JP4993352B2 - Flowmeter - Google Patents

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JP4993352B2
JP4993352B2 JP2007054870A JP2007054870A JP4993352B2 JP 4993352 B2 JP4993352 B2 JP 4993352B2 JP 2007054870 A JP2007054870 A JP 2007054870A JP 2007054870 A JP2007054870 A JP 2007054870A JP 4993352 B2 JP4993352 B2 JP 4993352B2
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広行 稲垣
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Azbil Corp
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Description

本発明は、特に低圧の空気等からなる被測定流体の微少な流量測定に好適に利用可能な流量計に関する。   The present invention relates to a flow meter that can be suitably used for measuring a minute flow rate of a fluid to be measured, which is composed of low-pressure air or the like.

ガスや空気等の流体の流量を検出する流量計として熱式の気体流速センサを用いた流量計が知られている。この流量計は、ハーメチックシール構造の部品上にセンサを搭載しこれを流路に取り付けるようにしたもので、特に高圧の流体の流量を検出する場合に適している。しかしながら、このハーメチックシール構造の流量計は、コストが高いという問題がある。   2. Description of the Related Art A flow meter using a thermal gas flow rate sensor is known as a flow meter that detects the flow rate of a fluid such as gas or air. This flow meter is one in which a sensor is mounted on a part having a hermetic seal structure and attached to a flow path, and is particularly suitable for detecting the flow rate of a high-pressure fluid. However, this hermetic seal type flow meter has a problem of high cost.

また、このようなハーメチックシール構造とは異なる構造を有する流量計として、流量計のボディの一部である蓋体に形成された流路の一部に開口したセンサ孔を、流路に検出面が臨むようにフローセンサを配置した回路基板を密接して封止することによって流路を形成する流量計が知られている（例えば、特許文献１参照）。そして、フローセンサは蓋体の内面よりも所定距離（約０.０５ｍｍ）だけ流路壁の外側に位置するように、即ち、流路よりも引っ込んだ位置に検出面が配置されている。センサ孔は、フローセンサの流路の長手方向両側に所定の隙間（約０.７ｍｍ）ができる大きさであり、蓋体とフローセンサとの間には段差のある隙間が存在している。
特開２００５―３１５７８８号公報（４頁、図４、図５） In addition, as a flowmeter having a structure different from the hermetic seal structure, a sensor hole opened in a part of a flow path formed in a lid that is a part of the body of the flowmeter is provided on a detection surface on the flow path. There is known a flow meter that forms a flow path by closely sealing a circuit board on which a flow sensor is arranged so that the flow sensor faces (see, for example, Patent Document 1). The detection surface is arranged so that the flow sensor is positioned outside the flow path wall by a predetermined distance (about 0.05 mm) from the inner surface of the lid, that is, at a position retracted from the flow path. The sensor hole has such a size that a predetermined gap (approximately 0.7 mm) can be formed on both sides in the longitudinal direction of the flow path of the flow sensor, and there is a gap with a step between the lid and the flow sensor.
JP 2005-315788 A (page 4, FIG. 4, FIG. 5)

例えば給湯器のブロアに流れる空気のように圧力の低い被測定対象流体の流量を測定する場合、上述した後者の流量計の更なるコスト低減を図るために、図７に示すようにハウジング１に流体の入口２ａから出口２ｂまで直管をなす流路２の途中の内壁面２ｃに長手方向（流体の流れる方向）に沿って長い開口部２ｄを形成し、入口２ａ側に流入する被測定流体の流れを整流するための整流器３を設け、ハウジング１に流路２の外側に開口部２ｄを密封して覆うように回路基板４を取り付け、この回路基板４に開口部２ｄ内に位置しかつ検出面５ａが流路２の内壁面２ｃよりも外側に位置するようにフローセンサ５を設けた基板タイプの構造の流量計９が提案されている。   For example, when measuring the flow rate of a fluid to be measured having a low pressure, such as air flowing in a blower of a water heater, in order to further reduce the cost of the latter flow meter described above, the housing 1 has a structure as shown in FIG. A fluid to be measured which flows into the inlet 2a side by forming a long opening 2d along the longitudinal direction (fluid flow direction) on the inner wall surface 2c in the middle of the flow path 2 forming a straight pipe from the fluid inlet 2a to the outlet 2b. A circuit board 4 is attached to the housing 1 so as to seal and cover the opening 2d outside the flow path 2, and the circuit board 4 is positioned in the opening 2d. A flow meter 9 having a substrate type structure in which a flow sensor 5 is provided so that the detection surface 5a is positioned outside the inner wall surface 2c of the flow path 2 has been proposed.

図７に示した構造の流量計において流路２を通流する被測定流体の整流器３通過後の流速分布は図８の流速分布Ａで示すように流路２の内壁面２ｃにおいては流速ゼロであり、流路２の中心部に向かって徐々に大きくなり、流路２の中心部で最大流量となっている。ところが、流路２が急拡大する開口部２ｄの位置においては流路２の内壁面２ｃと回路基板４の下面４ａとの間の空間部（凹部）の容積（開口部２ｄの容積）分だけ急拡大したことにより、開口部２ｄの上流側開口端２ｅの直角をなす角部２ｆが流路２の内壁面に形成され、この角部２ｆにおいて渦７が発生する。そして、この渦７の影響により被測定流体の流れは流れ方向に対して流速が減速又は逆流するような流体挙動が生じる。   In the flow meter having the structure shown in FIG. 7, the flow velocity distribution of the fluid to be measured flowing through the flow channel 2 after passing through the rectifier 3 is zero at the inner wall surface 2c of the flow channel 2 as shown by the flow velocity distribution A in FIG. And gradually increases toward the center of the flow path 2, and reaches a maximum flow rate at the center of the flow path 2. However, at the position of the opening 2d where the flow path 2 suddenly expands, only the volume of the space (concave part) between the inner wall surface 2c of the flow path 2 and the lower surface 4a of the circuit board 4 (volume of the opening 2d). Due to the rapid expansion, a corner 2f that forms a right angle to the upstream opening end 2e of the opening 2d is formed on the inner wall surface of the flow path 2, and a vortex 7 is generated at the corner 2f. Due to the influence of the vortex 7, the flow of the fluid to be measured has a fluid behavior in which the flow velocity is decelerated or reversed with respect to the flow direction.

