JP5013315B2 - Illumination light source device, liquid crystal display device, and projector - Google Patents

Illumination light source device, liquid crystal display device, and projector Download PDF

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JP5013315B2
JP5013315B2 JP2007167186A JP2007167186A JP5013315B2 JP 5013315 B2 JP5013315 B2 JP 5013315B2 JP 2007167186 A JP2007167186 A JP 2007167186A JP 2007167186 A JP2007167186 A JP 2007167186A JP 5013315 B2 JP5013315 B2 JP 5013315B2
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香織 向井
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本発明は、照明光源装置、液晶表示装置、およびプロジェクタに関し、特に液晶表示装置のバックライトやＭＥＭＳを利用したプロジェクタの照明光源に好適な照明光源装置に関するものである。   The present invention relates to an illumination light source device, a liquid crystal display device, and a projector, and more particularly to an illumination light source device suitable for an illumination light source of a projector using a backlight of a liquid crystal display device or a MEMS.

従来、液晶表示パネルを照明するバックライトに、近赤外線反射フィルタやバンドパスフィルタを利用し、斜入射成分を反射するように構成された液晶表示装置が開示されている（特許文献１を参照）。また、従来、一次元ＭＥＭＳ（メムス：Micro-Electro Mechanical Systems）とレーザ光源とを利用したプロジェクタが開示されている（特許文献２を参照）。   Conventionally, there has been disclosed a liquid crystal display device configured to use a near-infrared reflection filter or a bandpass filter as a backlight for illuminating a liquid crystal display panel so as to reflect an oblique incident component (see Patent Document 1). . Conventionally, a projector using a one-dimensional MEMS (Micro-Electro Mechanical Systems) and a laser light source has been disclosed (see Patent Document 2).

米国特許公開２００７／０１４１２７号公報US Patent Publication No. 2007/014127 特開２００４−２０５９０号公報JP 2004-20590 A

液晶表示装置用のバックライトでは、光の利用効率を高めているが、光の出射角を厳密に制御しようと企図するものではない。ちなみに、近年の発光ダイオード（ＬＥＤ）の発展に伴い、白色冷陰極管に代えてＲＧＢ３色のＬＥＤを光源に用いて色特性を向上させた液晶表示装置が開発されている。   In the backlight for the liquid crystal display device, the light use efficiency is enhanced, but it is not intended to strictly control the light emission angle. Incidentally, with the recent development of light emitting diodes (LEDs), liquid crystal display devices having improved color characteristics using RGB three-color LEDs as light sources instead of white cold cathode tubes have been developed.

プロジェクタでは、レーザ光源からの光をシリンドリカルレンズによりライン状に集光して一次元ＭＥＭＳを照明している。この場合、レーザ光に大きな異方性がなければ、照明光束は一次元ＭＥＭＳの長手方向には狭い角度で照射され、短手方向には広い角度で照射される。例えば５００画素程度の一次元ＭＥＭＳを考えると、一次元ＭＥＭＳの縦横比は１：５００程度になり、照明光の入射角の比も５００：１程度になる。   In the projector, the one-dimensional MEMS is illuminated by condensing light from a laser light source in a line shape with a cylindrical lens. In this case, if the laser beam has no large anisotropy, the illumination light beam is irradiated at a narrow angle in the longitudinal direction of the one-dimensional MEMS and at a wide angle in the short direction. For example, considering a one-dimensional MEMS of about 500 pixels, the aspect ratio of the one-dimensional MEMS is about 1: 500, and the ratio of incident angles of illumination light is also about 500: 1.

一次元ＭＥＭＳでは、使用光および不使用光の出射方向を変化させ、不使用光を遮ることにより画像を形成する。したがって、一次元ＭＥＭＳの短手方向について入射光束の角度は狭い方が望ましい。これに対し、シリンドリカルレンズを利用する従来技術では、光源の発光分布が特殊なものでない限り、上述したように一次元ＭＥＭＳの短手方向について広い角度で照明することになるため、非効率的な照明になってしまう。   In the one-dimensional MEMS, an image is formed by changing the emission direction of the used light and the unused light and blocking the unused light. Therefore, it is desirable that the incident light beam has a narrow angle in the short direction of the one-dimensional MEMS. On the other hand, in the conventional technique using a cylindrical lens, unless the light emission distribution of the light source is special, illumination is performed at a wide angle in the short direction of the one-dimensional MEMS as described above, which is inefficient. It becomes lighting.

本発明は、前述の課題に鑑みてなされたものであり、所望形状の出射面から出射角の制限された照明光を供給することのできる照明光源装置を提供することを目的とする。   The present invention has been made in view of the above-described problems, and an object thereof is to provide an illumination light source device that can supply illumination light with a limited exit angle from an exit surface having a desired shape.

前記課題を解決するために、本発明の第１形態では、所定面から光を出射する照明光源装置において、
準単色光を供給する光源と、
前記光源から供給された光を伝播させる導光板とを備え、
前記導光板の前記所定面に対応する出射面には、出射角の制限作用を有する誘電体多層膜が形成されており、
前記誘電体多層膜は、ファブリ−ペロ型の膜構成を有し、前記出射角の大きさに応じて透過波長域が異なり、
前記誘電体多層膜中のスペーサーは、低屈折率の膜物質からなり、
前記スペーサーの使用光に対する屈折率は、前記出射角に対する前記透過波長域の変化の依存性を決定する要因であり、当該屈折率は１．５よりも小さいことを特徴とする照明光源装置を提供する。 In order to solve the above problem, in the first embodiment of the present invention, in an illumination light source device that emits light from a predetermined surface,
A light source that supplies quasi-monochromatic light;
A light guide plate for propagating light supplied from the light source,
On the exit surface corresponding to the predetermined surface of the light guide plate, a dielectric multilayer film having a function of limiting the exit angle is formed ,
The dielectric multilayer film has a Fabry-Perot type film configuration, and a transmission wavelength region varies depending on the size of the emission angle.
The spacer in the dielectric multilayer film is made of a low refractive index film material,
The refractive index of the spacer with respect to the used light is a factor that determines the dependence of the change in the transmission wavelength range on the emission angle, and the refractive index is smaller than 1.5. To do.

