JP5038306B2 - Electroacoustic transducer - Google Patents

Electroacoustic transducer Download PDF

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JP5038306B2
JP5038306B2 JP2008523838A JP2008523838A JP5038306B2 JP 5038306 B2 JP5038306 B2 JP 5038306B2 JP 2008523838 A JP2008523838 A JP 2008523838A JP 2008523838 A JP2008523838 A JP 2008523838A JP 5038306 B2 JP5038306 B2 JP 5038306B2
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magnetic
housing
current collector
magnetic system
substrate
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JP2009503497A (en
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バシリエビチ キリコフ，アンドレイ
ニコラエビチ ザブロディン，アレクサンドル
ミハイロビチ カシン，アレクセイ
バレンチノビチ カラチェフ，ニコライ
アレクサンドロビチ シェルバコフ，フラディミル
ビクトロビチ バルバシン，ニコライ
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オブシェストボ エス オグラニチェンノイ オトベツトベンノスチュ“ノルディンクラフト サンクト−ペテルブルグ”
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2412—Probes using the magnetostrictive properties of the material to be examined, e.g. electromagnetic acoustic transducers [EMAT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/225—Supports, positioning or alignment in moving situation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/263—Surfaces
    • G01N2291/2632—Surfaces flat

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  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)

Description

本発明は、延伸材の非破壊超音波テスト分野に関し、強磁性物質からなる板金および帯金の内部欠陥の検出に使用することができる。   The present invention relates to the field of non-destructive ultrasonic testing of stretched materials, and can be used to detect internal defects in sheet metals and strips made of a ferromagnetic material.

特許文献１に開示された既知の電磁音響変換器（ＥＭＡＴ）は、永久磁石からなる磁気システム、集磁器（磁束濃縮器）、誘導コイルを備えており、永久磁石の同極の表面が、互いに対面して、かつ、集磁器に近接しており、また、誘導コイルが、被検体の上面に近接して、集磁器の表面に配置されていることを特徴としている。   A known electroacoustic transducer (EMAT) disclosed in Patent Document 1 includes a magnetic system composed of permanent magnets, a magnetic collector (magnetic flux concentrator), and an induction coil, and the same-polar surfaces of the permanent magnets are mutually connected. It faces and is close to the current collector, and the induction coil is arranged on the surface of the current collector close to the upper surface of the subject.

このＥＭＡＴの欠点は、たとえば、ＥＭＡＴの作動表面から、磁気システムの磁場によって付着している付着物を取除く必要があるときに、磁気システムを即座に作動停止できないことである。   The disadvantage of this EMAT is that, for example, when it is necessary to remove deposits attached by the magnetic field of the magnetic system from the working surface of the EMAT, the magnetic system cannot be shut down immediately.

特許文献２に開示された既知のＥＭＡＴは、極が、内側表面および外側表面上にあって互いにしっかり近接している、少なくとも２つの環状永久磁石、内側と外側のうちの一方の側からそれらの表面に取付けられ、内側の極が同極で対面するように配置されている、少なくとも１つの丸型永久磁石、および、強磁性物質からなり、誘導コイルに対しての高さを固定できるように環状磁石の内側で丸型永久磁石と同一の軸に取付けられた、円筒形の集磁器を備えている。   The known EMAT disclosed in U.S. Patent No. 6,057,049 has at least two annular permanent magnets whose poles are on the inner and outer surfaces and in close proximity to each other, from one of the inner and outer sides. At least one round permanent magnet attached to the surface and arranged so that the inner poles face each other at the same pole, and a ferromagnetic material so that the height relative to the induction coil can be fixed It has a cylindrical magnetic current collector attached to the same axis as the round permanent magnet inside the annular magnet.

このＥＭＡＴの欠点は、被検体の表面からＥＭＡＴを引き離す必要があるとき、あるいは、ＥＭＡＴの作動表面から磁気システムの磁場によって付着している付着物を取除く必要があるとき、あるいは、鉄カルボニルの微粒子を糊付けしてなる集磁器の数が多いときに、技術的な理由で、磁気システムの作動を即座に停止できないことである。   The disadvantage of this EMAT is when it is necessary to pull the EMAT away from the surface of the subject, or when it is necessary to remove the deposits attached by the magnetic field of the magnetic system from the working surface of the EMAT, or When there are a large number of current collectors formed by gluing fine particles, the magnetic system cannot be immediately stopped for technical reasons.

