positions facing the protrusion 31 and the recess 32.

ここで、ピン嵌入部３２２および位置決めピン４０は、その最奥部に位置決めピン４０（後述）が完全に着座しないよう、十分な深さおよび長さに形成される。位置決めピン４０の長さに対してピン嵌入部３２２の深さが十分でないと、ピン嵌入部３２２の最奥部に位置決めピン４０が完全に着座して基板収容容器１０が宙に浮いて支持されてしまい、平坦面３１１と載置面２０１とを平面接触させることができなくなる。位置決めピン４０の先端は、ピンガイド部３２１のテーパ面に滑らかに倣うことができるよう、Ｒ状に形成される。 Here, the pin insertion portion 322 and the positioning pin 40 are formed with sufficient depth and length so that the positioning pin 40 (described later) is not completely seated at the innermost portion. If the depth of the pin insertion portion 322 is not sufficient with respect to the length of the positioning pin 40, the positioning pin 40 is completely seated in the innermost portion of the pin insertion portion 322, and the substrate container 10 is suspended and supported. As a result, the flat surface 311 and the mounting surface 201 cannot be brought into plane contact. The tip of the positioning pin 40 is formed in an R shape so that it can smoothly follow the tapered surface of the pin guide portion 321.

図４においては、在席検出部として、被在席検出部（突起部３１，６３１など）と直接接触するドグセンサ４１を例に挙げたが、特にこれに限定するものではない。例えば、図６に示すように、載置台２００の内部に、載置面２０１に臨んで垂直上向きに配置される非接触センサ（光電センサ、超音波センサ）６４０を設けてもよい。具体的に、光電センサの場合、光電センサ６４０の投光器（図示せず）からガラス窓６４１を介して光Ｌを投光し、被在席検出部にて検出、反射された光Ｌを受光器（図示せず）にて検出するようにしてもよい。 In FIG. 4, the dog sensor 41 that is in direct contact with the seated seat detection unit (such as the protrusions 31 and 631) is taken as an example of the seating detection unit, but the present invention is not particularly limited thereto. For example, as shown in FIG. 6, a non-contact sensor (photoelectric sensor, ultrasonic sensor) 640 that is disposed vertically upward facing the mounting surface 201 may be provided inside the mounting table 200. Specifically, in the case of a photoelectric sensor, light L is projected from a light projector (not shown) of the photoelectric sensor 640 through the glass window 641, and the light L detected and reflected by the seated seat detection unit is received by the light receiver. (Not shown) may be detected.

本実施の形態においては、基板収容容器としてＦＯＵＰを例に挙げて説明を行ったが、特にこれに限定するものではなく、基板を収容、輸送、保管するための容器であれば、ＦＯＳＢ、オープンカセットなどであってもよい。 In the present embodiment, the FOUP has been described as an example of the substrate container, but the present invention is not particularly limited to this, and a FOSB or open container may be used as long as it is a container for housing, transporting, and storing the substrate. It may be a cassette.

次に、本実施の形態に係る基板収容容器１０と載置台２００との位置決めメカニズムを説明する。
基板収容容器１０を載置台２００の所定の位置に載置すると、基板収容容器１０の各凹部３２におけるピンガイド部３２１に、載置台２００の位置決めピン４０がそれぞれ当接される。また、載置台２００の各ドグセンサ４１に、基板収容容器１０の突起部３１の平坦面３１１がそれぞれ当接される。 Next, a positioning mechanism between the substrate container 10 and the mounting table 200 according to the present embodiment will be described.
When the substrate storage container 10 is placed at a predetermined position on the mounting table 200, the positioning pins 40 of the mounting table 200 are brought into contact with the pin guide portions 321 in the respective recesses 32 of the substrate storage container 10. Further, the flat surface 311 of the protrusion 31 of the substrate container 10 is brought into contact with each dog sensor 41 of the mounting table 200.