本発明の第２形態では、第１形態の照明光源装置と、該照明光源装置により照明される液晶表示パネルとを備えていることを特徴とする液晶表示装置を提供する。   According to a second aspect of the present invention, there is provided a liquid crystal display device comprising the illumination light source device according to the first aspect and a liquid crystal display panel illuminated by the illumination light source device.

本発明の第３形態では、第１形態の照明光源装置と、該照明光源装置により照明されるＭＥＭＳとを備えていることを特徴とするプロジェクタを提供する。   According to a third aspect of the present invention, there is provided a projector including the illumination light source device according to the first aspect and a MEMS illuminated by the illumination light source device.

本発明の照明光源装置では、光源から供給された準単色光を伝播させる導光板の出射面に、バンドパス作用を有する誘電体多層膜を形成している。その結果、本発明の照明光源装置では、バンドパス作用を有する誘電体多層膜の出射角による膜特性の波長シフトの作用により、所望形状の出射面から出射角の制限された照明光を供給することができる。   In the illumination light source device of the present invention, a dielectric multilayer film having a bandpass effect is formed on the exit surface of the light guide plate that propagates the quasi-monochromatic light supplied from the light source. As a result, in the illumination light source device of the present invention, illumination light with a limited emission angle is supplied from the emission surface of a desired shape by the action of wavelength shift of the film characteristics due to the emission angle of the dielectric multilayer film having a bandpass effect. be able to.

以下、具体的な実施形態の説明に先立って、本発明の原理を説明する。本発明の照明光源装置では、導光板の出射面にバンドパス作用を有する誘電体多層膜が形成（コート）され、出射面以外の領域（端面または背面）から準単色光を入射させる。バンドパス作用を有する誘電体多層膜は、次の式（１）に示すような出射角による膜特性の波長シフトを起こす。   Prior to the description of specific embodiments, the principle of the present invention will be described below. In the illumination light source device of the present invention, a dielectric multilayer film having a bandpass function is formed (coated) on the exit surface of the light guide plate, and quasi-monochromatic light is incident from a region (end surface or back surface) other than the exit surface. A dielectric multilayer film having a bandpass action causes a wavelength shift of film characteristics depending on an emission angle as shown in the following formula (1).

Figure 0005013315
Figure 0005013315

式（１）において、θは誘電体多層膜から空気中への光の出射角であり、λθは出射角θでの波長であり、λ0は垂直入射での波長であり、Ｎ*は誘電体多層膜の実効屈折率である。また、空気中への出射角θと、導光板中での誘電体多層膜への入射角θ’との関係は、導光板の屈折率をｎとするとき、次の式（２）で表される。
sinθ＝ｎ×sinθ’ （２） In Equation (1), θ is the emission angle of light from the dielectric multilayer film into the air, λ θ is the wavelength at the emission angle θ, λ 0 is the wavelength at normal incidence, and N * is This is the effective refractive index of the dielectric multilayer film. The relationship between the emission angle θ into the air and the incident angle θ ′ to the dielectric multilayer film in the light guide plate is expressed by the following equation (2), where n is the refractive index of the light guide plate. Is done.
sinθ = n × sinθ ′ (2)

式（１）を参照すると、出射角θが大きくなるほど、透過波長域が短波長側にシフトすることがわかる。このため、導光板に準単色光を入射させると、誘電体多層膜への入射光のうち所定の角度以上の出射角になる光は誘電体多層膜によって反射され、導光板から出射することができない。換言すると、所定の角度よりも小さい出射角になる光のみ出射することができ、誘電体多層膜で反射された光は所定の角度よりも小さい出射角になるまで導光板の内部で反射・散乱を繰り返す。   Referring to Equation (1), it can be seen that the transmission wavelength region shifts to the short wavelength side as the emission angle θ increases. For this reason, when quasi-monochromatic light is incident on the light guide plate, light having an emission angle greater than a predetermined angle out of the incident light on the dielectric multilayer film is reflected by the dielectric multilayer film and can be emitted from the light guide plate. Can not. In other words, only light having an emission angle smaller than a predetermined angle can be emitted, and the light reflected by the dielectric multilayer film is reflected and scattered inside the light guide plate until the emission angle becomes smaller than the predetermined angle. repeat.

その結果、出射面での光量分布が比較的均一になり、しかも所定の角度以下の出射角の光のみが出射面から出射される。出射面の形状は導光板の形状に依存するので、例えば一次元ＭＥＭＳに対応した細長い形状も可能である。このように、本発明の照明光源装置では、バンドパス作用を有する誘電体多層膜の出射角による膜特性の波長シフトの作用により、所望形状の出射面から出射角の制限された照明光を供給することができる。   As a result, the light amount distribution on the exit surface becomes relatively uniform, and only light having an exit angle equal to or less than a predetermined angle is emitted from the exit surface. Since the shape of the exit surface depends on the shape of the light guide plate, for example, an elongated shape corresponding to one-dimensional MEMS is possible. As described above, in the illumination light source device of the present invention, the illumination light whose emission angle is limited is supplied from the emission surface of a desired shape by the action of the wavelength shift of the film characteristic due to the emission angle of the dielectric multilayer film having the bandpass effect. can do.

