JP5038054B2 - 液体吐出ヘッドおよびその製造方法 - Google Patents
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- JP5038054B2 JP5038054B2 JP2007206520A JP2007206520A JP5038054B2 JP 5038054 B2 JP5038054 B2 JP 5038054B2 JP 2007206520 A JP2007206520 A JP 2007206520A JP 2007206520 A JP2007206520 A JP 2007206520A JP 5038054 B2 JP5038054 B2 JP 5038054B2
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- 239000007788 liquid Substances 0.000 title claims description 55
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- 229910052751 metal Inorganic materials 0.000 claims description 58
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
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- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
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- B41J2/14048—Movable member in the chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/14137—Resistor surrounding the nozzle opening
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/14145—Structure of the manifold
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
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- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
前記基板に積層された無機物層と金属層を含み、前記液体を吐出するためのノズルが形成されたノズルプレートと、
前記ノズルプレートに形成された液体を吐出するために用いられるエネルギーを発生するヒーターと、を具備し、
該金属層は前記基板の方向へ突出する柱状部を有し、前記柱状部は前記供給口の中に迫り出していることを特徴とする。
前記基板の表面側に犠牲層を設ける工程と、
前記犠牲層が形成された前記基板の表面側に前記無機物層及び前記ヒーターを形成する工程と、
前記犠牲層及び前記無機物層における前記柱状部に対応する部分を取り除き、前記基板を後工程で形成する前記供給口の中に対応する位置まで掘り込んだ溝を形成する工程と、
前記無機物層の前記ノズルに対応する個所に、ノズル型を形成する工程と、
前記無機物層の上及び前記溝の中に前記金属層を形成する工程と、
前記基板の裏面側から前記供給口を形成する工程と、
前記犠牲層を前記供給口からエッチャントを導入して除去する工程と、
前記犠牲層を除去した空間に前記供給口を介してエッチャントを導入させ、前記液体チャンバを形成するように前記基板をエッチングする工程と、
前記ノズル型を除去し、前記金属層に開口部を形成する工程と、
前記金属層の前記開口部を介して前記無機物層を除去し、前記ノズルを形成する工程と、
を少なくとも含むことを特徴とする。
図1は本発明の実施形態1によるインクジェット記録ヘッドを示す断面図である。
第1の保護層112はヒーター114と基板101の間の絶縁、および犠牲層除去剤等からの耐薬品性を担うものであって、例えばシリコン窒化物やシリコン酸化物から形成される。
図8は本発明の実施形態2によるインクジェット記録ヘッドを示す断面図である。ここでは、実施形態1と同一部位については同一符号を付することでその説明は割愛し、実施形態1とは異なる構成要素を説明する。
図13は本発明の実施形態3によるインクジェット記録ヘッドを示す断面図である。ここでは、実施形態1と同一部位については同一符号を付することでその説明は割愛し、実施形態1とは異なる構成要素を説明する。
図15は本発明の実施形態4によるインクジェット記録ヘッドを示す断面図である。ここでは、実施形態1と同一部位については同一符号を付することでその説明は割愛し、実施形態1とは異なる構成要素を説明する。
102 マニホールド
103 インクチャネル
104 インクチャンバ
111 ノズルプレート
112 保護層
113 保護層
114 ヒーター
115 金属層
116 ノズル
117 保護層
120 放熱フィン
121 放熱部材
141 溝
Claims (5)
- 吐出される液体が充填される液体チャンバと、該液体チャンバに前記液体を供給するための供給口と、が形成された基板と、
前記基板に積層された無機物層と金属層を含み、前記液体を吐出するためのノズルが形成されたノズルプレートと、
前記ノズルプレートに形成された液体を吐出するために用いられるエネルギーを発生するヒーターと、を具備し、
該金属層は前記基板の方向へ突出する柱状部を有し、前記柱状部は前記供給口の中に迫り出していることを特徴とする液体吐出ヘッド。 - 前記ノズルプレートは複数の無機物層を有し、前記ヒーターは前記複数の無機物層の層間のいずれかの箇所に形成されていることを特徴とする請求項1に記載の液体吐出ヘッド。
- 前記柱状部は前記複数の無機物層を貫通することを特徴とする請求項2に記載の液体吐出ヘッド。
- 吐出される液体が充填される液体チャンバと、該液体チャンバに前記液体を供給するための供給口と、が形成された基板と、
前記基板に積層された無機物層と金属層を含み、前記液体を吐出するためのノズルが形成されたノズルプレートと、
前記ノズルプレートに形成された液体を吐出するために用いられるエネルギーを発生するヒーターと、を具備し、
該金属層は前記基板の方向へ突出する柱状部を有し、前記柱状部は前記供給口の中に迫り出している液体吐出ヘッドの製造方法であって、
前記基板を用意する工程と、
前記基板の表面側に犠牲層を設ける工程と、
前記犠牲層が形成された前記基板の表面側に前記無機物層及び前記ヒーターを形成する工程と、
前記犠牲層及び前記無機物層における前記柱状部に対応する部分を取り除き、前記基板を後工程で形成する前記供給口の中に対応する位置まで掘り込んだ溝を形成する工程と、
前記無機物層の前記ノズルに対応する個所に、ノズル型を形成する工程と、
前記無機物層の上及び前記溝の中に前記金属層を形成する工程と、
前記基板の裏面側から前記供給口を形成する工程と、
前記犠牲層を前記供給口からエッチャントを導入して除去する工程と、
前記犠牲層を除去した空間に前記供給口を介してエッチャントを導入させ、前記液体チャンバを形成するように前記基板をエッチングする工程と、
前記ノズル型を除去し、前記金属層に開口部を形成する工程と、
前記金属層の前記開口部を介して前記無機物層を除去し、前記ノズルを形成する工程と、
を少なくとも含むことを特徴とする液体吐出ヘッドの製造方法。 - 前記ノズルプレートは複数の無機物層を有し、前記ヒーターを前記複数の無機物層の層間に形成することを特徴とする請求項4に記載の液体吐出ヘッドの製造方法。
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JP2007206520A JP5038054B2 (ja) | 2007-08-08 | 2007-08-08 | 液体吐出ヘッドおよびその製造方法 |
CN2008101440855A CN101362397B (zh) | 2007-08-08 | 2008-08-06 | 液体排出头及其制造方法 |
US12/188,020 US9393781B2 (en) | 2007-08-08 | 2008-08-07 | Liquid-discharging head and method of producing the same |
KR1020080077281A KR101022114B1 (ko) | 2007-08-08 | 2008-08-07 | 액체 토출 헤드 및 그 제조 방법 |
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JP5349628B2 (ja) * | 2011-02-08 | 2013-11-20 | 富士フイルム株式会社 | インクジェット記録方法、及び、印刷物 |
JP6230279B2 (ja) * | 2013-06-06 | 2017-11-15 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
US9469109B2 (en) | 2014-11-03 | 2016-10-18 | Stmicroelectronics S.R.L. | Microfluid delivery device and method for manufacturing the same |
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CN101362397A (zh) | 2009-02-11 |
JP2009039928A (ja) | 2009-02-26 |
KR101022114B1 (ko) | 2011-03-17 |
CN101362397B (zh) | 2010-10-27 |
KR20090015839A (ko) | 2009-02-12 |
US9393781B2 (en) | 2016-07-19 |
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