JP5074477B2 - 光導波路デバイス - Google Patents
光導波路デバイス Download PDFInfo
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- JP5074477B2 JP5074477B2 JP2009268814A JP2009268814A JP5074477B2 JP 5074477 B2 JP5074477 B2 JP 5074477B2 JP 2009268814 A JP2009268814 A JP 2009268814A JP 2009268814 A JP2009268814 A JP 2009268814A JP 5074477 B2 JP5074477 B2 JP 5074477B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
- G02B6/243—Light guide terminations as light absorbers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2552—Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12126—Light absorber
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12142—Modulator
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Description
上記のように、断熱遷移構造をとることにより、テーパ部からの放射光を発生しないようにすることができるが、テーパ角αが臨界角以上であってもテーパ部からの放射光による遮光材の損傷が問題ないレベルであれば、実用上は問題ない。
図12は、断熱遷移となるテーパ形状に(α=0.3度)、終端構造の端部付近のクラッドを拡げた構成を採用した実施例の一例である。
102 光ファイバアレイ
104−1〜N VOA
106−1〜N 光カプラ
108 PD
110 AWG
112 光ファイバ
120 基板
130 基板
202−1〜N MZI
204−1〜N MZI
206a メインポート
206b タップポート
208−1〜N ダミーポート
210−1〜N 終端構造
702 入射光
704 終点
706 反射光
710 終端構造
712 終端構造
714 構造
802 光導波路
804 光導波路
810 終端構造
812 終端構造
820 終端構造
822 光導波路
830 終端構造
832 光導波路
834 拡げたクラッド部分
840 終端構造
842 光導波路
850 終端構造
852 光導波路
900a,900b 導波路型デバイス
902 VOA
904 WINC
906 ダミーポート
908a,908b 終端構造
920a,920b 基板
930 基板
1102 VOA
1104 WINC
1106 ダミーポート
1108 終端構造
1110 ダミーポート
1112 終端構造
1120 基板
1130 基板
1200 1×8スプリッタ
1202 光導波路
1204 終端構造
1302 AWG
1304 終端構造
1400 モジュール
1402 光カプラ
1404 波長合分波フィルタ
1406 波長合分波フィルタ
1408−1〜N 光スイッチ
1410−1〜N VOA
1412−1〜N 光カプラ
1414−1〜N PD
1416 波長合分波フィルタ
1420 基板
1430 基板
1500 VOA
1502a,1502b ポート
1504 方向性結合器
1506a,1506b アーム導波路
1508 方向性結合器
1510a,1510b ポート
1512a,1512b 薄膜ヒータ
1514 断熱溝
1516 電極パッド
1518 電極パッド
1520 シリコン基板
1522 クラッド
1524 コア
1602 VOA
1604 光カプラ
1606 基板
1608 基板
1610 光導波路
Claims (7)
- 導波路型デバイスであって、
導波路端部からの光を終端するために遮光材が充填された終端構造を備え、
前記終端構造は、前記導波路端部からの光に対する入射角が傾くように構成され、
前記導波路端部は、終端に向かって導波路幅が狭くなるテーパ部を有し、
前記終端構造は、前記導波路端部を囲い、前記テーパ部に近接または接して配置され、前記終端構造によって挟まれた部分の幅を前記導波路端部の終端に対向する面において拡げることを特徴とする導波路型デバイス。 - 請求項1に記載の導波路型デバイスであって、
前記テーパ部のテーパ角は、略、断熱遷移となる臨界角以下であることを特徴とする導波路型デバイス。 - 導波路型デバイスであって、
導波路端部からの光を終端するために遮光材が充填された終端構造を備え、
前記終端構造は、前記導波路端部からの光に対する入射角が傾くように構成され、
前記導波路端部は、終端に向かって導波路幅が狭くなるテーパ部を有し、
前記終端構造は、前記導波路端部を囲い、前記テーパ部に近接または接して配置され、
前記テーパ部のテーパ角は、略、断熱遷移となる臨界角以下であることを特徴とする導波路型デバイス。 - 請求項1から3に記載の導波路型デバイスであって、前記入射角は、略、ブリュースタ角以上であることを特徴とする導波路型デバイス。
- 請求項1から4のいずれかに記載の導波路型デバイスであって、前記遮光材は、前記導波路端部からの光を吸収または散乱する材料からなることを特徴とする導波路型デバイス。
- 請求項1から5のいずれかに記載の導波路型デバイスであって、マッハツェンダ型の光スイッチ、可変減衰器、光スプリッタ、およびアレイ導波路回折格子の少なくともいずれか1つを含むことを特徴とする導波路型デバイス。
- 請求項1から6のいずれかに記載の導波路型デバイスを用いてマルチチップ集積化したモジュール。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009268814A JP5074477B2 (ja) | 2009-11-26 | 2009-11-26 | 光導波路デバイス |
CN201080053387.7A CN102667556B (zh) | 2009-11-26 | 2010-11-26 | 光波导器件以及模块 |
CN201410697531.0A CN104345392B (zh) | 2009-11-26 | 2010-11-26 | 光波导器件以及模块 |
PCT/JP2010/006913 WO2011065014A1 (ja) | 2009-11-26 | 2010-11-26 | 光導波路デバイスおよびモジュール |
