JP4987321B2 - X-ray inspection apparatus and X-ray inspection method - Google Patents

X-ray inspection apparatus and X-ray inspection method Download PDF

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JP4987321B2
JP4987321B2 JP2006053661A JP2006053661A JP4987321B2 JP 4987321 B2 JP4987321 B2 JP 4987321B2 JP 2006053661 A JP2006053661 A JP 2006053661A JP 2006053661 A JP2006053661 A JP 2006053661A JP 4987321 B2 JP4987321 B2 JP 4987321B2
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JP2007232530A (en
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徳康 小林
晋 内藤
智 山本
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Toshiba Corp
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Description

本発明は、Ｘ線検査装置およびＸ線検査方法に関する。   The present invention relates to an X-ray inspection apparatus and an X-ray inspection method.

一般に、Ｘ線検査装置は被検体を透過したＸ線による被検体内部および表面の透過像をもとに検査を行うものである。   In general, an X-ray inspection apparatus performs an inspection based on transmission images of the inside and surface of a subject by X-rays transmitted through the subject.

このようなＸ線検査装置としては、Ｘ線を発生するＸ線源とＸ線フィルム、Ｘ線イメージインテンシファイアあるいはＸ線ＣＣＤカメラなどのＸ線二次元検出器とで被検体を挟み込み、被検体の透過像を得るものがある。また、特殊なＸ線検査装置として、Ｘ線源からのＸ線を被検体表面に照射し、そこから放たれる蛍光Ｘ線あるいは散乱Ｘ線を二次元的に検出して被検体表面の元素分布分析を行うものがある（たとえば特許文献１および２参照）。
特開２０００−５５８４２号公報 特開２００３−３２９６２２号公報 Such an X-ray inspection apparatus includes an X-ray source that generates X-rays and an X-ray two-dimensional detector such as an X-ray film, an X-ray image intensifier, or an X-ray CCD camera. Some obtain a transmission image of a specimen. Further, as a special X-ray inspection apparatus, X-rays from an X-ray source are irradiated on the subject surface, and fluorescent X-rays or scattered X-rays emitted from the subject surface are two-dimensionally detected to detect elements on the subject surface. Some perform distribution analysis (see, for example, Patent Documents 1 and 2).
JP 2000-55842 A JP 2003-329622 A

Ｘ線検査装置においては、厚さ数１０ｃｍ程度の金属板表面を１０μｍ程度の空間分解能で検査をする場合、Ｘ線透過検査では高エネルギー且つ高強度のＸ線が１０μｍ以下のＸ線焦点から発生するＸ線源が必要となる。このような場合、Ｘ線源において大電力密度の電子がＸ線を発生する金属ターゲットに吸収されるため、熱衝撃に対する金属ターゲットの耐久性に問題があり、実現が困難である。したがって検査に必要なＸ線強度と空間分解能の両立ができないことが課題であった。   In X-ray inspection equipment, when a surface of a metal plate with a thickness of several tens of centimeters is inspected with a spatial resolution of about 10 μm, high-energy and high-intensity X-rays are generated from an X-ray focal point of 10 μm or less in X-ray transmission inspection. X-ray source is required. In such a case, electrons with a high power density are absorbed by the metal target that generates X-rays in the X-ray source, so that there is a problem with the durability of the metal target against thermal shock, which is difficult to realize. Therefore, it has been a problem that the X-ray intensity and the spatial resolution necessary for the inspection cannot be compatible.

また、蛍光Ｘ線あるいは散乱Ｘ線を利用する検査装置においては、Ｘ線源の形状、大きさの制限を受けるため、使用できるＸ線源強度、個数に限界が生じ、被検体表面への照射Ｘ線強度が制限される。これに伴って、蛍光および散乱Ｘ線強度も制限を受ける。このため、検出に必要なＸ線強度を確保することが困難である点が課題であった。   In addition, in an inspection apparatus that uses fluorescent X-rays or scattered X-rays, the shape and size of the X-ray source are limited, so that there is a limit to the intensity and number of X-ray sources that can be used, and irradiation to the surface of the subject is performed. X-ray intensity is limited. Along with this, the fluorescence and scattered X-ray intensity are also limited. For this reason, the point that it was difficult to ensure the X-ray intensity required for detection was a problem.

本発明は上述した課題を解決するためになされたものであり、Ｘ線によって高い空間分解能で被検体の表面形状を検査できるようにすることを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to make it possible to inspect the surface shape of a subject with high spatial resolution using X-rays.