このため、流速分布は渦７の発生位置から下流側で渦７の影響を受ける範囲（影響圏）８内にある流路においては、流速分布Ｂ及び流速分布Ｃに示すように流路内壁面２ｃから近い位置（流路２の内壁面２ｃと回路基板４の下面４ａとの間）では流れ方向に対して流速が減速又は逆流することがある。そして、渦７の影響を受ける範囲８を脱すると、流速分布Ｄは流路２の内壁面２ｃおよび回路基板４の下面４ａにおいて流速がゼロであり、流路２の中心部に向かって流速が大きくなり、流路の中心部で最大となる。尚、図８は、被測定流体の流路２内における流体挙動及び流速分布を分かりやすく示した模式的に示したものである。   For this reason, in the flow path within the range (influence zone) 8 affected by the vortex 7 on the downstream side from the position where the vortex 7 is generated, the inner wall surface of the flow path as shown in the flow velocity distribution B and the flow velocity distribution C At a position close to 2c (between the inner wall surface 2c of the flow path 2 and the lower surface 4a of the circuit board 4), the flow velocity may decelerate or reverse in the flow direction. Then, when the range 8 affected by the vortex 7 is removed, the flow velocity distribution D is zero on the inner wall surface 2c of the flow channel 2 and the lower surface 4a of the circuit board 4, and the flow velocity is directed toward the center of the flow channel 2. It becomes larger and becomes maximum at the center of the flow path. FIG. 8 schematically shows the fluid behavior and flow velocity distribution of the fluid to be measured in the flow path 2 in an easily understandable manner.

従って、図７に示すような構造の流量計では上述したような渦７の影響による流速分布の変化が起こり、その変化が起こっている範囲８にフローセンサ５の検出面５ａがある場合は検出精度の悪化を招くという問題がある。この問題は特に最大流速が速い大流量域において顕著に発生する。   Therefore, in the flowmeter having the structure shown in FIG. 7, the flow velocity distribution changes due to the influence of the vortex 7 as described above, and the detection is performed when the detection surface 5a of the flow sensor 5 is in the range 8 where the change occurs. There is a problem that the accuracy is deteriorated. This problem occurs particularly in a large flow rate region where the maximum flow velocity is fast.

また、フローセンサ５が流路２の内壁面２ｃよりも流路中心軸線から見て外側（凹んだ部分）に位置していることにより、流れ方向に対して流速が減速又は逆流している被測定流体の流れが検出面５ａを通過するためにフローセンサ５の出力が図９に示すように飽和してしまい、流量を正確に測定することができなくなるという問題がある。尚、特許文献１に開示されている流量計においても上述した構造の流量計と略同様の傾向があると考えられる。   In addition, since the flow sensor 5 is positioned outside (indented part) as viewed from the flow path center axis line with respect to the inner wall surface 2c of the flow path 2, the flow velocity is decelerated or reversed in the flow direction. Since the flow of the measurement fluid passes through the detection surface 5a, the output of the flow sensor 5 is saturated as shown in FIG. 9, and there is a problem that the flow rate cannot be measured accurately. In addition, it is thought that the flowmeter disclosed in Patent Document 1 has a tendency similar to that of the flowmeter having the above-described structure.

本発明の目的は、被測定流体の流路にフローセンサを設けるために形成した開口部の上流側開口端の角部において発生した渦の影響をフローセンサの検出精度に及ぼさないようにした流路構造を有する流量計を提供することにある。   An object of the present invention is to provide a flow in which the influence of the vortex generated at the corner of the upstream opening end of the opening formed to provide the flow sensor in the flow path of the fluid to be measured does not affect the detection accuracy of the flow sensor. An object of the present invention is to provide a flow meter having a channel structure.

上述した課題を解決するために、本発明に係る流量計は、
入口から出口まで直管をなす流路の途中の壁面に長手方向に沿って長い開口部が形成されたハウジングと、前記ハウジングに取り付けられ前記流路の外側に前記開口部を密封して覆うように配置された回路基板と、前記回路基板に設けられ前記開口部内に位置しかつ検出面が前記流路の内壁面よりも流路中心軸線から見て外側に位置するフローセンサとを備えた流量計であって、
前記流路の前記開口部と対向する側の内壁面に当該流路の入口から流入した被測定流体を前記フローセンサの検出面に沿わせて流すように膨出部を形成し、
前記開口部が前記回路基板によって覆われることにより流路の一部となっている流路部分の断面積と、前記開口部の上流側及び下流側の断面積とが略同じになるように形成されていることを特徴としている。 In order to solve the above-described problems, the flow meter according to the present invention is:
A housing in which a long opening is formed along the longitudinal direction on the wall surface in the middle of the flow path that forms a straight pipe from the inlet to the outlet, and the opening is sealed and covered outside the flow path attached to the housing And a flow sensor provided in the circuit board and positioned in the opening and having a detection surface positioned outside the inner wall surface of the flow channel as viewed from the flow channel center axis. A total of
Forming a bulging portion so that the fluid to be measured flowing from the inlet of the flow channel flows along the detection surface of the flow sensor on the inner wall surface of the flow channel facing the opening,
The opening is covered with the circuit board so that the cross-sectional area of the flow path part that is a part of the flow path is substantially the same as the cross-sectional area of the upstream side and the downstream side of the opening part. It is characterized by being.

