JP5011993B2 - Thermocompression head load measuring device and method - Google Patents

Thermocompression head load measuring device and method Download PDF

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JP5011993B2
JP5011993B2 JP2006332392A JP2006332392A JP5011993B2 JP 5011993 B2 JP5011993 B2 JP 5011993B2 JP 2006332392 A JP2006332392 A JP 2006332392A JP 2006332392 A JP2006332392 A JP 2006332392A JP 5011993 B2 JP5011993 B2 JP 5011993B2
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load
load cell
thermocompression bonding
bonding head
installation body
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JP2008145254A (en
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真 垂野
英幸 焼山
範之 河西
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Panasonic Corp
Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Description

本発明は、熱圧着装置において圧着時にその圧着部位に作用する荷重を測定する熱圧着ヘッドの荷重測定装置及び方法に関するものである。   The present invention relates to a thermocompression-bonding head load measuring apparatus and method for measuring a load acting on a press-bonded part in a thermocompression bonding apparatus.

例えば、液晶パネルやプラズマディスプレイパネルなどのフラットディスプレイパネルの製造工程において、パネルにＴＣＰ（Ｔａｐｅ Ｃａｒｒｉｅｒ Ｐａｃｋａｇｅ）やＦＰＣ（Ｆｌｅｘｉｂｌｅ Ｐｒｉｎｔｅｄ Ｃｉｒｃｕｉｔ）やＣＯＧ（Ｃｈｉｐ Ｏｎ Ｇｌａｓｓ）などの部品を熱圧着して実装したり、パネルに実装されたＴＣＰやＦＰＣにプリント回路基板を熱圧着することでパネルにプリント回路基板を実装したりする工程があり、それらの工程には熱圧着装置が用いられる。熱圧着装置では、パネルとその上に搭載された部品などの被圧着体を受台で支持した状態で、加圧手段にて加熱手段を備えた熱圧着ヘッドを被圧着体に対して所定の荷重で押し付けることで被圧着体を加熱・加圧し、熱圧着するように構成されている。   For example, in the manufacturing process of flat display panels such as liquid crystal panels and plasma display panels, components such as TCP (Tape Carrier Package), FPC (Flexible Printed Circuit) and COG (Chip On Glass) are mounted on the panel by thermocompression bonding. In addition, there is a process of mounting a printed circuit board on a panel by thermocompression bonding of the printed circuit board to a TCP or FPC mounted on the panel, and a thermocompression bonding apparatus is used for these processes. In a thermocompression bonding apparatus, a thermocompression bonding head provided with heating means by a pressurizing means is attached to a prebonding body in a state in which a pressure bonding means such as a panel and a component mounted thereon is supported by a cradle. The object to be bonded is heated and pressurized by being pressed with a load, and is thermocompression bonded.

ところで、近年は、液晶パネルやプラズマディスプレイパネルの急速な普及に対応するための大量生産と価格低下及び大型化が進んでおり、熱圧着不良による不良箇所の発生は生産性及びコストに対する影響が大変大きいため、熱圧着による接合品質の更なる向上の要望が高まっている。熱圧着の品質を向上するには、加熱温度とともに被圧着体に作用させる荷重を所定値に精度良く制御することが必要となるが、荷重を精度良く制御するためには被圧着体に作用する荷重を測定して加圧手段を精度良く調整設定する必要がある。   By the way, in recent years, mass production, price reduction and size increase in response to the rapid spread of liquid crystal panels and plasma display panels have progressed, and the occurrence of defective parts due to defective thermocompression has a great impact on productivity and cost. Due to the large size, there is an increasing demand for further improvement of the bonding quality by thermocompression bonding. In order to improve the quality of thermocompression bonding, it is necessary to accurately control the load applied to the object to be bonded together with the heating temperature to a predetermined value. To control the load with high accuracy, it acts on the object to be bonded. It is necessary to accurately adjust and set the pressurizing means by measuring the load.

被圧着体に作用する荷重の測定は、被圧着体の品種が変わってその形状や大きさに応じて熱圧着ヘッドを交換した場合や、熱圧着ヘッドは同じでも被圧着体に作用させる荷重が変わる場合は必ず必要となる。さらに、被圧着体の品種や作用させる荷重が変わらなくても、環境温度の変化などによる作動流体の粘度の変化や機構部品の熱伸縮による摩擦力変化などによって被圧着体に作用する荷重が変化することがある一方で、品種によっては荷重精度に対する要求が厳しいことがあるため、生産開始時や、生産中断後の再開時や、生産中でも所定時間間隔毎に、荷重測定を行う必要がある場合がある。   The load acting on the object to be bonded can be measured by changing the type of object to be bonded and replacing the thermocompression bonding head according to its shape and size. It is absolutely necessary if it changes. Furthermore, even if the product type and the load to be applied do not change, the load acting on the object to be bonded changes due to changes in the viscosity of the working fluid due to changes in the environmental temperature, etc., and frictional force changes due to thermal expansion and contraction of mechanical parts. On the other hand, the load accuracy may be severe depending on the product type, so it is necessary to measure the load at the start of production, at the time of resumption after production interruption, or even during production There is.

従来、複数の熱圧着ヘッドを有する熱圧着装置において、上記荷重測定を容易に行えるようにするため、被圧着体を受ける受台と荷重を測定するロードセルとを可動基台上に設置し、受台とロードセルの何れかを熱圧着ヘッドの直下に選択的に位置させることができるようにし、さらにロードセルをガイドに沿って被圧着体の圧着面と同一高さの一定レベルを移動可能に構成し、１つのロードセルにて各熱圧着ヘッドの加圧力を作業性良く、測定できるようにしたものが知られている（例えば、特許文献１参照）。   Conventionally, in a thermocompression bonding apparatus having a plurality of thermocompression bonding heads, in order to facilitate the above-described load measurement, a receiving base for receiving the object to be bonded and a load cell for measuring the load are installed on the movable base. Either the base or the load cell can be selectively positioned directly under the thermocompression bonding head, and the load cell is configured to be movable along a guide at a constant level that is the same height as the crimping surface of the object to be bonded. There is known one in which the pressure applied to each thermocompression bonding head can be measured with a single load cell with good workability (see, for example, Patent Document 1).