上記目的を解決するため、本発明は、Ｘ線検査装置において、真空容器と、前記真空容器に収められた、電子を放出する複数のリング状の電子エミッタと、前記電子エミッタから放出されて所定の電圧で加速された電子が所定の電子衝突領域に衝突すると所定のＸ線照射領域に向かうＸ線を放出する、前記真空容器に収められ、前記複数のリング状の電子エミッタのそれぞれに対して設けられた複数のリング状のＸ線ターゲットと、前記Ｘ線ターゲットから放出されたＸ線が前記Ｘ線照射領域に配置された被検体に照射されたときに前記被検体から放たれるＸ線が通過する反射Ｘ線コリメータと、前記反射Ｘ線コリメータを通過したＸ線を検出するＸ線二次元検出器と、前記電子エミッタと前記Ｘ線ターゲットの対にそれぞれ前記所定の電圧を印加して、前記複数のリング状の電子エミッタに互いに時間差をつけてそれぞれパルス的に電子を放出させる電源と、を有し、前記複数のリング状の電子エミッタおよび前記複数のリング状のＸ線ターゲットは、前記真空容器の円筒軸を中心として配置されていることを特徴とする。 In order to solve the above-mentioned object, in the X-ray inspection apparatus, the present invention provides a vacuum vessel, a plurality of ring-shaped electron emitters that emit electrons stored in the vacuum vessel, and a predetermined amount emitted from the electron emitter. When the electrons accelerated by the voltage of the electron beam collide with a predetermined electron collision region, X-rays emitted toward a predetermined X-ray irradiation region are emitted, stored in the vacuum vessel, and each of the plurality of ring-shaped electron emitters A plurality of provided ring-shaped X-ray targets and X-rays emitted from the subject when the subject placed in the X-ray irradiation region is irradiated with the X-rays emitted from the X-ray target. There the reflected X-ray collimator for passing an X-ray two-dimensional detector for detecting the X-rays having passed through the reflective X-ray collimator, the electron emitter and each said predetermined voltage to the pair of the X-ray target Applied to, with a mutually time difference to the plurality of ring-shaped electron emitter possess a power source for pulsed release of the electrons, respectively, wherein the plurality of ring-shaped electron emitters and the plurality of ring-shaped X-ray The target is arranged around the cylindrical axis of the vacuum vessel .

また、本発明は、Ｘ線検査方法において、電子を、真空容器の円筒軸を中心とする複数のリング状の電子エミッタから順次パルス状に放出する電子放出工程と、前記電子放出工程で放出された電子を所定の電圧で加速する電子加速工程と、前記電子加速工程で加速された電子を、前記複数のリング状の電子エミッタにそれぞれ対応して前記真空容器の円筒軸を中心に設けられた複数のリング状のＸ線ターゲットに衝突させ、所定のＸ線照射領域に向かうＸ線を放出させるＸ線放出工程と、前記Ｘ線放出工程で放出されたＸ線を前記Ｘ線照射領域に配置された被検体に照射する照射工程と、前記被検体から放たれるＸ線を反射Ｘ線コリメータによって所定の方向にコリメートするコリメート工程と、前記コリメート工程で前記所定の方向にコリメートされたＸ線を検出するＸ線二次元検出工程と、を有することを特徴とする。 Further, the present invention provides an X-ray inspection method in which electrons are emitted in a pulsed manner sequentially from a plurality of ring-shaped electron emitters centered on a cylindrical axis of a vacuum vessel, and the electron emission step releases the electrons. An electron acceleration step of accelerating the electrons at a predetermined voltage, and the electrons accelerated in the electron acceleration step are provided around the cylindrical axis of the vacuum vessel corresponding to the plurality of ring-shaped electron emitters, respectively. An X-ray emission process for colliding with a plurality of ring-shaped X-ray targets to emit X-rays toward a predetermined X-ray irradiation area, and the X-rays emitted in the X-ray emission process are arranged in the X-ray irradiation area An irradiation step of irradiating the subject, a collimation step of collimating X-rays emitted from the subject in a predetermined direction by a reflection X-ray collimator, and collimation in the predetermined direction in the collimation step And having an X-ray two-dimensional detection step of detecting a over bets X-ray, a.

本発明によれば、Ｘ線によって高い空間分解能で被検体の表面形状を検査できる。   According to the present invention, the surface shape of a subject can be examined with high spatial resolution by X-rays.