これら既知のＥＭＡＴの共通の欠点は、磁気システムの作動を即座に停止するためには、被検体からＥＭＡＴユニットを引き離す必要があることであり、このことによって、ＥＭＡＴの使用が複雑になっていることである。   A common disadvantage of these known EMATs is that the EMAT unit must be pulled away from the subject in order to immediately shut down the magnetic system, which complicates the use of EMAT. That is.

特許文献３に開示された既知の磁化器では、磁気システムは、２つの永久磁石からなる逆Ｕ字型の磁気回路である。この磁場は、磁石を１８０°回転して打ち消される。   In the known magnetizer disclosed in Patent Document 3, the magnetic system is an inverted U-shaped magnetic circuit composed of two permanent magnets. This magnetic field is canceled by rotating the magnet 180 °.

特許文献４に開示された既知の保磁力計では、磁気回路の円筒状の開口部の中で自律的に回転するように平板上の永久磁石が複数取り付けられている。このことにより、これらの磁石の相対的な位置を０°から９０°の間の角度αだけ変化させて、磁束を制御することができる。   In the known coercivity meter disclosed in Patent Document 4, a plurality of permanent magnets on a flat plate are attached so as to autonomously rotate in a cylindrical opening of a magnetic circuit. This allows the relative position of these magnets to be changed by an angle α between 0 ° and 90 ° to control the magnetic flux.

製品テストの際、角度α＝０°の時、磁石の極が一致して最大の磁束が設定される。角度α＝９０°の時、磁束がゼロになり、機器は製品から自由に取外すことができる。   During product testing, when the angle α = 0 °, the poles of the magnets coincide and the maximum magnetic flux is set. When the angle α = 90 °, the magnetic flux becomes zero and the device can be freely removed from the product.

超音波テストは延伸材が動いている状態で行われ、特に、延伸材は高温であり、検査が行われる場所は技術的な考慮から安全にアクセスできないので、通常、人が介入することなく、被検体から磁気システムを即座に（自動的に）引き離すことが必要なＥＭＡＴにおいては、これらのマニュアルの回転可能な磁石を備えた機器は使用できないという欠点を持つ。   Ultrasonic testing is performed with the stretch material in motion, especially because the stretch material is hot and the location where the inspection is performed is not safely accessible due to technical considerations, so usually without human intervention, In EMAT that requires immediate (automatic) separation of the magnetic system from the subject, these manual instruments with a rotatable magnet cannot be used.

独国特許第４０１１６８６号明細書German Patent No. 40161186 露国特許第２２４３５５０号明細書Russian Patent No. 2243550 Specification 露国特許第３３６５３号明細書Russian Patent No. 33653 Specification 露国特許第２２１０７８６号明細書Russian patent 2210786 specification

上記の問題を解決するために、本発明は、自動モードで、被検体からＥＭＡＴを、即座に、信頼性高く、引き離すことができる、移動可能な磁気システムを備えた、電磁音響変換機（ＥＭＡＴ）を提供することを目的としている。   In order to solve the above problems, the present invention provides an electroacoustic transducer (EMAT) comprising a movable magnetic system capable of quickly and reliably pulling EMAT away from a subject in an automatic mode. ).

外部筐体、集磁器を備えた基板、互いに同極が対面する永久磁石を備えた磁気システム、および、誘導コイル、を備えた電磁音響変換機によって、上述の問題は解決することができる。本発明では、この磁気システムは、非磁性物質からなる内部筐体に囲まれており、内部筐体は、集磁器に対して回転できるように、また、外部筐体に固定されているドライブに対して運動可能に連結されて、外部筐体に中に備えられる。 The above-mentioned problem can be solved by an electroacoustic transducer including an external housing, a substrate having a magnetic collector, a magnetic system having permanent magnets facing the same polarity, and an induction coil. In the present invention, this magnetic system is surrounded by an inner casing made of a non-magnetic material, and the inner casing can be rotated with respect to the magnetic collector, and can be attached to a drive fixed to the outer casing. It is movably connected to and is provided in the outer housing.