被測定流体がハウジングの流路を流れる際に開口部上流側開口端の角部において発生する渦によって流路内壁面から離れた位置で流速がゼロになる位置が、膨出部が形成されていない場合に比べて回路基板に向けてシフトする。この結果、渦の影響を受ける範囲が短くなり、フローセンサの検出面においては安定した流速分布が得られる。これにより、フローセンサの出力が高流量域まで安定して正確に測定することが可能となる。   When the fluid to be measured flows through the flow path of the housing, a bulge is formed at a position where the flow velocity becomes zero at a position away from the inner wall surface of the flow path due to the vortex generated at the corner at the upstream end of the opening. Shift towards the circuit board as compared to the case without. As a result, the range affected by the vortex is shortened, and a stable flow velocity distribution is obtained on the detection surface of the flow sensor. Thereby, the output of the flow sensor can be stably and accurately measured up to a high flow rate range.

また、本発明の請求項２に記載の流量計は、請求項１に記載の流量計において、前記膨出部は前記流路の内壁面が前記フローセンサ側に徐々に高くなる傾斜部と、前記フローセンサと対向する領域に形成された平面部と、当該平面部から前記内壁面に向かって徐々に低くなる傾斜部とが連続して形成されていることを特徴としている。   The flow meter according to claim 2 of the present invention is the flow meter according to claim 1, wherein the bulging portion includes an inclined portion in which the inner wall surface of the flow path gradually increases toward the flow sensor, The flat part formed in the area | region facing the said flow sensor, and the inclined part which becomes low gradually toward the said inner wall surface from the said flat part are formed continuously.

流路の入口から流入した被測定流体は、流路の内壁面がフローセンサ側に徐々に高くなる傾斜部により回路基板に向けてシフトされ、フローセンサと対向する領域に形成された平面部によりフローセンサの検出面に沿って流れ、平面部から内壁面に向かって徐々に低くなる傾斜部により前記シフトが解除される。これにより、流路内を流れる被測定流体をフローセンサの検出面側にシフトさせかつ検出面に沿わせて流すことができ、フローセンサの出力が高流量の流域まで安定して検出可能となると共に、被測定流体がフローセンサの検出面に角度をもって当たることにより生じる、被測定流体に含まれるゴミや粉塵が検出面に付着するのを防止することができる。   The fluid to be measured that has flowed in from the inlet of the flow path is shifted toward the circuit board by an inclined portion in which the inner wall surface of the flow path gradually increases toward the flow sensor, and is formed by a flat portion formed in a region facing the flow sensor. The shift is canceled by the inclined portion that flows along the detection surface of the flow sensor and gradually decreases from the flat portion toward the inner wall surface. As a result, the fluid to be measured flowing in the flow path can be shifted to the detection surface side of the flow sensor and flow along the detection surface, and the output of the flow sensor can be stably detected up to the high flow area. In addition, it is possible to prevent dust and dust contained in the fluid to be measured, which are generated when the fluid to be measured hits the detection surface of the flow sensor with an angle, from adhering to the detection surface.

本発明によると、流路の開口部と対向する内壁面に膨出部を形成することにより被測定流体の流速分布が回路基板に向けてシフトするので、開口部の上流側開口端角部で発生する渦の影響を受ける範囲を短くすることができ、この結果、フローセンサの検出面において安定した流速分布が得られ、フローセンサの出力が高流量の流域まで安定して流量を正確に測定することが可能となる。また、流路の内壁面に膨出部を形成するだけの簡単な構成であり、安価な流量計を提供することが可能であり、特に被測定流体が低圧の空気等である場合の流量計に好適に利用できる。   According to the present invention, the flow velocity distribution of the fluid to be measured is shifted toward the circuit board by forming the bulging portion on the inner wall surface facing the opening of the flow path. The range affected by the generated vortex can be shortened. As a result, a stable flow velocity distribution can be obtained on the detection surface of the flow sensor, and the flow sensor output can be stably measured up to the high flow basin and the flow rate can be accurately measured. It becomes possible to do. Further, it is a simple configuration that only forms a bulging portion on the inner wall surface of the flow path, and it is possible to provide an inexpensive flow meter, especially when the fluid to be measured is low-pressure air or the like. Can be suitably used.

また、本発明によると、膨出部の形状を、流路の内壁面がフローセンサ側に徐々に高くなる傾斜部と、フローセンサと対向する領域に形成された平面部と、平面部から内壁面に向かって徐々に低くなる傾斜部とを連続して形成することにより、流路内を流れる被測定流体をフローセンサの検出面に沿わせて流すことができ、フローセンサの出力が高流量の流域まで安定して検出することが可能となると共に、被測定流体がフローセンサの検出面に角度をもって当たることが防止されるので検出面のダイアフラム構造を破損から保護することができる。   In addition, according to the present invention, the shape of the bulging portion includes an inclined portion where the inner wall surface of the flow path gradually increases toward the flow sensor, a flat portion formed in a region facing the flow sensor, and an inner portion from the flat portion. By continuously forming an inclined part that gradually decreases toward the wall surface, the fluid to be measured that flows in the flow path can flow along the detection surface of the flow sensor, and the output of the flow sensor is high. In addition, it is possible to stably detect the flow area of the fluid, and it is possible to prevent the fluid to be measured from hitting the detection surface of the flow sensor at an angle, so that the diaphragm structure of the detection surface can be protected from damage.