その後、基板収容容器１０の自重によって、ピンガイド部３２１に当接された各位置決めピン４０は、ピンガイド部３２１のテーパ面に倣って滑りつつ、ピン嵌入部３２２にそれぞれ案内され、各ドグセンサ４１は、当接された各突起部３１の平坦面３１１にて押下され、載置面２０１に徐々に没入される。 Thereafter, each positioning pin 40 that is in contact with the pin guide portion 321 is guided by the pin insertion portion 322 while sliding along the taper surface of the pin guide portion 321 due to its own weight. Is pressed down on the flat surface 311 of each projecting portion 31 in contact therewith, and is gradually immersed in the mounting surface 201.

その後、各突起部３１の平坦面３１１が載置面２０１に着座、当接し、平面同士の面接触がなされる。これにより、載置台２００に対する基板収容容器１０のＺ方向（垂直方向）の位置決めがなされる。そして、この面接触のとき、すなわち、平坦面３１１にて各ドグセンサ４１が載置面２０１に完全に没入されたとき、図示しない検出・判断装置にて基板収容容器１０の在席検出がなされ、在席ＯＫと判断される。 Thereafter, the flat surface 311 of each protrusion 31 is seated and abutted on the mounting surface 201, and surface contact between the flat surfaces is made. Thereby, the positioning of the substrate container 10 with respect to the mounting table 200 in the Z direction (vertical direction) is performed. When this surface contact is made, that is, when each dog sensor 41 is completely immersed in the mounting surface 201 on the flat surface 311, the presence detection of the substrate container 10 is performed by a detection / judgment device (not shown), Judged to be present.

また、ピン嵌入部３２２に案内された各位置決めピン４０は、ピン嵌入部３２２に嵌り込み、各突起部３１の平坦面３１１が載置面２０１に着座、当接した時点で、その嵌入が停止される。このとき、位置決めピン４０の先端は、ピン嵌入部３２２の中途部に位置した状態で停止される。これにより、載置台２００に対する基板収容容器１０のＸ−Ｙ方向（水平方向）の位置決めがなされる。 Further, each positioning pin 40 guided by the pin insertion portion 322 is inserted into the pin insertion portion 322, and the insertion is stopped when the flat surface 311 of each projection portion 31 is seated and brought into contact with the mounting surface 201. Is done. At this time, the tip of the positioning pin 40 is stopped in a state where it is located in the middle of the pin insertion portion 322. Thereby, the substrate storage container 10 is positioned in the XY direction (horizontal direction) with respect to the mounting table 200.

図１６に示したように、従来の基板収容容器９０は、底面部９２が載置台１００の載置面１０１から完全に離れ、宙に浮いた状態で支持されていた。よって、基板収容容器９０のＺ方向の位置決めは、Ｖ溝９３と位置決めピン１０２の精度に左右されていた。 As shown in FIG. 16, the conventional substrate container 90 is supported in a state where the bottom surface portion 92 is completely separated from the mounting surface 101 of the mounting table 100 and floats in the air. Therefore, the positioning of the substrate container 90 in the Z direction depends on the accuracy of the V-groove 93 and the positioning pins 102.

しかしながら、位置決めピン１０２の加工精度を均一にすることは困難である。また、基板収容容器９０は、一般に、樹脂で射出成型されるが、樹脂成型品の成型精度にはバラツキがある。また、基板収容容器９０の使用に伴い、Ｖ溝９３の摩耗や、経年変化（縮み）などが生じる。以上の理由より、これらの部材の精度を高精度に保つことは、非常に困難である。その結果、容器の位置決め精度および在席検出精度を高精度に保つことも、困難であった。 However, it is difficult to make the processing accuracy of the positioning pin 102 uniform. The substrate container 90 is generally injection-molded with resin, but the molding accuracy of the resin molded product varies. Further, with use of the substrate container 90, wear of the V-groove 93, secular change (shrinkage), and the like occur. For these reasons, it is very difficult to keep the accuracy of these members high. As a result, it has been difficult to keep the container positioning accuracy and presence detection accuracy high.