US13/511,118 US9020307B2 (en) | 2009-11-26 | 2010-11-26 | Optical waveguide device and module |
US14/669,348 US9684129B2 (en) | 2009-11-26 | 2015-03-26 | Optical waveguide device and module |
US15/416,853 US10126502B2 (en) | 2009-11-26 | 2017-01-26 | Optical waveguide device and module |
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Application Number | Priority Date | Filing Date | Title |
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JP2009268814A JP5074477B2 (ja) | 2009-11-26 | 2009-11-26 | 光導波路デバイス |
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Publication Number | Publication Date |
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JP2011112844A JP2011112844A (ja) | 2011-06-09 |
JP5074477B2 true JP5074477B2 (ja) | 2012-11-14 |
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US (3) | US9020307B2 (ja) |
JP (1) | JP5074477B2 (ja) |
CN (2) | CN102667556B (ja) |
WO (1) | WO2011065014A1 (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5497996B2 (ja) * | 2008-05-26 | 2014-05-21 | 日本電信電話株式会社 | 導波路型デバイスにおける導波路終端方法 |
JP5270998B2 (ja) * | 2008-07-30 | 2013-08-21 | Nttエレクトロニクス株式会社 | 平面光導波回路 |
JP6207398B2 (ja) * | 2011-01-28 | 2017-10-04 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 形状検知光ファイバの先端反射低減 |
WO2013063410A1 (en) * | 2011-10-28 | 2013-05-02 | Hoya Corporation Usa | Optical waveguide splitter on a waveguide substrate for attenuating a light source |
US10191213B2 (en) | 2014-01-09 | 2019-01-29 | Globalfoundries Inc. | Shielding structures between optical waveguides |
US10248002B2 (en) * | 2015-03-30 | 2019-04-02 | Nec Corporation | Optical circuit, and optical switch using same |
WO2017031072A1 (en) * | 2015-08-14 | 2017-02-23 | Skorpios Technologies, Inc. | Broadband high-speed wavelength-division multiplexed receiver using multiple photodetectors per channel |
US9496921B1 (en) * | 2015-09-09 | 2016-11-15 | Cpg Technologies | Hybrid guided surface wave communication |
US10110306B2 (en) | 2015-12-13 | 2018-10-23 | GenXComm, Inc. | Interference cancellation methods and apparatus |
US9941957B2 (en) | 2016-01-07 | 2018-04-10 | Luxtera, Inc. | Method and system for connectionless integrated optical receiver and transmitter test |
JP6623102B2 (ja) * | 2016-03-31 | 2019-12-18 | 古河電気工業株式会社 | 光導波回路装置 |
US10257746B2 (en) | 2016-07-16 | 2019-04-09 | GenXComm, Inc. | Interference cancellation methods and apparatus |
WO2018047683A1 (ja) * | 2016-09-06 | 2018-03-15 | 旭硝子株式会社 | 樹脂光導波路及び複合光導波路 |
WO2018216249A1 (ja) * | 2017-05-26 | 2018-11-29 | 三菱電機株式会社 | 多モード干渉型合分波器、および、これを用いた光学素子 |
US10598878B2 (en) * | 2018-01-12 | 2020-03-24 | Rain Tree Photonics Pte. Ltd. | Scavenging photodetection device |
EP3561561B1 (en) * | 2018-04-26 | 2022-04-13 | Huawei Technologies Co., Ltd. | Optical splitter including a trident structure |
CN111352187B (zh) * | 2018-12-21 | 2022-05-20 | 中兴光电子技术有限公司 | 一种波导终结器、光通信器件及光终结的方法 |
