JP5085272B2 - 液体吐出ヘッド及び画像形成装置 - Google Patents
液体吐出ヘッド及び画像形成装置 Download PDFInfo
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Classifications
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/16—Production of nozzles
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- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
液体を吐出する複数のノズルを有するノズル部材と、各ノズルが連通する液室の少なくとも一部を形成する流路部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記ノズル部材と前記流路部材とが同じ金属を主成分とする金属材料で形成され、前記ノズル部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
構成とした。
液体を吐出する複数のノズルを有するノズル部材と、各ノズルが連通する液室の少なくとも一部を形成する流路部材と、複数の前記液室に液体を供給する共通流路と前記各液室との間に設けられる流体抵抗部を形成する流体抵抗部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記流体抵抗部材と前記流路部材とが同じ金属を主成分とする金属材料で形成され、前記流体抵抗部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
構成とした。
液体を吐出する複数のノズルが連通する液室の少なくとも一部を形成する流路部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記流路部材と一体に形成された前記流路部材よりも厚さの薄い薄層部材を有し、
前記流路部材と前記薄層部材とが同じ金属を主成分とする金属材料で形成され、
前記薄層部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
構成とした。
先ず、図2(a)に示すように、電鋳支持基板30上にノズル4に対応する位置にレジストパターン31を形成し、同図(b)に示すように、例えばNi電鋳を行うことによって、電鋳膜32が析出され、同図(c)に示すように、ノズル部材部分1Aの厚みに達したときに一旦電鋳を停止する。このとき、ノズル部材部分1Aは記録液体入り口から吐出側までがラウンド形状なるよう形成され、ラウンド形状にすることで液体吐出時の流体抵抗の低減が可能となる。
Ia(111):ノズル部材部分1A側の(111)面の回折ピーク強度
Ia(200):ノズル部材部分1A側の(200)面の回折ピーク強度
Ib(111):流路部材部分1B側の(111)面の回折ピーク強度
Ib(200):流路部材部分1B側の(200)面の回折ピーク強度
としたとき、ノズル部材部分1A側と流路部材部分1B側のピーク強度比が、Ia(111)/Ia(200)<Ib(111)/Ib(200)の関係あることが好ましい。
(1)微量金属の添加
例えば、Pb(鉛)、Mn(マンガン)、Tl(タリウム)、Bi(ビスマス)などの金属を電鋳液に100ppm程度添加する。このよう微量の金属を添加して作製した電鋳膜は、電鋳膜を加熱処理した場合に平均粒径の成長が抑えられるので、メッキ層(電鋳膜)毎に平均粒径を変えることができる。
(2)S,B、P、Cの添加
例えば、S(硫黄)、B(ホウ素)、P(リン)、C(炭素)などを電鋳液に1g/l程度添加する。これにより、形成される電鋳膜自体の平均粒径を微細化することができ、メッキ層(電鋳膜)毎に平均粒径を変えることができる。
この液体吐出ヘッドは、ノズル部材部分1Aと流路部材部分1Bを一体形成したノズル流路板1と、流体抵抗部材部分51Aと流路部材部分51Bを一体形成した流体抵抗流路板51と、流体抵抗流路板51の下面に接合した振動板3とを有している。
1A…ノズル部材部分
1B…流路部材部分
3…振動板
4…ノズル
6…液室
12…圧電素子
51…流体抵抗流路板
51A…流体抵抗部材部分
51B…流路部材部分
107k、107c、107m、107y…記録ヘッド(液体吐出ヘッド)
Claims (13)
- 液体を吐出する複数のノズルを有するノズル部材と、各ノズルが連通する液室の少なくとも一部を形成する流路部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記ノズル部材と前記流路部材とが同じ金属を主成分とする金属材料で形成され、前記ノズル部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
ことを特徴とする液体吐出ヘッド。 - 請求項1に記載の液体吐出ヘッドにおいて、前記ノズル部材及び流路部材が電析で形成された部材であることを特徴とする液体吐出ヘッド。
- 請求項1又は2に記載の液体吐出ヘッドにおいて、前記ノズル部材及び流路部材が一体形成された部材であることを特徴とする液体吐出ヘッド。
- 請求項3に記載の液体吐出ヘッドにおいて、前記流路部材のノズル部材側との界面側に、前記流路部材の内部領域よりも結晶粒の平均粒径が小さい領域があることを特徴とする液体吐出ヘッド。
- 請求項4に記載の液体吐出ヘッドにおいて、前記結晶粒の平均粒径の小さい領域は前記流路部材のノズル部材側の界面から0.1μm〜5μmの範囲内であることを特徴とする液体吐出ヘッド。
- 請求項4又は5に記載の液体吐出ヘッドにおいて、前記流路部材のノズル部材側との界面側に結晶粒の平均粒径が前記ノズル部材側との界面から離れるに従って漸次又は段階的に大きく変化する領域があることを特徴とする液体吐出ヘッド。
- 請求項1ないし6のいずれかに記載の液体吐出ヘッドにおいて、前記金属材料がニッケルであることを特徴とする液体吐出ヘッド。
- 請求項7に記載の液体吐出ヘッドにおいて、前記ニッケルのX線回折スペクトルが、少なくともNi(111)面の回折ピークとNi(200)面の回折ピークを有することを特徴とする液体吐出ヘッド。