式（１）を参照すると、実効屈折率Ｎ*が小さい方が、波長シフトの角度依存性は大きくなることがわかる。したがって、出射角θの制御を高精度に行うには、実効屈折率Ｎ*が小さい方が好ましい。一般に、バンドパス作用を有する誘電体多層膜の膜構成は、（ＨＬ）nＨＬＬＨ（ＬＨ）n、または（ＨＬ）nＨＨ（ＬＨ）nである。ここで、Ｈは高屈折率の膜物質を、Ｌは低屈折率の膜物質を表している。光の波長をλとし、膜物質の屈折率をｎとし、膜の物理的な厚さをｈとするとき、膜の光学的な厚さｎ×ｈはλ／４である。 Referring to Equation (1), it can be seen that the angle dependency of the wavelength shift increases as the effective refractive index N * decreases. Therefore, in order to control the exit angle θ with high accuracy, it is preferable that the effective refractive index N * is small. In general, the film configuration of a dielectric multilayer film having a bandpass action is (HL) n HLLH (LH) n or (HL) n HH (LH) n . Here, H represents a film material having a high refractive index, and L represents a film material having a low refractive index. When the wavelength of light is λ, the refractive index of the film material is n, and the physical thickness of the film is h, the optical thickness n × h of the film is λ / 4.

（ＨＬ）nＨＬＬＨ（ＬＨ）nにおいて、（ＨＬ）nＨおよびＨ（ＬＨ）nは反射膜であり、ＬＬはスペーサーである。（ＨＬ）nＨＨ（ＬＨ）nにおいて、（ＨＬ）nおよび（ＬＨ）nは反射膜であり、ＨＨはスペーサーである。すなわち、バンドパス作用を有する誘電体多層膜として、反射膜−スペーサー−反射膜の膜構成を有するファブリ−ペロ型の誘電体多層膜を用いることができる。なお、スペーサーはＬＬやＨＨに限定されることなく、ＬＬＬＬ、ＨＨＨＨなどλ／２の整数倍の光学的な厚さを有するものであれば良い。 In (HL) n HLLH (LH) n , (HL) n H and H (LH) n are reflective films, and LL is a spacer. In (HL) n HH (LH) n , (HL) n and (LH) n are reflective films, and HH is a spacer. That is, a Fabry-Perot dielectric multilayer film having a reflective film-spacer-reflective film structure can be used as the dielectric multilayer film having a bandpass function. The spacer is not limited to LL and HH, and may be any spacer having an optical thickness that is an integral multiple of λ / 2, such as LLLL and HHHH.

式（１）における実効屈折率Ｎ*は膜物質の構成などに依存するが、反射膜−スペーサー−反射膜の膜構成を有するファブリ−ペロ型の誘電体多層膜では、実効屈折率Ｎ*は特にスペーサーの屈折率に大きく影響される。したがって、スペーサーに低屈折率の膜物質Ｌを用いる方が、波長シフトの角度依存性を大きくすることができ、ひいては出射角θの高精度な制御に有利である。具体的には、スペーサーの使用光に対する屈折率は１．５よりも小さいことが好ましい。ちなみに、スペーサーとして使用可能なＭｇＦ2の屈折率は約１．３８であり、ＳｉＯ2の屈折率は約１．４６である。 The effective refractive index N * in the formula (1) depends on the configuration of the film material, but in the Fabry-Perot type dielectric multilayer film having the reflective film-spacer-reflective film structure, the effective refractive index N * is In particular, it is greatly influenced by the refractive index of the spacer. Therefore, the use of the film material L having a low refractive index as the spacer can increase the angle dependency of the wavelength shift, which is advantageous for highly accurate control of the emission angle θ. Specifically, the refractive index of the spacer with respect to the light used is preferably less than 1.5. Incidentally, the refractive index of MgF 2 that can be used as a spacer is about 1.38, and the refractive index of SiO 2 is about 1.46.

バンドパス作用を有する誘電体多層膜の膜構成は、例えば（ＨＬ）nＨＬＬＨ（ＬＨ）nに限られることなく、（ＨＬ）nＨＬＬＨ（ＬＨ）nと（ＨＬ）nＨＬＬＨ（ＬＨ）nとの間に低屈折率の膜物質Ｌを挟んで繰り返したマルチスタックにすれば、誘電体多層膜の透過特性を矩形状にすることができる。また、誘電体多層膜の膜厚や最外層の膜を工夫することにより透過特性を最適化することも可能である。この場合も、スペーサーの屈折率が波長シフトの角度依存性に及ぼす影響が大きい。さらに、スペーサーの膜厚を工夫することにより、複数の波長に対して透過帯域を得ることができる。 The film configuration of the dielectric multilayer film having the bandpass action is not limited to, for example, (HL) n HLLH (LH) n , and (HL) n HLLH (LH) n and (HL) n HLLH (LH) n If the multi-stack is repeated with the low refractive index film material L interposed therebetween, the transmission characteristics of the dielectric multilayer film can be made rectangular. It is also possible to optimize the transmission characteristics by devising the film thickness of the dielectric multilayer film and the outermost film. Also in this case, the influence of the refractive index of the spacer on the angle dependency of the wavelength shift is great. Furthermore, by devising the film thickness of the spacer, a transmission band can be obtained for a plurality of wavelengths.