本発明に係るＸ線検査装置の実施形態を、図面を参照して説明する。なお、同一または類似の構成には同一の符号を付し、重複する説明は省略する。   An embodiment of an X-ray inspection apparatus according to the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or similar structure, and the overlapping description is abbreviate | omitted.

［実施形態１］
図１は、本発明に係る実施形態１のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図である。 [Embodiment 1]
1A and 1B show an X-ray inspection apparatus according to Embodiment 1 of the present invention, in which FIG. 1A is a partially sectional perspective view, and FIG. 1B is a longitudinal sectional view.

このＸ線検査装置は、Ｘ線源１、コリメータ２、Ｘ線二次元検出器３および遮蔽体４から構成されている。   The X-ray inspection apparatus includes an X-ray source 1, a collimator 2, an X-ray two-dimensional detector 3 and a shield 4.

Ｘ線源１は真空容器５を有している。真空容器５は、円筒状の外筒５ａと、外筒５ａよりも径が小さく、円筒５ａと軸を同じくする円筒状の内筒５ｂと、外筒５ａと内筒５ｂの底部をつなぐドーナツ状の２枚の円板５ｃで囲まれる真空空間を有している。真空容器５の内部には、リング状の電子エミッタ６、および、リング状のＸ線ターゲット７が収められている。電子エミッタ６およびＸ線ターゲット７は、いずれも真空容器５の円筒軸を中心とし、その円筒軸方向に所定の間隔で配置されている。Ｘ線ターゲット７の一つの表面は、真空容器５の円筒軸を中心とする円錐面の一部である。Ｘ線ターゲット７は円板５ｃの近傍に配置されている。   The X-ray source 1 has a vacuum vessel 5. The vacuum vessel 5 has a cylindrical outer cylinder 5a, a cylindrical inner cylinder 5b having a smaller diameter than the outer cylinder 5a and having the same axis as the cylinder 5a, and a donut shape connecting the bottoms of the outer cylinder 5a and the inner cylinder 5b. A vacuum space surrounded by the two discs 5c. Inside the vacuum vessel 5, a ring-shaped electron emitter 6 and a ring-shaped X-ray target 7 are accommodated. Both the electron emitter 6 and the X-ray target 7 are arranged around the cylindrical axis of the vacuum vessel 5 at a predetermined interval in the cylindrical axis direction. One surface of the X-ray target 7 is a part of a conical surface centering on the cylindrical axis of the vacuum vessel 5. The X-ray target 7 is disposed in the vicinity of the disk 5c.

円板５ｃの近傍には、真空容器５の円筒軸を中心とする円形内だけにＸ線を透過させる入射Ｘ線コリメータ１０が設けられている。また、真空容器５の一部は遮蔽体４で覆われていて、Ｘ線が入射Ｘ線コリメータ１０以外の部分に放出されないようになっている。   An incident X-ray collimator 10 that transmits X-rays only within a circle centered on the cylindrical axis of the vacuum vessel 5 is provided in the vicinity of the disc 5c. Further, a part of the vacuum vessel 5 is covered with the shield 4 so that X-rays are not emitted to portions other than the incident X-ray collimator 10.

電子エミッタ６には、高電圧線１３を介して電源２０が接続されており、Ｘ線ターゲット７に対して負電位が印加できるようになっている。   A power source 20 is connected to the electron emitter 6 via a high voltage line 13 so that a negative potential can be applied to the X-ray target 7.

内筒５ｂの内側には、真空容器５の円筒軸方向が円板５ｃとほぼ同じ位置に、反射Ｘ線コリメータ２が配設されている。また、Ｘ線二次元検出器３がその上方に配設されている。Ｘ線二次元検出器３は、画像信号線１４を介して、外部モニタ２１などに接続されている。   Inside the inner cylinder 5b, the reflective X-ray collimator 2 is disposed at a position where the cylindrical axis direction of the vacuum vessel 5 is substantially the same as that of the disk 5c. An X-ray two-dimensional detector 3 is disposed above the X-ray two-dimensional detector 3. The X-ray two-dimensional detector 3 is connected to an external monitor 21 or the like via an image signal line 14.

電子エミッタ６からリング状に電子８が放出されると、電子エミッタ６とＸ線ターゲット７の間に印加された電圧によって電子８は加速し、Ｘ線ターゲット７に衝突する。加速した電子８がＸ線ターゲット７に衝突することにより、Ｘ線９が発生する。   When the electrons 8 are emitted in a ring shape from the electron emitter 6, the electrons 8 are accelerated by the voltage applied between the electron emitter 6 and the X-ray target 7 and collide with the X-ray target 7. X-rays 9 are generated when the accelerated electrons 8 collide with the X-ray target 7.