- 請求項8に記載の液体吐出ヘッドにおいて、
Ia(111):ノズル部材側の(111)面の回折ピーク強度
Ia(200):ノズル部材側の(200)面の回折ピーク強度
Ib(111):流路部材側の(111)面の回折ピーク強度
Ib(200):流路部材側の(200)面の回折ピーク強度
としたとき、
前記ノズル部材側と流路部材側のピーク強度比が、Ia(111)/Ia(200)<Ib(111)/Ib(200)の関係にある
ことを特徴とする液体吐出ヘッド。 - 請求項1ないし9のいずれかに記載の液体吐出ヘッドにおいて、前記ノズル部材の吐出面側表面には撥水処理層が形成されていることを特徴とする液体吐出ヘッド。
- 液体を吐出する複数のノズルを有するノズル部材と、各ノズルが連通する液室の少なくとも一部を形成する流路部材と、複数の前記液室に液体を供給する共通流路と前記各液室との間に設けられる流体抵抗部を形成する流体抵抗部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記流体抵抗部材と前記流路部材とが同じ金属を主成分とする金属材料で形成され、前記流体抵抗部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
ことを特徴とする液体吐出ヘッド。 - 液体を吐出する複数のノズルが連通する液室の少なくとも一部を形成する流路部材と、前記液室内の液体を加圧するエネルギーを発生する圧力発生手段を備える液体吐出ヘッドにおいて、
前記流路部材と一体に形成された前記流路部材よりも厚さの薄い薄層部材を有し、
前記流路部材と前記薄層部材とが同じ金属を主成分とする金属材料で形成され、
前記薄層部材を形成する金属材料の結晶粒の平均粒径が前記流路部材を形成する金属材料の結晶粒の平均粒径よりも小さい
ことを特徴とする液体吐出ヘッド。 - 液体吐出ヘッドから液滴を吐出させて画像を形成する画像形成装置において、請求項1ないし12のいずれかに記載の液体吐出ヘッドを備えていることを特徴とする画像形成装置。
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JP2007279722A JP5085272B2 (ja) | 2007-02-09 | 2007-10-27 | 液体吐出ヘッド及び画像形成装置 |
CN2008800001350A CN101541540B (zh) | 2007-02-09 | 2008-02-04 | 液体喷头和图像形成设备 |
PCT/JP2008/052204 WO2008096883A1 (en) | 2007-02-09 | 2008-02-04 | Liquid jet head and image forming apparatus |
EP08711082A EP2038122A4 (en) | 2007-02-09 | 2008-02-04 | LIQUID JET HEAD AND IMAGE FORMING APPARATUS |
US12/294,559 US8141983B2 (en) | 2007-02-09 | 2008-02-04 | Liquid jet head and image forming apparatus |
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US8393716B2 (en) * | 2009-09-07 | 2013-03-12 | Ricoh Company, Ltd. | Liquid ejection head including flow channel plate formed with pressure generating chamber, method of manufacturing such liquid ejection head, and image forming apparatus including such liquid ejection head |
US8499453B2 (en) * | 2009-11-26 | 2013-08-06 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head, and method of manufacturing discharge port member |
JP2018160536A (ja) * | 2017-03-22 | 2018-10-11 | 株式会社東芝 | 金属パターンの形成方法 |
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US4972204A (en) * | 1989-08-21 | 1990-11-20 | Eastman Kodak Company | Laminate, electroformed ink jet orifice plate construction |
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JPH09300635A (ja) | 1996-05-13 | 1997-11-25 | Ricoh Co Ltd | インクジェット記録装置 |
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US20030143492A1 (en) | 2002-01-31 | 2003-07-31 | Scitex Digital Printing, Inc. | Mandrel with controlled release layer for multi-layer electroformed ink jet orifice plates |
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JP2008213460A (ja) | 2008-09-18 |
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WO2008096883A1 (en) | 2008-08-14 |
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