また、被圧着体を受ける受台を固定設置してその上方に熱圧着ヘッドを昇降可能に配設し、荷重測定装置を受台と熱圧着ヘッドの間の作業位置と側方に退避した退避位置との間で移動可能に配設し、その荷重測定装置は、ロードセルを収容保持した保持部を一端に設けた収容ブロックを可動台上に昇降可能に支持し、その可動台を駆動装置にて作業位置と退避位置との間で移動駆動するように構成し、さらに保持部に冷却手段を設けたものも知られている（例えば、特許文献２参照）。   In addition, a cradle for receiving the object to be crimped is fixedly installed, and a thermocompression bonding head is disposed so as to be able to move up and down, and the load measuring device is retracted to the working position and side between the cradle and the thermocompression bonding head. The load measuring device supports a receiving block provided at one end with a holding portion that holds and holds the load cell so as to be movable up and down on the movable table, and the movable table is used as a driving device. In addition, there is also known a configuration that is configured to be driven to move between a work position and a retracted position, and further provided with a cooling means in a holding portion (for example, see Patent Document 2).

また、リニアガイドにて基端を昇降可能に支持されたアームの先端部に設けた熱圧着ヘッドを、被圧着体を受ける受台の上部に対向配置し、アームの基端部を加圧シリンダにて昇降駆動可能に構成するとともに加圧シリンダとアームの基端部を結合するジョイント部にロードセルを配設し、圧着荷重を常時監視するようにしたものも知られている（例えば、特許文献３参照）。
特開平９−１６２２４２号公報 特開２００６−１１４６８５号公報 特開２００２−２６０８０５号公報 In addition, a thermocompression bonding head provided at the distal end of the arm supported so that the proximal end of the linear guide can be moved up and down is disposed opposite to the upper part of the receiving base for receiving the object to be bonded, and the proximal end of the arm is a pressure cylinder. It is also known that a load cell is arranged at a joint portion that connects the pressure cylinder and the base end portion of the arm so that the pressure load is constantly monitored (for example, patent document) 3).
JP-A-9-162242 Japanese Patent Laid-Open No. 2006-114685 JP 2002-260805 A

ところが、特許文献１に記載された構成では、可動基台上に受台とロードセルを設けた構成であるため、可動基台を移動し、ガイドに沿ってロードセルを移動することで任意の熱圧着ヘッドによる圧着荷重を容易に測定することができるが、受台が可動基台上に設けられているので、熱圧着ツールと受台の間で高い平行度を確保するのが困難で、均一な圧着の実現が困難であるという問題がある。   However, in the configuration described in Patent Document 1, since the receiving base and the load cell are provided on the movable base, any thermocompression bonding is possible by moving the movable base and moving the load cell along the guide. The pressure load by the head can be easily measured, but since the cradle is provided on the movable base, it is difficult to ensure a high degree of parallelism between the thermocompression tool and the cradle. There is a problem that it is difficult to realize the crimping.

また、特許文献２に記載された構成では、荷重測定装置を移動機構にて作業位置と退避位置との間で移動させるように構成しているので、構成が複雑で設備コストが高くなり、特に例えば液晶パネルの組立ラインのように、ＡＣＦ（異方性導電フィルム）貼付工程、部品の仮圧着工程、１又は複数の本圧着工程などの複数の熱圧着工程に対応して、複数の熱圧着ヘッドが並列して配設されている場合には、各熱圧着ヘッド毎に荷重測定装置とその移動機構を設けることになるため、装置が大型化してさらにコスト高になる。また、荷重測定装置を移動機構によって各熱圧着ヘッドの作業位置に移動させるように構成しても、移動機構が著しく複雑かつ大型化して同様の問題を発生する。また、移動機構にて移動される収容ブロックの一端にロードセルが配置されているので、移動機構の位置決め精度によっては荷重測定時の平行度が十分に確保されず、荷重測定時に収容ブロックや移動機構にこじれが発生し、精度の良い荷重測定ができないという問題もある。   Moreover, in the structure described in patent document 2, since it is comprised so that a load measuring apparatus may be moved between a work position and a retracted position with a moving mechanism, a structure is complicated and an installation cost becomes high, especially. For example, like a liquid crystal panel assembly line, a plurality of thermocompression bonding processes corresponding to a plurality of thermocompression bonding processes such as an ACF (anisotropic conductive film) attaching process, a component temporary crimping process, and one or more final crimping processes. In the case where the heads are arranged in parallel, a load measuring device and its moving mechanism are provided for each thermocompression bonding head, which increases the size of the device and further increases the cost. Even if the load measuring device is configured to be moved to the working position of each thermocompression bonding head by the moving mechanism, the moving mechanism is remarkably complicated and enlarged, and the same problem occurs. In addition, since the load cell is arranged at one end of the storage block that is moved by the movement mechanism, the parallelism at the time of load measurement is not sufficiently ensured depending on the positioning accuracy of the movement mechanism. There is also a problem that the twisting occurs and load measurement with high accuracy cannot be performed.

また、特許文献３に記載された構成では、加圧シリンダと熱圧着ヘッドとの間の加圧力伝達経路上にロードセルを配置しているので、圧着荷重を常時測定・監視することができるが、ロードセルが熱圧着ヘッドの軸線から遠く離れて配置されているので、熱圧着ヘッドによる加圧荷重とロードセルによる検出荷重との間にずれが発生するのを避けることができず、高精度の荷重測定ができないという問題がある。一方、ロードセルを熱圧着ヘッドの軸線上の近傍に配置した場合には、断熱材を介在させたとしても、４００℃にも達することがある熱圧着ヘッドから常時伝熱されることによって、許容温度が−１０℃〜８０℃のロードセルが熱損傷してしまったり、精度の良い荷重測定ができなくなるという問題がある。また、各熱圧着ヘッド毎に荷重測定装置を配設しているので、複数の熱圧着ヘッドを有する場合には装置コストが高くなるという問題もある。   In the configuration described in Patent Document 3, since the load cell is arranged on the pressure transmission path between the pressure cylinder and the thermocompression bonding head, the pressure bonding load can be constantly measured and monitored. Since the load cell is located far from the axis of the thermocompression bonding head, it is not possible to avoid a deviation between the pressurization load by the thermocompression bonding head and the detection load by the load cell. There is a problem that can not be. On the other hand, when the load cell is arranged in the vicinity of the axis of the thermocompression bonding head, even if a heat insulating material is interposed, the allowable temperature is increased by constantly transferring heat from the thermocompression bonding head that can reach 400 ° C. There is a problem that a load cell of −10 ° C. to 80 ° C. is thermally damaged, and accurate load measurement cannot be performed. In addition, since a load measuring device is provided for each thermocompression bonding head, there is a problem that the apparatus cost increases when a plurality of thermocompression bonding heads are provided.