以下、本発明の実施形態に係る流量計について図面に基づいて説明する。図１及び図２に示すように流量計１１は、ハウジング１２、蓋体１３、回路基板３１等により構成されている。ハウジング１２は、図１に示すように上方から見て略正方形状の箱体をなし、図２に示すように上部に回路基板３１を収容する回路基板収容室（以下「収容室」という）１４が形成され、この収容室１４の下側の中央位置に図中左右方向に断面円形の直管状の流路１５が形成されている。流路１５の入口１５ａ、出口１５ｂは、ハウジング１２の両側部から外方に延出されており、図示しない外部の被流体流路に接続されるようになっている。そして、被測定流体は、図２の矢印で示すように入口１５ａから流路１５に流入して出口１５ｂから流出する。尚、以後流路１５の入口１５ａ側を上流側、出口１５ｂ側を下流側という。   Hereinafter, a flow meter according to an embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 and 2, the flow meter 11 includes a housing 12, a lid 13, a circuit board 31, and the like. As shown in FIG. 1, the housing 12 has a substantially square box as viewed from above, and as shown in FIG. 2, a circuit board accommodation chamber (hereinafter referred to as “accommodation chamber”) 14 in which the circuit board 31 is accommodated. A straight tubular flow path 15 having a circular cross section in the left-right direction in the figure is formed at a central position below the storage chamber 14. The inlet 15a and outlet 15b of the flow path 15 extend outward from both sides of the housing 12, and are connected to an external fluid flow path (not shown). Then, the fluid to be measured flows into the flow path 15 from the inlet 15a and flows out from the outlet 15b as shown by the arrows in FIG. Hereinafter, the inlet 15a side of the flow path 15 is referred to as an upstream side, and the outlet 15b side is referred to as a downstream side.

収容室１４の底板１４ａの中央部は、流路１５との隔壁を形成しており、図２及び図３に示すように流路１５の中央部１５ｃの上部に長手方向（被測定流体の流れる方向）に沿って長い長方形状をなす開口部１６が形成されている。この開口部１６は、上流側開口端１６ａ、下流側の開口端１６ｂが図５に拡大して示すように流路１５に対して直角状の角部１６ｃ，１６ｄをなしている。   The central portion of the bottom plate 14a of the storage chamber 14 forms a partition wall with the flow channel 15, and as shown in FIGS. 2 and 3, the longitudinal direction (flow of the fluid to be measured flows) above the central portion 15c of the flow channel 15. A long rectangular opening 16 is formed along (direction). As shown in FIG. 5, the opening 16 has corners 16 c and 16 d that are perpendicular to the flow path 15, as the upstream opening 16 a and the downstream opening 16 b are enlarged in FIG. 5.

収容室１４の底板１４ａの上面１４ｂは、開口部１６の周縁部１４ｃが僅かに高く（略１ｍｍ程度）形成されており、回路基板３１を載置する載置部（以下「載置部１４ｃ」という）とされている。載置部１４ｃの両側部には回路基板３１を固定するためのねじ孔１７が形成されている。そして、載置部１４ｃの開口部１６の周縁部１４ｄ、ねじ孔１７の周縁部１４ｅは、載置部１４ｃの上面から同じ高さとされている。これらの周縁部１４ｄ及び１４ｅは、回路基板３１を載置部１４ｃに載置して接着剤で固定する際に接着剤が開口部１６及びねじ孔１７内に入り込むことを防止するためのもので、載置部１４ｃから僅かに高く（略０.１ｍｍ程度）形成されている。   The upper surface 14b of the bottom plate 14a of the storage chamber 14 is formed with the peripheral edge portion 14c of the opening 16 being slightly higher (about 1 mm), and a mounting portion (hereinafter referred to as “mounting portion 14c”) on which the circuit board 31 is placed. It is said that). Screw holes 17 for fixing the circuit board 31 are formed on both sides of the mounting portion 14c. And the peripheral part 14d of the opening part 16 of the mounting part 14c and the peripheral part 14e of the screw hole 17 are made into the same height from the upper surface of the mounting part 14c. These peripheral portions 14d and 14e are for preventing the adhesive from entering the opening 16 and the screw hole 17 when the circuit board 31 is placed on the placement portion 14c and fixed with the adhesive. And slightly higher (approximately 0.1 mm) from the mounting portion 14c.

流路１５の内壁面１５ｄの開口部１６と対向する側の内壁面１５ｄには図２に示すように開口部１６に向かって膨出する膨出部１８が形成されている。この膨出部１８は、流路１５を流れる被測定流体を回路基板３１に向けてシフトさせて、この回路基板３１の下面３１ａに設けられ開口部１６の略中央位置に配置されたフローセンサ３２の検出面３２ａに沿わせて流すためのものである。   A bulging portion 18 that bulges toward the opening portion 16 is formed on the inner wall surface 15d on the side facing the opening portion 16 of the inner wall surface 15d of the flow path 15 as shown in FIG. The bulging portion 18 shifts the fluid to be measured flowing through the flow path 15 toward the circuit board 31, and is provided on the lower surface 31 a of the circuit board 31 and is disposed at a substantially central position of the opening 16. It is for flowing along the detection surface 32a.

膨出部１８は、上流側の傾斜部１８ａと中央の平面部１８ｂと下流側の傾斜部１８ｃからなり、これらの傾斜部１８ａと平面部１８ｂと傾斜部１８ｃが連続して形成されている。上流側の傾斜部１８ａは、開口部１６の上流側開口端１６ａと対向する内壁面１５ｄの位置から緩やかな傾斜（勾配約５°〜３０°）をなして徐々に高くなり、平面部１８ｂは、フローセンサ３２の上流側の任意の位置から下流側の任意の位置までフローセンサ３２の検出面３２ａと対向する領域に回路基板３１と対向して平行に形成され、下流側の傾斜部１８ｃは、平面部１８ｂから開口部１６の下流側開口端１６ｂと対向する内壁面１５ｄの位置まで緩やかな傾斜（勾配約５°〜３０°）をなして徐々に低くなっている。   The bulging portion 18 includes an upstream inclined portion 18a, a central flat portion 18b, and a downstream inclined portion 18c. The inclined portion 18a, the flat portion 18b, and the inclined portion 18c are continuously formed. The upstream inclined portion 18a gradually increases from the position of the inner wall surface 15d facing the upstream opening end 16a of the opening 16 with a gentle inclination (gradient of about 5 ° to 30 °), and the flat portion 18b From the arbitrary position on the upstream side of the flow sensor 32 to the arbitrary position on the downstream side, the region facing the detection surface 32a of the flow sensor 32 is formed in parallel to face the circuit board 31, and the inclined portion 18c on the downstream side The slope gradually decreases from the flat surface portion 18b to the position of the inner wall surface 15d facing the downstream opening end 16b of the opening portion 16 with a gentle inclination (gradient of about 5 ° to 30 °).

