JP5056528B2 - 絶縁体セラミック組成物およびそれを用いた絶縁体セラミック - Google Patents
絶縁体セラミック組成物およびそれを用いた絶縁体セラミック Download PDFInfo
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- JP5056528B2 JP5056528B2 JP2008080989A JP2008080989A JP5056528B2 JP 5056528 B2 JP5056528 B2 JP 5056528B2 JP 2008080989 A JP2008080989 A JP 2008080989A JP 2008080989 A JP2008080989 A JP 2008080989A JP 5056528 B2 JP5056528 B2 JP 5056528B2
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- ceramic
- insulator
- glass powder
- green sheet
- powder
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- 239000000919 ceramic Substances 0.000 title claims description 361
- 239000012212 insulator Substances 0.000 title claims description 105
- 239000000203 mixture Substances 0.000 title claims description 78
- 239000000843 powder Substances 0.000 claims description 111
- 239000011521 glass Substances 0.000 claims description 81
- 239000000758 substrate Substances 0.000 claims description 60
- 238000010304 firing Methods 0.000 claims description 32
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 32
- 239000004020 conductor Substances 0.000 claims description 26
- 239000000395 magnesium oxide Substances 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 18
- 229910020068 MgAl Inorganic materials 0.000 claims description 13
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910052596 spinel Inorganic materials 0.000 claims description 9
- 239000011029 spinel Substances 0.000 claims description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 229910000272 alkali metal oxide Inorganic materials 0.000 claims description 8
- 229910018068 Li 2 O Inorganic materials 0.000 claims description 7
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- 238000005245 sintering Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052810 boron oxide Inorganic materials 0.000 claims description 6
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 6
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 229910052708 sodium Inorganic materials 0.000 claims description 6
- 239000005751 Copper oxide Substances 0.000 claims description 5
- 229910000431 copper oxide Inorganic materials 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 15
- 229910010413 TiO 2 Inorganic materials 0.000 description 10
- 239000011777 magnesium Substances 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 229910004283 SiO 4 Inorganic materials 0.000 description 8
- 239000002002 slurry Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 238000007606 doctor blade method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010828 elution Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000003870 refractory metal Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 229910017309 Mo—Mn Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- NWXHSRDXUJENGJ-UHFFFAOYSA-N calcium;magnesium;dioxido(oxo)silane Chemical compound [Mg+2].[Ca+2].[O-][Si]([O-])=O.[O-][Si]([O-])=O NWXHSRDXUJENGJ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052637 diopside Inorganic materials 0.000 description 1
- 239000011363 dried mixture Substances 0.000 description 1
- 229910052634 enstatite Inorganic materials 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- BBCCCLINBSELLX-UHFFFAOYSA-N magnesium;dihydroxy(oxo)silane Chemical compound [Mg+2].O[Si](O)=O BBCCCLINBSELLX-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Description