本発明は、上記従来の問題に鑑み、高精度の荷重測定を容易に行うことができかつロードセルに熱損傷を生じる恐れがなく、しかも装置構成が簡単でコスト低下を図ることができ、複数の熱圧着ヘッドを有している場合にもコスト増加なしで対応できる熱圧着ヘッドの荷重測定装置及び方法を提供することを目的とする。   In view of the above-described conventional problems, the present invention can easily perform high-precision load measurement, does not cause thermal damage to the load cell, has a simple apparatus configuration, and can reduce costs. An object of the present invention is to provide a thermocompression-bonding head load measuring apparatus and method that can cope with a thermocompression-bonding head without increasing the cost.

本発明の熱圧着ヘッドの荷重測定装置は、被圧着体を受ける受台上に載置して設置する設置体と、ロードセルを収容配置した収容ブロックと、収容ブロックを設置体上に互いに当接可能に浮上させる浮上手段とを備えたものである。   The load measuring device for a thermocompression bonding head according to the present invention includes an installation body that is placed and placed on a cradle for receiving an object to be bonded, an accommodation block that houses and arranges a load cell, and an accommodation block that abuts on the installation body And levitation means for levitation as possible.

この構成によれば、受台上に熱圧着ヘッドの軸線上の直下にロードセルが位置するように設置体を載置するだけで、荷重測定装置を容易かつ熱圧着ヘッド及び受台との平行度を確保して適正に設置することができ、その設置状態ではロードセルの収容ブロックが設置体から浮上しているので、受台が先行する熱圧着動作によって温度上昇しているため、若しくは受台に加熱手段が設けられて高温状態になっているために、載置した設置体が時間経過とともにある程度温度上昇したとしても、収容ブロック及びロードセルの温度上昇を抑制することができる。その後、熱圧着ヘッドを下降させて加圧動作を行うと、収容ブロックが設置体に当接し、ロードセルに熱圧着ヘッドと同軸状態で加圧力が作用するため、ロードセルによって高精度に荷重を測定することができる。その際に、高温の熱圧着ヘッドからロードセルに熱が伝達され、また温度上昇した設置体から収容ブロックに熱が伝達されるが、荷重測定時間は数秒程度の短時間であり、上記のようにその前にロードセルが温度上昇していないので、測定中にロードセルが熱損傷するほど温度上昇することはなく高精度の荷重測定ができ、その測定後に熱圧着ヘッドが上昇することで、収容ブロック及びロードセルが、熱圧着ヘッド及び設置体から離間するので、加熱が停止されて温度が低下する。かくして、高精度の荷重測定を容易に行うことができかつロードセルに熱損傷を生じる恐れがなく、しかも荷重測定装置の構成が簡単であるためコスト低下を図ることができる。また、複数の熱圧着ヘッドを有している場合でも、この荷重測定装置を対向する受台上に上記のように設置することで、コスト増加なしで対応することができる。   According to this configuration, the load measuring device can be easily and parallelized with the thermocompression bonding head and the cradle simply by placing the installation body on the cradle so that the load cell is positioned immediately below the axis of the thermocompression bonding head. Since the load cell storage block is lifted from the installation body in the installed state, the temperature of the cradle rises due to the preceding thermocompression bonding operation, or on the cradle. Since the heating means is provided and is in a high temperature state, even if the temperature of the placed installation body rises to some extent with the passage of time, the temperature rise of the housing block and the load cell can be suppressed. Thereafter, when the pressure bonding operation is performed by lowering the thermocompression bonding head, the accommodation block comes into contact with the installation body, and pressure is applied to the load cell in a state of being coaxial with the thermocompression bonding head, so the load cell is measured with high accuracy. be able to. At that time, heat is transferred from the high-temperature thermocompression bonding head to the load cell, and heat is transferred from the installation body whose temperature has risen to the housing block, but the load measurement time is a short time of about several seconds, as described above. Since the temperature of the load cell has not risen before that, the load cell will not rise to the extent that the load cell is thermally damaged during measurement, and high-accuracy load measurement can be performed. Since the load cell is separated from the thermocompression bonding head and the installation body, the heating is stopped and the temperature is lowered. Thus, highly accurate load measurement can be easily performed, there is no risk of thermal damage to the load cell, and the cost can be reduced because the configuration of the load measuring device is simple. Further, even when a plurality of thermocompression bonding heads are provided, this load measuring device can be dealt with without an increase in cost by installing the load measuring device on the opposing cradle as described above.

また、ロードセルの近傍と、ロードセルと荷重伝達断熱部材との接触部と、設置体と収容ブロックの間の少なくとも１箇所を冷却する冷却手段を設けると、ロードセル自体又は熱伝達部位を積極的に冷却することができ、さらに確実にロードセルの熱損傷を防止できる。なお、冷却手段として、ペルチェ素子などのその他の手段を用いることもできる。   Also, if the cooling means for cooling the vicinity of the load cell, the contact portion between the load cell and the load transfer heat insulating member, and at least one place between the installation body and the housing block is provided, the load cell itself or the heat transfer portion is actively cooled. It is possible to prevent thermal damage of the load cell more reliably. It should be noted that other means such as a Peltier element can be used as the cooling means.

また、冷却手段は、設置体に作業者が把持するように設けられた把持部を通して受台側に向けて冷却風を吹き出す冷却風吹出手段からなると、簡単な構成にて効果的に冷却することができる。   In addition, when the cooling means is composed of cooling air blowing means that blows cooling air toward the cradle through a gripping part provided so that an operator grips the installation body, the cooling means can be effectively cooled with a simple configuration. Can do.

また、ロードセルの近傍に温度検出手段を配設し、検出温度が一定温度以上になると警報信号を発する手段を設けると、万一ロードセルの近傍の温度が一定温度以上になった時には検出できるので、例えば直ちに熱圧着ヘッドを上昇させるとともに、警報音を発して作業者が受台から荷重測定装置を取り外すようにする等、適切に対処することでロードセルの熱損傷を防止することができる。   In addition, if a temperature detection means is provided in the vicinity of the load cell and a means for issuing an alarm signal when the detected temperature exceeds a certain temperature, it can be detected when the temperature in the vicinity of the load cell exceeds a certain temperature. For example, the thermal damage of the load cell can be prevented by appropriately taking measures such as raising the thermocompression bonding head immediately and generating an alarm sound so that the operator removes the load measuring device from the cradle.