US11150409B2 (en) | 2018-12-27 | 2021-10-19 | GenXComm, Inc. | Saw assisted facet etch dicing |
US10527793B1 (en) * | 2019-01-24 | 2020-01-07 | Elenion Technologies, Llc | Dump terminator |
WO2020181938A1 (zh) * | 2019-03-14 | 2020-09-17 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
JP7436881B2 (ja) * | 2019-07-09 | 2024-02-22 | 日本電信電話株式会社 | 光合波回路 |
US10727945B1 (en) | 2019-07-15 | 2020-07-28 | GenXComm, Inc. | Efficiently combining multiple taps of an optical filter |
KR20210018726A (ko) * | 2019-08-09 | 2021-02-18 | 한국전자통신연구원 | 코히어런트 광수신기 및 그의 제조 방법 |
US11215755B2 (en) | 2019-09-19 | 2022-01-04 | GenXComm, Inc. | Low loss, polarization-independent, large bandwidth mode converter for edge coupling |
US11539394B2 (en) | 2019-10-29 | 2022-12-27 | GenXComm, Inc. | Self-interference mitigation in in-band full-duplex communication systems |
US11371843B2 (en) * | 2020-07-02 | 2022-06-28 | Anello Photonics, Inc. | Integration of photonics optical gyroscopes with micro-electro-mechanical sensors |
US11796737B2 (en) | 2020-08-10 | 2023-10-24 | GenXComm, Inc. | Co-manufacturing of silicon-on-insulator waveguides and silicon nitride waveguides for hybrid photonic integrated circuits |
US12001065B1 (en) | 2020-11-12 | 2024-06-04 | ORCA Computing Limited | Photonics package with tunable liquid crystal lens |
CN114578481B (zh) * | 2020-11-28 | 2023-07-07 | 华为技术有限公司 | 一种模斑转换装置及相关方法 |
CN113740979A (zh) * | 2021-08-17 | 2021-12-03 | 武汉光迅科技股份有限公司 | 光器件及光模块 |
CA3234722A1 (en) | 2021-10-25 | 2023-05-04 | Farzad Mokhtari-Koushyar | Hybrid photonic integrated circuits for ultra-low phase noise signal generators |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04211209A (ja) * | 1990-03-07 | 1992-08-03 | Toshiba Corp | 集積化光半導体素子 |
JPH04361030A (ja) | 1991-06-07 | 1992-12-14 | Toyoda Gosei Co Ltd | ガラスランの製造方法 |
US6480639B2 (en) * | 1997-09-26 | 2002-11-12 | Nippon Telegraph And Telephone Corp. | Optical module |
JP2001330746A (ja) * | 2000-03-13 | 2001-11-30 | Matsushita Electric Ind Co Ltd | 光モジュールおよびその製造方法、ならびに光回路装置 |
US20010053260A1 (en) * | 2000-03-13 | 2001-12-20 | Toshiyuki Takizawa | Optical module and method for producing the same, and optical circuit device |
JP3988863B2 (ja) * | 2002-03-15 | 2007-10-10 | 日本電信電話株式会社 | アレイ導波路格子型波長合分波器を含む集積光回路 |
JP3755762B2 (ja) | 2002-07-05 | 2006-03-15 | 日本電信電話株式会社 | 光分岐挿入スイッチ及び光分岐挿入スイッチの出力光強度調整方法 |
WO2005057253A2 (en) * | 2003-12-04 | 2005-06-23 | Sioptical, Inc. | Planar waveguide optical isolator in thin silicon-on-isolator (soi) structure |
JP4361030B2 (ja) * | 2005-02-25 | 2009-11-11 | 日本電信電話株式会社 | モードスプリッタおよび光回路 |
CN200968996Y (zh) * | 2006-08-09 | 2007-10-31 | 陈谷红 | 多信道可调光衰减器 |
CN101311759A (zh) | 2007-05-25 | 2008-11-26 | Jds尤尼弗思公司 | 绝热波导过渡 |
US7974504B2 (en) * | 2008-03-28 | 2011-07-05 | Infinera Corporation | Reflection suppression in a photonic integrated circuit |
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