本発明の実施形態では、内部筐体は外部筐体に回転可能に取付けられている。 The implementation of the invention, the inner housing is rotatably mounted in the outer housing.

このような場合、磁気システムが、磁性物質からなるホルダーに取付けられた永久磁石から構成されるのに都合が良い。   In such a case, it is convenient for the magnetic system to consist of permanent magnets attached to a holder made of magnetic material.

内部筐体の外側表面は、円筒形をなすようにでき、外部筐体は、内部筐体を挿入する適当なアパーチャーを備えることができる。   The outer surface of the inner housing can be cylindrical and the outer housing can be provided with a suitable aperture for inserting the inner housing.

この他、ドライブは、ロッドが非磁性物質からなる案内スリーブの中に取付けられたスライドに接続された空気圧シリンダーとして製作され、スライドが内部筐体に固定されたピンによって内部筐体に接続され、かつ、スライドの中に形成された溝と協働することが望ましい。   In addition, the drive is manufactured as a pneumatic cylinder with a rod connected to a slide mounted in a guide sleeve made of a non-magnetic material, and the slide is connected to the inner housing by a pin fixed to the inner housing, And it is desirable to cooperate with a groove formed in the slide.

磁気システムは、集磁器１３側で、内部筐体の外側表面に沿って合致する円筒形の表面を持ち、集磁器に対してクリアランスを持って配置されている。   The magnetic system has a cylindrical surface that matches the outer surface of the inner housing on the magnetic collector 13 side, and is arranged with a clearance from the magnetic collector.

この他、内部筐体と基板は、基板と被検体の表面との間のエアクッションを形成する圧縮空気を供給するダクトを備えていることが望ましい。   In addition, it is desirable that the inner housing and the substrate include a duct for supplying compressed air that forms an air cushion between the substrate and the surface of the subject.

図１−３に、回転可能な磁気システムを備えた、本発明のＥＭＡＴの実施形態を示す。 Figure 1-3 with a rotatable magnet system, it shows the implementation form of the EMAT of the present invention.

本発明の実施形態のＥＭＡＴは、外部筐体１、２つの側壁２、および、非磁性物質からなる基板３を備えている。外部筐体１の中に、スルー・アパーチャ４は、内部筐体５に回転可能に取付けられている。内部筐体５の外部表面は円筒形の形状を有している。内部筐体５は、非磁性物質からなり、外部筐体１の側壁２に固定された軸７に接する、ベアリング６に取付けられている（図２）。内部筐体５の中に、凹部８が設けられ、凹部８の横側面に固定されたピン９が配置されている。内部筐体５の中に、磁性物質からなるホルダー１０が配置され、互いに同極が対面する３つの永久磁石からなる磁気システムが備えられている。基板３の上には、セラミックプレート１２と集磁器１３が固定されている。集磁器１３に、誘導コイルが取付けられている。磁気システムは、集磁器１３側で、内部筐体５の外部表面と一致する円筒形の表面を持ち、集磁器１３に対するクリアランスΔを持つ。ドライブは、外部筐体１上に固定され、空気圧シリンダー１５として製作されている。空気圧シリンダー１５のロッド１６は、外部筐体１に対して往復運動するよう案内スリーブ１８に取付けられている、スライド１７に取付けられている。スリーブ１８は、非磁性物質からなる。スライド１７の中に、溝１９は製作され、その中にピン９が配置されている。圧縮空気（図１に矢印で示されている）を供給するために、外部筐体１の中に、ダクト２０が設けられ、基板３の中に、ダクト２１と開口部２２が設けられている。 The EMAT according to the embodiment of the present invention includes an outer casing 1, two side walls 2, and a substrate 3 made of a nonmagnetic material. In the outer casing 1, the through aperture 4 is rotatably attached to the inner casing 5. The outer surface of the inner housing 5 has a cylindrical shape. The inner housing 5 is made of a nonmagnetic material and is attached to a bearing 6 that contacts a shaft 7 fixed to the side wall 2 of the outer housing 1 (FIG. 2). A recess 8 is provided in the internal housing 5, and a pin 9 fixed to the lateral side surface of the recess 8 is disposed. A holder 10 made of a magnetic material is disposed in the inner casing 5 and a magnetic system made up of three permanent magnets having the same polarity facing each other is provided. A ceramic plate 12 and a magnetic collector 13 are fixed on the substrate 3. An induction coil is attached to the magnetic collector 13. The magnetic system has a cylindrical surface that coincides with the outer surface of the inner housing 5 on the side of the magnetic collector 13, and has a clearance Δ with respect to the magnetic collector 13. The drive is fixed on the external housing 1 and is manufactured as a pneumatic cylinder 15. The rod 16 of the pneumatic cylinder 15 is attached to a slide 17 that is attached to a guide sleeve 18 so as to reciprocate with respect to the outer housing 1. The sleeve 18 is made of a nonmagnetic material. A groove 19 is produced in the slide 17 and a pin 9 is arranged therein. In order to supply compressed air (indicated by an arrow in FIG. 1), a duct 20 is provided in the outer housing 1, and a duct 21 and an opening 22 are provided in the substrate 3. .