また、本発明の熱圧着ヘッドの荷重測定方法は、昇降駆動される熱圧着ヘッドの直下に固定設置されて被圧着体を受ける受台の上に、ロードセルを収容配置した収容ブロックを設置体に当接可能に浮上させて配設した荷重測定装置の設置体を載置して設置し、また収納ブロックの上面にはロードセル上に接するように荷重伝達断熱部材を取付け、この荷重伝達断熱部材を介して熱圧着ヘッドにてロードセルを押圧し、収容ブロックを設置体に当接させてロードセルに作用する加圧力を測定するものである。 The load measuring method of the thermocompression bonding head according to the present invention includes a housing block in which a load cell is housed and disposed on a receiving base that is fixedly installed directly below a thermocompression head that is driven up and down and receives a body to be crimped. An installation body of a load measuring device arranged so as to be able to come into contact is placed and installed, and a load transmission heat insulating member is attached to the upper surface of the storage block so as to be in contact with the load cell. The load cell is pressed by a thermocompression bonding head, and the pressure applied to the load cell is measured by bringing the housing block into contact with the installation body.

この構成によれば、上記のように高精度の荷重測定を容易に行うことができかつロードセルに熱損傷を生じる恐れがなく、また複数の熱圧着ヘッドを有している場合でも、この荷重測定装置を対向する受台上に上記のように設置することで、コスト増加なしで対応することができる。   According to this configuration, load measurement with high accuracy can be easily performed as described above, there is no risk of thermal damage to the load cell, and this load measurement is possible even when a plurality of thermocompression bonding heads are provided. By installing the apparatus on the opposite cradle as described above, it is possible to cope with the cost increase.

また、荷重測定装置を受台の上に載置して設置した時には、ロードセルの近傍と、ロードセルと荷重伝達断熱部材との接触部と、設置体と収容ブロックの間の少なくとも１箇所に対して、設置体に作業者が把持するように設けられた把持部を通して冷風を吹き出して冷却すると、ロードセル自体又は熱伝達部位を積極的に冷却することができ、さらに確実にロードセルの熱損傷を防止できる。 Further, when the load measuring device is placed on the cradle and installed, it is at least one place between the vicinity of the load cell, the contact portion between the load cell and the load transmission heat insulating member, and the installation body and the accommodation block . When the cooling air is blown out and cooled through the gripping part provided for the operator to grip the installation body , the load cell itself or the heat transfer site can be positively cooled, and the heat damage of the load cell can be prevented more reliably. .

また、ロードセルの近傍の温度を検出し、検出温度が一定温度以上になると発せられる警報信号に基づいて、警報音の発生と熱圧着ヘッドの上昇の少なくとも何れか一方を行うと、万一ロードセルの近傍の温度が一定温度以上になった時に適切に対処することでロードセルの熱損傷を防止することができる。   Also, if the temperature in the vicinity of the load cell is detected and at least one of the generation of an alarm sound and the rise of the thermocompression bonding head is performed based on an alarm signal that is issued when the detected temperature exceeds a certain temperature, It is possible to prevent thermal damage to the load cell by appropriately taking action when the temperature in the vicinity exceeds a certain temperature.

本発明の熱圧着ヘッドの荷重測定装置及び方法によれば、熱圧着ヘッドの軸線上の直下にロードセルが位置するように受台上に設置体を載置するだけで、容易かつ適正に荷重測定装置を設置することができ、かつその設置状態でロードセルは設置体から浮上しているので殆ど温度上昇することはなく、その後熱圧着ヘッドを下降させて加圧動作を行うとロードセルに熱圧着ヘッドと同軸上での位置構成で加圧力が作用するため高精度に荷重を測定することができ、さらに荷重測定時間は短時間であるため、測定中にロードセルが熱損傷するほど温度上昇することはなく、高精度の荷重測定ができる。   According to the load measuring apparatus and method of the thermocompression bonding head of the present invention, it is possible to easily and appropriately measure the load simply by placing the installation body on the cradle so that the load cell is positioned immediately below the axis of the thermocompression bonding head. The device can be installed, and the load cell floats from the installation body in the installed state, so the temperature hardly rises. After that, when the thermocompression head is lowered and a pressure operation is performed, the thermocompression head is applied to the load cell. The load can be measured with high accuracy because the applied force is applied in a coaxial position configuration, and the load measurement time is short, so the temperature rises as the load cell is thermally damaged during measurement. It is possible to measure the load with high accuracy.

以下、本発明の熱圧着ヘッドの荷重測定装置及び方法の一実施形態について、図１〜図６を参照しながら説明する。   Hereinafter, an embodiment of a load measuring apparatus and method for a thermocompression bonding head according to the present invention will be described with reference to FIGS.

本実施形態は、図５に示すように、ガラス基板２にＴＣＰ３などの部品を実装して液晶表示パネル１を製造するものであり、図６（ａ）、（ｂ）に示すように、実装ライン４にガラス基板２を供給することで、まずＡＣＦ貼付装置５にてガラス基板２における互いに隣り合う長辺と短辺に設けられたＴＣＰ３を接合する部位にＡＣＦ９を貼り付けるＡＣＦ貼付工程が行われ、次にＴＣＰ仮圧着装置６にてガラス基板２にＴＣＰ３を仮圧着するＴＣＰ仮圧着工程が行われ、次に第１のＴＣＰ本圧着装置７にてガラス基板２の長辺側のＴＣＰ３を本圧着するＴＣＰ本圧着工程１が行われ、次に第２のＴＣＰ本圧着装置８にてガラス基板２の短辺側のＴＣＰ３を本圧着するＴＣＰ本圧着工程２が行われ、ガラス基板２にＴＣＰ３を実装した液晶表示パネル１が製造されて排出される。   In the present embodiment, as shown in FIG. 5, a liquid crystal display panel 1 is manufactured by mounting components such as TCP3 on a glass substrate 2, and as shown in FIGS. 6 (a) and 6 (b), the mounting is performed. By supplying the glass substrate 2 to the line 4, first, an ACF attaching process is performed in which the ACF attaching device 5 attaches the ACF 9 to a portion where the TCP 3 provided on the long side and the short side adjacent to each other in the glass substrate 2 is joined. Next, a TCP temporary press-bonding process is performed in which the TCP temporary press-bonding device 6 temporarily bonds the TCP 3 to the glass substrate 2, and then the TCP 3 on the long side of the glass substrate 2 is fixed by the first TCP final press-bonding device 7. The TCP main press-bonding process 1 for performing the main press-bonding is performed, and then the TCP main press-bonding process 2 for performing the main press-bonding of the TCP 3 on the short side of the glass substrate 2 is performed by the second TCP final press-bonding apparatus 8. Liquid crystal display with TCP3 Channel 1 is discharged been manufactured.