また、電子機器の小型化に伴い、電子部品についても、小型化や高密度実装され得ることが要求されている。上記のような要求に応えるために、半導体素子や各種回路素子を搭載するための基板として、多層回路基板が用いられている。多層回路基板では、基板内に導体回路や電子部品機能素子が3次元的に内蔵されているので、電子部品の小型化を進めることができる。
また、本発明のセラミック電子部品は、本発明のセラミック多層基板と、インダクタおよびキャパシタのうち少なくとも一方を構成する配線導体を備えるものであってもよい。すなわち、本発明のセラミック電子部品は、セラミック多層基板にインダクタやコンデンサを内蔵する積層型LCフィルタなどのチップ状部品にも向けられる。
導電性キャップ8は、セラミック多層基板2を上面から下面に向かって貫いているビアホール電極6aに電気的に接続されている。セラミック多層基板2の下面に外部電極7が形成されており、外部電極7はビアホール電極6や6aに電気的に接続されている。また、他の外部電極については図示を省略しているが、外部電極7と同様に、セラミック多層基板2の下面に形成されている。また、他の外部電極は、上述した内部配線を介して、電子部品素子9〜11やキャパシタC1,C2と電気的に接続されている。
次に、上記セラミック焼結体21内の構成を、第3図を参照しつつ製造方法を説明することにより明らかにする。
しかる後、セラミックグリーンシート21a〜21mを図示の向きに積層し、厚み方向に加圧し積層体を得る。得られた積層体を焼成し、セラミック焼結体21を得る。
<実施例1>
原料粉末としてMg(OH)2とAl2O3の粉末を、化学量諭比組成でMgAl2O4となるように秤量し、これを16時間湿式混合した後、乾燥した。
次に、乾燥した混合物を1350℃で2時間仮焼した後、粉砕した。
そして、粉砕により得られた粉末と、市販のTiO2粉末とを混合して、セラミック粉末を調製した。
Claims (12)
- スピネル(MgAl2O4)を含むセラミック粉末と、酸化ケイ素をSiO2換算で30〜60モル%および酸化マグネシウムをMgO換算で20〜55モル%含むガラス粉末と、を含有する絶縁体セラミック組成物であって、
前記セラミック粉末と前記ガラス粉末とが、重量比で20:80〜80:20の割合で配合されており、
前記絶縁体セラミック組成物はさらに前記セラミック粉末中に、前記セラミック粉末および前記ガラス粉末の合計量に対して0.5〜15重量%の割合で酸化チタンを含有し、
前記ガラス粉末には、CaOが前記ガラス粉末全体の30モル%以下の割合でさらに含まれており、
酸化銅が前記セラミック粉末および前記ガラス粉末の合計量に対してCuO換算で3重量%以下の割合でさらに含まれている、絶縁体セラミック組成物。 - 前記ガラス粉末には、酸化ホウ素がB2O3換算でガラス粉末全体の20モル%以下の割合でさらに含まれている、請求の範囲第1項に記載の絶縁体セラミック組成物。
- 前記ガラス粉末には、酸化アルミニウムがAl2O3換算で前記ガラス粉末全体の10モル%以下の割合でさらに含まれている、請求の範囲第1項に記載の絶縁体セラミック組成物。
- 前記ガラス粉末には、Li2O,K2OおよびNa2Oからなる群から選択された少なくとも1種のアルカリ金属酸化物が前記ガラス粉末100重量%に対して10重量%以下の割合で添加されている、請求の範囲第1項に記載の絶縁体セラミック組成物。
- 請求の範囲第1項に記載の絶縁体セラミック組成物を焼成することにより得られる、絶縁体セラミック。
- 複数のセラミック層と、前記複数のセラミック層のうち少なくとも1層のセラミック層に形成された配線導体とを備えるセラミック多層基板であって、前記複数のセラミック層は、請求の範囲第5項に記載の絶縁体セラミックからなる絶縁体セラミック層を含む、セラミック多層基板。
- 前記複数のセラミック層は、前記絶縁体セラミック層の少なくとも一方主面に積層された、前記絶縁体セラミック層よりも誘電率の高い誘電体セラミック層をさらに含む、請求の範囲第6項に記載のセラミック多層基板。
- 請求の範囲第6項に記載のセラミック多層基板と、前記セラミック多層基板上に実装され、前記配線導体に電気的に接続された回路素子とを備える、セラミック電子部品。
- 請求の範囲第6項に記載のセラミック多層基板と、インダクタおよびキャパシタのうち少なくとも一方の回路素子を形成する前記配線導体とを有する、セラミック電子部品。
- 請求の範囲第1項に記載の絶縁体セラミック組成物で形成された第1のセラミックグリーンシートを積層して、積層体を用意する工程と、
前記第1のセラミックグリーンシートとは焼結温度の異なる第2のセラミックグリーンシートを前記第1のセラミックグリーンシートの少なくとも一方主面に接するように設ける工程と、
前記第1のセラミックグリーンシートからなる積層体と前記第2のセラミックグリーンシートとを同時に焼成する工程と、
を備える、セラミック多層基板の製造方法。 - 前記第2のセラミックグリーンシートは、前記第1のセラミックグリーンシートの焼成温度では実質的に焼結しないセラミックグリーンシートである、請求の範囲第10項に記載のセラミック多層基板の製造方法。
- 前記第1のセラミックグリーンシートからなる積層体と前記第2のセラミックグリーンシートとを同時に焼成する工程は、焼成温度1000℃以下で行われる、請求の範囲第11項に記載のセラミック多層基板の製造方法。
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US7417001B2 (en) * | 2004-03-01 | 2008-08-26 | Murata Manufacturing Co., Ltd | Glass ceramic composition, glass-ceramic sintered body, and monolithic ceramic electronic component |
US7351674B2 (en) * | 2004-03-01 | 2008-04-01 | Murata Manufacturing Co., Ltd. | Insulating ceramic composition, insulating ceramic sintered body, and mulitlayer ceramic electronic component |
US7368408B2 (en) * | 2004-03-01 | 2008-05-06 | Murata Manufacturing Co., Ltd. | Glass-ceramic composition, glass-ceramic sintered body, and monolithic ceramic electronic component |
US7439202B2 (en) * | 2004-03-01 | 2008-10-21 | Murata Manufacturing Co., Ltd. | Glass ceramic composition, glass-ceramic sintered body, and monolithic ceramic electronic component |
JP2005281010A (ja) * | 2004-03-26 | 2005-10-13 | Sanyo Electric Co Ltd | 誘電体セラミック材料及び積層セラミック基板 |