作動位置で、空気圧シリンダー１５のロッド１６は、スライド１７と共に、上部位置（図１に示されている）に上がり、また、永久磁石１１からなる磁気システムの対称軸は、コイル１４が巻かれている集磁器１３の軸に位置合わせされている。   In the operating position, the rod 16 of the pneumatic cylinder 15 rises with the slide 17 to the upper position (shown in FIG. 1), and the axis of symmetry of the magnetic system consisting of the permanent magnet 11 is wound with the coil 14. It is aligned with the axis of the current collector 13.

この位置で、集磁器１３上で磁束は完全に閉じて、被検体２３の調査を開始する。ダクト２０、スペース２１、および、開口部２２を通って、圧縮空気が供給されると、エアクッションが基板３と被検体２３の表面の間に形成されて、基板と被検体とが接触するのを防ぐことができる。   At this position, the magnetic flux is completely closed on the magnetic collector 13 and the examination of the subject 23 is started. When compressed air is supplied through the duct 20, the space 21, and the opening 22, an air cushion is formed between the substrate 3 and the surface of the subject 23, and the substrate and the subject come into contact with each other. Can be prevented.

ＥＭＡＴを、磁場でクランプせずに、即座に、被検体（金属板）から引き離す必要があるとき、あるいは、基板３の表面への付着物を取除く必要があるとき、空気圧シリンダー１５の適当な場所に圧縮空気が供給され、ロッド１６がスライド１７と共に案内スリーブ１８に沿ってストロークＳだけ下方に移動する（スライド１８とピン９のこの位置は、図１の一点鎖線で示されている）。ピン９と溝１９の壁の協働によって、スライド１７の中で、ホルダー１０の中に配置された磁気システムと共に、外部筐体１に対して、ほぼ、９０°の角度αだけ、内部筐体５が回転する。磁束は急峻に減少して、ＥＭＡＴを、自動モードで、被検体、から簡単に引き離すことができ、および／あるいは、付着物を、自動モードで、非磁性物質からなる基板３の表面から取外すことができる。   When it is necessary to immediately remove the EMAT from the subject (metal plate) without clamping it with a magnetic field, or when it is necessary to remove the deposits on the surface of the substrate 3, the pneumatic cylinder 15 is appropriately used. Compressed air is supplied to the place, and the rod 16 moves downward along the guide sleeve 18 along the guide sleeve 18 by a stroke S (this position of the slide 18 and the pin 9 is indicated by a one-dot chain line in FIG. 1). Due to the cooperation of the walls of the pins 9 and the grooves 19, the inner housing, together with the magnetic system arranged in the holder 10 in the slide 17, with respect to the outer housing 1 by an angle α of approximately 90 °. 5 rotates. The magnetic flux decreases sharply and the EMAT can be easily pulled away from the subject in automatic mode and / or the deposit is removed from the surface of the non-magnetic substrate 3 in automatic mode. Can do.

本発明のＥＭＡＴの実施形態は、磁気システムを作動停止させた際、たとえば、付着物を取除く必要があるとき、このようなＥＭＡＴは、被検体に対する位置を変えない、という効果を持つ。 Embodiments of the EMAT of the present invention have the effect that when the magnetic system is deactivated, such as when it is necessary to remove deposits, such EMAT does not change position relative to the subject.