Ｘ線ターゲット７から発生したＸ線９は入射Ｘ線用コリメータ１０を通過し、円板５ｃと対向する位置のＸ線照射面１１に照射される。このとき、Ｘ線照射面１１に照射されたＸ線９は、リング状ターゲット７の各点から発生したＸ線がＸ線照射面１１に集中するため、照射Ｘ線強度は高強度となる。また、リング状のＸ線ターゲット７の全体に電子８が衝突するようにすれば、Ｘ線ターゲット７の受ける単位面積あたりの熱衝撃を緩和することができる。このため、リング状エミッタ６から発生する電子８の全個数を増加することができ、発生するＸ線強度をさらに高くすることができる。   The X-ray 9 generated from the X-ray target 7 passes through the incident X-ray collimator 10 and is irradiated onto the X-ray irradiation surface 11 at a position facing the disk 5c. At this time, the X-ray 9 irradiated to the X-ray irradiation surface 11 has a high irradiation X-ray intensity because X-rays generated from each point of the ring-shaped target 7 concentrate on the X-ray irradiation surface 11. Further, if the electrons 8 collide with the entire ring-shaped X-ray target 7, the thermal shock per unit area received by the X-ray target 7 can be reduced. For this reason, the total number of electrons 8 generated from the ring-shaped emitter 6 can be increased, and the generated X-ray intensity can be further increased.

Ｘ線が照射されたＸ線照射面１１からは、散乱および蛍光Ｘ線１２が発生し、反射Ｘ線コリメータ２を通過した散乱および蛍光Ｘ線１２のみがＸ線二次元検出器３に入射し、Ｘ線信号として検出される。このとき、Ｘ線二次元検出器３に入射した散乱および蛍光Ｘ線１２はＸ線照射面１１の凹凸などの表面状態により強度が変化する。このため、Ｘ線二次元検出器３で検出したＸ線信号を画像化すると、Ｘ線照射面１１の凹凸などの表面状態を観測することができる。   Scattering and fluorescent X-rays 12 are generated from the X-ray irradiation surface 11 irradiated with X-rays, and only the scattered and fluorescent X-rays 12 that have passed through the reflective X-ray collimator 2 enter the X-ray two-dimensional detector 3. , Detected as an X-ray signal. At this time, the intensity of the scattered X-rays and fluorescent X-rays 12 incident on the X-ray two-dimensional detector 3 changes depending on the surface state of the X-ray irradiation surface 11 such as irregularities. For this reason, when the X-ray signal detected by the X-ray two-dimensional detector 3 is imaged, the surface state of the X-ray irradiation surface 11 such as irregularities can be observed.

表面状態変化の空間分解能はコリメータ２の穴径に依存するため、高分解能検査をする場合はコリメータ２の穴径を小さくする。コリメータ２の穴径を小さくすると、コリメータ２を通過するＸ線量が減少し検出感度が低下する。したがって、高分解能高感度検査を行うためには照射Ｘ線の強度を高くする必要がある。   Since the spatial resolution of the surface state change depends on the hole diameter of the collimator 2, the hole diameter of the collimator 2 is reduced when performing a high-resolution inspection. When the hole diameter of the collimator 2 is reduced, the X-ray dose passing through the collimator 2 is reduced and the detection sensitivity is lowered. Therefore, it is necessary to increase the intensity of irradiated X-rays in order to perform a high-resolution and high-sensitivity inspection.

本実施形態によれば、リング状のＸ線ターゲット７を用いるために、Ｘ線ターゲットの熱負荷を大きくすることなく照射Ｘ線強度を高めることができ、高分解能高感度表面検査が可能となる。   According to the present embodiment, since the ring-shaped X-ray target 7 is used, the irradiation X-ray intensity can be increased without increasing the thermal load of the X-ray target, and high-resolution and high-sensitivity surface inspection can be performed. .

なお、Ｘ線ターゲット７および電子エミッタ６の形状は、Ｘ線ターゲット７の受ける単位面積あたりの熱衝撃を緩和できれば、リング状以外でもよい。   The X-ray target 7 and the electron emitter 6 may have shapes other than the ring shape as long as the thermal shock per unit area received by the X-ray target 7 can be reduced.

［実施形態２］
図２は、本発明に係る実施形態２のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図である。 [Embodiment 2]
2A and 2B are X-ray inspection apparatuses according to the second embodiment of the present invention, in which FIG. 2A is a partially sectional perspective view, and FIG. 2B is a longitudinal sectional view.