このように膨出部１８の上流側の傾斜部１８ａと下流側の傾斜部１８ｃを緩やかな傾斜面とすることにより、流路１５の開口部１６の部分（凹部）が急拡大部とならないようにすることが可能となる。即ち開口部１６における流路１５の断面積が急に大きくなることによる流路１５内を流れる被測定流体の流れの乱れを防止することが可能となる。   In this way, by forming the upstream inclined portion 18a and the downstream inclined portion 18c of the bulging portion 18 as gentle inclined surfaces, the portion (concave portion) of the opening portion 16 of the flow path 15 does not become a sudden expansion portion. It becomes possible to. In other words, it is possible to prevent the disturbance of the flow of the fluid to be measured flowing in the flow channel 15 due to the sudden increase in the cross-sectional area of the flow channel 15 in the opening 16.

また、流路１５は、フローセンサ３２の前後の流路における流路抵抗の不均一をなるべく無くすために開口部１６が流路の一部となっている流路部分（凹部）の断面積と、開口部１６の上流側及び下流側の断面積が略同じになるように形成されている。このようにして、流路１５の開口部１６と対向する内壁面１５ｄに膨出部１８が形成されている。このハウジング１２は、例えば合成樹脂部材により一体に形成されている。   Further, the flow path 15 has a cross-sectional area of a flow path portion (concave part) in which the opening 16 is a part of the flow path in order to eliminate the non-uniformity of flow path resistance in the flow paths before and after the flow sensor 32 as much as possible. The cross-sectional areas of the upstream side and the downstream side of the opening 16 are substantially the same. In this way, the bulging portion 18 is formed on the inner wall surface 15d facing the opening portion 16 of the flow path 15. The housing 12 is integrally formed of, for example, a synthetic resin member.

尚、膨出部１８は、流路１５を流れる被測定流体を回路基板３１に向けてシフトさせてフローセンサ３２の検出面３２ａに沿わせて流すようにすれば良く、上流側の傾斜面１８ａ、下流側の傾斜部１８ｃの形状は、上述したように緩やかなテーパ状に形成しても良く、或いは僅かに凸面をなす曲面で形成しても良い。更に細かい段差をなす階段状に形成することも可能である。   The bulging portion 18 may be configured to shift the fluid to be measured flowing through the flow path 15 toward the circuit board 31 and flow along the detection surface 32a of the flow sensor 32, and the upstream inclined surface 18a. The shape of the inclined portion 18c on the downstream side may be formed as a gentle taper as described above, or may be formed as a slightly convex curved surface. It is also possible to form a stepped shape with a fine step.

流路１５の入口１５ａは、図２に示すように流路１５と段差をなして拡径して形成されており、入口１５ａから流路１５に流入する被測定流体の流れを整流するための整流器２１が嵌挿収容されている。この整流器２１は、円筒形状をなし被測定流体の流れる方向に沿って所定の間隔を存して整流用の金網２２が複数枚（例えば、４枚）並設して形成されている。   As shown in FIG. 2, the inlet 15a of the flow path 15 is formed to have a stepped diameter with the flow path 15, and rectifies the flow of the fluid to be measured flowing into the flow path 15 from the inlet 15a. The rectifier 21 is inserted and accommodated. The rectifier 21 has a cylindrical shape and is formed by arranging a plurality of (for example, four) rectifying wire meshes 22 in parallel with a predetermined interval along the direction in which the fluid to be measured flows.

フローセンサ３２は、図２に示すように回路基板３１の下面３１ａの略中央位置に設けられている。このフローセンサ３２は、例えばシリコン基板の上面に窒化シリコン又は二酸化シリコンの絶縁膜（薄膜）が形成され、この絶縁膜の流路１５の中央位置と対応する位置に流量検出部（センサ部）が形成され、更に流量検出部が窒化シリコン又は二酸化シリコンの絶縁膜により被覆された構成とされている。   As shown in FIG. 2, the flow sensor 32 is provided at a substantially central position on the lower surface 31 a of the circuit board 31. In the flow sensor 32, for example, an insulating film (thin film) of silicon nitride or silicon dioxide is formed on the upper surface of a silicon substrate, and a flow rate detection unit (sensor unit) is provided at a position corresponding to the center position of the flow path 15 of the insulating film. Further, the flow rate detection unit is covered with an insulating film of silicon nitride or silicon dioxide.

前記流量検出部が形成されている絶縁膜の部位はダイアフラムとされて流量検出部とシリコン基板とが熱的に遮断されている。前記流量検出部は熱式の検出部で、絶縁膜状に例えば白金薄膜でできた発熱素子としてのヒータと、このヒータの上流側及び下流側に等間隔で配置された例えば白金薄膜でできた抵抗素子としての測温素子とにより構成されている。そして、抵抗素子と測温素子とでホイーストンブリッジ回路をなし、これによってフローセンサ３２の検出部３２ａが形成されている。   The portion of the insulating film in which the flow rate detection unit is formed is a diaphragm, and the flow rate detection unit and the silicon substrate are thermally blocked. The flow rate detection unit is a thermal detection unit made of a heater as a heating element made of, for example, a platinum thin film in an insulating film, and made of, for example, a platinum thin film arranged at equal intervals on the upstream side and the downstream side of the heater. It comprises a temperature measuring element as a resistance element. The resistance element and the temperature measuring element form a Wheatstone bridge circuit, and thereby the detection unit 32a of the flow sensor 32 is formed.

