JP5022074B2 - 二流体ノズルとそれを用いた噴霧方法 - Google Patents
二流体ノズルとそれを用いた噴霧方法 Download PDFInfo
- Publication number
- JP5022074B2 JP5022074B2 JP2007076695A JP2007076695A JP5022074B2 JP 5022074 B2 JP5022074 B2 JP 5022074B2 JP 2007076695 A JP2007076695 A JP 2007076695A JP 2007076695 A JP2007076695 A JP 2007076695A JP 5022074 B2 JP5022074 B2 JP 5022074B2
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- JP
- Japan
- Prior art keywords
- block
- mixing
- liquid
- gas
- blocks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000012530 fluid Substances 0.000 title claims description 177
- 238000005507 spraying Methods 0.000 title claims description 15
- 239000007788 liquid Substances 0.000 claims description 325
- 238000002347 injection Methods 0.000 claims description 215
- 239000007924 injection Substances 0.000 claims description 215
- 239000003595 mist Substances 0.000 claims description 67
- 238000011144 upstream manufacturing Methods 0.000 claims description 58
- 230000004308 accommodation Effects 0.000 claims description 35
- 238000009792 diffusion process Methods 0.000 claims description 27
- 238000003860 storage Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 12
- 238000007599 discharging Methods 0.000 claims description 10
- 239000007921 spray Substances 0.000 description 60
- 238000009826 distribution Methods 0.000 description 43
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 27
- 239000003566 sealing material Substances 0.000 description 20
- 238000004891 communication Methods 0.000 description 18
- 238000012856 packing Methods 0.000 description 15
- 238000004140 cleaning Methods 0.000 description 13
- 230000002093 peripheral effect Effects 0.000 description 11
- 238000012545 processing Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 238000009827 uniform distribution Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000004047 hole gas Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/02—Spray pistols; Apparatus for discharge
- B05B7/04—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge
- B05B7/0416—Spray pistols; Apparatus for discharge with arrangements for mixing liquids or other fluent materials before discharge with arrangements for mixing one gas and one liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/10—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in the form of a fine jet, e.g. for use in wind-screen washers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
Landscapes
- Nozzles (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007076695A JP5022074B2 (ja) | 2006-05-02 | 2007-03-23 | 二流体ノズルとそれを用いた噴霧方法 |
TW096114940A TWI369252B (en) | 2006-05-02 | 2007-04-27 | Two fluid nozzle and method for spraying mist using the two fluid nozzle |
CN2007101023585A CN101066539B (zh) | 2006-05-02 | 2007-04-30 | 双流体喷嘴和采用该喷嘴的喷雾方法 |
KR1020070042308A KR101363186B1 (ko) | 2006-05-02 | 2007-05-01 | 이류체 노즐과 그를 이용한 분무 방법 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006128572 | 2006-05-02 | ||
JP2006128572 | 2006-05-02 | ||
JP2007076695A JP5022074B2 (ja) | 2006-05-02 | 2007-03-23 | 二流体ノズルとそれを用いた噴霧方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007319853A JP2007319853A (ja) | 2007-12-13 |
JP5022074B2 true JP5022074B2 (ja) | 2012-09-12 |
Family
ID=38853082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007076695A Active JP5022074B2 (ja) | 2006-05-02 | 2007-03-23 | 二流体ノズルとそれを用いた噴霧方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5022074B2 (zh) |
KR (1) | KR101363186B1 (zh) |
CN (1) | CN101066539B (zh) |
TW (1) | TWI369252B (zh) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200948480A (en) * | 2008-05-20 | 2009-12-01 | United Benefit Inc | Fluid jetting device |
KR101049150B1 (ko) * | 2008-09-25 | 2011-07-14 | 두원공과대학산학협력단 | 친환경 방제 시스템 |