本実施形態のＸ線検査装置は、複数組のリング状のエミッタ６とリング状のＸ線ターゲット７を備えている。複数のリング状電子エミッタ６からの電子放出に時間差をつけ、１つの電子エミッタ６からの電子放出はパルス的である。このため、放出される電子８を受けるリング状のＸ線ターゲット７の熱衝撃もパルス的になる。したがって、Ｘ線ターゲット７の平均的な熱入力は低くなる。このため、パルス的に発生する電子８の全個数を増加することが可能となり、照射Ｘ線強度を高くすることができる。   The X-ray inspection apparatus of this embodiment includes a plurality of sets of ring-shaped emitters 6 and ring-shaped X-ray targets 7. A time difference is given to the electron emission from the plurality of ring-shaped electron emitters 6, and the electron emission from one electron emitter 6 is pulsed. For this reason, the thermal shock of the ring-shaped X-ray target 7 that receives the emitted electrons 8 also becomes pulsed. Therefore, the average heat input of the X-ray target 7 becomes low. For this reason, it is possible to increase the total number of electrons 8 generated in a pulsed manner, and the irradiation X-ray intensity can be increased.

このように、本実施形態のＸ線検査装置によって、照射Ｘ線強度を高めることができるため、高分解能高感度表面検査が可能となる。   As described above, since the irradiation X-ray intensity can be increased by the X-ray inspection apparatus of the present embodiment, a high-resolution and high-sensitivity surface inspection can be performed.

［実施形態３］
図３は、本発明に係る実施形態３のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図である。 [Embodiment 3]
3A and 3B are X-ray inspection apparatuses according to Embodiment 3 of the present invention, in which FIG. 3A is a partially sectional perspective view, and FIG. 3B is a longitudinal sectional view.

本実施形態のＸ線検査装置は、実施形態１の反射Ｘ線コリメータの代わりに、ピンホールコリメータ１５を用いる。本実施形態のＸ線検査装置は、Ｘ線照射面１１を物面、Ｘ線二次元検出器３を像面としたピンホールカメラと同様のものであり、簡易な構成での表面二次元検査が可能となる。   The X-ray inspection apparatus of the present embodiment uses a pinhole collimator 15 instead of the reflection X-ray collimator of the first embodiment. The X-ray inspection apparatus of this embodiment is the same as a pinhole camera having the X-ray irradiation surface 11 as an object surface and the X-ray two-dimensional detector 3 as an image surface, and a surface two-dimensional inspection with a simple configuration. Is possible.

［実施形態４］
図４は、本発明に係る実施形態４のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図である。 [Embodiment 4]
4A and 4B are X-ray inspection apparatuses according to Embodiment 4 of the present invention, in which FIG. 4A is a partially sectional perspective view, and FIG. 4B is a longitudinal sectional view.

本実施形態のＸ線検査装置は、実施形態３のＸ線検査装置に、ピンホールコリメータ１５の位置を移動する駆動機構１６を追加したものである。駆動機構１６によって、ピンホールコリメータ１５は、Ｘ線照射面１１からＸ線二次元検出器３に向かう軸方向に移動できるようになっている。   The X-ray inspection apparatus of this embodiment is obtained by adding a drive mechanism 16 that moves the position of the pinhole collimator 15 to the X-ray inspection apparatus of Embodiment 3. The drive mechanism 16 allows the pinhole collimator 15 to move in the axial direction from the X-ray irradiation surface 11 toward the X-ray two-dimensional detector 3.

図５は、ピンホールコリメータ１５の位置と像の大きさの関係を示す模式図である。ピンホールコリメータ１５が図５（ａ）の位置にある場合を基準として、図５（ｂ）のようにピンホールコリメータ１５がＸ線照射面１１（物面）に近づくと、Ｘ線二次元検出器３のＸ線が入射する面（像面）に映る像は大きくなる。反対に、図５（ｃ）のようにピンホールコリメータ１５がＸ線二次元検出器３に近づくと、Ｘ線二次元検出器３のＸ線が入射する面に映る像は小さくなる。   FIG. 5 is a schematic diagram showing the relationship between the position of the pinhole collimator 15 and the size of the image. With reference to the case where the pinhole collimator 15 is at the position shown in FIG. 5A, when the pinhole collimator 15 approaches the X-ray irradiation surface 11 (object surface) as shown in FIG. The image shown on the surface (image plane) on which the X-rays of the device 3 are incident becomes large. On the contrary, when the pinhole collimator 15 approaches the X-ray two-dimensional detector 3 as shown in FIG. 5C, the image reflected on the surface of the X-ray two-dimensional detector 3 on which the X-rays are incident becomes small.