前記流量検出部のヒータに通電すると、このヒータは制御回路によりシリコン基板上に設けられた周囲温度センサで測定された被測定流体の温度よりもある一定温度だけ高く加熱され、流路１５を流れる被測定流体を加熱する。被測定流体が流れないときは、ヒータの上流側／下流側に均一の温度分布が形成されており、上流側の測温素子と下流側の測温素子は、略等しい温度に対応する抵抗値を示す。   When the heater of the flow rate detection unit is energized, the heater is heated by a certain temperature higher than the temperature of the fluid to be measured measured by the ambient temperature sensor provided on the silicon substrate by the control circuit, and flows through the flow path 15. Heat the fluid to be measured. When the fluid to be measured does not flow, a uniform temperature distribution is formed on the upstream / downstream side of the heater, and the upstream temperature measuring element and the downstream temperature measuring element have resistance values corresponding to substantially equal temperatures. Indicates.

一方、被測定流体の流れがあるときには、ヒータの上流側／下流側の均一な温度分布が崩れ、上流側の温度が低くなり、下流側の温度が高くなる。そして、上流側の測温素子と下流側の測温素子により構成される例えばホイーストンブリッジ回路により測温素子の抵抗値差即ち温度差を検出して流路１５内を流れる被測定流体の流量を測定する。   On the other hand, when there is a flow of the fluid to be measured, the uniform temperature distribution on the upstream / downstream side of the heater collapses, the temperature on the upstream side decreases, and the temperature on the downstream side increases. The flow rate of the fluid to be measured flowing in the flow path 15 is detected by detecting a resistance value difference, that is, a temperature difference between the temperature measuring elements by, for example, a Wheatstone bridge circuit configured by the upstream temperature measuring element and the downstream temperature measuring element. Measure.

回路基板３１は、図２に示すようにハウジング１２の収容室１４に収容されて図３に示す載置部１４ｃの開口部１６の周縁部１４ｄ、ねじ孔１７の周縁部１４ｅに載置される。そして、図４に示すように回路基板３１は、載置部１４ｃと対向する下面３１ａが載置部１４ｃに接着剤２３により接着されて固定される。このとき接着剤２３は、開口部１６の周縁部１４ｄ、ねじ孔１７の周縁部１４ｅより開口部１６、ねじ孔１７内に入り込むことが防止される。これにより、回路基板３１は、開口部１６の周縁部を全周に亘り覆うように載置部１４ｃに密着されて流路１５を気密に封止するので、開口部を挟んで流路側と流路と反対側との気密性が確保される。   As shown in FIG. 2, the circuit board 31 is housed in the housing chamber 14 of the housing 12 and placed on the peripheral edge portion 14d of the opening 16 of the mounting portion 14c and the peripheral edge portion 14e of the screw hole 17 shown in FIG. . Then, as shown in FIG. 4, the circuit board 31 is fixed by the lower surface 31a facing the mounting portion 14c being bonded to the mounting portion 14c with the adhesive 23. At this time, the adhesive 23 is prevented from entering the opening 16 and the screw hole 17 from the peripheral portion 14 d of the opening 16 and the peripheral portion 14 e of the screw hole 17. As a result, the circuit board 31 is in close contact with the mounting portion 14c so as to cover the entire periphery of the opening 16 so as to hermetically seal the flow path 15. Airtightness between the road and the opposite side is ensured.

そして、フローセンサ３２が開口部１６の略中央位置に配置される。フローセンサ３２は、前述したように薄く形成されており、従って、検出面３２ａは流路１５の内壁面１５ｄよりも外側に位置している。そして、検出面３２ａは、膨出部１８の平面部１８ｂと平行に対向している。   The flow sensor 32 is disposed at a substantially central position of the opening 16. As described above, the flow sensor 32 is formed thin, and thus the detection surface 32a is located outside the inner wall surface 15d of the flow path 15. The detection surface 32a faces the flat portion 18b of the bulging portion 18 in parallel.

次いで、回路基板３１は、図４に示すようにねじ２４により底板１４ａに固定される。回路基板３１は、載置部１４ｃが底板１４ａの上面１４ｂから僅かに高く形成されていることにより、下面３１ａが上面１４ｂから僅かに離隔して接触することが防止される。次いで、図１及び図２に示すようにハウジング１２に蓋体１３が装着される。   Next, the circuit board 31 is fixed to the bottom plate 14a with screws 24 as shown in FIG. Since the mounting portion 14c is formed slightly higher than the upper surface 14b of the bottom plate 14a, the circuit board 31 is prevented from contacting the lower surface 31a with being slightly separated from the upper surface 14b. Next, as shown in FIGS. 1 and 2, the lid 13 is attached to the housing 12.

次に上記構成の流量計１１の作用を説明する。図２の矢印で示すように流路１５の入口１５ａから流入した被測定流体は、整流器２１により整流されて流路１５内に流入する。流路１５に流入した被測定流体の流速分布は、その流れは流路内壁面１５ｄにおいて流速がゼロであり、流路１５の中心部に向かって徐々に流速が大きくなり、流路１５の中心部で最大流速となっている。従って、開口部１６の上流側においては図５の流速分布Ａで示すようになる。尚、図５は流路１５内における被測定流体の流体挙動及び流速分布を模式的に示したものである。   Next, the operation of the flow meter 11 having the above configuration will be described. As shown by the arrows in FIG. 2, the fluid to be measured that flows from the inlet 15 a of the flow path 15 is rectified by the rectifier 21 and flows into the flow path 15. The flow velocity distribution of the fluid to be measured that has flowed into the flow channel 15 is zero on the inner wall surface 15d of the flow channel, and the flow velocity gradually increases toward the center of the flow channel 15. The maximum flow velocity at the part. Accordingly, the flow velocity distribution A in FIG. FIG. 5 schematically shows the fluid behavior and flow velocity distribution of the fluid to be measured in the flow path 15.

