JP5077843B2 - 成型用微細金型の製造方法 - Google Patents
成型用微細金型の製造方法 Download PDFInfo
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- JP5077843B2 JP5077843B2 JP2007224892A JP2007224892A JP5077843B2 JP 5077843 B2 JP5077843 B2 JP 5077843B2 JP 2007224892 A JP2007224892 A JP 2007224892A JP 2007224892 A JP2007224892 A JP 2007224892A JP 5077843 B2 JP5077843 B2 JP 5077843B2
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- mold
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- fine
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- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000465 moulding Methods 0.000 title description 6
- 238000000034 method Methods 0.000 claims description 22
- 238000007747 plating Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 239000011159 matrix material Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- 229920002379 silicone rubber Polymers 0.000 claims description 11
- 239000004945 silicone rubber Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 229920001971 elastomer Polymers 0.000 claims description 10
- 239000000806 elastomer Substances 0.000 claims description 10
- 238000009713 electroplating Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000013536 elastomeric material Substances 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
Description
即ち、本発明は、
電気めっき法による平板状の微細金型の製造方法であって、
導電性基板に感光性ドライフィルムを被膜する工程、
前記感光性ドライフィルムに露光及び現像を施し、レジストによる所望の凸型パターンを基板表面に形成して、レジスト型を作製する工程、
前記レジスト型にエラストマー材料を流し込み、前記凸パターンの反転パターンを形成して母型を作製する工程、
前記母型をレジスト型から剥離する工程、
前記母型表面に電極膜を形成する工程、
当該電極膜を形成された母型に、金属の電解めっきを行い、めっき皮膜を形成する工程、
前記めっき皮膜を母型から剥離する工程、
からなることを特徴とする、微細金型の製造方法、及び
前記エラストマー材料からなる母型の厚さが0.5〜10.0mmの範囲であることを特徴とする前記微細金型の製造方法及び、
前記エラストマー材料が、硬化性シリコーンゴムからなることを特徴とする前記微細金型の製造方法、
である。
2.感光性レジスト層
3.露光マスク
4.透光板
5.遮光膜
6.レジスト型
7.エラストマー材料層
8.電極膜
9.めっき母型
10.微細金型
2a.硬化した感光性レジストによるパターン
3a.遮光膜に覆われていない部分
Claims (3)
- 電気めっき法による平板状の微細金型の製造方法であって、
導電性基板に感光性ドライフィルムを被膜する工程、
前記感光性ドライフィルムに露光及び現像を施し、レジストによる所望の凸型パターンを基板表面に形成して、レジスト型を作製する工程、
前記レジスト型にエラストマー材料を流し込み、前記凸パターンの反転パターンを形成して母型を作製する工程、
前記母型をレジスト型から剥離する工程、
前記母型表面に電極膜を形成する工程、
当該電極膜を形成された母型に、金属の電解めっきを行い、めっき皮膜を形成する工程、
前記めっき皮膜を母型から剥離する工程、
からなることを特徴とする、微細金型の製造方法。 - 前記エラストマー材料からなる母型の厚さが0.5〜10.0mmの範囲であることを特徴とする請求項1記載の微細金型の製造方法。
- 前記エラストマー材料が、硬化性シリコーンゴムからなることを特徴とする請求項1〜2記載の微細金型の製造方法。
Priority Applications (1)
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JP2007224892A JP5077843B2 (ja) | 2007-08-30 | 2007-08-30 | 成型用微細金型の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007224892A JP5077843B2 (ja) | 2007-08-30 | 2007-08-30 | 成型用微細金型の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009056659A JP2009056659A (ja) | 2009-03-19 |
JP5077843B2 true JP5077843B2 (ja) | 2012-11-21 |
Family
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JP2007224892A Active JP5077843B2 (ja) | 2007-08-30 | 2007-08-30 | 成型用微細金型の製造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111633881A (zh) * | 2020-05-29 | 2020-09-08 | 中南大学 | 基于注射成型的光栅结构色功能表面的制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5680410A (en) * | 1979-12-07 | 1981-07-01 | Toppan Printing Co Ltd | Manufacture of embossed plate |
JPH06122124A (ja) * | 1992-10-12 | 1994-05-06 | Konan Tokushu Sangyo Kk | 木肌模様成形用ロールの製造方法 |
JPH07113193A (ja) * | 1993-10-15 | 1995-05-02 | Olympus Optical Co Ltd | 回折格子成形用金型の製造方法 |
US6159398A (en) * | 1998-03-31 | 2000-12-12 | Physical Optics Corporation | Method of making replicas while preserving master |
JP2005288933A (ja) * | 2004-04-01 | 2005-10-20 | Three M Innovative Properties Co | 可とう性成形型及びその製造方法 |
JP5070563B2 (ja) * | 2005-06-02 | 2012-11-14 | 株式会社プロセス・ラボ・ミクロン | 微細成型用金型の製造方法及び微細金型 |
JP4915134B2 (ja) * | 2006-04-26 | 2012-04-11 | 凸版印刷株式会社 | 凹凸パターンを有する金型の製造方法 |
-
2007
- 2007-08-30 JP JP2007224892A patent/JP5077843B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111633881A (zh) * | 2020-05-29 | 2020-09-08 | 中南大学 | 基于注射成型的光栅结构色功能表面的制备方法 |
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JP2009056659A (ja) | 2009-03-19 |
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