本発明のＥＭＡＴの実施形態では、空気圧シリンダーは、ドライブとして使用され、当該技術分野で通常のスキルを持つ人なら特別な困難なく、別のタイプのドライブ、たとえば、電気的ドライブを適用することができ、このドライブをＥＭＡＴの内部筐体に運動可能に連結した適当な機構を使用することができる。 In the EMAT embodiment of the present invention, the pneumatic cylinder is used as a drive, and a person with ordinary skill in the art can apply another type of drive, such as an electrical drive, without any particular difficulty. Any suitable mechanism can be used in which the drive is movably coupled to the internal housing of the EMAT.

本発明のＥＭＡＴの実施形態の側面断面図である。It is a side cross-sectional view of the implementation form of the EMAT of the present invention. 図１のＡ−Ａの断面図である。It is sectional drawing of AA of FIG. 図１のＢ−Ｂの断面図である。It is sectional drawing of BB of FIG.

Claims (6)

外部筐体と、集磁器を備えた基板と、互いに同極が向かい合う永久磁石を備えた磁気システムと、誘導コイルと、を備えた、電磁音響変換器において、
前記磁気システムが、非磁性物質からなる内部筐体に囲まれ、
前記内部筐体が、前記外部筐体の中で前記集磁器に対して自動モードで引き離すことができるように変位可能に備えられ、前記外部筐体に固定されたドライブに運動可能に連結されており、かつ
前記内部筐体が、前記外部筐体に回転可能に取付けられていることを特徴とする、電磁音響変換器。In an electromagnetic acoustic transducer comprising an external housing, a substrate having a magnetic current collector, a magnetic system having permanent magnets with the same polarity facing each other, and an induction coil,
The magnetic system is surrounded by an inner housing made of non-magnetic material;
The inner casing is displaceably provided in the outer casing so as to be separated from the current collector in an automatic mode, and is movably connected to a drive fixed to the outer casing. And the inner casing is rotatably attached to the outer casing. 前記磁気システムが、磁性物質からなるホルダーに取付けられた永久磁石からなることを特徴とする、請求項１の変換器。The magnetic system, characterized in that a permanent magnet attached to a holder made of a magnetic material, the transducer according to claim 1. 前記内部筐体の外面が円筒形をなし、前記内部筐体が挿入される開口部が前記外部筐体に設けられていることを特徴とする、請求項１の変換器。It said inner housing outer surface forms a cylindrical, wherein the opening the inner housing is inserted is provided in the outer housing, the transducer according to claim 1. 前記ドライブが、空気圧シリンダーとして製作され、
前記空気圧シリンダーのロッドが、案内スリーブ内に配置され、非磁性物質からなるスライドと連結され、
前記スライドが、前記スライドに形成された溝と協働する、前記内部筐体に固定されたピンを介して、前記内部筐体に連結されている、
ことを特徴とする、請求項３の変換器。The drive is manufactured as a pneumatic cylinder;
A rod of the pneumatic cylinder is disposed in the guide sleeve and connected to a slide made of a non-magnetic material;
The slide is connected to the internal housing via a pin fixed to the internal housing, cooperating with a groove formed in the slide;
The converter according to claim 3 , wherein: 前記磁気システムが、前記集磁器に対してクリアランスを持って、前記内部筐体の外面に沿った、円筒形の面を、前記集磁器側に、持つことを特徴とする、請求項３の変換器。4. The conversion of claim 3 , wherein the magnetic system has a cylindrical surface on the current collector side along the outer surface of the inner housing with a clearance from the current collector. vessel. 圧縮空気を供給して、前記基板と被検体の表面との間にエアクッションを形成するためのダクトを、前記外部筐体、および、前記基板の中に備えることを特徴とする、請求項１の変換器。2. A duct for supplying compressed air to form an air cushion between the substrate and the surface of the subject is provided in the outer casing and the substrate. Converter.
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RU2005123824/28A RU2295125C1 (en) 2005-07-27 2005-07-27 Electromagnetic-acoustic transformer
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RU2006101385/28A RU2300763C1 (en) 2006-01-19 2006-01-19 Electromagnetic-acoustic converter
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PCT/RU2006/000380 WO2007013836A1 (en) 2005-07-27 2006-07-17 Electromagnetic acoustic transducer

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