これらＡＣＦ貼付装置５、ＴＣＰ仮圧着装置６、ＴＣＰ本圧着装置７、８は、基本構成が同一の熱圧着装置１０にて構成されている。熱圧着装置１０の基本構成は、図６（ｂ）に示すように、ガラス基板２を受ける受台１１と、ガラス基板２上に供給されたＡＣＦ９やガラス基板２上に搭載し又は搭載されたＴＣＰ３を加熱・加圧して、貼付や仮圧着や本圧着を行う熱圧着ヘッド１２と、熱圧着ヘッド１２を受台１１に向けて昇降駆動するとともに所定の加圧荷重を負荷する加圧手段１３とを備えている。なお、以下の説明においては、ガラス基板２などの基板とその基板上に搭載されて熱圧着される各種部品とを被圧着体１４と称する。   These ACF sticking device 5, TCP temporary pressure bonding device 6, and TCP main pressure bonding devices 7 and 8 are configured by a thermocompression bonding device 10 having the same basic configuration. As shown in FIG. 6B, the basic configuration of the thermocompression bonding apparatus 10 is mounted on or mounted on a cradle 11 that receives the glass substrate 2, an ACF 9 that is supplied onto the glass substrate 2, and the glass substrate 2. The thermocompression bonding head 12 that heats and pressurizes the TCP 3 to perform pasting, provisional pressure bonding, and main pressure bonding, and the pressing means 13 that drives the thermocompression bonding head 12 up and down toward the cradle 11 and applies a predetermined pressure load. And. In the following description, a substrate such as the glass substrate 2 and various components that are mounted on the substrate and are subjected to thermocompression bonding are referred to as a bonded body 14.

上記熱圧着装置１０の具体構成について、図１を参照して説明する。図１において、熱圧着装置１０のＸ方向両側に、被圧着体１４を搬入・搬出する搬送手段１５（一側のみ図示）が配設されている。熱圧着装置１０の基台１６上には、Ｙ方向一側部に配設されて被圧着体１４の圧着部位を下方から支持する受台１１と、搬入側の搬送手段１５から受け取った被圧着体１４の圧着部位を受台１１上に位置決めし、熱圧着終了後の被圧着体１４を搬出側の搬送手段１５に受け渡す移載装置１７と、受台１１と協働して被圧着体１４の熱圧着を行う圧着ユニット１８とが配設されている。   A specific configuration of the thermocompression bonding apparatus 10 will be described with reference to FIG. In FIG. 1, conveying means 15 (only one side is shown) for carrying in and out the object 14 to be bonded is disposed on both sides in the X direction of the thermocompression bonding apparatus 10. On the base 16 of the thermocompression bonding apparatus 10, a receiving base 11 that is disposed on one side in the Y direction and supports the pressure-bonding portion of the pressure-bonded body 14 from below, and the pressure-bonding received from the carrying means 15 on the carry-in side. A transfer device 17 that positions the crimping portion of the body 14 on the cradle 11 and delivers the body 14 to be transported after the thermocompression bonding to the carrying means 15 on the carry-out side, and the body to be crimped in cooperation with the cradle 11. 14 and a pressure bonding unit 18 for performing heat pressure bonding.

受台１１は、石英やセラミックスからなる受け部材１１ａを台部１１ｂ上に設置して構成されている。移載装置１７は、水平な２方向のＸ方向とＹ方向、上下方向のＺ方向及び垂直軸芯回りのθ方向に移動及び位置決めできるように、Ｙテーブル１７ａと、Ｘテーブル１７ｂと、昇降機構１７ｃと、回転機構１７ｄとを備え、回転機構１７ｄ上に被圧着体１４を吸着保持するよう構成されている。   The cradle 11 is configured by installing a cradle member 11a made of quartz or ceramics on a pedestal part 11b. The transfer device 17 includes a Y table 17a, an X table 17b, and an elevating mechanism so that it can be moved and positioned in two horizontal X and Y directions, an up and down Z direction, and a θ direction around a vertical axis. 17c and a rotation mechanism 17d, and the pressure-bonded body 14 is sucked and held on the rotation mechanism 17d.

圧着ユニット１８は、その熱圧着ヘッド１２が受台１１の直上に対向するように配設され、この熱圧着ヘッド１２を門型のフレーム１９に設置された加圧手段１３にて上下移動及び加圧するように構成されている。熱圧着ヘッド１２は、その下端に圧着部位を押圧する圧着ツール２０が装着され、かつこの圧着ツール２０を加熱するヒータ２１が内蔵されている。なお、受台１１の台部１１ｂの上端部にも、被圧着体１４を下方から加熱するヒータ２２（図６及び後述の図２参照）が配設されている。２３は、基台１６上の受台１１近傍に配設された認識カメラで、被圧着体１４の位置を認識する。   The crimping unit 18 is disposed so that its thermocompression bonding head 12 faces directly above the cradle 11, and this thermocompression bonding head 12 is moved up and down by a pressurizing means 13 installed on a portal frame 19. It is comprised so that it may press. The thermocompression bonding head 12 has a crimping tool 20 that presses the crimping part at the lower end thereof, and a heater 21 that heats the crimping tool 20 is incorporated. Note that a heater 22 (see FIG. 6 and FIG. 2 described later) for heating the object to be bonded 14 from below is also provided at the upper end of the base 11b of the receiving base 11. Reference numeral 23 denotes a recognition camera disposed in the vicinity of the cradle 11 on the base 16 to recognize the position of the object 14 to be bonded.

次に、加圧手段１３を駆動制御して熱圧着ヘッド１２にて熱圧着を行う際に、被圧着体１４に作用する荷重を高精度に制御するために、熱圧着動作時の荷重を測定する荷重測定装置３０の構成を、図２を参照して説明する。   Next, when the pressurizing means 13 is driven and thermocompression bonded by the thermocompression bonding head 12, the load during the thermocompression bonding operation is measured in order to control the load acting on the object 14 to be bonded with high accuracy. The configuration of the load measuring device 30 will be described with reference to FIG.