一方、本実施形態の基板収容容器１０は、載置台２００の載置面２０１に、各突起部３１の平坦面３１１を直に平面接触させる。そして、これら載置面２０１および平坦面３１１は平面であるため、面の精度を出すことは、従来のＶ溝９３および位置決めピン１０２の精度を出すことに比べて容易である。よって、載置面２０１と平坦面３１１とを隙間なく容易に密接させることができる。そして、平坦面３１１と載置面２０１との平面接触は最も安定な三点接触であるため、基板収容容器１０は、載置面２０１に対して高い精度で水平載置（垂直位置決め）される。 On the other hand, in the substrate storage container 10 of the present embodiment, the flat surface 311 of each protrusion 31 is brought into flat contact with the mounting surface 201 of the mounting table 200. Since the mounting surface 201 and the flat surface 311 are flat surfaces, it is easier to obtain the surface accuracy than the conventional V-groove 93 and positioning pin 102. Therefore, the mounting surface 201 and the flat surface 311 can be easily brought into close contact with each other without a gap. Since the flat contact between the flat surface 311 and the mounting surface 201 is the most stable three-point contact, the substrate container 10 is horizontally mounted (vertically positioned) on the mounting surface 201 with high accuracy. .

また、平坦面３１１と載置面２０１との当接位置にドグセンサ４１を設けているので、平坦面３１１と載置面２０１とが平面接触したときに、ドグセンサ４１による基板収容容器１０の在席検出がなされ、このときに初めて在席ＯＫと判断される。載置面２０１および平坦面３１１の平面精度は高精度に加工することが容易であり、また、その平面精度の経年変化も少ないので、突起部３１とドグセンサ４１との間に隙間が生じるおそれは殆どなく、在席検出は従来と比較して確実、高精度になされる。よって、隙間がないときは在席ＯＫ、隙間があったときは在席ＮＧ（エラー）となり、在席検出は容易となる。 In addition, since the dog sensor 41 is provided at the contact position between the flat surface 311 and the mounting surface 201, when the flat surface 311 and the mounting surface 201 are in plane contact, the seating of the substrate container 10 by the dog sensor 41 is performed. Detection is made, and at this time, it is determined that the user is present for the first time. The plane accuracy of the mounting surface 201 and the flat surface 311 is easy to process with high accuracy, and since there is little secular change in the plane accuracy, there is a possibility that a gap may be generated between the protrusion 31 and the dog sensor 41. There is almost no detection of presence, which is more reliable and more accurate than in the past. Therefore, when there is no gap, the seating is OK, and when there is a gap, the seating is NG (error), and the presence detection is easy.

したがって、在席ＯＫと判断されたときは、基板収容容器１０は載置面２０１に確実に水平状態（全く傾いていない状態）で載置されていることになる。よって、在席ＯＫと判断された場合、その後、通常通り、ロボットハンドにて基板収容容器１０内に収容された基板Ｗを取りに行ったときに、ロボットハンドが基板にぶつかって、基板Ｗを破損させるおそれはない。 Therefore, when it is determined that the seating is OK, the substrate storage container 10 is surely placed on the placement surface 201 in a horizontal state (a state in which it is not inclined at all). Therefore, when it is determined that the user is present, the robot hand hits the substrate and picks up the substrate W when the substrate W stored in the substrate container 10 is picked up by the robot hand as usual. There is no risk of damage.