KR101067737B1 (ko) * | 2009-07-29 | 2011-09-28 | 김현희 | 평판 디스플레이 세정용 이류체 분사장치 |
JP2012174741A (ja) * | 2011-02-17 | 2012-09-10 | Aqua Science Kk | 複連ノズル及び当該複連ノズルを備える基板処理装置 |
CN102528855B (zh) * | 2012-01-16 | 2014-09-24 | 中国林业科学研究院木材工业研究所 | 一种木竹材多锯片锯切冷却*** |
KR101376641B1 (ko) | 2012-05-11 | 2014-03-25 | 이원중 | 멀티-나이프형 분사노즐 장치 |
KR101426267B1 (ko) * | 2012-10-17 | 2014-08-05 | 청진테크 주식회사 | 다상유체 분사체 |
KR101394264B1 (ko) * | 2012-10-25 | 2014-05-14 | 주식회사 디엠에스 | 유체분사장치 |
KR101397384B1 (ko) * | 2013-03-28 | 2014-05-20 | 엔젯 주식회사 | 스프레이 노즐 및 이를 이용한 코팅 시스템 |
KR101506456B1 (ko) * | 2014-02-17 | 2015-03-27 | 엔젯 주식회사 | 균일한 코팅이 가능한 코팅 시스템 |
CN104061213A (zh) * | 2014-05-18 | 2014-09-24 | 胡千桥 | 一种球状气体、蒸汽、液体粒子流生成技术 |
JP6447115B2 (ja) * | 2014-12-25 | 2019-01-09 | 株式会社デンソー | ウォッシャノズル |
KR101690189B1 (ko) * | 2016-03-23 | 2016-12-27 | (주) 세명유리 | 거울 유리의 엣지 자동 방수코팅 장치 |
KR102629939B1 (ko) * | 2016-10-19 | 2024-01-30 | 주식회사 케이씨텍 | 이산화탄소 분사노즐 |
KR102629956B1 (ko) * | 2016-11-01 | 2024-01-30 | 주식회사 케이씨텍 | 이산화탄소 분사노즐 |
JP2018089548A (ja) * | 2016-11-30 | 2018-06-14 | 独立行政法人国立高等専門学校機構 | 洗浄機のノズル機構 |
US10758875B2 (en) * | 2016-12-30 | 2020-09-01 | Semes Co., Ltd. | Liquid supply unit, substrate treating apparatus, and method for removing bubbles |
TWI631991B (zh) * | 2017-03-14 | 2018-08-11 | 泓辰電池材料有限公司 | Two fluid nozzle |
CN108115106B (zh) * | 2018-01-25 | 2024-05-17 | 温岭立骅机械有限公司 | 压铸机及其自动喷涂装置 |
CN108311307B (zh) * | 2018-02-11 | 2024-02-23 | 佛山华派机械科技有限公司 | 一种板状叠加式多孔喷头 |
CN109046813B (zh) * | 2018-10-24 | 2023-12-29 | 上海麦满自动化设备有限公司 | 一种减少产品表面积水且稳定性高的二氧化碳清洗喷嘴 |
JP6721025B2 (ja) * | 2018-11-20 | 2020-07-08 | 株式会社デンソー | 車両用ワイパ |
CN109590265A (zh) * | 2018-12-26 | 2019-04-09 | 苏州晶洲装备科技有限公司 | 一种可调节的双流体平板清洗结构 |
CN111940159B (zh) * | 2019-05-14 | 2023-05-26 | 沈阳芯源微电子设备股份有限公司 | 一种晶圆表面颗粒清洗双旋喷嘴 |
KR102186115B1 (ko) | 2020-02-18 | 2020-12-03 | 강범용 | 이류체 분무장치 |
CN111921955B (zh) * | 2020-08-10 | 2021-12-10 | 哈尔滨工业大学 | 一种风刀装置 |
CN114308822B (zh) * | 2021-12-28 | 2024-02-13 | 西安奕斯伟材料科技股份有限公司 | 一种二流体喷嘴及清洗装置 |
KR20240067405A (ko) | 2022-11-09 | 2024-05-17 | 가천대학교 산학협력단 | 스핀들휠 세정용 이류체 노즐 장치 및 이를 포함하는 스핀들휠 세정 시스템 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS617812Y2 (zh) * | 1979-04-05 | 1986-03-10 | ||
CN2253252Y (zh) * | 1995-12-11 | 1997-04-30 | 张树峰 | 多功能混合器 |
JP4276311B2 (ja) * | 1998-10-02 | 2009-06-10 | 株式会社いけうち | 二流体ノズル |
US6322003B1 (en) * | 1999-06-11 | 2001-11-27 | Spraying Systems Co. | Air assisted spray nozzle |
US6267301B1 (en) * | 1999-06-11 | 2001-07-31 | Spraying Systems Co. | Air atomizing nozzle assembly with improved air cap |
JP3540713B2 (ja) * | 2000-04-24 | 2004-07-07 | マコー株式会社 | ノズル体 |
JP2002159889A (ja) * | 2000-11-24 | 2002-06-04 | Ikeuchi:Kk | 二流体ノズル |
JP2002239436A (ja) * | 2001-02-15 | 2002-08-27 | Toray Ind Inc | 塗布装置 |
JP4168603B2 (ja) * | 2001-05-31 | 2008-10-22 | 凸版印刷株式会社 | 洗浄装置付大型塗布装置 |
CN2494235Y (zh) * | 2001-06-01 | 2002-06-05 | 江都市气动附件厂 | 新型水气雾化喷嘴 |
JP3544650B2 (ja) * | 2001-06-19 | 2004-07-21 | 東海合金工業株式会社 | 気体−液体吹きスリットノズル |
JP3856210B2 (ja) * | 2002-01-21 | 2006-12-13 | 株式会社いけうち | ノズル |
KR100641026B1 (ko) * | 2002-12-03 | 2006-11-02 | 주식회사 케이씨텍 | 슬릿형 노즐을 가지는 혼합 유체 분사 기구 |
JP4649214B2 (ja) * | 2005-01-12 | 2011-03-09 | 株式会社いけうち | 二流体用スリットノズル |
-
2007
- 2007-03-23 JP JP2007076695A patent/JP5022074B2/ja active Active
- 2007-04-27 TW TW096114940A patent/TWI369252B/zh active
- 2007-04-30 CN CN2007101023585A patent/CN101066539B/zh active Active
- 2007-05-01 KR KR1020070042308A patent/KR101363186B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
TW200800410A (en) | 2008-01-01 |
KR101363186B1 (ko) | 2014-02-13 |
CN101066539A (zh) | 2007-11-07 |
JP2007319853A (ja) | 2007-12-13 |
KR20070107597A (ko) | 2007-11-07 |
CN101066539B (zh) | 2011-09-21 |
TWI369252B (en) | 2012-08-01 |
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