JP5079851B2 - 有機発光表示装置の製造方法 - Google Patents
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- JP5079851B2 JP5079851B2 JP2010153805A JP2010153805A JP5079851B2 JP 5079851 B2 JP5079851 B2 JP 5079851B2 JP 2010153805 A JP2010153805 A JP 2010153805A JP 2010153805 A JP2010153805 A JP 2010153805A JP 5079851 B2 JP5079851 B2 JP 5079851B2
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- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/22—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
20 パッシベーション層
30 薄膜トランジスタ
31 活性層
32 第1絶縁層
33 ゲート電極
34 第2絶縁層
35 ソースドレイン電極
40 有機発光素子
41 画素電極
42 有機発光層
43 対向電極
51 画素定義膜
52 スペーサ
Claims (4)
- 画素電極上に有機絶縁物質層を形成する段階と、
光遮断部、半透過部及び光透過部を有するハーフトーンマスクを準備する段階と、
前記ハーフトーンマスクを前記有機絶縁物質層上に設け、前記光透過部領域に前記画素電極が、前記半透過部領域に前記画素電極を取り囲む画素定義膜が、前記光遮断部領域に前記画素定義膜上に突出するスペーサが、各々対応するように露光させる段階と、
前記露光された有機絶縁物質層をエッチングし、前記画素電極上の画素領域を前記画素定義膜と前記スペーサとが取り囲む構造からなる段階と、を含み、
前記光遮断部の光透過率は0%、前記半透過部の光透過率は40〜70%、前記光透過部の光透過率は100%であり、
前記露光段階は、光の焦点が露光面に合わないように調整するデフォーカシングで進めることを特徴とする有機発光表示装置の製造方法。 - 前記デフォーカシングは、前記光の焦点が露光面から10〜15μm離れて収束させることを特徴とする請求項1に記載の有機発光表示装置の製造方法。
- 前記画素定義膜の前記画素領域に向かうテーパ角度は15〜30°の範囲に形成されることを特徴とする請求項1に記載の有機発光表示装置の製造方法。
- 前記画素定義膜の厚さは4000Å以下に形成されることを特徴とする請求項1に記載の有機発光表示装置の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100013846A KR101084193B1 (ko) | 2010-02-16 | 2010-02-16 | 유기 발광 표시 장치 및 그 제조방법 |
KR10-2010-0013846 | 2010-02-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011171268A JP2011171268A (ja) | 2011-09-01 |
JP5079851B2 true JP5079851B2 (ja) | 2012-11-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010153805A Active JP5079851B2 (ja) | 2010-02-16 | 2010-07-06 | 有機発光表示装置の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8835205B2 (ja) |
JP (1) | JP5079851B2 (ja) |
KR (1) | KR101084193B1 (ja) |
CN (1) | CN102163617B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10084279B3 (de) | 1999-12-24 | 2013-04-25 | Takamisawa Electric Co. Ltd. | Verfahren zur Herstellung eines Wechselrelais |
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JP6083122B2 (ja) * | 2012-03-27 | 2017-02-22 | 凸版印刷株式会社 | 有機エレクトロルミネッセンス素子及びその製造方法 |
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US20150206927A1 (en) * | 2012-06-20 | 2015-07-23 | Pioneer Corporation | Organic electroluminescent device |
KR101955621B1 (ko) * | 2012-09-21 | 2019-05-31 | 삼성디스플레이 주식회사 | 유기발광 표시패널 및 그 제조방법 |
KR20140058745A (ko) | 2012-11-05 | 2014-05-15 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
KR20140070142A (ko) | 2012-11-30 | 2014-06-10 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
KR102030799B1 (ko) * | 2013-03-11 | 2019-10-11 | 삼성디스플레이 주식회사 | 유기발광표시장치 |
KR102054850B1 (ko) | 2013-05-30 | 2019-12-12 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 이의 제조 방법 |
KR102080008B1 (ko) | 2013-07-12 | 2020-02-24 | 삼성디스플레이 주식회사 | 유기발광표시장치 및 그 제조방법 |
CN103715140B (zh) * | 2013-10-12 | 2016-03-16 | 深圳市华星光电技术有限公司 | 一种避免oled显示设备中金属线路短路的方法 |
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KR102260991B1 (ko) * | 2014-02-14 | 2021-06-07 | 삼성디스플레이 주식회사 | 표시 패널 및 이의 제조 방법 |
JP6371094B2 (ja) | 2014-03-31 | 2018-08-08 | 株式会社ジャパンディスプレイ | 有機el表示装置 |
KR101664007B1 (ko) | 2014-12-31 | 2016-10-11 | 엘지디스플레이 주식회사 | 유기발광표시장치 및 그 제조방법 |
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CN104716024A (zh) * | 2015-03-04 | 2015-06-17 | 山东大学 | 一种提升薄膜半导体晶体管电学性能的方法 |
KR102430819B1 (ko) | 2015-08-19 | 2022-08-10 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
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-
2010
- 2010-02-16 KR KR1020100013846A patent/KR101084193B1/ko active IP Right Grant
- 2010-07-06 JP JP2010153805A patent/JP5079851B2/ja active Active
-
2011
- 2011-02-07 US US13/022,530 patent/US8835205B2/en active Active
- 2011-02-15 CN CN201110039435.3A patent/CN102163617B/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10084279B3 (de) | 1999-12-24 | 2013-04-25 | Takamisawa Electric Co. Ltd. | Verfahren zur Herstellung eines Wechselrelais |
Also Published As
Publication number | Publication date |
---|---|
KR101084193B1 (ko) | 2011-11-17 |
US8835205B2 (en) | 2014-09-16 |
CN102163617B (zh) | 2015-06-17 |
KR20110094460A (ko) | 2011-08-24 |
CN102163617A (zh) | 2011-08-24 |
JP2011171268A (ja) | 2011-09-01 |
US20110198596A1 (en) | 2011-08-18 |
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