本発明の実施形態を、添付図面に基づいて説明する。図１は、本発明の第１実施形態にかかる照明光源装置の構成を概略的に示す図である。第１実施形態では、ＭＥＭＳを利用したプロジェクタの照明光源に対して本発明を適用している。第１実施形態の照明光源装置は、準単色光を供給する光源１と、光源１から供給された光を伝播させる導光板（例えばプレート状の光伝播部材）２とを備えている。   Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a diagram schematically showing a configuration of an illumination light source apparatus according to the first embodiment of the present invention. In the first embodiment, the present invention is applied to an illumination light source of a projector using MEMS. The illumination light source device of the first embodiment includes a light source 1 that supplies quasi-monochromatic light, and a light guide plate (for example, a plate-shaped light propagation member) 2 that propagates light supplied from the light source 1.

光源１として、例えば波長が５３２ｎｍの光を出射するレーザ光源を用いることができる。必要な光量に応じて複数の光源を備える場合もあるが、以下、説明を簡単にするために、単一の光源を備える場合について考える。光源１からの光が導光板２の端面（側面）２ａに入射するように、光源１は導光板２の端面２ａに近接して配置されている。導光板２の出射面（光が出射される面）２ｂには、図２に示すような波長特性のバンドパス作用を有する誘電体多層膜３が形成されている。誘電体多層膜３の実効屈折率Ｎ*は、例えば１．６である。 As the light source 1, for example, a laser light source that emits light having a wavelength of 532 nm can be used. Although there are cases where a plurality of light sources are provided depending on the required light quantity, a case where a single light source is provided will be considered below for the sake of simplicity. The light source 1 is disposed close to the end surface 2 a of the light guide plate 2 so that light from the light source 1 enters the end surface (side surface) 2 a of the light guide plate 2. A dielectric multilayer film 3 having a band-pass function with wavelength characteristics as shown in FIG. 2 is formed on the exit surface (surface from which light is emitted) 2 b of the light guide plate 2. The effective refractive index N * of the dielectric multilayer film 3 is, for example, 1.6.

導光板２の端面２ａのうち、光の入射領域以外の領域には、反射膜（不図示）が形成されている。また、端面２ａ以外の他の端面（図２では他の３つの端面のうち、端面２ａと対向する１つの端面だけが図示されている）２ｃにも、反射膜（不図示）が形成されている。導光板２の出射面２ｂと対向する背面２ｄは散乱面とされており、散乱面に反射膜（不図示）が形成されている。これにより、導光板２の背面２ｄは、反射作用および散乱作用を有する。なお、端面２ａの入射領域以外の領域および端面２ｃに、反射作用および散乱作用を持たせることもできる。後述するように、反射膜の反射率が高い程、また光の透過領域が小さい程、光の利用効率は高くなる。   A reflection film (not shown) is formed in a region other than the light incident region in the end surface 2 a of the light guide plate 2. In addition, a reflection film (not shown) is also formed on the other end face other than the end face 2a (in FIG. 2, only one end face facing the end face 2a is shown among the other three end faces) 2c. Yes. The back surface 2d facing the light exit surface 2b of the light guide plate 2 is a scattering surface, and a reflective film (not shown) is formed on the scattering surface. Thereby, the back surface 2d of the light guide plate 2 has a reflecting action and a scattering action. It should be noted that the region other than the incident region of the end surface 2a and the end surface 2c can have a reflecting action and a scattering action. As will be described later, the higher the reflectivity of the reflective film and the smaller the light transmission region, the higher the light utilization efficiency.

誘電体多層膜３の透過率の波長特性を示す図２において、縦軸は光の透過率であり、横軸は光の波長である。また、実線２１は光源１からの光の波長である５３２ｎｍを、破線２２は垂直出射（出射角０度）の立ち下がり波長である５３５．２ｎｍを、参照符号２３は垂直出射の透過率特性を、参照符号２４は１０度出射（出射角１０度）の透過率特性を示している。式（１）によれば、実効屈折率Ｎ*が１．６で且つ垂直出射の立ち下がり波長が５３５．２ｎｍのとき、１０度出射の立ち下がり波長は５３２ｎｍへ波長シフトする。 In FIG. 2 showing the wavelength characteristic of the transmittance of the dielectric multilayer film 3, the vertical axis represents the light transmittance, and the horizontal axis represents the light wavelength. Further, the solid line 21 indicates 532 nm which is the wavelength of the light from the light source 1, the broken line 22 indicates 535.2 nm which is the falling wavelength of the vertical emission (emission angle 0 degree), and the reference numeral 23 indicates the transmission characteristic of the vertical emission. Reference numeral 24 indicates a transmittance characteristic for 10 ° emission (output angle 10 °). According to equation (1), when the effective refractive index N * is 1.6 and the falling wavelength of vertical emission is 535.2 nm, the falling wavelength of 10 ° emission shifts to 532 nm.

