JP5053559B2 - 磁気センサ - Google Patents
磁気センサ Download PDFInfo
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- JP5053559B2 JP5053559B2 JP2006088619A JP2006088619A JP5053559B2 JP 5053559 B2 JP5053559 B2 JP 5053559B2 JP 2006088619 A JP2006088619 A JP 2006088619A JP 2006088619 A JP2006088619 A JP 2006088619A JP 5053559 B2 JP5053559 B2 JP 5053559B2
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- Japan
- Prior art keywords
- magnetic
- semiconductor substrate
- plate
- converging plate
- hall elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Description
図2(a),(b)は、本発明に係る磁気センサの一実施例を説明するための構成図で、図2(a)は磁気収束板の側面を順テーパー形状にしたもの、図2(b)は磁気収束板の側面を逆テーパー形状にしたものである。図中符号11は半導体基板、12a,12bはホール素子、15は磁気収束板を示している。
2a,2b ホール素子
3 保護層
4 下地金属層
5 磁気収束板
11 半導体基板
12a,12b ホール素子
13 磁性体テープ
14 レジスト
15 磁気収束板
16 レジスト
16a 空隙部
Claims (1)
- 複数のホール素子が設けられた半導体基板と、該半導体基板上に設けられた磁気増幅機能を有する磁性体とを備えた磁気センサにおいて、
前記磁性体の底面が、前記複数のホール素子の領域の少なくとも一部を覆うように配置され、前記磁性体が、前記半導体基板の表面と前記磁性体の側面の内側のテーパー角αが鋭角である順テーパー形状であり、前記各ホール素子の直近に前記テーパー角αを有する前記磁性体の側面が配置されていることを特徴とする磁気センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006088619A JP5053559B2 (ja) | 2006-03-28 | 2006-03-28 | 磁気センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006088619A JP5053559B2 (ja) | 2006-03-28 | 2006-03-28 | 磁気センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007263720A JP2007263720A (ja) | 2007-10-11 |
JP5053559B2 true JP5053559B2 (ja) | 2012-10-17 |
Family
ID=38636861
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006088619A Active JP5053559B2 (ja) | 2006-03-28 | 2006-03-28 | 磁気センサ |
Country Status (1)
Country | Link |
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JP (1) | JP5053559B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287755A (ja) * | 2009-06-12 | 2010-12-24 | Sanyo Electric Co Ltd | 半導体装置 |
JP2014147794A (ja) * | 2014-03-19 | 2014-08-21 | Bandai Co Ltd | 磁気応答玩具、磁気応答玩具に用いられる主玩具体および副玩具体 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135587A (ja) * | 1973-04-28 | 1974-12-27 | ||
JPH0897486A (ja) * | 1994-09-22 | 1996-04-12 | Hitachi Cable Ltd | ホールセンサ |
JPH09129944A (ja) * | 1995-10-31 | 1997-05-16 | Hitachi Ltd | 磁電変換素子 |
JPH10228641A (ja) * | 1997-02-10 | 1998-08-25 | Kao Corp | 薄膜体及び薄膜形成装置 |
DE19753778B4 (de) * | 1997-12-04 | 2004-02-26 | Robert Bosch Gmbh | Sensor |
JP2001281312A (ja) * | 2000-03-28 | 2001-10-10 | Koji Yamada | ホールセンサプローブ |
JP4622178B2 (ja) * | 2001-01-17 | 2011-02-02 | サンケン電気株式会社 | 電流検出装置 |
JP2002252394A (ja) * | 2001-02-22 | 2002-09-06 | Sony Corp | 磁気抵抗効果素子、磁気抵抗効果型磁気ヘッド、およびこれらの製造方法 |
JP2003294818A (ja) * | 2002-03-28 | 2003-10-15 | Asahi Kasei Corp | 磁気センサおよびその製造方法 |
JP2004158668A (ja) * | 2002-11-07 | 2004-06-03 | Asahi Kasei Corp | ハイブリッド磁気センサ及びその製造方法 |
-
2006
- 2006-03-28 JP JP2006088619A patent/JP5053559B2/ja active Active
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Publication number | Publication date |
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JP2007263720A (ja) | 2007-10-11 |
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