JP5015176B2 - 周波数差マルチラテラル干渉法を通じて波面を解析する方法 - Google Patents
周波数差マルチラテラル干渉法を通じて波面を解析する方法 Download PDFInfo
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- JP5015176B2 JP5015176B2 JP2008554825A JP2008554825A JP5015176B2 JP 5015176 B2 JP5015176 B2 JP 5015176B2 JP 2008554825 A JP2008554825 A JP 2008554825A JP 2008554825 A JP2008554825 A JP 2008554825A JP 5015176 B2 JP5015176 B2 JP 5015176B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0226—Fibres
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Description
a)2次元メッシュを有する回折格子(GR)は、少なくとも2つの回折次数のためビームが異なるサブビームに回折されるようにするために1つの平面(Pc)内でビームの経路上に配置され、
b)格子(GR)の平面(PC)に平行な平面(PS)において、各々のインターフェログラムが異なる色で実現される、少なくとも1つのペアの等シフト(iso−shifted)サブビームの干渉によって形成される少なくとも2つのインターフェログラムが生成されて観測され、
c)異なる色のこれらの少なくとも2つのインターフェログラムは、波面を解析するために少なくとも1つの増加率をこれらのインターフェログラムから導き出すために処理される。
Claims (7)
- 光ビームの分割された波面を解析する方法であって、前記分割された波面は、高さhのレベル差を有する少なくとも2つの部分を備えた波面であり、
a)2次元メッシュを有する回折格子(GR)を、前記ビームの光路上で1つの平面(PC)内に配置して、回折次数によって前記ビームが異なるサブビーム(R1、R2)に回折されるようにし、
b)前記回折格子を、前記分割された波面を備えると共にそれぞれ異なる色を備えた少なくとも2つの光ビームで連続的に照明し、前記回折格子(GR)の平面(P C )に平行な観測平面(PS)内に、少なくとも2つのサブビーム(R1、R2)の干渉によって形成された少なくとも2つのインターフェログラムを観測し、各インターフェログラムは、異なる色により実現されていると共に、前記2つのサブビーム(R1、R2)によって規定された幅Dを備えた中央領域を有しており、
c)前記中央領域における前記2つのインターフェログラム間の相対的空間平行移動(s)を測定し、
d)前記分割された波面を解析するために少なくとも1つの増加率(h/D)を前記相対的空間平行移動(s)に依存して導出する、方法。 - 前記2つのインターフェログラム間の相対的空間平行移動に依存する少なくとも1つの増加率の導出は、
第2の色を備えたインターフェログラムから形成されたキャリア信号について、第1の色を備えたインターフェログラムから形成された被変調信号を復調することで、前記2つのインターフェログラムの局所位相の比較により変調信号を形成する少なくとも1つの増加率を導出する、
請求項1に記載の方法。 - 操作d)は、少なくとも2つの異なる方向において増加率を導出し、当該増加率を、前記分割された波面を再構築するために結合すること含む、請求項1に記載の方法。
- 操作a)は、前記回折格子(GR)を介して、遠隔フィールドにおけるサブビームの観測が二等辺三角形にしたがって位置決めされる3つのスポットを形成する3つのサブビームを抽出することを含む、請求項1〜3のいずれか一項に記載の方法。
- 操作a)は、前記回折格子(GR)を介して、遠隔フィールドにおけるサブビームの観測が矩形にしたがって位置決めされる4つのスポットを形成する4つのサブビームを抽出することを含む、請求項1〜3のいずれか一項に記載の方法。
- 操作b)において、前記観測平面(PS)はすべて、1つの共通の観測平面に混同される、請求項1〜5のいずれか一項に記載の方法。
- 操作b)は、前記共通の観測平面(PS)を、解析されるべき分割された波面と光学的に共役にすることを含む、請求項6に記載の方法。
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Application Number | Priority Date | Filing Date | Title |
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FR0601362 | 2006-02-16 | ||
FR0601362A FR2897426B1 (fr) | 2006-02-16 | 2006-02-16 | Procede d'analyse de surface d'onde par interferometrie multilaterale a difference de frequences |
PCT/FR2007/050810 WO2007093748A2 (fr) | 2006-02-16 | 2007-02-15 | Procede d'analyse de surface d'onde par interferometrie multilaterale a difference de frequence |
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JP2009526984A JP2009526984A (ja) | 2009-07-23 |
JP5015176B2 true JP5015176B2 (ja) | 2012-08-29 |
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US (1) | US7864340B2 (ja) |
EP (1) | EP1984716B1 (ja) |
JP (1) | JP5015176B2 (ja) |
KR (1) | KR101066856B1 (ja) |
CN (1) | CN101384888B (ja) |
CA (1) | CA2641943C (ja) |
FR (1) | FR2897426B1 (ja) |
WO (1) | WO2007093748A2 (ja) |
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DE102005041203A1 (de) * | 2005-08-31 | 2007-03-01 | Carl Zeiss Sms Gmbh | Vorrichtung und Verfahren zur interferometrischen Messung von Phasenmasken |