したがって、光源１から導光板２の端面２ａに入射した光は、導光板２の内部を伝播して、例えば背面２ｄで反射散乱され、出射面２ｂに入射する。このとき、出射面２ｂへの光の入射角θ’に応じて、ひいては誘電体多層膜３から出射されることになる光の出射角θに応じて、誘電体多層膜３の透過率特性が異なる。具体的には、図２に示すように、垂直出射の場合には、波長が５３２ｎｍの光に対する誘電体多層膜３の透過率は十分に高い。したがって、出射面２ｂに垂直入射した光は、誘電体多層膜３を透過し、導光板２から出射角θ＝０度で出射される。   Therefore, the light incident on the end surface 2a of the light guide plate 2 from the light source 1 propagates through the light guide plate 2, is reflected and scattered by, for example, the back surface 2d, and enters the output surface 2b. At this time, the transmittance characteristic of the dielectric multilayer film 3 depends on the incident angle θ ′ of the light to the emission surface 2b, and consequently the emission angle θ of the light emitted from the dielectric multilayer film 3. Different. Specifically, as shown in FIG. 2, in the case of vertical emission, the transmittance of the dielectric multilayer film 3 with respect to light having a wavelength of 532 nm is sufficiently high. Therefore, the light perpendicularly incident on the emission surface 2 b passes through the dielectric multilayer film 3 and is emitted from the light guide plate 2 at an emission angle θ = 0 degrees.

一方、１０度出射の場合には、波長が５３２ｎｍの光に対する誘電体多層膜３の透過率は垂直出射の場合に比して著しく減少する。したがって、誘電体多層膜３からの出射角θが１０度を超えるような入射角θ’で出射面２ｂへ入射した光は、誘電体多層膜３を透過することなく反射され、背面２ｄに再び入射して反射散乱される。背面２ｄで反射散乱された光は、出射面２ｂに直接入射、あるいは端面２ａの入射領域以外の領域または端面２ｃで反射された後に出射面２ｂに入射する。   On the other hand, in the case of 10 degree emission, the transmittance of the dielectric multilayer film 3 with respect to light having a wavelength of 532 nm is significantly reduced as compared with the case of vertical emission. Therefore, the light incident on the emission surface 2b at an incident angle θ ′ such that the emission angle θ from the dielectric multilayer film 3 exceeds 10 degrees is reflected without passing through the dielectric multilayer film 3 and is again reflected on the back surface 2d. Incident and reflected and scattered. The light reflected and scattered by the back surface 2d is directly incident on the emission surface 2b, or incident on the emission surface 2b after being reflected by a region other than the incidence region of the end surface 2a or the end surface 2c.

このとき、出射角θが１０度以下になるような光は誘電体多層膜３を透過して導光板２から出射されるが、出射角θが１０度を超えるような光は誘電体多層膜３で反射されて背面２ｄへ戻される。こうして、背面２ｄでの反射散乱と出射面２ｂへの入射とを繰り返しながら、出射角θが１０度以下の光だけが誘電体多層膜３を透過して導光板２から出射される。このように、誘電体多層膜３は、図３に示すような出射角依存の透過率特性、すなわち透過率の出射角特性を有することになる。   At this time, light having an emission angle θ of 10 degrees or less is transmitted through the dielectric multilayer film 3 and emitted from the light guide plate 2, but light having an emission angle θ exceeding 10 degrees is emitted from the dielectric multilayer film. 3 is reflected back to the back surface 2d. In this way, only light having an emission angle θ of 10 degrees or less is transmitted through the dielectric multilayer film 3 and emitted from the light guide plate 2 while repeating reflection scattering on the back surface 2d and incidence on the emission surface 2b. As described above, the dielectric multilayer film 3 has an emission angle-dependent transmittance characteristic as shown in FIG. 3, that is, an emission angle characteristic of the transmittance.

以上のように、第１実施形態の照明光源装置では、導光板２の出射面２ｂにコートされた誘電体多層膜３の作用により、例えば１０度以下の出射角になる光のみが導光板２の出射面２ｂから出射され、それ以外の光は１０度以下の出射角になるまで導光板２の内部で反射および散乱を繰り返す。その結果、導光板２の出射面２ｂでの光量分布が比較的均一になり、しかも１０度以下の出射角の光のみが導光板２から制限的に出射される。   As described above, in the illumination light source device according to the first embodiment, only the light having an emission angle of, for example, 10 degrees or less is generated by the action of the dielectric multilayer film 3 coated on the emission surface 2 b of the light guide plate 2. The light emitted from the light exit surface 2b is repeatedly reflected and scattered inside the light guide plate 2 until the other light has an exit angle of 10 degrees or less. As a result, the light amount distribution on the exit surface 2b of the light guide plate 2 becomes relatively uniform, and only light having an exit angle of 10 degrees or less is emitted from the light guide plate 2 in a limited manner.

出射面２ｂの形状は導光板２の形状に依存するので、例えば出射面２ｂに対向して一次元ＭＥＭＳが配置される場合には、一次元ＭＥＭＳに対応した細長い形状の出射面２ｂを実現することも可能である。このように、第１実施形態の照明光源装置では、バンドパス作用を有する誘電体多層膜３の出射角による膜特性の波長シフトの作用により、所望形状の出射面２ｂから出射角の制限された照明光を供給することができる。特に、一次元ＭＥＭＳを照明する場合には、その短手方向について狭い角度で照明することになるので、従来技術に比して効率的な照明を実現することができる。   Since the shape of the emission surface 2b depends on the shape of the light guide plate 2, for example, when a one-dimensional MEMS is arranged facing the emission surface 2b, an elongated emission surface 2b corresponding to the one-dimensional MEMS is realized. It is also possible. As described above, in the illumination light source device according to the first embodiment, the emission angle is limited from the emission surface 2b having a desired shape by the action of wavelength shift of the film characteristic due to the emission angle of the dielectric multilayer film 3 having the bandpass function. Illumination light can be supplied. In particular, when illuminating a one-dimensional MEMS, since the illumination is performed at a narrow angle in the short direction, it is possible to realize illumination that is more efficient than in the related art.