そして、開口部１６の上流側の開口端１６ａにおいては、流路１５が急拡大したことにより直角状の角部１６ｃにより渦３５が発生する。この渦３５の影響により被測定流体の流れは流れ方向に対して流速が減速又は逆流するような流体挙動が生じる。このため、流速分布は渦３５の発生位置から下流側で渦３５の影響を受ける範囲（影響圏）３６内にある流路においては、流速分布Ｂで示すように流路１５の内壁面１５ｄから近い位置、即ち内壁面１５ｄから回路基板３１の下面３１ａまでの間の位置では流れ方向に対して流速が減速又は逆流するようなことがある。   And in the opening end 16a of the upstream of the opening part 16, when the flow path 15 expanded rapidly, the vortex 35 is generated by the right-angled corner part 16c. Due to the influence of the vortex 35, the flow of the fluid to be measured has a fluid behavior in which the flow velocity is decelerated or reversed in the flow direction. For this reason, in the flow path within the range (influence zone) 36 affected by the vortex 35 on the downstream side from the position where the vortex 35 is generated, the flow velocity distribution is from the inner wall surface 15d of the flow path 15 as indicated by the flow velocity distribution B. In a close position, that is, a position between the inner wall surface 15d and the lower surface 31a of the circuit board 31, the flow velocity may be reduced or backflowed with respect to the flow direction.

流路１５は、開口部１６と対向する流路内壁面１５ｄに開口端１６ａと対向する位置から開口部１６に向かって形成された膨出部１８の傾斜部１８ａにより開口部１６における急拡大による流れの影響が抑制され、渦３５の影響を受ける範囲（影響圏）３６が短くなる。即ち、開口部１６の上流側端１６ａの角部１６ｃにおいて発生する渦３５によって流路内壁面１５ｄから外側に離れた位置で流速がゼロになる位置（渦３５の影響圏３６を示す破線との交点位置）が、膨出部１８が形成されていない場合に比べて回路基板３１に向けてシフトする。   The flow path 15 is formed by a sudden expansion in the opening 16 by an inclined part 18a of the bulging part 18 formed toward the opening 16 from a position facing the opening end 16a on the flow path inner wall surface 15d facing the opening 16. The influence of the flow is suppressed, and the range (influence zone) 36 affected by the vortex 35 is shortened. That is, the position where the flow velocity becomes zero at a position away from the inner wall surface 15d of the flow path by the vortex 35 generated at the corner 16c of the upstream end 16a of the opening 16 (the broken line indicating the influence zone 36 of the vortex 35) (Intersection position) is shifted toward the circuit board 31 as compared with the case where the bulging portion 18 is not formed.

被測定流体が渦３５の影響を受ける範囲３６を脱して平面部１８ｂのフローセンサ３２の上流側に達すると、流速分布Ｃで示すように回路基板３１の下面３１ａにおいて流速がゼロとなり、流路１５の中心部に向かって徐々に流速が大きくなり、流路１５の中心部で最大となる。そして、このような流速分布は、流速分布Ｄで示すように平面部１８ｂのフローセンサ３２の下流側に至るまで維持される。   When the fluid to be measured escapes from the range 36 affected by the vortex 35 and reaches the upstream side of the flow sensor 32 in the plane portion 18b, the flow velocity becomes zero on the lower surface 31a of the circuit board 31 as shown by the flow velocity distribution C, and the flow path The flow velocity gradually increases toward the central portion of the flow path 15 and becomes maximum at the central portion of the flow path 15. Such a flow velocity distribution is maintained until reaching the downstream side of the flow sensor 32 in the flat surface portion 18b as indicated by the flow velocity distribution D.

被測定流体が開口部１６の下流側端面１６ｂを過ぎると、流量分布は再び流路１５の内壁面１５ｄにおいて流速がゼロとなり、流路１５の中心部に向かって徐々に流速が大きくなって流路の中心部で最大となる。   When the fluid to be measured passes the downstream end face 16 b of the opening 16, the flow rate distribution becomes zero again on the inner wall surface 15 d of the flow path 15, and the flow speed gradually increases toward the center of the flow path 15. Maximum at the center of the road.

これにより、開口部１６における被測定流体の層流がフローセンサ３２の上流側から下流側に至るまで維持される。この結果、フローセンサ３２の検出面３２ａにおいては安定した流速分布が得られ、フローセンサ３２は、出力が図６に示すように高流量の流域まで安定して正確に流量を測定することが可能となる。また、流路１５内を流れる被測定流体をフローセンサ３２の検出面３２ａに沿わせて流すことにより、被測定流体がフローセンサ３２の検出面３２ａに直接当たって被測定流体に含まれるゴミや粉塵が検出面３２ａに付着するのを防止することができる。   Thereby, the laminar flow of the fluid to be measured in the opening 16 is maintained from the upstream side to the downstream side of the flow sensor 32. As a result, a stable flow velocity distribution is obtained on the detection surface 32a of the flow sensor 32, and the flow sensor 32 can measure the flow rate stably and accurately up to a high flow rate basin as shown in FIG. It becomes. In addition, by flowing the fluid to be measured flowing in the flow path 15 along the detection surface 32a of the flow sensor 32, the fluid to be measured directly hits the detection surface 32a of the flow sensor 32 and the dust contained in the fluid to be measured It is possible to prevent dust from adhering to the detection surface 32a.