すなわち、本実施形態の基板収容容器１０の位置決め構造は、基板収容容器１０の載置部１５に、平坦面３１１を有する突起部３１と、漏斗状の凹部３２とを設け、基板収容容器１０と載置台２００との位置決めを、水平方向（Ｘ−Ｙ方向）の位置決めと垂直方向（Ｚ方向）の位置決めとに別々分けたことに特長がある。すなわち、水平方向の位置決め機構は凹部３２と位置決めピン４０とであり、垂直方向の位置決め機構は凸部３１と載置面２０１とであり、それぞれ別々の部材が担当する。特に、基板収容容器１０の垂直方向の位置決めは、平坦面３１１と載置面２０１との平面接触にてなされることから、従来と比較して、高い精度で垂直方向の位置決めが可能である。よって、基板収容容器１０は載置面２０１上に高い精度で水平載置されることから、垂直方向の位置決め機構が、水平方向の位置決め機構の位置決め精度に影響を及ぼす（精度を損なう作用を及ぼす）ことはなく、必然的に水平方向の位置決めも高い精度で行うことができる。 That is, the positioning structure of the substrate storage container 10 according to the present embodiment is provided with a protrusion 31 having a flat surface 311 and a funnel-shaped recess 32 on the mounting portion 15 of the substrate storage container 10. It is characterized in that the positioning with the mounting table 200 is divided into horizontal positioning (XY direction) and vertical positioning (Z direction). That is, the horizontal positioning mechanism is the concave portion 32 and the positioning pin 40, and the vertical positioning mechanism is the convex portion 31 and the placement surface 201, and each is in charge of a separate member. In particular, since the vertical positioning of the substrate container 10 is performed by planar contact between the flat surface 311 and the mounting surface 201, the vertical positioning can be performed with higher accuracy than in the past. Therefore, since the substrate container 10 is horizontally placed on the placement surface 201 with high accuracy, the vertical positioning mechanism affects the positioning accuracy of the horizontal positioning mechanism (acts to impair accuracy). Inevitably, horizontal positioning can be performed with high accuracy.

よって、本実施形態の基板収容容器１０の位置決め構造によれば、図１６に示した従来の基板収容容器９０の位置決め構造と比較して、容器の位置決め精度および在席検出精度が大幅に向上し、高価な基板Ｗの歩留まりが向上する。 Therefore, according to the positioning structure of the substrate container 10 of the present embodiment, the container positioning accuracy and presence detection accuracy are greatly improved as compared to the conventional positioning structure of the substrate container 90 shown in FIG. The yield of expensive substrates W is improved.

また、ピンガイド部３２１とピン嵌入部３２２との境界部は、連続、かつ、滑らかに形成しているため、位置決めピン４０が凹部３２の途中、例えば境界部に引っ掛かるおそれはない。位置決めピン４０は、垂直上向きに形成された垂直穴（ピン嵌入部３２２）に嵌入されるため、位置決めピン４０が傾いた状態で凹部３２に嵌り込むことはない。 Further, since the boundary portion between the pin guide portion 321 and the pin insertion portion 322 is formed continuously and smoothly, there is no possibility that the positioning pin 40 is caught in the middle of the concave portion 32, for example, the boundary portion. Since the positioning pin 40 is inserted into a vertical hole (pin insertion portion 322) formed vertically upward, the positioning pin 40 does not fit into the recess 32 in a tilted state.

また、水平方向の位置決めは、図４に示すように、丸穴（凹部３２）と丸ピン（位置決めピン４０）との限定するものではない。例えば、図７に示すように、一方の凹部３２を丸穴に、他方の凹部３２Ｂを長穴に形成してもよい。この場合、丸穴に形成された凹部３２を位置決めピン４０Ａの基準穴とし、長穴に形成された凹部３２Ｂを位置決めピン４０Ｂの回転拘束穴としてもよい。また、図８に示すように、両凹部３２を丸穴に形成し、一方の凹部３２に嵌入される位置決めピン４０Ｃを丸ピンに形成し、他方の凹部３２に嵌入される位置決めピン４０Ｄを、丸ピンの周面の少なくとも２箇所を切り落としてなる異形ピン（ダイヤモンドカットピン）に形成してもよい。このように凹部３２の一方を長穴にしたり、位置決めピン４０の一方を異形ピンにしたりすることで、基板収容容器１０の凹部３２の累積した公差とバラツキを許容することができ、確実、高精度に水平方向の位置決めを行うことができる。 Further, the horizontal positioning is not limited to the round hole (recess 32) and the round pin (positioning pin 40) as shown in FIG. For example, as shown in FIG. 7, one recess 32 may be formed in a round hole and the other recess 32B may be formed in a long hole. In this case, the recess 32 formed in the round hole may be used as the reference hole of the positioning pin 40A, and the recess 32B formed in the long hole may be used as the rotation restricting hole of the positioning pin 40B. Further, as shown in FIG. 8, both concave portions 32 are formed in round holes, positioning pins 40 </ b> C inserted into one concave portion 32 are formed into round pins, and positioning pins 40 </ b> D inserted into the other concave portion 32 are You may form in the deformed pin (diamond cut pin) which cuts off at least 2 places of the surrounding surface of a round pin. In this way, by making one of the concave portions 32 into a long hole or one of the positioning pins 40 into a deformed pin, the accumulated tolerance and variation of the concave portion 32 of the substrate container 10 can be tolerated. Positioning in the horizontal direction can be performed with high accuracy.