なお、上述の第１実施形態では、光源１を導光板２の端面２ａに近接させて配置し、光源１からの光を導光板２の端面２ａに直接入射させている。しかしながら、これに限定されることなく、例えば図４に示すように、光源１と導光板２の端面２ａとの間の光路中に集光レンズ４を配置する変形例も可能である。図４の変形例では、光源１からの光を集光レンズ４により集光して、導光板２の端面２ａにおける入射領域を小さくすることができるので、光の利用効率を向上させることができる。   In the first embodiment described above, the light source 1 is disposed close to the end surface 2 a of the light guide plate 2, and the light from the light source 1 is directly incident on the end surface 2 a of the light guide plate 2. However, the present invention is not limited to this. For example, as shown in FIG. 4, a modification in which the condenser lens 4 is disposed in the optical path between the light source 1 and the end surface 2 a of the light guide plate 2 is also possible. In the modification of FIG. 4, the light from the light source 1 is condensed by the condenser lens 4 and the incident area on the end surface 2a of the light guide plate 2 can be reduced, so that the light utilization efficiency can be improved. .

また、上述の第１実施形態では、光源１からの光を導光板２の端面（出射面２ｂに隣接する側面）２ａに入射させるエッジライト方式を採用している。しかしながら、これに限定されることなく、例えば図５に示すように、光源１からの光を導光板２の背面２ｄから入射させる変形例も可能である。図５の変形例では、例えば４つの端面２ａ，２ｃに反射膜を形成し、背面２ｄの入射領域以外の領域を散乱面として反射膜を形成することになる。また、図５の変形例において、光源１と導光板２の背面２ｄとの間の光路中に集光レンズを配置することもできる。なお、端面２ａ，２ｃに反射作用および散乱作用を持たせることもできる。   Further, in the first embodiment described above, an edge light system is adopted in which light from the light source 1 is incident on the end surface (side surface adjacent to the exit surface 2b) 2a of the light guide plate 2. However, the present invention is not limited to this, and a modification in which light from the light source 1 is incident from the back surface 2d of the light guide plate 2 as shown in FIG. 5 is also possible. In the modification of FIG. 5, for example, a reflection film is formed on the four end surfaces 2 a and 2 c, and the reflection film is formed using a region other than the incident region on the back surface 2 d as a scattering surface. In the modification of FIG. 5, a condensing lens can be disposed in the optical path between the light source 1 and the back surface 2 d of the light guide plate 2. The end faces 2a and 2c can also have a reflecting action and a scattering action.

図６は、本発明の第２実施形態にかかる照明光源装置の構成を概略的に示す図である。第２実施形態では、液晶表示装置のバックライトに対して本発明を適用している。第２実施形態の照明光源装置は、準単色光を供給する光源１１と、光源１１から供給された光を伝播させる導光板１２とを備えている。光源１１として、例えば波長幅が半値全幅で２０ｎｍ程度のＲＧＢ３色のＬＥＤを用いることができる。   FIG. 6 is a diagram schematically showing a configuration of an illumination light source apparatus according to the second embodiment of the present invention. In the second embodiment, the present invention is applied to the backlight of the liquid crystal display device. The illumination light source device of the second embodiment includes a light source 11 that supplies quasi-monochromatic light and a light guide plate 12 that propagates light supplied from the light source 11. As the light source 11, for example, RGB three-color LEDs having a wavelength width of about 20 nm with a full width at half maximum can be used.

必要な光量に応じて複数の光源を備える場合や、ＲＧＢそれぞれ個別の光源を備える場合もあるが、以下、説明を簡単にするために、単一の光源を備える場合について考える。光源１１からの光が導光板１２の端面１２ａに入射するように、光源１１は導光板１２の端面１２ａに近接して配置されている。必要に応じて、光源１１と導光板１２との間の光路中に集光レンズを付設することもできる。導光板１２の出射面１２ｂには、図７に示すような波長特性のトリプルバンドパス作用を有する誘電体多層膜１３が形成されている。   There may be a case where a plurality of light sources are provided according to a necessary light quantity, or a case where each of R, G, and B is provided with individual light sources. The light source 11 is disposed close to the end surface 12 a of the light guide plate 12 so that light from the light source 11 enters the end surface 12 a of the light guide plate 12. If necessary, a condensing lens can be provided in the optical path between the light source 11 and the light guide plate 12. A dielectric multilayer film 13 having a triple band pass function with wavelength characteristics as shown in FIG. 7 is formed on the emission surface 12 b of the light guide plate 12.

誘電体多層膜１３の実効屈折率Ｎ*は、例えば１．６である。導光板１２の端面１２ａのうち、光の入射領域以外の領域には、反射膜（不図示）が形成されている。また、端面１２ａ以外の他の端面１２ｃにも、反射膜（不図示）が形成されている。導光板１２の出射面１２ｂに対向する背面１２ｄは散乱面とされており、散乱面に反射膜（不図示）が形成されている。なお、端面１２ａの入射領域以外の領域および端面１２ｃに、反射作用および散乱作用を持たせることもできる。 The effective refractive index N * of the dielectric multilayer film 13 is, for example, 1.6. A reflection film (not shown) is formed in a region other than the light incident region in the end surface 12 a of the light guide plate 12. A reflective film (not shown) is also formed on the end face 12c other than the end face 12a. The back surface 12d facing the light exit surface 12b of the light guide plate 12 is a scattering surface, and a reflective film (not shown) is formed on the scattering surface. It should be noted that the region other than the incident region of the end surface 12a and the end surface 12c can have a reflecting action and a scattering action.