本発明に係る流量計の一実施形態を示す平面図である。It is a top view which shows one Embodiment of the flowmeter which concerns on this invention. 図１に示した流量計の矢線II―IIに沿う断面図である。It is sectional drawing which follows the arrow line II-II of the flowmeter shown in FIG. 図１に示したハウジングの回路基板収容室の上面図である。It is a top view of the circuit board accommodation chamber of the housing shown in FIG. 図２に示した流量計の矢線IV―IVに沿う一部断面図である。FIG. 4 is a partial cross-sectional view of the flow meter shown in FIG. 2 taken along an arrow IV-IV. 図２に示した流量計の流路内における被測定流体の流体挙動及び流速分布を模式的に示した説明図である。It is explanatory drawing which showed typically the fluid behavior and flow velocity distribution of the to-be-measured fluid in the flow path of the flowmeter shown in FIG. 図２に示した流量計の流量特性の一例を示すグラフである。It is a graph which shows an example of the flow characteristic of the flowmeter shown in FIG. 従来の流量計の一例を示す断面図である。It is sectional drawing which shows an example of the conventional flowmeter. 図７に示した流量計の流路内における被測定流体の流体挙動及び流速分布を模式的に示した説明図である。It is explanatory drawing which showed typically the fluid behavior and flow velocity distribution of the to-be-measured fluid in the flow path of the flowmeter shown in FIG. 図７に示した流量計の流量特性の一例を示すグラフである。It is a graph which shows an example of the flow characteristic of the flowmeter shown in FIG.

符号の説明Explanation of symbols

１ ハウジング
２ 流路
２ａ 入口
２ｂ 出口
２ｃ 内壁面
２ｄ 開口部
２ｅ 上流側開口端
２ｆ 角部
３ 整流器
４ 回路基板
４ａ 下面
５ フローセンサ
５ａ 検出面
７ 渦
８ 渦の影響を受ける範囲（影響圏）
９ 流量計
１１ 流量計
１２ ハウジング
１３ 蓋体
１４ 収容室（回路基板収容室）
１４ａ 底板（隔壁）
１４ｂ 上面
１４ｃ 載置部（周縁部）
１４ｄ 開口部の周縁部
１４ｅ ねじ孔の周縁部
１５ 流路
１５ａ 入口
１５ｂ 出口
１５ｃ 中央部
１５ｄ 内壁面
１６ 開口部
１６ａ，１６ｂ 開口端
１６ｃ，１６ｄ 角部
１７ ねじ孔
１８ 膨出部
１８ａ，１８ｃ 傾斜部
１８ｂ 平面部
２１ 整流器
２２ 金網
２３ 接着剤
２４ ねじ
３１ 回路基板
３１ａ 下面
３２ フローセンサ
３２ａ 検出面
３５ 渦
３６ 渦の影響を受ける範囲（影響圏）
Ａ，Ｂ，Ｃ，Ｄ 流路内における被測定流体の流速分布 DESCRIPTION OF SYMBOLS 1 Housing 2 Flow path 2a Inlet 2b Outlet 2c Inner wall surface 2d Opening 2e Upstream opening end 2f Corner 3 Rectifier 4 Circuit board 4a Lower surface 5 Flow sensor 5a Detection surface 7 Vortex 8 Range affected by vortex (influence zone)
9 Flowmeter 11 Flowmeter 12 Housing 13 Lid 14 Storage chamber (Circuit board storage chamber)
14a Bottom plate (partition wall)
14b Upper surface 14c Placement part (peripheral part)
14d Peripheral part of opening part 14e Peripheral part of screw hole 15 Flow path 15a Inlet 15b Outlet 15c Central part 15d Inner wall surface 16 Opening part 16a, 16b Opening end 16c, 16d Corner part 17 Screw hole 18 Swelling part 18a, 18c Inclined part 18b Plane portion 21 Rectifier 22 Wire mesh 23 Adhesive 24 Screw 31 Circuit board 31a Lower surface 32 Flow sensor 32a Detection surface 35 Vortex 36 Range affected by vortex (influence zone)
A, B, C, D Flow velocity distribution of fluid to be measured in the flow path

Claims (2)

入口から出口まで直管をなす流路の途中の壁面に長手方向に沿って長い開口部が形成されたハウジングと、前記ハウジングに取り付けられ前記流路の外側に前記開口部を密封して覆うように配置された回路基板と、前記回路基板に設けられ前記開口部内に位置しかつ検出面が前記流路の内壁面よりも流路中心軸線から見て外側に位置するフローセンサとを備えた流量計であって、
前記流路の前記開口部と対向する側の内壁面に当該流路の入口から流入した被測定流体を前記フローセンサの検出面に沿わせて流すように膨出部を形成し、
前記開口部が前記回路基板によって覆われることにより流路の一部となっている流路部分の断面積と、前記開口部の上流側及び下流側の断面積とが略同じになるように形成されていることを特徴とする流量計。 A housing in which a long opening is formed along the longitudinal direction on the wall surface in the middle of the flow path that forms a straight pipe from the inlet to the outlet, and the opening is sealed and covered outside the flow path attached to the housing And a flow sensor provided in the circuit board and positioned in the opening and having a detection surface positioned outside the inner wall surface of the flow channel as viewed from the flow channel center axis. A total of
Forming a bulging portion so that the fluid to be measured flowing from the inlet of the flow channel flows along the detection surface of the flow sensor on the inner wall surface of the flow channel facing the opening,
The opening is covered with the circuit board so that the cross-sectional area of the flow path part that is a part of the flow path is substantially the same as the cross-sectional area of the upstream side and the downstream side of the opening part. A flow meter characterized by being . 前記膨出部は前記流路の内壁面が前記フローセンサ側に徐々に高くなる傾斜部と、前記フローセンサと対向する領域に形成された平面部と、当該平面部から前記内壁面に向かって徐々に低くなる傾斜部とが連続して形成されていることを特徴とする、請求項１に記載の流量計。   The bulging portion includes an inclined portion in which the inner wall surface of the flow path gradually increases toward the flow sensor, a flat portion formed in a region facing the flow sensor, and the flat portion toward the inner wall surface. The flowmeter according to claim 1, wherein the gradually decreasing slope portion is continuously formed.
JP2007054870A 2007-03-05 2007-03-05 Flowmeter Active JP4993352B2 (en)

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