次に、本発明の変形例を添付図面に基づいて説明する。
（第１変形例）
図１に示した本実施形態の基板収容容器１０は、容器本体１１の底面に、直接、突起部３１および凹部３２を設け、載置部１５としたものであった。
これに対して、図２に示すように、容器本体１１の底面に基板収容容器１０を水平に支持するスタンド部２１を設け、そのスタンド部２１の底面２２に突起部３１および凹部３２を設け、第１変形例の基板収容容器としてもよい。 Next, a modification of the present invention will be described with reference to the accompanying drawings.
(First modification)
The substrate storage container 10 according to the present embodiment shown in FIG. 1 is provided with a protrusion 31 and a recess 32 directly on the bottom surface of the container main body 11 to form the mounting portion 15.
On the other hand, as shown in FIG. 2, a stand portion 21 that horizontally supports the substrate container 10 is provided on the bottom surface of the container body 11, and a protrusion 31 and a recess 32 are provided on the bottom surface 22 of the stand portion 21, It is good also as a substrate storage container of the 1st modification.

第１変形例の基板収容容器１０によれば、容器本体１１の底面形状、例えば載置面２０１に対して水平または非水平に関係なく、容器の載置部１５に突起部３１および凹部３２を設けることが可能となる。つまり、既存の基板収容容器であっても、その容器本体の底面に、突起部３１および凹部３２を備えたスタンド部２１を取り付けることで、本実施の形態に係る基板収容容器１０と同じ作用効果を得ることができる。 According to the substrate container 10 of the first modified example, the protruding portion 31 and the recessed portion 32 are provided on the mounting portion 15 of the container regardless of the shape of the bottom surface of the container body 11, for example, horizontal or non-horizontal with respect to the mounting surface 201. It can be provided. That is, even if it is an existing substrate storage container, the same effect as the substrate storage container 10 according to the present embodiment can be obtained by attaching the stand portion 21 including the protrusion 31 and the recess 32 to the bottom surface of the container main body. Can be obtained.

（第２変形例）
図３に示した本実施形態の基板収容容器１０は、容器本体１１の底面における左右２箇所（図３中では上下２箇所）に、凹部３２を設けたものであった。
これに対して、図９に示すように、容器本体１１の底面に、プライマリー（外側）の位置決め、すなわち各突起部３１の外側領域９Ａ１および凹部５３２ａ（図１０参照）と、セカンダリー（内側）の位置決め、すなわち各突起部３１の内側領域９Ａ２および凹部５３２ｂとを設け、第２変形例の基板収容容器としてもよい。 (Second modification)
The substrate storage container 10 of the present embodiment shown in FIG. 3 is provided with recesses 32 at two places on the left and right sides of the bottom surface of the container body 11 (upper and lower two places in FIG. 3).
On the other hand, as shown in FIG. 9, the primary (outside) positioning on the bottom surface of the container body 11, that is, the outer region 9 </ b> A <b> 1 of each projection 31 and the recess 532 a (see FIG. 10), and the secondary (inside) Positioning, that is, the inner region 9A2 of each projection 31 and the recess 532b may be provided to form a substrate container of the second modification.