本実施形態のＸ線検査装置では、ピンホールコリメータの１５の位置を変化させることで、物面からピンホールコリメータ１５までの距離とピンホールコリメータ１５から像面までの距離の比が変化する。すなわち、検出したＸ線照射面１１の表面像の拡大、縮小が可能となる。   In the X-ray inspection apparatus of the present embodiment, the ratio of the distance from the object surface to the pinhole collimator 15 and the distance from the pinhole collimator 15 to the image plane changes by changing the position of the pinhole collimator 15. That is, the surface image of the detected X-ray irradiation surface 11 can be enlarged or reduced.

［実施形態５］
図６は、本発明に係る実施形態５のＸ線検査装置の断面図である。 [Embodiment 5]
FIG. 6 is a cross-sectional view of the X-ray inspection apparatus according to the fifth embodiment of the present invention.

本実施形態のＸ線検査装置は、実施形態３とＸ線検査装置のピンホールコリメータ１５の代わりにテーパー状コリメータ１９を用いる。テーパー状コリメータ１９は、散乱および蛍光Ｘ線１２が通過する方向に所定の厚みを有していて、散乱および蛍光Ｘ線１２が通過する部分には、軸を同じくする円錐が頂点部分で結合した形状の穴が貫通している。   The X-ray inspection apparatus of the present embodiment uses a tapered collimator 19 instead of the pinhole collimator 15 of the third embodiment and the X-ray inspection apparatus. The tapered collimator 19 has a predetermined thickness in the direction in which the scattered and fluorescent X-rays 12 pass, and a cone having the same axis is coupled at the apex portion to the portion through which the scattered and fluorescent X-rays 12 pass. A hole of shape penetrates.

図７は、コリメータの形状とコリメートされたＸ線および漏洩Ｘ線の関係を模式的に示す断面図である。   FIG. 7 is a cross-sectional view schematically showing the relationship between the shape of the collimator and collimated X-rays and leakage X-rays.

表面状態検査の空間分解能はコリメータの穴径によって決まる。図７（ａ）のように、コリメータとして、薄い板に貫通孔を開けた薄い板厚のコリメータ１７を用いた場合には、Ｘ線強度が大きいとＸ線を十分に遮蔽することができない場合がある。この場合には、コリメータの穴径に依存した空間分解能を確保することができない。また、図７（ｂ）のように、コリメータの穴径を一定のまま板厚を厚くした厚い板厚のコリメータ１８を用いると、必要なＸ線までもが遮蔽され、検出感度が低下する。   The spatial resolution of surface condition inspection is determined by the hole diameter of the collimator. As shown in FIG. 7A, when a thin plate thickness collimator 17 having a through hole in a thin plate is used as a collimator, X-rays cannot be sufficiently shielded if the X-ray intensity is high. There is. In this case, the spatial resolution depending on the hole diameter of the collimator cannot be ensured. Further, as shown in FIG. 7B, when a thick collimator 18 having a thick plate thickness with a constant collimator hole diameter is used, even necessary X-rays are shielded, and the detection sensitivity is lowered.

本実施形態のＸ線検査装置では、図７（ｃ）のようにコリメータの貫通部をテーパー状としたことで、必要なＸ線を通過させたまま、コリメータの厚さを厚くすることができる。このため、不要な漏洩Ｘ線を遮蔽し、検査に必要なＸ線だけを検出することができ、高分解能高感度検査が可能となる。   In the X-ray inspection apparatus of the present embodiment, the collimator can be made thicker while allowing necessary X-rays to pass therethrough by forming the penetrating portion of the collimator into a tapered shape as shown in FIG. 7C. . For this reason, unnecessary leakage X-rays can be shielded and only X-rays necessary for inspection can be detected, and high-resolution and high-sensitivity inspection can be performed.

なお、以上の説明は単なる例示であり、本発明は上述の各実施形態に限定されず、様々な形態で実施することができる。   The above description is merely an example, and the present invention is not limited to the above-described embodiments, and can be implemented in various forms.