図２において、荷重測定装置３０は、被圧着体１４を受ける受台１１上に載置して設置する設置体３１と、ロードセル３３を収容配置した収容ブロック３２と、収容ブロック３２を設置体３１上に互いに当接可能に浮上させる浮上手段３４とを備えている。浮上手段３４は、具体的には設置体３１に対して収容ブロック３２を上下移動自在にガイドするガイド部材３５と、設置体３１と収容ブロック３２の間に介装され、収容ブロック３２を上方に移動付勢する圧縮コイルばねなどの弾性体３６にて構成されている。ガイド部材３５は特に強度は必要とされないので、断熱性の高い合成樹脂等で構成したものが好適である。収容ブロック３２の下面（設置体３１の上面でも良い）には、収容ブロック３２が弾性体３６に抗して押し下げられ、設置体３１に当接する際に、相互の接触面積を小さくして熱伝達を抑制する複数の突起３７が突設されている。   In FIG. 2, the load measuring device 30 includes an installation body 31 that is placed and installed on the cradle 11 that receives the object 14 to be bonded, an accommodation block 32 that accommodates and arranges the load cell 33, and an accommodation block 32. There is a levitation means 34 which levitates so as to come into contact with each other. Specifically, the levitation means 34 is interposed between the installation body 31 and the accommodation block 32, and a guide member 35 that guides the accommodation block 32 so as to be movable up and down with respect to the installation body 31. It is comprised with elastic bodies 36, such as a compression coil spring which carries out movement energization. Since the guide member 35 is not required to be particularly strong, it is preferable that the guide member 35 is made of a synthetic resin having high heat insulation. The housing block 32 is pushed down against the elastic body 36 on the lower surface of the housing block 32 (or the upper surface of the installation body 31), and when contacting the installation body 31, the mutual contact area is reduced to transfer heat. A plurality of protrusions 37 that suppress the protrusion are provided.

収容ブロック３２の上面には、ロードセル３３上に接するように荷重伝達断熱部材３８が取付けられている。荷重伝達断熱部材３８は、一対の金属プレート３９ａ、３９ｂ間に断熱材４０を挟んで構成され、その一方の金属プレート３９ａの一端部が収容ブロック３２の上面に位置調整可能に固定されており、金属プレート３９ａが撓むことでロードセル３３に荷重が伝達される。尚、金属プレート３９ａの一端部を収容ブロック３２の上面に熱圧着ヘッド１２の動作方向に可動可能に設けてもよい。   A load transmission heat insulating member 38 is attached to the upper surface of the accommodation block 32 so as to be in contact with the load cell 33. The load transmission heat insulating member 38 is configured by sandwiching a heat insulating material 40 between a pair of metal plates 39a and 39b, and one end portion of one metal plate 39a is fixed to the upper surface of the accommodation block 32 so that the position can be adjusted. A load is transmitted to the load cell 33 by the metal plate 39a being bent. One end of the metal plate 39a may be provided on the upper surface of the housing block 32 so as to be movable in the operation direction of the thermocompression bonding head 12.

設置体３１の一端には、荷重測定装置３０を作業者が手で把持して受台１１に設置したり、取り外して移動させるための把持部４１が設けられ、設置体３１の下部には、受台１１の受け部材１１ａを跨いで台部１１ｂの上面及び両側面上端部に丁度係合する規制凹部４２が設けられ、位置決めされて支持されるように構成されている。   One end of the installation body 31 is provided with a grip 41 for the operator to hold the load measuring device 30 by hand and install it on the cradle 11 or remove and move it. A restricting recess 42 is provided to be engaged with the upper surface of the pedestal 11b and the upper end of both sides across the receiving member 11a of the pedestal 11, and is configured to be positioned and supported.

また、ロードセル３３の近傍と、ロードセル３３と荷重伝達断熱部材３８との接触部と、設置体３１と収容ブロック３２の間に冷却風を吹き出してこれらを冷却する冷却手段４３が設けられている。なお、これらの内の少なくとも１箇所に冷却風を吹き出して冷却するようにしても良い。冷却手段４３は、具体的には、冷却エア源４５に接続された冷却風通路４４にて、把持部４１を通って、設置体３１と収容ブロック３２の間の吹き出し口４４ａ、ロードセル３３の周囲の冷却通路４６への吹き出し口４４ｂ、及びロードセル３３と荷重伝達断熱部材３８の間の吹き出し口４４ｃからそれぞれ受台１１側に向けて冷却風を吹き出すように構成されている。   Moreover, the vicinity of the load cell 33, the contact part of the load cell 33 and the load transmission heat insulating member 38, and the cooling means 43 which cools these by blowing a cooling wind between the installation body 31 and the accommodation block 32 are provided. In addition, you may make it cool by blowing a cooling wind in at least one of these. Specifically, the cooling means 43 includes a cooling air passage 44 connected to the cooling air source 45, the grip portion 41, the outlet 44a between the installation body 31 and the housing block 32, and the periphery of the load cell 33. The cooling air is blown out from the outlet 44b to the cooling passage 46 and the outlet 44c between the load cell 33 and the load transmission heat insulating member 38 toward the cradle 11 side.

ロードセル３３の近傍には、熱電対から成る温度検出手段４７が配設され、この温度検出手段４７による検出信号は警報信号発信部（図示せず）に入力され、検出温度が一定温度以上になると警報信号を発するように構成されている。また、警報信号が発せられると、ブザーなどの警告音発生手段（図示せず）が作動するとともに、熱圧着装置１０の制御部（図示せず）にこの警報信号が入力されて、加圧手段１３を作動させて熱圧着ヘッド１２を緊急上昇させるように構成されている。また、ロードセル３３の検出信号は、モニター（図示せず）に入力され、測定した荷重を表示するとともに、熱圧着装置１０の制御部（図示せず）にその測定データを出力するように構成されている。   In the vicinity of the load cell 33, a temperature detection means 47 composed of a thermocouple is disposed, and a detection signal from the temperature detection means 47 is input to an alarm signal transmission unit (not shown), and when the detection temperature becomes a certain temperature or higher. An alarm signal is generated. When a warning signal is issued, a warning sound generating means (not shown) such as a buzzer is activated, and this warning signal is input to a control unit (not shown) of the thermocompression bonding apparatus 10 to pressurize means. 13 is operated to raise the thermocompression bonding head 12 urgently. The detection signal of the load cell 33 is input to a monitor (not shown) and displays the measured load, and is also configured to output the measurement data to a control unit (not shown) of the thermocompression bonding apparatus 10. ing.