第２変形例の基板収容容器１０によれば、プライマリー（外側）の位置決めを、主に、基板収容容器１０をロードポートやストッカなどの載置台に載置する際に標準的に使用することができ、セカンダリー（内側）の位置決めは、ストッカなどの載置台に載置されている基板収容容器１０を取り出すときに使用することができる。 According to the substrate container 10 of the second modification, the positioning of the primary (outside) can be used as a standard mainly when the substrate container 10 is placed on a placing table such as a load port or stocker. The positioning of the secondary (inner side) can be used when taking out the substrate storage container 10 placed on a placing table such as a stocker.

（第３変形例）
図３に示した本実施形態の基板収容容器１０は、容器本体１１の底面における突起部３１の外側に、凹部３２を設けたものであった。
これに対して、図１１に示すように、容器本体１１の底面における突起部３１の平坦面３１１に、換言すると突起部３１の内側に、それぞれ２つの凹部７３２ａ，７３２ｂを設け、第３変形例の基板収容容器としてもよい。そして、載置台２００の、残りの突起部３１ｃの位置と対向する位置に、在席検出センサ（図示せず）が設けられる。 (Third Modification)
The substrate storage container 10 of the present embodiment shown in FIG. 3 has a recess 32 provided outside the protrusion 31 on the bottom surface of the container body 11.
On the other hand, as shown in FIG. 11, two concave portions 732a and 732b are provided on the flat surface 311 of the protruding portion 31 on the bottom surface of the container body 11, in other words, on the inner side of the protruding portion 31, respectively. It is good also as a substrate storage container. A seating detection sensor (not shown) is provided at a position on the mounting table 200 that faces the position of the remaining protrusion 31c.

具体的には、図１１のXII−XII線断面図を図１２に示すように、突起部３１の平坦面３１１における周縁部が載置面２０１に当接され、平坦面３１１における中央部が凹部７３２ａに形成される。そして、この凹部７３２ａに位置決めピン８４０ａが嵌入される。 Specifically, as shown in FIG. 12, which is a cross-sectional view taken along line XII-XII of FIG. 11, the peripheral edge portion of the flat surface 311 of the protrusion 31 is brought into contact with the mounting surface 201, and the central portion of the flat surface 311 is a concave portion. 732a. And the positioning pin 840a is inserted in this recessed part 732a.

第３変形例の基板収容容器によれば、載置台２００の、突起部３１の位置と対向する位置に位置決めピン８４０ａおよび在席検出センサが設けられる。よって、基板収容容器の底面および載置台２００の載置面２０１においては、最低限、これらの部分だけの水平精度が出ていれば十分である。よって、基板収容容器の底面における面精度を出すための加工コストの低減、すなわち、基板収容容器の製造コストの低減を図ることができる。 According to the substrate container of the third modified example, the positioning pin 840a and the presence detection sensor are provided at a position of the mounting table 200 that faces the position of the protrusion 31. Therefore, it is sufficient that at least the horizontal accuracy of these portions is provided at the bottom surface of the substrate container and the mounting surface 201 of the mounting table 200. Therefore, it is possible to reduce the processing cost for obtaining surface accuracy at the bottom surface of the substrate container, that is, to reduce the manufacturing cost of the substrate container.

以上、本発明は、上述した実施の形態に限定されるものではなく、他にも種々のものが想定されることは言うまでもない。 As described above, the present invention is not limited to the above-described embodiment, and it goes without saying that various other things are assumed.