図７において、縦軸は光の透過率または光の強度であり、横軸は光の波長である。参照符号７１はＢ（Blue：青）の光に対する透過率特性を、参照符号７２はＧ（Green：緑）の光に対する透過率特性を、参照符号７３はＲ（Red：赤）の光に対する透過率特性を示している。また、参照符号８１はＬＥＤ１１から出射されるＢの光の波長分布を、参照符号８２はＬＥＤ１１から出射されるＧの光の波長分布を、参照符号８３はＬＥＤ１１から出射されるＲの光の波長分布を示している。   In FIG. 7, the vertical axis represents light transmittance or light intensity, and the horizontal axis represents light wavelength. Reference numeral 71 is a transmittance characteristic for light of B (Blue), reference numeral 72 is a transmittance characteristic for light of G (Green), and reference numeral 73 is a transmission characteristic for light of R (Red). The rate characteristic is shown. Reference numeral 81 is a wavelength distribution of B light emitted from the LED 11, reference numeral 82 is a wavelength distribution of G light emitted from the LED 11, and reference numeral 83 is a wavelength of R light emitted from the LED 11. Distribution is shown.

図７に示すように、誘電体多層膜１３の各波長Ｂ，Ｇ，Ｒの光に対する透過波長帯域は、ＬＥＤ１１が出射する各波長光の波長幅の半値全幅である２０ｎｍ程度に設定されている。式（１）によれば、誘電体多層膜１３の実効屈折率Ｎ*が１．６の場合、２０ｎｍの波長シフトが起こるのは出射角θが２５度程度になるときである。したがって、誘電体多層膜１３からの出射角θが例えば２５度を超えるような入射角θ’で出射面１２ｂへ入射した光は、誘電体多層膜１３を透過することなく反射され、背面１２ｄに再び入射して反射散乱される。 As shown in FIG. 7, the transmission wavelength band for each wavelength B, G, R of the dielectric multilayer film 13 is set to about 20 nm which is the full width at half maximum of the wavelength width of each wavelength light emitted from the LED 11. . According to the equation (1), when the effective refractive index N * of the dielectric multilayer film 13 is 1.6, the wavelength shift of 20 nm occurs when the emission angle θ is about 25 degrees. Therefore, the light incident on the output surface 12b at an incident angle θ ′ such that the output angle θ from the dielectric multilayer film 13 exceeds 25 degrees, for example, is reflected without passing through the dielectric multilayer film 13 and reflected on the back surface 12d. It is incident again and reflected and scattered.

背面１２ｄで反射散乱された光は、出射面１２ｂに直接入射、あるいは端面１２ａの入射領域以外の領域または端面１２ｃで反射された後に出射面１２ｂに入射する。このとき、出射角θが２５度以下になるような光は誘電体多層膜１３を透過して導光板１２から出射されるが、出射角θが２５度を超えるような光は誘電体多層膜１３で反射されて背面１２ｄへ戻される。こうして、背面１２ｄでの反射散乱と出射面１２ｂへの入射とを繰り返しながら、出射角θが２５度以下の光だけが誘電体多層膜１３を透過して導光板１２から出射される。   The light reflected and scattered by the back surface 12d is directly incident on the exit surface 12b, or is reflected by the region other than the entrance region of the end surface 12a or the end surface 12c and then enters the exit surface 12b. At this time, light having an emission angle θ of 25 degrees or less is transmitted through the dielectric multilayer film 13 and emitted from the light guide plate 12. However, light having an emission angle θ exceeding 25 degrees is emitted from the dielectric multilayer film. 13 is reflected back to the back surface 12d. In this way, only light having an emission angle θ of 25 degrees or less is transmitted through the dielectric multilayer film 13 and emitted from the light guide plate 12 while repeating reflection scattering on the back surface 12d and incidence on the emission surface 12b.

このように、第２実施形態の照明光源装置では、導光板１２の出射面１２ｂにコートされた誘電体多層膜１３の作用により、例えば２５度以下の出射角になる光のみが導光板１２の出射面１２ｂから出射され、それ以外の光は２５度以下の出射角になるまで導光板１２の内部で反射および散乱を繰り返す。その結果、導光板１２の出射面１２ｂでの光量分布が比較的均一になり、しかも２５度以下の出射角の光のみが導光板１２から制限的に出射される。   As described above, in the illumination light source device according to the second embodiment, only the light having an emission angle of, for example, 25 degrees or less is generated by the action of the dielectric multilayer film 13 coated on the emission surface 12 b of the light guide plate 12. Light other than that emitted from the emission surface 12b is repeatedly reflected and scattered inside the light guide plate 12 until the emission angle is 25 degrees or less. As a result, the light quantity distribution on the exit surface 12b of the light guide plate 12 becomes relatively uniform, and only light having an exit angle of 25 degrees or less is emitted from the light guide plate 12 in a limited manner.

なお、第２実施形態では、図７に示すように、ＬＥＤ１１から出射される光の波長分布が裾をひいた形状を有するので、誘電体多層膜１３の透過率の出射角特性も裾をひいた形状になるが、中心波長の近傍の光に限れば、出射光の角度分布が制限されることになる。ＬＥＤ１１から出射される光の波長幅をさらに狭くすれば、出射角をさらに狭い角度範囲内に制限することも可能である。   In the second embodiment, as shown in FIG. 7, since the wavelength distribution of the light emitted from the LED 11 has a shape with a tail, the emission angle characteristic of the transmittance of the dielectric multilayer film 13 also has a bottom. However, if it is limited to light in the vicinity of the center wavelength, the angular distribution of emitted light is limited. If the wavelength width of the light emitted from the LED 11 is further narrowed, the emission angle can be limited to a narrower angle range.