次に、以上の構成の荷重測定装置３０による荷重測定動作について、図４を参照して説明する。まず、冷却手段４３を作動させ、各吹き出し口４４ａ、４４ｂ、４４ｃから冷却風を吹き出して冷却ブローを開始した後（ステップＳ１）、図１及び図２に示すように、荷重測定装置３０をそのロードセル３３が熱圧着ヘッド１２の軸線上の直下に位置するように受台１１上に設置する（ステップＳ２）。その際には、作業者が荷重測定装置３０の把持部４１を手で持って、設置体３１を受台１１上に載置するだけでよい。また、この時冷却手段４３にて把持部４１を通して受台１１側に冷却風等の冷媒を供給することにより、把持部４１の温度が効果的に下がり、作業者の作業が容易になる。   Next, the load measuring operation by the load measuring device 30 having the above configuration will be described with reference to FIG. First, the cooling means 43 is actuated, cooling air is blown out from each of the outlets 44a, 44b, 44c and cooling blow is started (step S1). Then, as shown in FIG. 1 and FIG. The load cell 33 is installed on the cradle 11 so as to be positioned immediately below the axis of the thermocompression bonding head 12 (step S2). In that case, the operator only has to hold the grip portion 41 of the load measuring device 30 with his / her hand and place the installation body 31 on the cradle 11. Further, at this time, the cooling means 43 supplies coolant such as cooling air to the receiving base 11 through the gripping portion 41, so that the temperature of the gripping portion 41 is effectively lowered and the operator's work is facilitated.

その後、熱圧着装置１０の制御部（図示せず）にて測定動作が開始され、加圧手段１３にて熱圧着ヘッド１２が下降動作され（ステップＳ３）、熱圧着ヘッド１２が荷重伝達断熱部材３８を介してロードセル３３を押し下げ、図３に示すように、収容ブロック３２が下降して設置体３１に当接することで、ロードセル３３が加圧手段１３に設定された荷重で加圧される（ステップＳ４）。この加圧による荷重測定時間は、通常３〜５秒程度であり、その間に温度検出手段４７による検出信号からロードセル３３近傍の温度が許容耐熱温度以下を保っているか否かを判断し（ステップＳ５）、許容耐熱温度以下でない場合は、警告音が発せられるとともに、熱圧着装置１０の制御部（図示せず）にエラー通知がなされ（ステップＳ６）、熱圧着ヘッド１２が緊急上昇される（ステップＳ７）。   Thereafter, a measurement operation is started by a control unit (not shown) of the thermocompression bonding apparatus 10, the thermocompression bonding head 12 is lowered by the pressurizing means 13 (step S3), and the thermocompression bonding head 12 is a load transmission heat insulating member. As shown in FIG. 3, the load cell 33 is pushed down with the load set in the pressurizing means 13 by pushing down the load cell 33 via 38 and the housing block 32 descends and comes into contact with the installation body 31 (see FIG. 3). Step S4). The load measurement time by this pressurization is usually about 3 to 5 seconds, and it is determined whether or not the temperature in the vicinity of the load cell 33 is kept below the allowable heat resistant temperature from the detection signal by the temperature detecting means 47 (step S5). When the temperature is not lower than the allowable heat-resistant temperature, a warning sound is emitted and an error is notified to the control unit (not shown) of the thermocompression bonding apparatus 10 (step S6), and the thermocompression bonding head 12 is urgently raised (step S6). S7).

ロードセル３３の近傍の温度が許容耐熱温度以下に保たれている場合、次に荷重測定が適正に行えたか否かの判定を行い（ステップＳ８）、適正に行えた場合は熱圧着ヘッド１２が上昇動作され（ステップＳ９）、それに伴って次の測定までロードセル３３を収容した収容ブロック３２が受台１１上の設置体３１から浮上し、受台１１からの伝熱が抑制される（ステップＳ１０）。次に、上記荷重測定を所要のｎ回（通常、３〜５回の測定を行って、その平均値を測定値とする）繰り返したか否かの判定を行い（ステップＳ１１）、ｎ回に達していない場合は、ステップＳ３にリターンしてｎ回の測定を行う。   When the temperature in the vicinity of the load cell 33 is kept below the allowable heat-resistant temperature, it is next determined whether or not the load measurement can be properly performed (step S8). In operation (step S9), the accommodation block 32 that accommodates the load cell 33 floats from the installation body 31 on the cradle 11 until the next measurement, and heat transfer from the cradle 11 is suppressed (step S10). . Next, it is determined whether or not the above load measurement is repeated n times (usually, 3 to 5 times are measured and the average value is taken as a measured value) (step S11), and the number of times reaches n times. If not, the process returns to step S3 to perform n measurements.

許容耐熱温度以下でないためステップＳ６でエラー通知がなされ、ステップＳ７で熱圧着ヘッド１２が緊急上昇された場合、ステップＳ８で荷重測定が適正でないと判定された場合、及び所定のｎ回の測定が終了した場合は、荷重測定装置３０を受台１１から取り外し（ステップＳ１２）、上記冷却ブローを終了し（ステップＳ１３）、荷重測定動作を終了する。   Since the temperature is not lower than the allowable heat resistant temperature, an error is notified in step S6, the thermocompression bonding head 12 is urgently raised in step S7, the load measurement is determined to be inappropriate in step S8, and predetermined n times of measurement are performed. When it is finished, the load measuring device 30 is removed from the cradle 11 (step S12), the cooling blow is finished (step S13), and the load measuring operation is finished.

本発明の熱圧着ヘッドの荷重測定装置及び方法によれば、受台上に容易に荷重測定装置を設置することができ、かつその設置状態でロードセルは設置体から浮上しているので温度上昇を抑制することができ、その後熱圧着ヘッドを下降させて加圧動作を行うとロードセルに加圧力が作用して高精度に荷重を測定することができ、さらに荷重測定時間は短時間であるため、測定中にロードセルが熱損傷するほど温度上昇することはなく、高精度の荷重測定ができるので、各種基板に部品を熱圧着する熱圧着装置に好適に利用することができる。   According to the load measuring device and method of the thermocompression bonding head of the present invention, the load measuring device can be easily installed on the cradle, and the temperature rises because the load cell floats from the installation body in the installed state. After that, when the pressure bonding operation is performed by lowering the thermocompression bonding head, the applied pressure is applied to the load cell and the load can be measured with high accuracy, and the load measurement time is short. Since the temperature does not rise so much that the load cell is thermally damaged during the measurement and the load can be measured with high accuracy, it can be suitably used for a thermocompression bonding apparatus for thermocompression bonding components to various substrates.