本発明の基板収容容器を、載置台に載置した状態を示す図である。It is a figure which shows the state which mounted the board | substrate storage container of this invention on the mounting base. 図１の変形例である。It is a modification of FIG. 図１の基板収容容器の底面図である。It is a bottom view of the substrate storage container of FIG. 図１の要部IVの拡大図である。It is an enlarged view of the principal part IV of FIG. 図３の変形例である。It is a modification of FIG. 図５のVI−VI線断面図である。FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5. 図４のVII−VII線断面図である。It is the VII-VII sectional view taken on the line of FIG. 図７の変形例である。It is a modification of FIG. 図３の他の変形例である。It is another modification of FIG. 図９のX−X線断面図である。FIG. 10 is a sectional view taken along line XX in FIG. 9. 図３の別の変形例である。It is another modification of FIG. 図１１のXII−XII線断面図である。It is the XII-XII sectional view taken on the line of FIG. 従来の基板収容容器の下部斜視図である。It is a lower perspective view of the conventional substrate storage container. 図１３の基板収容容器を、載置台に載置した状態を示す図である。It is a figure which shows the state which mounted the board | substrate storage container of FIG. 13 on the mounting base. 図１３の基板収容容器の底面図である。FIG. 14 is a bottom view of the substrate storage container of FIG. 13. 図１４の要部XVIの拡大図である。It is an enlarged view of the principal part XVI of FIG.

符号の説明Explanation of symbols

１０基板収容容器
１５載置部
３１突起部
３２凹部
２００載置台
２０１載置面
３１１平坦面
Ｗ基板

DESCRIPTION OF SYMBOLS 10 Substrate container 15 Placement part 31 Projection part 32 Recessed part 200 Placement table 201 Placement surface 311 Flat surface W board

Claims

載置台上に水平に載置、位置決めされ、その内部に基板が収容される容器であって、
前記基板収容容器の、前記載置台の載置面に載置される載置部に、先端が前記載置面と平行な平坦面に形成された突起部を少なくとも３つ設けると共に、漏斗状の凹部を少なくとも２つ設け、
前記各突起部の平坦面を前記載置面に当接させ、平面同士を面接触させるようにした
ことを特徴とする基板収容容器。 A container that is horizontally mounted and positioned on a mounting table and in which a substrate is accommodated,
The mounting portion of the substrate storage container, which is mounted on the mounting surface of the mounting table, is provided with at least three protrusions having a tip formed on a flat surface parallel to the mounting surface, and has a funnel shape. Providing at least two recesses,
A substrate container, wherein the flat surface of each protrusion is brought into contact with the mounting surface, and the flat surfaces are brought into surface contact with each other.

前記突起部は、前記基板収容容器の載置部に、平面上において三角形の頂点を形成する位置関係にて３つ設けられる
請求項１記載の基板収容容器。 2. The substrate container according to claim 1, wherein three protrusions are provided on the mounting portion of the substrate container in a positional relationship that forms a triangular apex on a plane.

前記平坦面の少なくとも１つが、容器在席検出のための被在席検出部である
請求項１記載の基板収容容器。 The substrate container according to claim 1, wherein at least one of the flat surfaces is a seated detection unit for detecting container seating.

前記被在席検出部を構成する前記平坦面は、その他の平坦面よりも突出高さを低く設けた
請求項３記載の基板収容容器。 The substrate storage container according to claim 3, wherein the flat surface constituting the presence seat detection unit is provided with a protruding height lower than other flat surfaces.

前記基板収容容器は、その本体の底に基板収容容器を水平に支持するスタンド部を有し、そのスタンド部の底部に前記突起部および前記凹部を設けた
請求項１記載の基板収容容器。 The substrate storage container according to claim 1, wherein the substrate storage container has a stand portion for horizontally supporting the substrate storage container at the bottom of the main body, and the protrusion and the recess are provided at the bottom of the stand portion.

前記突起部の平坦面の少なくとも２つに、前記凹部を設けた
請求項１記載の基板収容容器。 The substrate container according to claim 1, wherein the concave portions are provided in at least two of the flat surfaces of the protrusions.