JP2006016215A (ja) * | 2004-06-30 | 2006-01-19 | Sanyo Electric Co Ltd | 誘電体セラミック及び積層セラミック基板 |
US7742314B2 (en) * | 2005-09-01 | 2010-06-22 | Ngk Spark Plug Co., Ltd. | Wiring board and capacitor |
JP3969453B1 (ja) * | 2006-05-17 | 2007-09-05 | 株式会社村田製作所 | ケース付き多層モジュール |
US20080227621A1 (en) * | 2007-03-13 | 2008-09-18 | Hsieh Hsin-Mao | Glass capable of emitting infrared rays |
US20090236692A1 (en) * | 2008-03-24 | 2009-09-24 | Sheng-Fu Su | Rc filtering device having air gap construction for over voltage protection |
JP4618383B2 (ja) * | 2008-05-12 | 2011-01-26 | Tdk株式会社 | 誘電体磁器組成物、積層複合電子部品、積層コモンモードフィルタ、積層セラミックコイルおよび積層セラミックコンデンサ |
JP4687760B2 (ja) * | 2008-09-01 | 2011-05-25 | 株式会社村田製作所 | 電子部品 |
US20100212359A1 (en) * | 2009-02-23 | 2010-08-26 | Hilary Tony Godard | Spinel isopipe for fusion forming alkali containing glass sheets |
JP5418419B2 (ja) * | 2010-06-16 | 2014-02-19 | 株式会社村田製作所 | 積層回路基板 |
JP5928847B2 (ja) * | 2011-12-27 | 2016-06-01 | 株式会社村田製作所 | 多層セラミック基板およびそれを用いた電子部品 |
CN104844240B (zh) * | 2015-06-23 | 2017-03-08 | 武汉科技大学 | 高红外反射率镁橄榄石轻质耐火保温材料及其制备方法 |
CN108383519B (zh) * | 2018-05-15 | 2021-01-29 | 广东国华新材料科技股份有限公司 | 一种微波介电陶瓷材料及其制备方法 |
JPWO2020145342A1 (ja) * | 2019-01-11 | 2021-11-25 | Dic株式会社 | スピネル粒子及びその製造方法、樹脂組成物、成形物、組成物、グリーンシート、焼成物、並びに、ガラスセラミックス基板 |
WO2020145341A1 (ja) * | 2019-01-11 | 2020-07-16 | Dic株式会社 | 樹脂組成物、成形物、組成物、グリーンシート、焼成物及びガラスセラミックス基板 |
KR20230103631A (ko) * | 2021-12-31 | 2023-07-07 | 삼성전기주식회사 | 적층형 전자 부품 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61286263A (ja) * | 1985-06-14 | 1986-12-16 | 日本特殊陶業株式会社 | 低温焼結磁器組成物 |
US4788046A (en) * | 1987-08-13 | 1988-11-29 | Ceramics Process Systems Corporation | Method for producing materials for co-sintering |
US5082811A (en) | 1990-02-28 | 1992-01-21 | E. I. Du Pont De Nemours And Company | Ceramic dielectric compositions and method for enhancing dielectric properties |
JP3101970B2 (ja) * | 1995-04-28 | 2000-10-23 | 京セラ株式会社 | ガラス−セラミック焼結体およびその製造方法 |
JP3297569B2 (ja) * | 1995-10-30 | 2002-07-02 | 京セラ株式会社 | 低温焼成磁器組成物 |
EP0952966A4 (en) * | 1996-11-21 | 2000-08-23 | Corning Inc | GLASS CERAMICS BASED ON BETA QUARTZ |
JPH11157945A (ja) * | 1997-11-28 | 1999-06-15 | Matsushita Electric Ind Co Ltd | セラミック電子部品の製造方法及びそれに用いるダミー用グリーンシート |
JP2001010858A (ja) * | 1999-06-22 | 2001-01-16 | Murata Mfg Co Ltd | セラミック基板用組成物およびセラミック回路部品 |
JP4852778B2 (ja) * | 1999-06-22 | 2012-01-11 | 株式会社村田製作所 | セラミック基板用組成物およびセラミック回路部品 |
US6753277B2 (en) | 2000-02-29 | 2004-06-22 | Kyocera Corporation | Ceramics having excellent high-frequency characteristics and method of producing the same |
JP2001240470A (ja) | 2000-02-29 | 2001-09-04 | Kyocera Corp | 高周波用磁器組成物および高周波用磁器並びに高周波用磁器の製造方法 |
JP3680683B2 (ja) * | 2000-03-06 | 2005-08-10 | 株式会社村田製作所 | 絶縁体磁器組成物 |
JP3680715B2 (ja) | 2000-07-21 | 2005-08-10 | 株式会社村田製作所 | 絶縁体磁器組成物 |
JP3680713B2 (ja) * | 2000-07-21 | 2005-08-10 | 株式会社村田製作所 | 絶縁体磁器、セラミック多層基板、セラミック電子部品及び積層セラミック電子部品 |
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KR20030007712A (ko) | 2003-01-23 |
US6946415B2 (en) | 2005-09-20 |
KR100519422B1 (ko) | 2005-10-07 |
KR100519425B1 (ko) | 2005-10-10 |
WO2002079114A1 (fr) | 2002-10-10 |
KR20050025629A (ko) | 2005-03-14 |
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JPWO2002079114A1 (ja) | 2004-07-22 |
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