本発明の一実施形態の荷重測定装置を適用する熱圧着装置の概略構成を示す全体斜視図。The whole perspective view showing the schematic structure of the thermocompression bonding apparatus to which the load measuring device of one embodiment of the present invention is applied. 同実施形態の荷重測定装置の設置状態を示す縦断面図。The longitudinal cross-sectional view which shows the installation state of the load measuring apparatus of the embodiment. 同実施形態の荷重測定装置による荷重測定状態を示す縦断面図。The longitudinal cross-sectional view which shows the load measurement state by the load measuring apparatus of the embodiment. 同実施形態における荷重測定動作のフロー図。The flowchart of the load measurement operation | movement in the embodiment. 被圧着体の一例としての液晶表示パネルの斜視図。The perspective view of the liquid crystal display panel as an example of a to-be-bonded body. 同液晶表示パネルの組立ラインを示し、（ａ）は組立ラインの平面図、（ｂ）は各工程の説明図。The assembly line of the said liquid crystal display panel is shown, (a) is a top view of an assembly line, (b) is explanatory drawing of each process.

符号の説明Explanation of symbols

１０ 熱圧着装置
１１ 受台
１２ 熱圧着ヘッド
１４ 被圧着体
３０ 荷重測定装置
３１ 設置体
３２ 収容ブロック
３３ ロードセル
３４ 浮上手段
３７ 突起
３８ 荷重伝達断熱部材
４１ 把持部
４３ 冷却手段
４４ 冷却風通路
４４ａ、４４ｂ、４４ｃ 吹き出し口
４７ 温度検出手段 DESCRIPTION OF SYMBOLS 10 Thermocompression bonding apparatus 11 Receptacle 12 Thermocompression bonding head 14 Bonded body 30 Load measuring apparatus 31 Installation body 32 Housing block 33 Load cell 34 Lifting means 37 Protrusion 38 Load transmission heat insulating member 41 Holding part 43 Cooling means 44 Cooling air passage 44a, 44b 44c Air outlet 47 Temperature detection means

Claims (4)

被圧着体を受ける受台上に載置して設置する設置体と、ロードセルを収容配置した収容ブロックと、収容ブロックを設置体上に互いに当接可能に浮上させる浮上手段とを備え、
またロードセルの近傍と、ロードセルと荷重伝達断熱部材との接触部と、設置体と収容ブロックの間の少なくとも１箇所を冷却する冷却手段を設け、さらに冷却手段は、設置体に作業者が把持するように設けられた把持部を通して受台側に向けて冷却風を吹き出す冷却風吹出手段からなることを特徴とする熱圧着ヘッドの荷重測定装置。 An installation body that is placed and placed on a cradle for receiving a pressure-bonded body, an accommodation block that accommodates and arranges a load cell, and a levitation means that floats the accommodation block so that they can come into contact with each other on the installation body,
In addition, a cooling means for cooling the vicinity of the load cell, the contact portion between the load cell and the load transmission heat insulating member, and at least one place between the installation body and the housing block is provided, and the cooling means is gripped by the operator on the installation body. load measuring device for thermocompression bonding head you, comprising the cooling air blowing out means for blowing cooling air toward the cradle-side through the grip portion that is provided so as. ロードセルの近傍に温度検出手段を配設し、検出温度が一定温度以上になると警報信号を発する手段を設けたことを特徴とする請求項１に記載の熱圧着ヘッドの荷重測定装置。 Disposed a temperature detection means in the vicinity of the load cell, the load measuring device of the thermocompression bonding head according to claim 1 in which the detected temperature is characterized in that a means for emitting an alarm signal becomes equal to or higher than a predetermined temperature. 昇降駆動される熱圧着ヘッドの直下に固定設置されて被圧着体を受ける受台の上に、ロードセルを収容配置した収容ブロックを設置体に当接可能に浮上させて配設した荷重測定装置の設置体を載置して設置し、また収納ブロックの上面にはロードセル上に接するように荷重伝達断熱部材を取付け、この荷重伝達断熱部材を介して熱圧着ヘッドにてロードセルを押圧し、収容ブロックを設置体に当接させてロードセルに作用する加圧力を測定する熱圧着ヘッドの荷重測定方法であって、荷重測定装置を受台の上に載置して設置した時には、ロードセルの近傍と、ロードセルと荷重伝達断熱部材との接触部と、設置体と収容ブロックの間の少なくとも１箇所に対して、設置体に作業者が把持するように設けられた把持部を通して冷風を吹き出して冷却することを特徴とする熱圧着ヘッドの荷重測定方法。 A load measuring device that is fixedly installed directly below a thermo-compression head that is driven up and down and receives a receiving block to receive a member to be bonded. The installation body is placed and installed, and a load transmission heat insulating member is attached to the upper surface of the storage block so as to be in contact with the load cell, and the load cell is pressed by the thermocompression bonding head via the load transmission heat insulating member, and the storage block Is a load measuring method of a thermocompression bonding head that measures the applied pressure acting on the load cell by contacting the installation body, and when the load measuring device is placed on the cradle and installed, a contact portion between the load cell and the load transmitting heat-insulating member, to at least one location between the installation member and the housing block, blows cold air through the grip portion that is provided so as worker installation body grips Load measurement method of the thermal compression bonding head you characterized by the retirement. ロードセルの近傍の温度を検出し、検出温度が一定温度以上になると発せられる警報信号に基づいて、警報音の発生と熱圧着ヘッドの上昇の少なくとも何れか一方を行うことを特徴とする請求項３に記載の熱圧着ヘッドの荷重測定方法。 Detecting the temperature in the vicinity of the load cell, based on the detected temperature alarm signal emitted to be a certain temperature or higher, according to claim 3, characterized in that at least one of the generation and increase of the thermocompression bonding head of the alarm sound The load measuring method of the thermocompression-bonding head described in 1.
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