請求項１から６いずれかに記載の基板収容容器と、その基板収容容器が載置される載置台とで構成され、前記基板収容容器を前記載置台上に水平に載置、位置決めする際の位置決め構造であって、
前記載置台に、載置面よりも上方に突出する位置決めピンを少なくとも２つ設けると共に、載置面に在席検出部を少なくとも１つ設け、
前記各突起部の平坦面を前記載置面に当接させ、前記載置台に対する前記基板収容容器の垂直方向の位置決めをし、
前記各凹部内に前記位置決めピンを嵌入させ、前記載置台に対する前記基板収容容器の水平方向の位置決めをし、
前記平坦面の少なくとも１つを前記在席検出部にて検出し、前記基板収容容器の在席を検出する、
ことを特徴とする基板収容容器の位置決め構造。 A substrate storage container according to any one of claims 1 to 6 and a mounting table on which the substrate storage container is placed, and when the substrate receiving container is horizontally placed and positioned on the mounting table. A positioning structure,
The mounting table is provided with at least two positioning pins that protrude upward from the mounting surface, and at least one presence detection unit is provided on the mounting surface.
The flat surface of each projection is brought into contact with the mounting surface, and the substrate container is vertically positioned with respect to the mounting table.
The positioning pins are inserted into the recesses, and the substrate container is positioned in the horizontal direction with respect to the mounting table.
Detecting at least one of the flat surfaces by the presence detector, and detecting the presence of the substrate container;
A positioning structure for a substrate container characterized by the above.

前記載置部に前記凹部を離間して２つ設けると共に、一方の凹部を丸穴に、他方の凹部を長穴に形成し、
丸穴に形成された前記凹部を一方の前記位置決めピンの基準穴とし、長穴に形成された前記凹部を他方の前記位置決めピンの回転拘束穴とした
請求項７記載の基板収容容器の位置決め構造。 While providing the said recessed part in the said mounting part 2 apart, forming one recessed part in a round hole and the other recessed part in a long hole,
8. The positioning structure for a substrate container according to claim 7, wherein the concave portion formed in the round hole is used as a reference hole for one positioning pin, and the concave portion formed in the elongated hole is used as a rotation restricting hole for the other positioning pin. .

前記載置部に前記凹部を離間して２つ設けると共に、両凹部を丸穴に形成し、
一方の前記凹部に嵌入される前記位置決めピンを丸ピンに形成し、他方の前記凹部に嵌入される前記位置決めピンを、丸ピンの周面の少なくとも２箇所を切り落としてなる異形ピンに形成した
請求項７記載の基板収容容器の位置決め構造。 While providing the said recessed part in the said mounting part 2 apart, forming both recessed parts in a round hole,
The positioning pin inserted into one of the recesses is formed as a round pin, and the positioning pin inserted into the other recess is formed into a deformed pin that is cut off at least two places on the peripheral surface of the round pin. Item 8. A positioning structure for a substrate container according to Item 7.

前記平坦面の少なくとも１つを、その他の平坦面よりも突出高さを低く設けて容器在席検出のための被在席検出部とし、
その少なくとも１つの被在席検出部を前記在席検出部にて検出する
請求項７記載の基板収容容器の位置決め構造。 At least one of the flat surfaces is provided as a seated seat detection unit for detecting container seating by providing a projecting height lower than the other flat surfaces,
8. The positioning structure for a substrate container according to claim 7, wherein the presence detection unit detects at least one presence detection unit.

前記在席検出部が、載置面よりも上方に突出され、かつ、載置面に没入自在なドグセンサである
請求項７記載の基板収容容器の位置決め構造。 8. The substrate receiving container positioning structure according to claim 7, wherein the presence detection unit is a dog sensor that protrudes upward from the placement surface and is immersible in the placement surface.

前記在席検出部が、前記載置台内部に設けられ、載置面に臨んで垂直上向きに配置される非接触センサである
請求項７記載の基板収容容器の位置決め構造。 8. The substrate receiving container positioning structure according to claim 7, wherein the presence detection unit is a non-contact sensor provided inside the mounting table and disposed vertically upward facing the mounting surface.