本発明に係る実施形態１のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図。BRIEF DESCRIPTION OF THE DRAWINGS It is the X-ray inspection apparatus of Embodiment 1 which concerns on this invention, Comprising: (a) is a partial cross section perspective view, (b) is a longitudinal cross-sectional view. 本発明に係る実施形態２のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図。It is the X-ray inspection apparatus of Embodiment 2 which concerns on this invention, Comprising: (a) is a partial cross section perspective view, (b) is a longitudinal cross-sectional view. 本発明に係る実施形態３のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図。It is the X-ray inspection apparatus of Embodiment 3 which concerns on this invention, Comprising: (a) is a partial cross section perspective view, (b) is a longitudinal cross-sectional view. 本発明に係る実施形態４のＸ線検査装置であって、（ａ）は一部断面斜視図、（ｂ）は縦断面図。It is the X-ray inspection apparatus of Embodiment 4 which concerns on this invention, Comprising: (a) is a partial cross section perspective view, (b) is a longitudinal cross-sectional view. ピンホールコリメータの位置と像の大きさの関係を示す模式図。The schematic diagram which shows the relationship between the position of a pinhole collimator, and the magnitude | size of an image. 本発明に係る実施形態５のＸ線検査装置の縦断面図。The longitudinal cross-sectional view of the X-ray inspection apparatus of Embodiment 5 which concerns on this invention. コリメータの形状とコリメートされたＸ線および漏洩Ｘ線の関係を模式的に示す断面図。Sectional drawing which shows typically the relationship between the shape of a collimator, the collimated X-ray | X_line, and leakage X-ray | X_line.

符号の説明Explanation of symbols

１…Ｘ線源、２…コリメータ、３…Ｘ線二次元検出器、４…遮蔽体、５…真空容器、５ａ…外筒、５ｂ…内筒、５ｃ…円板、６…電子エミッタ、７…Ｘ線ターゲット、８…電子、９…Ｘ線、１０…入射Ｘ線用コリメータ、１１…Ｘ線照射面、１２…散乱および蛍光Ｘ線、１３…高電圧線、１４…画像信号線、１５…ピンホールコリメータ、１６…ピンホールコリメータ駆動機構、１７…薄い板厚のコリメータ、１８…厚い板厚のコリメータ、１９…テーパー状コリメータ、２０…電源、２１…外部モニタ   DESCRIPTION OF SYMBOLS 1 ... X-ray source, 2 ... Collimator, 3 ... X-ray two-dimensional detector, 4 ... Shielding body, 5 ... Vacuum container, 5a ... Outer cylinder, 5b ... Inner cylinder, 5c ... Disc, 6 ... Electron emitter, 7 ... X-ray target, 8 ... electron, 9 ... X-ray, 10 ... incident X-ray collimator, 11 ... X-ray irradiated surface, 12 ... scattered and fluorescent X-ray, 13 ... high voltage line, 14 ... image signal line, 15 DESCRIPTION OF SYMBOLS ... Pinhole collimator, 16 ... Pinhole collimator drive mechanism, 17 ... Thin plate thickness collimator, 18 ... Thick plate thickness collimator, 19 ... Tapered collimator, 20 ... Power supply, 21 ... External monitor

Claims (6)