本発明の第１実施形態にかかる照明光源装置の構成を概略的に示す図である。It is a figure which shows schematically the structure of the illumination light source device concerning 1st Embodiment of this invention. 第１実施形態における誘電体多層膜の透過率の波長特性を示す図である。It is a figure which shows the wavelength characteristic of the transmittance | permeability of the dielectric multilayer film in 1st Embodiment. 第１実施形態における誘電体多層膜の透過率の出射角特性を示す図である。It is a figure which shows the outgoing angle characteristic of the transmittance | permeability of the dielectric multilayer film in 1st Embodiment. 第１実施形態の第１変形例にかかる照明光源装置の構成を概略的に示す図である。It is a figure which shows schematically the structure of the illumination light source device concerning the 1st modification of 1st Embodiment. 第１実施形態の第２変形例にかかる照明光源装置の構成を概略的に示す図である。It is a figure which shows schematically the structure of the illumination light source device concerning the 2nd modification of 1st Embodiment. 本発明の第２実施形態にかかる照明光源装置の構成を概略的に示す図である。It is a figure which shows schematically the structure of the illumination light source device concerning 2nd Embodiment of this invention. 第２実施形態における誘電体多層膜の透過率の波長特性および光源からの光の波長分布を示す図である。It is a figure which shows the wavelength characteristic of the transmittance | permeability of the dielectric multilayer in 2nd Embodiment, and the wavelength distribution of the light from a light source.

符号の説明Explanation of symbols

１，１１ 光源
２，１２ 導光板
２ａ，１２ａ 入射端面
２ｂ，１２ｂ 出射面
２ｄ，１２ｄ 背面
３，１３ バンドパス作用を有する誘電体多層膜
４ 集光レンズ DESCRIPTION OF SYMBOLS 1,11 Light source 2,12 Light-guide plate 2a, 12a Incident end surface 2b, 12b Outgoing surface 2d, 12d Back surface 3,13 Dielectric multilayer film 4 which has a band pass action 4 Condensing lens

Claims (8)

所定面から光を出射する照明光源装置において、
準単色光を供給する光源と、
前記光源から供給された光を伝播させる導光板とを備え、
前記導光板の前記所定面に対応する出射面には、出射角の制限作用を有する誘電体多層膜が形成されており、
前記誘電体多層膜は、ファブリ−ペロ型の膜構成を有し、前記出射角の大きさに応じて透過波長域が異なり、
前記誘電体多層膜中のスペーサーは、低屈折率の膜物質からなり、
前記スペーサーの使用光に対する屈折率は、前記出射角に対する前記透過波長域の変化の依存性を決定する要因であり、当該屈折率は１．５よりも小さいことを特徴とする照明光源装置。 In an illumination light source device that emits light from a predetermined surface,
A light source that supplies quasi-monochromatic light;
A light guide plate for propagating light supplied from the light source,
On the exit surface corresponding to the predetermined surface of the light guide plate, a dielectric multilayer film having a function of limiting the exit angle is formed ,
The dielectric multilayer film has a Fabry-Perot type film configuration, and a transmission wavelength region varies depending on the size of the emission angle.
The spacer in the dielectric multilayer film is made of a low refractive index film material,
The refractive index of the spacer with respect to the used light is a factor that determines the dependence of the change of the transmission wavelength range on the emission angle, and the refractive index is smaller than 1.5 . 前記導光板の外側面のうち、前記光源からの光が入射する入射領域と前記出射面とを除く他の領域には、反射膜が形成されていることを特徴とする請求項１に記載の照明光源装置。 The reflective film is formed in the area | region other than the incident area | region where the light from the said light source injects, and the said output surface among the outer surfaces of the said light-guide plate, The reflective film is formed . Illumination light source device. 前記導光板の前記出射面に対向する背面には、反射作用および散乱作用を有するように散乱面に反射膜が形成されていることを特徴とする請求項２に記載の照明光源装置。 The illumination light source device according to claim 2, wherein a reflection film is formed on the scattering surface so as to have a reflection action and a scattering action on a back surface of the light guide plate facing the emission surface . 前記光源からの光が前記出射面と隣接する端面から入射するように構成されていることを特徴とする請求項１乃至３のいずれか１項に記載の照明光源装置。 4. The illumination light source device according to claim 1, wherein light from the light source is configured to be incident from an end surface adjacent to the emission surface . 5. 前記光源からの光が前記出射面と対向する背面から入射するように構成されていることを特徴とする請求項１乃至３のいずれか１項に記載の照明光源装置。 4. The illumination light source device according to claim 1, wherein light from the light source is configured to be incident from a back surface facing the emission surface . 5. 前記光源と前記導光板との間の光路中に配置された集光レンズを備えていることを特徴とする請求項１乃至５のいずれか１項に記載の照明光源装置。 The illumination light source device according to claim 1, further comprising a condensing lens disposed in an optical path between the light source and the light guide plate . 請求項１乃至６のいずれか１項に記載の照明光源装置と、該照明光源装置により照明される液晶表示パネルとを備えていることを特徴とする液晶表示装置。 A liquid crystal display device comprising: the illumination light source device according to claim 1; and a liquid crystal display panel illuminated by the illumination light source device . 請求項１乃至６のいずれか１項に記載の照明光源装置と、該照明光源装置により照明されるＭＥＭＳとを備えていることを特徴とするプロジェクタ。 A projector comprising: the illumination light source device according to any one of claims 1 to 6; and a MEMS illuminated by the illumination light source device .
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