FR2930336B1 (fr) | 2008-04-22 | 2010-05-14 | Onera (Off Nat Aerospatiale) | Procede, reseau de phase et dispositif d'analyse de surface d'onde d'un faisceau de lumiere |
KR102148198B1 (ko) * | 2012-05-30 | 2020-08-26 | 가부시키가이샤 니콘 | 파면 계측 방법 및 장치, 및 노광 방법 및 장치 |
FR3022346B1 (fr) * | 2014-06-16 | 2022-10-07 | Commissariat Energie Atomique | Dispositif et procede de caracterisation d'un faisceau de lumiere |
FR3026181B1 (fr) * | 2014-09-19 | 2017-11-03 | Onera (Office Nat D'etudes Et De Rech Aerospatiales) | Analyseur de surface d'onde et procede pour determiner des ecarts de piston et de tilt existant entre plusieurs faisceaux lumineux |
CN104330034A (zh) * | 2014-10-23 | 2015-02-04 | 南京信息工程大学 | 台阶表面高度测量的单光栅干涉仪及台阶表面高度测量方法 |
US10908021B2 (en) | 2016-10-12 | 2021-02-02 | Nec Corporation | Spectroscopic device and imaging device |
US10401704B2 (en) * | 2016-11-11 | 2019-09-03 | Asml Netherlands B.V. | Compensating for a physical effect in an optical system |
CN108279068B (zh) * | 2018-01-16 | 2020-09-25 | 南京理工大学 | 基于四波横向剪切干涉的激光光束质量动态测量装置 |
JP6539812B1 (ja) * | 2018-07-18 | 2019-07-10 | ナルックス株式会社 | レンズの検査方法 |
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US4832489A (en) * | 1986-03-19 | 1989-05-23 | Wyko Corporation | Two-wavelength phase-shifting interferometer and method |
FR2682761B1 (fr) | 1991-10-18 | 1994-05-06 | Onera | Procede et dispositif pour l'analyse d'une surface d'onde lumineuse. |
FR2712978B1 (fr) | 1993-11-24 | 1996-02-02 | Onera (Off Nat Aerospatiale) | Interféromètre optique achromatique, du type à décalage trilatéral. |
US5671050A (en) * | 1994-11-07 | 1997-09-23 | Zygo Corporation | Method and apparatus for profiling surfaces using diffracative optics |
US5995224A (en) * | 1998-01-28 | 1999-11-30 | Zygo Corporation | Full-field geometrically-desensitized interferometer employing diffractive and conventional optics |
US6072581A (en) * | 1998-10-30 | 2000-06-06 | Zygo Corporation | Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability |
FR2795175B1 (fr) * | 1999-06-17 | 2001-07-27 | Onera (Off Nat Aerospatiale) | Interferometre optique achromatique, du type a sensibilite continument reglable |
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JP3511097B2 (ja) * | 2001-09-04 | 2004-03-29 | 金沢大学長 | 光干渉を用いた形状測定方法および形状測定装置 |
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Publication number | Publication date |
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EP1984716B1 (fr) | 2017-09-06 |
EP1984716A2 (fr) | 2008-10-29 |
JP2009526984A (ja) | 2009-07-23 |
CA2641943C (fr) | 2016-03-29 |
KR101066856B1 (ko) | 2011-09-26 |
US20090051928A1 (en) | 2009-02-26 |
KR20080097465A (ko) | 2008-11-05 |
WO2007093748A3 (fr) | 2007-10-11 |
FR2897426B1 (fr) | 2012-07-27 |
CN101384888A (zh) | 2009-03-11 |
FR2897426A1 (fr) | 2007-08-17 |
CN101384888B (zh) | 2012-10-03 |
WO2007093748A2 (fr) | 2007-08-23 |
US7864340B2 (en) | 2011-01-04 |
CA2641943A1 (fr) | 2007-08-23 |
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