真空容器と、
前記真空容器に収められた、電子を放出する複数のリング状の電子エミッタと、
前記電子エミッタから放出されて所定の電圧で加速された電子が所定の電子衝突領域に衝突すると所定のＸ線照射領域に向かうＸ線を放出する、前記真空容器に収められ、前記複数のリング状の電子エミッタのそれぞれに対して設けられた複数のリング状のＸ線ターゲットと、
前記Ｘ線ターゲットから放出されたＸ線が前記Ｘ線照射領域に配置された被検体に照射されたときに前記被検体から放たれるＸ線が通過する反射Ｘ線コリメータと、
前記反射Ｘ線コリメータを通過したＸ線を検出するＸ線二次元検出器と、
前記電子エミッタと前記Ｘ線ターゲットの対にそれぞれ前記所定の電圧を印加して、前記複数のリング状の電子エミッタに互いに時間差をつけてそれぞれパルス的に電子を放出させる電源と、
を有し、前記複数のリング状の電子エミッタおよび前記複数のリング状のＸ線ターゲットは、前記真空容器の円筒軸を中心として配置されていることを特徴とするＸ線検査装置。 A vacuum vessel;
A plurality of ring-shaped electron emitters that emit electrons, housed in the vacuum vessel;
When the electrons emitted from the electron emitter and accelerated at a predetermined voltage collide with a predetermined electron collision region, the X-rays are emitted to a predetermined X-ray irradiation region and are stored in the vacuum vessel, and the plurality of ring shapes A plurality of ring-shaped X-ray targets provided for each of the electron emitters;
A reflective X-ray collimator through which X-rays emitted from the subject pass when X-rays emitted from the X-ray target are irradiated on the subject arranged in the X-ray irradiation region;
And X-ray two-dimensional detector for detecting the X-rays having passed through the reflective X-ray collimator,
A power source that applies the predetermined voltage to each of the pair of the electron emitter and the X-ray target, and causes the plurality of ring-shaped electron emitters to emit electrons in a pulsed manner with a time difference from each other;
Have a, the plurality of ring-shaped electron emitter and the plurality of ring-shaped X-ray target of, X-ray inspection apparatus characterized by being arranged around the cylindrical axis of the vacuum vessel. 前記反射Ｘ線コリメータは、前記被検体側の表面に入射したＸ線を完全に遮蔽可能な厚さの板に前記板の板厚方向を軸として前記Ｘ線二次元検出器およびその反対方向に向かって広がった２つの円錐形が結合した形状のピンホールを設けたものであることを特徴とする請求項１記載のＸ線検査装置。 The reflected X-ray collimator, wherein the X-ray two-dimensional detector and the opposite direction the thickness direction of the plate to the plate surface thickness that fully shield the X-rays incident on of the subject side as an axis X-ray examination apparatus as claimed in claim 1, wherein the headed spreads two conical is provided with a pin hole of the bound shape. 前記反射Ｘ線コリメータを移動させるコリメータ駆動手段を有することを特徴とする請求項２記載のＸ線検査装置。 The X-ray inspection apparatus according to claim 2, further comprising a collimator driving unit that moves the reflection X-ray collimator. 電子を、真空容器の円筒軸を中心とする複数のリング状の電子エミッタから順次パルス状に放出する電子放出工程と、
前記電子放出工程で放出された電子を所定の電圧で加速する電子加速工程と、
前記電子加速工程で加速された電子を、前記複数のリング状の電子エミッタにそれぞれ対応して前記真空容器の円筒軸を中心に設けられた複数のリング状のＸ線ターゲットに衝突させ、所定のＸ線照射領域に向かうＸ線を放出させるＸ線放出工程と、
前記Ｘ線放出工程で放出されたＸ線を前記Ｘ線照射領域に配置された被検体に照射する照射工程と、
前記被検体から放たれるＸ線を反射Ｘ線コリメータによって所定の方向にコリメートするコリメート工程と、
前記コリメート工程で前記所定の方向にコリメートされたＸ線を検出するＸ線二次元検出工程と、
を有することを特徴とするＸ線検査方法。 An electron emission step of emitting electrons sequentially from a plurality of ring-shaped electron emitters around the cylindrical axis of the vacuum vessel ; and
An electron acceleration step of accelerating the electrons emitted in the electron emission step at a predetermined voltage;
Electrons accelerated in the electron accelerating step are caused to collide with a plurality of ring-shaped X-ray targets provided around the cylindrical axis of the vacuum vessel corresponding to the plurality of ring-shaped electron emitters, respectively. An X-ray emission process for emitting X-rays toward the X-ray irradiation region;
An irradiation step of irradiating the subject arranged in the X-ray irradiation region with the X-rays emitted in the X-ray emission step;
A collimating step of collimating X-rays emitted from the subject in a predetermined direction by a reflective X-ray collimator;
And X-ray two-dimensional detection step of detecting the X-rays collimated in the predetermined direction by the collimating step,
An X-ray inspection method characterized by comprising: 前記反射Ｘ線コリメータは、前記被検体側の表面に入射したＸ線を完全に遮蔽可能な厚さの板に前記板の板厚方向を軸としてＸ線二次元検出器およびその反対方向に向かって広がった２つの円錐形が結合した形状のピンホールを設けたものであることを特徴とする請求項４記載のＸ線検査方法。 The reflected X-ray collimator, the plate thickness direction of the plate to the plate surface thickness that fully shield the incident X-rays of the subject side as the axis X-ray two-dimensional detector and the opposite direction The X-ray inspection method according to claim 4 , wherein a pinhole having a shape in which two conical shapes extending toward the surface are combined is provided. 前記反射Ｘ線コリメータを移動させる工程をさらに有することを特徴とする請求項４または請求項５記載のＸ線検査方法。 Claim 4 or claim 5 X-ray inspection method according to further comprising the step of moving the reflected X-ray collimator.
JP2006053661A 2006-02-28 2006-02-28 X-ray inspection apparatus and X-ray inspection method Expired - Fee Related JP4987321B2 (en)

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